Protective gas circuit and lead bonding equipment

Abstract

The utility model belongs to the technical field of lead bonding equipment, and relates to a protective gas circuit which comprises a gas inlet pipeline, a switching assembly, a first branch, a second branch, a float flowmeter and a gas outlet pipeline. The gas inlet end of the gas inlet pipeline is connected with a protective gas source; the switching assembly is connected between the air outlet end of the air inlet pipeline and the first branch and the second branch, and the switching assembly controls the air inlet pipeline to selectively communicate with one of the first branch and the second branch; the gas outlet end of the first branch is connected with the gas outlet pipeline after being connected with the gas outlet end of the second branch; and the float flowmeter is arranged on the second branch. The utility model also relates to a wire bonding device. According to the technical scheme, the stable protective airflow can be provided, and the adjusting efficiency of the protective airflow is improved.

Description

Technical Field

[0001] The present application relates to the technical field of wire bonding equipment, and more specifically, to a protective gas path and a wire bonding equipment. Background Art

[0002] Wire bonding equipment is a conventional production equipment that welds metal wires to crystal grains (or chip holders). When the wire bonding equipment is working, the ball burning step is an important part of the wire bonding process, which requires the use of ultra-high voltage to generate an arc to melt the metal wires into balls for easy welding to the crystal grains. Since metals are unstable in high temperature environments and are easily oxidized, a protective gas needs to be introduced during the ball burning step to protect the metal melted into balls.

[0003] Since the wire bonding equipment needs to adjust various parameters (including the airflow rate of the shielding gas) when performing wire bonding for different products, a float flowmeter is usually installed on the traditional shielding gas line so that the staff can observe and adjust the airflow rate of the shielding gas introduced. However, since the wire bonding equipment will vibrate when working, the float in the float flowmeter will vibrate, resulting in inaccurate airflow readings and unstable shielding gas flow, affecting the wire bonding quality of the wire bonding equipment. Utility Model Content

[0004] The technical problem to be solved by the embodiments of the present application is that the protective gas path of the traditional wire bonding equipment is easily subject to vibration, resulting in inaccurate and unstable air flow readings of the protective gas flow, thereby affecting the wire bonding quality of the wire bonding equipment.

[0005] In order to solve the above technical problems, the embodiment of the present application provides a protective gas circuit, which adopts the following technical solution:

[0006] A protective gas circuit, comprising an air inlet pipeline, a switching component, a first branch, a second branch, a float flowmeter and an air outlet pipeline;

[0007] The air inlet end of the air inlet pipeline is connected to a protective air source;

[0008] The switching component is connected between the outlet end of the air intake pipeline and the first branch and the second branch, and the switching component controls the air intake pipeline to selectively communicate with one of the first branch and the second branch;

[0009] The outlet end of the first branch is connected to the outlet end of the second branch and then connected to the outlet pipeline;

[0010] The float flowmeter is installed on the second branch.

[0011] Further, the switching component includes a switching valve, and the switching valve includes an air inlet end, a first air outlet end, and a second air outlet end;

[0012] The air inlet end is connected to the air inlet pipeline, the first air outlet end is connected to the first branch, and the second air outlet end is connected to the second branch.

[0013] Further, the switching component includes a first three-way valve, a first switch valve and a second switch valve;

[0014] The first end of the first three-way connection is connected to the air intake pipeline, the second end of the first three-way connection is connected to the first branch, and the third end of the first three-way connection is connected to the second branch;

[0015] The first switch valve is installed on the first branch, and the second switch valve is installed on the second branch.

[0016] Furthermore, the switching component also includes a switching control valve, which is connected to the first switch valve and the second switch valve respectively, and is used to control one of the first switch valve and the second switch valve to open.

[0017] Furthermore, the protective gas circuit also includes a second tee, a first end of the second tee is connected to the gas outlet pipeline, a second end of the second tee is connected to the first branch, and a third end of the second tee is connected to the second branch.

