Heating furnace

Abstract

The utility model provides a heating furnace. The heating furnace comprises a shell; the vacuum cavity is arranged in the shell, and the vacuum cavity is used for accommodating the flaky material; the fixing assembly is arranged on the outer side of the vacuum cavity; the heating assembly is arranged around the outer side of the vacuum cavity and is connected to the fixing assembly; the distance between the upper portion of the heating assembly and the vacuum cavity is a first distance, the distance between the lower portion of the heating assembly and the vacuum cavity is a second distance, and the first distance is larger than the second distance. When the heating assembly is used for heating, the lower part of the heating assembly is closer to the vacuum cavity than the upper part, so that the heating temperature of the lower part of the vacuum cavity is higher than that of the upper part of the vacuum cavity, the temperature nonuniformity caused by upward flowing of hot air is compensated, and the temperature of the upper part of the reaction space is closer to that of the lower part of the reaction space; and the heating uniformity of the flaky material is improved, so that the processing quality is improved.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic material processing, and in particular to a heating furnace. Background Art

[0002] At present, photovoltaic materials or semiconductors are widely used in the new energy industry. In the processing of photovoltaic materials or semiconductors, chemical vapor deposition (CVD) technology is usually used for chemical treatment to apply photovoltaic materials or semiconductors to products. In the processing of chemical vapor deposition technology, it is usually necessary to put the material into a heating device and react under certain temperature and pressure conditions.

[0003] In the related art, a horizontal heating furnace is one of the commonly used heating equipment, but the horizontal heating furnace has the problem of uneven upper and lower temperatures during heating, which affects the processing quality. Utility Model Content

[0004] In view of the above, it is necessary to provide a heating furnace to solve the above defects.

[0005] An embodiment of the present application provides a heating furnace, comprising: an outer shell; a vacuum chamber, arranged in the outer shell, and the vacuum chamber is used to accommodate sheet materials; a fixing component, arranged on the outside of the vacuum chamber; a heating component, arranged around the outside of the vacuum chamber and connected to the fixing component; wherein the distance between the upper part of the heating component and the vacuum chamber is a first distance, the distance between the lower part of the heating component and the vacuum chamber is a second distance, and the first distance is greater than the second distance.

[0006] In some embodiments, the heating component includes a power module and an electromagnetic induction component, and the power module is electrically connected to the electromagnetic induction component; wherein the vacuum chamber is made of metal, and the electromagnetic induction component and the vacuum chamber are insulated.

[0007] In some embodiments, the fixing assembly includes a first fixing member and a second fixing member, the first fixing member is arranged at the upper part of the vacuum chamber, and the second fixing member is arranged at the lower part of the vacuum chamber; the first fixing member and the second fixing member both include a fixing part and a connecting part, the fixing part is connected to the vacuum chamber, and the connecting part is connected to the electromagnetic induction member; the distance between the fixing part of the first fixing member and the connecting part of the first fixing member is a first distance, the distance between the fixing part of the second fixing member and the connecting part of the second fixing member is a second distance, and the first distance is greater than the second distance.

[0008] In some embodiments, the fixing assembly further includes at least one third fixing member, and the first fixing member, the second fixing member and the third fixing member are spaced apart and distributed in the circumferential direction of the vacuum chamber.

[0009] In some embodiments, the connection portion is provided with a limiting hole, the limiting hole penetrates the connection portion in the circumferential direction of the vacuum cavity, and the electromagnetic induction component is penetrated through the limiting hole.

[0010] In some embodiments, the electromagnetic induction component is provided with a mounting column; the connecting portion is located on a side of the electromagnetic induction component away from the vacuum cavity, the connecting portion is provided with a positioning hole, the positioning hole passes through the connecting portion in the radial direction of the vacuum cavity, and the mounting column is passed through the positioning hole.

[0011] In some embodiments, the fixing assembly further includes a locking nut, and a threaded surface is provided on the circumferential side of the mounting column; one end of the mounting column passes through the positioning hole and is exposed at the connecting portion, and is threadedly connected to the locking nut.

[0012] In some embodiments, a cooling groove is provided inside the electromagnetic induction component, and the cooling groove is used to contain a cooling liquid.

