Evaporation coating baffle mechanism and coating machine

Abstract

The utility model relates to the technical field of coating equipment, in particular to an evaporation coating baffle plate mechanism and a coating machine, the evaporation coating baffle plate mechanism is provided with a baffle plate and a movable plate, the movable plate can simultaneously move inwards or outwards on two sides of the baffle plate, the width of the baffle plate can be adjusted, and in addition, the baffle plate and the movable plate can turn over up and down, so that the coating efficiency is improved. By means of the operation, part of an evaporation road can be shielded, so that the uniformity of the thickness of a coating film is guaranteed; the baffle has an adjustable function and is suitable for various film materials with different refractive indexes; the coating machine adopts the adjustable evaporation coating baffle mechanism, the width and the angle of the baffle can be adjusted in the coating process, and the coating quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to an evaporation coating baffle mechanism and a coating machine. Background Art

[0002] In vacuum coating equipment, evaporation coating machines are often used to prepare optical films, which form optical films on the surface of substrates by evaporating film materials. In order to ensure the uniformity of the optical film, a uniform baffle is set between the film material and the substrate to adjust the uniformity of the film thickness by blocking a certain proportion of the evaporation channel.

[0003] Existing uniform baffles are generally fixed. When faced with a variety of film materials with different refractive indices, the fixed uniform baffles cannot effectively adjust the uniformity of different film materials, thereby affecting the preparation quality of the optical film. Utility Model Content

[0004] Based on this, the purpose of the utility model is to provide an evaporative coating baffle mechanism and a coating machine.

[0005] The utility model adopts the following technical solutions:

[0006] An evaporation coating baffle mechanism comprises a baffle and movable plates movably connected to both sides of the baffle; the baffle has a built-in cavity, a first driving component is arranged in the cavity, the first driving component is drivingly connected to the movable plate, and the first driving component drives the movable plate to move inward or outward at the same time; a connecting rod is arranged at one end of the baffle, a second driving component drivingly connected is arranged on the side of the connecting rod, and the second driving component drives the connecting rod and the movable plate to flip up and down.

[0007] Preferably, the first driving assembly comprises a driving motor fixed in the cavity, a screw rod drivingly connected to the driving motor, and a sliding seat connected to the screw rod; a first movable block and a second movable block are symmetrically arranged on one side of the sliding seat, and the first movable block and the second movable block are both connected to the sliding seat; the first movable block and the second movable block are both fixedly connected to the movable plate;

[0008] The driving motor drives the sliding seat to move linearly along the screw rod, so as to drive the first movable block and the second movable block to move outward or inward perpendicularly to the screw rod at the same time.

[0009] Preferably, the sliding seat is provided with a symmetrically distributed first sliding groove and a second sliding groove, and the first sliding groove and the second sliding groove are both inclined; a first connecting column is fixedly provided on the first movable block, and the first connecting column is slidably connected to the first sliding groove; a second connecting column is fixedly provided on the second movable block, and the second connecting column is slidably connected to the second sliding groove.

[0010] Preferably, the first driving assembly further comprises a guide column fixed in the cavity, wherein the guide column is arranged perpendicular to the screw rod; the first movable block and the second movable block are both slidably connected to the guide column.

[0011] Preferably, the second driving assembly includes a transmission gear fixedly connected to the connecting rod, a rack meshingly connected to the transmission gear, a connecting block fixed to the lower end of the rack, and a cylinder drivingly connected to the connecting block, wherein the cylinder is vertically arranged; the cylinder drives the rack to move in the vertical direction to drive the baffle to flip up and down.

[0012] Preferably, a telescopic cover is provided between the movable plate and the baffle.

[0013] Preferably, the lower ends of the baffle and the movable plate are both provided with a refractive film.

[0014] A coating machine comprises a vacuum cover, an evaporation source arranged at the bottom of the inner side of the vacuum cover, a coating umbrella arranged at the top of the inner side of the vacuum cover, and the above-mentioned evaporation coating baffle mechanism, wherein the evaporation coating baffle mechanism is arranged in the vacuum cover.

