Split type semiconductor welding furnace body

Abstract

According to the split type semiconductor welding furnace body, the lifting mechanism is arranged, so that the cavity cover right facing the cavity moves in the vertical direction, split type arrangement of the cavity cover and the cavity is achieved, maintenance, overhaul and replacement of the cavity or the cavity cover are facilitated, the opening side of the cavity is completely opened conveniently, and the service life of the cavity is prolonged. The cavity cover is arranged in the cavity so as to conveniently take and place materials and maintain the internal structure of the cavity, and the cavity cover only executes the lifting action, so that the cavity cover is ensured to be just opposite to the cavity all the time in the moving process, a gap formed by a horizontal distance between the cavity cover and the cavity is avoided, and the sealing performance of the cavity cover covering the cavity is ensured; through the lifting mechanism and the locking mechanism, automatic locking and separation of the cavity cover and the cavity are achieved, personnel scalding caused by manual operation is avoided, and the opening and closing efficiency of the cavity cover is improved.

Description

Technical Field

[0001] The utility model relates to the field of welding furnace bodies, and more specifically refers to a split type semiconductor welding furnace body. Background Art

[0002] With the rapid development of modern electronic technology, semiconductor products are increasingly used, and the demand for high-quality semiconductor welding furnace bodies is also increasing. The semiconductor welding furnace body provides a sealed environment for semiconductor welding to ensure that the solder is heated, melted, cooled and solidified under vacuum.

[0003] The existing semiconductor welding furnace body is usually composed of a cavity and a cavity cover hinged to one side of the cavity. The cavity cover is driven to open and close by an opening and closing cylinder hinged to the outside of the cavity and arranged obliquely, so that the side of the cavity cover away from the hinge is away from or close to the cavity to form an angle or overlap with the cavity. The connection structure between the cavity and the cavity cover of this type of one-piece semiconductor welding furnace body is complex. It is difficult to seal the cavity cover with the surrounding of the cavity by tilting and flipping, and it is not easy to replace or repair the cavity cover or cavity. At the same time, the cavity cover has limited open space to the cavity, which is not convenient for taking and placing materials and inspecting the structure inside the cavity. Utility Model Content

[0004] The utility model aims to overcome the defects of the prior art and provide a split semiconductor welding furnace body to solve the technical problems of the existing semiconductor welding furnace body cavity and cavity cover being difficult to achieve sealed connection, complex connection structure and limited open space.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A split type semiconductor welding furnace body, comprising: a cavity, a cavity cover, a lifting mechanism and a locking mechanism; the cavity is provided with an opening at the top, and the cavity cover is located directly above the cavity; the lifting mechanism is connected to a side of the cavity cover away from the cavity, and is used to drive the cavity cover to move up and down to move away from or close to the cavity; the locking mechanism is connected to the cavity cover;

[0007] An extension portion is protruding from the top of the side wall of the cavity; the upper surface of the extension portion is arranged in contact with the lower surface of the cavity cover; the locking mechanism includes: a locking cylinder and a hook; the locking cylinder drives the hook end of the hook to move away from or hook the lower surface of the extension portion.

[0008] Among them, the locking mechanism also includes: a hinge seat and a fixed seat; the hinge seat is connected to the side of the cavity cover away from the cavity body, and the fixed seat is vertically arranged and connected to the side wall of the cavity cover; the hinge seat is located between the two ends of the fixed seat; the pull hook is movably connected to the fixed seat, the output end of the locking cylinder is connected to the pull hook, and the other end is hinged to the hinge seat.

[0009] Wherein, the locking mechanism also includes: a first connecting rod, a second connecting rod and a third connecting rod; the first connecting rod, the second connecting rod, the third connecting rod and the hook are all located on the same side of the fixed seat and are arranged parallel to the fixed seat; the first connecting rod, the second connecting rod, the third connecting rod and the hook are connected in sequence from top to bottom; one end of the first connecting rod is hinged to the fixed seat, and the other end is hinged to one end of the second connecting rod; one end of the third connecting rod is hinged to an end of the second connecting rod away from the first connecting rod, and the other end is hinged to an end of the fixed seat away from the first connecting rod; the hinges of the first connecting rod and the third connecting rod and the fixed seat are located on the same vertical axis, and the hinges of the third connecting rod and the second connecting rod are located on the side of the vertical axis away from the locking cylinder; the hook is connected to an end of the third connecting rod away from the second connecting rod, and the hooking end of the hook is located on a side of the third connecting rod close to the locking cylinder.