[0013] In some embodiments, the vacuum chamber is provided with a plurality of heating zones along the length direction, and each heating zone is provided with a heating assembly; the heating furnace further comprises a plurality of temperature sensors, and the plurality of temperature sensors are respectively provided in the plurality of heating zones.

[0014] In some embodiments, the heating furnace further includes a heat-insulating layer, and the heat-insulating layer is disposed on the outside of the vacuum cavity.

[0015] In the heating furnace provided by the present application, when the heating component is heating, the lower part of the heating component is closer to the vacuum chamber than the upper part, so that the heat generated in the lower part of the vacuum chamber is faster than the heat generated in the upper part of the vacuum chamber, compensating for the temperature unevenness caused by the upward flow of hot air, making the temperature of the upper part of the reaction space closer to the temperature of the lower part, improving the heating uniformity of the sheet material, and thus improving the processing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of a heating furnace according to the first embodiment of the present application.

[0017] Figure 2 This is a schematic diagram of the state of the heating furnace of the first embodiment of the present application when heating a sheet material.

[0018] Figure 3 This is a schematic diagram of the distribution of heating zones according to the first embodiment of the present application.

[0019] Figure 4 This is a schematic structural diagram of a fixing member according to the first embodiment of the present application.

[0020] Figure 5 This is a schematic diagram of the distribution of the first fixing member, the second fixing member and the third fixing member of the first embodiment of the present application.

[0021] Figure 6This is a schematic structural diagram of a heating furnace according to a second embodiment of the present application.

[0022] Figure 7 This is a schematic structural diagram of the electromagnetic induction component of the second embodiment of the present application.

[0023] Figure 8 It is a cross-sectional schematic diagram of the electromagnetic induction element of the second embodiment of the present application.

[0024] Fig. 9 This is a schematic structural diagram of a fixing member according to a second embodiment of the present application.

[0025] Fig.10 This is a schematic diagram of the state of the heating furnace of the second embodiment of the present application when heating a sheet material.

[0026] Main component symbols

[0027] 10. Shell; 20. Vacuum chamber; 21. Reaction space; 22. Heating zone; 30. Fixing assembly; 31. First fixing member; 32. Second fixing member; 33. Third fixing member; 34. Fixing portion; 341. Limiting space; 35. Connecting portion; 351. Limiting hole; 352. Positioning hole; 40. Heating assembly; 41. Power module; 42. Electromagnetic induction member; 421. Cooling trough; 422. Mounting column; 423. Locking nut; 50. Temperature sensor; 60. Insulation layer; 100. Sheet material. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0029] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0030] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0031] In the related art, a horizontal heating furnace includes an outer shell, a heating wire, and a vacuum chamber which are sequentially distributed from the outside to the inside, wherein the vacuum chamber as a whole extends in a horizontal direction, and a plurality of heating wires are arranged, each of which is surrounded by the outside of the vacuum chamber, and the plurality of heating wires are distributed along the length direction of the vacuum chamber.

[0032] In actual processing, the material needs to be fixed in the middle of the reaction space, and the heating wire emits heat after being energized, and the heat is transferred to the material inside through the vacuum cavity. However, during the heating process, the density of hot air in the vacuum cavity is greater than that of cold air, resulting in the phenomenon of hot air flowing upward, causing the temperature of the upper part of the vacuum cavity to rise faster than that of the lower part of the vacuum cavity, resulting in uneven temperatures between the upper and lower parts, which affects the heating uniformity and processing quality of the material.

[0033] On the other hand, in the related art, a resistive heating wire is usually used to heat the quartz vacuum chamber, which has a slow heating speed and a large thermal hysteresis. After long-term use, the inner wall of the vacuum chamber will be coated, and the light transmittance will be reduced, which reduces the heating efficiency. At the same time, the quartz vacuum chamber may explode and break in a high temperature environment, and the residue left on the electric heating wire is difficult to clean and needs to be replaced, which increases the production cost.

[0034] To this end, the present application provides a heating furnace, which has the effect of uniform heating and improving processing quality. The heating furnace can be used to chemically treat sheet materials, the sheet materials include but are not limited to silicon sheets, silicon carbide sheets or wafers, etc., and the chemical treatment includes but is not limited to chemical vapor deposition treatment or diffusion process treatment.

[0035] Figure 1 This is a schematic structural diagram of a heating furnace according to the first embodiment of the present application. Figure 2 This is a schematic diagram of the state of the heating furnace of the first embodiment of the present application when heating a sheet material.

