Single horizontal wafer box

Abstract

The single horizontal wafer box comprises a box body, a top edge and a connector, an opening of the box body faces upwards, a circle of top edge is fixedly connected to the top opening of the box body, the connector is installed on the back of the box body, a top cover is movably connected to the upper portion of the box body through the connector, and an identification arrow is arranged in the middle of the surface of the top cover. The wafer packaging box has the advantages that when the top cover is buckled with the box body, the plurality of pressing points on the rib ring are pressed on the edge of the surface of the wafer and are in a circumferential array, the wafer is effectively prevented from moving and being damaged, the pressing points are made of an elastic silica gel material, the wafer is prevented from being crushed, meanwhile, the plurality of elastic pieces are designed around the rib ring, and when the top cover is buckled with the box body, the elastic pieces are not damaged. The bent part of the elastic sheet abuts against the gasket and surrounds the periphery of the wafer, the wafer can be effectively prevented from displacing and moving, the elastic sheet is made of a plastic material, and through the cooperation of the structures, the wafer can be protected to the maximum extent, the wafer is effectively prevented from moving, the position of the wafer is locked, and the wafer is prevented from being damaged.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer boxes, in particular to a single-chip horizontal wafer box. Background Art

[0002] Wafer boxes are mainly used for wafer transportation and storage in semiconductor manufacturing. Wafer boxes are containers used to place and transport wafers, which are basic materials used in the semiconductor manufacturing process. In order to simplify the transportation process and minimize the risk of wafer contamination, chip manufacturers use wafer boxes to handle and store wafers. Wafer boxes are usually made of heat-resistant, wear-resistant, and anti-static translucent plastic.

[0003] In the prior art, conventional single-wafer boxes only contain single wafers, and generally adopt a square box design. The wafers are loaded inside the box when the box is buckled. However, the internal wafers of this single-wafer box often shift and move during transportation, which undoubtedly increases the risk of wafer damage during transportation. The fundamental reason is that the wafers are simply loaded in the box without being well positioned. Therefore, a new single-wafer horizontal wafer box is proposed to solve the above problem. Utility Model Content

[0004] The purpose of the present invention is to solve at least one of the above technical deficiencies.

[0005] Therefore, one purpose of the present invention is to provide a single-wafer horizontal box to solve the problems mentioned in the background technology and overcome the shortcomings of the prior art.

[0006] In order to achieve the above-mentioned purpose, an embodiment of the utility model provides a single-wafer horizontal box, including a box body, a top edge, and a joint, wherein the box body is opened upward, a circle of top edge is fixedly connected to the top opening of the box body, and a joint is installed at the back of the box body;

[0007] A top cover is movably connected to the top of the box body through a joint, and a marking arrow is arranged in the middle of the surface of the top cover;

[0008] When the top cover is closed over the box body, it is buckled on the outer surface of the top edge;

[0009] The front side of the top cover is fixedly connected with a male buckle position, and the front side of the box body is fixedly connected with a female buckle position matched with the male buckle position;

[0010] A gasket is fixedly connected to the inner side of the box body, and a notch is provided at the edge of the gasket;

[0011] A rib ring is fixedly connected to the middle of the inner side of the top cover, and a plurality of pressure points are fixedly connected to the surface of the rib ring;

[0012] A plurality of spring sheets are fixedly connected to the inner side of the top cover, and the spring sheets are in a bent shape.

[0013] Preferably, any of the above solutions is that the box body and the top cover are both made of plastic material, and the box body and the top cover are both transparent structures.

[0014] Adopting the above technical solution: this device is specially used for containing single wafers.

[0015] The top cover has a marking arrow, and the top cover marks the switch direction, which is convenient for users to load or remove wafers.

[0016] The box body and top cover are locked with male and female buckles, which effectively prevents the top cover from falling off during transportation.

[0017] Preferably, any of the above schemes has a thickness of the top cover that is smaller than that of the box body, the male buckle is in a barb shape, the male buckle is hot-melt connected to the top cover, and both the male buckle and the female buckle are made of plastic.

[0018] Adopting the above technical solution: the core structure of this device is: gasket, rib ring, pressure point, spring. The core advantages of this device are: the soft gasket is used to place a single wafer. When the top cover is buckled into the box body, several pressure points on the rib ring are pressed on the edge of the wafer surface and are arranged in a circular array, which effectively prevents the wafer from moving and damaging. The pressure points are made of elastic silicone material to prevent the wafer from being crushed.

[0019] At the same time, several spring sheets are designed around the rib ring. When the top cover is buckled, the bent part of the spring sheet abuts against the gasket and surrounds the wafer, which can effectively prevent the wafer from being displaced and moved. The spring sheet is made of plastic. The combination of these structures can protect the wafer to the greatest extent, effectively prevent the wafer from moving, lock the wafer position, and prevent the wafer from being damaged.

