Coating device of developing machine

Abstract

The utility model relates to a developing machine, in particular to a coating device of the developing machine, which comprises a fixing frame, a glue box is fixedly connected to the top end of the fixing frame, a suction pump is fixedly connected to the left end of the glue box, the liquid inlet end of the suction pump extends rightwards into the glue box, and the output end of a first electric telescopic rod is fixedly connected with a sliding seat; a supporting cylinder and a second electric telescopic rod are fixedly connected to the bottom end of the interior of the fixing frame, a rotating cylinder is rotatably connected to the interior of the supporting cylinder, the second electric telescopic rod is located in the rotating cylinder, a loading hopper is fixedly connected to the upper end of the rotating cylinder, a supporting plate is placed in the loading hopper, and an angle adjusting mechanism is installed on the circumferential surface of the loading hopper; a round hole is formed in the lower end face of the carrying hopper, the output end of the second electric telescopic rod is fixedly connected with a push block, and the push block is located in the round hole and located at the lower end of the supporting plate. According to the utility model, the glued silicon wafer can be conveniently taken down.

Description

Technical Field

[0001] The utility model relates to a developing machine, in particular to a coating device of the developing machine. Background Art

[0002] The developer is a printing processing equipment that uses semi-automatic or fully automatic procedures to complete the development, washing, gluing, drying and other processes of the exposed printing plate in one go, partially or completely. It is generally used for photoresist coating and development. The photoresist coating process generally includes placing the silicon wafer in the developer, spraying the photoresist on the surface of the silicon wafer through the photoresist nozzle of the developer, and evenly coating the photoresist on the silicon wafer by rotating the silicon wafer.

[0003] In the prior art, after the silicon wafer is placed in a developer for glue coating, it is inconvenient for workers to remove the glued silicon wafer due to the thin thickness of the silicon wafer, the short distance between the silicon wafer and the supporting platform, and the narrow space between the silicon wafer and the supporting platform. Summary of the invention

[0004] The utility model aims to provide a coating device for a developer, which is convenient for taking off the silicon wafer after the coating.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: to provide a coating device of a developer, including a fixed frame, the top end of the fixed frame is fixedly connected to a glue box, the left end of the glue box is fixedly connected to a suction pump, the liquid inlet end of the suction pump extends to the right into the glue box, the discharge end of the suction pump is fixedly connected to a second connecting pipe, the circumferential surface of the second connecting pipe is fixedly connected to a sliding seat, the lower end of the second connecting pipe is fixedly connected to a liquid storage head, the lower end of the liquid storage head is installed with an air drying component, the lower end of the liquid storage head is fixedly connected to a discharge pipe, and the top end of the fixed frame is fixedly installed with a first An electric telescopic rod, the output end of the first electric telescopic rod is fixedly connected to the sliding seat; the inner bottom end of the fixed frame is fixedly connected with a support tube and a second electric telescopic rod, the inner part of the support tube is rotatably connected with a rotating tube, the second electric telescopic rod is located in the rotating tube, the upper end of the rotating tube is fixedly connected with a loading bucket, a support plate is placed inside the loading bucket, an angle adjustment mechanism is installed on the circumferential surface of the loading bucket, a circular hole is opened on the lower end surface of the loading bucket, the output end of the second electric telescopic rod is fixedly connected with a push block, the push block is located in the circular hole, and the push block is located directly below the support plate.

[0006] Optionally, the angle adjustment mechanism includes a motor, a gear and a gear ring, the bottom end of the fixed frame is fixedly connected to the motor, the output shaft end of the motor is fixedly connected to the gear, the circumferential surface of the loading bucket is fixedly connected to the gear ring, and the gear ring is meshed with the gear.

[0007] Optionally, a plurality of sliding rods are fixedly connected to the lower end of the support plate, the plurality of sliding rods all penetrate the loading bucket, and the plurality of sliding rods are all slidably connected to the loading bucket.

[0008] Optionally, the air-drying component includes a fan, a first connecting pipe, an air nozzle, a diverter shell and a support rod. The top of the fixed frame is fixedly connected to the fan, the air outlet end of the fan is fixedly connected to the first connecting pipe, the circumferential surface of the discharge pipe is sleeved with a diverter shell, the bottom end of the diverter shell is fixedly connected to a plurality of air nozzles, and the plurality of air nozzles are interconnected with the diverter shell, and the plurality of air nozzles are distributed around the discharge pipe, the end of the first connecting pipe away from the fan is fixedly connected to the diverter shell, and the plurality of support rods are fixedly connected to the circumferential surface of the diverter shell, and the plurality of support rods are fixedly connected to the liquid storage head.