[0036] like Figure 1 and Figure 2 As shown, the heating furnace includes a shell 10, a vacuum chamber 20, a fixing assembly 30 and a heating assembly 40, wherein the vacuum chamber 20 is arranged inside the shell 10, and a distance is left between the outer side of the vacuum chamber 20 and the inner side of the shell 10. In this embodiment, the shell 10 is made of a weak magnetic material, preferably a weak magnetic insulating material, such as a plastic material.

[0037] The vacuum chamber 20 is in a cylindrical shape as a whole, and a reaction space 21 is formed inside the vacuum chamber 20, and the reaction space 21 is used to accommodate the sheet material 100. For the convenience of description, the direction of the heating furnace in normal use is used as a direction reference, that is, the vacuum chamber 20 is placed in a horizontal direction as an example, and the length direction (or axial direction) of the vacuum chamber 20 is the horizontal direction.

[0038] For example, the sheet material 100 can be loaded on a carrier such as a boat. The vacuum chamber 20 is a chamber structure that can be opened and closed. Before processing, the vacuum chamber 20 can be opened, and the boat can be fixed in the reaction space 21 by a fixing mechanism. After the boat is fixed, the sheet material 100 is located at the center of the vacuum chamber 20, and then the vacuum chamber 20 is closed, and the vacuum chamber 20 is evacuated for vacuum treatment.

[0039] The fixing assembly 30 is disposed outside the vacuum cavity 20 and connected to the heating assembly 40. The fixing assembly 30 is used to relatively fix the vacuum cavity 20 and the heating assembly 40. The heating assembly 40 is used to heat the sheet material 100 in the vacuum cavity 20. The heating assembly 40 is disposed around the outside of the vacuum cavity 20, and the heating assembly 40 is distributed along the length direction of the vacuum cavity 20 and covers the vacuum cavity 20.

[0040] A distance is set between the heating component 40 and the vacuum chamber 20, wherein the distance between the upper part of the heating component 40 and the vacuum chamber 20 is a first distance T1, and the distance between the lower part of the heating component 40 and the vacuum chamber 20 is a second distance T2, and the first distance T1 is greater than the second distance T2.

[0041] By using the heating furnace provided in the present application, when the heating component 40 is heated, the lower portion of the heating component 40 is closer to the vacuum chamber 20 than the upper portion, so that the heat generated in the lower portion of the vacuum chamber 20 is faster than the heat generated in the upper portion of the vacuum chamber 20, compensating for the uneven temperature caused by the upward flow of hot air, making the temperature of the upper portion of the reaction space 21 closer to the temperature of the lower portion, thereby improving the heating uniformity of the sheet material 100 and thereby improving the processing quality.

[0042] In this embodiment, the cross-sections of the vacuum chamber 20 and the heating assembly 40 in the vertical direction are both circular, wherein the outer ring radius of the vacuum chamber 20 is smaller than the inner ring radius of the heating assembly 40, and the height of the center of the vacuum chamber 20 is lower than the height of the center of the heating assembly 40, so that the shortest distance between the upper part of the heating assembly 40 and the upper part of the vacuum chamber 20 is the first spacing T1, and the shortest distance between the lower part of the heating assembly 40 and the lower part of the vacuum chamber 20 is the second spacing T2. It can be understood that the specific values ​​of the first spacing T1 and the second spacing T2 can be configured according to actual needs, and this application does not limit this.

[0043] In this embodiment, the heating furnace is heated by electromagnetic induction. Specifically, the vacuum chamber 20 is made of metal, including but not limited to carbon steel, stainless steel, etc. The heating assembly 40 includes a power module 41 and an electromagnetic induction component 42, the power module 41 is electrically connected to the electromagnetic induction component 42, the electromagnetic induction component 42 is annular and surrounds the vacuum chamber 20, and the vacuum chamber 20 and the electromagnetic induction component 42 are insulated.

[0044] In this embodiment, the electromagnetic induction element 42 is an induction coil wound with oxygen-free copper wire (including but not limited to mica wire), the induction coil is welded with a lead wire, and is electrically connected to the power module 41 through the lead wire. The power module 41 is a high-frequency power control box, wherein high frequency refers to a frequency above 10000HZ.

