Electric lifting device for installation and maintenance of semiconductor equipment

Abstract

The utility model discloses an electric lifting device for installation and maintenance of semiconductor equipment, which comprises two upright posts, a lifting mechanism for lifting the equipment is arranged in the upright posts, the lifting mechanism comprises a sliding chute, a screw rod, a sliding block, a first support arm and a second support arm, the sliding chute is arranged in the upright posts, the screw rod is arranged in the sliding chute, and the sliding block is arranged in the sliding chute. A sliding groove is formed in the stand column, a screw rod is movably arranged in the sliding groove through a bearing, a sliding block is movably arranged at the lower end in the sliding groove in a clamped mode, first supporting arms are movably arranged on the two sides of the surface of the sliding block through rotating shafts, second supporting arms are movably arranged in the first supporting arms in a penetrating and inserting mode, and a transmission mechanism used for driving the screw rod to rotate is arranged in the stand column. According to the utility model, the first support arm and the second support arm can be conveniently adjusted to rotate and extend according to needs, so that the device can conveniently adapt to lifting of various semiconductor devices from four corners of the device; therefore, the lifting stability is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of electric lifters, in particular to an electric lifter for installing and repairing semiconductor equipment. Background Art

[0002] Semiconductor assembly is a systematic assembly line work. Semiconductor assembly equipment is mainly divided into front-end manufacturing equipment and back-end packaging and testing equipment.

[0003] Front-end manufacturing equipment mainly includes photolithography equipment, etching equipment, thin film deposition equipment, ion implantation equipment, cleaning equipment, mechanical polishing equipment and diffusion equipment. Back-end packaging equipment is mainly divided into wafer thinning machine, dicing machine, placement machine, wire bonding machine, plastic sealing machine and rib cutting machine according to the process flow, and testing equipment mainly includes sorting machine, testing machine and probe station.

[0004] Both front-end manufacturing equipment and back-end packaging equipment are generally more precise during use, so special attention should be paid to lifting and maintenance during maintenance. How to ensure the stability of lifting is crucial. In the prior art, lifting equipment is often used for lifting semiconductor equipment or lifting equipment with bottom support. The lifting equipment is less practical inside the factory building, and the lifting equipment with bottom support in the prior art generally needs to be lifted from the four corners of the semiconductor equipment to ensure stable lifting. However, the above-mentioned semiconductor equipment is of many types and sizes, and the lifting in the prior art cannot quickly adjust the lifting structure to the four corners of the equipment for lifting, and its applicability is limited. Therefore, in view of this problem, there is a need to improve an electric lifter for installation and maintenance of semiconductor equipment. Utility Model Content

[0005] The purpose of the utility model is to provide an electric lifter for installing and repairing semiconductor equipment to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an electric lifter for installing and repairing semiconductor equipment, comprising a column, two of which are provided, a lifting mechanism for lifting the equipment is provided inside the column, the lifting mechanism comprises a slide groove, a screw, a slider, a first arm, and a second arm, a slide groove is provided inside the column, a screw is movably provided inside the slide groove through a bearing, a slider is movably engaged with the lower end of the slide groove, first arms are movably provided on both sides of the surface of the slider through a rotating shaft, a second arm is movably inserted inside the first arm, and a transmission mechanism for driving the screw to rotate is provided inside the column.

[0007] Preferably, the transmission mechanism includes an extension rod, a first transmission rod, a second transmission rod, a first bevel gear, and a second bevel gear. The extension rod is fixedly provided at the lower end of the column, the first transmission rod is movably provided inside the right extension rod through a bearing, and the second transmission rod is movably provided inside the left extension rod through a bearing; the first bevel gear is fixedly provided at one end of the first transmission rod and the second transmission rod, and the second bevel gear is fixedly provided at the lower end of the screw rod, and the two screw rods can be driven to rotate simultaneously through the transmission mechanism; and when the extension rod, the first support arm, and the second support arm are inserted to the lower end of the equipment to be lifted, the two screw rods can still be rotated conveniently and quickly.

[0008] Preferably, the first bevel gear and the second bevel gear are meshed with each other; the direction of force transmission can be changed by the mutual meshing of the first bevel gear and the second bevel gear; the screw rod can be rotated when the first transmission rod and the second transmission rod rotate; thereby, the slider can be moved up along the slide groove under the driving action of the thread.

