Lens mechanism of chip testing device

Abstract

The utility model relates to the technical field of chip testing, in particular to a lens mechanism of a chip testing device, which comprises a vertical angle adjusting assembly, an LNS fixing plate and a plurality of LNS lenses uniformly distributed on the LNS fixing plate. The vertical angle adjusting assembly is connected with a horizontal angle adjusting assembly; the horizontal angle adjusting assembly is connected to the LNS fixing plate. When the chip testing device is used, the horizontal angle adjusting assembly and the vertical angle adjusting assembly are matched for adjustment, so that the LNS lens and the chip to be tested are coaxial, a more complete chip image can be obtained, and the probability of misjudgment of chip testing is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of chip testing, in particular to a lens mechanism of a chip testing device. Background Art

[0002] During the entire production process, it is necessary to ensure that the CMOS chip has no electrical or functional defects and no appearance defects such as partial or scratches.

[0003] In the prior art, there is no process to fully inspect the yield rate of the chip after it is received and before the CCM is assembled. The performance of the CMOS chip can only be tested after the chip + LENS + VCM are assembled to see if it is intact. If each PCS CMOS chip is taken out of the tray for a single chip test, the time and manpower consumption will be huge, and the risk of poor appearance of the CMOS chip will be greatly increased.

[0004] Therefore, automatic chip detection is the general trend. Generating product images through LENS lenses during testing and judging whether there is dirt on the product by generating product images is an important means of existing automatic chip detection. However, during the test, the LENS lens and the chip must be aligned to ensure their coaxiality. The existing LENS lens structure is that the swing angle of the lens cannot be adjusted. When the equipment is installed on an uneven ground, or the equipment processing error causes the error to be superimposed after assembly, causing the lens and the product to be non-coaxial, the image displayed during the test will have dark corners, affecting the test judgment and prone to misjudgment. Utility Model Content

[0005] The utility model aims to provide a lens mechanism of a chip testing device in view of the defects and shortcomings of the prior art.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] The lens mechanism of a chip testing device described in the utility model comprises a vertical angle adjustment component, an LNS fixing plate and a plurality of LNS lenses uniformly distributed on the LNS fixing plate; the vertical angle adjustment component is connected to a horizontal angle adjustment component; the horizontal angle adjustment component is connected to the LNS fixing plate.

[0008] Furthermore, the horizontal angle adjustment assembly includes a lower turntable seat, an upper turntable rotatably connected to the lower turntable seat, and a turntable locking screw threadedly connected to the upper turntable; the end of the turntable locking screw is pressed against the lower turntable seat; the LNS fixing plate is fixed on the upper turntable; and the lower turntable seat is fixed on the vertical angle adjustment assembly.

[0009] Furthermore, a horizontal differential connecting seat and a first nut are fixed on the lower turntable seat; a horizontal tightening bolt is threadedly connected to the first nut; a first differential head is fixed on the horizontal differential connecting seat; an angle adjustment pendulum block is fixed on the side wall of the upper turntable; the angle adjustment pendulum block is arranged between the horizontal tightening bolt and the measuring rod of the first differential head.

[0010] Furthermore, a turntable handle is fixed on the upper turntable.

[0011] Furthermore, the vertical angle adjustment assembly includes a vertical adjustment base and a vertical swing block fixed on the horizontal angle adjustment assembly; an arc-shaped guide groove is arranged on one side of the vertical swing block facing the vertical adjustment base; the axis of the arc-shaped guide groove is arranged horizontally;

[0012] An arc-shaped slider matching the arc-shaped guide groove is arranged on the top surface of the vertical adjustment base; the arc-shaped slider is slidably connected to the arc-shaped guide groove; a second threaded hole connected to the arc-shaped guide groove is opened on the side surface of the vertical pendulum block; a second locking bolt which is tightly pressed against the vertical adjustment base is threadedly connected to the second threaded hole; a worm is rotatably connected to the inside of the arc-shaped slider; a plurality of teeth meshing with the worm are arranged on the surface of the arc-shaped guide groove; the teeth are arranged along the arc direction of the arc-shaped guide groove.

[0013] Furthermore, the number of the vertical angle adjustment components is two; the axes of the two arc-shaped guide grooves are arranged parallel to the horizontal plane; and the axes of the two arc-shaped guide grooves are arranged perpendicular to each other.