[0045] In practical applications, the power module 41 can provide high-frequency current to the electromagnetic induction element 42. The electromagnetic induction element 42 generates a changing magnetic field under the action of the high-frequency current. The vacuum cavity 20 made of metal generates an induced current under the action of the changing magnetic field, and generates Joule heat, thereby providing a sufficient reaction temperature for the sheet material 100 in the reaction space 21. In addition, since the lower part of the electromagnetic induction element 42 is closer to the vacuum cavity 20 than the upper part, the electromagnetic wires and induced electromotive force passing through the lower part of the vacuum cavity 20 are more than those in the upper part, so that the induced current generated in the lower part of the vacuum cavity 20 is larger than that in the upper part, and the Joule heat generated is also more, so that the heat generated in the lower part of the vacuum cavity 20 is faster than that generated in the upper part of the vacuum cavity 20, thereby compensating for the uneven temperature caused by the upward flow of hot air.

[0046] It can be understood that the electromagnetic induction element 42 relies on electromagnetic induction to heat the metal vacuum cavity 20, with a fast heating speed and high production efficiency. After long-term operation, the inner wall of the vacuum cavity 20 will be coated with a film, but induction heating has a skin effect, and the induced current is concentrated on the outer layer of the vacuum cavity 20. The heat of the inner surface is carried out by the heat conduction of the inner surface. The thickness of the coating on the inner wall of the vacuum cavity 20 has little effect on the heat conduction, avoiding the method of heating the quartz vacuum cavity with a resistive heating wire in the related technology. Since the inner wall of the quartz vacuum cavity will be coated, the light transmittance is poor and the heating efficiency is reduced. In addition, the metal vacuum cavity 20 is not prone to tube explosion and shattering in a high temperature environment, which reduces the later maintenance cost of the equipment and improves production efficiency.

[0047] Figure 3 This is a schematic diagram of the distribution of heating zones according to the first embodiment of the present application.

[0048] like Figure 2 and Figure 3 As shown, in this embodiment, there are multiple electromagnetic induction members 42, and the multiple electromagnetic induction members 42 are spaced apart along the length direction of the vacuum chamber 20. The vacuum chamber 20 is provided with multiple heating zones 22 along the length direction, and each heating zone 22 is distributed with electromagnetic induction members 42, so that each heating zone 22 can generate Joule heat. It can be understood that the number and length of the heating zones 22 can be configured according to actual needs, and this application does not limit this.

[0049] The heating furnace also includes a plurality of temperature sensors 50, which are respectively arranged in a plurality of heating zones 22. The plurality of temperature sensors 50 can detect the actual temperature of each heating zone 22 in real time. It can be understood that each heating zone 22 can be configured with one or more temperature sensors 50, and the number and position of the temperature sensors 50 can be configured according to actual needs, and the present application does not limit this. Exemplarily, each heating zone 22 is configured with 4 temperature sensors 50, and each temperature sensor 50 is spaced around the inner wall circumference of the vacuum chamber 20, and the temperature sensor 50 can be a thermocouple.

[0050] There are multiple power modules 41, and the multiple power modules 41 correspond to the multiple heating zones 22. The multiple power modules 41 are electrically connected to the multiple electromagnetic induction elements 42 distributed in the corresponding heating zones 22. In addition, the multiple power modules 41 are electrically connected to the temperature sensors 50 arranged in the corresponding heating zones 22.

[0051] In actual operation, the power module 41 can output current of a specified frequency to the multiple electromagnetic induction components 42 distributed in the corresponding heating zone 22, so that the multiple electromagnetic induction components 42 generate a magnetic field of a specified strength, thereby controlling the heat generated by the vacuum chamber 20. The power module 41 can also adjust the frequency of the current output to the corresponding electromagnetic induction component 42 according to the temperature data fed back by the temperature sensor 50 and the set target temperature value, so that the actual temperature of the heating zone 22 is maintained at the target temperature value. In addition, the multiple power modules 41 can respectively control each electromagnetic induction component 42 distributed in the multiple heating zones 22 to achieve zone control.

[0052] Figure 4 This is a schematic structural diagram of the first fixing member of the first embodiment of the present application. Figure 5 This is a schematic diagram of the distribution of the first fixing member, the second fixing member and the third fixing member of the first embodiment of the present application.