[0009] Preferably, the lower ends of the extension rod and the column are movably provided with universal wheels, and the universal wheels can facilitate the movement of the entire pushing device.

[0010] Preferably, a slot is fixedly provided at one end of the first transmission rod, and a rod is fixedly provided at one end of the second transmission rod. When the rod is inserted into the slot, the first transmission rod and the second transmission rod can be linked together.

[0011] Preferably, a pad is fixedly provided on the outer surface of the second arm, and the pad can further improve the stability of the second arm when lifting the device; at the same time, it also has a certain buffering effect.

[0012] Preferably, the interior of the slider is movably sleeved on the outer surface of the screw rod through a thread; the slider can be driven to move up and down inside the slide groove by rotating the screw rod.

[0013] Preferably, a limit ring is fixedly provided at the upper end of the screw, a fixed plate is fixedly provided at the upper end of the inner part of the slide groove, and the screw is movably provided inside the fixed plate; since the lower end of the screw of the device is not supported to the bottom; and the screw needs to be subjected to force when lifting the semiconductor equipment; at this time, the stability of the force on the screw can be ensured by the limit ring and the fixed plate; and the screw and the fixed plate can be movably connected by a bearing; to ensure that the screw can rotate normally.

[0014] Preferably, one end of the first transmission rod is inserted through the column and extends to the outside of the column, and a rotating device is fixedly provided at one end of the first transmission rod; Figure 4As shown, one end extends to the outside of the column, the purpose of which is to facilitate the rotation of the first transmission rod, thereby facilitating the rotation of the second transmission rod; and this rotating device can be a handwheel, a handle, or any other device that can utilize the lever principle to conveniently rotate the first transmission rod; it can also be an electric motor structure connected to a reducer; the electric motor is utilized to drive the first transmission rod and the second transmission rod to rotate.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] 1. The first arm and the second arm of the utility model can be rotated and adjusted by an angle of more than 90 degrees as needed; and the second arm can be extended and moved inside the first arm; thereby, the overall length of the first arm and the second arm can be changed; thus, the device can be adapted to lift a variety of semiconductor devices; thereby, the scope of application of the device can be greatly improved.

[0017] 2. The utility model has a split design, which allows the first arm and the second arm to be easily inserted into the lower end of the device that needs to be lifted. If the device is not a split design, since the lower end of the semiconductor device is provided with legs, the first arm and the second arm will not be able to be inserted into the lower end of the device. Such a split design is convenient for use.

[0018] 3. The utility model sets the card slot on the surface of the first transmission rod onto the card rod on the surface of the second transmission rod; in this way, the first transmission rod and the second transmission rod can be linked together; in this way, the two screw rods can be driven to rotate at the same time; it is easy to use and can ensure that the left and right screw rods can rotate at the same time; the four first arms and the second arms can be lifted at the same time to ensure the stability of the lifting; it is suitable for lifting high-precision semiconductor equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the overall structure of an electric lifter for installation and maintenance of semiconductor equipment according to the utility model;

[0020] Figure 2 This is a side view of an electric lifter for installing and repairing semiconductor equipment according to the utility model;

[0021] Figure 3 This is a cross-sectional view of an electric lifter for installing and repairing semiconductor equipment according to the utility model;

[0022] Figure 4 The utility model is a rotation view of the first arm of an electric lifter for installing and repairing semiconductor equipment.

[0023] In the figure: 1, column; 2, slide groove; 3, screw rod; 4, slider; 5, first arm; 6, second arm; 7, extension rod; 8, first transmission rod; 9, second transmission rod; 10, first bevel gear; 11, second bevel gear; 12, universal wheel; 13, slot; 14, clamping rod; 15, cushion block; 16, limit ring; 17, fixing plate. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-4 The utility model provides a technical solution: an electric lifter for semiconductor equipment installation and maintenance, including a column 1, two of which are provided, and a lifting mechanism for lifting equipment is provided inside the column 1, and the lifting mechanism includes a slide 2, a screw 3, a slider 4, a first arm 5, and a second arm 6. The column 1 is provided with a slide 2, and a screw 3 is movably provided inside the slide 2 through a bearing, and a slider 4 is movably engaged with the lower end of the slide 2, and the first arm 5 is movably provided on both sides of the surface of the slider 4 through a rotating shaft, and a second arm 6 is movably inserted inside the first arm 5, and a transmission mechanism for driving the screw 3 to rotate is provided inside the column 1.

