Carrying device and carrying system
By designing a handling device including a main control structure, a transverse handling unit and a longitudinal handling unit, the problem of inconvenience in handling graphite carrier plates and carbon carbon carrier plates during the production of solar cell is solved, and stable and precise handling is achieved, avoiding the Damage and save manpower.
Patent Information
- Application Number
- CN202420288995.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-07
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-02-07
AI Technical Summary
During the production of solar cell cells, the handling of graphite carrier plates and carbon carbon carrier plates is inconvenient, especially when operating in a narrow space, it is easy to cause damage. The existing cranes cannot achieve uniform stress and precise positioning on all sides.
A handling device is designed, including a main body control structure, a transverse handling unit and a longitudinal handling unit. Through cooperative movement and sliding mechanisms, precise clamping and handling of graphite carrier plates and carbon carbon carrier plates are achieved.
The stable and precise handling of graphite carrier plates and carbon carbon carrier plates is achieved, avoiding damage caused by improper manipulation in a small space, saving manpower and improving handling efficiency.
Smart Images
Figure CN222453642U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of solar cell preparation, in particular to a transport device and a transport system. Background Art
[0002] At present, in the production process of solar cells, amorphous silicon thin film deposition is mostly prepared by plate-type PECVD equipment. The graphite carrier and carbon-carbon carrier used in plate-type PECVD need to be manually lifted and transported on and off the machine. It is very inconvenient to operate in a small space. Improper operation can easily cause damage, resulting in serious losses.
[0003] Currently, cranes are mostly used to transport graphite carriers and carbon-carbon carriers, but existing cranes cannot evenly stress the four sides of the flat carrier and then accurately position it according to actual conditions. Utility Model Content
[0004] The utility model aims to provide a transport device and a transport system, so as to provide a technical solution capable of accurately transporting planar objects such as graphite carrier plates and carbon-carbon carrier plates.
[0005] Based on this, in a first aspect, the utility model provides a transport device, which includes a main control structure and a transport structure.
[0006] The conveying structure includes a transverse conveying unit and a longitudinal conveying unit which are drivingly connected to the main control structure, and the longitudinal conveying unit is slidably arranged on the transverse conveying unit; the transverse conveying unit is used to move to the part to be conveyed under the control of the main control structure according to the position of the part to be conveyed, and the longitudinal conveying unit is used to slide on the transverse conveying unit according to the position of the part to be conveyed, wherein the extension direction of the transverse conveying unit is perpendicular to the extension direction of the longitudinal conveying unit, and the transverse conveying unit and the longitudinal conveying unit are used to adjust the clamping size of the conveying device according to the size of the part to be conveyed to match the size of the part to be conveyed.
[0007] When adopting the above-mentioned technical solution, the utility model utilizes the main control structure to drive the horizontal conveying unit to move, so as to drive the longitudinal conveying unit to move together to the part to be conveyed. The longitudinal conveying unit is also used to slide on the horizontal conveying unit according to the position of the part to be conveyed. Furthermore, the extension direction of the horizontal conveying unit is perpendicular to the extension direction of the longitudinal conveying unit. Therefore, the horizontal conveying unit and the longitudinal conveying unit can cooperate to adjust the clamping size of the conveying device according to the size of the part to be conveyed, so that the clamping size of the conveying device matches the size of the part to be conveyed. It should be understood that since the clamping size of the conveying device matches the size of the part to be conveyed, when conveying most of the parts to be conveyed, the parts to be conveyed are not easy to tilt and can remain stable during the conveying process. Based on this, the conveying device in the utility model can place the parts to be conveyed stably and accurately in the specified position.
[0008] In one possible implementation, the transverse transport unit includes at least two transverse arms arranged in parallel, and at least two of the transverse arms are drivingly connected to the main control structure. The main control structure is used to drive the at least two transverse arms to move so that the at least two transverse arms move to above the parts to be transported, and is also used to drive the at least two transverse arms down to the parts to be transported.
