Detection device

Abstract

The detection device is used for detecting the thickness of a substrate slice and comprises a base body, a detection table, a spectrum confocal sensor, a feeding mechanism, a discharging structure and a controller, a to-be-detected area and a plurality of storage areas are arranged on the base body, the to-be-detected area is used for storing the substrate slice to be detected, and the storage areas comprise a qualified area and a disqualified area; the qualified area is used for storing qualified substrates, and the unqualified area is used for storing unqualified substrates; the spectrum confocal sensor is arranged on the detection table and is used for measuring the thickness of the substrate slice; the feeding mechanism is arranged on the base body and used for conveying the substrate slices to be detected to the detection table from the to-be-detected area. The material receiving mechanism is arranged on the base body and is used for conveying the detected substrate slices to the qualified area or the unqualified area from the detection table; the controller is in signal connection with the spectrum confocal sensor, the feeding mechanism and the material receiving mechanism. According to the technical scheme, the efficiency of measuring the thickness of the substrate can be improved, and the substrate can be stored in a classified manner.

Description

Technical Field

[0001] The present disclosure relates to the technical field of thickness detection, and in particular, to a detection device. Background Art

[0002] For LED chips, the selection of substrate materials is the primary consideration. Sapphire substrates have the advantages of mature production technology, good device quality, good stability, high mechanical strength, easy handling and cleaning, etc. In the process of sapphire substrates, the wafers need to be ground to ensure that the surface of the substrate has good flatness and less roughness. After grinding, the thickness of the substrate needs to be measured to ensure that the thickness of the substrate meets the standard limit requirements, in preparation for the subsequent processing steps.

[0003] In the related art, the operator can manually measure the thickness of the substrate sheet by using a micrometer, slowly touching the probe of the micrometer to the LED substrate sheet, and then reading the reading to obtain the thickness result of the substrate sheet. However, during the measurement process, human factors have a great influence on the accuracy of the measurement, such as the correctness of the reading. At the same time, the operator's operation is difficult, for example, it is necessary to pay attention to not damaging the surface quality of the substrate sheet during the measurement process. The above reasons lead to a relatively low efficiency in the measurement of the substrate sheet thickness. Utility Model Content

[0004] The purpose of the present disclosure is to provide a detection device for detecting the thickness of a substrate sheet, which can improve the efficiency of measuring the thickness of the substrate sheet to at least partially solve the above technical problems.

[0005] In order to achieve the above object, the present disclosure provides a detection device for detecting the thickness of a substrate sheet, comprising:

[0006] A substrate, wherein a to-be-tested area and a plurality of storage areas are provided on the substrate, wherein the to-be-tested area is used to store the substrate sheets to be tested, and the plurality of storage areas include a qualified area and an unqualified area, wherein the qualified area is used to store the qualified substrate sheets, and the unqualified area is used to store the unqualified substrate sheets;

[0007] Testing bench;

[0008] A spectral confocal sensor, arranged on the detection platform, for measuring the thickness of the substrate sheet;

[0009] A feeding mechanism, arranged on the base body, for conveying the substrate sheet to be inspected from the inspection area to the inspection table;

[0010] a receiving mechanism, disposed on the base body, for conveying the substrate sheet after inspection from the inspection table to the qualified area or the unqualified area; and

[0011] The controller is respectively connected to the spectral confocal sensor, the feeding mechanism and the receiving mechanism by signals.

[0012] Optionally, a plurality of storage boxes stacked along a first direction are provided in both the qualified area and the unqualified area, and the storage boxes have openings for receiving the substrate sheets that have been tested.

[0013] Optionally, a plurality of storage areas are provided in each storage box for placing the substrate sheets.

[0014] Optionally, a plurality of loading boxes stacked along a first direction are provided in the inspection area, and the loading boxes have a discharge port for the loading mechanism to take the substrate sheet to be inspected.

[0015] Optionally, a feed port is provided on a side of the loading box away from the discharge port.

