Bonding head driving device and bonding device

Abstract

The utility model provides a bonding head driving device and a bonding device. The bonding head driving device comprises a rack, a first damping mechanism, a second damping mechanism, a first translation mechanism and a second translation mechanism. The first translation mechanism comprises a first sliding rail, a first driving module, a first sliding seat and a second sliding rail, the first sliding rail is arranged in the first horizontal direction, the first sliding seat is connected to the first sliding rail, the first driving module is arranged on the first vibration reduction mechanism and connected with the first sliding seat, and the second sliding rail is arranged on the first sliding seat in the second horizontal direction. The second translation mechanism comprises a third sliding rail, a second driving module, a second sliding seat and a fourth sliding rail, the third sliding rail is arranged in the second horizontal direction, the second sliding seat is connected to the third sliding rail, the second driving module is arranged on the second vibration reduction mechanism and connected with the second sliding seat, and the fourth sliding rail is arranged on the second sliding seat in the first horizontal direction. The second slide rail and the fourth slide rail are slidably connected with the bonding head. The vibration of the bonding head can be reduced, and the bonding precision is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor packaging, and in particular to a bonding head driving device and a bonding device. Background Art

[0002] In the semiconductor device packaging process, a bonding machine is required to bond consumables, such as aluminum wire, to the workpiece.

[0003] The bonding machine mainly includes a bonding head and a bonding head driving device. The bonding head driving device drives the bonding head to move horizontally to drive the bonding head to perform the bonding action. Due to the large mass of the bonding head, the structural characteristics of the equipment and the vibration of the driving motor, the bonding head resonance is inevitable when the bonding head driving device drives the bonding head to move horizontally. The existing bonding head driving device lacks a vibration reduction mechanism, and the vibration amplitude of the bonding head is too large, which seriously affects the bonding accuracy of the bonding head. Utility Model Content

[0004] In order to solve the above technical problems existing in the existing bond head driving device, the present application provides a bond head driving device, and its specific technical solution is as follows:

[0005] A bonding head driving device comprises a frame, a first vibration reduction mechanism, a second vibration reduction mechanism, a first translation mechanism and a second translation mechanism, wherein:

[0006] The first vibration reduction mechanism is arranged on the frame;

[0007] The first translation mechanism includes a first slide rail, a first driving module, a first sliding seat and a second slide rail, wherein the first slide rail is arranged on the frame along a first horizontal direction, the first sliding seat is slidably connected to the first slide rail, the fixed component of the first driving module is arranged on the first vibration reduction mechanism, the movable component of the first driving module is connected to the first sliding seat, the first driving module is used to drive the first sliding seat to slide along the first slide rail, the second slide rail is arranged on the first sliding seat along a second horizontal direction perpendicular to the first horizontal direction, and the second slide rail is used to slidably connect the bonding head;

[0008] The second vibration reduction mechanism is arranged on the frame;

[0009] The second translation mechanism includes a third slide rail, a second drive module, a second sliding seat and a fourth slide rail, wherein the third slide rail is arranged on the frame along the second horizontal direction, the second sliding seat is slidably connected to the third slide rail, the fixed part of the second drive module is arranged on the second vibration damping mechanism, the movable part of the second drive module is connected to the second sliding seat, the second drive module is used to drive the second sliding seat to slide along the third slide rail, the fourth slide rail is arranged on the second sliding seat along the first horizontal direction, and the fourth slide rail is used to slide and connect the bonding head.

[0010] The bond head driving device provided by the present application is provided with a first vibration reduction mechanism and a second vibration reduction mechanism. The vibration generated when the first driving module drives the first sliding seat to slide in the first horizontal direction is reduced by the first vibration reduction mechanism, and the vibration generated when the second driving module drives the second sliding seat to slide in the second horizontal direction is reduced by the second vibration reduction mechanism. The bond head driving device of the present application is used to implement translational driving of the bond head, which can reduce the vibration of the bond head and ultimately improve the bonding accuracy of the bond head.

