Scratch prevention tool

Abstract

The utility model provides an anti-scratch tool, and relates to the technical field of semiconductors, the anti-scratch tool comprises a connecting piece and a plurality of flexible partition plates, the plurality of flexible partition plates are fixedly arranged on the connecting piece, the plurality of flexible partition plates are parallel to each other, and the plane where the flexible partition plates are located is parallel to the opening direction of a card plug box. A plurality of flexible partition plates are arranged on the connecting piece, the flexible partition plates are parallel to one another, the limiting grooves are formed between the adjacent flexible partition plates, the wafers are inserted into the limiting grooves, the scratching prevention tool is arranged on the clamping plug box, the flexible partition plates are arranged on the connecting piece, the flexible partition plates are parallel to one another, the limiting grooves are formed between the adjacent flexible partition plates, and the wafers are inserted into the limiting grooves. According to the technical scheme, the wafers are in contact with the flexible partition plates for limiting, collision between the wafers and the adjacent wafers is avoided, the flexible partition plates are made of soft materials, pp materials or Teflon materials, the wafers cannot be scratched even if the wafers collide with the tool, and therefore the wafers are protected.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an anti-scratch tooling. Background Art

[0002] Silicon chips, also known as wafers, are made from silicon ingots. Through a special process, millions of transistors can be etched on silicon wafers. They are widely used in the manufacture of integrated circuits.

[0003] Traditionally, wafers are directly stored in the card slots in the card box. When taking and placing wafers, if the placement is unstable, the wafers will hit adjacent wafers. The collision of wafers may cause scratches, affecting the quality of the wafers and even causing the wafers to be scrapped, resulting in property losses. Utility Model Content

[0004] The embodiment of the present application provides an anti-scratch tooling that can separate wafers. The tooling is made of soft material, so even if the wafer hits the tooling, it will not cause scratches on the wafer. This solves the problem of traditional wafer storage devices that when taking and placing wafers, wafers may collide with each other, causing scratches and affecting the quality of the wafers.

[0005] The embodiment of the present application provides an anti-scratch tool, including a connecting piece and a flexible partition;

[0006] The connecting piece is arranged on the plug box, the flexible partition is made of soft material, PP material or Teflon material, a plurality of the flexible partitions are fixed on the connecting piece, and at least part of the flexible partition is located at the open end of the plug box;

[0007] The plurality of flexible baffles are parallel to each other, and the planes on which the flexible baffles are located are parallel to the opening direction of the plug box. Limiting grooves are formed between adjacent flexible baffles, and the wafers are inserted into the limiting grooves.

[0008] In a feasible implementation, the flexible partition includes a connecting component and a limiting component;

[0009] Both ends of the connecting component are connected to the connecting piece, and the limiting component is arranged at the end of the connecting component facing the plug box.

[0010] In a feasible implementation, the flexible partition further includes an extension component;

[0011] The extension component is arranged at the end of the limiting component facing the plug box.

[0012] In a feasible implementation, the connecting component, the limiting component and the extending component are an integrated structure, the limiting component is located in the middle of the connecting component, the extending component is located in the middle of the limiting component, and the flexible partition is an axisymmetric structure.

[0013] In a feasible implementation, an avoidance groove is provided on the side of the limiting component facing away from the plug box.

[0014] In a feasible implementation, a conical chamfer is provided on the side of the flexible partition facing away from the plug box.

[0015] In a feasible implementation, the connecting member includes a frame, and the frame is arranged at the open end of the plug box;

[0016] The plurality of flexible partitions are all fixedly arranged on the inner wall of the frame.

[0017] In a feasible implementation, a plug rod is provided on the side of the frame facing the plug box, a plug hole is provided on the side of the frame facing away from the plug box, and the outer diameter of the plug rod matches the inner diameter of the plug hole.

[0018] In a feasible implementation, the insertion hole is a through hole, and the insertion rod and the insertion hole are respectively located on two sides of the frame.

[0019] In a feasible implementation, the edges and corners of the frame are provided with arc chamfers.