[0014] Furthermore, the vertical angle adjustment component is provided with a lifting fine-tuning component;

[0015] The lifting and fine-tuning assembly includes an upper lifting seat and a fine-tuning lifting seat; the upper lifting seat is slidably connected to the fine-tuning lifting seat; an upper lifting seat strip hole is opened on the upper lifting seat along the height direction; a third locking bolt is threadedly connected to the fine-tuning lifting seat; the third locking bolt passes through the upper lifting seat strip hole and is threadedly connected to the fine-tuning lifting seat; the head of the third locking bolt is pressed against the upper lifting seat; a pendulum rod is rotatably connected to the fine-tuning lifting seat; a second differential head is fixed on the fine-tuning lifting seat; the two ends of the pendulum rod are respectively pressed against the measuring rod of the second differential head and the bottom of the upper lifting seat.

[0016] After adopting the above structure, the beneficial effects of the utility model are as follows: the lens mechanism of the chip testing device described in the utility model, when using the utility model, the LNS lens connected to the LNS fixing plate is used to generate an image that can be obtained by the chip to be tested; the horizontal angle adjustment component drives the LNS fixing plate to swing on the horizontal plane to adjust the horizontal swing angle of the LNS lens; the vertical angle adjustment component is used to make the horizontal angle adjustment component swing in the vertical direction to achieve the swing angle adjustment of the LNS lens in the vertical direction; the horizontal angle adjustment component and the vertical angle adjustment component are coordinated and adjusted to achieve the coaxiality of the LNS lens and the chip to be tested, so that a more complete chip image can be obtained, and the probability of misjudgment of chip testing is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model;

[0018] Figure 2 This is the structural diagram of the adjustment part of the LENS fixing plate;

[0019] Figure 3 This is the exploded view of the LENS fixed plate adjustment part after removing the lateral adjustment component;

[0020] Figure 4 is a structural diagram of the horizontal angle adjustment component;

[0021] Figure 5 is an exploded view of the vertical angle adjustment assembly;

[0022] Figure 6 It is the structural diagram of the vertical pendulum block;

[0023] Figure 7 This is an exploded view of the lifting and fine-tuning assembly;

[0024] Figure 8 It is the structural diagram of the connection between the pendulum rod and the second differential head;

[0025] Description of reference numerals:

[0026] A, horizontal angle adjustment assembly; A1, upper turntable; A2, turntable handle; A3, lower turntable seat;

[0027] A4, turntable locking screw; A5, first differential head; A6, horizontal differential connector;

[0028] A7, angle adjustment pendulum block; A8, first nut; A9, horizontal tightening bolt;

[0029] B, vertical angle adjustment assembly; B1, vertical swing block; B101, arc guide groove;

[0030] B101a, tooth; B102, first threaded hole; B103, second threaded hole; B2, screw;

[0031] B3, second locking bolt; B4, worm; B5, worm handle; B6, vertical adjustment base;

[0032] B601, arc-shaped slider; C, lifting fine-tuning assembly; C1, upper lifting seat; C2, swing rod;

[0033] C3, second differential head; C4, third locking bolt; C5, strip hole of upper lifting seat;

[0034] C6, fine-tuning lifting seat; D, translation fine-tuning assembly; E, lateral adjustment assembly;

[0035] E1, lateral adjustment guide rail; E2, lateral adjustment slide seat; E3, lateral adjustment positioning seat;

[0036] E301, positioning seat strip hole; E4, fourth locking bolt; F, lifting adjustment assembly;

[0037] G, LENS fixing plate; H, LENS lens. DETAILED DESCRIPTION

[0038] The utility model is further described below in conjunction with the accompanying drawings.

[0039] like Figures 1 to 8 As shown, the lens mechanism of a chip testing device described in the utility model includes a vertical angle adjustment component B, a LENS fixing plate G and a plurality of LENS lenses H evenly distributed on the LENS fixing plate G; the LENS lenses H are essentially the same as those in the prior art, so they are not described in detail here; the LENS fixing plate G is a plate for fixing the LENS lenses H; the vertical angle adjustment component B is connected to a horizontal angle adjustment component A; the horizontal angle adjustment component A is connected to the LENS fixing plate G;

[0040] LENS lens H is used to obtain the image of the chip surface, and then transmit the image to the computer for comparison to determine whether the chip surface is dirty;

[0041] The LENS lens H connected to the LENS fixing plate G is used to generate an image that can be obtained by the chip to be tested; the LENS fixing plate G is driven to swing on the horizontal plane through the horizontal angle adjustment component A to adjust the horizontal swing angle of the LENS lens H; the horizontal angle adjustment component A is made to swing in the vertical direction through the vertical angle adjustment component B to achieve the swing angle adjustment of the LENS lens H in the vertical direction; the LENS lens H is made coaxial with the chip to be tested through the coordinated adjustment of the horizontal angle adjustment component A and the vertical angle adjustment component B, so that a more complete chip image can be obtained, reducing the probability of misjudgment of chip testing.