[0016] Optionally, the detection platform is arranged on the base and is located between the area to be inspected and the plurality of storage areas, a support frame for placing the substrate sheet is arranged on the detection platform, and the spectral confocal sensor is arranged above the support frame.

[0017] Optionally, the support frame includes a support column connected to the detection platform in a height-adjustable manner along a first direction and a support platform arranged on the support column, a level is installed on the support platform, and the support platform is used to place the substrate sheet.

[0018] Optionally, the feeding mechanism includes a first suction cup, a first moving part driving the first suction cup to move along the second direction, and a second moving part driving the first moving part to move along the first direction and the third direction;

[0019] The material receiving mechanism includes a second suction cup, a third moving part driving the second suction cup to move along the second direction, and a fourth moving part driving the third moving part to move along the first direction and the third direction.

[0020] Optionally, the second moving part includes a first linear guide rail provided on the base and extending along the third direction, a first slider slidably connected to the first linear guide rail, and a first cylinder connected to the first slider, the first slider is used to drive the first cylinder and the first moving part to move along the third direction, the first moving part includes a second cylinder connected to the piston rod of the first cylinder, the first suction cup is connected to the piston rod of the second cylinder, the first cylinder is used to drive the first moving part to move along the first direction, and the second cylinder is used to drive the first suction cup to move along the second direction;

[0021] The fourth moving part includes a second linear guide rail arranged on the base and extending along the third direction, a second slider slidably connected to the second linear guide rail, and a third cylinder connected to the second slider, the second slider is used to drive the third cylinder and the third moving part to move along the third direction, the third moving part includes a fourth cylinder connected to the piston rod of the third cylinder, the second suction cup is connected to the piston rod of the fourth cylinder, the third cylinder is used to drive the third moving part to move along the first direction, and the fourth cylinder is used to drive the second suction cup to move along the second direction.

[0022] Optionally, the first linear guide rail and the second linear guide rail are disposed on the same side of the base body, and are staggered along the first direction, the second direction and the third direction.

[0023] Through the above technical solution, the detection device provided by the present disclosure can detect the thickness of the substrate sheet through the spectral confocal sensor. In addition, the detection device is provided with a storage area, including a qualified area and an unqualified area, for classified storage of the substrate sheets after the detection. Specifically, the feeding mechanism is used to transport the substrate sheet to be detected from the to-be-detected area to the detection table, and then the thickness of the substrate sheet is detected by the spectral confocal sensor. The controller signal connects the spectral confocal sensor and the receiving mechanism to transport the substrate sheet after the detection to the qualified area or the unqualified area according to the thickness measurement result. The efficiency of the substrate sheet thickness measurement is high, and the classified storage of the substrate sheet is completed at the same time, which is convenient for the substrate sheet to be stored for the next step of processing.

[0024] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure but do not constitute a limitation of the present disclosure. In the accompanying drawings:

[0026] Figure 1 Schematic diagram of the overall structure of the detection device provided in the exemplary embodiment of the present disclosure.

[0027] Description of Reference Numerals

[0028] 1. substrate; 2. area to be inspected; 21. loading box; 211. discharge port; 212. feed port; 3. storage area; 31. qualified area; 32. unqualified area; 4. testing platform; 41. spectral confocal sensor; 42. support frame; 421. support column; 422. support platform; 5. loading mechanism; 51. first suction cup; 52. first moving part; 521. second cylinder; 53. second moving part; 531. first linear guide rail; 532. first slider; 533. first cylinder; 6. receiving mechanism; 61. second suction cup; 62. third moving part; 621. fourth cylinder; 63. fourth moving part; 631. second linear guide rail; 632. second slider; 633. third cylinder; 7. storage box; 71. opening. DETAILED DESCRIPTION

[0029] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0030] In the present disclosure, for the convenience of description, a first direction, a second direction and a third direction are defined for the detection device, wherein "X" represents the first direction, "Y" represents the second direction and "Z" represents the third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other. Unless otherwise specified, "inside and outside" refer to the inside and outside of the contour of the corresponding component; "far and near" refer to the far and near of the spatial position of the corresponding component relative to another component. In addition, the terms "first", "second" and the like used in the present disclosure are intended to distinguish one element from another and do not have order and importance. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.

