Boat supporting mechanism and boat grabbing device

Abstract

The utility model discloses a boat supporting mechanism and a boat grabbing device, and belongs to the field of photovoltaic cell production and manufacturing. The boat support mechanism comprises a first mounting plate and a second mounting plate which are connected through a rotating shaft, a bottom plate arranged at the bottom of the second mounting plate, and a support frame arranged on the bottom plate and supported by the bottom plate; the two first microswitches are arranged on the first mounting plate, are in signal connection with the control system and are respectively close to two ends of the bottom of the second mounting plate, and when the second mounting plate deflects, one end of the bottom of the second mounting plate triggers the corresponding first microswitch; and the two second microswitches are both arranged on the second mounting plate, are in signal connection with the control system, and are respectively connected to two spaced triggering positions on the support frame through the triggering mechanism, and when the support frame bears the silicon wafer boat, the stress state of the triggering positions of the support frame enables the triggering mechanism to trigger the corresponding second microswitches. Stable carrying of the silicon wafer boat can be achieved, and mechanical damage to the silicon wafer boat cannot be caused.

Description

Technical Field

[0001] The implementation mode of the utility model relates to the field of photovoltaic cell production and manufacturing. Specifically, the application relates to a boat supporting mechanism and a boat grabbing device. Background Art

[0002] The silicon wafer boat used for solar cell coating is a carrier for anti-reflection coating of solar cells. Common silicon wafer boats include graphite boats or quartz boats. In the manufacturing process of solar photovoltaic cells, it is often necessary to transport silicon wafer boats. Conventional operations use grippers to hold and transport silicon wafer boats, but the grippers are prone to scratching the silicon wafer boats. Utility Model Content

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a boat supporting mechanism and a boat grabbing device to achieve stable transportation of a silicon wafer boat without causing mechanical damage to the silicon wafer boat.

[0004] The solution of this application example is implemented through the following contents.

[0005] In a first aspect, an example of the present application provides a boat support mechanism, comprising:

[0006] A first mounting plate and a second mounting plate connected by a rotating shaft, a base plate arranged at the bottom of the second mounting plate, and a support frame arranged on the base plate and supported by the base plate, wherein the rotating shaft is located on the center line of the second mounting plate in the vertical direction;

[0007] Two first micro switches are both arranged on the first mounting plate and connected to the control system signal, and are respectively close to the two ends of the bottom of the second mounting plate. When the second mounting plate is deflected, one end of the bottom of the second mounting plate triggers the corresponding first micro switch; and,

[0008] Two second micro switches are both arranged on the second mounting plate and connected to the control system signal, and are respectively connected to two trigger positions spaced apart on the support frame through a trigger mechanism. When the support frame supports the silicon wafer boat, the stress state of the trigger position of the support frame causes the trigger mechanism to trigger the corresponding second micro switch.

[0009] The boat supporting mechanism provided in the present application can stably support the silicon wafer boat by using a support frame, and when the silicon wafer boat is placed on the support frame, the carrying posture of the silicon wafer boat can be determined based on the signals fed back to the control system by two first micro switches and two second micro switches.

[0010] Specifically, the separately configured support frame can match the shape and structure of the contact part of the wafer boat to achieve stable contact and acceptance. In addition, when the second mounting plate is in operation, if the deflection reaches a certain degree, one of the two ends at its bottom will abut against the first micro switch near the corresponding position, thereby triggering an induction signal to the control system, and when the wafer boat is placed on the support frame, the corresponding trigger position on the support frame will trigger the corresponding second micro switch through the trigger mechanism, thereby triggering an induction signal to the control system.

[0011] In this way, when the two first micro switches are not triggered and the two second micro switches are triggered, it is determined that the support frame is carrying the silicon wafer boat in an accurate posture, and subsequent actions or operations are performed based on this, thereby avoiding the silicon wafer boat being carried in a skewed posture and affecting subsequent operations.

