Die bonder swing arm structure and die bonder

Abstract

The utility model relates to a die bonder swing arm structure and a die bonder, the die bonder swing arm structure comprises a mounting base, a swing arm and a voice coil motor, the swing arm is provided with a first end and a second end which are opposite, an elastic structure is arranged between the first end and the second end, the swing arm is elastically connected with the mounting base through the elastic structure, and the voice coil motor is arranged on the mounting base. Therefore, the swing arm can swing relative to the installation base in an arc mode, and the position of the elastic structure is a fulcrum for the swing arm to swing in the arc mode. The voice coil motor comprises a stator assembly and a rotor assembly, the stator assembly is fixed to the installation base, the rotor assembly is fixed to the first end and can move up and down relative to the stator assembly, and therefore the swing arm can swing around the fulcrum arc under driving of the rotor assembly. According to the swing arm structure of the die bonder provided by the invention, the swing arm does swing arc motion, so that die taking and bonding operation is realized, the motion amplitude is smaller, the stability is higher, and the die bonding efficiency is improved.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor production equipment, and more specifically, to a crystal bonding machine swing arm structure and a crystal bonding machine. Background Art

[0002] The die bonder is one of the key production equipments necessary for the semiconductor packaging process. Its main function is to firmly connect the electrical connection points (solder joints) between the chip (wafer) and the packaging substrate to achieve electrical connection and physical support. The swing arm structure is an important part of the die bonder, which is used to complete the action of taking and placing the die during the die bonding process.

[0003] The swing arm structure of the existing crystal bonding machine usually controls the overall rotation of the swing arm through a servo motor, and then another servo motor controls the up and down movement of the swing arm to remove and bond the crystal. This method not only makes the overall structure more complicated and costly, but also causes the swing arm to have a large rotational inertia. Utility Model Content

[0004] The purpose of the embodiments of the present application is to provide a crystal bonding machine swing arm structure and a crystal bonding machine to solve the technical problems of the complex structure of the existing crystal bonding machine swing arm structure and the large swing arm motion inertia.

[0005] To achieve the above purpose, the technical solution adopted in this application is:

[0006] A first aspect provides a swing arm structure of a die bonder, comprising:

[0007] Mounting seat;

[0008] A swing arm, the swing arm having a first end and a second end opposite to each other, an elastic structure being provided between the first end and the second end, the swing arm being elastically connected to the mounting seat via the elastic structure, so that the swing arm can swing in an arc relative to the mounting seat, and the elastic structure being a fulcrum for the swing arm to swing in an arc;

[0009] A voice coil motor, the voice coil motor comprising a stator assembly and a mover assembly, the stator assembly being fixed to the mounting seat, the mover assembly being fixed to the first end and being able to move up and down relative to the stator assembly, so that the swing arm can swing around the fulcrum arc under the drive of the mover assembly.

[0010] In one of the embodiments of the first aspect, the stator assembly includes a magnet frame and a magnet, the magnet frame is fixed to the mounting seat, and the magnet is mounted on the magnet frame; the mover assembly includes a coil frame and a coil, the coil frame is fixed to the first end of the swing arm, the coil is wound around and retained on the coil frame, the coil faces the magnet, and the coil frame is movably connected to the magnet frame.

[0011] In one embodiment of the first aspect, the shape of the coil winding is rectangular, and the shape of the magnet is adapted to the shape of the coil winding.

[0012] In one of the embodiments of the first aspect, the swing arm structure of the crystal bonding machine also includes a sensor component, which is used to measure the movement position of the movable component; the sensor component includes a grating scale and a grating reader, the grating scale is fitted on the coil frame, and the grating reader is installed on the mounting seat and is arranged relative to the grating scale at a distance.

[0013] In one of the embodiments of the first aspect, an arcuate surface is provided on the coil frame, the grating scale is arranged to fit the arcuate surface, and the center of the arcuate surface is located at the fulcrum of the swing arm.

[0014] In one embodiment of the first aspect, the elastic structure includes a first elastic sheet, one end of the first elastic sheet is fixed to the mounting seat, and the other end of the first elastic sheet is fixed to the swing arm.

[0015] In one embodiment of the first aspect, the elastic structure includes a second elastic sheet, one end of the second elastic sheet is fixed to the mounting seat, the other end of the second elastic sheet is fixed to the swing arm, and the second elastic sheet is perpendicular to the first elastic sheet.