[0009] When adopting the above-mentioned technical solution, the transverse transport unit in the utility model includes at least two transverse insertion arms. When the two opposite sides of the component to be transported are hooked by at least two transverse insertion arms, a more uniform force can be provided for the component to be transported, further ensuring that the component to be transported can be stably and accurately placed in the designated position.
[0010] In a possible implementation, the main body control structure is further used to drive the at least two transverse insertion arms to move in a direction perpendicular to an extending direction of the at least two transverse insertion arms, so as to change a distance between the at least two transverse insertion arms.
[0011] In the case of adopting the above technical solution, the utility model can adjust the distance between the at least two transverse insertion arms through the main body control structure, so that the transport device can adapt to parts to be transported of more sizes.
[0012] In a possible implementation, the longitudinal transport unit includes at least two longitudinal arms arranged in parallel, and the longitudinal arms are slidably arranged on the at least two transverse arms. The at least two transverse arms and the at least two longitudinal arms are used to fix the parts to be transported from above the parts to be transported according to the size of the parts to be transported, so as to transport the parts to be transported.
[0013] In the case of adopting the above technical solution, the at least two longitudinal insertion arms can slide along the extension direction of the transverse insertion arms to change the distance between the at least two longitudinal insertion arms, thereby making the transport device adaptable to parts to be transported of more sizes. Furthermore, when the longitudinal transport unit is used to hook the two opposite sides of the part to be transported, a more uniform force can be provided for the part to be transported, further ensuring that the part to be transported is stably and accurately placed in the designated position.
[0014] In a possible implementation, a first lifting assembly is provided at both ends of the transverse insertion arm, and a second lifting assembly is provided at both ends of the longitudinal insertion arm, the first lifting assembly is used to hook the part to be transported on the first and second sides opposite to the part to be transported, and the second lifting assembly is used to hook the part to be transported on the third and fourth sides opposite to the part to be transported.
[0015] When the above technical solution is adopted, the horizontal and longitudinal arms can be used to hook the part to be transported from four sides of the part to be transported, so as to securely fix the part to be transported and avoid the part to be transported from falling during transportation.
[0016] In a possible implementation, the first lifting assembly is slidably disposed on a side of the transverse insertion arm facing the component to be transported, and the second lifting assembly is slidably disposed on a side of the longitudinal insertion arm facing the component to be transported.
[0017] In the case of adopting the above technical solution, the utility model can adjust the positions of the first lifting assembly and the second lifting assembly so that the transport device can adapt to parts to be transported of different sizes, thereby being able to transport parts to be transported of more sizes. Specifically, in the utility model, since the first lifting assembly can be slidably arranged on the side of the horizontal insertion arm facing the part to be transported, and the second lifting assembly can be slidably arranged on the side of the longitudinal insertion arm facing the part to be transported, the horizontal transport unit and the longitudinal transport unit can fix the part to be transported according to the size of the part to be transported by using the first lifting assembly and the second lifting assembly to transport the part to be transported. Therefore, the utility model can transport graphite carrier plates or carbon-carbon carrier plates of different sizes and place them in a narrow space that is inconvenient for staff to enter as needed, thereby saving manpower and preventing serious losses caused by improper human operation due to limited space.
[0018] In a possible implementation, the first lifting assembly includes a first lifting member and a first limiting member, the transverse insertion arm has a first slot arranged along its extension direction, the first lifting member is arranged in the first slot and is used to slide along the first slot, and the first limiting member is arranged on one side of the first lifting member and is used to limit the first lifting member;
[0019] The second lifting assembly includes a second lifting member and a second limiting member. The longitudinal insertion arm has a second slot arranged along its extension direction. The second lifting member is arranged in the second slot for sliding along the second slot. The second limiting member is arranged on one side of the second lifting member for limiting the second lifting member.