[0011] In some embodiments, the first vibration damping mechanism includes a fifth slide rail, a first mounting seat and a first magnetic damping assembly, wherein: the fifth slide rail is arranged on the frame along the first horizontal direction; the first mounting seat is slidably connected to the fifth slide rail, and the fixed component of the first driving module is fixedly mounted on the first mounting seat; the first magnetic damping assembly includes a first magnetic seat and a first magnetic core, wherein the first magnetic seat is fixedly mounted on the frame and located on the first side of the first mounting seat, the first magnetic seat has a first magnetic field, the first magnetic core is fixedly connected to the first side wall of the first mounting seat and is located in the first magnetic field; when the first mounting seat slides along the fifth slide rail, the first magnetic damping assembly generates a damping force opposite to the sliding direction of the first mounting seat.

[0012] When the first driving module drives the first sliding seat to slide along the first slide rail, the movable part of the first driving module applies a reaction force to the fixed part of the first driving module, and the fixed part of the first driving module and the first mounting seat slide in the opposite direction along the fifth slide rail under the push of the reaction force. At the same time, the first magnetic core slides in the opposite direction synchronously with the first mounting seat, and cuts the first magnetic field in the first magnetic seat, so that the first magnetic damping component generates a damping force opposite to the sliding direction of the first mounting seat, thereby offsetting the force of the first sliding seat on the frame, and finally reducing the vibration of the equipment.

[0013] In some embodiments, a first damping channel for the first magnetic core to pass through is formed in the first magnetic seat, and the first magnetic field is formed in the first damping channel; the first magnetic core is configured to move in the first damping channel along the direction of the magnetic flux lines cutting the first magnetic field to generate eddy currents.

[0014] When the first magnetic core slides synchronously in the opposite direction with the first mounting seat, it travels in the first damping channel and moves along the direction of the magnetic flux lines that cut the first magnetic field, thereby generating eddy currents. According to Lenz's law, the magnetic field generated by the eddy currents always hinders the movement of the first magnetic core in the magnetic field, thereby generating a damping force opposite to the sliding direction of the first mounting seat.

[0015] In some embodiments, the first vibration reduction mechanism further includes a first counterweight block connected to the second side wall of the first mounting seat.

[0016] Since the first magnetic core is connected to the first side wall of the first mounting seat, the first counterweight block is arranged on the second side wall of the first mounting seat so that the side walls of the first mounting seat are subjected to stable force, thereby improving the sliding stability of the first mounting seat and further reducing the vibration caused by the movement of the first sliding seat.

[0017] In some embodiments, the first driving module includes a first motor, wherein a stator of the first motor is fixedly mounted on a first mounting seat, and a mover of the first motor is fixedly mounted on a first sliding seat.

[0018] A first driving module with a simple structure and quick response is provided, which can implement stable driving of the first sliding seat.

[0019] In some embodiments, the bonding head driving device further includes a first displacement measuring assembly, and the first displacement measuring assembly includes a first grating scale disposed on a first mounting seat and a first reading head disposed on a first sliding seat.

[0020] The first grating ruler and the first reading head cooperate with each other to accurately measure the movement stroke of the first sliding seat in the first horizontal direction, thereby ensuring that the first driving module can accurately control the movement stroke of the first sliding seat in the first horizontal direction.

[0021] In some embodiments, the second vibration damping mechanism includes a sixth slide rail, a second mounting seat and a second magnetic damping assembly, wherein: the sixth slide rail is arranged on the frame along the second horizontal direction; the second mounting seat is slidably connected to the sixth slide rail, and the fixed component of the second driving module is fixedly mounted on the second mounting seat; the second magnetic damping assembly includes a second magnetic seat and a second magnetic core, wherein the second magnetic seat is fixedly mounted on the frame and located on the first side of the second mounting seat, the second magnetic seat has a second magnetic field, the second magnetic core is fixedly connected to the first side wall of the second mounting seat and is located in the second magnetic field; when the second mounting seat slides along the sixth slide rail, the second magnetic damping assembly generates a damping force opposite to the sliding direction of the second mounting seat.