[0053] like Figure 2 , Figure 4 and Figure 5As shown, the fixing assembly 30 includes a first fixing member 31 and a second fixing member 32, wherein the first fixing member 31 is disposed at the upper portion of the vacuum chamber 20, and the second fixing member 32 is disposed at the lower portion of the vacuum chamber 20. The first fixing member 31 and the second fixing member 32 both include a fixing portion 34 and a connecting portion 35, wherein the fixing portion 34 is connected to the vacuum chamber 20, and the connecting portion 35 is connected to the electromagnetic induction member 42. The first fixing member 31 and the second fixing member 32 are connected between the electromagnetic induction member 42 and the vacuum chamber 20, and support and fix the electromagnetic induction member 42 and the vacuum chamber 20, so that the annular inner ring of the electromagnetic induction member 42 is spaced from the annular outer ring of the vacuum chamber 20 to maintain a specified spacing, so as to form a first spacing T1 and a second spacing T2 between the electromagnetic induction member 42 and the vacuum chamber 20.

[0054] The distance between the fixing portion 34 of the first fixing member 31 and the connecting portion 35 of the first fixing member 31 is a first distance, and the distance between the fixing portion 34 of the second fixing member 32 and the connecting portion 35 of the second fixing member 32 is a second distance, and the first distance is greater than the second distance. In this way, the distance between the electromagnetic induction member 42 and the vacuum chamber 20 separated by the first fixing member 31 is shorter, and the distance between the electromagnetic induction member 42 and the vacuum chamber 20 separated by the second fixing member 32 is longer, so that the first interval T1 is greater than the second interval T2.

[0055] It can be understood that the first distance of the first fixing member 31 and the second distance of the second fixing member 32 limit the specific values ​​of the first spacing T1 and the second spacing T2 between the electromagnetic induction member 42 and the vacuum chamber 20. In practical applications, the specific values ​​of the first spacing T1 and the second spacing T2 can be set according to the degree of compensation for the temperature unevenness caused by the upward flow of hot air, and the first distance of the first fixing member 31 and the second distance of the second fixing member 32 can also be adaptively adjusted according to the specific values ​​of the first spacing T1 and the second spacing T2, and the present application does not limit this.

[0056] In this embodiment, the fixing assembly 30 further includes at least one third fixing member 33, and the first fixing member 31, the second fixing member 32 and the third fixing member 33 are spaced apart in the circumferential direction of the vacuum chamber 20. The third fixing member 33 also includes a fixing portion 34 and a connecting portion 35, and the third fixing member 33 is connected to the vacuum chamber 20 through the fixing portion 34, and is connected to the electromagnetic induction member 42 through the connecting portion 35.

[0057] It can be understood that the first fixing member 31, the second fixing member 32 and the third fixing member 33 form a multi-point support structure distributed around the vacuum chamber 20 to improve the stability between the electromagnetic induction members 42 and prevent the vacuum chamber 20 and the electromagnetic induction members 42 from relative displacement resulting in a change in the distance between the two.

[0058] Exemplarily, the number of the third fixing members 33 is 2, and the first fixing member 31, the second fixing member 32 and the two third fixing members 33 are distributed in the upper, lower, left and right directions relative to the vacuum chamber 20. In other embodiments, the number of the third fixing members 33 may also be 1, and the first fixing member 31, the second fixing member 32 and the third fixing member 33 are distributed in a triangular shape relative to the vacuum chamber 20, that is, the second fixing member 32 and the third fixing member 33 are respectively located at the lower left and lower right of the first fixing member 31. It can be understood that the specific number of the third fixing members 33 can be configured according to the required fixing strength between the vacuum chamber 20 and the electromagnetic induction member 42, and the distribution direction of the third fixing members 33 can also be adaptively adjusted, and the present application does not limit this.

[0059] In this embodiment, the first fixing member 31, the second fixing member 32 and the third fixing member 33 are all in the shape of long strips, and the width directions of the first fixing member 31, the second fixing member 32 and the third fixing member 33 are all arranged in a radial direction of the vacuum chamber 20, and the length directions of the first fixing member 31, the second fixing member 32 and the third fixing member 33 are all arranged in a length direction of the vacuum chamber 20. The first fixing member 31, the second fixing member 32 and the third fixing member 33 form a fixing portion 34 on the side facing the vacuum chamber 20, and the first fixing member 31, the second fixing member 32 and the third fixing member 33 form a connecting portion 35 on the side facing away from the vacuum chamber 20.

