Arm washing device

Abstract

The utility model belongs to the technical field of wafer cleaning, and particularly relates to a washing arm device and a washing system, comprising: a carrier plate, the upper part of which is provided with a lifting pair and a pressure sensing device; the lifting pair comprises a lifting air cylinder, a supporting frame and an extrusion rod. The extrusion rod is rotationally arranged on the front portion of the supporting frame, one end of the extrusion rod is connected with a piston rod of the lifting air cylinder, the other end of the extrusion rod abuts against the upper portion of the extrusion plate, and the piston rod of the lifting air cylinder pushes one end of the extrusion rod so that the other end of the extrusion rod can descend to drive the extrusion plate to descend; the lower part of the extrusion plate is suitable for extruding an induction point of the pressure induction device; in short, the extrusion plate descends so that the lower portion of the extrusion plate can extrude an induction point of the pressure induction device, and the pressure induction device can collect the contact pressure of the brush head and the wafer; the lifting air cylinder and the pressure detection block are electrically connected with the upper computer, and the lifting air cylinder adjusts the stroke of the piston rod so that the contact pressure of the brush head and the wafer can meet the optimal working state.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer cleaning, and in particular relates to a washing arm device and a washing system. Background Art

[0002] During the wafer cleaning process, after the wafer is placed in the cleaning chamber, the impurities attached to the surface of the wafer will be washed away little by little by the chemical solution. Some of these impurities have strong adhesion and are difficult to remove with different chemical solutions. At this time, a cleaning brush is needed to wash the surface of the wafer so that the dust with strong adhesion can also be washed away by the chemical solution. The pressure at which the brush head contacts the wafer is directly related to whether the brush head can clean the wafer. If the pressure at which the brush head contacts the wafer is too high, it is easy for the wafer to not rotate smoothly during the cleaning operation, affecting the cleaning. If the pressure at which the brush head contacts the wafer is too low, it is easy for the brush head to be unable to effectively remove impurities from the wafer.

[0003] Therefore, in order to solve the technical problem of how to obtain the contact pressure between the brush head and the wafer, it is urgent to provide a brush arm device. Utility Model Content

[0004] The utility model aims to provide an arm washing device and a washing system.

[0005] In order to solve the above technical problems, a brushing arm device is provided, comprising: a brush rod, a brush head is provided at the lower part of which, an extrusion plate is provided at the upper part of the brush rod; a carrier plate, a lifting pair and a pressure sensing device are provided at the upper part of which; the lifting pair comprises a lifting cylinder, a support frame and an extrusion rod; the extrusion rod is rotatably arranged at the front part of the support frame, one end of the extrusion rod is connected to the piston rod of the lifting cylinder, and the other end of the extrusion rod abuts against the upper part of the extrusion plate, wherein when the piston rod of the lifting cylinder pushes one end of the extrusion rod to make the other end of the extrusion rod descend and drive the extrusion plate to descend, the lower part of the extrusion plate is suitable for squeezing the sensing point of the pressure sensing device.

[0006] Further, the pressure sensing device comprises a pressure detection block, wherein when the squeezing plate descends, the squeezing plate is suitable for squeezing a sensing point of the pressure detection block.

[0007] Furthermore, a sensing block is arranged on the upper part of the pressure detection block, and the sensing block is a sensing point. A contact block is arranged on the lower part of the extrusion plate, and when the extrusion plate descends, the contact block is suitable for extruding the sensing block.

[0008] Furthermore, a convex portion is provided on the upper portion of the support frame, and the extrusion rod is rotatably disposed on the convex portion.

[0009] Furthermore, the rotating pair includes a rotating motor, a driving wheel and a passive wheel; a support plate and a support column are provided on the upper part of the carrier plate; the rotating motor is arranged on the upper part of the support plate, and the output shaft of the rotating motor extends out of the lower part of the carrier plate and is connected to the driving wheel; the passive wheel is rotatably arranged on the support column, wherein the passive wheel is connected to the driving wheel through a belt drive, and the brush rod is inserted into the passive wheel.

[0010] Furthermore, a rotating pair is provided on the upper part of the carrier plate, and the rotating pair includes a rotating motor, a driving wheel and a passive wheel; a support plate and a support column are provided on the upper part of the carrier plate; the rotating motor is provided on the upper part of the support plate, and the output shaft of the rotating motor extends out of the lower part of the carrier plate and is connected to the driving wheel; the passive wheel is rotatably provided on the support column, wherein the passive wheel is connected to the driving wheel through a belt drive, and the brush rod is inserted into the passive wheel.

