Furnace cover guide structure of single crystal furnace

Abstract

The utility model discloses a furnace cover guide structure of a single crystal furnace, which is applied to a single crystal furnace body and a furnace cover structure, and belongs to the field of single crystal furnaces. The furnace cover guide structure of the single crystal furnace comprises a ring seat fixed at the top end of a single crystal furnace body, the positioning blocks are fixed on the edge side of the bottom of the furnace cover structure, and the multiple positioning blocks are distributed in the radial direction of the furnace cover structure; the positioning groove is formed in the outer side of the upper surface of the ring seat, and the positioning groove and the positioning block are matched and embedded. According to the single crystal furnace cover structure, guide positioning in the covering process of the furnace cover structure is achieved through embedding of the multiple positioning blocks and the positioning grooves, locking and fixing of the furnace cover structure are achieved through buckling of the locking buckle plates and the positioning blocks, the structure is stable and reasonable, operation and control are easy, the covering assembly efficiency of the furnace cover structure and the single crystal furnace body is greatly improved, and the production cost is reduced. The stability of the furnace cover structure after assembly is ensured, and the furnace cover structure has high practical value.

Description

Technical Field

[0001] The present application relates to the field of single crystal furnaces, and in particular to a single crystal furnace cover guide structure. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals using the Czochralski method.

[0003] In the prior art, the utility model with application number 202322457452.X discloses a single crystal furnace cover guide structure, which is used to be installed on the furnace body and the furnace cover: the single crystal furnace cover guide structure also includes: two mounting seats, the two mounting seats are installed on both sides of the furnace body, the two sides of the furnace cover are respectively fixed with connecting rods, the end of the connecting rod away from the furnace body is fixed with a guide piece, the guide piece is conical, the mounting seat is provided with a guide groove corresponding to the guide piece, the opening size of the guide groove gradually decreases toward the bottom of the furnace body, the two guide pieces are both provided with a fixing groove on one end away from each other, and the mounting seat is provided with a locking assembly corresponding to the fixing groove. The beneficial effect of the present application is to provide a single crystal furnace cover guide structure that speeds up installation.

[0004] In the above structure, it is not difficult to find that the guide main block and the furnace cover are connected only by connecting rods, and the furnace cover and the furnace body are only locked by plugging in the fixing rods and the fixing grooves. There are disadvantages in that the axial limitation and locking effect of the furnace cover and the furnace body are weak, which affects the stability of the single crystal furnace. For this reason, the present application proposes a single crystal furnace cover guide structure. Utility Model Content

[0005] The content of this application is used to introduce concepts in a brief form, which will be described in detail in the detailed implementation section below. The content of this application is not intended to identify the key features or essential features of the technical solution claimed for protection, nor is it intended to limit the scope of the technical solution claimed for protection.

[0006] In order to solve the technical problems mentioned in the above background technology part, some embodiments of the present application provide a single crystal furnace cover guide structure, which is applied to the single crystal furnace body and the furnace cover structure. The single crystal furnace cover guide structure includes a ring seat fixed on the top of the single crystal furnace body; a positioning block fixed at the bottom side of the furnace cover structure, and there are multiple positioning blocks distributed radially along the furnace cover structure; a positioning groove is opened on the outer side of the upper surface of the ring seat, and the positioning groove is adapted to fit with the positioning block.

[0007] Furthermore, the positioning block is configured as a horizontally arranged triangular prism structure, and the bottom cone of the positioning block is chamfered with an arc.

[0008] Furthermore, the furnace cover structure and the ring seat have the same outer diameter, the positioning block extends out of the sides of the furnace cover structure and the ring seat, and a locking mechanism for locking the positioning block is provided on the single crystal furnace body.

[0009] Furthermore, the locking mechanism includes a rotating ring plate rotatably mounted on the single crystal furnace body, a locking buckle plate installed on the rotating ring plate, and a driving component arranged on the single crystal furnace body for driving the rotating ring plate to rotate. The locking buckle plates are equal in number to the positioning blocks and are fitted one by one.

[0010] Furthermore, the locking buckle plate is configured as a "7"-shaped structure, the top arm of the locking buckle plate can fit with the upper surface of the positioning block, and the side arm of the locking buckle plate can fit with the inclined surface of the side of the positioning block.

[0011] Furthermore, an installation groove is opened on the rotating ring plate, and the installation groove passes through the side wall of the rotating ring plate. The bottom of the locking buckle plate passes through the installation groove and a mounting plate is horizontally arranged. Both ends of the mounting plate are provided with fixing bolts that are threadedly connected to the rotating ring plate.

