Adsorption filtering device and semiconductor process system

Abstract

The utility model relates to an adsorption filtering device and a semiconductor process system. The adsorption filtering device comprises a gas supply module, a first adsorption module, a second adsorption module, a third adsorption module, an analysis module, a condensation reflux module, a first gas output module and a second gas output module. The device has the advantages that by arranging the first adsorption module, the second adsorption module and the third adsorption module, chemicals in the first adsorption module, the second adsorption module and the third adsorption module react with H2S, CO2 and H2O in mixed gas, so that subsequent operations such as adsorption and filtration can be facilitated, and the mixed gas filtration effect is further improved. And heating modules are respectively arranged on the first adsorption module, the second adsorption module and the third adsorption module, so that medicaments in the first adsorption module, the second adsorption module and the third adsorption module can react with H2S, CO2 and H2O in the mixed gas more sufficiently through heating treatment, and subsequent adsorption filtration is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of adsorption and filtration technology in ultrapure NH3 purification technology, in particular to an adsorption and filtration device and a semiconductor process system. Background Art

[0002] High-purity ammonia is used in the solar industry to provide nitrogen sources for silicon nitride films, as well as to provide clean process gas ammonia for integrated circuit manufacturing, compound semiconductors, liquid crystal displays, and better cleaning of silicon wafers. As a raw material for the electronics industry, the quality of high-purity ammonia is of vital importance and is directly related to the yield of the final product. The quality and cost of raw materials are closely related to the development of the industry.

[0003] In the prior art, a Chinese utility model patent (CN106766672B) discloses a device for purifying ammonia based on expansion refrigeration and a method for purifying ammonia using the device, the device includes a buffer tank, a primary adsorption system, a primary filtration system, a compressor, an expansion refrigeration system, a vaporizer, a deep adsorption system, a deep filtration system, and a distillation tower connected in sequence, and may also include a low-temperature liquid filling pump, a finished product tank, a chiller, a nitrogen purge device, and a heater; the utility model utilizes the expansion refrigeration method to recover ammonia to produce high-purity ammonia. However, each level of the adsorption and filtration system in the utility model has no bypass structure, and in the case of a zero module failure in the system, the overall device will not be able to be used normally; each level of the adsorption and filtration system in the utility model has no safety pressure relief device, and in the case of the pressure value in the pipeline reaching or exceeding the preset pressure value, the pressure in the pipeline cannot be relieved, and there are certain safety hazards; in addition, the device only includes a primary adsorption system, a primary filtration system, a deep adsorption system, and a deep filtration system, and the filtering effect on NH3 is not good, and the purity of the filtered NH3 gas is not high.

[0004] At present, no effective solution has been proposed for the problems existing in the relevant technology, such as the overall equipment being unable to work normally due to malfunctions during use due to the lack of a bypass structure in the filter device, the safety hazards caused by the lack of a safety pressure relief device in the filter device, and the poor filtering effect of the filter device. Utility Model Content

[0005] The purpose of the utility model is to provide an adsorption filtration device and a semiconductor process system in view of the deficiencies in the prior art, so as to solve the problems existing in the related technology such as the filtration device having no bypass structure, the overall equipment being unable to work normally during use due to a malfunction, the filtration device having no safety pressure relief device, the safety hazards, and the poor filtration effect of the filtration device.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] In a first aspect, the utility model provides an adsorption filtration device, comprising:

[0008] A gas supply module, wherein the gas supply module is used to input a mixed gas;

[0009] a first adsorption module, the first adsorption module being in communication with the gas supply module and configured to filter H2S and H2O in the mixed gas to obtain a first filtered gas;

[0010] a second adsorption module, the second adsorption module being in communication with the first adsorption module and configured to filter CO2 and H2O in the first filtered gas to obtain a second filtered gas;

[0011] a third adsorption module, the third adsorption module being in communication with the second adsorption module and configured to filter H2O in the second filtered gas to obtain ultrapure ammonia;

[0012] an analysis module, the analysis module being connected to the first adsorption module, the second adsorption module, and the third adsorption module, respectively, and being used for analyzing the first filtered gas filtered by the first adsorption module, for analyzing the second filtered gas filtered by the second adsorption module, and for analyzing the ultrapure ammonia filtered by the third adsorption module;

[0013] a condensation reflux module, the condensation reflux module being connected to the first adsorption module, the second adsorption module, the third adsorption module and the analysis module respectively, and condensing and refluxing the first filtered gas, the second filtered gas and the ultra-pure ammonia gas to the first adsorption module, the second adsorption module and the third adsorption module when the purity of the first filtered gas, the second filtered gas and the ultra-pure ammonia gas detected by the analysis module does not meet the purity standards;

[0014] a first gas output module, the first gas output module being in communication with the third adsorption module and being used for outputting the mixed gas filtered by the first adsorption module, the second adsorption module and the third adsorption module;

[0015] The second gas output module is connected to the first adsorption module, the second adsorption module and the third adsorption module respectively, and is used for outputting H2S, CO2 and H2O in the mixed gas.

[0016] In some of the embodiments, the gas supply module comprises:

[0017] A first gas supply source is communicated with the first adsorption module and is used for inputting a mixed gas into the first adsorption module.

[0018] In some embodiments, the first adsorption module comprises:

[0019] At least one first buffer tank, the first buffer tank is communicated with the gas supply module and the purge module respectively, and is used to obtain the mixed gas input by the gas supply module;

[0020] At least one first molecular sieve, which is respectively connected to the first buffer tank, the second adsorption module, the analysis module, and the second gas output module, and is provided with the heating module, for filtering H2S and H2O of the mixed gas input from the first buffer tank to obtain a first filtered gas.

[0021] In some embodiments, the first adsorption module further comprises:

[0022] The first bypass member is disposed between two adjacent first molecular sieves and connects the two first molecular sieves.

[0023] In some embodiments, the first adsorption module further comprises:

[0024] a first pressure monitoring component, which is disposed on a pipeline connected to the first adsorption module and is used to monitor the pressure in the pipeline of the first adsorption module;

[0025] The first pressure relief component is arranged on a pipeline connected to the first adsorption module, and is used for relieving pressure when the pressure value monitored by the first pressure monitoring component exceeds a preset threshold value.

[0026] In some embodiments, the second adsorption module comprises:

[0027] at least one second buffer tank, the second buffer tank being in communication with the first adsorption module and the purge module, and being used for obtaining the first filtered gas filtered by the first adsorption module;

[0028] At least one second molecular sieve, which is respectively connected to the second buffer tank, the third adsorption module, the analysis module, and the second gas output module, and is provided with the heating module, for filtering CO2 and H2O of the first filtered gas input from the second buffer tank to obtain a second filtered gas.

[0029] In some embodiments, the second adsorption module further comprises:

[0030] The second bypass member is disposed between two adjacent second molecular sieves and connects the two second molecular sieves.

[0031] In some embodiments, the second adsorption module further comprises:

[0032] a second pressure monitoring component, which is disposed on a pipeline connected to the second adsorption module and is used to monitor the pressure in the pipeline of the second adsorption module;

[0033] The second pressure relief component is arranged on a pipeline connected to the second adsorption module, and is used for relieving pressure when the pressure value monitored by the second pressure monitoring component exceeds a preset threshold value.

[0034] In some embodiments, the third adsorption module comprises:

[0035] at least one third buffer tank, the third buffer tank being in communication with the second adsorption module and the purge module, and being used for obtaining the second filtered gas filtered by the second adsorption module;

[0036] At least one third molecular sieve, the third molecular sieve is respectively connected to the third buffer tank, the first gas output module, the analysis module, and the second gas output module, and is provided with the heating module, for filtering H2O of the second filtered gas input from the third buffer tank to obtain ultra-pure ammonia.

[0037] In some of the embodiments, the third adsorption module further comprises:

[0038] A third bypass member is disposed between two adjacent third molecular sieves and connects the two third molecular sieves.

[0039] In some of the embodiments, the third adsorption module further comprises:

[0040] a third pressure monitoring component, which is disposed on a pipeline connected to the third adsorption module and is used to monitor the pressure in the pipeline of the third adsorption module;

[0041] A third pressure relief component is disposed on a pipeline connected to the third adsorption module, and is used for relieving pressure when the pressure value monitored by the third pressure monitoring component exceeds a preset threshold.

[0042] In some embodiments, the analysis module includes:

[0043] An analysis component, which is connected to the first adsorption module, the second adsorption module, and the third adsorption module, and is used to analyze the first filtered gas filtered by the first adsorption module, to analyze the second filtered gas filtered by the second adsorption module, and to analyze the ultra-pure ammonia filtered by the third adsorption module.

[0044] In some embodiments, the condensation reflux module includes:

[0045] a condensation member, the condensation member being connected to the first adsorption module, the second adsorption module, the third adsorption module and the analysis module respectively, and being used for condensing the first filtered gas, the second filtered gas and the ultra-pure ammonia gas to obtain a reflux gas when the purity of the first filtered gas, the second filtered gas and the ultra-pure ammonia gas detected by the analysis module does not meet the purity standards;

[0046] A reflux member is connected to the condensation member, the first adsorption module, the second adsorption module and the third adsorption module respectively, and is used to transmit the reflux gas to the first adsorption module, the second adsorption module and the third adsorption module.

[0047] In some embodiments, the first gas output module comprises:

[0048] The first gas output component is connected to the third adsorption module and is used for outputting ultrapure ammonia gas.

[0049] In some embodiments, the second gas output module comprises:

[0050] a second gas output member, the second gas output member being in communication with the first adsorption module and configured to output H2S and H2O in the mixed gas;

[0051] A third gas output component is connected to the second adsorption module and the third adsorption module, and is used for outputting CO2 and H2O in the mixed gas.

[0052] In some of the embodiments, it also includes:

[0053] A heating module, the heating module is arranged in the first adsorption module, the second adsorption module, and the third adsorption module, and is used to heat the reagent in the first adsorption module, the second adsorption module, and the third adsorption module during the reaction process with H2S, CO2, and H2O in the mixed gas; and / or

[0054] a purge module, the purge module being connected to the first adsorption module, the second adsorption module, and the third adsorption module, respectively, and being used to purge impurities in the first adsorption module, the second adsorption module, and the third adsorption module; and / or

[0055] A filtering module is disposed between the third adsorption module and the first gas output module, and is respectively connected to the third adsorption module, the first gas output module, the second gas output module, and the purge module, and is used for filtering particles in the ultra-pure ammonia gas.

[0056] In some embodiments, the heating module comprises:

[0057] a first heating element, the first heating element being disposed in the first adsorption module and used for heating during a reaction process between the reagent in the first adsorption module and H2S and H2O in the mixed gas;

[0058] a second heating element, the second heating element being disposed in the second adsorption module and used for heating during the reaction process between the agent in the second adsorption module and CO2 and H2O in the first filtered gas;

[0059] A third heating element is disposed in the third adsorption module and is used for heating during the reaction between the reagent in the third adsorption module and H2O in the second filtered gas.

[0060] In some embodiments, the heating module further comprises:

[0061] a fourth heating element, the fourth heating element being disposed in the first adsorption module and being used for heating the first purge gas when the purge module purges the first adsorption module;

[0062] a fifth heating element, the fifth heating element being disposed in the second adsorption module and being used for heating the first purge gas when the purge module purges the second adsorption module;

[0063] A sixth heating element is provided in the third adsorption module, and is used for heating the first purge gas when the purge module purges the second adsorption module.

[0064] In some embodiments, the purge module includes:

[0065] a second gas supply source, the second gas supply source being in communication with the first adsorption module, the second adsorption module, and the third adsorption module and being located upstream of the second gas output module, and being used for supplying a first purge gas;

[0066] A third gas supply source is communicated with the second adsorption module and the third adsorption module, and is used for supplying a second purge gas.

[0067] In some of the embodiments, it also includes:

[0068] A filtering module is disposed between the third adsorption module and the first gas output module and is in communication with the third adsorption module, the first gas output module, the second gas output module, and the purge module, and is used for filtering particles in the ultrapure ammonia gas.

[0069] In a second aspect, the utility model provides a semiconductor process system, comprising:

[0070] An adsorption filtration device as described in the first aspect.

[0071] The utility model adopts the above technical solution, and compared with the prior art, has the following technical effects:

[0072] 1. By setting the first adsorption module, the second adsorption module and the third adsorption module, the reagents in the first adsorption module, the second adsorption module and the third adsorption module can react with H2S, CO2 and H2O in the mixed gas, so as to facilitate subsequent adsorption filtration and purification operations, and further improve the adsorption filtration effect of the mixed gas.