[0020] An anti-scratch tooling is provided in an embodiment of the present application. The anti-scratch tooling is arranged on a card box. A plurality of flexible partitions are arranged on a connecting piece. The plurality of flexible partitions are parallel to each other. Limiting grooves are formed between adjacent flexible partitions. Wafers are inserted into the limiting grooves. When taking and placing wafers, when shaking occurs, the wafers contact and limit with the flexible partitions to avoid collision with adjacent wafers. Moreover, the flexible partitions are made of soft material, PP material or Teflon material. Even if the wafer touches the tooling, it will not cause scratches on the wafer, thereby protecting the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the anti-scratch tooling provided by the present application;

[0022] Figure 2 It is a top view of the anti-scratch tooling;

[0023] Figure 3 is a schematic diagram of the structure of a flexible partition;

[0024] Figure 4 It is a structural diagram of the connecting parts.

[0025] Description of reference numerals:

[0026] 10-connecting piece; 20-flexible partition; 30-limiting groove;

[0027] 11-frame; 12-insertion rod; 13-insertion hole; 21-connecting component; 22-limiting component; 23-extension component; 24-avoidance groove. DETAILED DESCRIPTION

[0028] In order to enable those skilled in the art to better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work should fall within the scope of protection of the present application.

[0029] Traditionally, wafers are directly stored in the slots in the card box. When taking and placing wafers, if the placement and placement is unstable, the wafers will hit adjacent wafers. The collision of wafers may cause scratches, affecting the quality of the wafers, and even causing the wafers to be scrapped, resulting in property losses. The present application sets up an anti-scratch tooling on the top of the card box. The anti-scratch tooling can separate the wafers. The anti-scratch tooling is shown in the figure below. The tooling material is soft material, PP material or Teflon material. Even if the wafer hits the tooling, it will not cause scratches on the wafer.

[0030] The specific structure of the anti-scratch tooling provided by the present application is described in detail below in conjunction with the accompanying drawings.

[0031] Reference Figure 1-Figure 4 As shown, the embodiment of the present application provides an anti-scratch tool, including a connecting member 10 and a flexible partition 20;

[0032] The connector 10 is disposed on the plug box, and the connector 10 does not cover the open end of the plug box, so that the wafer can be inserted into the plug box;

[0033] The flexible baffle 20 is a planar structure, made of soft material, PP material or Teflon material, and will not cause scratches on the wafer even if the wafer hits the tooling. A plurality of the flexible baffles 20 are fixed on the connecting member 10, and at least part of the flexible baffles 20 is located at the open end of the plug box;

[0034] The plurality of flexible baffles 20 are parallel to each other, and the planes where the flexible baffles 20 are located are parallel to the opening direction of the plug box, and limiting grooves 30 are formed between adjacent flexible baffles 20. Figure 1 and Figure 2As shown, the plurality of flexible partitions 20 are arranged longitudinally, and the adjacent flexible partitions 20 form longitudinal limit grooves 30, and the plurality of longitudinal limit grooves 30 are equal in number to the plurality of card slots in the card box, and the positions correspond one to one. When the wafers are stored, the wafers are sequentially inserted into the limit grooves 30 and the card slots of the card box from top to bottom.

[0035] An anti-scratch tooling is provided in an embodiment of the present application. The anti-scratch tooling is arranged on a plug box. A plurality of flexible baffles 20 are arranged on a connector 10. The plurality of flexible baffles 20 are parallel to each other. Limiting grooves 30 are formed between adjacent flexible baffles 20. Wafers are inserted into the limiting grooves 30. When the wafers are taken and placed, when shaking occurs, the wafers contact and limit with the flexible baffles 20 to avoid collision with adjacent wafers. Moreover, the flexible baffles 20 are made of soft material, PP material or Teflon material. Even if the wafer touches the tooling, it will not cause scratches on the wafer, thereby protecting the wafer.

[0036] Reference Figure 3 As shown, in some embodiments, the flexible partition 20 includes a connecting component 21 and a limiting component 22;

[0037] The connecting component 21 may be a slat, both ends of which are connected to the connecting piece 10, the limiting component 22 is disposed on the connecting component 21 and protrudes toward the plug box side, and the connecting component 21 and the limiting component 22 may be an integral structure.

