Semiconductor detection device with mistaken touch prevention function

Abstract

The utility model provides a semiconductor detection device with a mistaken touch prevention function, which relates to the technical field of semiconductor detection, and comprises a plurality of detector main bodies, one end of each detector main body is movably connected with a supporting bracket, the bottom of each supporting bracket is movably connected with an operation table, and the upper surface of each operation table is movably provided with a protection device. The protection device is positioned among the plurality of detector main bodies, and comprises a bearing platform. According to the utility model, a semiconductor to be detected is placed through the bearing platform, after the semiconductor is placed, the protection frame and the separation baffle can play a role in separating the semiconductor, and the protection frame is utilized to reduce the probability that an operator touches the semiconductor accidentally so as to ensure that the semiconductor can be detected in a stable state; and the separation baffle plate in the protection frame can move upwards along the direction of the limiting chute on the protection frame, so that the protection area of the semiconductor is further expanded.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor detection, in particular to a semiconductor detection device with an anti-mistouch function. Background Art

[0002] In the production of semiconductor devices, from semiconductor single wafer to final product, dozens or even hundreds of processes must be carried out. In order to ensure that the product performance is qualified, stable and reliable, and has a high yield rate, all process steps must have strict and specific requirements based on the production conditions of various products. Therefore, corresponding systems and precise monitoring measures must be established in the production process.

[0003] In the prior art, for example, the Chinese patent number CN214473491U, "a semiconductor detection device", includes a housing, a control panel is arranged on the front outer wall of one side of the housing, and a protective cover is arranged on the front outer side of the control panel, and the protective cover is connected to the housing through a rotating bolt, a first slide groove is provided on both sides of the inner wall of the housing, and a first sliding block is provided on one side of the first slide groove, and a storage box is provided on the inner side of the first sliding block, a heat sink is provided on the front of the inner wall of the housing, and the heat sink is connected to the housing through a first fixing bolt, a second slide groove is provided on both sides of the upper outer wall of the housing, and a second sliding block is provided on one side of the second slide groove. This device can protect the control panel during use through the provision of the protective cover, and avoid the control panel being accidentally touched and misoperated during use due to the inability to protect it, thereby effectively improving the use effect of the device.

[0004] However, in the prior art, when a semiconductor detection device is detecting a semiconductor, it is necessary to keep the detection device in a stable positional relationship with the semiconductor at all times, otherwise there may be a deviation between the detection data and the actual data. Most of the current detection devices lack protection measures for semiconductors, and it is very easy for the detected object to be accidentally touched during actual operation. When the semiconductor is accidentally touched, it may deviate from its previous position, thereby affecting the judgment of the detection device. Utility Model Content

[0005] The purpose of the utility model is to solve the problem that a semiconductor detection device in the prior art needs to always maintain a stable position relationship with the semiconductor when detecting the semiconductor, otherwise there may be a deviation between the detection data and the actual data, and most of the current detection devices lack protection measures for the semiconductor. In the actual operation process, it is very easy for the detected object to be accidentally touched. When the semiconductor is accidentally touched, it may deviate from the previous position, thereby affecting the judgment of the detection device. A semiconductor detection device with an anti-mistouch function is proposed.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a semiconductor detection device with an anti-mistouch function, comprising a plurality of detector bodies, one end of the detector body is movably connected to a support bracket, the bottom of the support bracket is movably connected to an operating table, the upper surface of the operating table is movably installed with a protective device, and the protective device is located between the plurality of detector bodies;

[0007] The protective device includes a carrying platform, a protection frame is fixedly installed on the upper surface of the carrying platform, arc grooves are opened on both sides of the protection frame, a partition baffle is movably connected to the top of the protection frame, docking grooves are opened on both sides of the partition baffle, a micro motor is movably installed inside the partition baffle, one end of the micro motor is movably connected to a transfer rod, the other end of the transfer rod is fixedly connected to a transmission screw, a limiting ring is fixedly installed on the bottom of the partition baffle, and the inner wall of the limiting ring is threadedly connected to the outer wall of the transmission screw.

[0008] Preferably, a rectangular limiting block is fixedly mounted on the outer wall of the partition baffle, and one side of the rectangular limiting block is slidably connected to the inner wall of the protection frame.

[0009] Preferably, a limiting sliding groove is provided at the intersection of the protection frame and the rectangular limiting block, and the bottom of the transmission screw is rotatably connected to the bottom of the limiting sliding groove.

[0010] Preferably, a docking ring is fixedly installed inside the bearing platform, and a section of the transmission screw is rotatably connected to the inside of the docking ring.

[0011] Preferably, the micro motor is movably mounted inside the rectangular limit block, and a slot is provided at the junction of the rectangular limit block and the micro motor.

[0012] Preferably, a spring telescopic rod is fixedly mounted on the inner wall of the slot, and one end of the spring telescopic rod is movably connected to the outer wall of the micro motor.

[0013] Preferably, a trigger button is fixedly mounted on the top of the rectangular limit block, and one end of the trigger button is overlapped on the switch of the micro motor.

