Mask adjusting device

Abstract

The utility model provides a mask plate adjusting device. The mask plate adjusting device comprises two first connecting pieces and a pair of clamping mechanisms, the first connecting piece extends along a second direction; each clamping mechanism comprises a second connecting piece, a top piece, an adjusting mechanism and a distance measuring mechanism. The second connecting piece extends in the first direction, and the first direction and the second direction intersect. The second connecting piece is arranged on the first connecting piece; the second connecting pieces are provided with clamping grooves, and groove openings of the clamping grooves of the two second connecting pieces are opposite in the second direction. The first side walls of the clamping grooves of the pair of clamping mechanisms are flush. The top piece is located in the clamping groove, and the top piece and the first side wall of the clamping groove are oppositely arranged in the first direction. The adjusting mechanism is arranged on the second connecting piece, connected with the top piece and used for driving the top piece to move in the first direction so that the top piece can be close to or away from the first side wall. The distance measuring mechanism is used for measuring the distance between the top piece and the first side wall in the first direction.

Description

Technical Field

[0001] The present application relates to the technical field of mask plates, and in particular to a mask plate adjusting device. Background Art

[0002] A mask is a metal layer or photoresist layer with information such as graphics and text on its surface. Masks are widely used in industries such as IC, FPD, MEMS, and optical devices. During the etching process, a horizontal mask is used to etch a pattern on an optical film. However, if the mask is tilted, the etched pattern will be damaged. Utility Model Content

[0003] The main technical problem solved by the present application is to provide a mask adjustment device to solve the problem that the mask is tilted, which may cause damage to the etching pattern.

[0004] In order to solve the above technical problems, the first technical solution adopted by the present application is: to provide a mask adjustment device. The mask adjustment device includes two first connecting members and a pair of clamping mechanisms; the first connecting member extends along the second direction; wherein each clamping mechanism includes a second connecting member, a top plate, an adjustment mechanism and a distance measuring mechanism; the second connecting member extends along the first direction, and the first direction and the second direction intersect; the second connecting member is arranged on the first connecting member; the second connecting member has a clamping groove, and the notches of the clamping grooves of the two second connecting members are opposite to each other along the second direction; the first side walls of the clamping grooves of the pair of clamping mechanisms are flush. The top plate is located in the clamping groove and is arranged opposite to the first side wall of the clamping groove along the first direction. The adjustment mechanism is arranged on the second connecting member, connected to the top plate, and is used to drive the top plate to move along the first direction so that the top plate is close to or away from the first side wall. The distance measuring mechanism is used to measure the distance between the top plate and the first side wall along the first direction.

[0005] In this embodiment, the adjustment mechanism moves the top plate along the first direction, changes the distance between the top plate and the first side wall, and can clamp masks of different thicknesses between the top plate and the first side wall; and can also clamp the mask to prevent loosening. When the mask is tightened, since the thickness of the mask is uniform, when the distances between the top plate and the first side wall measured by the two distance measuring mechanisms are equal, it means that the mask is in a state perpendicular to the first direction, that is, the mask is not tilted, so that a qualified pattern can be etched using the mask, thereby solving the problem that the mask is tilted and the etched pattern is damaged. In addition, by using the coordination of the adjustment mechanism, the top plate and the distance measuring mechanism, the horizontal state of the mask, for example, can be determined quickly, thereby avoiding the step of manually measuring the level of the mask after installation.

[0006] In some embodiments, the adjustment mechanism includes a first adjustment mechanism and a second adjustment mechanism; the first adjustment mechanism is arranged on the second connecting member and connected to the second adjustment mechanism, and is used to drive the second adjustment mechanism to move along the first direction; the second adjustment mechanism is used to drive the top sheet to move so that the top sheet is close to or away from the first side wall.

[0007] In some embodiments, the adjustment mechanism also includes a connecting plate, the first adjustment mechanism is a first screw, and the second adjustment mechanism is a second screw; the first screw is threadedly connected to the second connecting member and is rotatably arranged with the connecting plate; the second screw is threadedly connected to the connecting plate and is rotatably arranged with the top plate.

[0008] In some embodiments, the distance measuring mechanism is a distance sensor.

[0009] In some embodiments, the clamping mechanism further includes a back plate disposed on the second connecting member; the back plate is located on a side of the first side wall away from the top sheet and is flush with the first side wall.