[0020] Preferably, the transverse transport unit includes two transverse insertion arms arranged in parallel, and the longitudinal transport unit includes two longitudinal insertion arms arranged in parallel.
[0021] In a possible implementation, the main control structure includes a first drive component and a second drive component, both of which are drivingly connected to the transverse transport unit, the first drive component is used to drive the transverse transport unit to move in a first direction to move the transverse transport unit above the part to be transported, and the second drive component is used to drive the transverse transport unit to move in a second direction to move the transverse transport unit to a position in contact with the part to be transported.
[0022] In a second aspect, the present invention further provides a transport system for use in the preparation process of solar cells, wherein the transport system comprises a PECVD device and the transport device described in the first aspect, wherein the transport device is used to load or unload a carrier required in the PECVD device, wherein the carrier comprises a graphite carrier or a carbon-carbon carrier.
[0023] The beneficial effects of the second aspect and its various implementations in the present invention are the same as the beneficial effects of the first aspect or any possible implementation of the first aspect, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:
[0025] Figure 1 A schematic structural diagram of a transport device provided by an embodiment of the utility model is shown;
[0026] Figure 2A schematic structural diagram of a transport device provided by an embodiment of the utility model in another direction is shown.
[0027] Figure numerals: 10 - main control structure, 201 - transverse transport unit, 202 - longitudinal transport unit, 203 - first lifting component, 204 - second lifting component. DETAILED DESCRIPTION
[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.
[0029] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.
[0031] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.
[0032] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0033] At present, in the production process of solar cells, amorphous silicon thin film deposition is mostly prepared by plate-type PECVD equipment. The graphite carrier and carbon-carbon carrier used in plate-type PECVD need to be manually lifted and transported on and off the machine. It is very inconvenient to operate in a small space. Improper operation can easily cause damage, resulting in serious losses.
[0034] Currently, cranes are mostly used to transport graphite carriers and carbon-carbon carriers, but existing cranes cannot evenly stress the four sides of the flat carrier and then accurately position it according to actual conditions.
[0035] Based on this, the embodiment of the utility model discloses a transport device to provide a device capable of transporting planar objects such as graphite carrier plates and carbon-carbon carrier plates. Figure 1 and Figure 2 The transport device includes a main control structure 10 and a transport structure.
[0036] The transport structure includes a transverse transport unit 201 and a longitudinal transport unit 202 which are drivingly connected to the main control structure 10 , and the longitudinal transport unit 202 is slidably disposed on the transverse transport unit 201 .
[0037] Reference Figure 2 The transverse transport unit 201 is used to move to the part to be transported 30 under the control of the main control structure 10 according to the position of the part to be transported, and the longitudinal transport unit 202 is used to slide on the transverse transport unit 201 according to the position of the part to be transported 30, wherein the extension direction of the transverse transport unit 201 is perpendicular to the extension direction of the longitudinal transport unit 202, and the transverse transport unit 201 and the longitudinal transport unit 202 are used to adjust the clamping size of the transport device according to the size of the part to be transported 30 to match the size of the part to be transported 30.
[0038] Based on the above description, the embodiment of the utility model utilizes the main control structure 10 to drive the transverse transport unit 201 to move, so as to drive the longitudinal transport unit 202 to move together to the part to be transported. The longitudinal transport unit 202 is also used to slide on the transverse transport unit 201 according to the position of the part 30 to be transported. Furthermore, the extension direction of the transverse transport unit 201 is perpendicular to the extension direction of the longitudinal transport unit 202. Therefore, the transverse transport unit 201 and the longitudinal transport unit 202 can cooperate to fix the part 30 to be transported from the four sides of the part to be transported. It should be understood that since the clamping size of the transport device matches the size of the part to be transported, when transporting most of the parts to be transported, the parts to be transported are not easy to tilt and can remain stable during the transport process. Based on this, the transport device in the utility model can place the parts to be transported stably and accurately at the specified position.