[0009] Optionally, the first connecting tube and the second connecting tube are both retractable hoses, a rectangular hole is formed on the upper end surface of the fixing frame, and the first connecting tube and the second connecting tube both extend downward into the fixing frame through the rectangular hole.

[0010] Optionally, a filling hole is provided on the upper end surface of the plastic box.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0012] 1. When the utility model is used, the second electric telescopic rod is controlled to work, driving the push block to pass through the circular hole, pushing the support plate upward to move, and the support plate drives the silicon wafer to move upward, so that the silicon wafer gradually separates from the loading bucket to a certain height from the loading bucket, and then the second electric telescopic rod is closed. Since the size of the support plate in the utility model is smaller than the size of the silicon wafer, the silicon wafer will be exposed from the support plate, making it convenient to remove the silicon wafer after the glue coating is completed.

[0013] 2. Under the action of the air-drying component, the utility model can pre-air dry different positions of the silicon wafer on the left side of the discharge pipe where glue has been applied during the process of gluing the silicon wafer, thereby accelerating the air drying speed of the silicon wafer where glue has been applied. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0015] Figure 1 This is a schematic diagram of the main three-dimensional structure of the utility model;

[0016] Figure 2It is a schematic diagram of the three-dimensional structure of the utility model after the main view of the partial section;

[0017] Figure 3 For this utility model Figure 2 A schematic diagram of the enlarged structure at A in the middle;

[0018] Figure 4 For this utility model Figure 2 Schematic diagram of the enlarged structure at point B in the middle.

[0019] In the figure: 1. fixed frame; 2. motor; 3. gear; 4. loading bucket; 5. gear ring; 6. sliding rod; 7. supporting cylinder; 8. rotating cylinder; 9. fan; 10. first connecting pipe; 11. second connecting pipe; 12. suction pump; 13. glue box; 14. first electric telescopic rod; 15. sliding seat; 16. liquid storage head; 17. supporting plate; 18. pushing block; 19. supporting rod; 20. second electric telescopic rod; 21. circular hole; 22. discharge pipe; 23. diverter shell; 24. air nozzle. DETAILED DESCRIPTION

[0020] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0021] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0022] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0023] Now, the utility model embodiment Figure 1-Figure 4A coating device of a developer is provided for explanation. A coating device of a developer comprises a fixed frame 1, a glue box 13 is fixedly connected to the top of the fixed frame 1, a suction pump 12 is fixedly connected to the left end of the glue box 13, a liquid inlet end of the suction pump 12 extends rightward into the glue box 13, a second connecting pipe 11 is fixedly connected to the liquid discharge end of the suction pump 12, a sliding seat 15 is fixedly connected to the circumferential surface of the second connecting pipe 11, a liquid storage head 16 is fixedly connected to the lower end of the second connecting pipe 11, a drying component is installed at the lower end of the liquid storage head 16, a discharge pipe 22 is fixedly connected to the lower end of the liquid storage head 16, a first electric telescopic rod 14 is fixedly installed at the top of the fixed frame 1, and the first electric telescopic rod 14 is fixedly installed at the top of the fixed frame 1. The output end of the retracting rod 14 is fixedly connected to the sliding seat 15; the inner bottom end of the fixed frame 1 is fixedly connected with the support tube 7 and the second electric telescopic rod 20, the inner part of the support tube 7 is rotatably connected with the rotating tube 8, the second electric telescopic rod 20 is located in the rotating tube 8, the upper end of the rotating tube 8 is fixedly connected with the loading bucket 4, the inner part of the loading bucket 4 is provided with a support plate 17, the circumferential surface of the loading bucket 4 is provided with an angle adjustment mechanism, the lower end surface of the loading bucket 4 is provided with a circular hole 21, the output end of the second electric telescopic rod 20 is fixedly connected with the push block 18, the push block 18 is located in the circular hole 21, and the push block 18 is located at the lower end of the support plate 17. The fixed frame 1 is fixedly installed in the developing machine and is a structure inside the developing machine. When in use, the silicon wafer to be coated with glue (the diameter of the silicon wafer should be larger than the diameter of the support plate 17 and smaller than the inner diameter of the loading bucket 4) is placed in the loading bucket 4 and located at the upper end of the support plate 17, and then the suction pump 12 is controlled to work so that the glue inside the glue box 13 enters the liquid storage head 16 along the second connecting pipe 11 and is finally discharged through the discharge pipe 22, and the silicon wafer can be coated with glue; the first electric telescopic rod 14 is controlled to work to drive the sliding seat 15 to move right, thereby driving the liquid storage head 16 and the discharge pipe 22 to move right, and at the same time the angle adjustment mechanism is controlled The second electric telescopic rod 20 is controlled to work, driving the push block 18 to move upward, thereby driving the support plate 17 and the silicon wafer on the support plate 17 to rotate slowly, so that the glue sprayed through the discharge pipe 22 can be applied to different positions of the silicon wafer, thereby facilitating the gluing operation of the silicon wafer; when the silicon wafer needs to be taken out, the second electric telescopic rod 20 is controlled to work, driving the push block 18 to move upward, thereby driving the support plate 17 and the silicon wafer to move upward, until the silicon wafer moves to a certain height, because the size of the support plate 17 is smaller than the size of the silicon wafer, the silicon wafer will be exposed from the support plate 17, which is convenient for removing the glue-coated silicon wafer.