[0010] In some embodiments, the clamping mechanism also includes a moving mechanism and a driving mechanism, the second connecting member is arranged on the first connecting member through the moving mechanism, and the second connecting member moves along the second direction; the driving mechanism is arranged on the first connecting member and connected to the moving mechanism, and is used to drive the moving mechanism to move.

[0011] In some embodiments, the clamping mechanism further includes: a controller electrically connected to the driving mechanism and used to control the driving mechanism to start or stop.

[0012] In some embodiments, the mask adjustment device further includes: two third connecting members; the third connecting members extend along the first direction and are connected to the first connecting members to form a frame; and the two second connecting members are located between the two third connecting members.

[0013] In some embodiments, the first connector, the first connector, and the second connector are rods.

[0014] In some embodiments, the distance measuring mechanism is disposed on the top sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 is a structural schematic diagram of the mask adjustment device provided by the present application;

[0017] Figure 2It is a structural schematic diagram of the adjustment mechanism provided in this application.

[0018] In the figure: 1. first connecting member; 2. second connecting member; 3. third connecting member; 4. clamping groove; 5. back plate; 6. adjustment mechanism; 7. top plate; 8. mask plate; 9. first screw; 10. second screw; 11. connecting plate; 12. bearing. DETAILED DESCRIPTION

[0019] The scheme of the embodiment of the present application is described in detail below in conjunction with the drawings of the specification.

[0020] In the following description, for the purpose of explanation rather than limitation, specific details such as specific system structures, interfaces, and technologies are provided to facilitate a thorough understanding of the present application.

[0021] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0022] The terms "first", "second", "third" in this application are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined as "first", "second", "third" can expressly or implicitly include at least one of the features. In the description of this application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In the embodiments of this application, all directional indications (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication also changes accordingly. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the steps or units listed, but optionally also includes steps or units that are not listed, or optionally also includes other steps or units inherent to these processes, methods, products or devices.

[0023] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0024] The embodiment of the present disclosure provides a mask adjustment device. Figure 1 and Figure 2 The mask adjustment device comprises two first connecting members 1 and a pair of clamping mechanisms; the first connecting members 1 extend along the second direction Y.

[0025] In some examples, the mask adjustment device further includes two third connecting members 3; the third connecting members 3 extend along the first direction X and are connected to the first connecting member 1 to form a frame. The first direction X and the second direction Y intersect (e.g., are perpendicular). The first connecting member 1, the first connecting member 1 and the second connecting member 2 are structures such as rods, columns, and beams. When in use, one end of the first connecting member 1 can be placed on a workbench or bottom surface.

[0026] The clamping mechanism comprises a second connecting member 2, an adjusting mechanism 6, a top sheet 7 and a distance measuring mechanism.

[0027] The second connecting member 2 extends along the first direction X, and the second connecting member 2 is arranged on the first connecting member 1 .

[0028] In some examples, the two second connectors 2 are located between the two third connectors 3. For example, the second connector 2 is parallel to the third connector 3.

[0029] The second connecting member 2 is arranged on the first connecting member 1, which means that both ends of the second connecting member 2 are respectively connected to the two first connecting members 1. Exemplarily, the second connecting member 2 is fixedly arranged on the first connecting member 1.

[0030] As another example, the second connecting member 2 is movably disposed on the first connecting member 1 and can move along the second direction Y. Thus, the second connecting members 2 of the two clamping mechanisms are moved closer to or farther from each other, so that a pair of clamping mechanisms can clamp masks 8 of different sizes.

[0031] In some examples, the clamping mechanism further includes a moving mechanism and a driving mechanism. The second connecting member 2 is arranged on the first connecting member 1 through the moving mechanism, and the second connecting member 2 moves along the second direction Y. The driving mechanism is arranged on the first connecting member and is connected to the moving mechanism for driving the moving mechanism to move. In this way, the moving mechanism is driven by the driving mechanism so that the second connecting member 2 moves along the second direction Y on the first connecting member 1. The moving mechanism can be a slider and a slide groove, for example, the first connecting member 1 is provided with a slide groove along the second direction Y, and a slider is provided at the end of the second connecting member 2, and the slider can slide in the slide groove. Of course, the moving mechanism can also be a slider and a slide rail, etc. The driving mechanism can be a telescopic mechanism, for example, a telescopic mechanism is installed on the first connecting member 1, and the telescopic mechanism is connected to the slider, which is used to drive the slider to slide in the slide groove. Of course, the driving mechanism can also be a motor, etc.