[0042] As a preferred embodiment of the present invention, the horizontal angle adjustment component A includes a lower turntable seat A3, an upper turntable A1 rotatably connected to the lower turntable seat A3, and a turntable locking screw A4 threadedly connected to the upper turntable A1; the end of the turntable locking screw A4 is pressed against the lower turntable seat A3; the LENS fixing plate G is fixed on the upper turntable A1; the lower turntable seat A3 is fixed on the vertical angle adjustment component B;

[0043] The upper turntable A1 and the lower turntable seat A3 are connected to each other through a bearing to achieve rotational connection. After the turntable locking screw A4 is rotated in the threaded hole of the upper turntable A1, the locking screw A4 is tightened on the lower turntable seat A3; when the locking screw A4 is pressed on the lower turntable seat A3, the upper turntable A1 cannot rotate on the lower turntable seat A3, and the swing angle of the upper turntable A1 can be adjusted by loosening the locking screw A4 to tighten the lower turntable seat A3.

[0044] As a preferred embodiment of the present invention, a horizontal differential connection seat A6 and a first nut A8 are fixed on the lower turntable seat A3; a horizontal jacking bolt A9 is threadedly connected to the first nut A8; a first differential head A5 is fixed on the horizontal differential connection seat A6; an angle adjustment pendulum block A7 is fixed on the side wall of the upper turntable A1; the angle adjustment pendulum block A7 is arranged between the horizontal jacking bolt A9 and the measuring rod of the first differential head A5;

[0045] After loosening the locking screw A4, operate the first differential head A5 to make the measuring rod extend and retract, and push the angle adjustment pendulum block A7 through the measuring rod to make the upper turntable A1 swing, and fine-tune the horizontal swing angle of the LENS fixing plate G on the upper turntable A1. After the adjustment is completed, the horizontal tightening bolt A9 rotates on the first nut A8 to tighten the angle adjustment pendulum block A7 on the measuring rod to position it, and finally press the locking screw A4 on the lower turntable seat A3 to complete the adjustment.

[0046] As a preferred embodiment of the present invention, a turntable handle A2 is fixed on the upper turntable A1.

[0047] As a preferred embodiment of the present invention, the vertical angle adjustment component B includes a vertical adjustment base B6 and a vertical swing block B1 fixed on the horizontal angle adjustment component A; an arc-shaped guide groove B101 is provided on one side of the vertical swing block B1 facing the vertical adjustment base B6; the axis of the arc-shaped guide groove B101 is horizontally arranged;

[0048] An arc-shaped slider B601 matching the arc-shaped guide groove B101 is arranged on the top surface of the vertical adjustment base B6; the arc-shaped slider B601 is slidably connected to the arc-shaped guide groove B101; a second threaded hole B103 connected to the arc-shaped guide groove B101 is opened on the side surface of the vertical swing block B1; the second threaded hole B103 is internally threadedly connected to a second locking bolt B3 pressed against the vertical adjustment base B6; a worm B4 is rotatably connected inside the arc-shaped slider B601; a plurality of teeth B101a meshing with the worm B4 are arranged on the surface of the arc-shaped guide groove B101; the teeth B101a are arranged along the arc direction of the arc-shaped guide groove B101;

[0049] A worm handle B5 is connected to the worm B4; the second locking bolt B3 is used to press and fix the vertical adjustment base B6 and the vertical pendulum block B1; in addition, two first threaded holes B102 are arranged on the vertical pendulum block B1, and the first threaded holes B102 are threadedly connected with screws B2 that are pressed against the arc-shaped slider B601, and the function of the screw B2 is also to lock and fix the vertical adjustment base B6 and the vertical pendulum block B1; before adjusting the angle of the vertical adjustment base B6 of the vertical pendulum block B1, it is necessary to loosen the screw B2 and the second locking bolt B3; rotate the worm B4 so that the worm B4 moves on the teeth B101a, driving the arc-shaped slider B601 to slide along the arc-shaped guide groove B101, so as to realize the swing of the horizontal angle adjustment component A on the vertical plane.

[0050] As a preferred embodiment of the present invention, the number of the vertical angle adjustment components B is two; the axes of the two arc-shaped guide grooves B101 are arranged parallel to the horizontal plane; the axes of the two arc-shaped guide grooves B101 are arranged perpendicular to each other;

[0051] By setting two vertical angle adjustment components B, and the axes of the arc-shaped guide grooves B101 are perpendicular to each other, the two vertical angle adjustment components B are used to realize the two actions of swinging the horizontal angle adjustment component A left and right and swinging forward and backward on the vertical plane.