[0073] 2. By setting up an analysis module and a condensation reflux module, the analysis module can perform gas composition analysis on the first filtered gas obtained by filtering the first adsorption module, the second filtered gas obtained by filtering the second adsorption module, and the ultra-pure ammonia obtained by filtering the third adsorption module. When the components of the first filtered gas, the second filtered gas, and the ultra-pure ammonia meet the standards, the first filtered gas, the second filtered gas, and the ultra-pure ammonia are passed to the first gas output module; when the components of the first filtered gas, the second filtered gas, and the ultra-pure ammonia do not meet the standards, the ultra-pure ammonia is passed to the condensation reflux module, so that the components of the first filtered gas, the second filtered gas, and the ultra-pure ammonia can be timely and accurately understood, and the effect of mixed gas treatment and the purity of the final ultra-pure ammonia can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0074] Figure 1 is a schematic diagram of an adsorption filtration device according to an embodiment of the utility model (I);

[0075] Figure 2 1 is a schematic diagram of a pipeline of an adsorption filtration device according to an embodiment of the utility model (I);

[0076] Figure 3 Schematic diagram of the pipeline of the adsorption filtration device according to the embodiment of the utility model (II);

[0077] Figure 4 Schematic diagram of the pipeline of the adsorption and filtration device according to the embodiment of the utility model (III);

[0078] Figure 5Schematic diagram of the pipeline of the adsorption filtration device according to the embodiment of the utility model (IV);

[0079] Figure 6 is a schematic diagram of an analysis module according to an embodiment of the utility model;

[0080] Figure 7 is a schematic diagram of a condensation reflux module according to an embodiment of the utility model;

[0081] Figure 8 is a schematic diagram of a first gas output module according to an embodiment of the utility model;

[0082] Fig. 9 is a schematic diagram of a second gas output module according to an embodiment of the utility model;

[0083] Fig.10 is a schematic diagram of an adsorption filtration device according to an embodiment of the utility model (II);

[0084] Fig.11 is a schematic diagram of a heating module according to an embodiment of the utility model;

[0085] Fig.12 is a schematic diagram of a purge module according to an embodiment of the utility model (I);

[0086] Fig.13 is a schematic diagram of a purge module according to an embodiment of the utility model (II);

[0087] Fig.14 It is a schematic diagram of a filter module according to an embodiment of the utility model.

[0088] The reference numerals are: 100, a gas supply module; 110, a first gas supply source;

[0089] 200, first adsorption module; 210, first buffer tank; 220, first molecular sieve; 230, first valve component; 240, second valve component; 250, first bypass component; 260, twenty-sixth valve component; 270, first pressure monitoring component; 280, first pressure relief component; 290, twenty-ninth valve component;

[0090] 300, second adsorption module; 310, second buffer tank; 320, second molecular sieve; 330, third valve component; 340, fourth valve component; 350, second bypass component; 360, twenty-seventh valve component; 370, second pressure monitoring component; 380, second pressure relief component; 390, thirtieth valve component;

[0091] 400, third adsorption module; 410, third buffer tank; 420, third molecular sieve; 430, fifth valve; 440, sixth valve; 450, third bypass; 460, twenty-eighth valve; 470, third pressure monitoring; 480, third pressure relief; 490, thirty-first valve;

[0092] 500, analysis module; 510, analysis component; 520, seventh valve component; 530, eighth valve component; 540, ninth valve component;

[0093] 600, condensation reflux module; 610, condensation component; 620, reflux component; 630, tenth valve component; 640, eleventh valve component; 650, twelfth valve component; 660, thirteenth valve component; 670, fourteenth valve component; 680, fifteenth valve component;

[0094] 700, heating module; 710, first heating element; 720, second heating element; 730, third heating element; 740, sixteenth valve element; 750, seventeenth valve element; 760, eighteenth valve element; 770, fourth heating element; 780, fifth heating element; 790, sixth heating element;

[0095] 800, first gas output module; 810, first gas output component; 820, nineteenth valve component;

[0096] 900, second gas output module; 910, second gas output element; 920, third gas output element; 930, twentieth valve element; 940, twenty-first valve element; 950, twenty-second valve element;

[0097] 1000, purge module; 1010, second gas supply source; 1020, twenty-third valve member; 1030, twenty-fourth valve member; 1040, twenty-fifth valve member; 1050, third gas supply source; 1060, thirty-fifth valve member; 1070, thirty-sixth valve member;

[0098] 1100, filter module; 1110, filter element; 1120, thirty-second valve element; 1130, thirty-third valve element; 1140, thirty-fourth valve element. DETAILED DESCRIPTION

[0099] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0100] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0101] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0102] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or modules (modules) is not limited to the listed steps or modules, but may also include steps or modules that are not listed, or may also include other steps or modules inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there may be three relationships, for example, "A and / or B" can mean: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0103] Example 1

[0104] This embodiment relates to an adsorption filtration device in the utility model.

[0105] An illustrative embodiment of the present utility model is as follows: Figure 1 As shown, an adsorption filtration device includes a gas supply module 100, a first adsorption module 200, a second adsorption module 300, a third adsorption module 400, an analysis module 500, a condensation reflux module 600, a first gas output module 800 and a second gas output module 900. The gas supply module 100 is used to input the mixed gas; the first adsorption module 200 is connected to the gas supply module 100, and is used to filter H2S and H2O in the mixed gas to obtain a first filtered gas; the second adsorption module 300 is connected to the first adsorption module 200, and is used to filter CO2 and H2O in the first filtered gas to obtain a second filtered gas; the third adsorption module 400 is connected to the second adsorption module 300, and is used to filter H2O in the second filtered gas to obtain ultra-pure ammonia; the analysis module 500 is respectively connected to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400, and is used to analyze the first filtered gas filtered by the first adsorption module 200, the second filtered gas filtered by the second adsorption module 300, and the ultra-pure ammonia filtered by the third adsorption module 400. ammonia is analyzed; the condensation reflux module 600 is respectively connected to the first adsorption module 200, the second adsorption module 300, the third adsorption module 400 and the analysis module 500. When the purity of the first filtered gas, the second filtered gas and the ultra-pure ammonia detected by the analysis module 500 is not up to standard, the first filtered gas, the second filtered gas and the ultra-pure ammonia are condensed and refluxed to the first adsorption module 200, the second adsorption module 300 and the third adsorption module 400; the first gas output module 800 is connected to the third adsorption module 400, and is used to output the mixed gas filtered by the first adsorption module 200, the second adsorption module 300 and the third adsorption module 400; the second gas output module 900 is respectively connected to the first adsorption module 200, the second adsorption module 300 and the third adsorption module 400, and is used to output H2S, CO2 and H2O in the mixed gas.

[0106] like Figure 2 As shown, the gas supply module 100 includes a first gas supply source 110 . The first gas supply source 110 is in communication with the first adsorption module 200 , and is used to input the mixed gas into the first adsorption module 200 .

[0107] Specifically, the first gas supply source 110 includes a first gas supply source and a first gas outlet, wherein the first gas outlet is disposed at the first gas supply source and communicates with the first adsorption module 200 .

[0108] The first gas outlet is composed of a first gas outlet pipe and a first gas outlet interface. The first gas outlet pipe is connected to the first gas supply source; the first gas outlet interface is arranged at the end of the first gas outlet pipe, and is used to communicate with the first adsorption module 200.

[0109] In some embodiments, the first gas supply source 110 includes but is not limited to a gas cylinder or a gas storage tank.

[0110] like Figure 3 As shown, the first adsorption module 200 includes at least one first buffer tank 210 and at least one first molecular sieve 220. The first buffer tank 210 is respectively connected to the gas supply module 100 and the purge module 1000 to obtain the mixed gas input by the gas supply module 100; the first molecular sieve 220 is respectively connected to the first buffer tank 210, the second adsorption module 300, the analysis module 500, and the second gas output module 900, and is provided with a heating module 700 to filter H2S and H2O of the mixed gas input by the first buffer tank 210 to obtain the first filtered gas.

[0111] Specifically, the first end of the first buffer tank 210 is connected to the first gas supply source 110 through the first gas outlet interface, and the second end of the first buffer tank 210 is connected to the first molecular sieve 220 .

[0112] When there are multiple first buffer tanks 210 , the multiple first buffer tanks 210 are respectively connected to the first gas supply source 110 , that is, the multiple first buffer tanks 210 are arranged in parallel.

[0113] In some of the embodiments, the first buffer tank 210 includes but is not limited to a buffer tank.

[0114] Specifically, the first molecular sieve 220 has a first gas inlet end and a first gas outlet end. The first gas inlet end and the first gas outlet end are arranged on the first molecular sieve 220, and the first gas inlet end is connected to the second end of the first buffer tank 210 through a pipeline, and the first gas outlet end is connected to the second adsorption module 300, the analysis module 500, and the second gas output module 900 through a pipeline.

[0115] In some embodiments, the first molecular sieve 220 includes but is not limited to a gas molecular sieve.

[0116] The number of the first molecular sieves 220 matches the number of the first buffer tanks 210. Generally, the number of the first molecular sieves 220 is equal to the number of the first buffer tanks 210, that is, the first molecular sieves 220 and the first buffer tanks 210 correspond one to one.

[0117] When there are multiple first molecular sieves 220 , the multiple first molecular sieves 220 are respectively connected to the second adsorption module 300 , the analysis module 500 , and the second gas output module 900 , that is, the multiple first molecular sieves 220 are arranged in parallel.

[0118] In some of the embodiments, the number of first buffer tanks 210 and first molecular sieves 220 may be 2, 4, 6, etc., that is, the number of first buffer tanks 210 and first molecular sieves 220 may be set according to the actual adsorption and filtration requirements of the mixed gas, and no excessive restrictions are made here.

[0119] Furthermore, the first adsorption module 200 further includes a first valve 230 and a second valve 240. The first valve 230 is disposed in a pipeline connecting the gas supply module 100 and the first adsorption module 200; the second valve 240 is disposed in a pipeline connecting the first adsorption module 200 and the second adsorption module 300.

[0120] It should be noted that the number of first valve components 230 and second valve components 240 respectively corresponds to the number of first buffer tanks 210 and first molecular sieves 220. It should be understood that the number of first valve components 230 and second valve components 240 respectively corresponds to the number of first buffer tanks 210 and first molecular sieves 220.

[0121] Specifically, the first valve member 230 includes a first manual diaphragm valve, wherein the first manual diaphragm valve is disposed in a pipeline connecting the first buffer tank 210 and the first gas supply source 110 .

[0122] Specifically, the second valve member 240 includes a second manual diaphragm valve and a first one-way valve. The second manual diaphragm valve is disposed in the pipeline connecting the first molecular sieve 220 and the second adsorption module 300; the first one-way valve is disposed in the pipeline connecting the first molecular sieve 220 and the second adsorption module 300 and is located downstream of the second manual diaphragm valve.

[0123] like Figure 4 As shown, the second adsorption module 300 includes at least one second buffer tank 310 and at least one second molecular sieve 320. The second buffer tank 310 is connected with the first adsorption module 200 and the purge module 1000 to obtain the first filtered gas filtered by the first adsorption module 200; the second molecular sieve 320 is respectively connected with the second buffer tank 310, the third adsorption module 400, the analysis module 500, and the second gas output module 900, and is provided with a heating module 700 to filter CO2 and H2O of the first filtered gas input from the second buffer tank 310 to obtain the second filtered gas.

[0124] Specifically, the first end of the second buffer tank 310 is communicated with the first molecular sieve 220 through a pipeline, and the second end of the second buffer tank 310 is communicated with the second molecular sieve 320 .

[0125] When there are multiple second buffer tanks 310 , the multiple second buffer tanks 310 are respectively connected to the first molecular sieve 220 , that is, the multiple second buffer tanks 310 are arranged in parallel.

[0126] In some of the embodiments, the second buffer tank 310 includes but is not limited to a buffer tank.

[0127] Specifically, the second molecular sieve 320 has a second air inlet and a second air outlet, wherein the second air inlet and the second air outlet are arranged on the second molecular sieve 320, and the second air inlet is connected to the second end of the second buffer tank 310 through a pipeline, and the second air outlet is connected to the third adsorption module 400, the analysis module 500, and the second gas output module 900 through a pipeline.

[0128] In some of the embodiments, the second molecular sieve 320 includes but is not limited to a gas molecular sieve.

[0129] The number of the second molecular sieves 320 matches the number of the second buffer tanks 310. Generally, the number of the second molecular sieves 320 is equal to the number of the second buffer tanks 310, that is, the second molecular sieves 320 and the second buffer tanks 310 correspond one to one.