[0016] In one of the embodiments of the first aspect, the mounting seat is cylindrical in shape, and an opening is provided at one end of the mounting seat, and the voice coil motor is accommodated in the mounting seat and connected to the swing arm through the opening.

[0017] In one of the embodiments of the first aspect, at least two groups of the swing arms and voice coil motors are provided on the mounting base, and each group of the swing arms is correspondingly provided with the voice coil motor.

[0018] A second aspect provides a die bonder, comprising the die bonder swing arm structure as described above.

[0019] The first aspect of the present application provides a crystal bonding machine swing arm structure, in which the swing arm and the mounting seat are connected by an elastic structure, so that the swing arm can swing in an arc with the elastic structure as a fulcrum. At the same time, under the drive of the voice coil motor, the movable assembly drives the first end of the swing arm to move synchronously. Due to the restriction of the elastic structure between the swing arm and the mounting seat, the movable assembly is forced to swing in an arc, so that the swing can perform a reciprocating arc swing motion, and then the swing arm can realize the crystal taking and bonding operation, replacing the existing use of a servo motor to control the up and down movement of the swing arm for crystal taking and bonding. The movement amplitude is smaller, the stability is higher, and the crystal bonding accuracy and efficiency are improved.

[0020] The crystal bonding machine provided in the second aspect of the present application has the above-mentioned advantages of the crystal bonding machine swing arm structure because it adopts the crystal bonding machine swing arm structure provided in the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0022] Figure 1 A schematic diagram of the three-dimensional structure of the swing arm structure of the die bonding machine provided in an embodiment of the present application;

[0023] Figure 2 for Figure 1 A schematic diagram of the local enlarged structure at point A in the middle;

[0024] Figure 3 This is a schematic diagram of the connection relationship between the voice coil motor and the swing arm in the embodiment of the present application;

[0025] Figure 4 A schematic diagram of the exploded structure of the voice coil motor provided in an embodiment of the present application;

[0026] Figure 5 A schematic diagram showing the three-dimensional structure of the elastic structure in the embodiment of the present application;

[0027] Figure 6 A schematic diagram of the three-dimensional structure of the double swing arm structure provided in an embodiment of the present application.

[0028] Among them, the reference numerals in the figure are:

[0029] 1-Mounting seat;

[0030] 2-swing arm; 20-first end; 21-second end; 22-fulcrum; 23-swing arm seat; 24-avoidance gap;

[0031] 3-voice coil motor; 30-stator assembly; 300-magnet frame; 301-magnet; 31-moving assembly; 310-coil frame; 311-coil; 3100-arc surface;

[0032] 4-Servo motor;

[0033] 5-elastic structure; 50-first spring piece; 51-second spring piece;

[0034] 6-sensing component; 60-grating ruler; 61-grating reader. DETAILED DESCRIPTION

[0035] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0036] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0037] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0039] Please also read Figures 1 to 4 , the swing arm structure of the crystal bonding machine provided in the embodiment of the present application is now described. The crystal bonding machine swing arm structure includes a mounting seat 1, a swing arm 2 and a voice coil motor 3. The swing arm 2 has a first end 20 and a second end 21 relative to each other. The first end 20 is used to connect with the voice coil motor 3, and the second end 21 is used to take out or bond the crystal. An elastic structure 5 is provided between the first end 20 and the second end 21. The swing arm 2 is elastically connected to the mounting seat 1 through the elastic structure 5, so that the swing arm 2 can swing in an arc relative to the mounting seat 1. The elastic structure 5 is the fulcrum 22 for the arc swing of the swing arm 2. The voice coil motor 3 includes a stator assembly 30 and a mover assembly 31. The stator assembly 30 is fixed to the mounting seat 1, and the mover assembly 31 is fixed to the first end 20 and can move up and down relative to the stator assembly 30, so that the swing arm 2 can swing in an arc around the fulcrum 22 under the drive of the mover assembly 31.

[0040] At this time, the swing arm 2 can be regarded as a seesaw structure, with the elastic structure 5 as the fulcrum 22 for the swing of the swing arm 2. When the swing arm 2 swings in an arc, when the first end 20 is tilted, the second end 21 is pressed down; when the first end 20 is pressed down, the second end 21 is tilted.