[0060] In this embodiment, the fixing portion 34 can be detachably fixed to the vacuum chamber 20 to facilitate the user to replace the first fixing member 31, the second fixing member 32 or the third fixing member 33, thereby completing the disassembly and assembly of the electromagnetic induction member 42, which is convenient for the later maintenance of the heating furnace.

[0061] Exemplarily, hooks (not shown) are respectively provided at both ends of the vacuum chamber 20. Through holes (not shown) are respectively provided at both ends of the fixing portion 34 for the hooks to pass through. By passing the hook through the through hole of the fixing portion 34, the fixing portion 34 can be suspended and fixed to the vacuum chamber 20. When the fixing portion 34 needs to be disassembled, the fixing portion 34 can be removed from the hook. Among them, the hook can be a structure formed by winding a high temperature resistant wire such as a quartz wire, a high silica wire, etc. through the through hole.

[0062] In other embodiments, the fixing portion 34 can also be detachably mounted on the vacuum chamber 20 by bolting, clamping, etc., to achieve the effect of convenient disassembly and assembly, and the present application does not limit this. In other embodiments, the fixing portion 34 can also be directly bonded to the vacuum chamber 20 by high-temperature glue.

[0063] In this embodiment, the connection portion 35 is provided with a limiting hole 351. The limiting hole 351 penetrates both sides of the connection portion 35 in the circumferential direction of the vacuum chamber 20, and the electromagnetic induction component 42 is penetrated through the limiting hole 351. The limiting hole 351 limits the electromagnetic induction component 42 in the radial direction and the length direction of the vacuum chamber 20 at the same time, so that the electromagnetic induction component 42 and the vacuum chamber 20 maintain a specified spacing and are relatively fixed.

[0064] Among them, the limiting holes 351 of the first fixing member 31, the limiting holes 351 of the second fixing member 32 and the limiting holes 351 of the third fixing member 33 are spaced apart in the circumferential direction of the vacuum chamber 20, so that the electromagnetic induction member 42 can be respectively penetrated through multiple limiting holes 351 in the circumferential direction of the vacuum chamber 20, so as to limit and fix the electromagnetic induction member 42 in different directions (such as up, down, left and right), and make each part of the electromagnetic induction member 42 maintain a specified distance from the vacuum chamber 20.

[0065] When installing the coil-shaped electromagnetic induction component 42, the first fixing component 31, the second fixing component 32 and the third fixing component 33 can be fixed to the vacuum chamber 20, and then the electromagnetic induction component 42 is respectively passed through the limiting holes 351 of the first fixing component 31, the second fixing component 32 and the third fixing component 33 for winding.

[0066] In this embodiment, the connecting portion 35 is provided with a plurality of limiting holes 351, and the plurality of limiting holes 351 are spaced apart in the length direction of the connecting portion 35, and the plurality of limiting holes 351 correspond to the plurality of electromagnetic induction components 42, so that the same connecting portion 35 can simultaneously limit and fix the plurality of electromagnetic induction components 42 through the plurality of limiting holes 351.

[0067] In this embodiment, the vacuum chamber 20 is detachably fixed to the housing 10. Flanges are provided at both ends of the vacuum chamber 20, and the flanges are fixedly welded to the vacuum chamber 20. Mounting plates corresponding to the flanges are provided at both ends of the housing 10, and the flanges are bolted and fixed to the corresponding mounting plates, so that the vacuum chamber 20 is detachably fixed to the housing 10.

[0068] It can be understood that the actual heat source of the heating furnace is the vacuum chamber 20. When the vacuum chamber 20 is abnormal, the vacuum chamber 20 can be removed from the housing 10 for maintenance, thereby reducing the difficulty and cost of subsequent maintenance of the equipment.

[0069] In this embodiment, the heating furnace further includes a heat-insulating layer 60, which is disposed outside the vacuum cavity 20. The heat-insulating layer 60 has a heat-insulating effect on the vacuum cavity 20, reduces heat loss, and improves heat utilization. Exemplarily, the heat-insulating layer 60 is formed by filling between the shell 10 and the vacuum cavity 20 with a heat-insulating material, and the heat-insulating material includes but is not limited to aluminum silicate.