[0012] Furthermore, the driving assembly includes a tooth groove opened on the side wall of the rotating ring plate, a fixed plate fixed on the side wall of the single crystal furnace body near the tooth groove, a driving gear rotatably installed on the top of the fixed plate, and a driving motor fixed on the bottom of the fixed plate for driving the driving gear to rotate, and the driving gear is meshed with the tooth groove.

[0013] Furthermore, limit blocks are provided on the side walls of the rotating ring plate at positions at both ends of the tooth grooves.

[0014] The beneficial effect of the present application is that it provides a highly stable single crystal furnace cover guide structure.

[0015] By setting the positioning block and the positioning groove, during the process of the furnace cover structure and the single crystal furnace body being covered, the positioning block is first embedded in the positioning groove on the ring seat to guide and position the single crystal furnace body and the furnace cover structure, and limit the axial relative rotational movement of the single crystal furnace body and the furnace cover structure. Among them, the positioning block is set as a horizontally arranged triangular prism structure, and the bottom cone of the positioning block is specially designed with arc chamfering treatment. This can enable the positioning block to be smoothly embedded in the positioning groove during the process of the furnace cover structure being covered toward the single crystal furnace body, thereby enhancing the guiding and positioning effect on the furnace cover structure and the single crystal furnace body, ensuring that the furnace cover structure can be smoothly covered on the top of the single crystal furnace body, thereby improving the covering and assembly efficiency of the furnace cover structure and the single crystal furnace body. In addition, since the positioning block and the positioning groove are respectively arranged on the furnace cover structure and the single crystal furnace body, the guiding and positioning effect on the single crystal furnace body and the furnace cover structure is more stable.

[0016] By setting the locking buckle plate, after the furnace cover structure is covered to the top of the single crystal furnace body, the driving component is used to drive the rotating ring plate to rotate, and the rotating ring plate drives the locking buckle plate to rotate and buckle with the positioning block, and the positioning block is locked and limited, thereby realizing the locking and fixation of the furnace cover structure. In the whole process, the engagement of multiple positioning blocks and positioning grooves is utilized to realize the guiding positioning during the covering process of the furnace cover structure, and the locking and fixation of the furnace cover structure is realized by the buckling of the locking buckle plate and the positioning block. The structure is stable and reasonable, and is easy to operate and control. The covering and assembly efficiency of the furnace cover structure and the single crystal furnace body is greatly improved, the stability of the furnace cover structure after assembly is ensured, and it has high practical value. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The illustrative embodiment drawings and their descriptions of this application are used to explain this application and do not constitute an improper limitation on this application.

[0018] In addition, throughout the drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and that the components and elements are not necessarily drawn to scale.

[0019] In the attached picture:

[0020] Figure 1 It is an overall schematic diagram of an embodiment of the present application;

[0021] Figure 2 It is a schematic diagram of the structure of a single crystal furnace body according to an embodiment of the present application;

[0022] Figure 3 This is an embodiment of the present application Figure 1 A in the enlarged view;

[0023] Figure 4 It is a structural schematic diagram of a locking buckle plate according to an embodiment of the present application;

[0024] Figure 5 It is a schematic diagram of the structure of the driving mechanism of the embodiment of the present application.

[0025] Reference numerals:

[0026] 1. Single crystal furnace body; 2. Furnace cover structure; 3. Ring seat; 4. Rotating ring plate; 5. Driving assembly; 6. Positioning groove; 7. Locking buckle plate; 8. Positioning block; 9. Installation slot; 10. Mounting plate; 11. Fixing bolt; 12. Tooth groove; 13. Driving gear; 14. Fixing plate; 15. Driving motor; 16. Limit block; 17. Locking mechanism. DETAILED DESCRIPTION

[0027] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.

[0028] It should also be noted that, for ease of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0029] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0030] It should be noted that the modifications of "one" and "plurality" mentioned in the present disclosure are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0031] The present disclosure will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0032] Reference Figure 1 - Figure 5 As shown, a single crystal furnace cover guide structure is applied to a single crystal furnace body 1 and a furnace cover structure 2, and the single crystal furnace cover guide structure includes a ring seat 3 fixed on the top of the single crystal furnace body 1; a positioning block 8 fixed at the bottom side of the furnace cover structure 2, and a plurality of positioning blocks 8 are distributed radially along the furnace cover structure 2; a positioning groove 6 is opened on the outer side of the upper surface of the ring seat 3, and the positioning groove 6 is adapted to fit with the positioning block 8. Through this structural method, during the process of covering the furnace cover structure 2 with the single crystal furnace body 1, the positioning block 8 is first embedded in the positioning groove 6 on the ring seat 3, and the single crystal furnace body 1 and the furnace cover structure 2 are guided and positioned, and the axial relative rotation movement of the single crystal furnace body 1 and the furnace cover structure 2 is restricted. Since the positioning block 8 and the positioning groove 6 are respectively arranged on the furnace cover structure 2 and the single crystal furnace body 1, the guiding and positioning effect of the single crystal furnace body 1 and the furnace cover structure 2 is more stable.