[0031] The detection device in the exemplary embodiments of the present disclosure will be described below with reference to the accompanying drawings.

[0032] Reference Figure 1The present disclosure relates to a detection device for detecting the thickness of a substrate sheet, comprising a substrate 1, a detection platform 4, a spectral confocal sensor 41, a feeding mechanism 5, a feeding structure and a controller. The substrate 1 is provided with a to-be-detected area 2 and a plurality of storage areas 3. The to-be-detected area 2 is used to store the substrate sheets to be detected. The plurality of storage areas 3 include a qualified area 31 and an unqualified area 32. The qualified area 31 is used to store qualified substrate sheets, and the unqualified area 32 is used to store unqualified substrate sheets. The spectral confocal sensor 41 is arranged on the detection platform 4 to measure the thickness of the substrate sheet. The feeding mechanism 5 is arranged on the substrate 1 to transport the substrate sheets to be detected from the to-be-detected area 2 to the detection platform 4. The receiving mechanism 6 is arranged on the substrate 1 to transport the substrate sheets to be detected from the detection platform 4 to the qualified area 31 or the unqualified area 32. The controller is respectively connected to the spectral confocal sensor 41, the feeding mechanism 5 and the receiving mechanism 6 by signal. The controller may be a PLC controller, a DCS controller or a CNC controller, etc., which is not specifically limited in the present disclosure.

[0033] Through the above technical solution, the detection device provided by the present disclosure can detect the thickness of the substrate sheet through the spectral confocal sensor 41. In addition, the detection device is provided with a storage area 3, including a qualified area 31 and an unqualified area 32, for classified storage of the substrate sheets after the detection. Specifically, the feeding mechanism 5 is used to transport the substrate sheet to be detected from the to-be-detected area 2 to the detection table 4, and then the thickness of the substrate sheet is detected by the spectral confocal sensor 41. The controller signal connects the spectral confocal sensor 41 and the receiving mechanism 6, so as to transport the substrate sheet after the detection to the qualified area 31 or the unqualified area 32 according to the thickness measurement result. The efficiency of the substrate sheet thickness measurement is high, and the classified storage of the substrate sheet is completed at the same time, which is convenient for the substrate sheet to be stored for the next step of processing.

[0034] In some embodiments, reference Figure 1 , multiple storage boxes 7 stacked along the first direction can be set in both the qualified area 31 and the unqualified area 32, and the storage boxes 7 have an opening 71 for receiving the substrate sheet after the detection. In this way, the controller can transmit a signal to the material receiving mechanism 6, so that the material receiving mechanism 6 can transport the substrate sheet after the detection to the qualified area 31 or the unqualified area 32 according to the thickness measurement result, and then store it in the storage box 7 through the opening 71, so as to complete the classified storage of the substrate sheet. Among them, the number of the storage boxes 7 in the qualified area 31 and the unqualified area 32 can be set to multiple, so as to increase the number of substrate sheets stored. In addition, the multiple storage boxes 7 arranged in the qualified area 31 can be used to respectively store substrate sheets with qualified thickness but different specific thicknesses, so as to further classify the substrate sheets with qualified thickness, which is convenient for subsequent processing.

[0035] It is understandable that multiple storage boxes 7 can be directly placed on the base 1, and multiple storage boxes 7 are also directly stacked. In this way, after any storage box 7 has completed the storage of the substrate sheet, it is convenient to remove the storage box 7 to perform subsequent processing on the substrate sheet therein, and the storage box 7 that does not store the substrate sheet can be loaded into the position to continue to store the substrate sheet that has been tested. At the same time, it is also convenient to repair or replace one or more damaged storage boxes.