[0024] The utility model provides a coating device of a developer. Compared with the prior art, the second electric telescopic rod 20 is controlled to work, driving the push block 18 to pass through the circular hole 21, pushing the support plate 17 upward to move, and the support plate 17 drives the silicon wafer to move upward, so that the silicon wafer gradually separates from the loading bucket 4 to a certain height from the loading bucket 4, and then the second electric telescopic rod 20 is closed. Since the size of the support plate 17 in the utility model is smaller than the size of the silicon wafer, the silicon wafer will be exposed from the support plate 17, so that the silicon wafer coated with glue can be easily removed.

[0025] In another embodiment of the present invention, please refer to Figure 1 and Figure 2 The angle adjustment mechanism includes a motor 2, a gear 3 and a ring gear 5. The bottom end of the fixed frame 1 is fixedly connected to the motor 2, the output shaft end of the motor 2 is fixedly connected to the gear 3, and the circumferential surface of the loading bucket 4 is fixedly connected to the ring gear 5, which meshes with the gear 3. When the motor 2 is working, the output shaft end of the motor 2 drives the gear 3 to rotate, thereby driving the ring gear 5 to rotate, and the ring gear 5 drives the loading bucket 4 to rotate, thereby driving the support plate 17 and the silicon wafer located inside the loading bucket 4 to rotate, so as to facilitate the glue coating operation at different positions on the silicon wafer.

[0026] In another embodiment of the present invention, please refer to Figure 2 and Figure 3 The lower end of the support plate 17 is fixedly connected with a plurality of slide bars 6, which all penetrate the loading bucket 4 and are slidably connected to the loading bucket 4. During operation, under the action of the slide bars 6, not only can the support plate 17 be stably moved up and down, but the loading bucket 4 can also stably drive the support plate 17 to rotate.

[0027] In another embodiment of the present invention, refer to Figure 1 , Figure 2 and Figure 4 The air-drying component includes a fan 9, a first connecting pipe 10, an air nozzle 24, a diverter shell 23 and a support rod 19. The top of the fixed frame 1 is fixedly connected to the fan 9, the air outlet end of the fan 9 is fixedly connected to the first connecting pipe 10, the circumferential surface of the discharge pipe 22 is sleeved with a diverter shell 23, the bottom end of the diverter shell 23 is fixedly connected to a plurality of air nozzles 24, and the plurality of air nozzles 24 are interconnected with the diverter shell 23, and the plurality of air nozzles 24 are distributed around the discharge pipe 22, the end of the first connecting pipe 10 away from the fan 9 is fixedly connected to the diverter shell 23, and are interconnected, the circumferential surface of the diverter shell 23 is fixedly connected to a plurality of support rods 19, and the plurality of support rods 19 are fixedly connected to the liquid storage head 16. When the fan 9 is working, the wind generated enters the diverter shell 23 along the first connecting pipe 10, and is finally ejected through multiple air nozzles 24. The wind ejected from the air nozzles 24 can be blown directly to the silicon wafer. Since the multiple nozzles are distributed around the discharge pipe 22, the wind ejected from the air nozzles 24 will not be blown directly to the position where the silicon wafer is being coated with glue. The upper end of the silicon wafer on the left side of the discharge pipe 22 can be pre-dried by the wind blown out of the air nozzles 24, thereby accelerating the drying speed of the silicon wafer that has been coated with glue.