[0014] Compared with the prior art, the advantages and positive effects of the utility model are:

[0015] 1. In the utility model, the semiconductor to be tested is placed on a carrying platform. After the semiconductor is placed, the protection frame and the partition baffle can both play the role of separating the semiconductor. The protection frame is used to reduce the probability of operators accidentally touching the semiconductor to ensure that the semiconductor can be tested in a stable state. When in use, the partition baffle in the protection frame can move upward along the direction of the upper limit slide groove of the protection frame under the action of the micro-motor driving the transmission screw to rotate, thereby further expanding the protection area of ​​the semiconductor.

[0016] 2. In the utility model, the partition baffle is connected to the limiting groove on the inner wall of the protection frame through a rectangular limiting block, which can assist in limiting the moving route of the partition baffle. At the same time, this structure expands the contact area between the partition baffle and the protection frame, and can effectively improve the stability of the partition baffle. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The utility model provides a three-dimensional structural schematic diagram of a semiconductor detection device with an anti-mistouch function;

[0018] Figure 2 The utility model provides a schematic diagram of the external structure of a protective device for a semiconductor detection device with an anti-mistouch function;

[0019] Figure 3 The utility model provides a schematic diagram of a partition baffle structure of a semiconductor detection device with an anti-mistouch function;

[0020] Figure 4 For this utility model Figure 3 Schematic diagram of the enlarged structure of part A.

[0021] Legend:

[0022] 1. Operating table; 2. Support bracket; 3. Detector body; 4. Protective device;

[0023] 41. Load-bearing platform; 42. Protection frame; 43. Arc groove; 44. Separation baffle; 45. Limiting slide groove;

[0024] 441. Rectangular limit block; 442. Card slot; 443. Micro motor; 444. Transmission screw; 445. Docking ring; 446. Transfer rod; 447. Limit ring; 448. Trigger button; 449. Spring telescopic rod; 450. Docking groove. DETAILED DESCRIPTION

[0025] In order to more clearly understand the above-mentioned purpose, features and advantages of the utility model, the utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0026] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure. Example

[0027] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the utility model provides a semiconductor detection device with an anti-mistouch function, including multiple detector bodies 3, one end of the detector body 3 is movably connected to a support bracket 2, the bottom of the support bracket 2 is movably connected to an operating table 1, and a protective device 4 is movably installed on the upper surface of the operating table 1. The protective device 4 is located between the multiple detector bodies 3. The protective device 4 includes a bearing platform 41, and a protective frame 42 is fixedly installed on the upper surface of the bearing platform 41. The two sides of the protective frame 42 are provided with arc grooves 43, and the top of the protective frame 42 is movably connected to a partition baffle. 44, docking grooves 450 are provided on both sides of the partition baffle 44, a micro motor 443 is movably installed inside the partition baffle 44, one end of the micro motor 443 is movably connected to a transfer rod 446, and the other end of the transfer rod 446 is fixedly connected to a transmission screw 444, a limit ring 447 is fixedly installed on the bottom of the partition baffle 44, the inner wall of the limit ring 447 is threadedly connected to the outer wall of the transmission screw 444, a docking ring 445 is fixedly installed inside the support platform 41, and a section of the transmission screw 444 is rotatably connected to the inside of the docking ring 445.

[0028] The following is a detailed description of the specific settings and functions of this embodiment: the semiconductor to be tested is placed in the protective device 4, and then the support bracket 2 sends the detector body 3 through the arc groove 43 and the docking groove 450 to the protective device 4, and the physical, chemical and electrical properties of the semiconductor body, surface and the dielectric film, metal film, polysilicon and other structures attached thereto are measured. All devices are installed on the operating table 1, and the protective device 4 places the semiconductor through the carrying platform 41. The protective frame 42 and the partition baffle 44 can play the role of separating the semiconductor, which reduces the operator's work. The probability of the heart touching the semiconductor is reduced to ensure that the semiconductor can be detected in a stable state. After the semiconductor is placed, the micro motor 443 can be started. The micro motor 443 drives the transmission screw 444 to rotate through the transfer rod 446. The rotation of the transmission screw 444 will push the limit ring 447. The limit ring 447 is used to drive the partition baffle 44 to move upward along the direction of the upper limit slide groove 45 on the protection frame 42, so as to further expand the protection area of ​​the semiconductor. The position of the transmission screw 444 is determined by the docking ring 445 to ensure the structural stability of the transmission screw 444. Example

[0029] like Figure 2 , Figure 3 and Figure 4 As shown, a rectangular limit block 441 is fixedly installed on the outer wall of the partition baffle 44, one side of the rectangular limit block 441 is slidably connected to the inner wall of the protection frame 42, a limit slide groove 45 is provided at the intersection of the protection frame 42 and the rectangular limit block 441, the bottom of the transmission screw 444 is rotatably connected to the bottom of the limit slide groove 45, the micro motor 443 is movably installed inside the rectangular limit block 441, a slot 442 is provided at the intersection of the rectangular limit block 441 and the micro motor 443, a spring telescopic rod 449 is fixedly installed on the inner wall of the slot 442, one end of the spring telescopic rod 449 is movably connected to the outer wall of the micro motor 443, and a trigger button 448 is fixedly installed on the top of the rectangular limit block 441, and one end of the trigger button 448 is overlapped on the switch of the micro motor 443.