[0070] Figure 6 This is a schematic structural diagram of a heating furnace according to a second embodiment of the present application. Figure 7 This is a schematic structural diagram of the electromagnetic induction component of the second embodiment of the present application. Figure 8 It is a cross-sectional schematic diagram of the electromagnetic induction element of the second embodiment of the present application.

[0071] like Figure 6 , Figure 7 and Figure 8 As shown, in this embodiment, the electromagnetic induction element 42 is tubular, and illustratively, the electromagnetic induction element 42 is a circular copper tube, and the cross section of the copper tube can be square or circular. The copper tube is welded with a lead, and the copper tube is electrically connected to the power module 41 through the lead.

[0072] A cooling groove 421 is formed inside the electromagnetic induction component 42, and the cooling groove 421 is used to contain a coolant. The cooling groove 421 can be connected to a coolant supply device (not shown in the figure) through a pipeline structure. When the electromagnetic induction component 42 needs to be cooled, the coolant supply device can transport the coolant to the cooling groove 421, and the coolant flows through the inside of the electromagnetic induction component 42 to take away some heat, thereby achieving a cooling effect.

[0073] The electromagnetic induction component 42 is provided with a plurality of mounting posts 422, and the mounting posts 422 extend along the radial direction of the electromagnetic induction component 42. Exemplarily, the mounting posts 422 are fixed to the outer side of the electromagnetic induction component 42 by welding.

[0074] Fig. 9 This is a schematic structural diagram of the first fixing member of the second embodiment of the present application. Fig.10 This is a schematic diagram of the state of the heating furnace of the second embodiment of the present application when heating a sheet material.

[0075] like Figure 8 , Fig. 9 and Fig.10 As shown, in this embodiment, the first fixing member 31, the second fixing member 32 and the third fixing member 33 all include a fixing portion 34 and a connecting portion 35. The connecting portion 35 extends along the length direction of the vacuum chamber 20, and the connecting portion 35 is provided with a plurality of positioning holes 352, which penetrate the connecting portion 35 in the radial direction of the vacuum chamber 20. The plurality of positioning holes 352 are distributed at intervals in the length direction of the connecting portion 35.

[0076] The fixing portion 34 is disposed on a side of the connecting portion 35 facing the vacuum chamber 20, and the fixing portion 34 extends along the radial direction of the vacuum chamber 20. The length of the fixing portion 34 of the first fixing member 31 forms a first distance, and the length of the fixing portion 34 of the second fixing member 32 forms a second distance. It can be understood that the lengths of the fixing portions 34 of the first fixing member 31, the second fixing member 32, and the third fixing member 33 can be configured according to the specified spacing between the electromagnetic induction member 42 and the vacuum chamber 20.

[0077] There are multiple fixing parts 34, and the multiple fixing parts 34 are spaced apart in the length direction of the connecting part 35, and a limited space 341 is formed between two adjacent fixing parts 34. The multiple fixing parts 34 and the multiple positioning holes 352 are staggered, so that the multiple positioning holes 352 are respectively connected to the limited spaces 341 between the multiple fixing parts 34.

[0078] In this embodiment, the spacing between two adjacent fixing parts 34 is greater than or equal to the width of the electromagnetic induction member 42. A plurality of mounting posts 422 are distributed corresponding to the first fixing member 31, the second fixing member 32 and the third fixing member 33, and the positioning holes 352 are all adapted to the mounting posts 422. A plurality of electromagnetic induction members 42 are accommodated in a plurality of limiting spaces 341, the mounting posts 422 of the electromagnetic induction members 42 are penetrated through the corresponding positioning holes 352, and the connecting part 35 is supported on the side of the electromagnetic induction member 42 away from the vacuum chamber 20. The electromagnetic induction member 42 is relatively fixed to the vacuum chamber 20 by the stop of the connecting part 35 on the electromagnetic induction member 42 and the positioning of the positioning hole 352 on the mounting posts 422.