[0036] In some embodiments, reference Figure 1 , each storage box 7 may be provided with a plurality of storage areas for placing substrate sheets, so that the storage capacity of substrate sheets in the storage box 7 can be increased. In addition, a plurality of substrate sheets can be stored at intervals in the same storage box 7 to reduce the occurrence of surface damage of substrate sheets caused by mutual collision between substrate sheets, improve the integrity of substrate sheets during storage, and facilitate taking and storage. It is understandable that the division of the above-mentioned storage area may be formed by a plurality of cross-arranged partitions (not shown in the figure) provided in the storage box 7, or a groove may be formed inside the storage box 7 to form a storage area, or a controller signal may be connected to the receiving mechanism 6 to place the substrate sheets after detection at different positions in the storage box 7, and the present disclosure is not limited thereto.

[0037] In some embodiments, reference Figure 1 In the inspection area 2, a plurality of loading boxes 21 stacked in a first direction may be provided, and the loading box 21 has a discharge port 211 for the loading mechanism 5 to take the substrate sheet to be inspected. In this way, the loading mechanism 5 moves the substrate sheet to be inspected out of the loading box 21 from the discharge port 211, and then transports the substrate sheet to the inspection table 4 for thickness inspection. It is understandable that the number of loading boxes 21 can be set to multiple, so as to increase the number of substrate sheets to be stored. At the same time, multiple loading boxes 21 stacked along the first direction form a group, and the inspection area 2 can be provided with multiple groups of loading boxes 21. The present disclosure exemplarily provides two groups of loading boxes 21 in the inspection area 2, wherein the two groups of loading boxes 21 can be directly placed on the substrate 1, and the multiple loading boxes 21 in each group can also be directly stacked to facilitate the replenishment of substrate sheets to be inspected in any one or more loading boxes 21 in one group, and the repair or replacement of any one or more damaged loading boxes 21. Of course, it is also convenient to replenish the substrate sheets to be inspected stored in the entire group of loading boxes 21.

[0038] In addition, in some other possible embodiments not shown in the drawings, each loading box 21 can also be divided into multiple temporary storage areas to increase the number of substrate sheets to be stored, and the substrate sheets to be detected can be classified and separated to reduce the occurrence of surface damage of the substrate sheets due to collision between the substrate sheets to be detected, thereby improving the integrity of the substrate sheets during storage. It is understandable that the formation method of the temporary storage area is similar to the formation method of the storage area, and will not be repeated in this disclosure.

[0039] In some embodiments, reference Figure 1 , a feeding port 212 is provided on the side of the loading box 21 away from the discharge port 211, so that the substrate sheets to be detected can be replenished into the upper loading box 21 through the feeding port 212, so there is no need to move the loading box 21 to replenish the substrate sheets to be detected. For example, when the loading mechanism 5 moves the substrate sheets to be detected in one of the loading boxes 21, the substrate sheets to be detected can be replenished into other one or more loading boxes 21, so that there is no need to stop the operation of the loading mechanism 5, thereby improving the efficiency of the detection device for the thickness detection of the substrate sheets. At the same time, the frequent disassembly process of the loading box 21 is also reduced, which is conducive to improving the durability of the loading box 21. It should be noted that any suitable method can be used to replenish the substrate sheets to be detected into the upper loading box 21 through the feeding port 212, such as using a robot arm to transport the substrate sheets to be detected into the loading box 21 through the feeding port 212, or the staff manually places the substrate sheets to be detected into the loading box 21 through the feeding port 212, and the present disclosure does not make specific limitations on this.

[0040] In some embodiments, reference Figure 1 The inspection table 4 can be arranged on the substrate 1 and between the inspection area 2 and the multiple storage areas 3. The inspection area 2, the inspection table 4 and the multiple storage areas 3 are arranged in sequence along the third direction. In this way, the mutual interference between the loading mechanism 5 and the receiving mechanism 6 can be reduced from the distribution of spatial positions, that is, the inspection area 2 and the multiple storage areas 3 are arranged in different halves on the substrate 1, so that the loading mechanism 5 can transport the substrate sheet to be inspected from the inspection area 2 to the inspection table 4, and at the same time, the receiving mechanism 6 can transport the substrate sheet after inspection from the inspection table 4 to the qualified area 31 or the unqualified area 32.

