Quartz boat precision detection device

By designing a quartz boat accuracy detection device that includes the benchmark board, clamp component, guide support, and thimble, the problem of poor generalization and detection data in existing technologies is solved. Anti -testing reduces the complexity of on -site operations.

CN222418842UActive Publication Date: 2025-01-28DONGFANG HUANSHENG PHOTOVOLTAIC (JIANGSU) CO LTD
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Patent Information

Application Number
CN202421225909.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-30
Publication Date
2025-01-28
Estimated Expiration
2034-05-30

AI Technical Summary

Technical Problem

The existing quartz boat detection devices are poorly versatile and require different standard parts to be replaced to adapt to quartz boats of different sizes. The detection data is not intuitive and it is easy to cause fragmentation due to cards and wrong teeth, which increases the complexity of on-site operation.

Method used

A quartz boat accuracy detection device is designed, including the benchmark board, clamping component, guide support, and thimble. By setting the reference surface in advance, using clamping components to press the end surface of the quartz boat on the benchmark surface, and use the top needle to use the pin needle. Read the distance between the altitude and the benchmark surface with the ruler to achieve the detection of different sizes of quartz boats.

Benefits of technology

This device can directly detect the distance between the altitude and the reference surface of different sizes of the quartz boat. It is strong, and the detection data is intuitive. The number of fragments generated by the card and the wrong teeth will be reduced, and the operating efficiency is improved and the cost is reduced.

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Abstract

The utility model provides a quartz boat precision detection device, which relates to the technical field of quartz boat detection and comprises a datum plate, a clamping assembly, a guide support and an ejector pin. The reference plate and the clamping assembly are oppositely arranged at an interval, the reference plate is provided with a vertically-arranged reference surface, and the clamping assembly is used for pressing the end face of the quartz boat on the reference surface; the ejector pin is connected with the guiding support and has the freedom degree of moving in the X direction and the Y direction on the horizontal plane under guiding of the guiding support, and the guiding support comprises a ruler used for reading the distance between the ejector pin and the datum plane. The quartz boat precision detection device provided by the utility model is provided with the preset reference surface, can directly detect the distance between the tooth grooves on the quartz boats with different sizes and the reference surface, is strong in universality, is more visual in detection data, and reduces the number of fragments generated by cards and staggered teeth on site.
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Description

Technical Field

[0001] The utility model relates to the technical field of quartz boat detection, in particular to a quartz boat precision detection device. Background Art

[0002] In the photovoltaic industry, quartz boats are usually used as carriers for silicon wafers. There are multiple grooves on both sides of the quartz boat for limiting the position of the wafers. If there is a deviation in the size of the reference point of the quartz boat, misaligned teeth and jamming will occur after going online. Therefore, it is necessary to test the accuracy of the grooves of the quartz boat.

[0003] In the existing detection device, the detection arm is first limited to a standard height position by a standard part, and then the detection arm is horizontally aligned with the quartz boat to be detected to detect whether the tooth groove height of the quartz boat is consistent with the height of the detection arm, thereby realizing the detection of tooth groove accuracy. However, the existing detection device has poor versatility, and different standard parts need to be replaced for quartz boats of different sizes. Utility Model Content

[0004] The utility model aims to provide a quartz boat precision detection device, which has a pre-set reference surface and can directly detect the distance between the tooth grooves on quartz boats of different sizes and the reference surface. It has strong versatility, more intuitive detection data, and reduces the number of fragments generated on site due to carding and misaligned teeth.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] The utility model provides a quartz boat precision detection device, comprising a reference plate, a clamping assembly, a guide support and an ejector pin;

[0007] The reference plate and the clamping assembly are arranged relatively spaced apart, the reference plate has a vertically arranged reference surface, and the clamping assembly is used to press the end surface of the quartz boat onto the reference surface;

[0008] The ejector pin is connected to the guide support and has the freedom to move in the X direction and the Y direction along the horizontal plane under the guidance of the guide support. The guide support includes a ruler for reading the distance between the ejector pin and the reference surface.

[0009] Further, the clamping assembly includes at least one telescopic mechanism. When the clamping assembly includes a plurality of telescopic mechanisms, at least two telescopic mechanisms have different heights.