[0020] Preferably, any of the above schemes is that the gasket is circular as a whole and is made of silicone.

[0021] Preferably, any of the above schemes is that the rib ring is in a circular ring shape, the pressure point is in a columnar shape, and the pressure point is bonded to the rib ring.

[0022] Preferably, any of the above schemes is that the pressure points are arranged in a circular array around the axis of the rib ring, and the material of the pressure points is silicone.

[0023] The above technical solution is adopted: the design of the top edge can ensure the sealing of the inside of the box body when the top cover is buckled, thereby reducing the generation of dust inside the box body.

[0024] The above technical solution is adopted: the design of the notch can facilitate the wafer to be taken out from the notch, thereby facilitating the removal of the wafer.

[0025] Preferably, any of the above schemes is that the root of the spring sheet is bonded to the inner side of the top cover, the cross-sectional shape of the spring sheet is V-shaped, and the spring sheets are arranged in a circular array around the axis of the rib ring.

[0026] Compared with the prior art, the advantages and beneficial effects of the utility model are:

[0027] The single-wafer horizontal wafer box is arranged by the coordination of gaskets, ribs, pressure points and springs. The soft gasket is used to place the single wafer. When the top cover is buckled on the box body, several pressure points on the ribs are pressed on the edge of the wafer surface and are arranged in a circular array, which effectively prevents the wafer from moving and preventing the wafer from being damaged. The pressure points are made of elastic silicone material to prevent the wafer from being crushed. At the same time, several springs are designed around the ribs. When the top cover is buckled, the bent part of the spring abuts against the gasket and surrounds the wafer, which can effectively prevent the wafer from being displaced and moved. The springs are made of plastic material. The coordination of these structures can protect the wafer to the greatest extent, effectively prevent the wafer from moving, lock the wafer position and prevent the wafer from being damaged.

[0028] Additional aspects and advantages of the present invention will be given in part in the following description and in part will become apparent from the following description or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0030] Figure 1 It is a structural schematic diagram of the utility model from the first perspective;

[0031] Figure 2 It is a structural schematic diagram of the utility model from a second viewing angle;

[0032] Figure 3 It is a structural schematic diagram of the utility model from a third viewing angle;

[0033] Figure 4 It is a structural schematic diagram of the utility model from a fourth viewing angle.

[0034] In the figure: 1-box body, 2-top edge, 3-joint, 4-top cover, 5-marking arrow, 6-male buckle position, 7-female buckle position, 8-gasket, 9-notch, 10-rib ring, 11-pressure point, 12-spring. DETAILED DESCRIPTION

[0035] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0036] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] like Figure 1-4 As shown, the single-chip horizontal wafer box includes a box body 1, a top edge 2, and a joint 3. The box body 1 is opened upward, a circle of the top edge 2 is fixedly connected to the top opening of the box body 1, and a joint 3 is installed on the back of the box body 1;

[0038] A top cover 4 is movably connected to the top of the box body 1 through a joint 3, and a marking arrow 5 is provided in the middle of the surface of the top cover 4;

[0039] The top cover 4 is buckled on the outer surface of the top edge 2 when covering the box body 1;

[0040] A male buckle position 6 is fixedly connected to the front of the top cover 4, and a female buckle position 7 matching the male buckle position 6 is fixedly connected to the front of the box body 1;

[0041] A gasket 8 is fixedly connected to the inner side of the box body 1, and a notch 9 is formed at the edge of the gasket 8;

[0042] A rib ring 10 is fixedly connected to the middle of the inner side of the top cover 4, and a plurality of pressure points 11 are fixedly connected to the surface of the rib ring 10;

[0043] A plurality of spring sheets 12 are fixedly connected to the inner side of the top cover 4 , and the spring sheets 12 are bent.

[0044] Embodiment 1: The box body 1 and the top cover 4 are both made of plastic, and both are transparent structures. This device is specifically used for containing single wafers. The top cover 4 has an identification arrow 5, and the top cover 4 indicates the switch direction, which is convenient for users to load or remove wafers. The box body 1 and the top cover 4 are locked with a male buckle 6 and a female buckle 7, which effectively avoids the problem of the top cover 4 falling out during transportation. The thickness of the top cover 4 is less than that of the box body 1, and the male buckle 6 is a barb shape. The male buckle 6 is hot-melt connected to the top cover 4, and the male buckle 6 and the female buckle 7 are both made of plastic.