[0033] As a preferred implementation manner of this embodiment, the positioning block 8 is configured as a horizontally arranged triangular prism structure, and the bottom cone of the positioning block 8 is chamfered with an arc. This special structural design can enable the positioning block 8 to be smoothly embedded in the positioning groove 6 during the process of the furnace cover structure 2 being covered toward the single crystal furnace body 1, thereby enhancing the guiding and positioning effect on the furnace cover structure 2 and the single crystal furnace body 1, ensuring that the furnace cover structure 2 can be smoothly covered on the top of the single crystal furnace body 1, thereby improving the covering and assembly efficiency of the furnace cover structure 2 and the single crystal furnace body 1.

[0034] In a further embodiment, the furnace cover structure 2 and the ring seat 3 have the same outer diameter, the positioning block 8 extends out of the sides of the furnace cover structure 2 and the ring seat 3, and a locking mechanism 17 for locking the positioning block 8 is provided on the single crystal furnace body 1. Specifically, the locking mechanism 17 includes a rotating ring plate 4 rotatably mounted on the single crystal furnace body 1, a locking buckle plate 7 installed on the rotating ring plate 4, and a driving component 5 provided on the single crystal furnace body 1 for driving the rotating ring plate 4 to rotate. The locking buckle plates 7 are equal in number to the positioning blocks 8 and are fitted one by one. After the furnace cover structure 2 is covered on the top of the single crystal furnace body 1, the driving component is used to 5 drives the rotating ring plate 4 to rotate, and the rotating ring plate 4 drives the locking buckle plate 7 to rotate and buckle with the positioning block 8, and the positioning block 8 is locked and limited, thereby realizing the locking and fixing of the furnace cover structure 2. In the whole process, the multiple positioning blocks 8 are engaged with the positioning grooves 6 to realize the guiding positioning of the furnace cover structure 2 in the covering process, and the locking and fixing of the furnace cover structure 2 is realized by the buckling of the locking buckle plate 7 and the positioning block 8. The structure is stable and reasonable, easy to operate and control, greatly improving the covering and assembling efficiency of the furnace cover structure 2 and the single crystal furnace body 1, and ensuring the stability of the furnace cover structure 2 after assembly.

[0035] In this embodiment, the locking buckle plate 7 is configured as a "7"-shaped structure, the top arm of the locking buckle plate 7 can fit with the upper surface of the positioning block 8, and the side arm of the locking buckle plate 7 can fit with the inclined surface of the side of the positioning block 8. This structural mode can ensure that the locking buckle plate 7 can stably lock and fix the positioning block 8. Furthermore, an installation groove 9 is provided on the rotating ring plate 4, and the installation groove 9 passes through the side wall of the rotating ring plate 4. The bottom of the locking buckle plate 7 passes through the installation groove 9 and a mounting plate 10 is horizontally arranged. The two ends of the mounting plate 10 are penetrated with fixing bolts 11 threadedly plugged with the rotating ring plate 4, which is conducive to the assembly of the locking buckle plate 7.

[0036] In this embodiment, the driving assembly 5 includes a tooth groove 12 provided on the side wall of the rotating ring plate 4, a fixed plate 14 fixed on the side wall of the single crystal furnace body 1 near the tooth groove 12, a driving gear 13 rotatably mounted on the top of the fixed plate 14, and a driving motor 15 fixed on the bottom of the fixed plate 14 for driving the driving gear 13 to rotate. The driving gear 13 is meshed with the tooth groove 12, and the driving motor 15 is started to drive the driving gear 13 to rotate. The driving gear 13 and the tooth groove 12 are used to drive the rotating ring plate 4 to rotate, so that the rotating ring plate 4 drives the locking buckle plate 7 to rotate and buckle with the positioning block 8 for locking and fixing. Limiting blocks 16 are provided at the positions at both ends of the tooth groove 12 on the side wall of the rotating ring plate 4 to limit the maximum rotation angle of the rotating ring plate 4.