[0010] Wherein, the locking cylinder is connected to the hook through the first connecting rod, the second connecting rod and the third connecting rod; the output end of the locking cylinder is connected to the hinge of the first connecting rod and the second connecting rod, and is used to drive the end of the second connecting rod away from the hook to reciprocate on both sides of the vertical axis.

[0011] Wherein, the pull hook includes: a connecting plate and a hook plate; the connecting plate and the hook plate are arranged perpendicular to each other, one end of the connecting plate is fixedly connected to the end of the third connecting rod away from the second connecting rod, and the other end is fixedly connected to the hook plate; the hook plate is located on the side of the connecting plate close to the locking cylinder.

[0012] Among them, the lifting mechanism includes: a support plate, a moving block and a lifting drive member; the support plate is used to be fixedly connected to the external bracket, the moving block is fixedly connected to the side of the cavity cover away from the cavity, the lifting drive member is connected to the support plate, and the output end of the lifting drive member is arranged through the support plate and connected to the moving block.

[0013] There is one lifting mechanism located at the center of the cavity cover; there are four locking mechanisms distributed on the cavity cover in a rectangular shape with the lifting mechanism as the center.

[0014] Among them, it also includes: a first water pipe and a second water pipe; the first water pipe is bent and coiled around the side wall of the cavity cover and the side away from the cavity; the second water pipe is bent and coiled around the side wall of the cavity and the side away from the cavity cover.

[0015] Wherein, a ring groove and a concave cavity are provided on one side of the cavity cover close to the cavity body, and a sealing ring corresponding to the ring groove is provided on the extension portion.

[0016] Among them, it also includes: a hydrogen pipe, a nitrogen pipe, an exhaust pipe and a vacuum pipe; one end of the hydrogen pipe, the nitrogen pipe, the exhaust pipe and the vacuum pipe is connected to the inside of the cavity, and the edge is sealed and connected to the side of the cavity away from the cavity cover.

[0017] Compared with the prior art, the utility model has the following beneficial effects: the utility model provides a lifting mechanism to enable the cavity cover arranged opposite to the cavity to move in the vertical direction, thereby realizing the split arrangement of the cavity cover and the cavity, facilitating the maintenance, inspection and replacement of the cavity or the cavity cover, and facilitating the complete opening side of the cavity for convenient material placement and maintenance of the internal structure of the cavity, and the cavity cover only performs lifting actions, thereby ensuring that the cavity cover is always arranged opposite to the cavity during movement, avoiding the formation of a gap due to a horizontal spacing between the cavity cover and the cavity, and ensuring the sealing of the cavity covered by the cavity; the lifting mechanism and the locking mechanism realize automatic locking and separation of the cavity cover and the cavity, avoiding burns to personnel caused by manual operation, and improving the opening and closing efficiency of the cavity cover.

[0018] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the utility model more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the overall structure of a split type semiconductor welding furnace provided by the utility model;

[0020] Figure 2 A schematic diagram of the structure of a lifting mechanism of a split type semiconductor welding furnace provided by the utility model;

[0021] Figure 3 A schematic diagram of the side structure of a split type semiconductor welding furnace provided by the utility model;

[0022] Figure 4 A structural schematic diagram of a locking mechanism for a split type semiconductor welding furnace body provided by the utility model;

[0023] Figure 5The utility model provides a side structural schematic diagram of a locking mechanism of a split type semiconductor welding furnace body.