[0012] According to some examples of the first aspect of the present application, two protrusions are formed at both ends of the bottom of the first mounting plate toward the bottom of the second mounting plate, two first micro switches are arranged on the first mounting plate, and the detection ends of the two first micro switches are located between the protrusions and the bottom of the second mounting plate.

[0013] The protruding block has a limiting effect on the swing angle of the bottom of the second mounting plate. The detection end of the first micro switch is located between the protruding block and the bottom of the second mounting plate, which helps to protect the first micro switch from being hit by a large magnitude.

[0014] According to some examples of the first aspect of the present application, the second micro switch is installed at two ends of the bottom of the second mounting plate and is located in grooves opened at two ends of the bottom of the second mounting plate.

[0015] The groove helps to reduce the extra space occupied and has a certain protective effect on the second micro switch, and the grooves are easy to be opened at both ends of the bottom of the second mounting plate. The design of the groove can ensure that the adjacent first mounting plate and the second mounting plate are in a large degree of fit.

[0016] According to some examples of the first aspect of the present application, the trigger mechanism includes: a pad block, which passes through the base plate and the support frame and is arranged at a corresponding trigger position, and protrudes from the surface of the support frame; a connecting plate, which is accommodated in the built-in cavity of the base plate and has a rotating shaft with an axis parallel to the bottom of the base plate, the first end of the connecting plate is connected to the pad block, the second end of the connecting plate is close to the contact of the second micro switch, and when the pad block is subjected to force to press the first end of the connecting plate down, the connecting plate rotates around the rotating shaft to make the second end of the connecting plate abut against the contact.

[0017] When the pad is subjected to force, the connecting plate is triggered to rotate around the rotating axis, and the connecting plate triggers the second micro switch. The structure of the pad and the rotatable connecting plate is easy to implement, and the position sensed by the second micro switch can be extended through the pad and the connecting plate.

[0018] According to some examples of the first aspect of the present application, the trigger mechanism further includes a fixing block, and both ends of the rotating shaft are respectively installed in the built-in cavity of the base plate through a fixing block.

[0019] The fixing block can effectively fix the rotating shaft and ensure the stability of the mechanical structure.

[0020] According to some examples of the first aspect of the present application, the trigger mechanism also includes a first limiting portion and / or a second limiting portion installed on the base plate, the first limiting portion is located below the first end of the connecting plate, and the second limiting portion is located below the second end of the connecting plate.

[0021] The first limiting portion and the second limiting portion can effectively limit the rotation range of the connecting plate.

[0022] According to some examples of the first aspect of the present application, the trigger mechanism further includes a spring, and the spring is located between the lower end surface of the first end of the connecting plate and the first limiting portion.

[0023] The spring can reset the connecting plate, thereby ensuring that the connecting plate does not touch the contact of the second micro switch when the cushion block is not under force.

[0024] According to some examples of the first aspect of the present application, elastic members are respectively provided at both ends of the upper portion of the first mounting plate, each elastic member abuts against a corresponding end of the upper portion of the second mounting plate, and the elastic member includes a spring ball.

[0025] The elastic member can form a buffer to prevent the second mounting plate from being damaged by collision with other structural components due to a large swing force of the second mounting plate when the second mounting plate is deflected.

[0026] According to some examples of the first aspect of the present application, protrusions are formed at both ends of the support frame, and the surfaces opposite to each other of the two protrusions are both inclined.

[0027] When the silicon wafer boat is placed on the support frame, the inclined surface can provide preliminary guidance so that the silicon wafer boat falls between the two protrusions and is stably supported by the support frame.

[0028] In a second aspect, an example of the present application provides a boat grabbing device, comprising:

[0029] Two lifting modules arranged opposite to each other;

[0030] Two transverse modules, each of which is arranged on a lifting module and can be driven to change the height in the vertical direction; and,

[0031] The two aforementioned boat supporting mechanisms, each of which is disposed on a transverse movement module and can be driven to change the displacement in the horizontal direction, and the support frame of each boat supporting mechanism respectively supports one end of the silicon wafer boat.