[0026] The transmission mechanism includes an extension rod 7, a first transmission rod 8, a second transmission rod 9, a first bevel gear 10, and a second bevel gear 11. The extension rod 7 is fixedly provided at the lower end of the column 1, and the first transmission rod 8 is movably provided inside the right extension rod 7 through a bearing, and the second transmission rod 9 is movably provided inside the left extension rod 7 through a bearing; the first bevel gear 10 is fixedly provided at one end of the first transmission rod 8 and the second transmission rod 9, and the second bevel gear 11 is fixedly provided at the lower end of the screw rod 3, and the two screw rods 3 can be driven to rotate simultaneously through the transmission mechanism; and when the extension rod 7, the first support arm 5, and the second support arm 6 are inserted into the lower end of the device to be lifted, the two screw rods 3 can still be rotated conveniently and quickly;

[0027] The first bevel gear 10 and the second bevel gear 11 are meshed with each other; the direction of force transmission can be changed by the meshing of the first bevel gear 10 and the second bevel gear 11; the screw rod 3 can be rotated when the first transmission rod 8 and the second transmission rod 9 rotate; thereby, the slider 4 can be moved up along the slide groove 2 under the driving action of the thread;

[0028] The lower ends of the extension rod 7 and the column 1 are both movably provided with universal wheels 12, and the universal wheels 12 can facilitate the movement of the entire pushing device;

[0029] A clamping groove 13 is fixedly provided at one end of the first transmission rod 8, and a clamping rod 14 is fixedly provided at one end of the second transmission rod 9. When the clamping rod 14 is inserted into the clamping groove 13, the first transmission rod 8 and the second transmission rod 9 can be linked together;

[0030] A cushion block 15 is fixedly provided on the outer surface of the second arm 6, and the cushion block 15 can further improve the stability of the second arm 6 when lifting the device; and also has a certain buffering effect;

[0031] The slider 4 is movably sleeved on the outer surface of the screw rod 3 through a thread; the rotation of the screw rod 3 can drive the slider 4 to move up and down inside the slide groove 2;

[0032] A limit ring 16 is fixedly arranged at the upper end of the screw rod 3, a fixed plate 17 is fixedly arranged at the upper end of the inner part of the slide groove 2, and the screw rod 3 is movably arranged inside the fixed plate 17; since the lower end of the screw rod 3 of the device is not supported to the bottom, and the screw rod 3 needs to be subjected to force when lifting the semiconductor device, the limit ring 16 and the fixed plate 17 can ensure the stability of the force on the screw rod 3; and the screw rod 3 and the fixed plate 17 can be movably connected by a bearing to ensure that the screw rod 3 can rotate normally;

[0033] One end of the first transmission rod 8 is inserted through the column 1 and extends to the outside of the column 1. A rotating device is fixedly arranged at one end of the first transmission rod 8. Figure 4 As shown, one end is extended to the outside of the column 1, and its purpose is to facilitate the rotation of the first transmission rod 8, so as to facilitate the rotation of the second transmission rod 9; and this rotating device can be a hand wheel, a handle, or any other device that can use the lever principle to conveniently rotate the first transmission rod 8; or it can be a motor structure connected to a reducer; the motor is used to drive the first transmission rod 8 and the second transmission rod 9 to rotate;

[0034] Working principle: When using the device, insert the first arm 5 and the second arm 6 of the device into the lower end of the device to be lifted; then rotate the screw rod 3, so that the slider 4 can move up along the slide groove 2 under the driving action of the thread, and the semiconductor device can be lifted by using the first arm 5 and the second arm 6; and the first arm 5 and the second arm 6 of the device can be rotated and adjusted by more than 90 degrees as needed; and the second arm 6 can be extended and moved inside the first arm 5; thereby, the overall length of the first arm 5 and the second arm 6 can be changed; thus, the device can be adapted to lift a variety of semiconductor devices; thereby, the scope of application of the device can be greatly improved;