[0018] Furthermore, the protective gas circuit also includes a speed regulating valve, and the speed regulating valve is installed on the air inlet pipeline and / or the air outlet pipeline.

[0019] Furthermore, the protective gas circuit also includes a pressure reducing valve, which is installed on the air inlet pipeline.

[0020] Furthermore, the protective gas circuit also includes a pressure gauge, and the pressure gauge is connected to the pressure reducing valve.

[0021] Furthermore, the protection gas circuit also includes a third switch valve, which is installed on the air intake pipeline and located at the air intake end of the air intake pipeline.

[0022] In order to solve the above technical problems, the embodiment of the present application further provides a wire bonding device, which adopts the following technical solution:

[0023] A wire bonding device comprises a protective gas source and the protective gas circuit as described above, wherein the protective gas circuit is connected to the protective gas source.

[0024] Compared with the prior art, the embodiments of the present application have the following beneficial effects:

[0025] The present application provides a protective gas circuit, which distinguishes the protective gas flow providing function and the gas flow detection function of the protective gas circuit by arranging a parallel first branch and a second branch equipped with a float flowmeter between an air inlet pipeline and an air outlet pipeline, thereby avoiding the influence of the float flowmeter on the protective gas flow and improving the stability of the protective gas flow, thereby improving the ball shape stability of the wire bonding equipment when burning the ball and improving the wire bonding quality; in addition, the conduction of the first branch or the second branch is switched by a switching component to achieve function switching, thereby improving the air flow regulation efficiency, so as to output a protective gas flow that is adapted to the requirements of different products and improve the wire bonding efficiency of the wire bonding equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the scheme of the present application, a brief introduction is given below to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 It is a schematic diagram of the structure of the protective gas circuit of an embodiment of the present application;

[0028] Figure 2 It is a schematic structural diagram of a protective gas circuit of a second embodiment of the present application;

[0029] Figure 3 It is a schematic structural diagram of the protective gas circuit of the third embodiment of the present application.

[0030] Reference numerals:

[0031] 1. Inlet pipeline; 2. Switching assembly; 21. Switching valve; 22. First three-way valve; 23. First switch valve; 24. Second switch valve; 31. First branch; 32. Second branch; 33. Float flowmeter; 4. Outlet pipeline; 5. Second three-way valve; 6. Speed ​​regulating valve; 71. Pressure reducing valve; 72. Pressure gauge; 8. Third switch valve. DETAILED DESCRIPTION

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0033] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0034] The float flowmeter consists of a transparent conical tube with a large top and a small bottom, and a float floating up and down along the cone line of the conical tube. The airflow enters from the bottom of the lower conical tube, passes through the annular hole formed between the inner wall of the conical tube and the float, and then flows out from the top of the conical tube. When the airflow enters the conical tube, the resultant force of the float's own gravity and the force of the airflow on the float is zero, and the float is suspended at a certain height. At this time, the airflow volume value of the airflow can be read from the conical tube based on the suspension height of the float. The larger the airflow volume, the higher the height of the float.

[0035] Since the float is suspended in the conical tube due to force balance, when the wire bonding equipment is performing wire bonding, its vibration will cause the float to float up and down, resulting in the area of ​​the annular hole formed between the inner wall of the conical tube and the float to change all the time, causing the airflow of the protective gas flow to fluctuate, thereby failing to provide a stable protective gas flow, affecting the ball burning quality of the wire bonding equipment.

[0036] Embodiment 1 of the present application for protecting airflow

[0037] See also Figure 1 As shown, based on the defects existing in the protective gas circuit of the above-mentioned traditional wire bonding equipment, an embodiment of the present application provides a protective gas circuit, including: an air inlet pipeline 1, a switching component 2, a first branch 31, a second branch 32, a float flowmeter 33 and an air outlet pipeline 4, wherein the air inlet end of the air inlet pipeline 1 is connected to the protective gas source, the air outlet end of the air outlet pipeline 4 is connected to the nozzle, and the air outlet direction of the nozzle is aligned with the burning ball of the ignition rod, so as to provide protective gas for the metal and prevent the metal from being oxidized after being melted into a ball.