[0032] The lifting module and the transverse movement module can cooperate to drive the aforementioned boat supporting mechanism, change the height of the boat supporting mechanism in the vertical direction and the displacement in the horizontal direction, and use the aforementioned boat supporting mechanism to stably support the silicon wafer boat, thereby realizing the transportation of the silicon wafer boat.

[0033] According to some examples of the second aspect of the present application, the traverse module includes:

[0034] A first substrate is arranged on the driving end of the lifting module, and a first driving mechanism and a first slide rail extending in a horizontal direction are arranged on the first substrate;

[0035] The second substrate is arranged on the first slide rail and is driven by the first driving mechanism to slide on the first slide rail.

[0036] The structure of this transverse movement module is simple and easy to implement, and the first substrate can form a stable connection with the driving end of the lifting module, and the second substrate can be used for stably supporting the connection boat support mechanism.

[0037] According to some examples of the second aspect of the present application, a second driving mechanism and a second slide rail extending in a horizontal direction are formed on the second substrate, and the first mounting plate of the boat support mechanism is slidably disposed on the second slide rail and is driven by the second driving mechanism to slide on the second slide rail.

[0038] The second slide rail has a stable guiding function to stabilize the movement direction of the bottom surface of the boat supporting mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 A structural schematic diagram of a boat supporting mechanism provided in an embodiment of the present application at a first viewing angle;

[0040] Figure 2 A schematic structural diagram of a boat supporting mechanism provided in an embodiment of the present application at a second viewing angle;

[0041] Figure 3 A schematic diagram of the structure of a boat supporting mechanism provided in an embodiment of the present application at a third viewing angle;

[0042] Figure 4 A structural schematic diagram of a first mounting plate and associated structures of a boat supporting mechanism provided in an embodiment of the present application at a first viewing angle;

[0043] Figure 5 A structural schematic diagram of a first mounting plate and associated structures of a boat supporting mechanism provided in an embodiment of the present application at a second viewing angle;

[0044] Figure 6 A schematic structural diagram of a trigger mechanism of a boat supporting mechanism provided in an embodiment of the present application;

[0045] Figure 7 A schematic diagram of the structure of a boat grabbing device provided in an embodiment of the present application;

[0046] Figure 8 A schematic diagram of a state of a boat grabbing device provided in an embodiment of the present application when carrying a silicon wafer boat;

[0047] Fig. 9 A schematic diagram of the structure of two oppositely arranged transverse shifting modules in a boat grabbing device provided in an embodiment of the present application;

[0048] Fig.10 A schematic structural diagram of a transverse movement module in a boat grabbing device provided in an embodiment of the present application.

[0049] Description of reference numerals:

[0050] 1- boat support mechanism; 2- transverse movement module; 3- lifting module; 4- silicon wafer boat;

[0051] 10-trigger mechanism; 11-first mounting plate; 12-second mounting plate; 13-second micro switch; 14-first micro switch; 15-rotating shaft; 16-bottom plate; 17-support frame; 18-trigger position; 19-protruding block; 20-first substrate; 21-second substrate; 22-first driving mechanism; 23-second driving mechanism;

[0052] 101-pad; 102-connecting plate; 103-fixing block; 104-first limiting portion; 105-second limiting portion; 106-spring; 110-elastic member; 120-groove; 170-protrusion; 201-first slide rail; 211-second slide rail. DETAILED DESCRIPTION

[0053] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0054] like Figure 1 , Figure 2 and Figure 3As shown, an embodiment of the present application provides a boat supporting mechanism 1, including a first mounting plate 11, a second mounting plate 12, two first micro switches 14 and two second micro switches 13; specifically, the first mounting plate 11 and the second mounting plate 12 are connected by a rotating shaft 15, wherein the rotating shaft 15 is located on the center line of the second mounting plate 12 in the vertical direction, and the second mounting plate 12 can rotate around the rotating shaft 15; and a bottom plate 16 is provided at the bottom of the second mounting plate 12, and a support frame 17 supported by the bottom plate 16 is provided on the bottom plate 16; by the two boat supporting mechanisms 1 being arranged relative to each other, the two relative support frames 17 can respectively support the two ends of the silicon wafer boat (not shown in the drawings).