[0038] In some embodiments, the flexible partition 20 further includes an extension member 23;

[0039] The extension component 23 can be a square plate, and the thickness thereof matches that of the limiting component 22 . The extension component 23 is disposed at the end of the limiting component 22 facing the plug box.

[0040] The connecting component 21, the limiting component 22 and the extending component 23 are an integrated structure, and the limiting component 22 is located in the middle of the connecting component 21, the extending component 23 is located in the middle of the limiting component 22, and the flexible partition 20 is an axisymmetric structure.

[0041] The side of the limiting component 22 facing away from the plug box is provided with an avoidance groove 24 , which can ensure that after the wafer is stored, the upper part of the wafer extends out of the flexible partition 20 , thereby facilitating the taking and placing of the flexible partition 20 .

[0042] The side of the flexible baffle 20 facing away from the plug box is provided with a conical chamfer, and both sides of the upper end of the flexible baffle 20 are provided with inclined surfaces so that the cross section of the flexible baffle 20 is triangular, thereby facilitating the insertion of the wafer into the limiting groove 30.

[0043] Reference Figure 4As shown, in some embodiments, the connecting member 10 includes a frame 11, which may be rectangular and matched with the open end of the plug box. When the frame 11 is arranged at the open end of the plug box, in the longitudinal projection, the inner contour of the open end of the plug box is completely located in the inner contour of the frame 11, that is, the frame 11 does not cover the open end of the plug box.

[0044] The plurality of flexible baffles 20 are fixedly mounted on the inner wall of the frame 11, and the two ends of the flexible baffles 20 in the length direction are respectively connected to the two opposite inner walls of the frame 11;

[0045] Multiple flexible partitions 20 can be evenly arranged in the frame 11 to form multiple limiting grooves 30 of equal width for storing wafers of the same specification; multiple flexible partitions 20 can also be arranged at other intervals to form limiting grooves 30 of multiple widths for storing wafers of various specifications.

[0046] The position of the limit groove 30 in the anti-scratch tooling should correspond to the slot of the plug box. In order to facilitate the wafer to be inserted into the limit groove 30 and the slot in sequence, when the flexible partition 20 is extended into the plug box, the bottom end of the extension part 23 should be as close to the inner wall of the plug box as possible.

[0047] The flexible partition 20 and the frame 11 may be an integral structure and may be injection molded.

[0048] Reference Figure 4 As shown, in some embodiments, the frame 11 is provided with an insertion rod 12 on the side facing the plug box, the insertion rod 12 is a round rod, the frame 11 is provided with an insertion hole 13 on the side facing away from the plug box, the insertion hole 13 is a round hole, and the outer diameter of the insertion rod 12 matches the inner diameter of the insertion hole 13;

[0049] When the anti-scratch tooling is connected to the plug box, the open end of the plug box has a circular plug hole, and the plug rod 12 of the anti-scratch tooling is plugged into the circular plug hole of the plug box to ensure that the anti-scratch tooling is stably connected to the plug box.

[0050] The insertion hole 13 is a through hole, and the insertion rod 12 and the insertion hole 13 are respectively located on both sides of the frame 11. Figure 4 As shown, the two insertion rods 12 are respectively located on the left and right sides of the rear portion of the lower surface of the frame 11, and the two insertion holes 13 are respectively located on the left and right sides of the front portion of the frame 11;

[0051] When the anti-scratch tooling is connected to the plug box, the connecting column at the open end of the plug box can be plugged into the plug hole 13 of the anti-scratch tooling;

[0052] Or an end cover is provided at the upper end of the anti-scratch tooling, and the end cover and the plug box form a closed cavity to protect the wafer. The connecting column of the end cover can be plugged into the socket 13 of the anti-scratch tooling, so as to stably fix the end cover.

[0053] Reference Figure 4 As shown, in some embodiments, the edges and corners of the frame 11 are provided with arc chamfers.