[0035] The device is provided with two uprights 1, and the device is designed to be split; the purpose is to facilitate the insertion of the first arm 5 and the second arm 6 into the lower end of the device to be lifted; if the device is not designed to be split, since the lower end of the semiconductor device is provided with legs, the first arm 5 and the second arm 6 cannot be inserted into the lower end of the device; such a split design is convenient for use;

[0036] Although the device is of split design, a transmission mechanism is provided. When the columns 1 on the left and right sides are moved to insert the first arm 5 and the second arm 6 from both sides into the lower end of the semiconductor equipment to be lifted, the card slot 13 on the surface of the first transmission rod 8 needs to be sleeved on the card rod 14 on the surface of the second transmission rod 9. In this way, the first transmission rod 8 and the second transmission rod 9 can be linked together. In this way, the two screw rods 3 can be driven to rotate at the same time. It is convenient to use and can ensure that the left and right screw rods 3 can rotate at the same time. The four first arms 5 and the second arms 6 can be lifted at the same time to ensure the stability of the lifting. It is suitable for lifting semiconductor equipment with high precision.

[0037] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An electric lifter for installing and repairing semiconductor equipment, comprising a column (1), characterized in that: Two columns (1) are provided, and a lifting mechanism for lifting equipment is provided inside the column (1), and the lifting mechanism comprises a slide groove (2), a screw rod (3), a slider (4), a first arm (5), and a second arm (6). The column (1) is provided with a slide groove (2), and a screw rod (3) is movably provided inside the slide groove (2) through a bearing, and a slider (4) is movably engaged with the lower end of the slide groove (2), and first arms (5) are movably provided on both sides of the surface of the slider (4) through a rotating shaft, and a second arm (6) is movably interspersed inside the first arm (5), and a transmission mechanism for driving the screw rod (3) to rotate is provided inside the column (1).

2. The electric lifter for semiconductor equipment installation and maintenance according to claim 1, characterized in that: The transmission mechanism comprises an extension rod (7), a first transmission rod (8), a second transmission rod (9), a first bevel gear (10), and a second bevel gear (11); the extension rod (7) is fixedly arranged at the lower end of the column (1); the first transmission rod (8) is movably arranged inside the right extension rod (7) via a bearing; the second transmission rod (9) is movably arranged inside the left extension rod (7) via a bearing; the first bevel gear (10) is fixedly arranged at one end of the first transmission rod (8) and the second transmission rod (9); and the second bevel gear (11) is fixedly arranged at the lower end of the screw rod (3).

3. The electric lifter for semiconductor equipment installation and maintenance according to claim 2, characterized in that: The first bevel gear (10) and the second bevel gear (11) are meshed with each other.

4. The electric lifter for semiconductor equipment installation and maintenance according to claim 2, characterized in that: Universal wheels (12) are movably provided at the lower ends of the extension rod (7) and the column (1).

5. The electric lifter for semiconductor equipment installation and maintenance according to claim 2, characterized in that: A clamping groove (13) is fixedly provided at one end of the first transmission rod (8), and a clamping rod (14) is fixedly provided at one end of the second transmission rod (9).

6. The electric lifter for semiconductor equipment installation and maintenance according to claim 1, characterized in that: A cushion block (15) is fixedly provided on the outer surface of the second support arm (6).

7. The electric lifter for semiconductor equipment installation and maintenance according to claim 1, characterized in that: The interior of the slider (4) is movably sleeved on the outer surface of the screw rod (3) via a thread.

8. The electric lifter for semiconductor equipment installation and maintenance according to claim 1, characterized in that: A limit ring (16) is fixedly provided at the upper end of the screw rod (3), a fixing plate (17) is fixedly provided at the upper end inside the slide groove (2), and the screw rod (3) is movably provided inside the fixing plate (17).

9. The electric lifter for semiconductor equipment installation and maintenance according to claim 2, characterized in that: One end of the first transmission rod (8) is inserted through the column (1) and extends to the outside of the column (1), and a rotating device is fixedly provided on one end of the first transmission rod (8).

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