[0024] Reference numerals:

[0025] 1. Cavity; 11. Extension; 2. Cavity cover; 3. Lifting mechanism; 31. Support plate; 32. Moving block; 33. Lifting drive member; 4. Locking mechanism; 41. Locking cylinder; 411. Connecting ear; 42. Draw hook; 421. Connecting plate; 422. Hook plate; 43. Hinge seat; 431. Support; 432. Support arm; 44. Fixed seat; 45a. First connecting rod; 45b. Second connecting rod; 45c. Third connecting rod; 46. Spherical bearing; 461. Sleeve; 462. Bearing part; 5a. First water pipe; 5b. Second water pipe; 6a. Hydrogen pipe; 6b. Nitrogen pipe; 6c. Exhaust pipe. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model is further described in detail in conjunction with the accompanying drawings and specific implementation methods. The technical solution in the embodiment of the utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0028] It should also be understood that the terms used in this utility model specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model. As used in this utility model specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0029] It should be further understood that the term “and / or” used in the present specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0030] See also Figure 1-5As shown, this embodiment discloses a split type semiconductor welding furnace body, which includes: a cavity 1, a cavity cover 2, a lifting mechanism 3 and a locking mechanism 4; the cavity 1 is provided with an opening at the top, and the cavity cover 2 is located directly above the cavity 1; the lifting mechanism 3 is connected to a side of the cavity cover 2 away from the cavity 1, and is used to drive the cavity cover 2 to move up and down to move away from or close to the cavity 1; the locking mechanism 4 is connected to the cavity cover 2;

[0031] An extension portion 11 is protruded from the top of the side wall of the cavity 1; the upper surface of the extension portion 11 is arranged in contact with the lower surface of the cavity cover 2; the locking mechanism 4 includes: a locking cylinder 41 and a hook 42; the locking cylinder 41 drives the hook end of the hook 42 to move away from or hook the lower surface of the extension portion 11.

[0032] In actual application, the cavity 1 and the lifting mechanism 3 are connected to the external bracket. After the material is placed in the cavity 1, the lifting mechanism 3 drives the cavity cover 2 to approach the cavity 1 until the cavity cover 2 fits the extension part 11, and the opening side of the cavity 1 is sealed and covered. The locking cylinder 41 drives the hook 42 to approach the lower surface of the extension part 11 and hook the extension part 11; after the material welding is completed, the locking cylinder 41 drives the hook 42 away from the lower surface of the extension part 11, releases the cavity cover 2 and the cavity 1, and the lifting mechanism 3 drives the cavity cover 2 away from the cavity 1, so that the opening side of the cavity 1 is completely open to take out the material.

[0033] The split semiconductor welding furnace body of the present embodiment is provided with a lifting mechanism 3, so that the cavity cover 2 arranged opposite to the cavity 1 moves in the vertical direction, thereby realizing the split setting of the cavity cover 2 and the cavity 1, facilitating the maintenance, inspection and replacement of the cavity 1 or the cavity cover 2, and facilitating the complete opening side of the cavity 1 to conveniently take in and put out materials and maintain the internal structure of the cavity 1, and the cavity cover 2 only performs lifting actions, thereby ensuring that the cavity cover 2 is always arranged opposite to the cavity 1 during the movement process, avoiding the horizontal spacing between the cavity cover 2 and the cavity 1 to form a gap, and ensuring the sealing of the cavity cover 2 covering the cavity 1; through the lifting mechanism 3 and the locking mechanism 4, the automatic locking and separation of the cavity cover 2 and the cavity 1 is realized, avoiding burns to personnel caused by manual operation, and improving the opening and closing efficiency of the cavity cover 2; and the method of opening and closing the cavity cover 2 up and down does not need to occupy the space outside the cavity 1 for side flipping, thereby reducing the floor area, improving the space utilization rate, and facilitating the space layout of the factory.