[0041] In addition, a support frame 42 for placing a substrate sheet is provided on the detection table 4, and a spectral confocal sensor 41 is arranged above the support frame 42. In this way, the thickness of the substrate sheet can be measured by the spectral confocal sensor 41. Specifically, the spectral confocal sensor 41 can measure the distance to the upper surface of the substrate sheet on the support frame 42, as well as the distance to the upper surface of the support frame 42. Then, the thickness value of the substrate sheet can be obtained by subtracting the distance between the spectral confocal sensor 41 and the upper surface of the support frame 42 and the distance between the spectral confocal sensor 41 and the upper surface of the substrate sheet on the support frame 42.

[0042] In some embodiments, reference Figure 1 The support frame 42 includes a support column 421 connected to the detection platform 4 in a height-adjustable manner along a first direction and a support platform 422 arranged on the support column 421. A level meter is installed on the support platform 422, and the support platform 422 is used to place the substrate sheet. Among them, the distance measured by the above-mentioned spectral confocal sensor 41 and the upper surface of the support frame 42 refers to the distance between the spectral confocal sensor 41 and the upper surface of the support platform 422. In this way, the position of the support platform 422 can be adjusted by the support column 421, so that the upper surface of the support platform 422 can be kept horizontal. Of course, at this time, the plane where the spectral confocal sensor 41 is located is also a horizontal plane, that is, the plane where the spectral confocal sensor 41 is located is parallel to the upper surface of the support platform 422, so as to improve the accuracy of the thickness detection of the substrate sheet. It can be understood that while adjusting the position of the upper surface of the support platform 422 by the support column 421, the state of the level meter can be observed to facilitate the adjustment of the support platform 422 and improve the efficiency and accuracy of the adjustment process.

[0043] In some embodiments, reference Figure 1 The loading mechanism 5 includes a first suction cup 51, a first moving part 52 driving the first suction cup 51 to move along the second direction, and a second moving part 53 driving the first moving part 52 to move along the first direction and the third direction. In this way, the first suction cup 51 can move along the second direction under the action of the first moving part 52 to enter the loading box 21 through the discharge port 211, and the substrate sheet to be detected is adsorbed and fixed by the first suction cup 51, and then the first moving part 52 is moved again along the second direction to take the substrate sheet to be detected out of the loading box 21 through the discharge port 211, and the first moving part 52 and the first suction cup 51 are driven by the second moving part 53 to move along the third direction to the detection table 4 to place the substrate sheet to be detected on the supporting platform 422, so that the spectral confocal sensor 41 can be used to measure the thickness of the substrate sheet to be detected. During this process, the first moving part 52 and the first suction cup 51 can be driven to move in the first direction by the second moving part 53, so as to be able to adaptively pick up substrate sheets from different loading boxes 21, or the position of the first suction cup 51 in the first direction can be adaptively adjusted according to the positions of the support platform 422 and the loading box 21.

[0044] The receiving mechanism 6 includes a second suction cup 61, a third moving part 62 driving the second suction cup 61 to move along the second direction, and a fourth moving part 63 driving the third moving part 62 to move along the first direction and the third direction. In this way, the second suction cup 61 can be moved to the upper part of the support platform 422 along the second direction under the action of the third moving part 62, and the substrate sheet after the inspection is adsorbed and fixed by the second suction cup 61, and then the substrate sheet after the inspection is taken out from the inspection table 4 by the third moving part 62 again, and the third moving part 62 is driven to move the third moving part 62 and the second suction cup 61 along the third direction to the storage box 7 corresponding to the qualified area 31 or the unqualified area 32 by the fourth moving part 63, and then the third moving part 62 is moved again along the second direction so that the second suction cup 61 enters the storage box 7 from the opening 71 to store the substrate sheet after the inspection. During this process, the third moving part 62 and the second suction cup 61 can be moved in the first direction by the fourth moving part 63, so as to be able to adaptively place the inspected substrate sheets in different storage boxes 7, or adaptively adjust the position of the second suction cup 61 in the first direction according to the positions of the support platform 422 and the storage box 7.