[0028] In another embodiment of the present invention, please refer to Figure 1 and Figure 2The first connecting tube 10 and the second connecting tube 11 are both retractable hoses. A rectangular hole is provided on the upper end surface of the fixing frame 1. The first connecting tube 10 and the second connecting tube 11 extend downward into the fixing frame 1 through the rectangular hole. The first electric telescopic rod 14 is controlled to work, which can drive the sliding seat 15 to move, and the liquid storage head 16 and the diverter shell 23 to move smoothly under the cooperation of the first connecting tube 10 and the second connecting tube 11. The first connecting tube 10 and the second connecting tube 11 will not affect the adjustment of the position of the liquid storage head 16 and the diverter shell 23.

[0029] In another embodiment of the present invention, please refer to Figure 1 and Figure 2 The upper end surface of the glue box 13 is provided with a filling hole. The filling hole is used to add glue into the inside of the glue box 13.

[0030] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A coating device for a developer, comprising a fixing frame (1), characterized in that: The top end of the fixed frame (1) is fixedly connected to a plastic box (13), the left end of the plastic box (13) is fixedly connected to a suction pump (12), the liquid inlet end of the suction pump (12) extends rightward into the plastic box (13), the liquid discharge end of the suction pump (12) is fixedly connected to a second connecting pipe (11), the circumferential surface of the second connecting pipe (11) is fixedly connected to a sliding seat (15), the lower end of the second connecting pipe (11) is fixedly connected to a liquid storage head (16), the lower end of the liquid storage head (16) is installed with an air drying component, the lower end of the liquid storage head (16) is fixedly connected to a discharge pipe (22), the top end of the fixed frame (1) is fixedly installed with a first electric telescopic rod (14), the output end of the first electric telescopic rod (14) is connected to the sliding seat (15), and the lower end of the second connecting pipe (11) is fixedly connected to a liquid storage head (16). The base (15) is fixedly connected; the inner bottom end of the fixed frame (1) is fixedly connected with a support tube (7) and a second electric telescopic rod (20); the inner part of the support tube (7) is rotatably connected with a rotating tube (8); the second electric telescopic rod (20) is located in the rotating tube (8); the upper end of the rotating tube (8) is fixedly connected with a loading bucket (4); a support plate (17) is placed inside the loading bucket (4); an angle adjustment mechanism is installed on the circumferential surface of the loading bucket (4); a circular hole (21) is opened on the lower end surface of the loading bucket (4); the output end of the second electric telescopic rod (20) is fixedly connected with a push block (18); the push block (18) is located in the circular hole (21), and the push block (18) is located directly below the support plate (17).

2. A coating device for a developer as claimed in claim 1, characterized in that: The angle adjustment mechanism comprises a motor (2), a gear (3) and a gear ring (5); the bottom end of the interior of the fixed frame (1) is fixedly connected to the motor (2); the output shaft end of the motor (2) is fixedly connected to the gear (3); the circumferential surface of the loading bucket (4) is fixedly connected to the gear ring (5); and the gear ring (5) is meshed with the gear (3).

3. A coating device for a developer as claimed in claim 1, characterized in that: The lower end of the support plate (17) is fixedly connected to a plurality of sliding rods (6), the plurality of sliding rods (6) all penetrate the cargo bucket (4), and the plurality of sliding rods (6) are all slidably connected to the cargo bucket (4).

4. A coating device for a developer as claimed in claim 1, characterized in that: The air-drying component comprises a fan (9), a first connecting pipe (10), an air nozzle (24), a diverter shell (23) and a support rod (19); the top end of the fixed frame (1) is fixedly connected to the fan (9); the air outlet end of the fan (9) is fixedly connected to the first connecting pipe (10); the circumferential surface of the discharge pipe (22) is sleeved with a diverter shell (23); the bottom end of the diverter shell (23) is fixedly connected to a plurality of air nozzles (24), and the plurality of air nozzles (24) are interconnected with the diverter shell (23); the plurality of air nozzles (24) are distributed around the discharge pipe (22); the end of the first connecting pipe (10) away from the fan (9) is fixedly connected to the diverter shell (23), and the plurality of air nozzles (24) are interconnected; the circumferential surface of the diverter shell (23) is fixedly connected to a plurality of support rods (19), and the plurality of support rods (19) are fixedly connected to the liquid storage head (16).

5. A coating device for a developer as claimed in claim 4, characterized in that: The first connecting tube (10) and the second connecting tube (11) are both retractable hoses, and a rectangular hole is provided on the upper end surface of the fixing frame (1). The first connecting tube (10) and the second connecting tube (11) both extend downward into the fixing frame (1) through the rectangular hole.

6. A coating device for a developer as claimed in claim 1, characterized in that: The upper end surface of the plastic box (13) is provided with a filling hole.

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