[0130] When there are multiple second molecular sieves 320 , the multiple second molecular sieves 320 are respectively connected to the third adsorption module 400 , the analysis module 500 , and the second gas output module 900 , that is, the multiple second molecular sieves 320 are arranged in parallel.

[0131] In some of the embodiments, the number of second buffer tanks 310 and second molecular sieves 320 may be 4, 6, 8, etc., that is, the number of second buffer tanks 310 and second molecular sieves 320 may be set according to the actual adsorption and filtration requirements of the mixed gas, and no excessive restrictions are made here.

[0132] Furthermore, the second adsorption module 300 further includes a third valve 330 and a fourth valve 340. The third valve 330 is disposed on the pipeline connecting the first adsorption module 200 and the second adsorption module 300; the fourth valve 340 is disposed on the pipeline connecting the second adsorption module 300 and the third adsorption module 400.

[0133] It should be noted that the number of the third valve components 330 and the fourth valve components 340 respectively corresponds to the number of the second buffer tanks 310 and the second molecular sieves 320. It should be understood that the number of the third valve components 330 and the fourth valve components 340 respectively corresponds to the number of the second buffer tanks 310 and the second molecular sieves 320.

[0134] Specifically, the third valve member 330 includes a third manual diaphragm valve, wherein the third manual diaphragm valve is disposed on a pipeline connecting the second buffer tank 310 and the first molecular sieve 220 and is located downstream of the first one-way valve.

[0135] Specifically, the fourth valve member 340 includes a fourth manual diaphragm valve and a second one-way valve. The fourth manual diaphragm valve is disposed on the pipeline connecting the second molecular sieve 320 and the third adsorption module 400; the second one-way valve is disposed on the pipeline connecting the second molecular sieve 320 and the third adsorption module 400 and is located downstream of the fourth manual diaphragm valve.

[0136] like Figure 5 As shown, the third adsorption module 400 includes at least one third buffer tank 410 and at least one third molecular sieve 420. The third buffer tank 410 is connected with the second adsorption module 300 and the purge module 1000, and is used to obtain the second filtered gas filtered by the second adsorption module 300; the third molecular sieve 420 is respectively connected with the third buffer tank 410, the first gas output module 800, the analysis module 500, and the second gas output module 900, and is provided with a heating module 700, and is used to filter the H2O of the second filtered gas input by the third buffer tank 410 to obtain ultra-pure ammonia.

[0137] Specifically, a first end of the third buffer tank 410 is in communication with the second molecular sieve 320 through a pipeline, and a second end of the second buffer tank 310 is in communication with the third molecular sieve 420 .

[0138] When there are multiple third buffer tanks 410 , the multiple third buffer tanks 410 are respectively connected to the second molecular sieve 320 , that is, the multiple third buffer tanks 410 are arranged in parallel.

[0139] In some of the embodiments, the third buffer tank 410 includes but is not limited to a buffer tank.

[0140] Specifically, the third molecular sieve 420 has a third gas inlet end and a third gas outlet end. The third gas inlet end and the third gas outlet end are arranged on the third molecular sieve 420, and the third gas inlet end is connected to the second end of the third buffer tank 410 through a pipeline, and the third gas outlet end is connected to the first gas output module 800, the analysis module 500, and the second gas output module 900 through a pipeline.

[0141] In some of the embodiments, the third molecular sieve 420 includes but is not limited to a gas molecular sieve.

[0142] The number of the third molecular sieves 420 matches the number of the third buffer tanks 410. Generally, the number of the third molecular sieves 420 is equal to the number of the third buffer tanks 410, that is, the third molecular sieves 420 and the third buffer tanks 410 correspond one to one.

[0143] When there are multiple third molecular sieves 420 , the multiple third molecular sieves 420 are respectively connected to the first gas output module 800 , the analysis module 500 , and the second gas output module 900 , that is, the multiple third molecular sieves 420 are arranged in parallel.

[0144] In some of the embodiments, the number of third buffer tanks 410 and third molecular sieves 420 may be 6, 8, 10, etc., that is, the number of third buffer tanks 410 and third molecular sieves 420 may be set according to the actual adsorption and filtration requirements of the mixed gas, and no excessive restrictions are made here.

[0145] Furthermore, the third adsorption module 400 further includes a fifth valve 430 and a sixth valve 440. The fifth valve 430 is disposed on the pipeline connecting the second adsorption module 300 and the third adsorption module 400; the sixth valve 440 is disposed on the pipeline connecting the third adsorption module 400 and the first gas output module 800.

[0146] It should be noted that the number of the fifth valve member 430 and the sixth valve member 440 respectively corresponds to the number of the third buffer tank 410 and the third molecular sieve 420. It should be understood that the number of the fifth valve member 430 and the sixth valve member 440 respectively corresponds to the number of the third buffer tank 410 and the third molecular sieve 420.

[0147] Specifically, the fifth valve member 430 includes a fifth manual diaphragm valve, wherein the fifth manual diaphragm valve is disposed on a pipeline connecting the third buffer tank 410 and the second molecular sieve 320 and is located downstream of the second one-way valve.

[0148] Specifically, the sixth valve component 440 includes a sixth manual diaphragm valve and a third one-way valve. The sixth manual diaphragm valve is disposed on the pipeline connecting the third molecular sieve 420 and the first gas output module 800; the third one-way valve is disposed on the pipeline connecting the third molecular sieve 420 and the first gas output module 800, and is located downstream of the sixth manual diaphragm valve.

[0149] like Figure 6 As shown, the analysis module 500 includes an analysis component 510. The analysis component 510 is respectively connected to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400, and is used to analyze the first filtered gas filtered by the first adsorption module 200, to analyze the second filtered gas filtered by the second adsorption module 300, and to analyze the ultrapure ammonia filtered by the third adsorption module 400.

[0150] Specifically, the analysis element 510 is connected to the first molecular sieve 220, the second molecular sieve 320, and the third molecular sieve 420 through pipelines, and is used to analyze the first filtered gas filtered by the first molecular sieve 220, to analyze the second filtered gas filtered by the second molecular sieve 320, and to analyze the ultra-pure ammonia filtered by the third molecular sieve 420.

[0151] Specifically, the analysis element 510 is composed of the analysis element, the first delivery tube, the second delivery tube, and the third delivery tube. The first end of the first delivery tube is respectively connected to the first adsorption module 200 and the second adsorption module 300, and the second end of the first delivery tube is connected to the analysis element; the first end of the second delivery tube is respectively connected to the second adsorption module 300 and the third adsorption module 400, and the second end of the second delivery tube is connected to the analysis element; the first end of the third delivery tube is respectively connected to the third adsorption module 400 and the first gas delivery module 800, and the second end of the third delivery tube is connected to the analysis element.

[0152] In some of the embodiments, the analysis component includes but is not limited to a gas composition analyzer.

[0153] In some of the embodiments, the first delivery tube includes but is not limited to a stainless steel tube.

[0154] In some of the embodiments, the second delivery tube includes but is not limited to a stainless steel tube.

[0155] In some of the embodiments, the third delivery tube includes but is not limited to a stainless steel tube.

[0156] Furthermore, the analysis module 500 further includes a seventh valve component 520, an eighth valve component 530 and a ninth valve component 540. The seventh valve component 520 is disposed in the first delivery pipe, the eighth valve component 530 is disposed in the second delivery pipe, and the ninth valve component 540 is disposed in the third delivery pipe.

[0157] Specifically, the seventh valve member 520 includes a first solenoid valve and a fourth one-way valve, wherein the first solenoid valve is disposed in the first delivery pipe; and the fourth one-way valve is disposed in the first delivery pipe and is located downstream of the first solenoid valve.

[0158] Specifically, the eighth valve member 530 includes a second solenoid valve and a fifth one-way valve, wherein the second solenoid valve is disposed in the second delivery pipe; and the fifth one-way valve is disposed in the second delivery pipe and is located downstream of the second solenoid valve.

[0159] Specifically, the ninth valve member 540 includes a third solenoid valve and a sixth one-way valve, wherein the third solenoid valve is disposed in the third delivery pipe; and the sixth one-way valve is disposed in the third delivery pipe and is located downstream of the third solenoid valve.

[0160] like Figure 7As shown, the condensation reflux module 600 includes a condensation member 610 and a reflux member 620. The condensation reflux member 620 is respectively connected to the first adsorption module 200, the second adsorption module 300, the third adsorption module 400, and the analysis module 500, and is used to condense the first filtered gas, the second filtered gas, and the ultra-pure ammonia gas to obtain the reflux gas when the purity of the first filtered gas, the second filtered gas, and the ultra-pure ammonia gas detected by the analysis module 500 is not up to standard; the reflux member 620 is respectively connected to the condensation member 610, the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400, and is used to transmit the reflux gas to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400.

[0161] Specifically, the condensation element 610 is respectively connected to the first molecular sieve 220, the second molecular sieve 320, the third molecular sieve 330, and the analysis element 510; the reflux element 620 is respectively connected to the first buffer tank 210, the second buffer tank 310, and the third buffer tank 410, and is used to transmit the reflux gas to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400.

[0162] Specifically, the condensing member 610 has a first return pipe, a second return pipe, and a third return pipe. Among them, the condensation element 610 is connected to the reflux element 620 through a pipeline, and is used to condense the first filtered gas, the second filtered gas, and the ultra-pure ammonia gas that reflux to the condensation element 610, and transport the condensed mixed gas to the reflux element 620; the first end of the first reflux pipe is connected to the first molecular sieve 220, and the second end of the first reflux pipe is connected to the condensation element 610, and is used to condense the first filtered gas to obtain reflux gas when the purity of the first filtered gas detected by the analysis module 500 does not meet the standard; the first end of the second reflux pipe is connected to the second molecular sieve 320, and the second end of the second reflux pipe is connected to the condensation element, and is used to condense the second filtered gas to obtain reflux gas when the purity of the second filtered gas detected by the analysis module 500 does not meet the standard; the first end of the third reflux pipe is connected to the third molecular sieve 420, and the second end of the third reflux pipe is connected to the condensation element 610, and is used to condense the ultra-pure ammonia gas to obtain reflux gas when the purity of the ultra-pure ammonia gas detected by the analysis module 500 does not meet the standard.

[0163] In some of the embodiments, the condensing element 610 includes but is not limited to a condenser.

[0164] In some of the embodiments, the first reflux pipe includes but is not limited to a stainless steel pipe.

[0165] In some of the embodiments, the second reflux pipe includes but is not limited to a stainless steel pipe.

[0166] In some of the embodiments, the third reflux pipe includes but is not limited to a stainless steel pipe.

[0167] It should be noted that the number of the first reflux pipe, the second reflux pipe and the third reflux pipe respectively corresponds to the number of the first molecular sieve 220, the second molecular sieve 320 and the third molecular sieve 420. It should be understood that the number of the first reflux pipe, the second reflux pipe and the third reflux pipe is the same as the number of the first molecular sieve 220, the second molecular sieve 320 and the third molecular sieve 420.

[0168] Furthermore, the condensation reflux module 600 further includes a tenth valve member 630, an eleventh valve member 640 and a twelfth valve member 650. The tenth valve member 630 is disposed in the pipeline communicating between the condensation member 610 and the first adsorption module 200; the eleventh valve member 640 is disposed in the pipeline communicating between the condensation member 610 and the second adsorption module 300; and the twelfth valve member 650 is disposed in the pipeline communicating between the condensation member 610 and the third adsorption module 400.

[0169] Specifically, the tenth valve member 630 includes a fourth solenoid valve and a seventh one-way valve. The fourth solenoid valve is disposed on the pipeline connecting the condensing member and the first molecular sieve 220; the seventh one-way valve is disposed on the pipeline connecting the condensing member and the first molecular sieve 220 and is located downstream of the fourth solenoid valve.

[0170] Specifically, the eleventh valve element 640 includes a fifth solenoid valve and an eighth one-way valve. The fifth solenoid valve is disposed on the pipeline connecting the condensing element and the second molecular sieve 320; the eighth one-way valve is disposed on the pipeline connecting the condensing element and the second molecular sieve 320 and is located downstream of the fifth solenoid valve.

[0171] Specifically, the twelfth valve element 650 includes a sixth solenoid valve and a ninth one-way valve. The sixth solenoid valve is disposed on the pipeline connecting the condensing element and the third molecular sieve 420; the ninth one-way valve is disposed on the pipeline connecting the condensing element and the third molecular sieve 420 and is located downstream of the sixth solenoid valve.