[0038] In some embodiments, the switching component 2 is connected between the outlet end of the air inlet pipeline 1 and the first branch 31 and the second branch 32, and the switching component 2 controls the air inlet pipeline 1 to selectively connect to one of the first branch 31 and the second branch 32, so as to switch the protective gas circuit to the protective gas output mode or the protective gas flow detection mode.

[0039] In some embodiments, the air outlet end of the first branch 31 is connected to the air outlet end of the second branch 32 and then connected to the air outlet pipeline 4 ; the float flowmeter 33 is installed on the second branch 32 .

[0040] Since the first branch 31 and the second branch 32 are arranged in parallel between the air inlet pipeline 1 and the air outlet pipeline 4, and only a float flowmeter 33 for detecting the air flow rate is added to the second branch 32, when the switching component 2 controls the air inlet pipeline 1 to be connected with the first branch 31 or the second branch 32, the air flow rate in the first branch 31 is consistent with the air flow rate in the second branch 32. Therefore, the staff can switch to the second branch 32 through the switching component 2 to observe and adjust the air flow rate of the protective gas in the protective gas circuit, and then switch to the first branch 31 through the switching component 2 to facilitate the output of stable protective gas.

[0041] The embodiment of the present application provides a protective gas circuit, by arranging a parallel first branch 31 and a second branch 32 equipped with a float flowmeter 33 between the air inlet pipeline 1 and the air outlet pipeline 4, so as to distinguish the function of providing a protective gas flow and the function of detecting the gas flow of the protective gas circuit, thereby avoiding the influence of the float flowmeter 33 on the protective gas flow, improving the stability of the protective gas flow, thereby improving the stability of the ball shape when the wire bonding equipment burns the ball, and improving the quality of the welding wire; in addition, the conduction of the first branch 31 or the second branch 32 is switched by the switching component 2 to realize the switching of functions, improve the regulation efficiency of the gas flow, so as to output the protective gas flow adapted to the requirements of different products, and improve the wire welding efficiency of the wire bonding equipment.

[0042] Please continue reading Figure 1 As shown, in some embodiments, the switching component 2 includes a switching valve 21, wherein the switching valve 21 includes an air inlet end A, a first air outlet end B and a second air outlet end C.

[0043] In this embodiment, the air inlet end A is connected to the air inlet pipeline 1, the first air outlet end B is connected to the first branch 31, and the second air outlet end C is connected to the second branch 32. When the switching valve 21 controls the air inlet end A to be connected to the first air outlet end B, the air inlet pipeline 1 is connected to the first branch 31, and the protective air circuit is in the protective air flow output mode; when the switching valve 21 controls the air inlet end A to be connected to the second air outlet end B, the air inlet pipeline 1 is connected to the second branch 32, and the protective air circuit is in the air flow detection mode of the protective air flow.

[0044] In this embodiment, the switching valve 21 can be selected from a solenoid valve or a manual valve.

[0045] The embodiment of the present application uses the switching valve 21 to control the switching of the working mode of the protective gas circuit. When changing different products, the air flow of the protective gas circuit can be quickly adjusted to improve the adjustment efficiency of the protective gas circuit.

[0046] In some embodiments, the protective gas circuit also includes a second tee 5 , a first end of the second tee 5 is connected to the gas outlet pipeline 4 , a second end of the second tee 5 is connected to the first branch 31 , and a third end of the second tee 5 is connected to the second branch 32 .

[0047] In some embodiments, the protective gas circuit further includes a speed regulating valve 6 , and the speed regulating valve 6 is installed on the air intake pipeline 1 .

[0048] In the embodiment of the present application, a speed regulating valve 6 is provided on the air intake pipeline 1 to adjust and stabilize the air pressure in the air intake pipeline 1 .