[0010] Furthermore, the clamping assembly includes three telescopic mechanisms that are arranged in sequence and at intervals, the telescopic mechanisms located on both sides are at the same height, and the telescopic mechanism located in the middle is lower than the telescopic mechanisms on both sides.

[0011] Further, the guide support includes a bracket assembly and a guide rail assembly;

[0012] The reference plate and the clamping assembly are located within the bracket assembly;

[0013] The guide rail assembly is installed at the top end of the bracket assembly, the ejector pin is connected to the guide rail assembly and has the freedom to move along the X direction and the Y direction under the guidance of the guide rail assembly and the ruler, the ruler is connected to the guide rail assembly, and the extension direction of the scale in the ruler is perpendicular to the reference plane.

[0014] Further, the support assembly includes a base and a top seat;

[0015] The reference plate and the clamping assembly are both connected to the base;

[0016] One side of the top seat is rotatably connected to the base, and the other side is detachably connected to the base. The top end of the top seat is connected to the guide rail assembly.

[0017] Furthermore, the bracket assembly also includes a driver, which is arranged between the base and the top seat, and is used to drive the top seat to rotate relative to the base.

[0018] Furthermore, the guide rail assembly includes a slider, a support seat and a mounting seat;

[0019] The slider is mounted on the top of the bracket assembly, the support seat is slidably matched with the slider along the X direction, the scale is fixedly connected to the support seat, and the mounting seat is slidably matched with the scale along the Y direction;

[0020] The ejector pin is connected to the mounting seat.

[0021] Furthermore, the ruler and the ejector pin are located on the same side of the mounting seat.

[0022] Further, the support seat includes a first support plate and a second support plate, the first support plate slidingly cooperates with the slider along the X direction, the second support plate is connected to the first support plate and protrudes from the first support plate along the X direction, and the scale is fixedly connected to the end of the second support plate protruding from the first support plate.

[0023] Furthermore, the mounting seat is provided with a through hole and a locking piece, the through hole extends along the Z direction, the through hole is slidably matched with the ejector pin, the locking piece is movably connected to the mounting seat, and the locking piece is used to adjust the friction between the ejector pin and the through hole.

[0024] The quartz boat precision detection device provided by the utility model can produce the following beneficial effects:

[0025] When the above-mentioned quartz boat precision detection device is working, the end face of the quartz boat can be first pressed against the reference surface by the clamping assembly, and the tooth groove precision of the quartz boat can be detected with the end face as the reference. Specifically, the ejector is moved in the X direction and the Y direction on the horizontal plane, so that the ejector is inserted into the first tooth groove on the quartz boat from the reference surface, and the distance between the ejector and the reference surface at this time is read by the ruler, and then the ejector is withdrawn from the first tooth groove, and the ejector is inserted into the last tooth groove on the quartz boat from the reference surface along the X direction and the Y direction, and the distance between the ejector and the reference surface at this time is read by the ruler. If the above two data meet the requirements, it is qualified, and if not, it is unqualified.

[0026] Compared with the prior art, the quartz boat precision detection device provided by the utility model has a pre-set reference surface. On this basis, the distance between the tooth grooves and the reference surface on quartz boats of different sizes can be directly detected. It has strong versatility, and the detection data is more intuitive, which reduces the number of fragments generated on site due to carding and misaligned teeth. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 A front view of a quartz boat precision detection device provided by an embodiment of the utility model;

[0029] Figure 2 A top view of a quartz boat precision detection device provided by an embodiment of the utility model;

[0030] Figure 3 A front view of a quartz boat provided by an embodiment of the utility model;

[0031] Figure 4 A right side view of a clamping assembly provided in an embodiment of the utility model;

[0032] Figure 5 A right side view of a quartz boat precision detection device provided by an embodiment of the utility model;

[0033] Figure 6 A left side view of a quartz boat precision detection device provided by an embodiment of the utility model;

[0034] Figure 7 A left view of a reference plate provided in an embodiment of the utility model.