[0015] Preferably, a rotating motor is provided at the upper end of the vacuum cover, and the rotating motor is drivingly connected to the plating umbrella, and the rotating motor drives the plating umbrella to rotate.

[0016] Preferably, the evaporation sources are distributed in a circular array at the inner bottom of the vacuum cover, and the evaporation coating baffle mechanism is arranged above the evaporation sources.

[0017] The beneficial effects of the utility model are:

[0018] The utility model relates to an evaporation coating baffle mechanism and a coating machine. The evaporation coating baffle mechanism is provided with a baffle and a movable plate. The movable plate can move inward or outward at both sides of the baffle at the same time, and the width of the baffle can be adjusted. In addition, the baffle and the movable plate can be turned upside down to adjust the pitch angle of the baffle. Through the above operation, part of the evaporation path can be blocked to ensure the uniformity of the coating film thickness. The baffle has an adjustable function and is suitable for a variety of film materials with different refractive indices. The coating machine adopts the above adjustable evaporation coating baffle mechanism. During the coating process, the width and angle of the baffle can be adjusted to improve the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the evaporation coating baffle mechanism of the utility model;

[0020] Figure 2 It is a schematic diagram of the internal structure of the evaporation coating baffle mechanism of the utility model;

[0021] Figure 3 for Figure 2 Schematic diagram of the local structure of part A;

[0022] Figure 4 This is a first overall structural schematic diagram of the coating machine of the utility model;

[0023] Figure 5 It is a second overall structural schematic diagram of the coating machine of the utility model;

[0024] Numbers in the figure:

[0025] 100-evaporation coating baffle mechanism;

[0026] 110- baffle;

[0027] 111- cavity; 112- connecting rod;

[0028] 120- movable plate;

[0029] 130-first driving assembly; 131-driving motor; 132-screw; 133-sliding seat; 134-first movable block; 134a-first connecting column; 135-second movable block; 135a-second connecting column; 136-first slide slot; 137-second slide slot; 138-guide column;

[0030] 140-second drive assembly; 141-transmission gear; 142-rack; 143-connecting block; 144-cylinder;

[0031] 150- telescopic cover;

[0032] 200-coating machine;

[0033] 210 - vacuum cover; 220 - evaporation source; 230 - plating umbrella; 240 - rotating motor; 250 - pressing frame; 260 - containing tank. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In the description of the present invention, it should be noted that the terms "vertical direction", "upper", "lower", "horizontal" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, "first", "second", "third", and "fourth" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, or a connection through an intermediate medium, or the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] like Figures 1 to 3 As shown, the evaporation coating baffle mechanism 100 of the utility model includes a baffle 110 and a movable plate 120 movably connected to both sides of the baffle 110. A cavity 111 is built in the baffle 110, and a first driving component 130 is provided in the cavity 111. The first driving component 130 is drivingly connected to the movable plates 120 on both sides. The first driving component 130 can drive the movable plates 120 on both sides to move inward or outward synchronously, thereby achieving the function of adjusting the width. A connecting rod 112 is provided at one end of the baffle 110, and a second driving component 140 drivingly connected is provided on the side of the connecting rod 112. The second driving component 140 drives the connecting rod 112 and the movable plate 120 to flip up and down, thereby achieving the function of adjusting the pitch angle. By adjusting the width and the pitch angle, the degree of shielding of the coating channel is controlled, thereby ensuring the uniformity of the coating film thickness.