[0011] Furthermore, a key slot is provided through the inner wall of the passive wheel, and a key block is provided on the outer wall of the brush rod, wherein the key block is slidably provided in the key slot.

[0012] Furthermore, the lifting pair also includes a damper, the fixed end of which is arranged on the upper part of the passive wheel; a limit plate is arranged at the lower part of the extrusion plate, a limit groove is arranged on the inner ring of the limit plate, a limit ring is arranged on the outer wall of the brush rod, and the limit ring is rotatably arranged in the limit groove; wherein

[0013] The movable end of the damper holds the lower part of the limiting plate.

[0014] Furthermore, a slide rail is arranged on the upper part of the carrier plate, a slider is arranged at the front end of the extrusion plate, and the slider is slidably arranged on the slide rail.

[0015] Furthermore, a connecting rod is provided at the lower part of the carrier plate.

[0016] Furthermore, the utility model also provides a washing system, comprising: a washing arm device as described in any of the above items, and an industrial computer, the industrial computer being electrically connected to the pressure detection block and the lifting cylinder, wherein when the lifting cylinder drives the extrusion plate to descend, the contact block squeezes the sensing block, and after the pressure detection block transmits the pressure signal to the industrial computer, the industrial computer sends a signal to the lifting cylinder to control the stroke of the piston rod on the lifting cylinder.

[0017] The beneficial effects of the utility model are as follows: by setting a lifting pair, the piston rod of the lifting cylinder pushes one end of the extrusion rod to make the other end of the extrusion rod descend, thereby driving the extrusion plate to descend so that the lower part of the extrusion plate can squeeze the sensing point of the pressure sensing device, and the pressure sensing device can collect the contact pressure between the brush head and the wafer; the lifting cylinder and the pressure detection block are electrically connected to the host computer, the pressure detection block feeds back the pressure to the host computer, and the host computer transmits a signal to the lifting cylinder according to the pressure, and the lifting cylinder adjusts the stroke of the piston rod so that the contact pressure between the brush head and the wafer meets the optimal working state. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a schematic diagram of the structure of the washing arm device of the utility model from a top view;

[0020] Figure 2 This is a schematic diagram of the structure of the washing arm device of the utility model from a front view perspective;

[0021] Figure 3 yes Figure 2 A partial enlarged view of the middle A;

[0022] Figure 4 It is a structural schematic diagram of the brush rod of the utility model;

[0023] Figure 5 It is a cross-sectional view of the brush rod, the passive wheel and the limit plate of the utility model from a front view angle.

[0024] In the figure:

[0025] 100, brush rod, 110, brush head, 120, extrusion plate, 121, contact block, 122, slider, 130, key block, 140, limit plate, 141, limit groove, 150, limit ring, 200, carrier plate, 210, pressure sensing device, 211, pressure detection block, 212, sensing block, 220, support plate, 230, support column, 240, slide rail, 250, connecting rod, 300, rotating pair, 310, rotating motor, 320, driving wheel, 330, driven wheel, 331, keyway, 340, belt, 400, lifting pair, 410, lifting cylinder, 420, support frame, 421, convex part, 430, extrusion rod, 440, damper. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] In some embodiments, Figures 1 to 5 As shown, a brush arm device comprises: a brush rod 100, a brush head 110 is arranged at the lower part of the brush rod 100, and an extrusion plate 120 is arranged at the upper part of the brush rod 100; a carrier plate 200, a lifting pair 400 and a pressure sensing device 210 are arranged at the upper part of the carrier plate 200; the lifting pair 400 comprises a lifting cylinder 410, a support frame 420 and an extrusion rod 430; the extrusion rod 430 is rotatably arranged at the front part of the support frame 420, one end of the extrusion rod 430 is connected to the piston rod of the lifting cylinder 410, and the other end of the extrusion rod 430 abuts against the upper part of the extrusion plate 120, wherein the piston rod of the lifting cylinder 410 pushes one end of the extrusion rod 430 to make the other end of the extrusion rod 430 descend and drive the extrusion plate 120 to descend, the The lower part of the extrusion plate 120 is suitable for squeezing the sensing point of the pressure sensing device 210; by setting the lifting pair 400, the piston rod of the lifting cylinder 410 pushes one end of the extrusion rod 430 to make the other end of the extrusion rod 430 descend, thereby driving the extrusion plate 120 to descend so that the lower part of the extrusion plate 120 can squeeze the sensing point of the pressure sensing device 210, and the pressure sensing device 210 can collect the contact pressure between the brush head 110 and the wafer; through the lifting cylinder 410 and the pressure detection block 211, it is electrically connected to the host computer, and the pressure detection block 211 feeds back the pressure to the host computer, and the host computer transmits a signal to the lifting cylinder 410 according to the pressure, and the lifting cylinder 410 adjusts the stroke of the piston rod so that the contact pressure between the brush head 110 and the wafer meets the optimal working state.