[0039] Optionally, the main control structure 10 in an embodiment of the present invention includes a first drive component and a second drive component, both of which are drivingly connected to the transverse transport unit 201, and the first drive component is used to drive the transverse transport unit 201 to move in a first direction to move the transverse transport unit 201 above the part to be transported, and the second drive component is used to drive the transverse transport unit 201 to move in a second direction to move the transverse transport unit 201 to a position in contact with the part to be transported.
[0040] Specifically, the first direction may be a direction parallel to the plane where the parts to be transported are located. The embodiment of the utility model first uses the main control structure 10 to control the transverse transport unit 201 to drive the longitudinal transport unit 202 to move in a direction parallel to the parts to be transported to the top of the parts to be transported. The second direction may be a direction perpendicular to the plane where the parts to be transported are located. After that, the main control structure 10 is used to control the transverse transport unit 201 to drive the longitudinal transport unit 202 to move in a direction perpendicular to the parts to be transported to a position where the parts to be transported contact. Finally, the transverse transport unit 201 and the longitudinal transport unit 202 are used to hook the parts to be transported to achieve the transportation of the parts to be transported.
[0041] Preferably, the first drive assembly and the second drive assembly include a linear drive assembly, such as a screw nut assembly. It should be understood that the first drive assembly and the second drive assembly may also be other components or structures that can realize the driving function of the embodiment of the utility model, and the embodiment of the utility model does not specifically limit this.
[0042] In one possible implementation, the transverse transport unit 201 includes at least two parallel transverse arms, and at least two of the transverse arms are drivingly connected to the main control structure 10. The main control structure 10 is used to drive the at least two transverse arms to move so that the at least two transverse arms move to the top of the parts to be transported, and is also used to drive the at least two transverse arms down to the parts to be transported.
[0043] Based on this, the transverse transport unit 201 in the embodiment of the utility model includes at least two parallel transverse arms which are drivingly connected to the first driving component in the main control structure 10, and the main control structure 10 is used to drive the at least two transverse arms to move so that the at least two transverse arms move to the top of the parts to be transported. Afterwards, when the main control structure 10 is used to drive the at least two transverse arms to descend to the parts to be transported, and finally when the at least two transverse arms are used to hook the two opposite sides of the parts to be transported, a more uniform force can be provided for the parts to be transported, thereby further ensuring that the parts to be transported are stably and accurately placed in the specified position.
[0044] Preferably, the main control structure 10 is also used to drive at least two of the transverse insertion arms to move in a direction perpendicular to the extension direction of the at least two transverse insertion arms, so as to change the distance between the at least two transverse insertion arms. Based on this, the embodiment of the utility model can adjust the distance between the at least two transverse insertion arms through the main control structure 10, so that the transport device can adapt to more sizes of parts to be transported.
[0045] In this novel embodiment, the longitudinal transport unit 202 includes at least two parallel longitudinal insert arms, and the longitudinal insert arms are slidably arranged on the at least two transverse insert arms. The at least two transverse insert arms and the at least two longitudinal insert arms are used to fix the parts to be transported from above the parts to be transported according to the size of the parts to be transported, so as to transport the parts to be transported.
[0046] Specifically, the transverse insert arm is provided with a slide groove, and the longitudinal insert arm is provided with a slider matching the slide groove, based on which the longitudinal insert arm can slide along the transverse insert arm through the slider and the slide groove, and when there are at least two transverse insert arms, each longitudinal insert arm is provided with at least two sliders to match the corresponding slide groove. The longitudinal insert arm can also be provided with a locking component, and when the longitudinal insert arm moves to a suitable position, the locking component can be used to lock it to prevent the longitudinal insert arm from sliding and affecting the handling effect of the part to be handled.