[0055] In addition, two first micro switches 14 are respectively arranged on the first mounting plate 11 at both ends close to the bottom of the second mounting plate 12. When the second mounting plate 12 is deflected, one end of the bottom of the second mounting plate 12 triggers the corresponding first micro switch 14; and two second micro switches 13 are arranged on the second mounting plate 12, which are respectively connected to two trigger positions 18 spaced apart on the support frame 17 through the trigger mechanism 10. When the support frame 17 receives the silicon wafer boat, the stress state of the trigger position 18 of the support frame 17 causes the trigger mechanism 10 to trigger the corresponding second micro switch 13.

[0056] The first micro switch 14 and the second micro switch 13 are both connected to the control system signal. The control system collects the electrical signals of the first micro switch 14 and the second micro switch 13 to determine whether the boat supporting mechanism 1 accurately carries the silicon wafer boat.

[0057] Specifically, the separately configured support frame 17 can match the shape and structure of the contact part of the silicon wafer boat to achieve stable contact and acceptance. In addition, when the second mounting plate 12 is in operation, if the deflection reaches a certain degree, one of the two ends of its bottom will abut against the first micro switch 14 near the corresponding position, thereby triggering an induction signal to the control system, and when the silicon wafer boat is placed on the support frame 17, the corresponding trigger position 18 on the support frame 17 will trigger the corresponding second micro switch 13 through the trigger mechanism 10, thereby triggering an induction signal to the control system.

[0058] In this way, when the two first micro switches 14 are not triggered and the two second micro switches 13 are triggered, it is determined that the support frame 17 is carrying the silicon wafer boat in an accurate posture, and subsequent actions or operations are performed based on this, thereby avoiding the silicon wafer boat being carried in a skewed posture and affecting subsequent operations.

[0059] The boat supporting mechanism 1 provided in the present application can stably support the silicon wafer boat 4 by using the support frame 17, and when the silicon wafer boat is placed on the support frame 17, the carrying posture of the silicon wafer boat can be determined based on the signals fed back to the control system by the two first micro switches 14 and the two second micro switches 13.

[0060] As attached Figure 2 and attached Figure 3 As shown, in one embodiment, two protrusions 19 are formed at both ends of the bottom of the first mounting plate 11 toward the bottom of the second mounting plate 12, and the two protrusions 19 wrap the corners of the bottom of the first mounting plate 11 near the two ends, thereby limiting the swinging angle of the bottom of the second mounting plate 12; in addition, when two first micro switches 14 are installed on the first mounting plate 11, the detection ends of the two first micro switches 14 are located between the protrusions 19 and the bottom of the second mounting plate 12, which helps to protect the first micro switches 14 and avoid large impacts.

[0061] For example, the structure of the raised block 19 is an L-shaped structure, whose right angle is wrapped around the right angle of the bottom of the first mounting plate 11, and a step is provided on the side of the raised block 19 and is located below the bottom of the second mounting plate 12. When the bottom of the second mounting plate 12 swings, the step limits the swinging amplitude of the second mounting plate 12, thereby playing a limiting role.

[0062] As attached Figure 2 and attached Figure 3 As shown, a groove 120 is provided at both ends of the bottom of the second mounting plate 12 for accommodating the second micro switch 13. The groove 120 is used to protect the second micro switch 13 to prevent damage to the second micro switch 13 when the silicon wafer boat is transported to the support frame 17. The shape and size of the groove 120 are determined according to the second micro switch 13. In this embodiment, a square groove is used, which extends to the side of the first mounting plate 11 to facilitate the installation of the second micro switch 13. In addition, it should be noted that due to the adjacent and fitting arrangement of the first mounting plate and the second mounting plate, accommodating the second micro switch 13 through the groove described above helps to reduce additional space occupation and ensure that the adjacently arranged first mounting plate and the second mounting plate are in a greater degree of fit.

