Polishing head tester

Abstract

The utility model provides a polishing head tester which comprises a tester body and a ventilation assembly, a table top is arranged on the tester body, a supporting part located above the table top is further arranged on the tester body, the ventilation assembly is arranged on the supporting part corresponding to the table top, and a polishing head can be installed and connected with the ventilation assembly and is downwards arranged on the table top. And the ventilation assembly is communicated with the pipeline of the gas partition of the polishing head. The ventilation assembly comprises a plurality of ventilation pipes, the ventilation pipes are arranged in one-to-one correspondence with the gas partitions, the ventilation pipes can be communicated with pipelines of the corresponding gas partitions, the ventilation pipes are connected with gas supply equipment, and the gas supply equipment is used for introducing gas into the gas partitions so as to detect the gas tightness of the polishing head. The installation position of the polishing head is downward, the polishing head is kept consistent with the actual polishing state in combination with the partition control function, the actual performance of the polishing head can be better tested, and the testing efficiency is also improved through multi-area simultaneous testing.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing, in particular to a polishing head tester. Background Art

[0002] The polishing head is the core mechanism of the chemical mechanical polishing equipment. The performance of the polishing head directly affects the quality of the processed wafer products. The polishing head tester is used to simulate the pressurized state to test the airtightness of the polishing head, thereby ensuring the polishing results and improving the product yield.

[0003] At present, most of the polishing head testers on the market are desktop type. The tester is set on a platform. During the test, the polishing head is installed on the mounting part of the tester and is set upward. A cover plate is supported above the polishing head, so that the polishing head is pressed upward on the cover plate above it to detect the air tightness of the polishing head. During the test, there is only one air supply pipeline, and the air tightness of one partition is tested separately each time.

[0004] However, the polishing head in the actual polishing equipment is installed downward to polish the wafer, and multiple partitions are pressurized at the same time.

[0005] The installation method is opposite to the installation position in the actual polishing equipment. Pressurization can only be applied to each partition separately. It is impossible to truly and accurately simulate the actual test scenario and it is difficult to ensure the accuracy of the polishing head test results.

[0006] In view of this, it is necessary to propose a polishing head tester to solve the above problems. Utility Model Content

[0007] The utility model aims to provide a polishing head tester, which is used to improve the problem that the existing polishing head tester is difficult to ensure the accuracy of the polishing head test result.

[0008] The utility model provides a polishing head tester, comprising: a tester body and a ventilation component, wherein the tester body is provided with a table top, and the tester body is also provided with a supporting portion located above the table top, the ventilation component is arranged on the supporting portion corresponding to the table top, and the polishing head can be installed and connected to the ventilation component and placed downward on the table top so that the ventilation component is connected to the pipeline of the gas partition of the polishing head.

[0009] In a possible embodiment, the ventilation assembly includes a plurality of ventilation pipes, which are arranged in a one-to-one correspondence with the gas partitions. The ventilation pipes can be connected to the pipelines of the corresponding gas partitions. The ventilation pipes are connected to a gas supply device, and the gas supply device is used to ventilate the gas partition to detect the air tightness of the polishing head.

[0010] In a possible embodiment, the air supply equipment includes a positive pressure air supply device connected to a plurality of the ventilation pipes, and each of the ventilation pipes is installed with a positive pressure regulating valve, a positive pressure control valve and a pressure detection component.

[0011] In a possible embodiment, the air supply equipment also includes a negative pressure air circuit connected to the positive pressure air supply device, and the negative pressure air circuit is individually connected to each of the ventilation pipes through a first air circuit. A total negative pressure control valve, a vacuum generator, and a negative pressure regulating valve are installed on the negative pressure air circuit, and a branch negative pressure control valve is installed on each of the first air circuits.

[0012] In a possible embodiment, it further includes an industrial computer that is controllably connected to the positive pressure regulating valve, the positive pressure control valve, and the pressure detecting element.

[0013] In a possible embodiment, each of the ventilation pipes is connected to a second air path communicating with the outside atmosphere, and a normal pressure control valve is installed on the second air path.

[0014] In a possible embodiment, it also includes a ventilation shaft arranged on the support portion corresponding to the table top, and a plurality of air ducts are arranged on the ventilation shaft at intervals. The air ducts are arranged in a one-to-one correspondence with the ventilation pipes and are connected to the corresponding ventilation pipes. The polishing head can be installed and connected to the ventilation shaft so that the air ducts are connected to the corresponding pipelines of the gas partitions.