[0047] Based on the above, the at least two longitudinal arms can slide along the extension direction of the transverse arms to change the distance between the at least two longitudinal arms, thereby making the transport device adaptable to parts to be transported of more sizes. Furthermore, when the longitudinal transport unit 202 is used to hook the two opposite sides of the part to be transported, a more uniform force can be provided for the part to be transported, further ensuring that the part to be transported is stably and accurately placed in the designated position.
[0048] In a preferred embodiment, the transverse transport unit 201 includes two parallel transverse arms, and the longitudinal transport unit 202 includes two parallel longitudinal arms. It should be understood that the two parallel transverse arms and the two parallel longitudinal arms can provide a balanced gripping force for the transported component, thereby smoothly transporting the transported component to the target position.
[0049] In the embodiment of the utility model, both ends of the transverse insert arm are provided with a first lifting assembly 203, and both ends of the longitudinal insert arm are provided with a second lifting assembly 204. The first lifting assembly 203 is used to hook the part to be transported at the first side and the second side opposite to the part to be transported, and the second lifting assembly 204 is used to hook the part to be transported at the third side and the fourth side opposite to the part to be transported. Based on this, a balanced grasping force can be provided for the part to be transported to prevent the part to be transported from tipping over.
[0050] Based on the above scheme, the embodiment of the utility model can use the horizontal insertion arms and the longitudinal insertion arms to hook the part to be transported from the four sides of the part to be transported, so as to achieve a secure fixation of the part to be transported and avoid the part to be transported from falling during the transport process.
[0051] Furthermore, the first lifting component 203 is slidably disposed on the side of the horizontal insertion arm facing the part to be transported, and the second lifting component 204 is slidably disposed on the side of the longitudinal insertion arm facing the part to be transported. Based on this, the embodiment of the utility model can adjust the positions of the first lifting component 203 and the second lifting component 204 to make the transport device adapt to parts of different sizes to be transported, thereby being able to transport parts of more sizes to be transported.
[0052] More specifically, in the embodiment of the utility model, since the first lifting assembly is slidably arranged on the side of the horizontal insertion arm facing the part to be transported, and the second lifting assembly 204 is slidably arranged on the side of the longitudinal insertion arm facing the part to be transported, the horizontal transport unit and the longitudinal transport unit can fix the part to be transported according to the size of the part to be transported by using the first lifting assembly and the second lifting assembly to transport the part to be transported. Therefore, the embodiment of the utility model can transport graphite carrier plates or carbon-carbon carrier plates of different sizes and place them in a narrow space that is inconvenient for workers to enter as needed, thereby saving manpower and preventing serious losses caused by improper human operation due to limited space.
[0053] Preferably, the first lifting component 203 includes a first lifting member and a first limiting member, the transverse insertion arm has a first slot arranged along its extension direction, the first lifting member is arranged in the first slot, and is used to slide along the first slot, and the first limiting member is arranged on one side of the first lifting member, and is used to limit the first lifting member; the second lifting component 204 includes a second lifting member and a second limiting member, the longitudinal insertion arm has a second slot arranged along its extension direction, the second lifting member is arranged in the second slot, and is used to slide along the second slot, and the second limiting member is arranged on one side of the second lifting member, and is used to limit the second lifting member.
[0054] Specifically, after the first lifting member moves to a suitable position and hooks the part to be transported, the first limiting member limits the first lifting member to prevent the first limiting member from moving along the first slot. After the second lifting member moves to a suitable position and hooks the part to be transported, the second limiting member limits the second lifting member to prevent the second limiting member from moving along the second slot.
[0055] In the second aspect, an embodiment of the utility model further provides a transport system, which is used in the preparation process of solar cell sheets, and the transport system includes a PECVD device and the transport device described in the first aspect, and the transport device is used to load or unload the carrier required in the PECVD device, wherein the carrier includes a graphite carrier or a carbon-carbon carrier.
[0056] The beneficial effects of the second aspect and its various implementations in the present invention are the same as the beneficial effects of the first aspect or any possible implementation of the first aspect, and will not be repeated here.