[0034] Specifically, the locking mechanism 4 further includes: a hinge seat 43 and a fixing seat 44; the hinge seat 43 is connected to the side of the cavity cover 2 away from the cavity 1, and the fixing seat 44 is vertically arranged and connected to the side wall of the cavity cover 2; the hinge seat 43 is located between the two ends of the fixing seat 44; the hook 42 is movably connected to the fixing seat 44, the output end of the locking cylinder 41 is connected to the hook 42, and the other end is hinged to the hinge seat 43. When the locking cylinder 41 is extended, the hook 42 approaches the cavity 1 until it is hooked on the lower surface of the extension part 11, and the cavity cover 2 is tightly buckled with the cavity 1; when the locking cylinder 41 is retracted, the hook 42 is away from the cavity 1, so as to lift the cavity cover 2. The fixing seat 44 fits the side wall of the cavity cover 2, so the movement process of the hook 42 away from or close to the cavity 1 is fan-shaped, and the height of the hook 42 changes continuously, so the locking cylinder 41 is hinged to the hinge seat 43, reducing the rigidity of the connection between the locking cylinder 41 and the cavity cover 2 to adapt to the height change of the hook 42, so as to drive the hook end of the hook 42 to hook or move away from the lower surface of the extension part 11.

[0035] Specifically, the locking mechanism 4 also includes: a first link 45a, a second link 45b and a third link 45c; the first link 45a, the second link 45b, the third link 45c and the hook 42 are all located on the same side of the fixed seat 44, and are arranged parallel to the fixed seat 44; the first link 45a, the second link 45b, the third link 45c and the hook 42 are connected in sequence from top to bottom; one end of the first link 45a is hinged to the fixed seat 44, and the other end is hinged to one end of the second link 45b; one end of the third link 45c It is hinged at one end of the second link 45b away from the first link 45a, and the other end is hinged to the end of the fixing seat 44 away from the first link 45a; the hinges of the first link 45a and the third link 45c and the fixing seat 44 are located on the same vertical axis, and the hinge of the third link 45c and the second link 45b is located on the side of the vertical axis away from the locking cylinder 41; the hook 42 is connected to one end of the third link 45c away from the second link 45b, and the hook end of the hook 42 is located on the side of the third link 45c close to the locking cylinder 41. The hook 42 is movably connected to the fixed seat 44 through the first link 45a, the second link 45b and the third link 45c. One end of the first link 45a connected to the fixed seat 44 and one end of the third link 45c connected to the fixed seat 44 serve as connecting ends, which improves the connection stability of the hook 42. The hinge of the first link 45a and the second link 45b serves as a movable end. Moving the hinge of the first link 45a and the second link 45b can affect the movement of the hook 42.

[0036] Specifically, the locking cylinder 41 is connected to the hook 42 through the first connecting rod 45a, the second connecting rod 45b and the third connecting rod 45c; the output end of the locking cylinder 41 is connected to the hinge of the first connecting rod 45a and the second connecting rod 45b, and is used to drive the end of the second connecting rod 45b away from the hook 42 to reciprocate on both sides of the vertical axis. The hinge of the first connecting rod 45a and the second connecting rod 45b is located on the side of the vertical axis close to the locking cylinder 41, and the hook 42 and the extension part 11 are in a loose state; the hinge of the first connecting rod 45a and the second connecting rod 45b is located on the side of the vertical axis away from the locking cylinder 41, and the hook 42 and the extension part 11 are in a buckled state. The locking cylinder 41 drives the hinge of the first link 45a and the second link 45b to move to change the angle between the first link 45a and the second link 45b, so that the first link 45a and the second link 45b are in a bent or extended state, so as to lift or press down the end of the third link 45c close to the second link 45b. The third link 45c and the hook 42 use the hinge of the third link 45c and the fixed seat 44 as the lever center. Through the lever principle, the hook 42 is moved away from or close to the side where the cylinder is located, so that the hook 42 is in a loosened or locked state, thereby realizing the rapid and efficient opening and closing of the cavity cover 2 and the cavity body 1.