[0172] Specifically, the reflux member 620 is composed of a storage member, a fourth reflux pipe, a fifth reflux pipe, and a sixth reflux pipe. The storage member is connected to the condensation member through a pipeline, and is used to store the mixed gas condensed by the condensation member; the first end of the fourth reflux pipe is connected to the storage member, and the second end of the fourth reflux pipe is connected to the first buffer tank 210, and is used to transfer the reflux gas to the first adsorption module 200; the first end of the fifth reflux pipe is connected to the storage member, and the second end of the fifth reflux pipe is connected to the second buffer tank 310, and is used to transfer the reflux gas to the first adsorption module 200; the first end of the sixth reflux pipe is connected to the storage member, and the second end of the sixth reflux pipe is connected to the third buffer tank 410, and is used to transfer the reflux gas to the third adsorption module 400.

[0173] In some of these embodiments, the storage element includes, but is not limited to, a storage tank.

[0174] In some of the embodiments, the fourth reflux pipe includes but is not limited to a stainless steel pipe.

[0175] In some of the embodiments, the fifth reflux pipe includes but is not limited to a stainless steel pipe.

[0176] In some of the embodiments, the sixth reflux pipe includes but is not limited to a stainless steel pipe.

[0177] It should be noted that the number of the fourth return pipe, the fifth return pipe and the sixth return pipe respectively corresponds to the number of the first buffer tank 210, the second buffer tank 310 and the third buffer tank 410. It should be understood that the number of the fourth return pipe, the fifth return pipe and the sixth return pipe is the same as the number of the first buffer tank 210, the second buffer tank 310 and the third buffer tank 410.

[0178] Furthermore, the condensation reflux module 600 further includes a thirteenth valve member 660, a fourteenth valve member 670 and a fifteenth valve member 680. The thirteenth valve member 660 is disposed on the pipeline communicating between the reflux member 620 and the first adsorption module 200; the fourteenth valve member 670 is disposed on the pipeline communicating between the reflux member 620 and the second adsorption module 300; and the fifteenth valve member 680 is disposed on the pipeline communicating between the reflux member 620 and the third adsorption module 400.

[0179] Specifically, the thirteenth valve member 660 includes a seventh solenoid valve and a tenth one-way valve. The seventh solenoid valve is disposed on the pipeline connecting the reflux member and the first buffer tank 210; the tenth one-way valve is disposed on the pipeline connecting the reflux member and the first buffer tank 210 and is located downstream of the seventh solenoid valve.

[0180] Specifically, the fourteenth valve member 670 includes an eighth solenoid valve and an eleventh one-way valve. The eighth solenoid valve is disposed on the pipeline connecting the reflux member and the second buffer tank 310; the eleventh one-way valve is disposed on the pipeline connecting the reflux member and the second buffer tank 310 and is located downstream of the eighth solenoid valve.

[0181] Specifically, the fourteenth valve member 670 includes a ninth solenoid valve and a twelfth one-way valve. The ninth solenoid valve is disposed on the pipeline connecting the reflux member and the third buffer tank 410; the twelfth one-way valve is disposed on the pipeline connecting the reflux member and the third buffer tank 410 and is located downstream of the ninth solenoid valve.

[0182] like Figure 2 , Figure 3 and Figure 4As shown, the heating module 700 includes a first heating element 710, a second heating element 720 and a third heating element 730. The first heating element 710 is disposed in the first adsorption module 200, and is used to heat the agent in the first adsorption module 200 during the reaction process with H2S and H2O in the mixed gas; the second heating element 720 is disposed in the second adsorption module 300, and is used to heat the agent in the second adsorption module 300 during the reaction process with CO2 and H2O in the first filtered gas; the third heating element 730 is disposed in the third adsorption module 400, and is used to heat the agent in the third adsorption module 400 during the reaction process with H2O in the second filtered gas.

[0183] Specifically, the first heating element 710 is disposed on the first molecular sieve 220 for heating the first molecular sieve 220 ; the second heating element 720 is disposed on the second molecular sieve 320 for heating the second molecular sieve 320 ; the third heating element 730 is disposed on the third molecular sieve 420 for heating the third molecular sieve 420 .

[0184] More specifically, the first heating element 710 is disposed in the first molecular sieve in the first molecular sieve 220 for heating the first molecular sieve; the second heating element 720 is disposed in the second molecular sieve in the second molecular sieve 320 for heating the second molecular sieve; the third heating element 730 is disposed in the third molecular sieve in the third molecular sieve 420 for heating the third molecular sieve 420.

[0185] The number of the first heating elements 710 matches the number of the first molecular sieves 220. Generally, the number of the first heating elements 710 is equal to the number of the first molecular sieves 220.

[0186] In some of the embodiments, the first heating element 710 includes but is not limited to an electromagnetic heater.

[0187] The number of the second heating elements 720 matches the number of the second molecular sieves 320. Generally, the number of the second heating elements 720 is equal to the number of the second molecular sieves 320.

[0188] In some of the embodiments, the second heating element 720 includes but is not limited to an electromagnetic heater.

[0189] The number of the third heating elements 730 matches the number of the third molecular sieves 420. Generally, the number of the third heating elements 730 is equal to the number of the third molecular sieves 420.

[0190] In some of the embodiments, the third heating element 730 includes but is not limited to an electromagnetic heater.

[0191] Furthermore, the heating module 700 further includes a sixteenth valve component 740, a seventeenth valve component 750 and an eighteenth valve component 760. The fifteenth valve component 680 is disposed on the pipeline connecting the raw material tank and the first molecular sieve 220; the seventeenth valve component 750 is disposed on the pipeline connecting the raw material tank and the second molecular sieve 320; and the eighteenth valve component 760 is disposed on the pipeline connecting the raw material tank and the third molecular sieve 420.

[0192] Specifically, the sixteenth valve member 740 includes a seventh manual diaphragm valve and an eighth manual diaphragm valve. The seventh manual diaphragm valve is disposed in a pipeline connecting the raw material tank with the first air inlet end of the first molecular sieve 220; the eighth manual diaphragm valve is disposed in a pipeline connecting the raw material tank with the first air outlet end of the first molecular sieve 220.

[0193] Specifically, the seventeenth valve member 750 includes a ninth manual diaphragm valve and a tenth manual diaphragm valve. The ninth manual diaphragm valve is disposed in a pipeline connecting the raw material tank and the second air inlet end of the second molecular sieve 320; the tenth manual diaphragm valve is disposed in a pipeline connecting the raw material tank and the second air outlet end of the second molecular sieve 320.

[0194] Specifically, the eighteenth valve member 760 includes an eleventh manual diaphragm valve and a twelfth manual diaphragm valve. The eleventh manual diaphragm valve is disposed in a pipeline connecting the raw material tank and the third air inlet end of the third molecular sieve 420; the twelfth manual diaphragm valve is disposed in a pipeline connecting the raw material tank and the third air outlet end of the third molecular sieve 420.

[0195] like Figure 8 As shown, the first gas output module 800 includes a first gas output member 810. The first gas output member 810 is connected to the third adsorption module 400 to output ultrapure ammonia.

[0196] Specifically, the first gas output member 810 is in communication with the third molecular sieve 410 .

[0197] Specifically, the first gas output member 810 is composed of a first exhaust pipeline and a first air inlet connector, wherein the first air inlet connector is disposed at any end of the first exhaust pipeline, and the first air inlet connector connects the first exhaust pipeline with the pipeline of the third molecular sieve 420 .

[0198] In some of the embodiments, the first gas output member 810 includes but is not limited to a stainless steel exhaust pipe.

[0199] Furthermore, the first gas output module 800 further includes a nineteenth valve component 820 , wherein the nineteenth valve component 820 is disposed in a pipeline connecting the first gas output component 810 and the third molecular sieve 420 .

[0200] Specifically, the nineteenth valve member 820 includes a thirteenth manual diaphragm valve and a fourteenth manual diaphragm valve, wherein the thirteenth manual diaphragm valve is disposed in the first exhaust pipeline; the fourteenth manual diaphragm valve is disposed in the first exhaust pipeline and is located downstream of the thirteenth manual diaphragm valve.

[0201] like Fig. 9 As shown, the second gas output module 900 includes a second gas output member 910 and a third gas output member 920. The second gas output member 910 is connected to the first adsorption module 200 and is used to output H2S and H2O in the mixed gas; the third gas output member 920 is connected to the second adsorption module 300 and the third adsorption module 400 and is used to output CO2 and H2O in the mixed gas.

[0202] Specifically, the second gas delivery member 910 is in communication with the first molecular sieve 220 ; and the third gas output member 920 is in communication with the second molecular sieve 320 and the third molecular sieve 420 , respectively.

[0203] Specifically, the second gas output member 910 is composed of a second exhaust pipeline and a second air inlet connector, wherein the second air inlet connector is disposed at any end of the second exhaust pipeline, and the second air inlet connector connects the first end of the second exhaust pipeline with the pipeline of the first molecular sieve 220, and the second end of the second exhaust pipeline is connected with the NH3 wet scrubber.

[0204] In some of the embodiments, the second gas output member 910 includes but is not limited to a stainless steel exhaust pipe.

[0205] Specifically, the third gas output member 920 is composed of a third exhaust pipeline and a third air inlet connector. The third air inlet connector is disposed at any end of the third exhaust pipeline, and the third air inlet connector connects the first end of the third exhaust pipeline with the pipelines of the second molecular sieve 320 and the third molecular sieve 420, and the second end of the third air inlet pipeline is connected with the naturalization tank.

[0206] In some of the embodiments, the third gas output member 920 includes but is not limited to a stainless steel exhaust pipe.

[0207] Furthermore, the second gas output module 900 further includes a twentieth valve component 930 , wherein the twentieth valve component 930 is disposed in the connecting pipeline between the second gas output component 910 and the first molecular sieve 220 .

[0208] Specifically, the twentieth valve member 930 includes a tenth solenoid valve and a thirteenth one-way valve. The tenth solenoid valve is disposed in the second exhaust pipeline and is located downstream of the first molecular sieve 220; the thirteenth one-way valve is disposed in the second exhaust pipeline and is located downstream of the tenth solenoid valve.

[0209] Furthermore, the second gas output module 900 further includes a twenty-first valve 940 and a twenty-second valve 950. The twenty-first valve 940 is disposed in the connecting line between the third gas output 920 and the second molecular sieve 320; the twenty-second valve 950 is disposed in the connecting line between the third gas output 920 and the third molecular sieve 420.

[0210] Specifically, the twenty-first valve member 940 includes an eleventh solenoid valve and a fourteenth one-way valve. The eleventh solenoid valve is disposed in the third exhaust pipeline and is located upstream of the second molecular sieve 320; the fourteenth one-way valve is disposed in the third exhaust pipeline and is located downstream of the eleventh solenoid valve.

[0211] Specifically, the 22nd valve member 950 includes a 12th solenoid valve and a 15th one-way valve. The 12th solenoid valve is disposed on the third exhaust pipeline and is located upstream of the third molecular sieve 420; the 15th one-way valve is disposed on the third exhaust pipeline and is located downstream of the 13th solenoid valve.

[0212] like Fig.10 and Fig.11 As shown, the purge module 1000 includes a second gas supply source 1010 and a third gas supply source 1050. The second gas supply source 1010 is respectively connected to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400, and is located upstream of the second gas output module 900, and is used to supply the first purge gas; the third gas supply source 1050 is connected to the second adsorption module 300 and the third adsorption module 400, and is used to supply the second purge gas.

[0213] It should be noted that the first purge gas is N2; the second purge gas is He.

[0214] Specifically, the second gas supply source 1010 is connected to the first molecular sieve 220 , the second molecular sieve 320 , and the third molecular sieve 420 , respectively, and is located upstream of the second gas output member 910 .

[0215] Specifically, the second gas supply source 1010 includes a second gas supply source and a second gas outlet, wherein the second gas outlet is disposed at the second gas supply source and is connected to the first adsorption module 200 , the second adsorption module 300 , and the third adsorption module 400 , respectively.

[0216] The second gas outlet is composed of a second gas outlet pipe and a second gas outlet interface. The second gas outlet pipe is connected to the second gas supply source; the second gas outlet interface is arranged at the end of the second gas outlet pipe and is connected to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400 respectively.

[0217] In some of the embodiments, the second gas supply source 1010 includes but is not limited to a gas cylinder and a gas storage tank.

[0218] Furthermore, the purge module 1000 includes a twenty-third valve component 1020, a twenty-fourth valve component 1030, and a twenty-fifth valve component 1040. The twenty-third valve component 1020 is disposed in the pipeline connecting the second gas supply source 1010 and the first adsorption module 200; the twenty-fourth valve component 1030 is disposed in the pipeline connecting the second gas supply source 1010 and the second adsorption module 300; and the twenty-fifth valve component 1040 is disposed in the pipeline connecting the second gas supply source 1010 and the third adsorption module 400.