[0028] The pressure sensing device 210 includes a pressure detection block 211, wherein when the extrusion plate 120 descends, the extrusion plate 120 is suitable for squeezing the sensing point of the pressure detection block 211; the extrusion plate 120 descends to drive the brush rod 100 down, thereby driving the brush head 110 down to contact the wafer. At this time, the lower part of the extrusion plate 120 can squeeze the pressure detection block 211, and the pressure detection block 211 can sense the pressure through the sensing point to know the pressure of the brush head 110 in contact with the wafer.

[0029] A sensing block 212 is provided on the upper part of the pressure detection block 211, and the sensing block 212 is a sensing point. A contact block 121 is provided on the lower part of the extrusion plate 120, wherein when the extrusion plate 120 descends, the contact block 121 is suitable for extruding the sensing block 212; the sensing block 212 is the sensing point of the pressure detection block 211, and the axial position of the sensing block 212 corresponds to that of the contact block 121. When the extrusion plate 120 descends, it can drive the contact block 121 to descend and extrudes the sensing block 212, and the sensing block 212 can accurately sense the pressure.

[0030] The support frame 420 is provided with a convex portion 421 on the upper portion, and the extrusion rod 430 is rotatably provided on the convex portion 421; when the brush rod 100 needs to be lowered, the piston rod of the lifting cylinder 410 pushes one end of the extrusion rod 430, and the extrusion rod 430 stably rotates on the convex portion 421 to make the other end of the extrusion rod 430 descend, thereby driving the extrusion plate 120 to descend, and the descent of the extrusion plate 120 drives the brush rod 100 to descend, thereby driving the brush head 110 to descend; conversely, the piston rod of the lifting cylinder 410 contracts and drives one end of the extrusion rod 430 to descend, so that the other end of the extrusion rod 430 rises, thereby driving the extrusion plate 120 to rise, and the rising of the extrusion plate 120 drives the brush rod 100 to rise, thereby driving the brush head 110 to rise.

[0031] A rotating pair 300 is arranged on the upper part of the carrier 200, and the rotating pair 300 includes a rotating motor 310, a driving wheel 320 and a passive wheel 330; a supporting plate 220 and a supporting column 230 are arranged on the upper part of the carrier 200; the rotating motor 310 is arranged on the upper part of the supporting plate 220, and the output shaft of the rotating motor 310 extends out of the lower part of the carrier 200 and is connected with the driving wheel 320; the passive wheel 330 is rotatably arranged on the supporting column 230, wherein the passive wheel 330 is connected to the driving wheel 320 through a belt 340, and the brush rod 100 is plugged into the passive wheel 330; the output shaft of the rotating motor 310 rotates to drive the driving wheel 320 to rotate, and the driving wheel 320 rotates to drive the passive wheel 330 to rotate through the belt 340, and the rotation of the passive wheel 330 drives the brush rod 100 to rotate, thereby driving the brush head 110 to rotate to clean the wafer surface.

[0032] The inner wall of the passive wheel 330 is penetrated by a key groove 331, and the outer wall of the brush rod 100 is provided with a key block 130, wherein the key block 130 is slidably set in the key groove 331; by the key block 130 being slidably set in the key groove 331, the rotation of the passive wheel 330 can drive the brush rod 100 to rotate, and the brush rod 100 can be raised and lowered in the passive wheel 330.

[0033] The lifting pair 400 also includes a damper 440, a fixed end of which is arranged on the upper part of the passive wheel 330; a limiting disk 140 is arranged at the lower part of the extrusion plate 120, and a limiting groove 141 is arranged on the inner ring of the limiting disk 140, and a limiting ring 150 is arranged on the outer wall of the brush rod 100, and the limiting ring 150 is rotatably arranged in the limiting groove 141; wherein the movable end of the damper 440 holds the lower part of the limiting disk 140; by setting the damper 440, the movable end of the damper 440 holds the lower part of the limiting disk 140, providing a supporting force for the limiting disk 140, and the movable end of the damper 440 can push the limiting disk 140 so that the extrusion plate 120 is always in contact with the lower part of the extrusion rod 430, so that the extrusion plate 120 drives the brush rod 100 to rise.