[0015] In a possible embodiment, a first positioning piece is provided on the ventilation shaft, a first positioning hole is provided on the polishing head corresponding to the ventilation shaft, and the first positioning piece can be inserted into the first positioning hole; and / or, a second positioning hole is provided on the ventilation shaft, a second positioning piece is provided on the polishing head corresponding to the second positioning hole, and the second positioning piece can be inserted into the second positioning hole.

[0016] In a possible embodiment, it also includes a supporting plate placed on the table top, and slide grooves are respectively provided on both sides of the supporting plate, and limit plates are respectively provided on both sides of the table top corresponding to the slide grooves, and the limit plates are adaptively installed on the corresponding slide grooves. The supporting plate is located between the two limit plates and can slide along the extension direction of the limit plates.

[0017] In a possible embodiment, the tester body includes a casing with a hollow interior and a bracket arranged on the casing, the table top is the top surface of the casing, and the supporting portion is formed on the bracket; and / or, lockable moving wheels are provided at the bottom of the bracket; and / or, a display is also placed on the bracket.

[0018] The beneficial effect of the polishing head tester provided by the utility model is that the tester body of the present invention has an independently supported structure, which can be moved at will, increasing the convenience of use. The installation position of the polishing head faces downward, and combined with the function of partition control, it is consistent with the actual polishing state, and the actual performance of the polishing head can be better tested. Simultaneous testing of multiple zones also improves the test efficiency. The positive and negative pressure regulating valves can be used to individually adjust the pressure values ​​of the positive and negative pressures on each ventilation pipe. The positive and negative pressure control valves can be used to individually control the opening and closing of the positive and negative pressure gases on each ventilation pipe. The pressure detection component can be used to individually detect the air pressure in each gas partition. The visualized pressure curve on the display brings intuitive results to the polishing head test, increases the accuracy of engineering judgment, and the electronic recording of information by the industrial computer makes engineering maintenance more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a stereogram of the polishing head tester of the utility model.

[0020] Figure 2 The utility model is a schematic block diagram of the vent pipe and the components thereon in the polishing head tester.

[0021] Figure 3 It is a schematic diagram of the ventilation shaft in the polishing head tester of the utility model in an inverted state.

[0022] Figure 4 It is a bottom view of the vent pipe in the polishing head tester of the utility model.

[0023] Explanation of the reference numerals: tester body 110; housing 111; table top 1111; limit plate 1112; storage plate 1113; bracket 112; vertical plate portion 1121; support portion 1122; moving wheel 113; ventilation shaft 120; air duct 121; first positioning member 122; second positioning hole 123; electrical cabinet 130; ventilation pipe 140; positive pressure regulating valve 141; positive pressure control valve 142; pressure detection member 143; negative pressure air circuit 150; total negative pressure control valve 151; vacuum generator 152; negative pressure regulating valve 153; first air circuit 154; branch negative pressure control valve 1541; second air circuit 160; normal pressure control valve 161; industrial computer 170; supporting plate 180; slide groove 181; groove 182; positioning groove 183; display 190; gas partition 200; positive pressure gas supply device 310. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model will be described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] In view of the problems existing in the prior art, the embodiment of the utility model provides a polishing head tester, see Figure 1 The polishing head tester includes: a tester body 110 and a ventilation assembly. The tester body 110 is provided with a table 1111. The tester body 110 is also provided with a support portion 1122 located above the table 1111. The ventilation assembly is arranged on the support portion 1122 corresponding to the table 1111. The polishing head can be installed and connected with the ventilation assembly and placed downward on the table 1111, so that the ventilation assembly is connected with the pipeline of the gas partition 200 of the polishing head. In this embodiment, the polishing head is placed downward on the table 1111, that is, the side of the wafer adsorbed is placed on the table 1111, so that the polishing head can better simulate the working state of the actual polishing during the test, thereby providing a more accurate airtightness test result.

[0026] In a preferred embodiment, see Figure 2 The ventilation assembly includes a plurality of ventilation pipes 140, and the ventilation pipes 140 are arranged in a one-to-one correspondence with the gas partitions 200. The ventilation pipes 140 can be connected to the pipelines of the corresponding gas partitions 200. The ventilation pipes 140 are connected to a gas supply device, and the gas supply device is used to ventilate the gas partitions 200 to detect the air tightness of the polishing head. The existing polishing head tester can only test one polishing head partition at a time during the test. If the test of the entire polishing head is to be completed, each gas partition 200 needs to be tested one by one, which takes a long time to test and has low test efficiency. In this embodiment, by separately setting a ventilation pipe 140 for each gas partition 200 of the polishing head, each gas partition 200 can be ventilated separately at the same time, and the air pressure of each gas partition 200 can be detected separately, and the simultaneous testing of multiple zones improves the test efficiency.