[0219] Specifically, the twenty-third valve member 1020 includes a thirteenth solenoid valve and a sixteenth one-way valve. The thirteenth solenoid valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the first buffer tank 210; the sixteenth one-way valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the first buffer tank 210, and the sixteenth one-way valve is also located downstream of the thirteenth solenoid valve.

[0220] Specifically, the twenty-fourth valve member 1030 includes a fourteenth solenoid valve and a seventeenth one-way valve. The fourteenth solenoid valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the second buffer tank 310; the seventeenth one-way valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the second buffer tank 310, and the seventeenth one-way valve is also located downstream of the fourteenth solenoid valve.

[0221] Specifically, the twenty-fifth valve member 1040 includes a fifteenth solenoid valve and an eighteenth one-way valve. The fifteenth solenoid valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the third buffer tank 410; the eighteenth one-way valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the third buffer tank 410, and the eighteenth one-way valve is also located downstream of the fifteenth solenoid valve.

[0222] Specifically, the third gas supply source 1050 is connected to the second molecular sieve 320 and the third molecular sieve 420 respectively, and is located upstream of the second gas output member 910 .

[0223] More specifically, the third gas supply source 1050 includes a third gas supply source and a third gas outlet, wherein the third gas outlet is disposed at the third gas supply source and is communicated with the second adsorption module 300 and the third adsorption module 400 respectively.

[0224] The third gas outlet is composed of a third gas outlet pipe and a third gas outlet interface. The third gas outlet pipe is connected to a third gas supply source; the third gas outlet interface is arranged at the end of the third gas outlet pipe and is connected to the second adsorption module 300 and the third adsorption module 400 respectively.

[0225] In some of the embodiments, the third gas supply source 1050 includes but is not limited to a gas cylinder and a gas storage tank.

[0226] Furthermore, the purge module 1000 further includes a thirty-fifth valve 1060 and a thirty-sixth valve 1070. The thirty-fifth valve 1060 is disposed in the pipeline connecting the third gas supply source 1050 and the second adsorption module 300; the thirty-sixth valve 1070 is disposed in the pipeline connecting the third gas supply source 1050 and the third adsorption module 400.

[0227] Specifically, the thirty-fifth valve member 1060 includes a sixteenth solenoid valve, wherein the sixteenth solenoid valve is disposed in the third gas outlet pipe and is located between the third gas supply source 1050 and the third buffer tank 410 .

[0228] Specifically, the thirty-sixth valve component 1070 includes a seventeenth solenoid valve. The seventeenth solenoid valve is disposed on the third gas outlet pipe and is located between the third gas supply source 1050 and the third buffer tank 410 .

[0229] like Fig.12 As shown, the filter module 1100 includes a filter element 1110. The filter element 110 is disposed between the third adsorption module 400 and the first gas output module 800, and is respectively connected to the third adsorption module 400, the first gas output module 800, the second gas output module 900, and the purge module 1000, for filtering particles in the ultrapure ammonia gas.

[0230] Specifically, the filter element 1110 is disposed between the third molecular sieve 420 and the first gas output element 810 , and is connected to the third molecular sieve 420 , the first gas output element 810 , the second gas output element 910 , and the second gas supply source 1010 , respectively.

[0231] In some of these embodiments, filter element 1110 includes, but is not limited to, a particle filter.

[0232] Furthermore, the filter module 1100 further includes a thirty-second valve component 1120, a thirty-third valve component 1130, and a thirty-fourth valve component 1140. The thirty-second valve component 1120 is disposed in the pipeline connecting the filter component 1110 with the third adsorption module 400 and the first gas output module 800; the thirty-third valve component 1130 is disposed in the pipeline connecting the filter component 1110 with the second gas output module 900; and the thirty-fourth valve component 1140 is disposed in the pipeline connecting the filter component 1110 with the purge module 1000.

[0233] Specifically, the thirty-second valve component 1120 is arranged in the pipeline connecting the filter element 1110 with the third molecular sieve and the first gas output element 810; the thirty-third valve component 1130 is arranged in the pipeline connecting the filter element 1110 with the second gas output element 910; the thirty-fourth valve component 1140 is arranged in the pipeline connecting the filter element 1110 with the second gas supply source 1010.

[0234] More specifically, the thirty-second valve element 1120 includes a twenty-first manual diaphragm valve and a twenty-second manual diaphragm valve. The twenty-first manual diaphragm valve is disposed in the pipeline connecting the filter element 1110 and the third molecular sieve 420; the twenty-second manual diaphragm valve is disposed in the pipeline connecting the filter element 1110 and the first gas output element 810.

[0235] More specifically, the thirty-third valve member 1130 includes a twenty-second one-way valve and a sixteenth solenoid valve. The twenty-second one-way valve is disposed in the pipeline connecting the filter member 1110 and the second gas output member 910; the sixteenth solenoid valve is disposed in the pipeline connecting the filter member 1110 and the second gas output member 910 and is located upstream of the twenty-second one-way valve.

[0236] More specifically, the thirty-fourth valve member 1140 includes a twenty-third one-way valve and a seventeenth solenoid valve. The twenty-third one-way valve is disposed in the pipeline connecting the filter member 1110 and the second gas supply source 1010; the seventeenth solenoid valve is disposed in the pipeline connecting the filter member 1110 and the second gas supply source 1010 and is located upstream of the twenty-third one-way valve.

[0237] The method of using this embodiment is as follows:

[0238] (I) (Exhaust steps):

[0239] The second gas output component 910 is started, and the twentieth valve component 930, the twenty-first valve component 940, and the twenty-second valve component 950 are opened to provide negative pressure to the pipelines connected to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400 to remove the internal gas of the pipelines.

[0240] (II) Clean the pipeline before reaction

[0241] The second gas supply source 1010, the 23rd valve component 1020, and the 20th valve component 930 are opened, and the gas in the pipeline of the first adsorption module 200 is purged; when the cleanliness of the pipeline of the first adsorption module 200 meets the standard, the 23rd valve component 1020 and the 20th valve component 930 are closed;

[0242] The second gas supply source 1010, the twenty-fourth valve component 1030, and the twenty-first valve component 940 are opened, and the gas in the pipeline of the second adsorption module 300 is purged; when the cleanliness of the pipeline of the second adsorption module 300 meets the standard, the twenty-fourth valve component 1030 and the twenty-first valve component 940 are closed;

[0243] The second gas supply source 1010, the twenty-fifth valve 1040, and the twenty-second valve 950 are opened, and the gas in the pipeline of the third adsorption module 400 is purged; when the cleanliness of the pipeline of the third adsorption module 400 meets the standard, the twenty-fifth valve 1040 and the twenty-first valve are closed;

[0244] The third gas supply source 1050 , the thirty-fifth valve component 1060 , and the thirty-sixth valve component 1070 are opened to purge the first purge gas into the second adsorption module 300 and the third adsorption module 400 , thereby replacing the first purge gas in the second adsorption module 300 and the third adsorption module 400 with the second purge gas.

[0245] (III) Primary adsorption filtration of mixed gas

[0246] Open the first valve 230 to allow the mixed gas to enter the first buffer tank 210, and allow the first molecular sieve 220 to filter H2S and H2O in the mixed gas input from the first buffer tank 210 to obtain a first filtered gas;

[0247] Subsequently, the first valve member 230 is closed and the second valve member 240 is opened, so that the first filtered gas can flow to the analysis module 500 .

[0248] (IV) Gas composition analysis of the first filtered gas

[0249] Open the seventh valve component 520 to allow the first filtered gas to enter the analysis component 510 and detect the components in the first filtered gas. If the components in the first filtered gas meet the standards, the first filtered gas will be directed to the second adsorption module 300; if the components in the first filtered gas do not meet the standards, the first filtered gas will be directed to the condensation reflux module 600.

[0250] (V) Performing secondary adsorption filtration on the first filtered gas

[0251] Open the third valve 330 to allow the first filtered gas to enter the second buffer tank 310, and allow the second molecular sieve 320 to filter CO2 and H2O in the first filtered gas input from the second buffer tank 310 to obtain the second filtered gas;

[0252] Subsequently, the third valve member 330 is closed and the fourth valve member 340 is opened, so that the second filtered gas can flow to the analysis module 500 .

[0253] (VI) Gas composition analysis of the second filtered gas

[0254] The eighth valve component 530 is opened to allow the second filtered gas to enter the analysis component 510 and detect the components in the second filtered gas. If the components in the second filtered gas meet the standards, the second filtered gas is directed to the third adsorption module 400; if the components in the second filtered gas do not meet the standards, the second filtered gas is directed to the condensation reflux module 600.

[0255] (VII) Performing secondary adsorption filtration on the second filtered gas

[0256] Open the fifth valve 430 to allow the second filtered gas to enter the third buffer tank 410, and allow the third molecular sieve 420 to filter H2O in the second filtered gas input from the third buffer tank 410 to obtain ultrapure ammonia;

[0257] Subsequently, the fifth valve 430 is closed and the sixth valve 440 is opened, so that the ultrapure ammonia gas can flow to the analysis module 500 .

[0258] (VIII) Gas composition analysis of ultra-pure ammonia

[0259] The ninth valve component 540 is opened to allow the ultra-pure ammonia to enter the analysis component 510 and detect the components in the ultra-pure ammonia. If the components in the ultra-pure ammonia meet the standards, the ultra-pure ammonia is passed to the first gas output module 800; if the components in the ultra-pure ammonia do not meet the standards, the ultra-pure ammonia is passed to the condensation reflux module 600.

[0260] (IX) Filtering ultra-pure ammonia

[0261] The thirty-second valve element 1120 is opened to allow the ultra-pure ammonia gas to enter the filter element 1110 , so that the filter element 1110 filters particles of the input ultra-pure ammonia gas.

[0262] (10) Condensing and refluxing the first filtered gas

[0263] Open the tenth valve member 630 to allow the first filtered gas to flow back into the condensation member through the first reflux pipe, thereby condensing the first filtered gas and delivering the condensed first filtered gas to the reflux member 620;

[0264] Then, the thirteenth valve member 660 is opened to deliver the condensed first filtered gas to the first adsorption module 200, and the above steps three to eight are repeated.

[0265] (XI) Condensing and refluxing the second filtered gas

[0266] Open the eleventh valve member 640 to allow the second filtered gas to flow back into the condensation member through the second reflux pipe, thereby condensing the second filtered gas and delivering the condensed second filtered gas to the reflux member 620;

[0267] Then, the fourteenth valve member 670 is opened to deliver the condensed second filtered gas to the second adsorption module 300, and the above steps 5 to 8 are repeated.

[0268] (XII) Condensation and reflux of ultra-pure ammonia

[0269] Open the twelfth valve element 650 to allow the ultra-pure ammonia gas to flow back into the condensation element through the third reflux pipe, thereby condensing the ultra-pure ammonia gas, and then delivering the condensed ultra-pure ammonia gas to the reflux element 620;

[0270] Then, the fifteenth valve 680 is opened to deliver the condensed ultra-pure ammonia gas to the third adsorption module 400, and the above steps are repeated to step eight.

[0271] The advantage of this embodiment is that by arranging the first buffer tank 210, the second buffer tank 310, and the third buffer tank 410 upstream of the first molecular sieve 220, the second molecular sieve 320, and the third molecular sieve 420, respectively, the mixed gas, the first filtered gas, and the second filtered gas entering the first molecular sieve 220, the second molecular sieve 320, and the third molecular sieve 420 are buffered, so that after the gas in the first molecular sieve 220, the second molecular sieve 320, and the third molecular sieve 420 is processed, the subsequent gas enters the first molecular sieve 220, the second molecular sieve 320, and the third molecular sieve 420, which can effectively improve the effect of adsorption filtration and improve the purity of ultra-pure ammonia. In addition, the reagents in the first molecular sieve 220, the second molecular sieve 320, and the third molecular sieve 420 can react with H2S, CO2, and H2O in the mixed gas, so as to facilitate subsequent adsorption filtration and purification operations, and further improve the effect of adsorption filtration on the mixed gas. In addition, by setting up the analysis module 500 and the condensation reflux module 600, the analysis module 500 can perform gas composition analysis on the first filtered gas obtained by filtering the first molecular sieve 220, the second filtered gas obtained by filtering the second molecular sieve 320, and the ultra-pure ammonia obtained by filtering the third molecular sieve 420. When the components of the first filtered gas, the second filtered gas, and the ultra-pure ammonia meet the standards, the first filtered gas, the second filtered gas, and the ultra-pure ammonia are passed to the first gas output module 800; when the components of the first filtered gas, the second filtered gas, and the ultra-pure ammonia do not meet the standards, the ultra-pure ammonia is passed to the condensation reflux module 600, so that the components of the first filtered gas, the second filtered gas, and the ultra-pure ammonia can be timely and accurately understood, and the effect of the mixed gas treatment and the purity of the ultra-pure ammonia are improved.