[0063] As attached Figure 4 , Attachment Figure 5 And attached Figure 6 As shown, the trigger mechanism 10 includes a fixedly connected pad 101 and a connecting plate 102, wherein the pad 101 passes through the base plate 16 and the support frame 17 and is arranged at a corresponding trigger position, and protrudes from the surface of the support frame 17 and contacts the silicon wafer boat on the surface of the support frame 17; the connecting plate 102 is arranged in a built-in cavity (not shown in the drawings) of the base plate 16, and has a rotating shaft with an axis parallel to the bottom of the base plate 16, the first end of the connecting plate 102 is connected to the pad 101, and the second end of the connecting plate 102 is close to the contact of the second micro switch 13, and when the pad 101 is pressed down by the pressure of the silicon wafer boat to press the first end of the connecting plate 102, the connecting plate 102 rotates around the rotating shaft to make the second end of the connecting plate 102 abut against the contact, thereby triggering the second micro switch 13.

[0064] When the pad 101 is subjected to the pressure from the silicon wafer boat, it triggers the connecting plate 102 to rotate around the rotation axis, and the connecting plate 102 triggers the second micro switch 13. The structures such as the pad 101 and the rotatable connecting plate 102 are easy to implement, and the position sensed by the second micro switch 13 can be extended through the pad 101 and the connecting plate 102.

[0065] As attached Figure 5 and attached Figure 6 As shown, the trigger mechanism 10 also includes a fixed block 103, which is arranged on both sides of the rotating shaft, so that the two ends of the rotating shaft are respectively installed in the built-in cavity of the base plate 16 through a fixed block 103. The fixed block 103 can effectively fix the rotating shaft, ensure the stability of the mechanical structure, and ensure the stability of the rotation state of the connecting plate 102.

[0066] As attached Figure 4 , Attachment Figure 5 And attached Figure 6 As shown, the trigger mechanism 10 also includes at least one of a first limiting portion 104 and a second limiting portion 105 installed on the base plate 16, wherein the first limiting portion 104 is located below the first end of the connecting plate 102 and is fixedly connected to the second mounting plate 12, for limiting the rotation range of the first end of the connecting plate 102; the second limiting portion 105 is located below the second end of the connecting plate 102 and is fixed to the first mounting plate 11, for limiting the rotation range of the second end of the connecting plate 102; the use of the first limiting portion 104 and the second limiting portion 105 can effectively limit the rotation range of the connecting plate 102; for example, the first limiting portion 104 and the second limiting portion 105 can both be fixed below the two ends of the connecting plate 102 using a baffle structure.

[0067] As attached Figure 6 As shown, the trigger mechanism 10 also includes a spring 106, which is located between the lower end surface of the first end of the connecting plate 102 and the first limiting portion 104. The connecting plate 102 can be reset by the spring 106, thereby ensuring that when the cushion block 101 is not subjected to force, the connecting plate 102 will not touch the contacts of the second micro switch 13.

[0068] As attached Figure 1 and attached Figure 2 As shown, elastic members 110 are respectively provided at both ends of the upper portion of the first mounting plate 11, and each elastic member 110 abuts against a corresponding end of the upper portion of the second mounting plate 12. The elastic members 110 realize elastic contact with the first mounting plate 11 when the second mounting plate 12 deflects, and a buffer can be formed to prevent the second mounting plate 12 from being damaged by collision with other structural components due to a large swing force when the second mounting plate 12 deflects. The elastic member 110 can be a spring or a spring ball.

[0069] Among them, the elastic members 110 arranged at both ends of the upper part of the first mounting plate 11 and the two protruding blocks 19 arranged at both ends of the bottom are used together to limit the rotation range of the second mounting plate 12 from the four corners, thereby preventing the second mounting plate 12 from swinging too hard and damaging other structural components.

[0070] Continue as attached Figure 3 As shown, protrusions 170 are formed at both ends of the support frame 17, and the opposing surfaces of the two protrusions 170 are both inclined, wherein the inclination angle is the opposing direction of the two protrusions 170. Through the two opposing inclined surfaces, the wafer boat 4 placed on the support frame 17 can be initially guided so that the wafer boat 4 falls in the middle of the two protrusions 170, so as to be stably positioned and supported by the support frame 17.