[0032] In some examples, one end of the second connector 2 is movably connected to one first connector 1 through a moving mechanism and a driving mechanism. The other end of the second connector 2 is movably connected to another first connector 1 through a moving mechanism and a driving mechanism; of course, the other end of the second connector 2 is only movably connected to another first connector 1 through a moving mechanism.

[0033] In some examples, the clamping mechanism further includes a controller, which is electrically connected to the driving mechanism and is used to control the driving mechanism to start or stop. The controller is a conventional structure in the art and will not be described in detail. Of course, the controller can also control the driving mechanism to perform some actions, for example, the controller can control the speed of the driving mechanism to change the moving speed of the second connecting member 2. When the two second connecting members 2 approach each other, the controller controls the driving mechanism so that the speed of the two second connecting members 2 approaching each other is slower to prevent collision.

[0034] The second connecting member 2 has a clamping groove 4. The notches of the clamping grooves 4 of the two second connecting members 2 are opposite to each other along the second direction Y.

[0035] The top sheet 7 is located in the clamping groove 4 and is arranged opposite to the first side wall of the clamping groove 4 along the first direction X. The adjustment mechanism 6 is arranged on the second connecting member 2 and connected to the top sheet 7, and is used to drive the top sheet 7 to move along the first direction X so that the top sheet 7 is close to or away from the first side wall. In this way, the adjustment mechanism 6 moves the top sheet 7 along the first direction X, changes the distance between the top sheet 7 and the first side wall, and can clamp the mask 8 of different thicknesses between the top sheet 7 and the first side wall; and can also clamp the mask 8 to prevent it from loosening.

[0036] The adjustment mechanism 6 includes a first adjustment mechanism and a second adjustment mechanism; the first adjustment mechanism is arranged on the second connecting member 2 and connected to the second adjustment mechanism, and is used to drive the second adjustment mechanism to move along the first direction X; the second adjustment mechanism is used to drive the top sheet 7 to move so that the top sheet 7 is close to or away from the first side wall. In this way, the first adjustment mechanism drives the second adjustment mechanism and the top sheet 7 to move along the first direction X, so that the first adjustment mechanism plays a role of coarse adjustment; the second adjustment mechanism drives the top sheet 7 to move along the first direction X, so that the second adjustment mechanism plays a role of fine adjustment.

[0037] Exemplarily, the first adjusting mechanism and the second adjusting mechanism may be an electric push rod, a hydraulic telescopic mechanism, or the like.

[0038] Also exemplarily, the adjustment mechanism 6 also includes a connecting plate 11, the first adjustment mechanism is a first screw 9, and the second adjustment mechanism is a second screw 10; the first screw 9 is threadedly connected to the second connecting member 2, and the first screw 9 is rotatably arranged with the connecting plate 11; the second screw 10 is threadedly connected to the connecting plate 11, and the second screw 10 is rotatably arranged with the top plate 7.

[0039] The axis of the first screw 9 and the axis of the second screw 10 are both perpendicular to the first side wall.

[0040] The first screw 9 is rotatably arranged with the connecting plate 11. For example, the first screw 9 is connected with the connecting plate 11 through the bearing 12, so as to prevent the connecting plate 11 from rotating with the first screw 9. The first screw 9 is sleeved in the inner ring of the bearing 12, and the connecting plate 11 is sleeved in the outer ring of the bearing 12. For example, a threaded hole is provided on the second connecting member 2, and the first screw 9 is threadedly connected in the threaded hole. The threaded hole can be connected with the clamping groove 4, and the axis of the threaded hole is perpendicular to the first side wall. For another example, a nut is provided on the second connecting member 2, and the first screw 9 is threadedly connected in the nut.

[0041] The second screw 10 is rotatably arranged with the top sheet 7. For example, the second screw 10 is connected to the top sheet 7 through a bearing 12, so as to prevent the top sheet 7 from rotating with the second screw 10. The second screw 10 is sleeved in the inner ring of the bearing 12, and the top sheet 7 is sleeved in the outer ring of the bearing 12. For example, a threaded hole is provided on the connecting plate 11, and the second screw 10 can be threadedly connected in the threaded hole. For another example, the connecting plate 11 can be a nut.

[0042] In some examples, the top sheet 7 is slidably disposed in the clamping groove 4. For example, the clamping groove 4 is provided with a slide groove extending along the first direction X, and a portion of the top sheet 7 slides in the slide groove.