[0038] Specifically, the first driving assembly 130 includes a driving motor 131 fixed in the cavity 111, a screw 132 drivingly connected to the driving motor 131, and a sliding seat 133 connected to the screw 132; a symmetrically distributed first movable block 134 and a second movable block 135 are provided on one side of the sliding seat 133, and the first movable block 134 and the second movable block 135 are both connected to the sliding seat 133 to realize transmission; the first movable block 134 and the second movable block 135 are both fixedly connected to the movable blocks. Specifically, a symmetrically distributed first slide groove 136 and a second slide groove 137 are provided on the sliding seat 133, and the first slide groove 136 and the second slide groove 137 are both inclined; correspondingly, a first connecting column 134a is fixedly provided on the first movable block 134, and the first connecting column 134a is slidably connected to the first slide groove 136; a second connecting column 135a is fixedly provided on the second movable block 135, and the second connecting column 135a is slidably connected to the second slide groove 137.

[0039] When adjusting, the driving motor 131 drives the sliding seat 133 to move linearly along the screw rod 132. Since the first connecting column 134a cooperates with the first slide groove 136, and the second connecting column 135a cooperates with the second slide groove 137, the first movable block 134 and the second movable block 135 will simultaneously extend outward or retract inward, thereby realizing the extension or retraction of the movable plate 120 and achieving the purpose of adjusting the width.

[0040] Specifically, the first driving assembly 130 further includes a guide post 138 fixed in the cavity 111, and the guide post 138 is arranged perpendicular to the screw rod 132; the first movable block 134 and the second movable block 135 are both slidably connected to the guide post 138. The guide post 138 plays a guiding role, and the first movable block 134 and the second movable block 135 always move linearly along the guide post 138.

[0041] Specifically, the second driving assembly includes a transmission gear 141 fixedly connected to the connecting rod 112, a rack 142 meshingly connected to the transmission gear 141, a connecting block 143 fixed to the lower end of the rack 142, and a cylinder 144 drivingly connected to the connecting block 143, and the cylinder 144 is vertically arranged; the cylinder 144 drives the rack 142 to move in the vertical direction to drive the baffle 110 to flip up and down, thereby adjusting the pitch angle.

[0042] Specifically, a telescopic cover 150 is provided between the movable plate 120 and the baffle 110 , and the telescopic cover 150 can block the gap between the movable plate 120 and the baffle 110 to play a sealing role. In addition, the telescopic cover 150 adopts a telescopic structure to avoid affecting the movement of the movable plate 120 .

[0043] Specifically, a refractive film (not shown in the figure) is provided at the lower end of the baffle plate 110 and the movable plate 120 to improve the coating efficiency.

[0044] like Figures 4 to 5 As shown, the coating machine 200 of the utility model includes a vacuum cover 210, an evaporation source 220 arranged at the bottom of the inner side of the vacuum cover 210, and a coating umbrella 230 arranged at the top of the inner side of the vacuum cover 210; and also includes the above-mentioned evaporation coating baffle mechanism 100, which is arranged in the vacuum cover 210. A rotating motor 240 is arranged at the upper end of the vacuum cover 210, and the rotating motor 240 is connected to the coating umbrella 230, and the rotating motor 240 can drive the coating umbrella 230 to rotate. The evaporation sources 220 are distributed in a circular array at the bottom of the inner side of the vacuum cover 210, and the evaporation coating baffle mechanism 100 is arranged above the evaporation source 220. Specifically, the evaporation source 220 adopts a crucible, and a clamping frame 250 for fixing the film material is provided on one side of the evaporation source 220; a plurality of receiving grooves 260 for accommodating the substrate are provided on the plating umbrella 230, and the plating umbrella 230 is specifically a spherical concave structure to ensure that the distance between the receiving groove 260 and the evaporation source 220 is consistent.

[0045] During coating, the film material is placed at the evaporation source 220, and the evaporation source 220 is heated by resistance heating or other methods. Under high temperature, the film material evaporates and moves upward, and finally deposits on the substrate surface of the coating umbrella 230 to form an optical film. The evaporation coating baffle mechanism 100 adjusts the width and pitch angle to control the degree of shielding of the evaporation channel to ensure the uniformity of the coating film thickness and improve the coating quality.