[0045] In some embodiments, reference Figure 1 The second movable part 53 includes a first linear guide rail 531 arranged on the base 1 and extending along the third direction, a first slider 532 slidably connected to the first linear guide rail 531, and a first cylinder 533 connected to the first slider 532. The first slider 532 is used to drive the first cylinder 533 and the first movable part 52 to move along the third direction. The first movable part 52 includes a second cylinder 521 connected to the piston rod of the first cylinder 533. The first suction cup 51 is connected to the piston rod of the second cylinder 521. The first cylinder 533 is used to drive the first movable part 52 to move along the first direction, and the second cylinder 521 is used to drive the first suction cup 51 to move along the second direction.

[0046] In this way, the first suction cup 51 can move along the second direction under the action of the second cylinder 521 to enter the loading box 21 through the discharge port 211, and the substrate sheet to be detected is adsorbed and fixed by the first suction cup 51, and then the substrate sheet to be detected is taken out of the loading box 21 through the discharge port 211 by the second cylinder 521 again. The first slider 532 slidably connected to the first linear guide rail 531 drives the first cylinder 533, the second cylinder 521 and the first suction cup 51 to move along the third direction to the detection platform 4 and place the substrate sheet to be detected on the support platform 422, so that the spectral confocal sensor 41 can be used to measure the thickness of the substrate sheet to be detected. In this process, the position of the second cylinder 521 and the first suction cup 51 in the first direction can be adjusted by the first cylinder 533.

[0047] The fourth movable part 63 includes a second linear guide rail 631 arranged on the base 1 and extending along the third direction, a second slider 632 slidably connected to the second linear guide rail 631, and a third cylinder 633 connected to the second slider 632. The second slider 632 is used to drive the third cylinder 633 and the third movable part 62 to move along the third direction. The third movable part 62 includes a fourth cylinder 621 connected to the piston rod of the third cylinder 633, the second suction cup 61 is connected to the piston rod of the fourth cylinder 621, the third cylinder 633 is used to drive the third movable part 62 to move along the first direction, and the fourth cylinder 621 is used to drive the second suction cup 61 to move along the second direction.

[0048] In this way, the second suction cup 61 can be moved to the top of the support platform 422 along the second direction under the action of the fourth cylinder 621, and the substrate sheet after the inspection is adsorbed and fixed by the second suction cup 61, and then the substrate sheet after the inspection is taken out from the inspection platform 4 by the fourth cylinder 621 again. The third cylinder 633, the fourth cylinder 621 and the second suction cup 61 are driven to move to the storage box 7 corresponding to the qualified area 31 or the unqualified area 32 along the third direction by the second slider 632 slidably connected to the second linear guide rail 631, and then the fourth cylinder 621 is moved again along the second direction so that the second suction cup 61 enters the storage box 7 from the opening 71 to store the substrate sheet after the inspection. In this process, the third cylinder 633 can adjust the position of the fourth cylinder 621 and the second suction cup 61 in the first direction.

[0049] The first linear guide rail 531 and the second linear guide rail 631 may adopt linear guide rails in the prior art, or, in some other possible embodiments not shown in the drawings, the second moving part 53 may include a driving mechanism such as a hydraulic cylinder or a pneumatic cylinder that can drive the first cylinder 533, the second cylinder 521 and the first suction cup 51 to move along the third direction. Similarly, the fourth moving part 63 may include a driving mechanism such as a hydraulic cylinder or a pneumatic cylinder that can drive the third cylinder 633, the fourth cylinder 621 and the second suction cup 61 to move along the third direction. The present disclosure is not limited thereto.