[0035] Icons: 1-reference plate; 11-reference plane; 2-clamping assembly; 21-telescopic mechanism; 3-guide support; 31-ruler; 32-bracket assembly; 321-base; 322-top seat; 323-driver; 33-guide rail assembly; 331-slider; 332-support seat; 3321-first support plate; 3322-second support plate; 333-mounting seat; 3331-locking piece; 4-thimble; 5-quartz boat; 51-first end face; 52-second end face. DETAILED DESCRIPTION

[0036] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0037] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] The specific implementation of the present invention is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the present invention, and is not used to limit the present invention.

[0040] This embodiment provides a quartz boat precision detection device. Figure 1 and Figure 2 As shown, it includes a reference plate 1, a clamping assembly 2, a guide support 3 and an ejector pin 4;

[0041] The reference plate 1 and the clamping assembly 2 are arranged relatively spaced apart, the reference plate 1 has a vertically arranged reference surface 11, and the clamping assembly 2 is used to press the end surface of the quartz boat 5 onto the reference surface 11;

[0042] The ejector pin 4 is connected to the guide support 3 and has the freedom to move along the X direction and the Y direction on the horizontal plane under the guidance of the guide support 3. The guide support 3 includes a ruler 31 for reading the distance between the ejector pin 4 and the reference surface 11.

[0043] like Figure 3 As shown, when there is a deviation in the verticality between the first end face 51 and the second end face 52 of the quartz boat 5 or there is a deviation in the processing accuracy of the quartz boat 5 due to other reasons, the actual tooth groove position will deviate from the original preset position, and taking the second end face 52 as the reference plane, the farther the tooth groove is from the second end face 52, the greater the deviation from the original preset position. This makes it easy for the silicon wafer to be broken when the robot places the silicon wafer into the quartz boat 5. If the accuracy of the quartz boat 5 is not tested, the number of silicon wafer reworks will increase, and the cost of equipment debugging due to the poor accuracy of the quartz boat 5 will increase.

[0044] Reference Figure 1 and Figure 2 As shown, the quartz boat precision detection device provided in the above embodiment has a reference plate 1, and the second end surface 52 of the quartz boat 5 can be pressed against the reference surface 11 by the clamping assembly 2, and the tooth groove precision of the quartz boat can be detected with the second end surface 52 as the reference. Specifically, the ejector pin 4 is moved along the X direction and the Y direction on the horizontal plane, so that the ejector pin 4 is inserted into the first tooth groove closest to the upper end of the quartz boat from the reference surface 11, and the distance between the ejector pin 4 and the reference surface 11 at this time is read by the ruler 31, and then the ejector pin 4 is withdrawn from the first tooth groove, and the ejector pin 4 is inserted into the last tooth groove farthest from the upper end of the quartz boat from the reference surface 11 along the X direction and the Y direction, and the distance between the ejector pin 4 and the reference surface 11 at this time is read by the ruler 31. If the above two data meet the requirements, it is qualified, and if they do not meet the requirements, it is unqualified. After the above operation, the quartz boat 5 can be turned up and down, and the tooth groove at the lower end can be detected.

[0045] The quartz boat precision detection device provided in the above embodiment can directly detect the distance between the tooth grooves on quartz boats 5 of different sizes and the reference surface 11. It has strong versatility and more intuitive detection data, which reduces the number of fragments generated on site due to carding and misaligned teeth, improves work efficiency, and reduces work costs.

[0046] It can be understood that the X direction is perpendicular to the Y direction, the Y direction is perpendicular to the reference plane 11 , and both the X direction and the Y direction are perpendicular to the vertically extending Z direction.

[0047] The structure of the clamping assembly 2 is described in detail below:

[0048] In an optional embodiment, if Figure 1 and Figure 2 As shown, the clamping assembly 2 may include at least one telescopic mechanism 21. When the clamping assembly 2 includes a plurality of telescopic mechanisms 21, at least two telescopic mechanisms 21 have different heights.

[0049] When one telescopic mechanism 21 is configured, the cost of the detection device can be lowered. When multiple telescopic mechanisms 21 are configured, the multiple telescopic mechanisms 21 can press one end surface of the quartz boat 5 at different heights, thereby ensuring that the other end surface of the quartz boat 5 can be fully fitted with the reference surface 11.