[0037] When the cavity cover 2 and the cavity body 1 of the present embodiment are in a loosened state, the angle between the first link 45a and the second link 45b is less than 180°, so that the first link 45a and the second link 45b are in a bent state, and the distance from the hinge of the first link 45a and the fixing seat 44 to the end of the third link 45c close to the second link 45b is less than the sum of the lengths of the first link 45a and the second link 45b, so that the end of the third link 45c close to the second link 45b is in an upward state due to the upward pulling force of the first link 45a and the second link 45b, and because the third link 45c is fixedly connected to the hook 42, the hinge of the third link and the fixing seat 44 forms a lever center, the end of the third link close to the second link 45b is upward, the hook 42 is pressed down, and the hook end of the hook 42 is away from the cavity 1; the cavity cover 2 and the cavity 1 are in a locked state, the angle between the first link 45a and the second link 45b reaches 180°, so that the first link 45a and the second link 45b are in an extended state, and the distance from the hinge of the first link 45a and the fixing seat 44 to the end of the third link 45c close to the second link 45b is equal to the sum of the lengths of the first link 45a and the second link 45b, so that the end of the third link 45c close to the second link 45b is pressed downward by the downward pressure of the first link 45a and the second link 45b, and because the third link 45c is fixedly connected to the hook 42, the hinge of the third rod and the fixing seat 44 forms a lever center, the end of the third rod close to the second link 45b is pressed downward, and the hook 42 is tilted upward, and the hook end of the hook 42 is hooked to the lower surface of the extension portion 11 of the cavity 1.

[0038] Specifically, the pull hook 42 includes: a connecting plate 421 and a hook plate 422; the connecting plate 421 and the hook plate 422 are arranged perpendicular to each other, one end of the connecting plate 421 is fixedly connected to an end of the third connecting rod 45c away from the second connecting rod 45b, and the other end is fixedly connected to the hook plate 422; the hook plate 422 is located on the side of the connecting plate 421 close to the locking cylinder 41. When the cavity cover 2 and the cavity 1 are in a loose state, the connecting plate 421 is in an inclined state, tilted from the fixing seat 44 to the side away from the locking cylinder 41, thereby causing the hook plate 422 to tilt from the connecting plate 421 to the side away from the locking cylinder 41, so that the hook plate 422 cannot hook the cavity 1; when the cavity cover 2 and the cavity 1 are in a locked state, the connecting plate 421 is in a vertical state or in a state of tilting from the fixing seat 44 to the side close to the locking cylinder 41, thereby causing the hook plate 422 to be in a horizontal state or in a state of tilting from the connecting plate 421 to the side close to the locking cylinder 41, so that the hook plate 422 hooks the extension portion 11.

[0039] Specifically, the third connecting rod 45c, the connecting plate 421 and the hook plate 422 are integrally formed. The integrated structure of the third connecting rod 45c, the connecting plate 421 and the hook plate 422 is stable and compact, which ensures the service life of the locking mechanism 4.

[0040] Specifically, the first connecting rod 45a and the third connecting rod 45c are respectively hinged to the fixing seat 44 through the pins, and the two ends of the second connecting rod 45b are respectively hinged to the first connecting rod 45a and the third connecting rod 45c through the pins; the output end of the locking cylinder 41 is connected to the pin at the hinge of the first connecting rod 45a and the second connecting rod 45b. One end of the first connecting rod 45a is connected to the fixing seat 44, and the other end forms a mutually resisting force with the output end of the locking cylinder 41, so that when the output end of the locking cylinder 41 is in the extended state, the second connecting rod 45b can press down the third connecting rod 45c. When the three pins on the first connecting rod 45a and the second connecting rod 45b are located on the same straight line, the first connecting rod 45a and the second connecting rod 45b are in the extended state, that is, at this time, the cavity cover 2 and the cavity body 1 are in the locked state.