[0027] In a specific embodiment, see Figure 2The gas supply device includes a positive pressure gas supply device 310 connected to a plurality of vent pipes 140, and each vent pipe 140 is installed with a positive pressure regulating valve 141, a positive pressure control valve 142 and a pressure detection component 143. Specifically, the positive pressure gas supply device 310 is an air compressor for providing compressed gas. In this embodiment, a positive pressure regulating valve 141 is separately provided on each vent pipe 140 to separately adjust the positive pressure value on each vent pipe 140. The positive pressure gas supply device 310 is used to deliver positive pressure gas to the vent pipe 140. The positive pressure value of the positive pressure gas can be adjusted by the positive pressure regulating valve 141. The delivery and stop of the positive pressure gas can be controlled by the positive pressure control valve 142. After delivering the positive pressure gas of the set positive pressure value, the positive pressure control valve 142 is closed for a period of time, and the pressure change is detected by the pressure detection component 143. If the pressure change value is within the pressure threshold range, it is judged that the air tightness of the gas partition 200 meets the requirements.

[0028] In yet another specific embodiment, see Figure 2 The air supply equipment also includes a negative pressure air circuit 150 connected to the positive pressure air supply device 310. The negative pressure air circuit 150 is individually connected to each ventilation pipe 140 through a first air circuit 154. A total negative pressure control valve 151, a vacuum generator 152, and a negative pressure regulating valve 153 are installed on the negative pressure air circuit 150. A branch negative pressure control valve 1541 is installed on each first air circuit 154. In this embodiment, when negative pressure gas needs to be introduced into the vent pipe 140, the total negative pressure control valve 151 is opened, the vacuum generator 152 generates negative pressure gas using a positive pressure gas source, the negative pressure regulating valve 153 is used to control the negative pressure value of the negative pressure gas, and each first gas path 154 is installed with a branch negative pressure control valve 1541, that is, positive pressure or negative pressure gas can be introduced into each vent pipe 140 as needed. For example, when a certain vent pipe 140 needs to be passed through a negative pressure, the positive pressure control valve 142 on the vent pipe 140 is closed and the branch negative pressure control valve 1541 on the first gas path 154 connected to the vent pipe 140 is opened. After delivering negative pressure gas of a set negative pressure value, the negative pressure control valve is closed for a period of time, and the pressure change is detected by the pressure detection element 143. If the pressure change value is within the pressure threshold range, it is determined that the air tightness of the gas partition 200 meets the requirements.

[0029] In one possible embodiment, see Figure 2 Each vent pipe 140 is connected to a second air path 160 communicating with the outside atmosphere. A normal pressure control valve 161 is installed on the second air path 160. The normal pressure control valve 161 is used to control the communication between the vent pipe 140 and the outside atmosphere.

[0030] In one embodiment, see Figure 1 and Figure 2The polishing head tester also includes an industrial computer 170 that is controlled and connected to the positive pressure regulating valve 141, the positive pressure control valve 142, and the pressure detection element 143. Furthermore, the industrial computer 170 is also controlled and connected to the total negative pressure control valve 151, the vacuum generator 152, the negative pressure regulating valve 153, the branch negative pressure control valve 1541, and the normal pressure control valve 161. The software and database of the tester are installed on the industrial computer 170, and the historical test data of the polishing head can be consulted during the later tracing, which is convenient for later maintenance.

[0031] Furthermore, the positive pressure regulating valve 141 can be a positive pressure electrical proportional valve, a positive pressure electric regulating valve, etc., the positive pressure control valve 142 can be a positive pressure solenoid valve, a positive pressure electric valve, etc., the total negative pressure regulating valve 153 and the branch negative pressure control valve 1541 can be a negative pressure electrical proportional valve, a negative pressure electric regulating valve, etc., the normal pressure control valve 161 can be a normal pressure solenoid valve, a normal pressure electric valve, etc., and the pressure detection component 143 is a pressure sensor.

[0032] In a preferred embodiment, see Figure 1 and Figure 3 The polishing head tester also includes a ventilation shaft 120 corresponding to the table 1111 and arranged on the support part 1122. A plurality of air ducts 121 are arranged at intervals on the ventilation shaft 120. The air ducts 121 are arranged in a one-to-one correspondence with the ventilation pipes 140 and are connected to the corresponding ventilation pipes 140. The polishing head can be installed and connected to the ventilation shaft 120 so that the air duct 121 is connected to the pipeline of the corresponding gas partition 200.