[0043] In some examples, the clamping mechanism further includes a back plate 5, which is disposed on the second connecting member 2; the back plate 5 is located on a side of the first side wall away from the top plate 7 and is flush with the first side wall. In this way, the size of the clamping groove 4 along the second direction Y is indirectly increased, thereby preventing the mask 8 from slipping out of the clamping groove 4.

[0044] The first side walls of the clamping grooves 4 of the pair of clamping mechanisms are flush. The distance measuring mechanism is used to measure the distance between the top sheet 7 and the first side wall along the first direction X. In this way, when the distances between the top sheet 7 and the first side wall measured by the two distance measuring mechanisms are equal, it means that the clamped mask 8 is in a state perpendicular to the first direction X (for example, Figure 1 , that is, the mask 8 is not tilted, thereby solving the problem of needing to manually measure the level of the mask 8.

[0045] When in use, if the values ​​measured by the two distance measuring mechanisms are different, the first adjusting mechanism and the second adjusting mechanism of the two clamping mechanisms can be adjusted respectively so that the values ​​measured by the distance measuring mechanisms of a pair of clamping mechanisms are the same.

[0046] The distance measuring mechanism is a distance sensor, which can be an infrared sensor or other sensors, which is common knowledge in the art and will not be described in detail. The distance measuring mechanism can also be a caliper or the like.

[0047] In some examples, the distance measuring mechanism is arranged on the top sheet 7. Of course, the distance measuring mechanism can also be arranged on the second connecting member 2.

[0048] The above description is only an implementation method of the present application, and does not limit the patent protection scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A mask adjustment device, characterized in that: The invention comprises two first connecting members and a pair of clamping mechanisms; the first connecting members extend along the second direction; wherein each of the clamping mechanisms comprises: A second connecting member extends along a first direction, the first direction and the second direction intersect each other; the second connecting member is arranged on the first connecting member; the second connecting member has a clamping groove, and the notches of the clamping grooves of the two second connecting members are opposite to each other along the second direction; the first side walls of the clamping grooves of a pair of clamping mechanisms are flush; A top sheet, located in the clamping groove and arranged opposite to the first side wall of the clamping groove along the first direction; an adjusting mechanism, disposed on the second connecting member and connected to the top sheet, and used for driving the top sheet to move along the first direction so that the top sheet is close to or away from the first side wall; The distance measuring mechanism is used to measure the distance between the top sheet and the first side wall along the first direction.

2. The mask adjustment device according to claim 1, characterized in that: The adjustment mechanism includes a first adjustment mechanism and a second adjustment mechanism; the first adjustment mechanism is arranged on the second connecting member and connected to the second adjustment mechanism, and is used to drive the second adjustment mechanism to move along the first direction; the second adjustment mechanism is used to drive the top sheet to move so that the top sheet is close to or away from the first side wall.

3. The mask adjustment device according to claim 2, characterized in that: The adjustment mechanism also includes a connecting plate, the first adjustment mechanism is a first screw, and the second adjustment mechanism is a second screw; the first screw is threadedly connected to the second connecting member and is rotatably arranged with the connecting plate; the second screw is threadedly connected to the connecting plate and is rotatably arranged with the top plate.

4. The mask adjustment device according to claim 1, characterized in that: The distance measuring mechanism is a distance sensor.

5. The mask adjustment device according to claim 1, characterized in that: The clamping mechanism also includes: A back plate is arranged on the second connecting member; the back plate is located on a side of the first side wall away from the top sheet and is flush with the first side wall.

6. The mask adjustment device according to claim 1, characterized in that: The clamping mechanism also includes: a moving mechanism, wherein the second connecting member is arranged on the first connecting member through the moving mechanism, and the second connecting member moves along the second direction; The driving mechanism is arranged on the first connecting member and connected to the moving mechanism, and is used for driving the moving mechanism to move.

7. The mask adjustment device according to claim 6, characterized in that: The clamping mechanism also includes: The controller is electrically connected to the driving mechanism and is used to control the driving mechanism to start or stop.

8. The mask adjustment device according to claim 6, characterized in that: The mask adjustment device also includes: Two third connecting members; the third connecting members extend along the first direction and are connected with the first connecting members to form a frame; the two second connecting members are located between the two third connecting members.

9. The mask adjustment device according to claim 8, characterized in that: The first connecting member, the first connecting member and the second connecting member are rods.

10. The mask adjustment device according to claim 1, characterized in that: The distance measuring mechanism is arranged on the top sheet.

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