[0272] Example 2

[0273] This embodiment is a variation of the embodiment 1. The difference between this embodiment and the embodiment 1 is that the structures of the first adsorption module 200, the second adsorption module 300 and the third adsorption module 400 are different.

[0274] like Figure 2 As shown, the first adsorption module 200 further includes a first bypass member 250. The first bypass member 250 is disposed between two adjacent first molecular sieves 220 and connects the two first molecular sieves 220.

[0275] Specifically, the first end of the first bypass member 250 is connected to the first outlet end of the first molecular sieve 220 located upstream of the two adjacent first molecular sieves 220 , and the second end of the first bypass member 250 is connected to the first inlet end of the first molecular sieve 220 located downstream of the two adjacent first molecular sieves 220 .

[0276] The number of the first bypass members 250 matches the number of the first molecular sieves 220. Generally, the number of the first bypass members 250 is the same as the number of the first molecular sieves 220.

[0277] In some of the embodiments, the first bypass member 250 includes but is not limited to a bypass pipe.

[0278] Furthermore, the first adsorption module 200 further includes a twenty-sixth valve component 260 , wherein the twenty-sixth valve component 260 is disposed in the first bypass component 250 .

[0279] Specifically, the twenty-sixth valve component 260 includes a fifteenth manual diaphragm valve, wherein the fifteenth manual diaphragm valve is disposed in the first bypass component 250 and is located between two adjacent first molecular sieves 220 .

[0280] like Figure 3 As shown, the second adsorption module 300 further includes a second bypass member 350. The second bypass member 350 is disposed between two adjacent second molecular sieves 320 and connects the two second molecular sieves 320.

[0281] Specifically, the first end of the second bypass member 350 is connected to the second outlet end of the second molecular sieve 320 located upstream of the two adjacent second molecular sieves 320 , and the second end of the second bypass member 350 is connected to the second inlet end of the second molecular sieve 320 located downstream of the two adjacent first molecular sieves 220 .

[0282] The number of the second bypass members 350 matches the number of the second molecular sieves 320. Generally, the number of the second bypass members 350 is the same as the number of the second molecular sieves 320.

[0283] In some of the embodiments, the second bypass member 350 includes but is not limited to a bypass pipe.

[0284] Furthermore, the second adsorption module 300 further includes a twenty-seventh valve component 360 , wherein the twenty-seventh valve component 360 is disposed in the second bypass component 350 .

[0285] Specifically, the twenty-seventh valve component 360 includes a sixteenth manual diaphragm valve, wherein the sixteenth manual diaphragm valve is disposed in the second bypass component 350 and located between two adjacent second molecular sieves 320 .

[0286] like Figure 4 As shown, the third adsorption module 400 further includes a third bypass member 450. The third bypass member 450 is disposed between two adjacent third molecular sieves 420 and connects the two third molecular sieves 420.

[0287] Specifically, the first end of the third bypass member 450 is connected to the third gas outlet end of the third molecular sieve 420 located upstream of the two adjacent third molecular sieves 420 , and the second end of the third bypass member 450 is connected to the third gas inlet end of the third molecular sieve 420 located downstream of the two adjacent third molecular sieves 420 .

[0288] The number of the third bypass members 450 matches the number of the third molecular sieves 420. Generally, the number of the third bypass members 450 is the same as the number of the third molecular sieves 420.

[0289] In some of the embodiments, the third bypass member 450 includes but is not limited to a bypass pipe.

[0290] Furthermore, the third adsorption module 400 further includes a twenty-eighth valve component 460 , wherein the twenty-eighth valve component 460 is disposed in the third bypass component 450 .

[0291] Specifically, the twenty-eighth valve member 460 includes a seventeenth manual diaphragm valve, wherein the seventeenth manual diaphragm valve is disposed in the third bypass member 450 and located between two adjacent third molecular sieves 420 .

[0292] The method of using this embodiment is as follows:

[0293] (I) First bypass

[0294] When any one of the two adjacent first molecular sieves 220 is damaged, the twenty-sixth valve member 260 can be opened so that the mixed gas can pass through the first bypass member 250 to the undamaged first molecular sieve 220, thereby ensuring the normal operation of the entire adsorption and filtration device and improving the working efficiency;

[0295] (II) Second bypass

[0296] When any of the two adjacent second molecular sieves 320 is damaged, the twenty-seventh valve member 360 can be opened to allow the mixed gas to pass through the second bypass member 350 to the undamaged second molecular sieve 320, thereby ensuring the normal operation of the entire adsorption and filtration device and improving the working efficiency;

[0297] (III) Third Bypass

[0298] When any one of the two adjacent third molecular sieves 420 is damaged, the twenty-eighth valve member 460 can be opened to allow the mixed gas to pass through the third bypass member 450 to the undamaged third molecular sieve 420, thereby ensuring the normal operation of the entire adsorption and filtration device and improving work efficiency.

[0299] The advantage of this embodiment is that by providing the first bypass member 250, the second bypass member 350, and the third bypass member 450, when any one of the two adjacent first molecular sieves 220, any one of the two adjacent second molecular sieves 320, or any one of the two adjacent third molecular sieves 420 is damaged, the normal operation of the entire adsorption filtration device can be ensured, thereby improving the working efficiency.

[0300] Example 3

[0301] This embodiment is a variation of Embodiments 1 to 2. The difference between this embodiment and Embodiments 1 to 2 is that the structures of the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400 are different.

[0302] like Figure 2 As shown, the first adsorption module 200 further includes a first pressure monitoring component 270 and a first pressure relief component 280. The first pressure monitoring component 270 is disposed in a pipeline connected to the first adsorption module 200 for monitoring pressure; the first pressure relief component 280 is disposed in a pipeline connected to the first adsorption module 200 for relieving pressure when the pressure value monitored by the first pressure monitoring component 270 exceeds a preset threshold.

[0303] It should be noted that in this embodiment, the preset threshold is 1.5 MPa. In some embodiments, the preset threshold may also be 1 MPa or 2 MPa, that is, the preset threshold may be set according to actual operating conditions, and no excessive restrictions are made here.

[0304] Specifically, the first pressure monitoring component 270 is disposed in a pipeline connecting the first molecular sieve 220 and the second adsorption module 300 and is located downstream of the first one-way valve.

[0305] In some of the embodiments, the first pressure monitoring component 270 includes but is not limited to a pipeline pressure sensor.

[0306] Specifically, the first pressure relief member 280 is disposed in the pipeline connecting the first molecular sieve 220 and the second gas output module 900 and is located downstream of the first one-way valve.

[0307] In some embodiments, the first pressure relief member 280 includes but is not limited to a pressure relief valve.

[0308] Furthermore, the first adsorption module 200 further includes a twenty-ninth valve component 290. The twenty-ninth valve component 290 is disposed on the pipeline connecting the first adsorption module 200 and the second gas output module 900, and is located downstream of the first one-way valve.

[0309] Specifically, the twenty-ninth valve component 290 includes an eighteenth manual diaphragm valve and a nineteenth one-way valve. The eighteenth manual diaphragm valve is disposed in the pipeline between the first molecular sieve 220 and the second gas output component 910, and is located upstream of the first pressure relief component 280; the nineteenth one-way valve is disposed in the pipeline between the first molecular sieve 220 and the second gas output component 910, and is located downstream of the first pressure relief component 280.

[0310] like Figure 3 As shown, the second adsorption module 300 further includes a second pressure monitoring component 370 and a second pressure relief component 380. The second pressure monitoring component 370 is disposed in a pipeline connected to the second adsorption module 300 for monitoring pressure; the second pressure relief component 380 is disposed in a pipeline connected to the second adsorption module 300 for relieving pressure when the pressure value monitored by the second pressure monitoring component 370 exceeds a preset threshold.

[0311] It should be noted that in this embodiment, the preset threshold is 1.5 MPa. In some embodiments, the preset threshold may also be 1 MPa or 2 MPa, that is, the preset threshold may be set according to actual operating conditions, and no excessive restrictions are made here.

[0312] Specifically, the second pressure monitoring component 370 is disposed in a pipeline connecting the second molecular sieve 320 and the third adsorption module 400 and is located downstream of the second one-way valve.

[0313] In some of the embodiments, the second pressure monitoring component 370 includes but is not limited to a pipeline pressure sensor.

[0314] Specifically, the second pressure relief member 380 is disposed in the pipeline connecting the second molecular sieve 320 and the second gas output module 900 and is located downstream of the second one-way valve.

[0315] In some embodiments, the second pressure relief member 380 includes but is not limited to a pressure relief valve.

[0316] Furthermore, the first adsorption module 200 further includes a thirtieth valve component 390. The thirtieth valve component 390 is disposed in the pipeline connecting the second adsorption module 300 and the second gas output module 900, and is located downstream of the second one-way valve.

[0317] Specifically, the 30th valve component 390 includes a 19th manual diaphragm valve and a 20th one-way valve. The 19th manual diaphragm valve is disposed on the pipeline between the second molecular sieve 320 and the second gas output component 910, and is located upstream of the second pressure relief component 380; the 20th one-way valve is disposed on the pipeline between the second molecular sieve 320 and the second gas output component 910, and is located downstream of the second pressure relief component 380.

[0318] like Figure 4 As shown, the third adsorption module 400 further includes a third pressure monitoring component 470 and a third pressure relief component 480. The third pressure monitoring component 470 is disposed in a pipeline connected to the third adsorption module 400 for monitoring pressure; the third pressure relief component 480 is disposed in a pipeline connected to the third adsorption module 400 for relieving pressure when the pressure value monitored by the third pressure monitoring component 470 exceeds a preset threshold.

[0319] It should be noted that in this embodiment, the preset threshold is 1.5 MPa. In some embodiments, the preset threshold may also be 1 MPa or 2 MPa, that is, the preset threshold may be set according to actual operating conditions, and no excessive restrictions are made here.

[0320] Specifically, the third pressure monitoring component 470 is disposed in a pipeline connecting the third molecular sieve 420 and the first gas output module 800 and is located downstream of the third one-way valve.

[0321] In some of the embodiments, the third pressure monitoring component 470 includes but is not limited to a pipeline pressure sensor.

[0322] Specifically, the third pressure relief member 480 is disposed in the pipeline connecting the third molecular sieve 420 and the second gas output module 900 and is located downstream of the third one-way valve.

[0323] In some embodiments, the third pressure relief member 480 includes but is not limited to a pressure relief valve.

[0324] Furthermore, the first adsorption module 200 further includes a thirty-first valve component 490. The thirty-first valve component 490 is disposed in the pipeline connecting the third adsorption module 400 and the second gas output module 900, and is located downstream of the third one-way valve.

[0325] Specifically, the thirty-ninth valve component includes a twentieth manual diaphragm valve and a twenty-first one-way valve. The twentieth manual diaphragm valve is disposed in the pipeline between the third molecular sieve 420 and the second gas output component 910, and is located upstream of the third pressure relief component 480; the twenty-first one-way valve is disposed in the pipeline between the third molecular sieve 420 and the second gas output component 910, and is located downstream of the third pressure relief component 480.

[0326] The method of using this embodiment is as follows:

[0327] (I) Relieve pressure on the pipeline of the first adsorption module 200

[0328] Observe the pressure value of the pipeline in the first adsorption module 200 monitored by the first pressure monitoring component 270, and when the pressure value reaches a preset threshold, open the first pressure relief component 280 to relieve the pressure in the pipeline in the first adsorption module 200;

[0329] Then, after the pressure relief operation is completed, the first pressure relief member 280 is closed.

[0330] (II) Depressurizing the pipeline of the second adsorption module 300

[0331] Observe the pressure value of the pipeline in the second adsorption module 300 monitored by the second pressure monitoring component 370, and when the pressure value reaches a preset threshold, open the second pressure relief component 380 to relieve the pressure in the pipeline in the second adsorption module 300;

[0332] Then, after the pressure relief operation is completed, the second pressure relief member 380 is closed.

[0333] (III) Depressurizing the pipeline of the third adsorption module 400

[0334] Observe the pressure value of the pipeline in the third adsorption module 400 monitored by the third pressure monitoring component 470, and when the pressure value reaches a preset threshold, open the third pressure relief component 480 to relieve the pressure in the pipeline in the third adsorption module 400;

[0335] Then, after the pressure relief operation is completed, the third pressure relief member 480 is closed.