[0022] When the second driving module drives the second sliding seat to slide along the third slide rail, the movable part of the second driving module applies a reaction force to the fixed part of the second driving module, and the fixed part of the second driving module and the second mounting seat move in the opposite direction along the sixth slide rail under the push of the reaction force. When the second magnetic core moves in the opposite direction synchronously with the second mounting seat, it cuts the second magnetic field in the second magnetic seat, so that the second magnetic damping component generates a damping force opposite to the sliding direction of the second mounting seat, which can offset the force of the second sliding seat on the frame, and finally reduce the vibration of the equipment.

[0023] In some embodiments, a second damping channel for the second magnetic core to pass through is formed in the second magnetic seat, and the second magnetic field is formed in the second damping channel; the second magnetic core package is configured to move in the second damping channel along the direction of the magnetic flux lines cutting the second magnetic field to generate eddy currents.

[0024] In some embodiments, the second vibration reduction mechanism further includes a second counterweight block, and two second counterweight blocks are respectively fixedly connected to two ends of the second magnetic core.

[0025] By configuring the second counterweight blocks at both ends of the second magnetic core, the stability of the second magnetic core during movement can be improved.

[0026] In some embodiments, the second driving module includes a second motor, wherein a stator of the second motor is fixedly mounted on a second mounting seat, and a mover of the second motor is fixedly mounted on a second sliding seat.

[0027] A second driving module with a simple structure and quick response is provided, which can implement stable driving of the second sliding seat.

[0028] In some embodiments, the bonding head driving device further includes a second displacement measuring assembly, and the second displacement measuring assembly includes a second grating scale disposed on a second mounting seat and a second reading head disposed on a second sliding seat.

[0029] By providing the second displacement measurement component, accurate measurement of the sliding movement of the second sliding seat is achieved, thereby ensuring that the second driving module can implement accurate driving of the movement of the second sliding seat in the second horizontal direction.

[0030] The present application also provides a bonding device, which includes a bonding head driving device and a bonding head as described in any of the above items, wherein: the bond head is slidably connected to the second slide rail and the fourth slide rail; when the first driving module drives the first sliding seat to slide along the first slide rail, the bond head slides in the first horizontal direction along the fourth slide rail; when the second driving module drives the second sliding seat to slide along the third slide rail, the bond head slides in the second horizontal direction along the second slide rail.

[0031] In the bonding device of the embodiment of the present application, the bonding head driving device can drive the bonding head to move in the first horizontal direction and the second horizontal direction, so as to flexibly adjust the horizontal position of the bonding head. In addition, during the driving process, the bonding head driving device can effectively reduce the vibration of the bonding head, and finally improve the bonding accuracy of the bonding head. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic structural diagram of a bonding head in an embodiment of the present application at a first viewing angle;

[0033] Figure 2is a schematic structural diagram of a bonding head in an embodiment of the present application at a second viewing angle;

[0034] Figure 3 is a schematic structural diagram of a bonding head in an embodiment of the present application at a third viewing angle;

[0035] Figure 4 is a schematic structural diagram of a bonding head in an embodiment of the present application at a fourth viewing angle;

[0036] Figure 5 It is a schematic structural diagram of the first vibration reduction mechanism and the first translation mechanism in an embodiment of the present application at one viewing angle;

[0037] Figure 6 It is a schematic structural diagram of the first vibration reduction mechanism and the first translation mechanism in the embodiment of the present application from another perspective;

[0038] Figure 7 Schematic diagram of the structure of the first vibration reduction mechanism and the second translation mechanism in an embodiment of the present application at a viewing angle.

