Device for classified and intensive storage of wafers

Abstract

The utility model relates to a device for classified and intensive storage of wafers, which comprises a storage chamber internally provided with a moving space located in the middle and storage areas located on two sides of the moving space, and the storage areas are provided with a plurality of material levels; the material taking and placing mechanism comprises a main body, a manipulator connected to the main body and a movable lifting assembly connected with the main body, the movable lifting assembly is located in the moving space, and the movable lifting assembly is configured to drive the manipulator and the main body to move in the extending direction of the moving space and lift up and down; each transplanting mechanism comprises a frame body suspended outside the storage chamber, a transplanting assembly connected to one end of the frame body and a caching assembly connected to the other end of the frame body; the transplanting assembly comprises a transplanting part and a material level platform used for placing a wafer material box. The transplanting part is configured to enable the material level platform to move in the length direction of the frame body, lift up and down and rotate in the horizontal plane. According to the utility model, high-efficiency and large-capacity storage of the wafer material box can be realized.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer production, and in particular to a device for classified and densely stored wafers. Background Art

[0002] After wafer production is completed, multiple wafers need to be packaged into wafer boxes. With the improvement of production lines, the production volume of wafers has increased significantly. However, the device originally used to store wafer boxes is a temporary storage device with insufficient storage capacity and low storage efficiency, so a large-capacity storage device is needed. Utility Model Content

[0003] Therefore, the technical problem to be solved by the utility model is to overcome the problems of insufficient storage capacity and low storage efficiency in the prior art.

[0004] In order to solve the above technical problems, the utility model provides a device for wafer classification and dense storage, comprising:

[0005] A storage room, which is provided with a moving space in the middle and storage areas on both sides of the moving space, and the storage areas are provided with multiple material positions;

[0006] The material taking and placing mechanism comprises a main body, a manipulator connected to the main body and a mobile lifting assembly connected to the main body, wherein the mobile lifting assembly is located in the mobile space and is configured to drive the manipulator and the main body to move along the extension direction of the mobile space and to move up and down;

[0007] Multiple transplanting mechanisms, the transplanting mechanisms include a frame suspended outside the storage room, a transplanting assembly connected to one end of the frame, and a cache assembly connected to the other end of the frame; the transplanting assembly includes a transplanting part and a material level platform for placing wafer material boxes, the material level platform is connected to the transplanting part, and the transplanting part is configured so that the material level platform moves along the length direction of the frame, rises and falls, and rotates in a horizontal plane; the cache assembly includes two material level brackets for placing wafer material boxes.

[0008] In one embodiment of the utility model, the mobile lifting assembly includes a first lifting part arranged on one side of the manipulator, the first lifting part includes a first power part, a first driving wheel, a first driven wheel and a first belt; the first power part is connected to the bottom end of the main body, the output end of the first power part is connected to the first driving wheel, the first driving wheel is rotatably connected to the bottom of the main body, the first driven wheel is rotatably connected to the top of the main body, the first belt is wound around the first driving wheel and the first driven wheel, and the manipulator is connected to the first belt.

[0009] In one embodiment of the utility model, the first lifting part also includes a first slide rail and a first slider; the first slide rail is vertically arranged on the main body, the first slider is slidably connected to the first slide rail, and the manipulator is connected to the first slider.

[0010] In one embodiment of the utility model, there are two first lifting parts, and the two lifting parts are symmetrically arranged on both sides of the robot.

[0011] In one embodiment of the utility model, the mobile lifting assembly also includes a first moving part, the first moving part includes a ceiling rail, a ground rail and a walking wheel assembly with power input; the ceiling rail is arranged along the length direction of the moving space and fixed to the top of the storage chamber; the ground rail is fixed to the bottom of the storage chamber and is located below the ceiling rail, and the ground rail includes a guide rail and a linear slide rail arranged side by side; the walking wheel assembly is rotatably connected to the main body, the walking wheel assembly is rollingly connected to the guide rail, and the main body is slidably connected to the linear slide rail; the top of the main body is rotatably connected to two rollers, the two rollers are symmetrically arranged on both sides of the ceiling rail and are rollingly connected to the ceiling rail.