[0030] The effect achieved by the entire embodiment is that the operator controls the operating state of the micro motor 443 by means of the trigger button 448, and the micro motor 443 is arranged inside the card slot 442 and supported by a spring telescopic rod 449 to support it against the inner wall of the card slot 442. Since the partition baffle 44 is connected to the limiting slide groove 45 on the inner wall of the protective frame 42 through the rectangular limiting block 441, the moving route of the partition baffle 44 can be auxiliary restricted. The rectangular limiting block 441 expands the contact area between the partition baffle 44 and the protective frame 42, and can effectively improve the stability of the partition baffle 44.

[0031] The method of using the device and the working principle are as follows: the micro motor 443 is arranged inside the card slot 442 and supported by the spring telescopic rod 449, which is supported against the inner wall of the card slot 442. When in use, the semiconductor to be detected is placed in the protective device 4, and the protective device 4 places the semiconductor through the carrying platform 41. The protective frame 42 and the partition baffle 44 can both play the role of separating the semiconductors, reducing the probability of the operator accidentally touching the semiconductor. Then, the supporting bracket 2 is used to send the detector body 3 through the arc groove 43 and the docking groove 450 to the protective device 4, and the semiconductor body and surface are touched. The physical, chemical and electrical properties of the dielectric film, metal film, polysilicon and other structures attached thereto are measured. The operator controls the operating state of the micro motor 443 through the trigger button 448. At the same time, the trigger button 448 can be used to start the micro motor 443 as needed. The micro motor 443 drives the transmission screw 444 to rotate through the transfer rod 446. The rotation of the transmission screw 444 will push the limit ring 447. The limit ring 447 is used to drive the partition baffle 44 to move upward along the direction of the upper limit slide groove 45 on the protection frame 42, thereby further expanding the protection area of ​​the semiconductor.

[0032] The above description is only a preferred embodiment of the present invention and does not limit the present invention in other forms. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. A semiconductor detection device with an anti-mistouch function, comprising a plurality of detection instrument bodies (3), characterized in that: One end of the detector body (3) is movably connected to a support bracket (2), the bottom of the support bracket (2) is movably connected to an operating table (1), a protective device (4) is movably mounted on the upper surface of the operating table (1), and the protective device (4) is located between the plurality of detector bodies (3); The protective device (4) comprises a bearing platform (41), a protection frame (42) is fixedly mounted on the upper surface of the bearing platform (41), arc grooves (43) are provided on both sides of the protection frame (42), a partition baffle (44) is movably connected to the top of the protection frame (42), docking grooves (450) are provided on both sides of the partition baffle (44), a micro motor (443) is movably mounted inside the partition baffle (44), one end of the micro motor (443) is movably connected to a transfer rod (446), the other end of the transfer rod (446) is fixedly connected to a transmission screw (444), a limit ring (447) is fixedly mounted on the bottom of the partition baffle (44), and the inner wall of the limit ring (447) is threadedly connected to the outer wall of the transmission screw (444).

2. A semiconductor detection device with an anti-mistouch function according to claim 1, characterized in that: A rectangular limiting block (441) is fixedly mounted on the outer wall of the partition baffle (44), and one side of the rectangular limiting block (441) is slidably connected to the inner wall of the protection frame (42).

3. A semiconductor detection device with an anti-mistouch function according to claim 1, characterized in that: A limiting sliding groove (45) is provided at the intersection of the protection frame (42) and the rectangular limiting block (441), and the bottom of the transmission screw rod (444) is rotatably connected to the bottom of the limiting sliding groove (45).

4. A semiconductor detection device with an anti-mistouch function according to claim 1, characterized in that: A docking ring (445) is fixedly installed inside the bearing platform (41), and a section of the transmission screw rod (444) is rotatably connected to the inside of the docking ring (445).

5. The semiconductor detection device with an anti-mistouch function according to claim 1, characterized in that: The micro motor (443) is movably mounted inside the rectangular limit block (441), and a slot (442) is provided at the junction of the rectangular limit block (441) and the micro motor (443).

6. A semiconductor detection device with an anti-mistouch function according to claim 5, characterized in that: A spring telescopic rod (449) is fixedly mounted on the inner wall of the slot (442), and one end of the spring telescopic rod (449) is movably connected to the outer wall of the micro motor (443).

7. The semiconductor detection device with an anti-mistouch function according to claim 2, characterized in that: A trigger button (448) is fixedly mounted on the top of the rectangular limit block (441), and one end of the trigger button (448) is overlapped on the switch of the micro motor (443).

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