[0041] Preferably, the locking cylinder 41 is connected to the pin at the hinge of the first connecting rod 45a and the second connecting rod 45b through a joint bearing 46; the joint bearing 46 includes: a sleeve 461 and a bearing portion 462; the sleeve 461 is sleeved on the output end of the locking cylinder 41 and fixedly connected to the output end of the locking cylinder 41; the bearing portion 462 is fixedly connected to the end of the sleeve 461 away from the locking cylinder 41, and the bearing portion 462 is sleeved on the pin at the hinge of the first connecting rod 45a and the second connecting rod 45b. The joint bearing 46 is a fisheye bearing, the sleeve 461 is hollow and cylindrical, the output end of the locking cylinder 41 is inserted into the sleeve 461, and the bearing portion 462 is a bearing with an inner hole to sleeve the pin. The output end of the locking cylinder 41 extends out to push the sleeve 461, and the sleeve 461 drives the bearing part 462 to move, and the bearing part 462 drives the pin shaft at the hinge of the first connecting rod 45a and the second connecting rod 45b to move, and the pin shaft at the hinge of the first connecting rod 45a and the second connecting rod 45b drives the end of the first connecting rod 45a and the second connecting rod 45b that is close to each other to move, and the end of the second connecting rod 45b close to the first connecting rod 45a drives the end of the second connecting rod 45b and the third connecting rod 45c that is close to each other to move, and the third connecting rod 45c drives the hook 42 to move.

[0042] Specifically, a connecting ear 411 is provided at one end of the locking cylinder 41 near the hinge seat 43, and a pin is passed through the connecting ear 411. The locking cylinder 41 is hinged to the hinge seat 43 through the pin. Under the drive of the locking cylinder 41, the pin at the hinge of the first connecting rod 45a and the second connecting rod 45b moves in a circle with the hinge of the first connecting rod 45a and the fixed seat 44 as the center, so that the height of the pin at the hinge of the first connecting rod 45a and the second connecting rod 45b is variable. The locking cylinder 41 rotates with the pin connected to the hinge seat as the center, so that the height of the locking cylinder 41 and the output end of the locking cylinder 41 can change with the height of the pin at the hinge of the first connecting rod 45a and the second connecting rod 45b.

[0043] Specifically, the hinge seat 43 includes: a support 431 and a support arm 432; the support arm 432 is horizontally arranged and fixedly connected to a side of the support 431 close to the fixed seat 44; the support arm 432 is provided with an axial hole, which is arranged at one end of the support arm 432 close to the fixed seat 44; the pin in the connecting ear 411 is inserted into the axial hole. The support arm 432 protrudes from the support 431 to facilitate the flexible rotation of the locking cylinder 41.

[0044] Preferably, there are two fixing seats 44, which are symmetrically arranged with each other; the first connecting rod 45a, the second connecting rod 45b and the third connecting rod 45c are located between the two fixing seats 44. The two fixing seats 44 support the two ends of the pins connected to the first connecting rod 45a, the second connecting rod 45b and the third connecting rod 45c, so that the forces are balanced and not easy to bend.

[0045] Specifically, the lifting mechanism 3 includes: a support plate 31, a moving block 32 and a lifting drive 33; the support plate 31 is used to be fixedly connected to the external bracket, the moving block 32 is fixedly connected to the side of the chamber cover 2 away from the chamber 1, the lifting drive 33 is connected to the support plate 31, and the output end of the lifting drive 33 is arranged through the support plate 31 and connected to the moving block 32. The lifting drive 33 is used to drive the moving block 32 to perform an up and down movement, so that the moving block 32 drives the chamber cover 2 to move up and down; the chamber cover 2 avoids moving in the horizontal direction, prevents the chamber cover 2 from having a horizontal spacing with the chamber 1 and forming a gap, and ensures that the chamber cover 2 can seal and cover the chamber 1.

[0046] In this embodiment, the lifting drive member 33 is a cylinder. It is understandable that in other embodiments, a hydraulic cylinder, an electric cylinder or other drive members can be used to replace the cylinder according to actual needs.

[0047] Preferably, there is one lifting mechanism 3 located at the center of the cavity cover 2; there are four locking mechanisms 4, which are distributed on the cavity cover 2 in a rectangular shape with the lifting mechanism 3 as the center. The four locking mechanisms 4 are evenly distributed around the cavity cover 2, locking the cavity cover 2 and the cavity 1 around, thereby ensuring the sealing of the internal space of the cavity 1.

