High-precision temperature adjusting device

Abstract

The utility model discloses a high precision temperature regulation device relates to temperature regulation technical field, including regulation cylinder and temperature induction wireless controller, the temperature induction wireless controller is located in the regulation cylinder, both ends of regulation cylinder are detachably equipped with end cover, the inner side of regulation cylinder is equipped with the rotating shaft, the rotating shaft is equipped with the temperature induction wireless controller, and the temperature induction wireless controller is located in the regulation cylinder. The end cover located on the upper portion is rotationally connected to the outer surface of the rotating shaft in a sleeving mode, two electromagnetic air supply valves are installed on the upper surface of the end cover located on the upper portion, two ventilation cylinders are fixedly inserted into the adjusting cylinder, and the ventilation cylinders are rotationally connected to the outer surface of the rotating shaft in a sleeving mode. According to the utility model, the design structure is reasonable, and the reciprocating transmission structure can drive the temperature sensing wireless controller to move up and down during rotation around the rotating shaft when the rotating shaft rotates, so that the temperature sensing wireless controller can detect the temperature of gas at different heights; and the electromagnetic air supply valve and the electromagnetic exhaust valve can be accurately controlled.

Description

Technical Field

[0001] The utility model relates to the technical field of temperature regulation, in particular to a high-precision temperature regulation device. Background Art

[0002] The photolithography machine, also known as the mask alignment exposure machine, exposure system, photolithography system, etc., is a key equipment for manufacturing micro-electromechanical, optoelectronic, and diode large-scale integrated circuits. The working environment of the photolithography machine requires a specific temperature, and its working environment will be controlled by temperature regulation equipment.

[0003] When some temperature regulating devices are used to regulate the temperature, hot air and cold air are filled into the device through two electronic valves connected to the hot air supplier and the cold air supplier respectively. The temperature sensor installed inside controls the two electrical valves to charge hot air and cold air in different proportions, regulates the gas at the required temperature, and then the temperature sensor controls the outlet valve to open, discharges the gas at the required temperature into the working environment of the lithography machine, and controls the working environment of the lithography machine. However, the position of the temperature sensor installed in the temperature regulating device in the prior art is relatively fixed, which causes the position of the sensed gas temperature to be relatively fixed, and the gas temperature at different positions inside cannot be accurately measured. To this end, we provide a high-precision temperature regulating device to solve the above problems. Utility Model Content

[0004] 1) Technical issues solved

[0005] The purpose of the utility model is to make up for the deficiencies of the prior art and provide a high-precision temperature regulating device.

[0006] 2) Technical solution

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a high-precision temperature regulating device, comprising a regulating cylinder and a temperature sensing wireless controller, wherein the temperature sensing wireless controller is located inside the regulating cylinder, and end caps are detachably installed at both ends of the regulating cylinder, a rotating shaft is arranged on the inner side of the regulating cylinder, the end cap located at the top is rotatably sleeved on the outer surface of the rotating shaft, two electromagnetic air supply valves are installed on the upper surface of the end cap located at the top, two air permeable cylinders are fixedly plugged into the inside of the regulating cylinder, the air permeable cylinders are rotatably sleeved on the outer surface of the rotating shaft, a reciprocating transmission structure is installed on the bottom surface of the air permeable cylinder located at the top, the reciprocating transmission structure is connected to the rotating shaft, the temperature sensing wireless controller is connected to the reciprocating transmission structure, and an electromagnetic exhaust valve is installed on the bottom surface of the end cap located at the bottom.

[0008] Furthermore, the outer surface of the air cylinder is a plurality of through-hole structures connected to the interior thereof, and the outer surface of the rotating shaft and the interiors of the two air cylinders are fixedly sleeved with fan impellers, and the blades of the fan impellers in the two air cylinders are in opposite directions.

[0009] Furthermore, the reciprocating transmission structure includes a meshing plate, a reciprocating wire drum, a gear ring and a vertical rod, one end of the meshing plate is threadedly sleeved on the outer surface of the reciprocating wire drum, the other end of the meshing plate is slidably sleeved on the outer surface of the vertical rod, the reciprocating wire drum is fixedly sleeved on the outer surface of the rotating shaft, the upper end of the vertical rod is fixedly connected to the gear ring, the upper end of the gear ring is rotatably connected to the air permeable tube located above, the inner side of the gear ring is meshed with a transmission gear, the other side of the transmission gear is meshed with a center gear, the center gear is fixedly sleeved on the outer surface of the rotating shaft, the rotating shaft is located above the reciprocating wire drum, the temperature sensing wireless controller is fixedly connected to the meshing plate, and the meshing plate is located below the gear ring.

