Automatic and efficient wafer cleaning machine

Abstract

The utility model relates to the technical field of cleaning machines, and discloses an automatic and efficient wafer cleaning machine which comprises a shell, the inner wall of the right end of the shell is fixedly connected with a first motor, the driving end of the first motor is fixedly connected with a transmission assembly, and the front end of the bottom of the transmission assembly is fixedly connected with a rotating plate. A cylinder is fixedly connected to the bottom of the rotating plate, a moving plate is slidably connected to the outer portion of the cylinder, a splitter plate is fixedly connected to the rear end of the moving plate, a plurality of spraying heads are fixedly connected to the bottom of the splitter plate, and two supporting plates are fixedly connected to the inner wall of the top of the shell. The two ends of the outer portion of the movable plate are slidably connected to the close sides of the two supporting plates correspondingly. According to the wafer cleaning device, water flow can be accelerated, so that a wafer can be cleaned more efficiently, the wafer can be cleaned more uniformly, and the effect of drying the cleaned wafer is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning machines, in particular to an automatic and efficient wafer cleaning machine. Background Art

[0002] Wafers are the basic materials in the semiconductor manufacturing process, also known as chip substrates or silicon wafers. They are usually round silicon wafers and are key components in the manufacture of integrated circuits (ICs) and other semiconductor devices. Wafer cleaning machines are equipment used to clean the surface of wafers during semiconductor manufacturing. Cleaning wafers is a very critical step because any contaminants or particles on the surface of the wafer may affect subsequent manufacturing processes and device performance.

[0003] Traditional wafer cleaning machines rinse wafers with water flow when cleaning them, but during the cleaning process, the spray heads are mostly fixed or rinsed manually, which reduces the cleaning efficiency. Therefore, in response to the above problems, an automatic and efficient wafer cleaning machine is proposed. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings existing in the prior art and to propose an automatic and efficient wafer cleaning machine, aiming to improve the problem that in the traditional wafer cleaning machine, the spray heads are mostly fixed or rinsed manually during the cleaning process, thereby reducing the cleaning efficiency.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] The invention relates to an automatic and efficient wafer cleaning machine, comprising a shell, a motor 1 is fixedly connected to the inner wall of the right end of the shell, a transmission assembly is fixedly connected to the driving end of the motor 1, a rotating plate is fixedly connected to the bottom front end of the transmission assembly, a cylinder is fixedly connected to the bottom of the rotating plate, a movable plate is slidably connected to the outside of the cylinder, a diverter plate is fixedly connected to the rear end of the movable plate, a plurality of spray heads are fixedly connected to the bottom of the diverter plate, two supporting plates are fixedly connected to the top inner wall of the shell, the outer ends of the movable plate are respectively slidably connected to the adjacent sides of the two supporting plates, a transmission rod is fixedly connected to the bottom rear end of the transmission assembly, a plurality of acceleration blades are fixedly connected to the outer side of the transmission rod, a fixed box is fixedly connected to the rear end inner wall of the shell, an output pipe is fixedly connected to the front end of the fixed box, and the other end of the output pipe is fixedly connected to the rear end of the diverter plate.

[0007] Furthermore, the transmission assembly includes a driving wheel, a belt and a driven wheel, the top of the driving wheel is fixedly connected to the driving end of the motor, the belt is sleeved on the outside of the driving wheel, the driven wheel is rotatably connected to the inner wall of the right end of the shell, the inner wall on the other side of the belt is sleeved on the outside of the driven wheel, and the bottom of the driven wheel is fixedly connected to the top of the transmission rod.

[0008] Furthermore, a water pump is fixedly connected to the right side of the rear end of the shell, a connecting pipe is fixedly connected to the output end of the water pump, and the other end of the connecting pipe is fixedly connected to the bottom of the fixed box.

[0009] Furthermore, the inner wall at the left end of the shell is fixedly connected to motor 2, the driving end of motor 2 is fixedly connected to a driving gear, the inner wall at the left end of the shell is rotatably connected to a driven gear, the driving gear and the driven gear are meshingly connected, the bottoms of the driving gear and the driven gear are fixedly connected to a rotating rod, and the outside of the rotating rod is fixedly connected to a plurality of rotating blades.

[0010] Furthermore, the outside of the acceleration blade is in contact with the inner wall of the fixed box, and the bottom of the transmission rod is rotatably connected to the bottom inner wall of the fixed box.

[0011] Furthermore, a plurality of transmission rods are rotatably connected to the bottom of the inner wall of the shell, and a baffle is fixedly connected to the inner wall of the shell.