[0050] In some embodiments, reference Figure 1 The first linear guide 531 and the second linear guide 631 are arranged on the same side of the substrate 1, and are staggered along the first direction, the second direction and the third direction. In this way, the overall occupied space of the detection device can be reduced, and it is convenient for the loading mechanism 5 and the receiving mechanism 6 to transport the substrate sheet. In addition, the loading mechanism 5 and the unloading mechanism will not affect each other during normal operation, which is beneficial to improving the working efficiency of the detection device.

[0051] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0052] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0053] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. A detection device for detecting the thickness of a substrate sheet, characterized in that: include: A substrate, wherein a to-be-tested area and a plurality of storage areas are provided on the substrate, wherein the to-be-tested area is used to store the substrate sheets to be tested, and the plurality of storage areas include a qualified area and an unqualified area, wherein the qualified area is used to store the qualified substrate sheets, and the unqualified area is used to store the unqualified substrate sheets; Testing bench; A spectral confocal sensor, arranged on the detection platform, for measuring the thickness of the substrate sheet; A feeding mechanism, arranged on the base body, for conveying the substrate sheet to be inspected from the inspection area to the inspection table; A material receiving mechanism, arranged on the base body, for conveying the substrate sheet after inspection from the inspection table to the qualified area or the unqualified area; as well as The controller is respectively connected to the spectral confocal sensor, the feeding mechanism and the receiving mechanism by signals.

2. The detection device according to claim 1, characterized in that: A plurality of storage boxes stacked along a first direction are disposed in both the qualified area and the unqualified area, and the storage boxes have openings for receiving the substrate sheets that have been tested.

3. The detection device according to claim 2, characterized in that: Each of the storage boxes is provided with a plurality of storage areas for placing the substrate sheets.

4. The detection device according to claim 1, characterized in that: A plurality of loading boxes stacked along a first direction are arranged in the inspection area, and the loading boxes have a discharge port for the loading mechanism to take the substrate sheet to be inspected.

5. The detection device according to claim 4, characterized in that: A feeding port is arranged on a side of the loading box which is away from the discharging port.

6. The detection device according to any one of claims 1 to 5, characterized in that: The detection platform is arranged on the base and is located between the area to be detected and the plurality of storage areas. A support frame for placing the substrate sheet is arranged on the detection platform, and the spectral confocal sensor is arranged above the support frame.

7. The detection device according to claim 6, characterized in that: The support frame includes a support column connected to the detection platform in an adjustable height along a first direction and a support platform arranged on the support column, a level is installed on the support platform, and the support platform is used to place the substrate sheet.

8. The detection device according to claim 1, characterized in that: The feeding mechanism includes a first suction cup, a first moving part driving the first suction cup to move along the second direction, and a second moving part driving the first moving part to move along the first direction and the third direction; The material receiving mechanism includes a second suction cup, a third moving part driving the second suction cup to move along the second direction, and a fourth moving part driving the third moving part to move along the first direction and the third direction.

9. The detection device according to claim 8, characterized in that: The second moving part includes a first linear guide rail provided on the base and extending along the third direction, a first slider slidably connected to the first linear guide rail, and a first cylinder connected to the first slider, the first slider is used to drive the first cylinder and the first moving part to move along the third direction, the first moving part includes a second cylinder connected to the piston rod of the first cylinder, the first suction cup is connected to the piston rod of the second cylinder, the first cylinder is used to drive the first moving part to move along the first direction, and the second cylinder is used to drive the first suction cup to move along the second direction; The fourth moving part includes a second linear guide rail arranged on the base and extending along the third direction, a second slider slidably connected to the second linear guide rail, and a third cylinder connected to the second slider, the second slider is used to drive the third cylinder and the third moving part to move along the third direction, the third moving part includes a fourth cylinder connected to the piston rod of the third cylinder, the second suction cup is connected to the piston rod of the fourth cylinder, the third cylinder is used to drive the third moving part to move along the first direction, and the fourth cylinder is used to drive the second suction cup to move along the second direction.

10. The detection device according to claim 9, characterized in that: The first linear guide rail and the second linear guide rail are disposed on the same side of the base body and are staggered along the first direction, the second direction and the third direction.

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