[0071] As attached Figure 7 , Attachment Figure 8 And attached Fig. 9 As shown, in this embodiment, the present application also provides a boat grabbing device, including two lifting modules 3, two transverse modules 2 and the aforementioned boat supporting mechanism 1. Among them, the two lifting modules 3 are arranged opposite to each other, and a transverse module 2 is arranged on each lifting module 3, and the transverse module 2 can be driven by the lifting module 3 to change the height in the vertical direction; each boat supporting mechanism 1 is arranged on a transverse module 2 and can be driven to change the displacement in the horizontal direction, and the support frame 17 of each boat supporting mechanism 1 respectively receives one end of the silicon wafer boat 4.

[0072] The lifting module 3 and the transverse movement module 2 can cooperate to drive the aforementioned boat supporting mechanism 1, change the height of the boat supporting mechanism 1 in the vertical direction and the displacement in the horizontal direction, and use the aforementioned boat supporting mechanism 1 to stably support the silicon wafer boat 4, thereby realizing the transportation of the silicon wafer boat 4.

[0073] As attached Fig.10 As shown, the transverse movement module 2 includes a first substrate 20 and a second substrate 21 which are fixedly connected, wherein the first substrate 20 is arranged on the driving end of the lifting module 3, and the first substrate 20 is provided with a first driving mechanism 22 and a first slide rail 201 extending in the horizontal direction; the second substrate 21 is arranged on the first slide rail 201, and is driven by the first driving mechanism 22 to slide on the first slide rail 201; the transverse movement module 2 has a simple structure and is easy to implement, and the first substrate 20 can form a stable connection with the driving end of the lifting module 3, and the second substrate 21 can be used to stably support the connection boat support mechanism 1.

[0074] Continue as attached Fig.10As shown, a second driving mechanism 23 and a second slide rail 211 extending in the horizontal direction are formed on the second substrate 21, and the first mounting plate 11 of the boat support mechanism 1 is slidably disposed on the second slide rail 211 and driven by the second driving mechanism 23 to slide on the second slide rail 211, thereby realizing horizontal transportation of the silicon wafer boat 4 on the boat support mechanism 1. The second slide rail 211 has a stable guiding effect to stabilize the moving direction of the bottom surface of the boat support mechanism 1.

[0075] In the above description of the present application, unless otherwise clearly specified and limited, the terms "fixed", "installed", "connected" or "connected" and the like should be understood in a broad sense. For example, with regard to the term "connection", it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal connection of two elements or the interaction relationship between two elements. Therefore, unless otherwise clearly defined in the present application, those skilled in the art can understand the specific meanings of the above terms in the present application according to the specific circumstances.

[0076] According to the above description of the present application, those skilled in the art may also understand that the terms used below, such as "up", "down", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "center", "longitudinal", "lateral", "clockwise" or "counterclockwise", etc., which indicate orientation or positional relationships, are based on the orientation or positional relationships shown in the drawings of the present application, and are only for the purpose of facilitating the explanation of the scheme of the present application and simplifying the description, rather than explicitly or implicitly indicating that the devices or elements involved must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as limitations on the scheme of the present application.

[0077] In addition, the terms "first" or "second" used in this application to refer to numbers or ordinals are only used for descriptive purposes and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0078] Although multiple embodiments of the present application have been shown and described herein, it is obvious to those skilled in the art that such embodiments are provided only by way of example. Those skilled in the art can think of many changes, modifications and alternatives without departing from the thought and spirit of the present application. It should be understood that in the process of practicing the present application, various alternatives to the embodiments of the present application described herein can be adopted. The attached claims are intended to limit the scope of protection of the present application, and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A boat supporting mechanism, characterized in that: The boat supporting mechanism comprises: A first mounting plate and a second mounting plate connected by a rotating shaft, a base plate arranged at the bottom of the second mounting plate, and a support frame arranged on the base plate and supported by the base plate, wherein the rotating shaft is located on the center line of the second mounting plate in the vertical direction; Two first micro switches are both arranged on the first mounting plate and connected to the control system signal, and are respectively close to the two ends of the bottom of the second mounting plate. When the second mounting plate is deflected, one end of the bottom of the second mounting plate triggers the corresponding first micro switch; and, Two second micro switches are both arranged on the second mounting plate and connected to the control system signal, and are respectively connected to two trigger positions spaced apart on the support frame through a trigger mechanism. When the support frame supports the silicon wafer boat, the stress state of the trigger position of the support frame causes the trigger mechanism to trigger the corresponding second micro switch.