[0033] In some possible embodiments, see Figure 3 and Figure 4 , a first positioning member 122 is provided on the ventilation shaft 120, a first positioning hole (not shown in the figure) is provided on the polishing head corresponding to the ventilation shaft 120, and the first positioning member 122 can be inserted into the first positioning hole; and / or, a second positioning hole 123 is provided on the ventilation shaft 120, a second positioning member (not shown in the figure) is provided on the polishing head corresponding to the second positioning hole 123, and the second positioning member can be inserted into the second positioning hole 123. Preferably, the first positioning member 122 is located at the bottom end of the ventilation shaft 120, and a circle of outer edge plate is formed at the edge of the bottom end of the ventilation shaft 120, and the second positioning hole 123 is located at the edge of the outer edge plate. Through the cooperation of the first positioning member 122 and the first positioning hole, and the cooperation of the second positioning member and the second positioning hole 123, the gas passage 121 can be quickly and correctly aligned and connected with the pipeline of the corresponding gas partition 200. Figure 1 An accessory plate is detachably mounted on the bottom end of the central air shaft 120 and will be removed during testing.

[0034] In yet another embodiment, see Figure 1The tester body 110 includes a casing 111 with a hollow interior and a bracket 112 disposed on the casing 111. The table 1111 is the top surface of the casing 111. The support portion 1122 is formed on the bracket 112. The bracket 112 also includes a vertical plate portion 1121 disposed on the casing 111 and located at the rear side of the casing 111. The support portion 1122 is vertically disposed at the top of the vertical plate portion 1121. The support portion 1122 partially blocks the table 1111. The support portion 1122 may be triangular or semicircular. shape, etc., to provide a larger operating space; and / or, a lockable moving wheel 113 is provided at the bottom of the bracket 112, and the moving wheel 113 is a Forma wheel, which is convenient for movement and locking; and / or, a display 190 is also placed on the bracket 112, and the industrial computer 170 is arranged in the casing 111 and connected to the display 190. The industrial computer 170 transmits the test data to the display 190, and displays the pressure changes of each gas partition 200 in the polishing head in the form of a visual chart, which is convenient for engineering observation and judgment.

[0035] In a preferred embodiment, see Figure 1 The polishing head tester also includes a supporting plate 180 placed on the table 1111. The supporting plate 180 is provided with a slide groove 181 on both sides. The corresponding slide grooves 181 on both sides of the table 1111 are provided with a limit plate 1112. The limit plate 1112 is adaptively installed on the corresponding slide groove 181. The supporting plate 180 is located between the two limit plates 1112 and can slide along the extension direction of the limit plates 1112, so that the supporting plate 180 can be pulled out like a drawer, making the disassembly and assembly of the polishing head more convenient. The two limit plates 1112 are respectively located on the left and right sides of the table 1111, and play the role of upper limit in the left and right directions of the supporting plate 180. The rear end of the supporting plate 180 can be against the vertical plate part 1121 to play the role of rear limit. Specifically, the limit plate 1112 is in an inverted L shape and the two limit plates 1112 are symmetrically arranged. Furthermore, the top surface of the support plate 180 is provided with a plurality of grooves 182, and the grooves 182 are extended in the front-to-back direction to prevent the air film on the polishing head from being sucked onto the support plate 180 and making it difficult to move the polishing head. The support plate 180 is provided with at least one positioning groove 183 according to the contour line of the polishing head to adapt to polishing heads of different sizes. The support plate 180 is provided with a handle to facilitate pulling the support plate 180. The positioned polishing head can be moved to a position close to the ventilation shaft 120 by pushing the support plate 180. By pressing the top cover on the top of the polishing head and then pushing the support plate 180, the second positioning member is inserted into the second positioning hole 123, and the pressure on the top cover is released, so that the first positioning member 122 is inserted into the first positioning hole. Specifically, the bottom of the support plate 180 is made of a self-lubricating material.

[0036] Better, see Figure 1The front side of the housing 111 is provided with a storage plate 1113 for placing a keyboard and a mouse, and the keyboard and the mouse are connected to the industrial computer 170. The industrial computer 170 is located at the bottom of the housing 111, and an electrical cabinet 130 is arranged above the industrial computer 170. The ventilation pipe 140, valves, tester circuits, etc. are located in the electrical cabinet 130. The front part of the electrical cabinet 130 is equipped with accessories such as a pressure gauge, a power supply, a network interface, and a circuit breaker.