[0052] As a preferred embodiment of the present invention, the vertical angle adjustment component B is provided with a lifting fine-tuning component C;

[0053] The lifting and fine-tuning assembly C includes an upper lifting seat C1 and a fine-tuning lifting seat C6; the upper lifting seat C1 is slidably connected to the fine-tuning lifting seat C6; an upper lifting seat strip hole C5 is opened on the upper lifting seat C1 along the height direction; a third locking bolt C4 is threadedly connected to the fine-tuning lifting seat C6; the third locking bolt C4 passes through the upper lifting seat strip hole C5 and is threadedly connected to the fine-tuning lifting seat C6; the head of the third locking bolt C4 is pressed against the upper lifting seat C1; a pendulum rod C2 is rotatably connected to the fine-tuning lifting seat C6; a second differential head C3 is fixed to the fine-tuning lifting seat C6; the two ends of the pendulum rod C2 are respectively pressed against the measuring rod of the second differential head C3 and the bottom of the upper lifting seat C1;

[0054] Due to the gravity of the upper lifting seat C1 and the gravity of the components connected to it, the swing rod C2 is pressed against the upper lifting seat C1;

[0055] After the head of the third locking bolt C4 is pressed against the upper lifting seat C1, the fine-tuning lifting seat C6 and the upper lifting seat C1 are completely fixed; after loosening the third locking bolt C4, the second micrometer head C3 is operated to make the measuring rod push the pendulum rod C2 to swing, so as to realize the swing of the pendulum rod C2 and push the upper lifting seat C1 to move up and down along the fine-tuning lifting seat C6, so as to realize the fine-tuning of the LENS fixing plate G and the distance between the chip and the LENS lens H.

[0056] In addition, a lifting adjustment component F for coarsely adjusting the horizontal height of the LENS fixing plate G is connected between the horizontal angle adjustment component A and the LENS fixing plate G; the lifting adjustment component F includes a lifting frame fixed on the LENS fixing plate G, and a lifting guide rail extending along the height direction; a lifting slider slidably connected to the lifting guide rail is fixed on the lifting frame, and a handle bolt is threaded on the lifting frame; the handle bolt is tightened on the lifting guide rail; by loosening the handle bolt, the lifting frame can slide along the length direction of the lifting guide rail to roughly adjust the height of the LENS fixing plate G.

[0057] The bottom of the lifting fine-tuning component C is connected to a translation fine-tuning component D that can drive the lifting fine-tuning component C to perform translational motion on a horizontal plane; the translation fine-tuning component D includes two linear fine-tuning components; the two linear fine-tuning components are respectively an X-direction fine-tuning component and a Y-direction fine-tuning component whose adjustment directions are perpendicular to each other;

[0058] The linear fine-tuning assembly includes an upper linear slide and a lower linear fixed seat slidably connected to the upper linear slide; a third differential head is connected to the lower linear fixed seat; a measuring head of the third differential head is rotatably connected to the upper linear slide; a fifth locking bolt is threadedly connected to the upper linear slide; a strip hole is provided on the lower linear fixed seat; the fifth locking bolt passes through the strip hole and is locked in the threaded hole on the upper linear slide, and the fifth locking bolt locks and fixes the upper linear slide and the lower linear fixed seat; after loosening the fifth locking screw, the third differential head can be rotated to drive the upper linear slide to translate on the lower linear fixed seat, and after the adjustment is completed, the fifth locking bolt is used to lock and fix the upper linear slide and the lower linear fixed seat; the two horizontal directions of the LENS fixing plate G are adjusted respectively by the X-direction fine-tuning assembly and the Y-direction fine-tuning assembly to make the horizontal position of the LENS lens H.

[0059] A lateral adjustment component E is provided at the bottom of the translation fine-tuning component D; the structure is used for coarsely adjusting the lateral position of the LENS fixing plate G; the lateral adjustment component E includes a lateral adjustment guide rail E1, a lateral adjustment slide E2 fixed on the translation fine-tuning component D, and a lateral adjustment positioning seat E3 fixed on the lateral adjustment guide rail E1; the lateral adjustment slide E2 is slidably connected to the lateral adjustment guide rail E1; the lateral adjustment positioning seat E3 is provided with a positioning seat strip hole E301; the length direction of the positioning seat strip hole E301 is consistent with the length direction of the lateral adjustment guide rail E1; the fourth locking bolt E4 passes through the positioning seat strip hole E301 and is threadedly connected to the frame, the fourth locking bolt E4 presses the lateral adjustment positioning seat E3 on the frame, and the lateral position of the lateral adjustment slide E2 can be adjusted by loosening the fourth locking bolt E4.