[0012] In one embodiment of the utility model, the transplanting assembly includes a second moving part, a moving platform, a second lifting part, a lifting platform and a rotating part; the moving platform and the lifting platform are arranged in parallel with the material level platform; the moving platform is slidably connected to the frame through the second moving part, the lifting platform is slidably connected to the moving platform through the second lifting part, and the material level platform is rotatably connected to the lifting platform through the rotating part.

[0013] In one embodiment of the utility model, the second moving part includes a second power part, a second driving wheel, a second driven wheel and a second belt; the second power part is connected to the frame, the output end of the second power part is connected to the second driving wheel, the second driving wheel is rotatably connected to one end of the frame, the second driven wheel is rotatably connected to the other end of the frame, and the second belt is wound around the second driving wheel and the second driven wheel; the mobile platform is connected to the second belt.

[0014] In one embodiment of the utility model, the second moving part also includes a second slide rail and a second slider, the second slide rail extends along the moving direction of the moving platform, the moving platform is slidably connected to the second slider, and the second slider is connected to the bottom of the moving platform.

[0015] In one embodiment of the utility model, the second lifting part includes a third power part, a screw and a screw nut; the third power part is connected to the mobile platform, the screw passes through the mobile platform and is connected to the output end of the third power part, the screw nut is threadedly connected to the screw, and the screw nut is connected to the lifting platform.

[0016] In one embodiment of the utility model, the rotating part includes a fourth power unit, a third driving wheel, a third driven wheel and a third belt; the fourth power unit is connected to the lifting platform, the output end of the fourth power unit passes through the lifting platform and is connected to the third driving wheel, the third driven wheel is rotatably connected to the lifting platform, the third belt is wound around the third driving wheel and the third driven wheel, and the material level platform is connected to the third driven wheel.

[0017] The above technical solution of the utility model has the following advantages compared with the prior art:

[0018] The device for wafer classification and dense storage described in the utility model can quickly take out and put out materials, and is fully automated, so it can realize efficient and large-capacity storage of wafer boxes. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model and in combination with the accompanying drawings.

[0020] Figure 1 It is a structural schematic diagram of a device for wafer classification and dense storage in a preferred embodiment of the utility model;

[0021] Figure 2 yes Figure 1 A side view of a device for wafer classification and dense storage is shown;

[0022] Figure 3 yes Figure 1 A top view of a device for wafer classification and dense storage is shown;

[0023] Figure 4 yes Figure 1 A schematic diagram of the structure of a transfer assembly in a device for wafer classification and dense storage is shown;

[0024] Figure 5 yes Figure 4 A magnified image of point A;

[0025] Figure 6 yes Figure 4 The main view of

[0026] Figure 7 yes Figure 4 A schematic structural diagram of the second lifting portion of the transplanting assembly shown;

[0027] Figure 8 yes Figure 1 A schematic diagram of the structure of a material taking and placing mechanism in a device for wafer classification and dense storage is shown;

[0028] Fig. 9 yes Figure 8 The structural schematic diagram of the first lifting part of the material taking and placing mechanism shown;

[0029] Fig.10 yes Figure 8 A schematic diagram of the structure of the middle ground rail and the running wheel assembly;

[0030] Fig.11 yes Figure 8A schematic diagram of the structure of the mid-travel wheel assembly;

[0031] Fig.12 yes Figure 8 Schematic diagram of the structure of the Zhongtian Orbit.