[0034] A slide rail 240 is disposed on the upper portion of the carrier plate 200, and a slider 122 is disposed at the front end of the extrusion plate 120. The slider 122 is slidably disposed on the slide rail 240; the extrusion plate 120 can be lifted and lowered more stably by the slider 122 sliding stably on the slide rail 240.

[0035] A connecting rod 250 is disposed at the lower portion of the carrier plate 200; the connecting rod 250 is suitable for being installed on the support plate 220 of the device to provide stable support for the washing arm of the utility model.

[0036] In some other embodiments, the utility model also provides a washing system, comprising: a washing arm device as described in any of the above items, and an industrial computer, which is electrically connected to the pressure detection block 211 and the lifting cylinder 410, wherein when the lifting cylinder 410 drives the extrusion plate 120 to descend, the contact block 121 squeezes the sensing block 212, and after the pressure detection block 211 transmits the pressure signal to the industrial computer, the industrial computer sends a signal to the lifting cylinder 410 to control the stroke of the piston rod on the lifting cylinder 410.

[0037] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. An arm washing device, characterized in that: include: A brush rod (100), a brush head (110) being arranged at the lower portion thereof, and an extrusion plate (120) being arranged at the upper portion of the brush rod (100); A carrier plate (200) having a lifting pair (400) and a pressure sensing device (210) disposed on its upper portion; The lifting pair (400) comprises a lifting cylinder (410), a support frame (420) and an extrusion rod (430); the extrusion rod (430) is rotatably arranged at the front of the support frame (420), one end of the extrusion rod (430) is connected to the piston rod of the lifting cylinder (410), and the other end of the extrusion rod (430) abuts against the upper part of the extrusion plate (120), wherein When the piston rod of the lifting cylinder (410) pushes one end of the extrusion rod (430) to cause the other end of the extrusion rod (430) to descend and drive the extrusion plate (120) to descend, the lower part of the extrusion plate (120) is suitable for squeezing the sensing point of the pressure sensing device (210).

2. An arm washing device as claimed in claim 1, characterized in that: The pressure sensing device (210) comprises a pressure detection block (211) wherein When the squeezing plate (120) descends, the squeezing plate (120) is suitable for squeezing the sensing point of the pressure detection block (211).

3. An arm washing device as claimed in claim 2, characterized in that: A sensing block (212) is disposed on the upper portion of the pressure detection block (211), the sensing block (212) being a sensing point, and a contact block (121) is disposed on the lower portion of the extrusion plate (120), wherein When the pressing plate (120) descends, the contact block (121) is suitable for pressing the sensing block (212).

4. The arm washing device according to claim 1, characterized in that: A convex portion (421) is provided on the upper portion of the support frame (420), and the extrusion rod (430) is rotatably disposed on the convex portion (421).

5. The arm-washing device according to claim 1, characterized in that: A rotating pair (300) is arranged on the upper part of the carrier plate (200), and the rotating pair (300) comprises a rotating motor (310), a driving wheel (320) and a driven wheel (330); a supporting plate (220) and a supporting column (230) are arranged on the upper part of the carrier plate (200); the rotating motor (310) is arranged on the upper part of the supporting plate (220), and the output shaft of the rotating motor (310) extends out of the lower part of the carrier plate (200) and is connected to the driving wheel (320); the driven wheel (330) is rotatably arranged on the supporting column (230), wherein The passive wheel (330) is connected to the active wheel (320) via a belt (340), and the brush rod (100) is plugged into the passive wheel (330).

6. An arm-washing device as claimed in claim 5, characterized in that: A key groove (331) is provided through the inner wall of the passive wheel (330), and a key block (130) is provided on the outer wall of the brush rod (100). The key block (130) is slidably disposed in the key slot (331).

7. An arm-washing device as claimed in claim 6, characterized in that: The lifting pair (400) further comprises a damper (440), wherein a fixed end of the damper (440) is arranged on the upper part of the driven wheel (330); a limiting disk (140) is arranged on the lower part of the extrusion plate (120), a limiting groove (141) is arranged on the inner ring of the limiting disk (140), and a limiting ring (150) is arranged on the outer wall of the brush rod (100), and the limiting ring (150) is rotatably arranged in the limiting groove (141); wherein The movable end of the damper (440) supports the lower part of the limiting plate (140).

8. The arm-washing device according to claim 2, characterized in that: A slide rail (240) is provided on the upper portion of the carrier plate (200), a slider (122) is provided at the front end of the extrusion plate (120), and the slider (122) is slidably disposed on the slide rail (240).

9. The arm-washing device according to claim 1, characterized in that: A connecting rod (250) is provided at the lower part of the carrier plate (200).

Images