[0057] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.
[0058] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.
Claims
1. A transport device, characterized in that: The transport device comprises a main control structure and a transport structure; The conveying structure includes a transverse conveying unit and a longitudinal conveying unit which are drivingly connected to the main control structure, and the longitudinal conveying unit is slidably arranged on the transverse conveying unit; the transverse conveying unit is used to move to the part to be conveyed under the control of the main control structure according to the position of the part to be conveyed, and the longitudinal conveying unit is used to slide on the transverse conveying unit according to the position of the part to be conveyed, wherein the extension direction of the transverse conveying unit is perpendicular to the extension direction of the longitudinal conveying unit, and the transverse conveying unit and the longitudinal conveying unit are used to adjust the clamping size of the conveying device according to the size of the part to be conveyed to match the size of the part to be conveyed.
2. The transport device according to claim 1, characterized in that: The transverse transport unit includes at least two parallel transverse arms, and at least two of the transverse arms are drivingly connected to the main control structure. The main control structure is used to drive the at least two transverse arms to move so that the at least two transverse arms move to the top of the parts to be transported, and is also used to drive the at least two transverse arms to descend to the parts to be transported.
3. The transport device according to claim 2, characterized in that: The main body control structure is also used to drive at least two of the transverse insertion arms to move in a direction perpendicular to the extending direction of the at least two transverse insertion arms, so as to change the distance between the at least two transverse insertion arms.
4. The transport device according to claim 2, characterized in that: The longitudinal transport unit includes at least two parallel longitudinal arms, which are slidably arranged on at least two transverse arms. The at least two transverse arms and at least two longitudinal arms are used to fix the parts to be transported from above according to the size of the parts to be transported, so as to transport the parts to be transported.
5. The transport device according to claim 4, characterized in that: A first lifting assembly is provided at both ends of the transverse insertion arm, and a second lifting assembly is provided at both ends of the longitudinal insertion arm. The first lifting assembly is used to hook the part to be transported on the first and second sides opposite to the part to be transported, and the second lifting assembly is used to hook the part to be transported on the third and fourth sides opposite to the part to be transported.
6. The transport device according to claim 5, characterized in that: The first lifting assembly is slidably disposed on a side of the transverse insertion arm facing the component to be transported, and the second lifting assembly is slidably disposed on a side of the longitudinal insertion arm facing the component to be transported.
7. The transport device according to claim 6, characterized in that: The first lifting component includes a first lifting member and a first limiting member, the transverse insertion arm has a first slot arranged along its extension direction, the first lifting member is arranged in the first slot for sliding along the first slot, and the first limiting member is arranged on one side of the first lifting member for limiting the first lifting member; The second lifting assembly includes a second lifting member and a second limiting member. The longitudinal insertion arm has a second slot arranged along its extension direction. The second lifting member is arranged in the second slot for sliding along the second slot. The second limiting member is arranged on one side of the second lifting member for limiting the second lifting member.
8. The transport device according to claim 4, characterized in that: The transverse transport unit includes two transverse insertion arms arranged in parallel, and the longitudinal transport unit includes two longitudinal insertion arms arranged in parallel.
9. The transport device according to any one of claims 1 to 7, characterized in that: The main control structure includes a first drive assembly and a second drive assembly, both of which are drivingly connected to the transverse transport unit. The first drive assembly is used to drive the transverse transport unit to move in a first direction to move the transverse transport unit above the component to be transported, and the second drive assembly is used to drive the transverse transport unit to move in a second direction to move the transverse transport unit to a position in contact with the component to be transported.
10. A transport system, characterized in that: Applied in the preparation process of solar cells, the transport system includes PECVD equipment and the transport device described in any one of claims 1-9, and the transport device is used to load or unload the carrier required in the PECVD equipment, wherein the carrier includes a graphite carrier or a carbon-carbon carrier.