[0336] The advantage of this embodiment is that by arranging the first pressure monitoring component 270, the first pressure relief component 280, the second pressure monitoring component 370, the second pressure relief component 380, the third pressure monitoring component 470, and the third pressure relief component 480, the pressure in the pipelines of the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400 can be monitored by the first pressure monitoring component 270, the second pressure monitoring component 370, and the third pressure monitoring component 470, and when the pressure in the pipelines of the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400 is too high, the first pressure relief component 280, the second pressure relief component 380, and the third pressure relief component 480 can be opened to relieve the pressure in the pipelines, thereby improving the safety of the operation of the overall adsorption filtration device.

[0337] Example 4

[0338] This embodiment is a variation of Embodiments 1 to 3.

[0339] like Figure 2 , Figure 3 , Figure 4 and Fig.10As shown, an adsorption and filtration device further includes a heating module 700, a purge module 1000 and a filter module 1100. The heating module 700 is arranged in the first adsorption module 200, the second adsorption module 300 and the third adsorption module 400, and is used to heat the reagent in the first adsorption module 200, the second adsorption module 300 and the third adsorption module 400 during the reaction with H2S, CO2 and H2O in the mixed gas; the purge module 1000 is respectively connected to the first adsorption module 200, the second adsorption module 300 and the third adsorption module 400, and is used to purge impurities in the first adsorption module 200, the second adsorption module 300 and the third adsorption module 400; the filter module 1100 is arranged between the third adsorption module 400 and the first gas output module 800, and is respectively connected to the third adsorption module 400, the first gas output module 800, the second gas output module 900 and the purge module 1000, and is used to filter particles in the ultra-pure ammonia gas.

[0340] like Figure 2 , Figure 3 , Figure 4 and Fig.11 As shown, the heating module 700 includes a first heating element 710, a second heating element 720 and a third heating element 730. The first heating element 710 is disposed in the first adsorption module 200, and is used to heat the agent in the first adsorption module 200 during the reaction process with H2S and H2O in the mixed gas; the second heating element 720 is disposed in the second adsorption module 300, and is used to heat the agent in the second adsorption module 300 during the reaction process with CO2 and H2O in the first filtered gas; the third heating element 730 is disposed in the third adsorption module 400, and is used to heat the agent in the third adsorption module 400 during the reaction process with H2O in the second filtered gas.

[0341] Specifically, the first heating element 710 is disposed on the first molecular sieve 220 for heating the first molecular sieve 220 ; the second heating element 720 is disposed on the second molecular sieve 320 for heating the second molecular sieve 320 ; the third heating element 730 is disposed on the third molecular sieve 420 for heating the third molecular sieve 420 .

[0342] More specifically, the first heating element 710 is disposed in the first molecular sieve in the first molecular sieve 220 for heating the first molecular sieve; the second heating element 720 is disposed in the second molecular sieve in the second molecular sieve 320 for heating the second molecular sieve; the third heating element 730 is disposed in the third molecular sieve in the third molecular sieve 420 for heating the third molecular sieve 420.

[0343] The number of the first heating elements 710 matches the number of the first molecular sieves 220. Generally, the number of the first heating elements 710 is equal to the number of the first molecular sieves 220.

[0344] In some of the embodiments, the first heating element 710 includes but is not limited to an electromagnetic heater.

[0345] The number of the second heating elements 720 matches the number of the second molecular sieves 320. Generally, the number of the second heating elements 720 is equal to the number of the second molecular sieves 320.

[0346] In some of the embodiments, the second heating element 720 includes but is not limited to an electromagnetic heater.

[0347] The number of the third heating elements 730 matches the number of the third molecular sieves 420. Generally, the number of the third heating elements 730 is equal to the number of the third molecular sieves 420.

[0348] In some of the embodiments, the third heating element 730 includes but is not limited to an electromagnetic heater.

[0349] Furthermore, the heating module 700 further includes a sixteenth valve component 740, a seventeenth valve component 750 and an eighteenth valve component 760. The fifteenth valve component 680 is disposed on the pipeline connecting the raw material tank and the first molecular sieve 220; the seventeenth valve component 750 is disposed on the pipeline connecting the raw material tank and the second molecular sieve 320; and the eighteenth valve component 760 is disposed on the pipeline connecting the raw material tank and the third molecular sieve 420.

[0350] Specifically, the sixteenth valve member 740 includes a seventh manual diaphragm valve and an eighth manual diaphragm valve. The seventh manual diaphragm valve is disposed in a pipeline connecting the raw material tank with the first air inlet end of the first molecular sieve 220; the eighth manual diaphragm valve is disposed in a pipeline connecting the raw material tank with the first air outlet end of the first molecular sieve 220.

[0351] Specifically, the seventeenth valve member 750 includes a ninth manual diaphragm valve and a tenth manual diaphragm valve. The ninth manual diaphragm valve is disposed in a pipeline connecting the raw material tank and the second air inlet end of the second molecular sieve 320; the tenth manual diaphragm valve is disposed in a pipeline connecting the raw material tank and the second air outlet end of the second molecular sieve 320.

[0352] Specifically, the eighteenth valve member 760 includes an eleventh manual diaphragm valve and a twelfth manual diaphragm valve. The eleventh manual diaphragm valve is disposed in a pipeline connecting the raw material tank and the third air inlet end of the third molecular sieve 420; the twelfth manual diaphragm valve is disposed in a pipeline connecting the raw material tank and the third air outlet end of the third molecular sieve 420.

[0353] like Fig.10 , Fig.12 and Fig.13 As shown, the purge module 1000 includes a second gas supply source 1010 and a third gas supply source 1050. The second gas supply source 1010 is respectively connected to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400, and is located upstream of the second gas output module 900, and is used to supply the first purge gas; the third gas supply source 1050 is connected to the second adsorption module 300 and the third adsorption module 400, and is used to supply the second purge gas.

[0354] It should be noted that the first purge gas is N2; the second purge gas is He.

[0355] Specifically, the second gas supply source 1010 is connected to the first molecular sieve 220 , the second molecular sieve 320 , and the third molecular sieve 420 , respectively, and is located upstream of the second gas output member 910 .

[0356] Specifically, the second gas supply source 1010 includes a second gas supply source and a second gas outlet, wherein the second gas outlet is disposed at the second gas supply source and is connected to the first adsorption module 200 , the second adsorption module 300 , and the third adsorption module 400 , respectively.

[0357] The second gas outlet is composed of a second gas outlet pipe and a second gas outlet interface. The second gas outlet pipe is connected to the second gas supply source; the second gas outlet interface is arranged at the end of the second gas outlet pipe and is connected to the first adsorption module 200, the second adsorption module 300, and the third adsorption module 400 respectively.

[0358] In some of the embodiments, the second gas supply source 1010 includes but is not limited to a gas cylinder and a gas storage tank.

[0359] Furthermore, the purge module 1000 includes a twenty-third valve component 1020, a twenty-fourth valve component 1030, and a twenty-fifth valve component 1040. The twenty-third valve component 1020 is disposed in the pipeline connecting the second gas supply source 1010 and the first adsorption module 200; the twenty-fourth valve component 1030 is disposed in the pipeline connecting the second gas supply source 1010 and the second adsorption module 300; and the twenty-fifth valve component 1040 is disposed in the pipeline connecting the second gas supply source 1010 and the third adsorption module 400.

[0360] Specifically, the twenty-third valve member 1020 includes a thirteenth solenoid valve and a sixteenth one-way valve. The thirteenth solenoid valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the first buffer tank 210; the sixteenth one-way valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the first buffer tank 210, and the sixteenth one-way valve is also located downstream of the thirteenth solenoid valve.

[0361] Specifically, the twenty-fourth valve member 1030 includes a fourteenth solenoid valve and a seventeenth one-way valve. The fourteenth solenoid valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the second buffer tank 310; the seventeenth one-way valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the second buffer tank 310, and the seventeenth one-way valve is also located downstream of the fourteenth solenoid valve.

[0362] Specifically, the twenty-fifth valve member 1040 includes a fifteenth solenoid valve and an eighteenth one-way valve. The fifteenth solenoid valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the third buffer tank 410; the eighteenth one-way valve is disposed on the second gas outlet pipe and is located between the second gas supply source 1010 and the third buffer tank 410, and the eighteenth one-way valve is also located downstream of the fifteenth solenoid valve.

[0363] Specifically, the third gas supply source 1050 is connected to the second molecular sieve 320 and the third molecular sieve 420 respectively, and is located upstream of the second gas output member 910 .

[0364] More specifically, the third gas supply source 1050 includes a third gas supply source and a third gas outlet, wherein the third gas outlet is disposed at the third gas supply source and is communicated with the second adsorption module 300 and the third adsorption module 400 respectively.

[0365] The third gas outlet is composed of a third gas outlet pipe and a third gas outlet interface. The third gas outlet pipe is connected to a third gas supply source; the third gas outlet interface is arranged at the end of the third gas outlet pipe and is connected to the second adsorption module 300 and the third adsorption module 400 respectively.

[0366] In some of the embodiments, the third gas supply source 1050 includes but is not limited to a gas cylinder and a gas storage tank.

[0367] Furthermore, the purge module 1000 further includes a thirty-fifth valve 1060 and a thirty-sixth valve 1070. The thirty-fifth valve 1060 is disposed in the pipeline connecting the third gas supply source 1050 and the second adsorption module 300; the thirty-sixth valve 1070 is disposed in the pipeline connecting the third gas supply source 1050 and the third adsorption module 400.

[0368] Specifically, the thirty-fifth valve member 1060 includes a sixteenth solenoid valve, wherein the sixteenth solenoid valve is disposed in the third gas outlet pipe and is located between the third gas supply source 1050 and the third buffer tank 410 .

[0369] Specifically, the thirty-sixth valve component 1070 includes a seventeenth solenoid valve. The seventeenth solenoid valve is disposed on the third gas outlet pipe and is located between the third gas supply source 1050 and the third buffer tank 410 .

[0370] like Fig.14 As shown, the filter module 1100 includes a filter element 1110. The filter element 110 is disposed between the third adsorption module 400 and the first gas output module 800, and is respectively connected to the third adsorption module 400, the first gas output module 800, the second gas output module 900, and the purge module 1000, for filtering particles in the ultrapure ammonia gas.

[0371] Specifically, the filter element 1110 is disposed between the third molecular sieve 420 and the first gas output element 810 , and is connected to the third molecular sieve 420 , the first gas output element 810 , the second gas output element 910 , and the second gas supply source 1010 , respectively.

[0372] In some of these embodiments, filter element 1110 includes, but is not limited to, a particle filter.

[0373] Furthermore, the filter module 1100 further includes a thirty-second valve component 1120, a thirty-third valve component 1130, and a thirty-fourth valve component 1140. The thirty-second valve component 1120 is disposed in the pipeline connecting the filter component 1110 with the third adsorption module 400 and the first gas output module 800; the thirty-third valve component 1130 is disposed in the pipeline connecting the filter component 1110 with the second gas output module 900; and the thirty-fourth valve component 1140 is disposed in the pipeline connecting the filter component 1110 with the purge module 1000.

[0374] Specifically, the thirty-second valve component 1120 is arranged in the pipeline connecting the filter element 1110 with the third molecular sieve and the first gas output element 810; the thirty-third valve component 1130 is arranged in the pipeline connecting the filter element 1110 with the second gas output element 910; the thirty-fourth valve component 1140 is arranged in the pipeline connecting the filter element 1110 with the second gas supply source 1010.

[0375] More specifically, the thirty-second valve element 1120 includes a twenty-first manual diaphragm valve and a twenty-second manual diaphragm valve. The twenty-first manual diaphragm valve is disposed in the pipeline connecting the filter element 1110 and the third molecular sieve 420; the twenty-second manual diaphragm valve is disposed in the pipeline connecting the filter element 1110 and the first gas output element 810.

[0376] More specifically, the thirty-third valve member 1130 includes a twenty-second one-way valve and a sixteenth solenoid valve. The twenty-second one-way valve is disposed in the pipeline connecting the filter member 1110 and the second gas output member 910; the sixteenth solenoid valve is disposed in the pipeline connecting the filter member 1110 and the second gas output member 910 and is located upstream of the twenty-second one-way valve.

[0377] More specifically, the thirty-fourth valve member 1140 includes a twenty-third one-way valve and a seventeenth solenoid valve. The twenty-third one-way valve is disposed in the pipeline connecting the filter member 1110 and the second gas supply source 1010; the seventeenth solenoid valve is disposed in the pipeline connecting the filter member 1110 and the second gas supply source 1010 and is located upstream of the twenty-third one-way valve.

[0378] The method of use of this embodiment is the same as that of embodiment 1, and will not be repeated here.