[0032] Description of the reference numerals in the specification: 100, storage room; 110, mobile space; 120, storage area;

[0033] 200, material taking and unloading mechanism; 210, main body; 211, roller; 220, manipulator; 230, first lifting part; 231, first power part; 232, first driving wheel; 233, first driven wheel; 234, first belt; 235, first slide rail; 236, first slider; 240, first moving part; 241, ceiling rail; 242, floor rail; 2421, guide rail; 2422, linear slide rail; 2423, bottom guide rail fixing plate; 243, walking wheel assembly; 2431, support; 2432, pulley; 244, top guide rail fixing plate; 2411, main board; 2412, vertical board;

[0034] 300, transplanting mechanism; 310, frame; 320, transplanting assembly; 321, material level platform; 322, second moving part; 3221, second power part; 3222, second driving wheel; 3223, second driven wheel; 3224, second belt; 3225, second slide rail; 3226, second slider; 323, moving platform; 324, second lifting part; 3241, third power part; 3242, lead screw; 3243, lead screw nut; 325, lifting platform; 326, rotating part; 3261, fourth power part; 3262, third driving wheel; 3263, third driven wheel; 3264, third belt; 330, cache assembly; 331, material level bracket;

[0035] 400, wafer box;

[0036] 500, manual access port;

[0037] 600. Sensor. DETAILED DESCRIPTION

[0038] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the utility model and implement it, but the embodiments are not intended to limit the utility model.

[0039] Reference Figure 1 ~Shown Fig.12 The utility model provides a device for wafer classification and intensive storage, comprising:

[0040] The storage chamber 100 is provided with a moving space 110 in the middle and storage areas 120 on both sides of the moving space 110. The storage area 120 is provided with a plurality of material levels.

[0041] The material taking and placing mechanism 200 includes a main body 210, a manipulator 220 connected to the main body 210, and a mobile lifting assembly connected to the main body 210, the mobile lifting assembly is located in the mobile space 110, and the mobile lifting assembly is configured to drive the manipulator 220 and the main body 210 to move along the extension direction of the mobile space 110 and to move up and down;

[0042] A plurality of transplanting mechanisms 300, the transplanting mechanisms 300 include a frame 310 suspended outside the storage chamber 100, a transplanting assembly 320 connected to one end of the frame 310, and a cache assembly 330 connected to the other end of the frame 310; the transplanting assembly 320 includes a transplanting part and a material level platform 321 for placing a wafer material box 400, the material level platform 321 is connected to the transplanting part, and the transplanting part is configured so that the material level platform 321 moves along the length direction of the frame 310, rises and falls, and rotates in a horizontal plane; the cache assembly 330 includes two material level brackets 331 for placing the wafer material box 400, the two material level brackets 331 are arranged side by side in the width direction of the material level platform 321, and the distance between the two material level brackets 331 is greater than the width of the material level platform 321.

[0043] The process of taking and placing materials in this embodiment is as follows:

[0044] When material storage is required, the external device puts the wafer material box 400 into the transfer assembly 320 of the transfer mechanism 300, and the transfer assembly rotates and reverses the wafer material box 400, and then the transfer assembly rises and moves. When the transfer assembly moves to between the two material level brackets 331, it stops moving, and then descends to place the wafer material box 400 on the material level bracket 331 and then moves back to its position. At this time, the robot 220 moves to the side of the transfer mechanism 300 and grabs the wafer material box 400 from the material level bracket 331, and then moves along the extension direction of the moving space 110 and stores it at the specified material level. When it is necessary to take materials, the robot 220 takes out the wafer box 400 from the material level and moves to the side of the transfer mechanism 300 and places the wafer box 400 on the material level support 331. The transfer assembly then moves between the two material level supports 331 and rises to transfer the wafer box 400 from the material level support 331 to its material level platform 321 until the wafer box 400 is detached from the material level support 331. The transfer assembly then moves the wafer box 400 back to its original position and then rotates and reverses. At this time, the external device can remove the wafer box 400.

[0045] It can be seen that the material taking and placing mechanism 200 in this embodiment can quickly take and place materials, and is fully automated, so it can achieve efficient and large-capacity storage of wafer material boxes 400.

[0046] Furthermore, the present embodiment further comprises a manual access opening 500, and the manual access opening 500 is provided with a material access mechanism 200. When a failure occurs, the material can be stored manually from the manual access opening 500.