[0050] In an optional embodiment, if Figure 4 As shown, the clamping assembly 2 includes three telescopic mechanisms 21 arranged in sequence and at intervals, the telescopic mechanisms 21 located on both sides are at the same height, and the telescopic mechanism 21 located in the middle is lower than the telescopic mechanisms 21 on both sides.

[0051] In the above embodiment, the telescopic mechanisms 21 on both sides can stably press the quartz boat 5 , and the telescopic mechanism 21 in the middle can increase the fit between the quartz boat 5 and the reference surface 11 , thereby ensuring stable and effective clamping of the quartz boat 5 .

[0052] It is understandable that if Figure 2 As shown, the three telescopic mechanisms 21 are projected in the vertical direction, and the arrangement direction of the projection plane is parallel to the reference plane 11 , so that the three telescopic mechanisms 21 can press the quartz boat 5 against the reference plane 11 together when they are extended synchronously.

[0053] The telescopic mechanism 21 may include structures such as a pneumatic cylinder, a hydraulic cylinder, and a linear motor.

[0054] In an optional embodiment, the telescopic mechanism 21 includes a pneumatic cylinder, and the telescopic mechanism 21 also includes a support frame connected to the pneumatic cylinder, so that the pneumatic cylinder is fixed at different heights.

[0055] The structure of the guide support 3 is described in detail below:

[0056] In an optional embodiment, the guide support 3 includes a bracket assembly 32 and a guide rail assembly 33, wherein:

[0057] The reference plate 1 and the clamping assembly 2 are located in the bracket assembly 32;

[0058] The guide rail assembly 33 is installed on the top of the bracket assembly 32. The bracket assembly 32 serves as a support seat for the guide rail assembly 33. The ejector pin 4 is connected to the guide rail assembly 33 and has the freedom to move along the X direction and the Y direction under the guidance of the guide rail assembly 33 and the ruler 31. The ruler 31 is connected to the guide rail assembly 33. The scale in the ruler extends along the Y direction, that is, the extension direction of the scale in the ruler is perpendicular to the reference plane 11.

[0059] In the above embodiment, the guide support 3 is provided with a bracket assembly 32, and the bracket assembly 32 can support the guide rail assembly 33, thereby facilitating the installation of the guide rail assembly 33. In addition, the reference plate 1 and the clamping assembly 2 are arranged in the bracket assembly 32, which can make the structure of the detection device more compact and facilitate the ejector pin 4 to perform precision detection on the quartz boat 5 between the lower reference plate 1 and the clamping assembly 2.

[0060] It should be noted that the top of the support assembly 32 adopts a frame structure, so that the fixing body 4 can be inserted into the support assembly 32 and inserted into the tooth groove on the quartz boat 5.

[0061] In a preferred embodiment, the 0 scale mark of the scale 31 faces the reference surface 11 along the Z direction.

[0062] In an optional embodiment, if Figure 1 As shown, the support assembly 32 includes a base 321 and a top seat 322, wherein:

[0063] The reference plate 1 and the clamping assembly 2 may be connected to the base 321 by means of bolts or other connecting members;

[0064] like Figure 5 and Figure 6 As shown, one side of the top seat 322 is rotatably connected to the base 321 , and the other side is detachably connected to the base 321 . The top end of the top seat 322 is connected to the guide rail assembly 33 .

[0065] In the above-mentioned support assembly 32 , the top seat 322 can rotate relative to the base 321 to realize the opening and closing of the support assembly 32 , so that it is convenient for personnel to place the quartz boat 5 between the reference plate 1 and the clamping assembly 2 .

[0066] In an optional embodiment, if Figure 5 As shown, one side of the top seat 322 is pivotally connected to the base 321, as shown in FIG. Figure 6 As shown, the other side of the top seat 322 is snap-connected with the base 321 . Specifically, a snap block may be provided at the bottom end of the top seat 322 . A snap slot is provided on the snap block, and a snap block for snapping into the snap slot is provided on the base 321 .

[0067] Of course, other connection methods can also be used to achieve a detachable connection between the other side of the top seat 322 and the base 321, such as connecting the top seat 322 and the base 321 by bolts, that is, any structure that can achieve a detachable connection between the two can be used.