[0010] Furthermore, the reciprocating yarn cylinder is located between the two air-permeable cylinders, and the end faces of the central gear and the transmission gear are both perforated structures that are air-permeable up and down.

[0011] Furthermore, the sensing end of the temperature sensing wireless controller is an arc-shaped structure, and the center of the arc-shaped structure of the temperature sensing wireless controller is staggered with the center axis of the rotating shaft.

[0012] Furthermore, the gear ring is coaxially arranged with the air-permeable cylinder, and the gear ring is coaxially arranged with the rotating shaft.

[0013] Furthermore, the lower end of the vertical rod is located below the lower end of the reciprocating wire drum, and the vertical rod is arranged parallel to the rotating shaft.

[0014] Furthermore, an electric motor is installed on the upper surface of the end cover located at the top, and the output end of the electric motor is fixedly connected to the upper end of the rotating shaft.

[0015] 3) Beneficial effects:

[0016] Compared with the prior art, the high-precision temperature control device has the following beneficial effects:

[0017] 1. The utility model installs a reciprocating transmission structure. When the shaft rotates, the reciprocating transmission structure drives the temperature sensing wireless controller to move up and down while rotating around the shaft, so that the temperature sensing wireless controller can detect the gas temperature at different heights and accurately control the electromagnetic gas supply valve and the electromagnetic exhaust valve.

[0018] 2. The utility model uses fan impellers, and the two fan impellers rotate synchronously with the rotating shaft. Since the blades of the two fan impellers are in opposite directions, the two fan impellers can drive the airflow in opposite directions when rotating. When the upper fan impeller rotates, it pushes the airflow to flow downward, and when the lower fan impeller rotates, it pushes the airflow to flow upward. The airflows flowing at both ends produce an impact, which increases the mixing speed of the hot gas and the cold gas filled into the regulating cylinder by the two electromagnetic air supply valves. At the same time, the flow of gas enables the temperature sensing wireless controller to detect different gas temperatures, and can better feedback temperature information. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the internal structure of the regulating cylinder of the utility model;

[0021] Figure 3 It is a schematic diagram of the partial structure of the utility model;

[0022] Figure 4 This is a schematic diagram of the connection between the fan impeller and the rotating shaft of the utility model;

[0023] Figure 5 This is a schematic diagram of the connection between the transmission gear and the central gear of the utility model;

[0024] Figure 6 It is a schematic top view of part of the structure of the utility model.

[0025] In the figure: 1. Adjustment cylinder; 2. Temperature sensing wireless controller; 3. End cover; 4. Solenoid air supply valve; 5. Reciprocating transmission structure; 51. Engaging plate; 52. Reciprocating wire cylinder; 53. Gear ring; 54. Vertical rod; 55. Center gear; 56. Transmission gear; 6. Rotating shaft; 7. Air cylinder; 8. Solenoid exhaust valve; 9. Fan impeller; 10. Motor. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] like Figure 1-6As shown, the utility model provides a technical solution: a high-precision temperature adjustment device, including an adjustment cylinder 1 and a temperature sensing wireless controller 2, the temperature sensing wireless controller 2 is located inside the adjustment cylinder 1, both ends of the adjustment cylinder 1 are detachably mounted with end covers 3, the inner side of the adjustment cylinder 1 is provided with a rotating shaft 6, the end cover 3 located at the top is rotatably sleeved on the outer surface of the rotating shaft 6, the upper surface of the end cover 3 located at the top is installed with two electromagnetic air supply valves 4, the two electromagnetic air supply valves 4 are respectively connected to the hot air generator and the cold air generator, the inside of the adjustment cylinder 1 is fixedly plugged with two air permeable cylinders 7, the air permeable cylinders 7 are rotatably sleeved on the outer surface of the rotating shaft 6 The outer surface of the air cylinder 7 is a plurality of through-hole structures connected with the interior thereof. The outer surface of the rotating shaft 6 and the interiors of the two air cylinders 7 are fixedly sleeved with fan impellers 9. The blades of the fan impellers 9 in the two air cylinders 7 are in opposite directions. When the upper fan impeller 9 rotates, it pushes the airflow to flow downward, and when the lower fan impeller 9 rotates, it pushes the airflow to flow upward. The airflows flowing at both ends produce an impact, which increases the mixing speed of the hot gas and the cold gas filled into the regulating cylinder 1 by the two electromagnetic air supply valves 4. At the same time, the flow of gas enables the temperature sensing wireless controller 2 to detect different gas temperatures, and can better feedback the temperature information.