[0045] Embodiment 2: The gasket 8 is circular as a whole, and the material of the gasket 8 is silicone. The rib ring 10 is annular, and the pressure point 11 is columnar, and the pressure point 11 is bonded to the rib ring 10. The pressure points 11 are arranged in a circular array around the axis of the rib ring 10, and the material of the pressure points 11 is silicone. The design of the top edge 2 can ensure the closure of the interior of the box body 1 and reduce the generation of dust inside the box body 1 when the top cover 4 is buckled. The design of the notch 9 can facilitate the removal of the wafer from the notch 9. The root of the spring 12 is bonded to the inner side of the top cover 4, and the cross-sectional shape of the spring 12 is V-shaped. The spring 12 is arranged in a circular array around the axis of the rib ring 10.

[0046] The working principle of the utility model is as follows:

[0047] The top cover 4 is buckled with the box body 1, and the male buckle position 6 is locked with the female buckle position 7;

[0048] The soft gasket 8 is used to place a single wafer. When the top cover 4 is buckled with the box body 1, a plurality of pressure points 11 on the rib ring 10 are pressed on the edge of the wafer surface in a circular array, which effectively prevents the wafer from moving.

[0049] When the top cover 4 is buckled, the bent part of the spring 12 abuts against the gasket 8 and surrounds the wafer, which can effectively prevent the wafer from being displaced or moved.

[0050] When the male buckle 6 is pulled outward, the male buckle 6 is separated from the female buckle 7, the top cover 4 is opened, and the wafer is taken out from the notch 9.

[0051] Compared with the prior art, the present invention has the following beneficial effects:

[0052] The single-chip horizontal wafer box is arranged by the coordination of a gasket 8, a rib ring 10, a pressure point 11, and a spring 12. The soft gasket 8 is used to place the single wafer. When the top cover 4 is buckled with the box body 1, several pressure points 11 on the rib ring 10 are pressed on the edge of the wafer surface and are arranged in a circular array, which effectively prevents the wafer from moving and preventing the wafer from being damaged. The pressure point 11 is made of elastic silicone material to prevent the wafer from being crushed. At the same time, several springs 12 are designed around the rib ring 10. When the top cover 4 is buckled, the bending part of the spring 12 abuts against the gasket 8 and surrounds the wafer, which can effectively prevent the wafer from being displaced and moved. The spring 12 is made of plastic material. The coordination of these structures can protect the wafer to the greatest extent, effectively prevent the wafer from moving, lock the wafer position, and prevent the wafer from being damaged.

Claims

1. A single-wafer horizontal cassette, characterized in that: It comprises a box body (1), a top edge (2), and a joint (3); the box body (1) is opened upward, a circle of the top edge (2) is fixedly connected to the top opening of the box body (1), and the joint (3) is installed on the back of the box body (1); A top cover (4) is movably connected to the top of the box body (1) via a joint (3), and a marking arrow (5) is provided in the middle of the surface of the top cover (4); The top cover (4) is buckled on the outer surface of the top edge (2) when covering the box body (1); The front of the top cover (4) is fixedly connected with a male buckle position (6), and the front of the box body (1) is fixedly connected with a female buckle position (7) matched with the male buckle position (6); A gasket (8) is fixedly connected to the inner side of the box body (1), and a notch (9) is provided at the edge of the gasket (8); a rib ring (10) is fixedly connected to the middle of the inner side of the top cover (4), and a plurality of pressure points (11) are fixedly connected to the surface of the rib ring (10); A plurality of spring sheets (12) are fixedly connected to the inner side of the top cover (4), and the spring sheets (12) are in a bent shape.

2. A single-wafer horizontal cassette as claimed in claim 1, characterized in that: The box body (1) and the top cover (4) are both made of plastic material, and the box body (1) and the top cover (4) are both transparent structures.

3. A single-wafer horizontal cassette as claimed in claim 2, characterized in that: The thickness of the top cover (4) is smaller than the thickness of the box body (1); the male buckle (6) is in the shape of a barb; the male buckle (6) is connected to the top cover (4) by hot-melt; and the male buckle (6) and the female buckle (7) are both made of plastic.

4. A single-wafer horizontal cassette as claimed in claim 3, characterized in that: The gasket (8) is circular in shape as a whole and is made of silica gel.

5. A single-wafer horizontal cassette as claimed in claim 4, characterized in that: The rib ring (10) is in the shape of a ring, the pressure point (11) is in the shape of a column, and the pressure point (11) is bonded to the rib ring (10).

6. A single-wafer horizontal cassette as claimed in claim 5, characterized in that: The pressure points (11) are arranged in a circular array around the axis of the rib ring (10), and the material of the pressure points (11) is silicone.

7. A single-wafer horizontal cassette as claimed in claim 6, characterized in that: The root of the spring sheet (12) is bonded to the inner side of the top cover (4); the cross-sectional shape of the spring sheet (12) is V-shaped; the spring sheets (12) are arranged in a circular array around the axis of the rib ring (10).

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