[0012] Furthermore, both left and right sides of the shell are rotatably connected with closing doors, and the rear end of the shell is fixedly connected with a discharge pipe.

[0013] Furthermore, cabinet doors are rotatably connected to both sides of the front end of the shell, and the outer portion of the driving wheel is rotatably connected to the inner wall of the shell.

[0014] The utility model has the following beneficial effects:

[0015] 1. In the utility model, through the cooperation of structures such as belts, driven wheels, rotating plates, cylinders, moving plates, diverter plates, spray heads, support plates, transmission rods, and accelerating blades, the water flow can be accelerated so that the wafers can be cleaned more efficiently. The diverter plate and the spray head can clean the wafers more evenly, thereby improving the cleaning efficiency.

[0016] 2. In the utility model, through the mutual cooperation of the motor 2, the driving gear, the driven gear, the rotating rod, the rotating blades and other structures, the effect of drying the cleaned wafers is achieved, thereby improving the efficiency of wafer processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1A three-dimensional diagram of an automatic and efficient wafer cleaning machine proposed by the utility model;

[0018] Figure 2 This is a schematic diagram of the support plate structure of an automatic and efficient wafer cleaning machine proposed by the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of a spray head of an automatic and efficient wafer cleaning machine proposed by the utility model;

[0020] Figure 4 This is a schematic diagram of the rotating blade structure of an automatic and efficient wafer cleaning machine proposed by the utility model.

[0021] Legend:

[0022] 1. Housing; 2. Motor 1; 3. Driving wheel; 4. Belt; 5. Driven wheel; 6. Rotating plate; 7. Cylinder; 8. Moving plate; 9. Diverter plate; 10. Spray head; 11. Support plate; 12. Transmission rod; 13. Acceleration blade; 14. Fixed box; 15. Output pipe; 16. Water pump; 17. Connecting pipe; 18. Driving gear; 19. Driven gear; 20. Rotating rod; 21. Rotating blade; 22. Transmission rod; 23. Baffle; 24. Closing door; 25. Discharge pipe; 26. Cabinet door; 27. Motor 2. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Reference Figure 1-3The utility model provides an embodiment: an automatic and efficient wafer cleaning machine, including a shell 1, a motor 2 is fixedly connected to the inner wall of the right end of the shell 1, a transmission component is fixedly connected to the driving end of the motor 2, and the transmission component is rotated by starting the motor 2. A rotating plate 6 is fixedly connected to the bottom front end of the transmission component, so that the rotating plate 6 can be driven, and the transmission component includes a driving wheel 3, a belt 4 and a driven wheel 5. The top of the driving wheel 3 is fixedly connected to the driving end of the motor 2, and the starting of the motor 2 can drive the rotating plate 6 to rotate. The driving wheel 3 rotates, and the outer part of the driving wheel 3 is rotationally connected to the inner wall of the outer shell 1, so that the driving wheel 3 rotates more stably. The belt 4 is sleeved on the outside of the driving wheel 3, and the driving wheel 3 rotates with the belt 4. The driven wheel 5 is rotationally connected to the inner wall of the right end of the outer shell 1, and the inner wall on the other side of the belt 4 is sleeved on the outside of the driven wheel 5. The driven wheel 5 is rotated by the rotation of the belt 4. The bottom of the driven wheel 5 is fixedly connected to the top of the transmission rod 12, and the driven wheel 5 rotates with the transmission rod 12.

[0025] The bottom of the rotating plate 6 is fixedly connected with a cylinder 7, and the cylinder 7 is rotated by the rotation of the rotating plate 6. The outer side of the cylinder 7 is slidably connected with a moving plate 8, and the rotation of the cylinder 7 can move the moving plate 8. The rear end of the moving plate 8 is fixedly connected with a diverter plate 9, and the bottom of the diverter plate 9 is fixedly connected with a plurality of spray heads 10, and the water flow can be output through the spray heads 10. The top inner wall of the housing 1 is fixedly connected with two support plates 11, and the outer ends of the moving plate 8 are respectively slidably connected to the adjacent sides of the two support plates 11, so that the moving plate 8 can be restricted. The bottom rear end of the transmission assembly is fixedly connected with a transmission Rod 12, the outside of the transmission rod 12 is fixedly connected with a plurality of accelerating blades 13, and the acceleration blades 13 can be rotated by the rotation of the transmission rod 12, the rear end inner wall of the shell 1 is fixedly connected with a fixed box 14, the outside of the accelerating blades 13 is in contact with the inner wall of the fixed box 14, and the acceleration blades 13 rotate on the inner wall of the fixed box 14 to accelerate the water flow, the bottom of the transmission rod 12 is rotatably connected to the bottom inner wall of the fixed box 14, the front end of the fixed box 14 is fixedly connected with an output pipe 15, the other end of the output pipe 15 is fixedly connected to the rear end of the diverter plate 9, and the fixed box 14 is connected to the diverter plate 9 through the output pipe 15.