[0028] A reciprocating transmission structure 5 is installed on the bottom surface of the air permeable cylinder 7 located at the top, and the reciprocating transmission structure 5 is connected to the rotating shaft 6. The temperature sensing wireless controller 2 is connected to the reciprocating transmission structure 5. When the rotating shaft 6 rotates, the reciprocating transmission structure 5 can drive the temperature sensing wireless controller 2 to move up and down. An electromagnetic exhaust valve 8 is installed on the bottom surface of the end cover 3 located below. The sensing end of the temperature sensing wireless controller 2 is an arc structure, and the center of the arc structure of the temperature sensing wireless controller 2 is staggered with the center axis of the rotating shaft 6. The temperature sensing wireless controller 2 can control the ratio of hot air and cold air rushed into the two electromagnetic air supply valves 4 through the sensed temperature feedback, and the ratio is matched to a suitable temperature. After the temperature feedback sensed by the temperature sensing wireless controller 2 meets the requirements, the electromagnetic exhaust valve 8 can be controlled to open, and the gas of suitable temperature is filled into the working environment to accurately control the temperature of the working environment.

[0029] The reciprocating transmission structure 5 includes a meshing plate 51, a reciprocating wire drum 52, a gear ring 53 and a vertical rod 54. The gear ring 53 is coaxially arranged with the air-permeable drum 7, and the gear ring 53 is coaxially arranged with the rotating shaft 6. One end of the meshing plate 51 is threadedly sleeved on the outer surface of the reciprocating wire drum 52, and the other end of the meshing plate 51 is slidably sleeved on the outer surface of the vertical rod 54. The lower end of the vertical rod 54 is located below the lower end of the reciprocating wire drum 52. The vertical rod 54 is arranged parallel to the rotating shaft 6. The reciprocating wire drum 52 is fixedly sleeved on the outer surface of the rotating shaft 6. The upper end of the vertical rod 54 is fixedly connected to the gear ring 53, and the upper end of the gear ring 53 is rotatably connected to the air-permeable drum 7 located above. The inner side of the gear ring 53 is meshed with a transmission gear 56, and the other side of the transmission gear 56 is meshed with a central gear 55. The central gear 55 is fixedly sleeved On the outer surface of the rotating shaft 6, the rotating shaft 6 is meshed with the central gear 55, the transmission gear 56 and the gear ring 53, so that the gear ring 53 rotates in the opposite direction to the rotating shaft 6, so that the meshing plate 51 meshes with the reciprocating wire tube 52 and moves up and down, and the central gear 55, the transmission gear 56 and the gear ring 53 are set with different teeth, so that the position of the meshing plate 51 is different each time it moves up and down, increasing the position that the temperature sensing wireless controller 2 can sense, the reciprocating wire tube 52 is located between the two breathable tubes 7, and the end faces of the central gear 55 and the transmission gear 56 are both perforated structures that are breathable from top to bottom, reducing the obstruction to the gas flow, the rotating shaft 6 is located above the reciprocating wire tube 52, the temperature sensing wireless controller 2 is fixedly connected to the meshing plate 51, and the meshing plate 51 is located below the gear ring 53.

[0030] An electric motor 10 is installed on the upper surface of the end cover 3 located at the top. The output end of the electric motor 10 is fixedly connected to the upper end of the rotating shaft 6 , and the electric motor 10 provides rotational power to the rotating shaft 6 .

[0031] Working principle: the starting motor 10 drives the rotating shaft 6 to rotate, and the rotating shaft 6 drives the two fan impellers 9 to rotate. Since the blades of the two fan impellers 9 are in opposite directions, the two fan impellers 9 can drive the airflow to flow in opposite directions when rotating. The airflows flowing at both ends produce a counter-attack, thereby increasing the mixing speed of the hot gas and the cold gas filled into the regulating cylinder 1 by the two electromagnetic air supply valves 4. At the same time, when the rotating shaft 6 rotates, the central gear 55 is engaged with the transmission gear 56 to drive it to rotate. The gear ring 53 rotates in the opposite direction to the rotating shaft 6 by engaging with the transmission gear 56. When the gear ring 53 rotates, it drives the meshing plate 51 to rotate relative to the reciprocating wire drum 52 through the vertical rod 54. The meshing plate 51 is engaged with the reciprocating wire drum 52 to drive the temperature sensing wireless controller 2 installed on its surface to move synchronously. The temperature sensing wireless controller 2 controls the opening and closing of the two electromagnetic air supply valves 4 and the electromagnetic exhaust valve 8 through the detected temperature feedback.