[0049] In some embodiments, the protective gas circuit also includes a pressure reducing valve 71 , and the pressure reducing valve 71 is installed on the air intake pipeline 1 . In this embodiment, the pressure reducing valve 71 is installed between the speed regulating valve 6 and the switching component 2 .

[0050] The embodiment of the present application sets a pressure reducing valve 71 on the air inlet pipeline 1 to reduce the pressure of the protective gas flow input by the protective gas source, thereby preventing the protective gas circuit from being damaged due to excessive pressure of the protective gas flow and affecting the subsequent stability of the burning ball.

[0051] In some embodiments, the protective gas circuit further includes a pressure gauge 72 , and the pressure gauge 72 is connected to the pressure reducing valve 71 .

[0052] The embodiment of the present application further provides a pressure gauge 72 connected to the pressure reducing valve 71 so that the staff can accurately grasp the pressure of the protective air flow in the protective air circuit, thereby being able to promptly detect and adjust the air pressure abnormality in the protective air circuit, thereby improving the output quality of the protective air flow.

[0053] In some embodiments, the protective gas circuit also includes a third switch valve 8, which is installed on the air intake pipeline 1 and located at the air intake end of the air intake pipeline 1. In this embodiment, the third switch valve 8 is located between the air intake end of the air intake pipeline 1 and the pressure reducing valve 71, and is used to control the opening and closing of the protective gas circuit as a whole, so that the staff can quickly stop the use of the target protective gas circuit and facilitate subsequent maintenance of the protective gas circuit.

[0054] Embodiment 2 of the present application for protecting the gas circuit

[0055] See also Figure 2 As shown, the difference between the protective gas circuit provided in this embodiment and the embodiment one is that the speed regulating valve 6 is installed on the outlet pipe 4. The embodiment of the present application installs the speed regulating valve 6 on the outlet pipe 4 to further stabilize the pressure of the protective gas flow in the protective gas circuit, thereby improving the stability of the protective gas flow.

[0056] Embodiments of the wire bonding device of the present application

[0057] Based on the protective gas circuit as described above, an embodiment of the present application provides a wire bonding device, which includes a protective gas source and the protective gas circuit as described above, and the protective gas circuit is connected to the protective gas source.

[0058] Embodiment 3 of the present application for protecting the gas circuit

[0059] See also Figure 3 As shown, the difference between the protection gas circuit provided in this embodiment and the embodiment 1 is that the switching component 2 includes a first three-way valve 22, a first switch valve 23 and a second switch valve 24.

[0060] The first end of the first three-way connection 22 is connected to the intake pipe 1 , the second end of the first three-way connection 22 is connected to the first branch 31 , and the third end of the first three-way connection 22 is connected to the second branch 32 .

[0061] The first switch valve 23 is installed on the first branch 31 , and the second switch valve 24 is installed on the second branch 32 . In this embodiment, both the first switch valve 23 and the second switch valve 24 are manual valves.

[0062] In the embodiment of the present application, a first switch valve 23 and a second switch valve 24 are respectively arranged on the first branch 31 and the second branch 32. The staff can control the first switch valve 23 and the second switch valve 24 individually to realize the common opening, common closing or selective opening of the first branch 31 and the second branch 32, thereby improving the control flexibility of the protective gas circuit to adapt to different work requirements.

[0063] In other embodiments, the switching component 2 also includes a switching control valve (not shown in the figure), which is respectively connected to the first switch valve 23 and the second switch valve 24. The switching control valve is used to control one of the first switch valve 23 and the second switch valve 24 to open, so as to meet the requirement that the float flowmeter 33 does not participate in the protection airflow output, thereby improving the output stability of the protection airflow.