[0379] The advantages of this embodiment are as follows: by arranging the first heating element 710, the second heating element 720, and the third heating element 730 on the first molecular sieve 220, the second molecular sieve 320, and the third molecular sieve 420, the reagents in the first molecular sieve 220, the second molecular sieve 320, and the third molecular sieve 420 can react more fully with the H2S, CO2, and H2O in the mixed gas through heating treatment, which is beneficial to subsequent adsorption filtration; by arranging the filter element 1110 on the third molecular sieve 420 and the first gas output element 810, the filter element 1110 can filter the particles in the ultra-pure ammonia, thereby further improving the purity of the ultra-pure ammonia.

[0380] Example 5

[0381] This embodiment is a variation of Embodiments 1 to 3. The difference between this embodiment and Embodiments 1 to 3 is that the structure of the heating module 700 is different.

[0382] like Fig.13 As shown, the heating module 700 further includes a fourth heating element 770, a fifth heating element 780 and a sixth heating element 790. The fourth heating element 770 is disposed in the first adsorption module 200, and is used to heat the first purge gas when the purge module 1000 purges the first adsorption module 200; the fifth heating element 780 is disposed in the second adsorption module 300, and is used to heat the first purge gas when the purge module 1000 purges the second adsorption module 300; the sixth heating element 790 is disposed in the third adsorption module 400, and is used to heat the first purge gas when the purge module 1000 purges the second adsorption module 300.

[0383] Specifically, the fourth heating element 770 is disposed on the first molecular sieve 220; the fifth heating element 780 is disposed on the second molecular sieve; and the sixth heating element 790 is disposed on the third molecular sieve.

[0384] More specifically, the fourth heating element 770 is disposed on the first molecular sieve of the first molecular sieve 220, and is used to heat the first purge gas during the purge process; the fifth heating element 780 is disposed on the second molecular sieve of the second molecular sieve 320, and is used to heat the first purge gas during the purge process; the sixth heating element 790 is disposed on the third molecular sieve of the third molecular sieve 420, and is used to heat the first purge gas during the purge process.

[0385] It should be noted that the first purge gas (ie, N2) under high temperature conditions can make the pipeline and the first molecular sieve more clean.

[0386] The number of the fourth heating elements 770 matches the number of the first molecular sieves 220. Generally, the number of the fourth heating elements 770 is the same as the number of the first molecular sieves 220.

[0387] In some of these embodiments, the fourth heating element 770 includes but is not limited to a gas heater.

[0388] The number of the fifth heating elements 780 matches the number of the second molecular sieves 320. Generally, the number of the fifth heating elements 780 is the same as the number of the second molecular sieves 320.

[0389] In some of these embodiments, the fifth heating element 780 includes but is not limited to a gas heater.

[0390] The number of the sixth heating elements 790 matches the number of the third molecular sieves 420. Generally, the number of the sixth heating elements 790 is the same as the number of the third molecular sieves 420.

[0391] In some of these embodiments, the sixth heating element 790 includes but is not limited to a gas heater.

[0392] The method of use of this embodiment is the same as that of embodiment 1, and will not be repeated here.

[0393] The advantage of this embodiment is that by respectively arranging the fourth heating element 770, the fifth heating element 780 and the sixth heating element 790 on the first molecular sieve 220, the second molecular sieve 320 and the third molecular sieve 420, the first purge gas can be heated, and the first purge gas (i.e., N2) under high temperature conditions can clean the pipeline, the first molecular sieve 220, the second molecular sieve 320 and the third molecular sieve 420, thereby facilitating subsequent adsorption filtration operations.

[0394] Example 6

[0395] The semiconductor process system of this embodiment and the utility model.

[0396] An illustrative embodiment of the present utility model is a semiconductor process system, comprising an adsorption and filtration device as described in any one of Embodiments 1 to 5.

[0397] Furthermore, the semiconductor process system also includes a plurality of process chambers, and the plurality of process chambers are respectively connected to the adsorption and filtration devices.

[0398] Specifically, a plurality of process chambers are respectively communicated with the first gas output module 800 .

[0399] Furthermore, several process chambers are also connected to the purge modules 1000 respectively.

[0400] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0401] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. An adsorption filtration device for purifying ultrapure ammonia, characterized in that: include: A gas supply module, wherein the gas supply module is used to input a mixed gas; a first adsorption module, the first adsorption module being in communication with the gas supply module and configured to filter H2S and H2O in the mixed gas to obtain a first filtered gas; a second adsorption module, the second adsorption module being in communication with the first adsorption module and configured to filter CO2 and H2O in the first filtered gas to obtain a second filtered gas; a third adsorption module, the third adsorption module being in communication with the second adsorption module and configured to filter H2O in the second filtered gas to obtain ultrapure ammonia; an analysis module, the analysis module being connected to the first adsorption module, the second adsorption module, and the third adsorption module, respectively, and being used for analyzing the first filtered gas filtered by the first adsorption module, for analyzing the second filtered gas filtered by the second adsorption module, and for analyzing the ultrapure ammonia filtered by the third adsorption module; a condensation reflux module, the condensation reflux module being connected to the first adsorption module, the second adsorption module, the third adsorption module and the analysis module respectively, and condensing and refluxing the first filtered gas, the second filtered gas and the ultra-pure ammonia gas to the first adsorption module, the second adsorption module and the third adsorption module when the purity of the first filtered gas, the second filtered gas and the ultra-pure ammonia gas detected by the analysis module does not meet the purity standards; a first gas output module, the first gas output module being in communication with the third adsorption module and being used for outputting the mixed gas filtered by the first adsorption module, the second adsorption module and the third adsorption module; The second gas output module is connected to the first adsorption module, the second adsorption module and the third adsorption module respectively, and is used for outputting H2S, CO2 and H2O in the mixed gas.

2. The adsorption filtration device according to claim 1, characterized in that: Also includes: A heating module, the heating module is arranged in the first adsorption module, the second adsorption module, and the third adsorption module, and is used to heat the reagent in the first adsorption module, the second adsorption module, and the third adsorption module during the reaction process with H2S, CO2, and H2O in the mixed gas; and / or a purge module, the purge module being connected to the first adsorption module, the second adsorption module, and the third adsorption module, respectively, and being used to purge impurities in the first adsorption module, the second adsorption module, and the third adsorption module; and / or A filtering module is disposed between the third adsorption module and the first gas output module, and is respectively connected to the third adsorption module, the first gas output module, the second gas output module, and the purge module, and is used for filtering particles in the ultra-pure ammonia gas.

3. The adsorption filtration device according to claim 1, characterized in that: The gas supply module comprises: A first gas supply source is communicated with the first adsorption module and is used for inputting a mixed gas into the first adsorption module.

4. The adsorption filtration device according to claim 2, characterized in that: The first adsorption module comprises: At least one first buffer tank, the first buffer tank is communicated with the gas supply module and the purge module respectively, and is used to obtain the mixed gas input by the gas supply module; at least one first molecular sieve, the first molecular sieve is respectively connected to the first buffer tank, the second adsorption module, the analysis module, and the second gas output module, and is provided with the heating module, for filtering H2S and H2O of the mixed gas input from the first buffer tank to obtain a first filtered gas; and / or The second adsorption module comprises: at least one second buffer tank, the second buffer tank being in communication with the first adsorption module and the purge module, and being used for obtaining the first filtered gas filtered by the first adsorption module; at least one second molecular sieve, the second molecular sieve is respectively connected to the second buffer tank, the third adsorption module, the analysis module, and the second gas output module, and is provided with the heating module, for filtering CO2 and H2O of the first filtered gas input from the second buffer tank to obtain a second filtered gas; and / or The third adsorption module comprises: at least one third buffer tank, the third buffer tank being in communication with the second adsorption module and the purge module, and being used for obtaining the second filtered gas filtered by the second adsorption module; At least one third molecular sieve, the third molecular sieve is respectively connected to the third buffer tank, the first gas output module, the analysis module, and the second gas output module, and is provided with the heating module, for filtering H2O of the second filtered gas input from the third buffer tank to obtain ultra-pure ammonia.

5. The adsorption filtration device according to claim 4, characterized in that: The first adsorption module further comprises: a first bypass member, wherein the first bypass member is disposed between two adjacent first molecular sieves and connects the two first molecular sieves; and / or The second adsorption module further comprises: a second bypass member, wherein the second bypass member is disposed between two adjacent second molecular sieves and connects the two second molecular sieves; and / or The third adsorption module further includes: a third bypass member, wherein the third bypass member is disposed between two adjacent third molecular sieves and connects the two third molecular sieves; and / or The first adsorption module further comprises: a first pressure monitoring component, which is disposed in a pipeline connected to the first adsorption module and is used to monitor pressure; a first pressure relief component, which is disposed in a pipeline connected to the first adsorption module and is used for relieving pressure when the pressure value monitored by the first pressure monitoring component exceeds a preset threshold; and / or The second adsorption module further comprises: a second pressure monitoring component, the second pressure monitoring component being disposed in a pipeline communicating with the second adsorption module and being used for monitoring pressure; a second pressure relief member, which is disposed on a pipeline connected to the second adsorption module and is used for relieving pressure when the pressure value monitored by the second pressure monitoring member exceeds a preset threshold; and / or The third adsorption module further includes: a third pressure monitoring component, the third pressure monitoring component being arranged in a pipeline connected to the third adsorption module and being used for monitoring pressure; A third pressure relief component is provided in a pipeline connected to the third adsorption module, and is used for relieving pressure when the pressure value monitored by the third pressure monitoring component exceeds a preset threshold value.

6. The adsorption filtration device according to claim 1, characterized in that: The analysis module comprises: an analysis element, the analysis element being in communication with the first adsorption module, the second adsorption module, and the third adsorption module, and being used for analyzing the first filtered gas filtered by the first adsorption module, for analyzing the second filtered gas filtered by the second adsorption module, and for analyzing the ultrapure ammonia filtered by the third adsorption module; and / or The condensation reflux module comprises: a condensation member, the condensation member being connected to the first adsorption module, the second adsorption module, the third adsorption module and the analysis module respectively, and being used for condensing the first filtered gas, the second filtered gas and the ultra-pure ammonia gas to obtain a reflux gas when the purity of the first filtered gas, the second filtered gas and the ultra-pure ammonia gas detected by the analysis module does not meet the purity standards; A reflux member is connected to the condensation member, the first adsorption module, the second adsorption module and the third adsorption module respectively, and is used to transmit the reflux gas to the first adsorption module, the second adsorption module and the third adsorption module.

7. The adsorption filtration device according to claim 1, characterized in that: The first gas output module comprises: A first gas output member, the first gas output member is connected to the third adsorption module and is used to output ultra-pure ammonia; and / or The second gas output module comprises: a second gas output member, the second gas output member being in communication with the first adsorption module and configured to output H2S and H2O in the mixed gas; A third gas output component is connected to the second adsorption module and the third adsorption module, and is used for outputting CO2 and H2O in the mixed gas.

8. The adsorption filtration device according to claim 2, characterized in that: The heating module comprises: a first heating element, the first heating element being disposed in the first adsorption module and used for heating during a reaction process between the reagent in the first adsorption module and H2S and H2O in the mixed gas; a second heating element, the second heating element being disposed in the second adsorption module and used for heating during the reaction process between the agent in the second adsorption module and CO2 and H2O in the first filtered gas; A third heating element, which is disposed in the third adsorption module and is used for heating during the reaction between the agent in the third adsorption module and H2O in the second filtered gas; and / or The purge module comprises: a second gas supply source, the second gas supply source being in communication with the first adsorption module, the second adsorption module, and the third adsorption module and being located upstream of the second gas output module, and being used for supplying a first purge gas; A third gas supply source, the third gas supply source is connected to the second adsorption module and the third adsorption module, and is used to supply a second purge gas; and / or The filtering module comprises: A filter element, wherein the filter element is disposed between the third adsorption module and the first gas output module, and is respectively connected to the third adsorption module, the first gas output module, the second gas output module, and the purge module, and is used for filtering particles in the ultra-pure ammonia gas.

9. The adsorption filtration device according to claim 8, characterized in that: The heating module also includes: a fourth heating element, the fourth heating element being disposed in the first adsorption module and being used for heating the first purge gas when the purge module purges the first adsorption module; a fifth heating element, the fifth heating element being disposed in the second adsorption module and being used for heating the first purge gas when the purge module purges the second adsorption module; A sixth heating element is provided in the third adsorption module, and is used for heating the first purge gas when the purge module purges the second adsorption module.

10. A semiconductor process system, characterized in that: include: An adsorption filtration device as claimed in any one of claims 1 to 9.

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