[0047] Furthermore, a sensor 600 for identifying whether a wafer cassette 400 is placed on the material level platform 321 is provided at the starting position of the transfer mechanism 300. A sensor 600 for identifying whether a wafer cassette 400 is placed on the material level platform 321 is also provided at the buffer component 330.

[0048] Further, the mobile lifting assembly includes a first lifting part 230 disposed on one side of the manipulator 220, the first lifting part 230 includes a first power part 231, a first driving wheel 232, a first driven wheel 233 and a first belt 234; the first power part 231 is connected to the bottom end of the main body 210, the output end of the first power part 231 is connected to the first driving wheel 232, the first driving wheel 232 is rotatably connected to the bottom of the main body 210, the first driven wheel 233 is rotatably connected to the top of the main body 210, the first belt 234 is wound around the first driving wheel 232 and the first driven wheel 233, and the manipulator 220 is connected to the first belt 234. Specifically, the first lifting part 230 in this embodiment has a simple structure and operates smoothly and reliably.

[0049] Furthermore, the first lifting part 230 also includes a first slide rail 235 and a first slider 236 ; the first slide rail 235 is vertically arranged on the main body 210 , the first slider 236 is slidably connected to the first slide rail 235 , and the manipulator 220 is connected to the first slider 236 .

[0050] Specifically, the first slide rail 235 and the first slider 236 in this embodiment enable the robot 220 to move up and down more smoothly and reliably.

[0051] Furthermore, there are two first lifting parts 230, and the two first lifting parts 230 are symmetrically arranged on both sides of the robot 220. In some embodiments, the two first lifting parts 230 share one first power part 231.

[0052] Specifically, the two first lifting parts 230 of this embodiment enable the robot arm 220 to be lifted and lowered more smoothly.

[0053] Further, the mobile lifting assembly also includes a first moving part 240, which includes a ceiling rail 241, a floor rail 242, and a walking wheel assembly 243 with power input; the ceiling rail 241 is arranged along the length direction of the moving space 110 and fixed to the top of the storage room 100; for example, the ceiling rail 241 is fixedly connected to the top of the storage room 100 through a plurality of top guide rail fixing plates 244. The floor rail 242 is fixed to the bottom of the storage room 100 and is located below the ceiling rail 241. The floor rail 242 includes a guide rail 2421 and a linear slide rail 2422 arranged side by side; for example, the guide rail 2421 and the linear slide rail 2422 are fixedly connected to the bottom of the storage room 100 through a plurality of bottom guide rail fixing plates 2423. The walking wheel assembly 243 is rotatably connected to the main body 210, the walking wheel assembly 243 is rollingly connected to the guide rail 2421, and the main body 210 is slidably connected to the linear slide rail 2422; for example, a slider is connected to the bottom of the main body 210, and the slider is slidably connected to the linear slide rail 2422. The top of the main body 210 is rotatably connected to two rollers 211, and the two rollers 211 are symmetrically arranged on both sides of the ceiling rail 241 and are rollingly connected to the ceiling rail 241. In some embodiments, the walking wheel assembly 243 includes a support 2431 and a pulley 2432 with power input, the support 2431 is connected to the main body 210, the pulley 2432 is rotatably connected to the support 2431, and the pulley 2432 is rollingly connected to the guide rail 2421. In some embodiments, the ceiling rail 241 includes a main board 2411 and a vertical board 2412 vertically fixed to the bottom of the main board 2411, and the two rollers 211 are located on both sides of the vertical board 2412 and are rollingly connected to the vertical board 2412. Specifically, in this embodiment, the main body 210 and the manipulator 220 are driven to move along the ceiling rail 241 and the ground rail 242 by the walking wheel assembly 243 .