[0026] A water pump 16 is fixedly connected to the right side of the rear end of the shell 1, and a connecting pipe 17 is fixedly connected to the output end of the water pump 16. When the water pump 16 is started, water will be output to the connecting pipe 17, and the rear end of the water pump 16 can be connected to a water source. The other end of the connecting pipe 17 is fixedly connected to the bottom of the fixed box 14, so that the water flow inside the connecting pipe 17 enters the fixed box 14. Start the water pump 16, and the water inside the water tank is drawn into the connecting pipe 17 by the water pump 16 to reach the inside of the fixed box 14. At this time, start the motor 2 again. When the motor 2 is started, the driving wheel 3 will be rotated, and the belt 4 will be rotated through the rotation of the driving wheel 3, and the rotation of the belt 4 will drive the driven wheel 5, and the rotating plate 6 will be rotated under the rotation of the driving wheel 3, and the rotating plate 6 will be rotated through the rotation of the rotating plate 6. The movement will cause the cylinder 7 to rotate, and the cylinder 7 will slide on the inner wall of the movable plate 8 when rotating, and can move with the movable plate 8, and the movement of the movable plate 8 can move the diverter plate 9, and the spray head 10 can be moved through the diverter plate 9, and the driven wheel 5 can rotate with the transmission rod 12 when rotating, and can rotate with the acceleration blade 13 when the transmission rod 12 rotates, and the rotation of the acceleration blade 13 can drive the water inside the fixed box 14, thereby accelerating the water flow. At this time, the accelerated water enters the diverter plate 9 through the output pipe 15 and is then sprayed out from the spray head 10, and in the process of spraying, the spray head 10 will be driven, which can not only improve the cleaning efficiency, but also clean the wafer more evenly.

[0027] refer to Figure 1 , Figure 2 and Figure 4 The left inner wall of the housing 1 is fixedly connected with a motor 27, and the driving end of the motor 27 is fixedly connected with a driving gear 18. When the motor 27 is started, the driving gear 18 will be rotated. The left inner wall of the housing 1 is rotatably connected with a driven gear 19. The driving gear 18 and the driven gear 19 are meshed, so that the rotation of the driving gear 18 can drive the driven gear 19 to rotate. The bottoms of the driving gear 18 and the driven gear 19 are fixedly connected with a rotating rod 20. Under the rotation of the driving gear 18 and the driven gear 19, the rotating rod 20 can be rotated. The outside of the rotating rod 20 is fixedly connected with a plurality of rotating blades 21. Under the rotation of the rotating rod 20, the rotating blades 21 can be rotated to dry the cleaned wafers. The bottom of the inner wall of the housing 1 is rotatably connected with a plurality of transmission rods 22, and the wafers are transmitted through the transmission rods 22. The inner wall of the housing 1 is fixedly connected with a baffle 23, and the baffle 23 separates the inside of the housing 1. The left and right sides of the shell 1 are rotatably connected with closing doors 24, the rear end of the shell 1 is fixedly connected with a discharge pipe 25, and the water at the bottom of the shell 1 is discharged through the discharge pipe 25. The front sides of the shell 1 are rotatably connected with cabinet doors 26.

[0028] Working principle: First, when in use, place the wafer to be cleaned on the top of the right transmission rod 22, then start the water pump 16, and draw the water inside the water tank through the water pump 16 to enter the connecting pipe 17 to reach the inside of the fixed box 14, then start the motor 2, and when the motor 2 is started, the driving wheel 3 will rotate, and the rotation of the driving wheel 3 will drive the belt 4 to rotate, and the rotation of the belt 4 will drive the driven wheel 5, and the rotation of the driving wheel 3 will drive the rotating plate 6 to rotate, and the rotation of the rotating plate 6 will drive the cylinder 7 to rotate, and the cylinder 7 will slide on the inner wall of the moving plate 8 when rotating, and can move with the moving plate 8, and the movement of the moving plate 8 can move with the diverter plate 9, and through the diverter plate 9, it can move with the spray head 10, and the driven wheel 5 can drive the transmission rod 12 to rotate when rotating, and when the transmission rod 12 rotates At this time, the accelerating blade 13 can be rotated with the accelerating blade 13. The rotation of the accelerating blade 13 can drive the water inside the fixed box 14, thereby accelerating the water flow. At this time, the accelerated water enters the diverter plate 9 through the output pipe 15 and is then sprayed out from the spray head 10. In the spraying process, the spray head 10 will be driven, which can not only improve the cleaning efficiency, but also clean the wafer more evenly. After cleaning, it is transmitted to the left end of the shell 1 through the transmission rod 22. At this time, the motor 27 is started again. When the motor 27 is started, the driving gear 18 will be rotated, and the driven gear 19 will be rotated through the rotation of the driving gear 18, so that the rotating rod 20 will be rotated under the rotation of the driving gear 18 and the driven gear 19, and the rotating rod 20 will be rotated when the rotating rod 20 rotates. The rotating blade 21 will be rotated when the rotating rod 20 rotates, and the wafer after cleaning is dried by the rotation of the rotating blade 21.