[0068] In an optional embodiment, if Figure 1 As shown, the support assembly 32 further includes a driver 323 . The driver 323 is disposed between the base 321 and the top seat 322 . The driver 323 is used to drive the top seat 322 to rotate relative to the base 321 .

[0069] The arrangement of the driver 323 can automatically realize the rotation of the top seat 322 relative to the base 321 without manual operation, thus saving manpower and improving operation efficiency.

[0070] The driver 323 may be a pneumatic cylinder or a hydraulic cylinder. Figure 5 As shown, the driver 323 is preferably provided in two, and the two drivers are arranged relatively spaced apart.

[0071] In an optional embodiment, if Figure 5 and Figure 6 As shown, the guide rail assembly 33 includes a slider 331, a support seat 332 and a mounting seat 333, wherein:

[0072] The slider 331 can be fixedly installed on the top of the bracket assembly 32, the support seat 332 slides with the slider 331 along the X direction, the scale 31 is fixedly connected to the support seat 332, and the mounting seat 333 slides with the scale 31 along the Y direction; the ejector pin 4 is connected to the mounting seat 333.

[0073] It can be understood that the X direction is parallel to the reference plane 11, and the Y direction is perpendicular to the reference plane 11. When in use, the support seat 332 can be slid relative to the slider 331 along the X direction to achieve the ejector 4 to be inserted into or withdrawn from the tooth groove, and the mounting seat 333 can be slid relative to the scale 31 along the Y direction to achieve the ejector 4 to be away from or close to the reference plane 11.

[0074] The guide rail assembly has a simple structure and can realize the movement of the ejector pin 4 in the X direction and the Y direction, so that the ejector pin 4 can smoothly enter and exit the preset tooth groove.

[0075] In an optional embodiment, if Figure 6 As shown, in order to facilitate personnel to read the degree corresponding to the ejector pin 4 through the ruler 31 , the ruler 31 and the ejector pin 4 are located on the same side of the mounting seat 333 .

[0076] In an optional embodiment, if Figure 5As shown, the support seat 332 includes a first support plate 3321 and a second support plate 3322. The first support plate 3321 slides with the slider 331 along the X direction, the second support plate 3322 is fixedly connected to the first support plate 3321 and protrudes from the first support plate 3321 to the left along the X direction, and the scale 31 is fixedly connected to the end of the second support plate 3322 protruding from the first support plate 3321.

[0077] In the above embodiment, since the scale 31 is fixedly connected to the end of the second support plate 3322 protruding from the first support plate 3321, the scale 31 can protrude to the left from the first support plate 3321. Since the mounting seat 333 slides with the scale 31 along the Y direction, the mounting seat 333 can be located on the left side directly above the first support plate 3321, ensuring that the setting of the first support plate 3321 will not hinder the ejector pin 4 extending downward, and the layout is more reasonable.

[0078] In an optional embodiment, if Figure 5 As shown, the mounting seat 333 is provided with a through hole and a locking member 3331, the through hole extends along the Z direction, the through hole and the ejector pin 4 are slidably matched, the locking member 3331 is movably connected to the mounting seat 333, and the locking member 3331 is used to adjust the friction between the ejector pin 4 and the through hole.

[0079] When in use, the locking piece 3331 can be used to reduce the friction between the ejector pin 4 and the through hole. At this time, the height of the ejector pin 4 can be adjusted along the Z direction. After the adjustment is completed, the locking piece 3331 can be used to increase the friction between the ejector pin 4 and the through hole to lock the height of the ejector pin 4.

[0080] The above arrangement can make the testing device better adapt to quartz boats of different heights, so that the pointed bottom end of the ejector pin 4 can be inserted into the tooth groove.

[0081] Among them, the locking piece 3331 can be a bolt and the end of it can penetrate into the through hole and abut against the ejector pin 4. The bolt is threadedly matched with the mounting seat 333. The personnel can adjust the pressure between the ejector pin 4 and the through hole by rotating the locking piece 3331, and then adjust the friction between the two.