[0039] Figures 1 to 7 Included:

[0040] Rack 1;

[0041] The first vibration reduction mechanism 2 includes a fifth slide rail 21, a first mounting seat 22, a first magnetic damping assembly 23, a first magnetic seat 231, a first magnetic core 232, and a first counterweight 24;

[0042] The second vibration reduction mechanism 3 includes a sixth slide rail 31 , a second mounting seat 32 , a second magnetic damping assembly 33 , a second magnetic seat 331 , a second magnetic core 332 , and a second counterweight 34 ;

[0043] The first translation mechanism 4 includes a first slide rail 41, a first driving module 42, a first sliding seat 43, a second slide rail 44, a stator 421 of a first motor, and a mover 422 of the first motor;

[0044] The second translation mechanism 5 includes a third slide rail 51 , a second driving module 52 , a second sliding seat 53 , a fourth slide rail 54 , a stator 521 of a second motor, and a mover 522 of a second motor.

[0045] First displacement measuring component 6

[0046] Second displacement measuring component 7. DETAILED DESCRIPTION

[0047] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0048] like Figures 1 to 7 As shown, the bonding head driving device in the embodiment of the present application includes a frame 1, a first vibration reduction mechanism 2, a second vibration reduction mechanism 3, a first translation mechanism 4 and a second translation mechanism 5, wherein:

[0049] The first vibration reduction mechanism 2 is arranged on the frame 1 .

[0050] The first translation mechanism 4 includes a first slide rail 41, a first drive module 42, a first sliding seat 43 and a second slide rail 44, wherein the first slide rail 41 is arranged on the frame 1 along a first horizontal direction (for example, the X-axis direction in the figure), the first sliding seat 43 is slidably connected to the first slide rail 41, the fixed part of the first drive module 42 is arranged on the first vibration damping mechanism 2, the movable part of the first drive module 42 is connected to the first sliding seat 43, the first drive module 42 is used to drive the first sliding seat 43 to slide along the first slide rail 41, the second slide rail 44 is arranged on the first sliding seat 43 along a second horizontal direction perpendicular to the first horizontal direction (for example, the Y-axis direction in the figure), and the second slide rail 44 is used for sliding connection of the bonding head.

[0051] The second vibration reduction mechanism 3 is arranged on the frame 1 .

[0052] The second translation mechanism 5 includes a third slide rail 51, a second drive module 52, a second sliding seat 53 and a fourth slide rail 54, wherein the third slide rail 51 is arranged on the frame 1 along the second horizontal direction, the second sliding seat 53 is slidably connected to the third slide rail 51, the fixed part of the second drive module 52 is arranged on the second vibration damping mechanism 3, the movable part of the second drive module 52 is connected to the second sliding seat 53, the second drive module 52 is used to drive the second sliding seat 53 to slide along the third slide rail 51, the fourth slide rail 54 is arranged on the second sliding seat 53 along the first horizontal direction, and the fourth slide rail 54 is used for sliding connection of the bonding head.

[0053] Since the bond head is slidably connected to the second slide rail 44 and the fourth slide rail 54 at the same time. When the first driving module 42 drives the first sliding seat 43 to slide along the first slide rail 41 in the first horizontal direction, the bond head slides along the fourth slide rail 54 driven by the first sliding seat 43, thereby realizing position adjustment in the first horizontal direction. When the second driving module 52 drives the second sliding seat 53 to slide along the third slide rail 51 in the second horizontal direction, the bond head slides along the second slide rail 44 driven by the second sliding seat 53, thereby realizing position adjustment in the second horizontal direction. That is, the bond head driving device in the embodiment of the present application can drive the bond head to translate along the first horizontal direction and the second horizontal direction, thereby realizing flexible adjustment of the position of the bond head on the horizontal plane.