[0037] The utility model makes the tester into a movable independent device, which does not need to be supported by a separate bracket, so that the tester can be easily moved, which increases the convenience of use. The polishing head is installed downward, which is consistent with the actual working conditions and increases the credibility of the test. Each partition is controlled separately, and multiple partitions are tested simultaneously. While increasing efficiency, it is also consistent with the actual working conditions and can better reflect the actual performance of the polishing head. The pressure of the polishing head is controlled by partition, which is convenient for engineering investigation. Adding a visual chart of the partition pressure makes the test data clear at a glance and the engineering judgment more intuitive and accurate. The polishing head information is recorded in an electronic way to facilitate later traceability and improve the convenience of engineering use.

[0038] Although the embodiments of the utility model are described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the utility model in the claims. Moreover, the utility model described herein may have other embodiments and may be implemented or realized in a variety of ways. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with ordinary skills in the field to which the utility model belongs. The words "including" and the like used herein mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

Claims

1. A polishing head tester, characterized in that: include: The tester body and the ventilation assembly, the tester body is provided with a table top, the tester body is also provided with a support portion located above the table top, the ventilation assembly is arranged on the support portion corresponding to the table top, the polishing head can be installed and connected to the ventilation assembly and placed downward on the table top so that the ventilation assembly is connected to the pipeline of the gas partition of the polishing head.

2. The polishing head tester according to claim 1, characterized in that: The ventilation assembly includes a plurality of ventilation pipes, which are arranged one by one corresponding to the gas partitions. The ventilation pipes can be connected to the pipelines of the corresponding gas partitions. The ventilation pipes are connected to gas supply equipment, which is used to ventilate the gas partitions to detect the air tightness of the polishing head.

3. The polishing head tester according to claim 2, characterized in that: The air supply equipment comprises a positive pressure air supply device connected to a plurality of the ventilation pipes, and each of the ventilation pipes is equipped with a positive pressure regulating valve, a positive pressure control valve and a pressure detection component.

4. The polishing head tester according to claim 3, characterized in that: The air supply equipment also includes a negative pressure air circuit connected to the positive pressure air supply device, and the negative pressure air circuit is individually connected to each of the ventilation pipes through a first air circuit. A total negative pressure control valve, a vacuum generator, and a negative pressure regulating valve are installed on the negative pressure air circuit, and a branch negative pressure control valve is installed on each of the first air circuits.

5. The polishing head tester according to claim 3, characterized in that: It also includes an industrial computer that is control-connected to the positive pressure regulating valve, the positive pressure control valve and the pressure detection element.

6. The polishing head tester according to claim 2, characterized in that: Each of the ventilation pipes is connected to a second air path communicating with the outside atmosphere, and a normal pressure control valve is installed on the second air path.

7. The polishing head tester according to claim 2, characterized in that: It also includes a ventilation shaft arranged on the support portion corresponding to the table top, and a plurality of air ducts are arranged at intervals on the ventilation shaft. The air ducts are arranged in a one-to-one correspondence with the ventilation pipes and are connected to the corresponding ventilation pipes. The polishing head can be installed and connected to the ventilation shaft so that the air ducts are connected to the corresponding pipelines of the gas partitions.

8. The polishing head tester according to claim 7, characterized in that: The ventilation shaft is provided with a first positioning member, the polishing head is provided with a first positioning hole corresponding to the ventilation shaft, and the first positioning member can be inserted into the first positioning hole; and / or, The ventilation shaft is provided with a second positioning hole, and the polishing head is provided with a second positioning piece corresponding to the second positioning hole, and the second positioning piece can be inserted into the second positioning hole.

9. The polishing head tester according to any one of claims 1 to 8, characterized in that: It also includes a supporting plate placed on the table top, with sliding grooves provided on both sides of the supporting plate, and limiting plates are provided on both sides of the table top corresponding to the sliding grooves, and the limiting plates are adaptively installed on the corresponding sliding grooves. The supporting plate is located between the two limiting plates and can slide along the extension direction of the limiting plates.

10. The polishing head tester according to any one of claims 1 to 8, characterized in that: The tester body comprises a casing with a hollow interior and a bracket disposed on the casing, the table top is the top surface of the casing, and the support portion is formed on the bracket; and / or, The bottom of the bracket is provided with lockable moving wheels; and / or, A display is also placed on the bracket.

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