2. The boat support mechanism according to claim 1, characterized in that: Two protrusions are formed at two ends of the bottom of the first mounting plate toward the bottom of the second mounting plate. The two first micro switches are arranged on the first mounting plate, and the detection ends of the two first micro switches are located between the protrusions and the bottom of the second mounting plate.

3. The boat support mechanism according to claim 1, characterized in that: The second micro switch is installed at two ends of the bottom of the second mounting plate, and is located in grooves opened at two ends of the bottom of the second mounting plate.

4. The boat support mechanism according to claim 1, characterized in that: The trigger mechanism comprises: A cushion block, which passes through the bottom plate and the support frame and is arranged at a corresponding triggering position and protrudes from a surface of the support frame; A connecting plate is accommodated in the built-in cavity of the base plate and has a rotating shaft whose axis is parallel to the bottom of the base plate. The first end of the connecting plate is connected to the cushion block, and the second end of the connecting plate is close to the contact of the second micro switch. When the cushion block is subjected to force to press the first end of the connecting plate down, the connecting plate rotates around the rotating shaft to make the second end of the connecting plate abut against the contact.

5. The boat support mechanism according to claim 4, characterized in that: The trigger mechanism further comprises a fixing block, and both ends of the rotating shaft are respectively installed in the built-in cavity of the bottom plate through one of the fixing blocks.

6. The boat support mechanism according to claim 4, characterized in that: The trigger mechanism further includes a first limiting portion and / or a second limiting portion mounted on the bottom plate, wherein the first limiting portion is located below the first end of the connecting plate, and the second limiting portion is located below the second end of the connecting plate.

7. The boat support mechanism according to claim 6, characterized in that: The trigger mechanism further includes a spring, and the spring is located between the lower end surface of the first end of the connecting plate and the first limiting portion.

8. The boat support mechanism according to claim 1, characterized in that: Elastic members are respectively arranged at both ends of the upper portion of the first mounting plate, each of the elastic members abuts against a corresponding end of the upper portion of the second mounting plate, and the elastic members include spring balls.

9. The boat support mechanism according to claim 1, characterized in that: Protrusions are formed at both ends of the support frame, and the surfaces opposite to each other of the two protrusions are both inclined.

10. A boat grabbing device, characterized in that: The boat grabbing device comprises: Two lifting modules arranged opposite to each other; two transverse modules, each of which is disposed on one of the lifting modules and can be driven to change the height in the vertical direction; and, Two boat supporting mechanisms according to any one of claims 1 to 9, each of the boat supporting mechanisms is arranged on one of the transverse movement modules and can be driven to change the displacement in the horizontal direction, and the support frame of each of the boat supporting mechanisms respectively supports one end of the silicon wafer boat.

11. The boat grabbing device according to claim 10, characterized in that: The traverse module comprises: A first substrate is arranged on the driving end of the lifting module, and a first driving mechanism and a first slide rail extending in a horizontal direction are arranged on the first substrate; The second substrate is arranged on the first slide rail and is driven by the first driving mechanism to slide on the first slide rail.

12. The boat grabbing device according to claim 11, characterized in that: A second driving mechanism and a second slide rail extending in a horizontal direction are formed on the second base plate. The first mounting plate of the boat supporting mechanism is slidably disposed on the second slide rail and is driven by the second driving mechanism to slide on the second slide rail.

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