[0048] Specifically, it also includes: a first water pipe 5a and a second water pipe 5b; the first water pipe 5a is bent and coiled around the side wall of the cavity cover 2 and the side away from the cavity 1; the second water pipe 5b is bent and coiled around the side wall of the cavity 1 and the side away from the cavity cover 2. The first water pipe 5a and the second water pipe 5b are both provided with a water outlet and a water inlet, and the surface of the cavity cover 2 and the cavity 1 is quickly cooled by the flowing cold water. At the same time, the first water pipe 5a is arranged around the locking mechanism 4 and the lifting mechanism 3 to prevent the high temperature of the cavity cover 2 from damaging the locking drive member and the lifting drive member 33, and can cool and dissipate the heat for the locking drive member and the lifting drive member 33.

[0049] Specifically, the side of the cavity cover 2 close to the cavity 1 is provided with an annular groove and a concave cavity (not shown in the figure), and the extension 11 is provided with a sealing ring corresponding to the annular groove. When the cavity cover 2 covers the opening side of the cavity 1, the sealing ring is embedded in the annular groove, and the upper surface of the extension 11 fits the bottom of the cavity cover 2; the inner space of the concave cavity and the cavity 1 forms a sealed chamber, making it difficult for gas to escape from the connection between the cavity cover 2 and the cavity 1, avoiding external gas from entering the sealed chamber, ensuring the safety of semiconductor welding, saving the amount of gas to be filled, and reducing welding costs.

[0050] Specifically, it also includes: a hydrogen pipe 6a, a nitrogen pipe 6b, an exhaust pipe 6c and a vacuum pipe (not marked in the figure); one end of the hydrogen pipe 6a, the nitrogen pipe 6b, the exhaust pipe 6c and the vacuum pipe is connected to the inside of the cavity 1, and the edge is sealed and connected to the side of the cavity 1 away from the cavity cover 2. The hydrogen pipe 6a, the nitrogen pipe 6b, the exhaust pipe 6c and the vacuum pipe are used as joints fixed on the cavity 1, which facilitates the direct sealing connection of the external hydrogen, nitrogen, exhaust gas and vacuum pipes, and there is no need to frequently penetrate the pipes into the cavity 1 and perform sealing operations with the cavity 1, thereby avoiding damage to the cavity 1, ensuring the sealing of the cavity 1, and improving the convenience of using the split semiconductor welding furnace body.

[0051] A split semiconductor welding furnace body of the present embodiment is provided with a lifting mechanism, so that the cavity cover arranged opposite to the cavity moves in the vertical direction, thereby realizing the split setting of the cavity cover and the cavity, facilitating the maintenance, inspection and replacement of the cavity or the cavity cover, and facilitating the complete opening side of the cavity for convenient material placement and maintenance of the internal structure of the cavity, and the cavity cover only performs lifting actions, thereby ensuring that the cavity cover is always arranged opposite to the cavity during the movement, avoiding the formation of a gap due to a horizontal distance between the cavity cover and the cavity, and ensuring the sealing of the cavity covered by the cavity; the lifting mechanism and the locking mechanism are used to realize the automatic locking and separation of the cavity cover and the cavity, avoiding burns to personnel caused by manual operation, and improving the opening and closing efficiency of the cavity cover.

[0052] The above examples are only used to further illustrate the technical content of the utility model, so that readers can understand it more easily, but it does not mean that the implementation methods of the utility model are limited to this. Any technical extension or re-creation made based on the utility model is protected by the utility model. The protection scope of the utility model shall be based on the claims.

Claims

1. A split type semiconductor welding furnace body, characterized in that: include: Cavity, cavity cover, lifting mechanism and locking mechanism; The top of the cavity is open, and the cavity cover is located directly above the cavity; The lifting mechanism is connected to a side of the cavity cover away from the cavity, and is used to drive the cavity cover to move up and down to move away from or closer to the cavity; The locking mechanism is connected to the cavity cover; An extension portion is protruding from the top of the side wall of the cavity; the upper surface of the extension portion is arranged in contact with the lower surface of the cavity cover; the locking mechanism includes: a locking cylinder and a hook; the locking cylinder drives the hook end of the hook to move away from or hook the lower surface of the extension portion.