[0054] Further, the transplanting assembly 320 includes a second moving part 322, a moving platform 323, a second lifting part 324, a lifting platform 325 and a rotating part 326; the moving platform 323 and the lifting platform 325 are arranged in parallel with the material level platform 321; the moving platform 323 is slidably connected to the frame 310 through the second moving part 322, the lifting platform 325 is slidably connected to the moving platform 323 through the second lifting part 324, and the material level platform 321 is rotationally connected to the lifting platform 325 through the rotating part 326. Specifically, the second moving part 322 in this embodiment drives the moving platform 323, the second lifting part 324, the lifting platform 325, the rotating part 326 and the material level platform 321 to move relative to the frame 310; the lifting platform 325 drives the lifting platform 325, the rotating part 326 and the material level platform 321 to move up and down relative to the moving platform 323, and the rotating part 326 drives the material level platform 321 to rotate relative to the lifting platform 325.

[0055] Further, the second moving part 322 includes a second power part 3221, a second driving wheel 3222, a second driven wheel 3223 and a second belt 3224; the second power part 3221 is connected to the frame 310, the output end of the second power part 3221 is connected to the second driving wheel 3222, the second driving wheel 3222 is rotatably connected to one end of the frame 310, the second driven wheel 3223 is rotatably connected to the other end of the frame 310, and the second belt 3224 is wound around the second driving wheel 3222 and the second driven wheel 3223; the mobile platform 323 is connected to the second belt 3224. Specifically, the present embodiment realizes the movement of the mobile platform 323 through the cooperation of the second driving wheel 3222, the second driven wheel 3223 and the second belt 3224, and the structure is stable and reliable.

[0056] Furthermore, the second moving part 322 further includes a second slide rail 3225 and a second slider 3226, the second slide rail 3225 extends along the moving direction of the moving platform 323, the moving platform 323 is slidably connected to the second slider 3226, and the second slider 3226 is connected to the bottom of the moving platform 323. Specifically, the second slide rail 3225 and the second slider 3226 in this embodiment play a guiding role, so that the movement of the moving platform 323 is smoother.

[0057] Further, the second lifting part 324 includes a third power part 3241, a lead screw 3242 and a lead screw nut 3243; the third power part 3241 is connected to the mobile platform 323, the lead screw 3242 passes through the mobile platform 323 and is connected to the output end of the third power part 3241, the lead screw nut 3243 is threadedly connected to the lead screw 3242, and the lead screw nut 3243 is connected to the lifting platform 325. Specifically, the mechanism of the second lifting part 324 of this embodiment is simple, stable and reliable.

[0058] Further, the rotating part 326 includes a fourth power part 3261, a third driving wheel 3262, a third driven wheel 3263 and a third belt 3264; the fourth power part 3261 is connected to the lifting platform 325, the output end of the fourth power part 3261 passes through the lifting platform 325 and is connected to the third driving wheel 3262, the third driven wheel 3263 is rotatably connected to the lifting platform 325, the third belt 3264 is wound around the third driving wheel 3262 and the third driven wheel 3263, and the material level platform 321 is connected to the third driven wheel 3263. Specifically, the rotating part 326 of this embodiment stably and reliably realizes the rotation of the material level platform 321 in the horizontal plane, and realizes the adjustment of the direction of the wafer material box 400 placed on the material level platform 321.

[0059] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the utility model creation.

Claims

1. A device for wafer classification and dense storage, characterized in that: include: A storage chamber, wherein a moving space is provided in the middle and storage areas are provided on both sides of the moving space, wherein the storage areas are provided with a plurality of material levels; The material taking and placing mechanism comprises a main body, a manipulator connected to the main body, and a mobile lifting assembly connected to the main body, wherein the mobile lifting assembly is located in the mobile space, and the mobile lifting assembly is configured to drive the manipulator and the main body to move along the extension direction of the mobile space and to move up and down; A plurality of transfer mechanisms, wherein the transfer mechanisms include a frame suspended outside the storage chamber, a transfer assembly connected to one end of the frame, and a cache assembly connected to the other end of the frame; the transfer assembly includes a transfer part and a material level platform for placing wafer material boxes, the material level platform is connected to the transfer part, and the transfer part is configured so that the material level platform moves along the length direction of the frame, rises and falls, and rotates in a horizontal plane; the cache assembly includes two material level brackets for placing wafer material boxes.