[0079] In this embodiment, one end of the mounting post 422 passes through the positioning hole 352 and is exposed to the connecting portion 35, and a threaded surface is provided on the circumference of the mounting post 422. The connecting portion 35 is also provided with a locking nut 423, which is adapted to the mounting post 422. The locking nut 423 is threadedly connected to one end of the mounting post 422 exposed to the connecting portion 35, and the electromagnetic induction component 42 is pressed against the connecting portion 35. The mounting post 422 is locked to the positioning hole 352 by the locking nut 423, so that the multiple mounting posts 422 of the electromagnetic induction component 42 are respectively fixed to the connecting portion 35.

[0080] In this way, the fixing parts 34 of the first fixing part 31, the second fixing part 32 and the third fixing part 33 limit the electromagnetic induction part 42 in the length direction of the vacuum chamber 20, the connecting parts 35 of the first fixing part 31, the second fixing part 32 and the third fixing part 33 limit the electromagnetic induction part 42 in the radial direction of the vacuum chamber 20, and the positioning holes 352 of the first fixing part 31, the second fixing part 32 and the third fixing part 33 limit the electromagnetic induction part 42 in the circumferential direction of the vacuum chamber 20. At the same time, the multi-point support structure of the first fixing part 31, the second fixing part 32 and the third fixing part 33 distributed around the electromagnetic induction part 42 improves the stability of the electromagnetic induction part 42.

[0081] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.

Claims

1. A heating furnace, characterized in that: include: shell; A vacuum cavity is disposed in the housing, and the vacuum cavity is used to accommodate sheet materials; A fixing assembly is arranged outside the vacuum chamber; A heating component is arranged around the outer side of the vacuum chamber and connected to the fixing component; wherein the distance between the upper part of the heating component and the vacuum chamber is a first distance, the distance between the lower part of the heating component and the vacuum chamber is a second distance, and the first distance is greater than the second distance.

2. The heating furnace according to claim 1, characterized in that The heating component includes a power module and an electromagnetic induction component, and the power module is electrically connected to the electromagnetic induction component; wherein the vacuum cavity is made of metal, and the electromagnetic induction component is insulated from the vacuum cavity.

3. The heating furnace according to claim 2, characterized in that: The fixing assembly includes a first fixing member and a second fixing member, wherein the first fixing member is arranged at the upper part of the vacuum chamber, and the second fixing member is arranged at the lower part of the vacuum chamber; The first fixing member and the second fixing member both include a fixing portion and a connecting portion, the fixing portion is connected to the vacuum chamber, and the connecting portion is connected to the electromagnetic induction member; The distance between the fixing portion of the first fixing member and the connecting portion of the first fixing member is a first distance, the distance between the fixing portion of the second fixing member and the connecting portion of the second fixing member is a second distance, and the first distance is greater than the second distance.

4. The heating furnace according to claim 3, characterized in that: The fixing assembly further includes at least one third fixing member, and the first fixing member, the second fixing member and the third fixing member are spaced apart and distributed in the circumferential direction of the vacuum chamber.

5. The heating furnace according to claim 3, characterized in that: The connection portion is provided with a limiting hole, the limiting hole penetrates the connection portion in the circumferential direction of the vacuum cavity, and the electromagnetic induction component is penetrated through the limiting hole.

6. The heating furnace according to claim 3, characterized in that: The electromagnetic induction component is provided with a mounting column; the connecting portion is located at a side of the electromagnetic induction component away from the vacuum chamber, the connecting portion is provided with a positioning hole, the positioning hole passes through the connecting portion in the radial direction of the vacuum chamber, and the mounting column is passed through the positioning hole.

7. The heating furnace according to claim 6, characterized in that The fixing assembly also includes a locking nut, and a threaded surface is provided on the circumferential side of the mounting post; one end of the mounting post passes through the positioning hole and is exposed to the connecting portion, and is threadedly connected to the locking nut.

8. The heating furnace according to claim 2, characterized in that: A cooling groove is arranged inside the electromagnetic induction component, and the cooling groove is used to contain cooling liquid.

9. The heating furnace according to claim 2, characterized in that: The vacuum chamber is provided with a plurality of heating zones along the length direction, and each of the heating zones is provided with the heating assembly; the heating furnace further comprises a plurality of temperature sensors, and the plurality of temperature sensors are respectively provided in the plurality of heating zones.

10. The heating furnace according to claim 1, characterized in that The heating furnace further comprises a heat-insulating layer, and the heat-insulating layer is arranged outside the vacuum cavity.

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