[0064] In some embodiments, the wire bonding equipment also includes a wire pay-off mechanism, a bonding head, a ignition rod and a loading mechanism, the metal wire is loaded on the wire pay-off mechanism and output to the bonding head by the wire pay-off mechanism, and the bonding head clamps the metal wire; the loading mechanism is grounded, and the loading mechanism is loaded with grains to be processed by the bonding head; the ignition rod is located between the bonding head and the loading mechanism; the air outlet pipe of the protective gas circuit is connected to a nozzle, and the air outlet direction of the nozzle is aligned with the burning ball of the ignition rod.

[0065] The wire bonding equipment provided in the embodiment of the present application adopts the protective gas circuit as described, and provides a stable protective gas flow when the ignition rod burns the end of the metal lead to prevent the metal from being oxidized, thereby improving the quality of the welding wire; in addition, when the type of grains on the loading mechanism is changed, the protective gas circuit is switched to the second branch to adjust the gas flow rate, and then switched to the first branch to output a stable protective gas flow. The gas flow adjustment efficiency is high, thereby improving the wire welding efficiency of the wire bonding equipment.

[0066] Obviously, the embodiments described above are only some embodiments of the present application, rather than all embodiments. The preferred embodiments of the present application are given in the accompanying drawings, but they do not limit the patent scope of the present application. The present application can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present application more thorough and comprehensive. Although the present application is described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific implementation methods, or to perform equivalent replacement of some of the technical features therein. Any equivalent structure made using the contents of the specification and drawings of this application, directly or indirectly used in other related technical fields, is similarly within the scope of patent protection of this application.

Claims

1. A protective gas circuit, characterized in that: It includes an air inlet pipeline, a switching component, a first branch, a second branch, a float flowmeter and an air outlet pipeline; The air inlet end of the air inlet pipeline is connected to a protective air source; The switching component is connected between the outlet end of the intake pipeline and the first branch and the second branch, and the switching component controls the intake pipeline to selectively communicate with one of the first branch and the second branch; The outlet end of the first branch is connected to the outlet end of the second branch and then connected to the outlet pipeline; The float flowmeter is installed on the second branch.

2. The protective gas circuit according to claim 1, characterized in that: The switching component includes a switching valve, and the switching valve includes an air inlet end, a first air outlet end, and a second air outlet end; The air inlet end is connected to the air inlet pipeline, the first air outlet end is connected to the first branch, and the second air outlet end is connected to the second branch.

3. The protective gas circuit according to claim 1, characterized in that: The switching assembly includes a first three-way valve, a first switch valve and a second switch valve; The first end of the first three-way connection is connected to the air intake pipeline, the second end of the first three-way connection is connected to the first branch, and the third end of the first three-way connection is connected to the second branch; The first switch valve is installed on the first branch, and the second switch valve is installed on the second branch.

4. The protective gas circuit according to claim 3, characterized in that: The switching assembly further includes a switching control valve, which is connected to the first switch valve and the second switch valve respectively, and is used to control one of the first switch valve and the second switch valve to open.

5. The protective gas circuit according to claim 1, characterized in that: The protective gas circuit also includes a second three-way connection, a first end of the second three-way connection is connected to the gas outlet pipeline, a second end of the second three-way connection is connected to the first branch, and a third end of the second three-way connection is connected to the second branch.

6. The protective gas circuit according to any one of claims 1 to 5, characterized in that: The protection gas circuit also includes a speed regulating valve, which is installed on the air inlet pipeline and / or the air outlet pipeline.

7. The protective gas circuit according to any one of claims 1 to 5, characterized in that: The protective gas circuit also includes a pressure reducing valve, which is installed on the air inlet pipeline.

8. The protective gas circuit according to claim 7, characterized in that: The protection gas circuit also includes a pressure gauge, and the pressure gauge is connected to the pressure reducing valve.

9. The protective gas circuit according to any one of claims 1 to 5, characterized in that: The protection gas circuit also includes a third switch valve, which is installed on the air intake pipeline and located at the air intake end of the air intake pipeline.

10. A wire bonding device, characterized in that: It comprises a protective gas source and a protective gas circuit as claimed in any one of claims 1 to 9, wherein the protective gas circuit is connected to the protective gas source.

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