2. The device for wafer classification and intensive storage according to claim 1, characterized in that: The mobile lifting assembly includes a first lifting part arranged on one side of the manipulator, the first lifting part includes a first power part, a first driving wheel, a first driven wheel and a first belt; the first power part is connected to the bottom end of the main body, the output end of the first power part is connected to the first driving wheel, the first driving wheel is rotatably connected to the bottom of the main body, the first driven wheel is rotatably connected to the top of the main body, the first belt is wound around the first driving wheel and the first driven wheel, and the manipulator is connected to the first belt.

3. The device for wafer classification and intensive storage according to claim 2, characterized in that: The first lifting part also includes a first slide rail and a first slider; the first slide rail is vertically arranged on the main body, the first slider is slidably connected to the first slide rail, and the manipulator is connected to the first slider.

4. The device for wafer classification and intensive storage according to claim 3, characterized in that: There are two first lifting parts, and the two lifting parts are symmetrically arranged on both sides of the robot.

5. The device for wafer classification and intensive storage according to claim 1, characterized in that: The mobile lifting assembly also includes a first moving part, which includes a ceiling rail, a ground rail and a walking wheel assembly with power input; the ceiling rail is arranged along the length direction of the moving space and fixed to the top of the storage room; the ground rail is fixed to the bottom of the storage room and is located below the ceiling rail, and the ground rail includes a guide rail and a linear slide rail arranged side by side; the walking wheel assembly is rotatably connected to the main body, the walking wheel assembly is rollingly connected to the guide rail, and the main body is slidably connected to the linear slide rail; the top of the main body is rotatably connected to two rollers, and the two rollers are symmetrically arranged on both sides of the ceiling rail and are rollingly connected to the ceiling rail.

6. The device for wafer classification and intensive storage according to claim 1, characterized in that: The transplanting assembly includes a second moving part, a moving platform, a second lifting part, a lifting platform and a rotating part; the moving platform and the lifting platform are arranged in parallel with the material level platform; the moving platform is slidably connected to the frame through the second moving part, the lifting platform is slidably connected to the moving platform through the second lifting part, and the material level platform is rotatably connected to the lifting platform through the rotating part.

7. The device for wafer classification and intensive storage according to claim 6, characterized in that: The second moving part includes a second power part, a second driving wheel, a second driven wheel and a second belt; the second power part is connected to the frame, the output end of the second power part is connected to the second driving wheel, the second driving wheel is rotatably connected to one end of the frame, the second driven wheel is rotatably connected to the other end of the frame, and the second belt is wound around the second driving wheel and the second driven wheel; the mobile platform is connected to the second belt.

8. The device for wafer classification and intensive storage according to claim 7, characterized in that: The second moving part further includes a second slide rail and a second slider, the second slide rail extends along the moving direction of the moving platform, the moving platform is slidably connected to the second slider, and the second slider is connected to the bottom of the moving platform.

9. The device for wafer classification and intensive storage according to claim 8, characterized in that: The second lifting part includes a third power part, a screw and a screw nut; the third power part is connected to the mobile platform, the screw passes through the mobile platform and is connected to the output end of the third power part, the screw nut is threadedly connected to the screw, and the screw nut is connected to the lifting platform.

10. The device for wafer classification and intensive storage according to claim 9, characterized in that: The rotating part includes a fourth power unit, a third driving wheel, a third driven wheel and a third belt; the fourth power unit is connected to the lifting platform, the output end of the fourth power unit passes through the lifting platform and is connected to the third driving wheel, the third driven wheel is rotatably connected to the lifting platform, the third belt is wound around the third driving wheel and the third driven wheel, and the material level platform is connected to the third driven wheel.

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