[0041] The swing arm 2 is elastically connected to the mounting base 1 through the elastic structure 5. On the one hand, the swing arm 2 can swing relative to the mounting base 1; on the other hand, during the swinging of the swing arm 2, the elastic structure 5 can play an elastic buffering role for the swinging of the swing arm 2, thereby preventing the end of the swing arm 2 from colliding with the chip rigidly and crushing the chip when the crystal removal and crystal bonding operations are performed at the end of the swing arm 2.

[0042] During operation, the movable subassembly 31 of the voice coil motor 3 moves relative to the stator assembly 30. Since the movable subassembly 31 is fixedly connected to the first end 20 of the swing arm 2, the movable subassembly 31 of the voice coil motor 3 and the swing arm 2 can be regarded as a whole. At the same time, since the swing arm 2 is connected to the mounting seat 1 through the elastic structure 5, when the voice coil motor 3 is driven, the movable subassembly 31 drives the first end 20 of the swing arm 2 to move synchronously. Due to the restriction of the elastic structure 5 between the swing arm 2 and the mounting seat 1, the movable subassembly 31 is forced to swing in an arc, thereby driving the swing arm 2 to perform a reciprocating arc swing motion, and then the swing arm 2 can realize crystal retrieval and crystal bonding operations, replacing the existing method of using a servo motor 4 to control the up and down movement of the swing arm 2 to perform crystal retrieval and crystal bonding. The swing arm structure of the crystal bonding machine provided in the present application has a smaller movement amplitude and higher stability, thereby improving the crystal bonding accuracy and efficiency.

[0043] In another embodiment of the present application, please refer to Figure 3 and Figure 4 The stator assembly 30 includes a magnet frame 300 and a magnet 301. The magnet frame 300 is fixed to the mounting seat 1, and the magnet 301 is mounted on the magnet frame 300. The mover assembly 31 includes a coil frame 310 and a coil 311. The coil frame 310 is fixed to the first end 20 of the swing arm 2. The coil 311 is wound and retained on the coil frame 310. The coil 311 faces the magnet 301, and the coil frame 310 is movably connected to the magnet frame 300.

[0044] During operation, current passes through the coil 311 of the movable component 31. The coil 311 generates a magnetic field after being energized, and the magnet 301 of the stator component 30 provides magnetic force, thereby generating a stable magnetic field. Under the action of the magnetic field, power is generated, so that the coil frame 310 can move relative to the magnet frame 300, and then the first end 20 of the swing arm 2 is driven to move synchronously through the coil frame 310.

[0045] In another embodiment of the present application, please continue to refer to Figure 3 and Figure 4 The shape of the coil 311 is a rectangle, and the shape of the magnet 301 matches the shape of the coil 311.

[0046] The coil 311 is wound into a rectangle, and the shape of the magnet 301 matches the shape of the coil 311. The coil frame 310 can move up and down when driven.

[0047] Specifically, the magnets 301 are arranged in two groups. The two groups of magnets 301 are respectively located on both sides of the coil 311 . The number of magnets 301 in each group is two. The two magnets 301 are arranged side by side in a rectangular shape.

[0048] In another embodiment of the present application, please refer to Figures 1 to 3 The swing arm structure of the die bonder further includes a sensor assembly 6, which is used to measure the movement position of the mover assembly 31. The movement of the mover assembly 31 can be fed back by setting the sensor assembly 6.

[0049] In another embodiment of the present application, please continue to refer to Figures 1 to 3 The sensor assembly 6 includes a grating ruler 60 and a grating reader 61. The grating ruler 60 is fitted on the coil frame 310, and the grating reader 61 is installed on the mounting seat 1 and is spaced and arranged opposite to the grating ruler 60. The grating reader 61 determines the position of the moving subassembly 31 by reading the change of the interference phenomenon caused by the light irradiating on the grating ruler 60.

[0050] In another embodiment of the present application, please continue to refer to Figures 1 to 3 The coil frame 310 is provided with an arc surface 3100 , and the grating scale 60 is arranged in contact with the arc surface 3100 , and the center of the arc surface 3100 is located at the fulcrum 22 of the swing arm 2 .