2. The split type semiconductor welding furnace body according to claim 1, characterized in that: The locking mechanism also includes: a hinge seat and a fixed seat; the hinge seat is connected to the side of the cavity cover away from the cavity body, and the fixed seat is vertically arranged and connected to the side wall of the cavity cover; the hinge seat is located between the two ends of the fixed seat; the pull hook is movably connected to the fixed seat, the output end of the locking cylinder is connected to the pull hook, and the other end is hinged to the hinge seat.

3. The split type semiconductor welding furnace body according to claim 2, characterized in that: The locking mechanism also includes: a first connecting rod, a second connecting rod and a third connecting rod; the first connecting rod, the second connecting rod, the third connecting rod and the hook are all located on the same side of the fixing seat and are arranged parallel to the fixing seat; the first connecting rod, the second connecting rod, the third connecting rod and the hook are connected in sequence from top to bottom; one end of the first connecting rod is hinged to the fixing seat, and the other end is hinged to one end of the second connecting rod; one end of the third connecting rod is hinged to an end of the second connecting rod away from the first connecting rod, and the other end is hinged to an end of the fixing seat away from the first connecting rod; the hinges of the first connecting rod and the third connecting rod and the fixing seat are located on the same vertical axis, and the hinges of the third connecting rod and the second connecting rod are located on the side of the vertical axis away from the locking cylinder; the hook is connected to an end of the third connecting rod away from the second connecting rod, and the hooking end of the hook is located on a side of the third connecting rod close to the locking cylinder.

4. The split type semiconductor welding furnace body according to claim 3, characterized in that: The locking cylinder is connected to the hook through the first connecting rod, the second connecting rod and the third connecting rod; the output end of the locking cylinder is connected to the hinge of the first connecting rod and the second connecting rod, and is used to drive the end of the second connecting rod away from the hook to reciprocate on both sides of the vertical axis.

5. The split type semiconductor welding furnace body according to claim 4, characterized in that: The pull hook includes: a connecting plate and a hook plate; the connecting plate and the hook plate are arranged perpendicular to each other, one end of the connecting plate is fixedly connected to the end of the third connecting rod away from the second connecting rod, and the other end is fixedly connected to the hook plate; the hook plate is located on the side of the connecting plate close to the locking cylinder.

6. The split type semiconductor welding furnace body according to claim 1, characterized in that: The lifting mechanism includes: a support plate, a moving block and a lifting drive member; the support plate is used to be fixedly connected to an external bracket, the moving block is fixedly connected to a side of the cavity cover away from the cavity, the lifting drive member is connected to the support plate, and the output end of the lifting drive member is arranged through the support plate and connected to the moving block.

7. The split type semiconductor welding furnace body according to claim 1, characterized in that: There is one lifting mechanism located at the center of the cavity cover; there are four locking mechanisms distributed on the cavity cover in a rectangular shape with the lifting mechanism as the center.

8. The split type semiconductor welding furnace body according to claim 1, characterized in that: Also includes: A first water pipe and a second water pipe; the first water pipe is bent and coiled around the side wall of the cavity cover and a side away from the cavity; the second water pipe is bent and coiled around the side wall of the cavity and a side away from the cavity cover.

9. The split type semiconductor welding furnace body according to claim 1, characterized in that: An annular groove and a concave cavity are provided on one side of the cavity cover close to the cavity body, and a sealing ring corresponding to the annular groove is provided on the extension portion.

10. The split type semiconductor welding furnace body according to claim 1, characterized in that: It also includes: a hydrogen pipe, a nitrogen pipe, an exhaust pipe and a vacuum pipe; one end of the hydrogen pipe, the nitrogen pipe, the exhaust pipe and the vacuum pipe is connected to the inside of the cavity, and the edge is sealed and connected to the side of the cavity away from the cavity cover.

Images