[0054] According to the above technical features, the working principle of the anti-scratch tooling provided by this application in actual application scenarios is:

[0055] When using the anti-scratch tool, the anti-scratch tool should be matched with the corresponding plug box, that is, the number and position of the limit grooves 30 of the anti-scratch tool should correspond to the number and position of the slots of the plug box;

[0056] When in use, the anti-scratch tooling is assembled on the open end of the plug box, specifically: the plug rod 12 of the anti-scratch tooling is plugged into the circular plug hole of the plug box, and the connecting column at the open end of the plug box is plugged into the plug hole 13 of the anti-scratch tooling, so that the anti-scratch tooling is stably connected to the plug box;

[0057] When depositing a wafer, the upper side wall of the wafer is connected through a vacuum suction device, and the wafer is inserted into the limit groove 30 and the card slot in sequence; when taking out the wafer, the vacuum suction device is extended into the avoidance groove 24, connected to the upper side wall of the wafer, and the wafer can be taken out by moving upward. During this process, when shaking occurs, the wafer contacts and limits the flexible partition 20 to avoid collision with adjacent wafers. In addition, the flexible partition 20 is made of soft material, PP material or Teflon material. Even if the wafer touches the tooling, it will not cause scratches on the wafer, thereby protecting the wafer.

[0058] It is easy to understand that those skilled in the art can combine, split, reorganize, etc. the embodiments of the present application to obtain other embodiments based on the several embodiments provided in the present application, and these embodiments do not exceed the protection scope of the present application.

[0059] The above specific implementation methods further explain in detail the purpose, technical solutions and beneficial effects of the embodiments of the present application. It should be understood that the above are only specific implementation methods of the embodiments of the present application and are not used to limit the protection scope of the embodiments of the present application. Any modifications, equivalent substitutions, improvements, etc. made on the basis of the technical solutions of the embodiments of the present application should be included in the protection scope of the embodiments of the present application.

Claims

1. A scratch-proof tooling, characterized in that: include; A connecting piece (10), wherein the connecting piece (10) is arranged on the plug box; A flexible baffle (20), wherein a plurality of the flexible baffles (20) are fixedly mounted on the connecting member (10), and at least a portion of the flexible baffles (20) is located at an open end of the plug box; The plurality of flexible baffles (20) are parallel to each other, and the planes on which the flexible baffles (20) are located are parallel to the opening direction of the plug box, and limiting grooves (30) are formed between adjacent flexible baffles (20), and the wafer is inserted into the limiting grooves (30).

2. The anti-scratch tooling according to claim 1, characterized in that: The flexible partition (20) comprises: A connecting component (21), both ends of which are connected to the connecting piece (10); A limiting component (22), wherein the limiting component (22) is arranged at the end of the connecting component (21) facing the plug box.

3. The anti-scratch tooling according to claim 2, characterized in that: The flexible partition (20) further comprises an extension component (23); The extension component (23) is arranged at the end of the limiting component (22) facing the plug box.

4. The anti-scratch tooling according to claim 3, characterized in that: The connecting component (21), the limiting component (22) and the extending component (23) are an integrated structure, the limiting component (22) is located in the middle of the connecting component (21), the extending component (23) is located in the middle of the limiting component (22), and the flexible partition (20) is an axisymmetric structure.

5. The anti-scratch tooling according to claim 2, characterized in that: The side of the limiting component (22) facing away from the plug box is provided with an avoidance groove (24).

6. The anti-scratch tooling according to any one of claims 1 to 5, characterized in that: The side of the flexible partition (20) facing away from the plug box is provided with a conical chamfer.

7. The anti-scratch tooling according to claim 1, characterized in that: The connecting member (10) comprises a frame (11), and the frame (11) is arranged at the open end of the plug box; The plurality of flexible partitions (20) are fixedly mounted on the inner wall of the frame (11).

8. The anti-scratch tooling according to claim 7, characterized in that: The side of the frame (11) facing the plug box is provided with an insertion rod (12), the side of the frame (11) facing away from the plug box is provided with an insertion hole (13), and the outer diameter of the insertion rod (12) matches the inner diameter of the insertion hole (13).

9. The anti-scratch tooling according to claim 8, characterized in that: The insertion hole (13) is a through hole, and the insertion rod (12) and the insertion hole (13) are respectively located on two sides of the frame (11).

10. The anti-scratch tool according to claim 7, characterized in that: The corners of the frame (11) are provided with arc chamfers.

Images