[0054] In particular, since the fixing part of the first driving module 42 is arranged on the first vibration reduction mechanism 2, the vibration generated when the first driving module 42 drives the first sliding seat 43 to slide in the first horizontal direction is reduced by the first vibration reduction mechanism 2. Since the fixing part of the second driving module 52 is arranged on the second vibration reduction mechanism 3, the vibration generated when the second driving module 52 drives the second sliding seat 53 to slide in the second horizontal direction is reduced by the second vibration reduction mechanism 3. In addition, the first vibration reduction mechanism 2 and the second vibration reduction mechanism 3 also play a role in delaying the contact time between the first driving module 42 and the second driving module 52 and the equipment frame, thereby reducing the impact force of the first driving module 42 and the second driving module 52 on the equipment frame. The bond head driving device of the embodiment of the present application is used to implement the translational drive of the bond head, which can reduce the vibration of the bond head and ultimately improve the bonding accuracy of the bond head.

[0055] like Figure 5 As shown, optionally, the first vibration reduction mechanism 2 includes a fifth slide rail 21, a first mounting seat 22 and a first magnetic damping assembly 23, wherein: the fifth slide rail 21 is arranged on the frame 1 along the first horizontal direction. The first mounting seat 22 is slidably connected to the fifth slide rail 21, and the fixed component of the first driving module 42 is fixedly mounted on the first mounting seat 22. The first magnetic damping assembly 23 includes a first magnetic seat 231 and a first magnetic core 232, wherein the first magnetic seat 231 is fixedly mounted on the frame 1 and is located on the first side of the first mounting seat 22, the first magnetic seat 231 has a first magnetic field, and the first magnetic core 232 is fixedly connected to the first side wall of the first mounting seat 22 and is located in the first magnetic field. When the first mounting seat 22 slides along the fifth slide rail 21, the first magnetic damping assembly 23 generates a damping force opposite to the sliding direction of the first mounting seat 22.

[0056] When the first driving module 42 drives the first sliding seat 43 to slide along the first slide rail 41, the movable part of the first driving module 42 applies a reaction force to the fixed part of the first driving module 42, and the fixed part of the first driving module 42 and the first mounting seat 22 slide in the opposite direction along the fifth slide rail 21 under the push of the reaction force. At the same time, the first magnetic core 232 slides in the opposite direction synchronously with the first mounting seat 22, and cuts the first magnetic field in the first magnetic seat 231, so that the first magnetic damping assembly 23 generates a damping force opposite to the sliding direction of the first mounting seat 22, thereby offsetting the force of the first sliding seat on the frame, and finally reducing the vibration of the equipment.

[0057] like Figure 5As shown, optionally, the first driving module 42 includes a first motor, wherein a stator 421 of the first motor is fixedly mounted on the first mounting seat 22, and a mover 422 of the first motor is fixedly mounted on the first sliding seat 43. That is, the stator 421 of the first motor constitutes a fixed part of the first driving module 42, and the mover 422 of the first motor constitutes a movable part of the first driving module 42.

[0058] Optionally, a first damping channel for the first magnetic core 232 to pass through is formed in the first magnetic seat 231, and the first magnetic field is formed in the first damping channel. The first magnetic core 232 is configured to move in the first damping channel along the direction of the magnetic flux lines cutting the first magnetic field to generate eddy currents.

[0059] When the first magnetic core 232 slides in the opposite direction synchronously with the first mounting seat 22, it travels in the first damping channel and moves along the direction of the magnetic flux lines that cut the first magnetic field, thereby generating eddy currents. According to Lenz's law, the magnetic field generated by the eddy currents always hinders the movement of the first magnetic core 232 in the magnetic field, thereby generating a damping force opposite to the sliding direction of the first mounting seat 22.

[0060] like Figure 5 and Figure 6 As shown, optionally, the first vibration reduction mechanism 2 further includes a first counterweight block 24 , and the first counterweight block 24 is connected to the second side wall of the first mounting seat 22 .

[0061] Since the first magnetic core 232 is connected to the first side wall of the first mounting seat 22, the first counterweight 24 is arranged on the second side wall of the first mounting seat 22 so that the side walls of the first mounting seat 22 are subjected to stable force, thereby improving the sliding stability of the first mounting seat 22 and further reducing the vibration of the first sliding seat 43.