[0029] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An automatic and efficient wafer cleaning machine, comprising a housing (1), characterized in that: The right end inner wall of the housing (1) is fixedly connected to a motor 1 (2), the driving end of the motor 1 (2) is fixedly connected to a transmission assembly, the bottom front end of the transmission assembly is fixedly connected to a rotating plate (6), the bottom of the rotating plate (6) is fixedly connected to a cylinder (7), the outside of the cylinder (7) is slidably connected to a moving plate (8), the rear end of the moving plate (8) is fixedly connected to a diverter plate (9), the bottom of the diverter plate (9) is fixedly connected to a plurality of spray heads (10), and the top inner wall of the housing (1) is fixedly connected to Two support plates (11), the two ends of the outer side of the movable plate (8) are respectively slidably connected to the adjacent sides of the two support plates (11), the bottom rear end of the transmission assembly is fixedly connected to a transmission rod (12), the outer side of the transmission rod (12) is fixedly connected to a plurality of acceleration blades (13), the rear end inner wall of the outer shell (1) is fixedly connected to a fixed box (14), the front end of the fixed box (14) is fixedly connected to an output pipe (15), and the other end of the output pipe (15) is fixedly connected to the rear end of the diverter plate (9).

2. An automatic and efficient wafer cleaning machine according to claim 1, characterized in that: The transmission assembly comprises a driving wheel (3), a belt (4) and a driven wheel (5); the top of the driving wheel (3) is fixedly connected to the driving end of the motor (2); the belt (4) is sleeved on the outside of the driving wheel (3); the driven wheel (5) is rotatably connected to the inner wall of the right end of the housing (1); the inner wall on the other side of the belt (4) is sleeved on the outside of the driven wheel (5); and the bottom of the driven wheel (5) is fixedly connected to the top of the transmission rod (12).

3. The automatic and efficient wafer cleaning machine according to claim 1, characterized in that: A water pump (16) is fixedly connected to the right side of the rear end of the housing (1), a connecting pipe (17) is fixedly connected to the output end of the water pump (16), and the other end of the connecting pipe (17) is fixedly connected to the bottom of the fixed box (14).

4. The automatic and efficient wafer cleaning machine according to claim 1, characterized in that: The inner wall at the left end of the housing (1) is fixedly connected to a second motor (27), the driving end of the second motor (27) is fixedly connected to a driving gear (18), the inner wall at the left end of the housing (1) is rotatably connected to a driven gear (19), the driving gear (18) and the driven gear (19) are meshingly connected, the bottoms of the driving gear (18) and the driven gear (19) are fixedly connected to a rotating rod (20), and the outside of the rotating rod (20) is fixedly connected to a plurality of rotating blades (21).

5. The automatic and efficient wafer cleaning machine according to claim 1, characterized in that: The outside of the acceleration blade (13) contacts the inner wall of the fixed box (14), and the bottom of the transmission rod (12) is rotatably connected to the bottom inner wall of the fixed box (14).

6. The automatic and efficient wafer cleaning machine according to claim 1, characterized in that: A plurality of transmission rods (22) are rotatably connected to the bottom of the inner wall of the outer shell (1), and a baffle (23) is fixedly connected to the inner wall of the outer shell (1).

7. The automatic and efficient wafer cleaning machine according to claim 1, characterized in that: The left and right sides of the shell (1) are both rotatably connected to closing doors (24), and the rear end of the shell (1) is fixedly connected to a discharge pipe (25).

8. The automatic and efficient wafer cleaning machine according to claim 2, characterized in that: Cabinet doors (26) are rotatably connected to both sides of the front end of the shell (1), and the outside of the driving wheel (3) is rotatably connected to the inner wall of the shell (1).

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