[0060] The above description is only a preferred embodiment of the present utility model, so all equivalent changes or modifications made according to the structure, features and principles described in the scope of the present utility model patent application are included in the scope of the present utility model patent application.

Claims

1. A lens mechanism of a chip testing device, characterized in that: It comprises a vertical angle adjustment component (B), a LENS fixing plate (G) and a plurality of LENS lenses (H) evenly distributed on the LENS fixing plate (G); the vertical angle adjustment component (B) is connected to a horizontal angle adjustment component (A); the horizontal angle adjustment component (A) is connected to the LENS fixing plate (G).

2. The lens mechanism of a chip testing device according to claim 1, characterized in that: The horizontal angle adjustment component (A) comprises a lower turntable seat (A3), an upper turntable (A1) rotatably connected to the lower turntable seat (A3), and a turntable locking screw (A4) threadedly connected to the upper turntable (A1); the end of the turntable locking screw (A4) is pressed against the lower turntable seat (A3); the LENS fixing plate (G) is fixed on the upper turntable (A1); and the lower turntable seat (A3) is fixed on the vertical angle adjustment component (B).

3. The lens mechanism of a chip testing device according to claim 2, characterized in that: A horizontal differential connection seat (A6) and a first nut (A8) are fixed on the lower turntable seat (A3); a horizontal tightening bolt (A9) is threadedly connected to the first nut (A8); a first differential head (A5) is fixed on the horizontal differential connection seat (A6); an angle adjustment pendulum block (A7) is fixed on the side wall of the upper turntable (A1); the angle adjustment pendulum block (A7) is arranged between the horizontal tightening bolt (A9) and the measuring rod of the first differential head (A5).

4. The lens mechanism of a chip testing device according to claim 2, characterized in that: A turntable handle (A2) is fixed on the upper turntable (A1).

5. The lens mechanism of a chip testing device according to claim 1, characterized in that: The vertical angle adjustment component (B) comprises a vertical adjustment base (B6) and a vertical swing block (B1) fixed on the horizontal angle adjustment component (A); an arc-shaped guide groove (B101) is arranged on a side of the vertical swing block (B1) facing the vertical adjustment base (B6); the axis of the arc-shaped guide groove (B101) is arranged horizontally; An arc-shaped slider (B601) matching the arc-shaped guide groove (B101) is arranged on the top surface of the vertical adjustment base (B6); the arc-shaped slider (B601) is slidably connected to the arc-shaped guide groove (B101); a second threaded hole (B103) connected to the arc-shaped guide groove (B101) is opened on the side surface of the vertical swing block (B1); a second locking bolt (B3) pressed against the vertical adjustment base (B6) is internally threadedly connected to the second threaded hole (B103); a worm (B4) is rotatably connected inside the arc-shaped slider (B601); a plurality of teeth (B101a) meshing with the worm (B4) are arranged on the surface of the arc-shaped guide groove (B101); the teeth (B101a) are arranged along the arc direction of the arc-shaped guide groove (B101).

6. The lens mechanism of a chip testing device according to claim 5, characterized in that: The number of the vertical angle adjustment components (B) is two; the axes of the two arc-shaped guide grooves (B101) are arranged parallel to the horizontal plane; and the axes of the two arc-shaped guide grooves (B101) are arranged perpendicular to each other.

7. The lens mechanism of a chip testing device according to claim 1, characterized in that: The vertical angle adjustment component (B) is provided with a lifting fine-tuning component (C); The lifting and fine-tuning assembly (C) comprises an upper lifting seat (C1) and a fine-tuning lifting seat (C6); the upper lifting seat (C1) is slidably connected to the fine-tuning lifting seat (C6); an upper lifting seat strip hole (C5) is opened on the upper lifting seat (C1) along the height direction; a third locking bolt (C4) is threadedly connected to the fine-tuning lifting seat (C6); the third locking bolt (C4) passes through the upper lifting seat strip hole (C5) and is threadedly connected to the fine-tuning lifting seat (C6); the head of the third locking bolt (C4) is pressed against the upper lifting seat (C1); a swing rod (C2) is rotatably connected to the fine-tuning lifting seat (C6); a second differential head (C3) is fixed to the fine-tuning lifting seat (C6); two ends of the swing rod (C2) are respectively pressed against the measuring rod of the second differential head (C3) and the bottom of the upper lifting seat (C1).

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