[0062] Optionally, the bonding head driving device in the embodiment of the present application further includes a first displacement measuring component 6 , and the first displacement measuring component 6 includes a first grating scale arranged on the first mounting seat 22 and a first reading head arranged on the first sliding seat 43 .

[0063] The first grating ruler and the first reading head cooperate with each other to achieve accurate measurement of the movement stroke of the first sliding seat 43 in the first horizontal direction, thereby ensuring that the first driving module 42 can implement accurate control of the movement stroke of the first sliding seat 43 in the first horizontal direction.

[0064] like Figure 7As shown, optionally, the second vibration reduction mechanism 3 includes a sixth slide rail 31, a second mounting seat 32 and a second magnetic damping assembly 33, wherein: the sixth slide rail 31 is arranged on the frame 1 along the second horizontal direction. The second mounting seat 32 is slidably connected to the sixth slide rail 31, and the fixing component of the second driving module 5 is fixedly mounted on the second mounting seat 32. The second magnetic damping assembly 33 includes a second magnetic seat 331 and a second magnetic core 332, wherein the second magnetic seat 331 is fixedly mounted on the frame 1 and is located on the first side of the second mounting seat 32, the second magnetic seat 331 has a second magnetic field, and the second magnetic core 332 is fixedly connected to the first side wall of the second mounting seat 32 and is located in the second magnetic field. When the second mounting seat 32 slides along the sixth slide rail 31, the second magnetic damping assembly 33 generates a damping force opposite to the sliding direction of the second mounting seat 32.

[0065] When the second driving module 52 drives the second sliding seat 53 to slide along the third slide rail 51, the movable part of the second driving module 52 applies a reaction force to the fixed part of the second driving module 52, and the fixed part of the second driving module 52 and the second mounting seat 32 slide in the opposite direction along the sixth slide rail 31 under the push of the reaction force. At the same time, the second magnetic core 332 slides in the opposite direction synchronously with the second mounting seat 32, and cuts the second magnetic field in the second magnetic seat 331, so that the second magnetic damping assembly 33 generates a damping force in the opposite direction of the sliding direction of the second mounting seat 32, which can offset the force of the second sliding seat on the frame, and finally reduce the vibration of the equipment.

[0066] like Figure 7 As shown, optionally, the second driving module 52 includes a second motor, wherein a stator 521 of the second motor is fixedly mounted on the second mounting seat 32, and a mover 522 of the second motor is fixedly mounted on the second sliding seat 53. That is, the stator 521 of the second motor constitutes a fixed part of the second driving module 52, and the mover 522 of the second motor constitutes a movable part of the second driving module 52.

[0067] Optionally, a second damping channel for the second magnetic core 332 to pass through is formed in the second magnetic seat 331, and the second magnetic field is formed in the second damping channel. The second magnetic core 332 is configured to move in the first damping channel along the direction of the magnetic flux lines cutting the first magnetic field to generate eddy currents.

[0068] When the second magnetic core 332 slides synchronously in the opposite direction with the second mounting seat 32, it travels in the second damping channel and moves along the direction of the magnetic flux lines that cut the second magnetic field, thereby generating eddy currents. According to Lenz's law, the magnetic field generated by the eddy currents always hinders the movement of the second magnetic core 332 in the magnetic field, thereby generating a damping force opposite to the sliding direction of the second mounting seat 32.

[0069] Specifically, the first magnetic core 232 and the second magnetic core 332 can be made of antimagnetic materials such as copper and silver. In addition, the eddy current generated by the first magnetic core 232 will eventually be converted into the internal energy of the first magnetic core 232, thereby also consuming a portion of the kinetic energy of the first mounting base 22; the eddy current generated by the second magnetic core 332 will eventually be converted into the internal energy of the second magnetic core 332, thereby also consuming a portion of the kinetic energy of the second mounting base 32. Secondly, the damping force generated by the first magnetic core 232 and the second magnetic core 332 can suppress the peak value of the equipment vibration and reduce the force transmitted to the equipment frame by the first drive module 42 and the second drive module 52.