Claims

1. A high-precision temperature regulating device, comprising a regulating cylinder (1) and a temperature sensing wireless controller (2), characterized in that: The temperature sensing wireless controller (2) is located inside the regulating cylinder (1). End caps (3) are detachably mounted on both ends of the regulating cylinder (1). A rotating shaft (6) is arranged on the inner side of the regulating cylinder (1). The end cap (3) located at the top is rotatably sleeved on the outer surface of the rotating shaft (6). Two electromagnetic air supply valves (4) are mounted on the upper surface of the end cap (3). Two air permeable cylinders (7) are fixedly inserted inside the regulating cylinder (1). The air permeable cylinders (7) are rotatably sleeved on the outer surface of the rotating shaft (6). A reciprocating transmission structure (5) is mounted on the bottom surface of the air permeable cylinder (7) located at the top. The reciprocating transmission structure (5) is connected to the rotating shaft (6). The temperature sensing wireless controller (2) is connected to the reciprocating transmission structure (5). An electromagnetic exhaust valve (8) is mounted on the bottom surface of the end cap (3) located at the bottom.

2. A high-precision temperature control device according to claim 1, characterized in that: The outer surface of the air cylinder (7) is a plurality of through-hole structures communicating with the interior thereof; the outer surface of the rotating shaft (6) and the interiors of the two air cylinders (7) are both fixedly sleeved with fan impellers (9); the blades of the fan impellers (9) in the two air cylinders (7) are in opposite directions.

3. A high-precision temperature adjustment device according to claim 1, characterized in that: The reciprocating transmission structure (5) comprises a meshing plate (51), a reciprocating yarn drum (52), a gear ring (53) and a vertical rod (54); one end of the meshing plate (51) is threadedly sleeved on the outer surface of the reciprocating yarn drum (52); the other end of the meshing plate (51) is slidably sleeved on the outer surface of the vertical rod (54); the reciprocating yarn drum (52) is fixedly sleeved on the outer surface of the rotating shaft (6); the upper end of the vertical rod (54) is fixedly connected to the gear ring (53); the gear ring (53) is The upper end is rotatably connected to the ventilation cylinder (7) located above, the inner side of the gear ring (53) is meshed with a transmission gear (56), the other side of the transmission gear (56) is meshed with a central gear (55), the central gear (55) is fixedly sleeved on the outer surface of the rotating shaft (6), the rotating shaft (6) is located above the reciprocating wire cylinder (52), the temperature sensing wireless controller (2) is fixedly connected to the meshing plate (51), and the meshing plate (51) is located below the gear ring (53).

4. A high-precision temperature adjustment device according to claim 3, characterized in that: The reciprocating yarn cylinder (52) is located between the two air-permeable cylinders (7), and the end surfaces of the central gear (55) and the transmission gear (56) are both perforated structures that are air-permeable up and down.

5. A high-precision temperature adjustment device according to claim 1, characterized in that: The sensing end of the temperature sensing wireless controller (2) is an arc-shaped structure, and the center of the arc-shaped structure of the temperature sensing wireless controller (2) is staggered with the center axis of the rotating shaft (6).

6. A high-precision temperature adjustment device according to claim 3, characterized in that: The gear ring (53) is coaxially arranged with the air-permeable cylinder (7), and the gear ring (53) is coaxially arranged with the rotating shaft (6).

7. A high-precision temperature adjustment device according to claim 3, characterized in that: The lower end of the vertical rod (54) is located below the lower end of the reciprocating wire drum (52), and the vertical rod (54) is arranged parallel to the rotating shaft (6).

8. A high-precision temperature adjustment device according to claim 1, characterized in that: An electric motor (10) is installed on the upper surface of the end cover (3) located at the top, and the output end of the electric motor (10) is fixedly connected to the upper end of the rotating shaft (6).

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