[0046] Compared with the prior art, the evaporation coating baffle mechanism 100 involved in the utility model is provided with a baffle 110 and a movable plate 120. The movable plate 120 can move inward or outward on both sides of the baffle 110 at the same time, and can adjust the width of the baffle 110. In addition, the baffle 110 and the movable plate 120 can be flipped up and down to adjust the pitch angle of the baffle 110. Through the above operation, part of the evaporation path can be blocked to ensure the uniformity of the coating film thickness; the baffle 110 has an adjustable function and is suitable for a variety of film materials with different refractive indices; the coating machine 200 adopts the above-mentioned adjustable evaporation coating baffle mechanism 100. During the coating process, the width and angle of the baffle 110 can be adjusted to improve the coating quality.

[0047] The above only expresses the preferred technical solution of the utility model, and its description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and the utility model is also intended to include these modifications and modifications.

Claims

1. An evaporation coating baffle mechanism, characterized in that: It includes a baffle and a movable plate movably connected to both sides of the baffle; the baffle has a built-in cavity, a first driving component is arranged in the cavity, the first driving component is drivingly connected to the movable plate, and the first driving component drives the movable plate to move inward or outward at the same time; a connecting rod is arranged at one end of the baffle, and a second driving component drivingly connected is arranged on the side of the connecting rod, and the second driving component drives the connecting rod and the movable plate to flip up and down.

2. The evaporation coating baffle mechanism according to claim 1, characterized in that: The first driving assembly includes a driving motor fixed in the cavity, a screw rod drivingly connected to the driving motor, and a sliding seat connected to the screw rod; a first movable block and a second movable block are symmetrically arranged on one side of the sliding seat, and the first movable block and the second movable block are both connected to the sliding seat; the first movable block and the second movable block are both fixedly connected to the movable plate; The driving motor drives the sliding seat to move linearly along the screw rod, so as to drive the first movable block and the second movable block to move outward or inward perpendicularly to the screw rod at the same time.

3. The evaporation coating baffle mechanism according to claim 2, characterized in that: The sliding seat is provided with a symmetrically distributed first slide groove and a second slide groove, and the first slide groove and the second slide groove are both inclined; the first movable block is fixedly provided with a first connecting column, and the first connecting column is slidably connected to the first slide groove; the second movable block is fixedly provided with a second connecting column, and the second connecting column is slidably connected to the second slide groove.

4. The evaporation coating baffle mechanism according to claim 2, characterized in that: The first driving assembly further comprises a guide column fixed in the cavity, wherein the guide column is arranged perpendicular to the screw rod; the first movable block and the second movable block are both slidably connected to the guide column.

5. The evaporation coating baffle mechanism according to claim 1, characterized in that: The second driving assembly includes a transmission gear fixedly connected to the connecting rod, a rack meshingly connected to the transmission gear, a connecting block fixed to the lower end of the rack, and a cylinder drivingly connected to the connecting block, wherein the cylinder is vertically arranged; the cylinder drives the rack to move in the vertical direction to drive the baffle to flip up and down.

6. The evaporation coating baffle mechanism according to claim 1, characterized in that: A telescopic cover is arranged between the movable plate and the baffle.

7. The evaporation coating baffle mechanism according to claim 1, characterized in that: The lower ends of the baffle plate and the movable plate are both provided with refractive films.

8. A coating machine, comprising a vacuum cover, an evaporation source arranged at the bottom of the inner side of the vacuum cover, and a coating umbrella arranged at the top of the inner side of the vacuum cover, characterized in that: It comprises the evaporation coating baffle mechanism as described in any one of claims 1 to 7, and the evaporation coating baffle mechanism is arranged in the vacuum cover.

9. The coating machine according to claim 8, characterized in that: A rotating motor is provided at the upper end of the vacuum cover, and the rotating motor is drivingly connected to the plating umbrella, and the rotating motor drives the plating umbrella to rotate.

10. The coating machine according to claim 8, characterized in that: The evaporation sources are distributed in a circular array at the inner bottom of the vacuum cover, and the evaporation coating baffle mechanism is arranged above the evaporation sources.

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