[0070] Continue to refer Figure 7 As shown, optionally, the second vibration reduction mechanism 3 further includes a second counterweight block 34, and two second counterweight blocks 34 are respectively fixedly connected to the two ends of the second magnetic core 332. By configuring the second counterweight blocks 34 at the two ends of the second magnetic core 332, the stability of the second magnetic core 332 during movement can be improved.

[0071] Optionally, the bonding head driving device in the embodiment of the present application further includes a second displacement measuring assembly 7 , and the second displacement measuring assembly 7 includes a second grating scale arranged on the second mounting seat 32 and a second reading head arranged on the second sliding seat 53 .

[0072] The second grating ruler and the second reading head cooperate with each other to achieve accurate measurement of the movement stroke of the second sliding seat 53 in the first horizontal direction, thereby ensuring that the first driving module 42 can implement accurate control of the movement stroke of the first sliding seat 43 in the first horizontal direction.

[0073] The embodiment of the present application further provides a bonding device, which includes a bonding head driving device and a bonding head of any of the above embodiments, wherein: the bonding head is slidably connected to the second slide rail 44 and the fourth slide rail 54. When the first driving module 42 drives the first sliding seat 43 to slide along the first slide rail 41, the bonding head slides in the first horizontal direction along the fourth slide rail 54. When the second driving module 52 drives the second sliding seat 53 to slide along the third slide rail 51, the bonding head slides in the second horizontal direction along the second slide rail 44.

[0074] In the bonding device of the embodiment of the present application, the bonding head driving device can drive the bonding head to move in the first horizontal direction and the second horizontal direction, so as to flexibly adjust the position of the bonding head on the horizontal plane. In addition, during the driving process, the bonding head driving device can effectively reduce the vibration of the bonding head, and finally improve the bonding accuracy of the bonding head.

[0075] The above description of the present application is sufficiently detailed and has certain particularities. Those skilled in the art should understand that the description in the embodiments is merely exemplary, and all changes made without departing from the true spirit and scope of the present application should fall within the scope of protection of the present application. The scope of protection claimed in the present application is defined by the claims, not by the above description in the embodiments. Moreover, the embodiments mentioned in the present application are not limited to being implemented individually, and some embodiments can also be implemented in combination.

Claims

1. A bonding head driving device, characterized in that: The bonding head driving device comprises a frame, a first vibration reduction mechanism, a second vibration reduction mechanism, a first translation mechanism and a second translation mechanism, wherein: The first vibration reduction mechanism is arranged on the frame; The first translation mechanism comprises a first slide rail, a first driving module, a first sliding seat and a second slide rail, wherein the first slide rail is arranged on the frame along a first horizontal direction, the first sliding seat is slidably connected to the first slide rail, the fixed component of the first driving module is arranged on the first vibration reduction mechanism, the movable component of the first driving module is connected to the first sliding seat, the first driving module is used to drive the first sliding seat to slide along the first slide rail, the second slide rail is arranged on the first sliding seat along a second horizontal direction perpendicular to the first horizontal direction, and the second slide rail is used to slidably connect the bonding head; The second vibration reduction mechanism is arranged on the frame; The second translation mechanism includes a third slide rail, a second drive module, a second sliding seat and a fourth slide rail, wherein the third slide rail is arranged on the frame along the second horizontal direction, the second sliding seat is slidably connected to the third slide rail, the fixed part of the second drive module is arranged on the second vibration damping mechanism, the movable part of the second drive module is connected to the second sliding seat, the second drive module is used to drive the second sliding seat to slide along the third slide rail, the fourth slide rail is arranged on the second sliding seat along the first horizontal direction, and the fourth slide rail is used to slidably connect the bonding head.