[0037] When in use, during the process of covering the furnace cover structure 2 and the single crystal furnace body 1, the positioning block 8 is first embedded in the positioning groove 6 on the ring seat 3 to guide and position the single crystal furnace body 1 and the furnace cover structure 2, and limit the axial relative rotational movement of the single crystal furnace body 1 and the furnace cover structure 2. The positioning block 8 is arranged as a horizontally arranged triangular prism structure, and the bottom cone of the positioning block 8 is specially designed with an arc chamfer. When the furnace cover structure 2 is covered toward the single crystal furnace body 1, the positioning block 8 can be smoothly embedded in the positioning groove 6, thereby enhancing the guiding and positioning effect of the furnace cover structure 2 and the single crystal furnace body 1, ensuring that the furnace cover structure 2 can be smoothly covered on the top of the single crystal furnace body 1, thereby improving the covering and assembly efficiency of the furnace cover structure 2 and the single crystal furnace body 1. Furthermore, after the furnace cover structure 2 is covered on the top of the single crystal furnace body 1, the driving motor 15 is started to drive the driving gear 13 to rotate, and the transmission cooperation between the driving gear 13 and the tooth groove 12 is used to drive the rotating ring plate 4 to rotate, and the rotating ring plate 4 drives the locking buckle plate 7 to rotate and engage with the positioning block 8, and the positioning block 8 is locked and limited, thereby realizing the locking and fixation of the furnace cover structure 2. During the whole process, the engagement of multiple positioning blocks 8 and the positioning grooves 6 is utilized to realize the guiding positioning of the furnace cover structure 2 during the covering process, and the locking and fixation of the furnace cover structure 2 is realized by the engagement of the locking buckle plate 7 and the positioning block 8. The structure is stable and reasonable, and is easy to operate and control, which greatly improves the covering and assembly efficiency of the furnace cover structure 2 and the single crystal furnace body 1, ensures the stability of the furnace cover structure 2 after assembly, and has high practical value.

[0038] The above descriptions are only some preferred embodiments of the present disclosure and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the embodiments of the present disclosure is not limited to the technical solutions formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the above-mentioned inventive concept. For example, the above-mentioned features are replaced with the technical features with similar functions disclosed in the embodiments of the present disclosure (but not limited to) and the technical solutions formed.

Claims

1. A single crystal furnace cover guide structure, applied to a single crystal furnace body (1) and a furnace cover structure (2), characterized in that: The single crystal furnace cover guide structure includes: A ring seat (3) fixed on the top of the single crystal furnace body (1); A positioning block (8) fixed to the bottom side of the furnace cover structure (2), wherein a plurality of the positioning blocks (8) are distributed radially along the furnace cover structure (2); A positioning groove (6) is provided on the outer side of the upper surface of the ring seat (3), and the positioning groove (6) is adapted to fit with a positioning block (8).

2. The single crystal furnace cover guide structure according to claim 1, characterized in that: The positioning block (8) is configured as a horizontally arranged triangular prism structure, and the bottom cone of the positioning block (8) is chamfered with an arc.

3. The single crystal furnace cover guide structure according to claim 1, characterized in that: The furnace cover structure (2) and the ring seat (3) have the same outer diameter, the positioning block (8) extends out of the sides of the furnace cover structure (2) and the ring seat (3), and the single crystal furnace body (1) is provided with a locking mechanism (17) for locking the positioning block (8).

4. The single crystal furnace cover guide structure according to claim 3, characterized in that: The locking mechanism (17) comprises a rotating ring plate (4) rotatably mounted on the single crystal furnace body (1), a locking buckle plate (7) mounted on the rotating ring plate (4), and a driving assembly (5) arranged on the single crystal furnace body (1) for driving the rotating ring plate (4) to rotate, wherein the locking buckle plates (7) and the positioning blocks (8) are equal in number and are engaged with each other in a one-by-one manner.

5. The single crystal furnace cover guide structure according to claim 4, characterized in that: The locking buckle plate (7) is configured as a "7"-shaped structure, the top arm of the locking buckle plate (7) can fit with the upper surface of the positioning block (8), and the side arm of the locking buckle plate (7) can fit with the inclined surface of the side of the positioning block (8).

6. The single crystal furnace cover guide structure according to claim 5, characterized in that: The rotating ring plate (4) is provided with an installation groove (9), the installation groove (9) passes through the side wall of the rotating ring plate (4), the bottom of the locking buckle plate (7) passes through the installation groove (9) and a mounting plate (10) is horizontally arranged, and fixing bolts (11) threadedly plugged with the rotating ring plate (4) are passed through the two ends of the mounting plate (10).

7. The single crystal furnace cover guide structure according to claim 4, characterized in that: The driving assembly (5) comprises a tooth groove (12) provided on the side wall of the rotating ring plate (4), a fixed plate (14) fixed on the side wall of the single crystal furnace body (1) near the tooth groove (12), a driving gear (13) rotatably mounted on the top of the fixed plate (14), and a driving motor (15) fixed on the bottom of the fixed plate (14) for driving the driving gear (13) to rotate, wherein the driving gear (13) is meshed with the tooth groove (12).

8. The single crystal furnace cover guide structure according to claim 7, characterized in that: Limiting blocks (16) are provided on the side walls of the rotating ring plate (4) at positions at both ends of the tooth grooves (12).

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