[0082] The structure of the reference plate 1 is described in detail below:

[0083] like Figure 7 As shown, the middle portion of the reference plate 1 has an escape opening for escaping the end structure of the quartz boat 5 .

[0084] The reference plate 1 can be fixedly connected to the guide support 3 by means of bolts or other structures.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A quartz boat precision detection device, characterized in that: It comprises a reference plate (1), a clamping assembly (2), a guide support (3) and an ejector pin (4); The reference plate (1) and the clamping assembly (2) are arranged relative to each other with a spacing therebetween; the reference plate (1) has a reference surface (11) arranged vertically; and the clamping assembly (2) is used to press the end surface of the quartz boat (5) onto the reference surface (11); The ejector pin (4) is connected to the guide support (3) and has the freedom to move in the X direction and the Y direction on the horizontal plane under the guidance of the guide support (3). The guide support (3) includes a ruler (31) for reading the distance between the ejector pin (4) and the reference surface (11).

2. The quartz boat precision detection device according to claim 1, characterized in that: The clamping assembly (2) comprises at least one telescopic mechanism (21); when the clamping assembly (2) comprises a plurality of telescopic mechanisms (21), at least two of the telescopic mechanisms (21) have different heights.

3. The quartz boat precision detection device according to claim 2, characterized in that: The clamping assembly (2) comprises three telescopic mechanisms (21) arranged in sequence and at intervals, the telescopic mechanisms (21) located on both sides are of the same height, and the telescopic mechanism (21) located in the middle is lower than the telescopic mechanisms (21) on both sides.

4. The quartz boat precision detection device according to claim 1, characterized in that: The guide support (3) comprises a bracket assembly (32) and a guide rail assembly (33); The reference plate (1) and the clamping assembly (2) are located inside the bracket assembly (32); The guide rail assembly (33) is mounted on the top end of the bracket assembly (32); the ejector pin (4) is connected to the guide rail assembly (33) and has the freedom to move along the X direction and the Y direction under the guidance of the guide rail assembly (33) and the ruler (31); the ruler (31) is connected to the guide rail assembly (33); and the extension direction of the scale in the ruler (31) is perpendicular to the reference plane (11).

5. The quartz boat precision detection device according to claim 4, characterized in that: The support assembly (32) comprises a base (321) and a top seat (322); The reference plate (1) and the clamping assembly (2) are both connected to the base (321); One side of the top seat (322) is rotatably connected to the base (321), and the other side is detachably connected to the base (321). The top end of the top seat (322) is connected to the guide rail assembly (33).

6. The quartz boat precision detection device according to claim 5, characterized in that: The support assembly (32) further comprises a driver (323), wherein the driver (323) is arranged between the base (321) and the top seat (322), and the driver (323) is used to drive the top seat (322) to rotate relative to the base (321).

7. The quartz boat precision detection device according to claim 4, characterized in that: The guide rail assembly (33) comprises a sliding block (331), a supporting seat (332) and a mounting seat (333); The slider (331) is mounted on the top of the bracket assembly (32); the support seat (332) is slidably matched with the slider (331) along the X direction; the scale (31) is fixedly connected to the support seat (332); and the mounting seat (333) is slidably matched with the scale (31) along the Y direction; The ejector pin (4) is connected to the mounting seat (333).

8. The quartz boat precision detection device according to claim 7, characterized in that: The scale (31) and the ejector pin (4) are located on the same side of the mounting seat (333).

9. The quartz boat precision detection device according to claim 7, characterized in that: The support seat (332) includes a first support plate (3321) and a second support plate (3322), the first support plate (3321) slidingly cooperates with the slider (331) along the X direction, the second support plate (3322) is connected to the first support plate (3321) and protrudes from the first support plate (3321) along the X direction, and the scale (31) is fixedly connected to the end of the second support plate (3322) protruding from the first support plate (3321).

10. The quartz boat precision detection device according to claim 7, characterized in that: The mounting seat (333) is provided with a through hole and a locking piece (3331), the through hole extends along the Z direction, the through hole is slidably matched with the ejector pin (4), the locking piece (3331) is movably connected to the mounting seat (333), and the locking piece (3331) is used to adjust the friction between the ejector pin (4) and the through hole.