2. The bonding head driving device according to claim 1, characterized in that: The first vibration reduction mechanism includes a fifth slide rail, a first mounting seat and a first magnetic damping assembly, wherein: The fifth slide rail is arranged on the frame along the first horizontal direction; The first mounting seat is slidably connected to the fifth slide rail, and the fixing component of the first driving module is fixedly installed on the first mounting seat; The first magnetic damping assembly includes a first magnetic seat and a first magnetic core, wherein the first magnetic seat is fixedly mounted on the frame and located on a first side of the first mounting seat, the first magnetic seat has a first magnetic field, and the first magnetic core is fixedly connected to a first side wall of the first mounting seat and is located in the first magnetic field; When the first mounting seat slides along the fifth slide rail, the first magnetic damping component generates a damping force opposite to the sliding direction of the first mounting seat.

3. The bonding head driving device according to claim 2, wherein: A first damping channel for the first magnetic core to pass through is formed in the first magnetic seat, and the first magnetic field is formed in the first damping channel; The first magnetic core is configured to move in the first damping channel along a direction of magnetic flux lines cutting the first magnetic field to generate eddy currents.

4. The bonding head driving device according to claim 2, characterized in that: The first vibration reduction mechanism further includes a first counterweight block, and the first counterweight block is connected to the second side wall of the first mounting seat.

5. The bonding head driving device according to claim 2, characterized in that: The first driving module includes a first motor, wherein a stator of the first motor is fixedly mounted on the first mounting seat, and a mover of the first motor is fixedly mounted on the first sliding seat.

6. The bonding head driving device according to claim 2, characterized in that: The bonding head driving device also includes a first displacement measuring component, which includes a first grating ruler arranged on the first mounting seat and a first reading head arranged on the first sliding seat.

7. The bonding head driving device according to claim 1, characterized in that: The second vibration reduction mechanism includes a sixth slide rail, a second mounting seat and a second magnetic damping assembly, wherein: The sixth slide rail is arranged on the frame along the second horizontal direction; The second mounting seat is slidably connected to the sixth slide rail, and the fixing component of the second driving module is fixedly installed on the second mounting seat; The second magnetic damping assembly includes a second magnetic seat and a second magnetic core, wherein the second magnetic seat is fixedly mounted on the frame and located on a first side of the second mounting seat, the second magnetic seat has a second magnetic field, and the second magnetic core is fixedly connected to a first side wall of the second mounting seat and is located in the second magnetic field; When the second mounting seat slides along the sixth slide rail, the second magnetic damping assembly generates a damping force opposite to the sliding direction of the second mounting seat.

8. The bonding head driving device according to claim 7, wherein: A second damping channel for the second magnetic core to pass through is formed in the second magnetic seat, and the second magnetic field is formed in the second damping channel; The second magnetic core is configured to move in the second damping channel along a direction of magnetic flux lines cutting the second magnetic field to generate eddy currents.

9. The bonding head driving device according to claim 7, characterized in that: The second vibration reduction mechanism further includes a second counterweight block, and two second counterweight blocks are respectively fixedly connected to two ends of the second magnetic core.

10. The bonding head driving device according to claim 7, characterized in that: The second driving module includes a second motor, wherein a stator of the second motor is fixedly mounted on the second mounting seat, and a mover of the second motor is fixedly mounted on the second sliding seat.

11. The bonding head driving device according to claim 7, characterized in that: The bonding head driving device also includes a second displacement measuring component, and the second displacement measuring component includes a second grating ruler arranged on the second mounting seat and a second reading head arranged on the second sliding seat.

12. A bonding device, characterized in that: The bonding device comprises a bonding head driving device and a bonding head according to any one of claims 1 to 11, wherein: The bonding head is slidably connected to the second slide rail and the fourth slide rail; When the first driving module drives the first sliding seat to slide along the first slide rail, the bonding head slides along the fourth slide rail in the first horizontal direction; When the second driving module drives the second sliding seat to slide along the third slide rail, the bonding head slides along the second slide rail in the second horizontal direction.

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