[0051] Since the movable component 31 of the voice coil motor 3 will be restricted by the elastic structure 5 when it moves, the movable component 31 actually moves in an arc. An arc surface 3100 is provided on the coil frame 310. The grating scale 60 is attached to the arc surface 3100, and an arc groove matched with the arc surface 3100 is provided on the side of the grating head 61 close to the grating scale 60. When the coil frame 310 moves, the grating head 61 and the grating scale 60 maintain the same spacing distance, thereby ensuring that the grating head 61 can accurately feedback the movement of the movable component 31.

[0052] In another embodiment of the present application, please refer to Figure 5 The elastic structure 5 includes a first elastic sheet 50 , one end of the first elastic sheet 50 is fixed to the mounting seat 1 , and the other end of the first elastic sheet 50 is fixed to the swing arm 2 .

[0053] The first elastic sheet 50 is used to connect the swing arm 2 and the mounting seat 1 , so that an elastic connection between the swing arm 2 and the mounting seat 1 can be achieved.

[0054] In another embodiment of the present application, please continue to refer to Figure 5The elastic structure 5 includes a second elastic sheet 51 , one end of the second elastic sheet 51 is fixed to the mounting seat 1 , the other end of the second elastic sheet 51 is fixed to the swing arm 2 , and the second elastic sheet 51 and the first elastic sheet 50 are perpendicular to each other.

[0055] Specifically, the first elastic piece 50 is arranged along the horizontal direction, and the second elastic piece 51 is arranged along the vertical direction.

[0056] The use of the first elastic sheet 50 and the second elastic sheet 51 which are perpendicular to each other can improve the reliability of the elastic connection between the swing arm 2 and the mounting seat 1 .

[0057] In another embodiment of the present application, pressure blocks are provided at both ends of the first spring piece 50, and the pressure blocks at both ends respectively press and fix the two ends of the first spring piece 50 on the mounting seat 1 and the swing arm 2. The pressure blocks can be fixed to the mounting seat 1 and the swing arm 2 by fasteners such as bolts or screws. Similarly, the second spring piece 51 can also be fixed in the above-mentioned manner.

[0058] Further, the swing arm 2 includes a swing arm body and a swing arm seat 23 fixedly connected to each other, the first end 20 of the swing arm 2 is located at an end of the swing arm seat 23 away from the swing arm body, the fulcrum 22 is located at an end of the swing arm seat 23 close to the swing arm body, and the second end 21 is located at an end of the swing arm body away from the swing arm seat 23. The swing arm body is elastically connected to the mounting seat 1 through the swing arm seat 23 and the elastic structure 5.

[0059] In addition, since the swing arm 2 needs to swing relative to the mounting seat 1 (arc motion), an avoidance gap 24 is provided between the mounting seat 1 and the swing arm seat 23 to ensure that the swing arm seat 23 avoids interference with the end of the mounting seat 1 when the swing arm 2 makes an arc motion.

[0060] In another embodiment of the present application, please refer to Figure 1 and Figure 5 The mounting seat 1 is cylindrical in shape, and an opening is provided at one end of the mounting seat 1. The voice coil motor 3 is accommodated in the mounting seat 1 and connected to the swing arm 2 through the opening. Thus, the volume of the swing arm structure of the die bonder can be reduced, and the structure is more compact.

[0061] In another embodiment of the present application, please refer to Figure 1 The swing arm structure of the crystal bonding machine further includes a servo motor 4, which is mounted on the mounting base 1, and the output shaft of the servo motor 4 is connected to the mounting base 1. The servo motor 4 drives the mounting base 1 to rotate together with the swing arm 2, so as to drive the second end 21 of the swing arm 2 to reach the target position for crystal removal and crystal bonding.

[0062] In another embodiment of the present application, at least two groups of swing arms 2 and voice coil motors 3 are provided on the mounting base 1, and each group of swing arms 2 is correspondingly provided with a voice coil motor 3. The structures of the swing arms and voice coil motors 3 are consistent with the above solution, so they are not described in detail.

[0063] Please refer to Figure 6 When the mounting base 1 is provided with a swing arm 2, two sets of swing arms 2 are arranged opposite to each other on the mounting base 1, and are respectively arranged on opposite sides of the mounting base. The mounting base 1 and the two sets of swing arms 2 are driven by the servo motor 4 to rotate together, and the two sets of swing arms 2 can respectively take out the crystal and fix the crystal. After the swing arm 2 on one side takes out the crystal, the servo motor 4 drives the mounting base 1 to rotate 180°, so that the swing arm 2 on the other side is driven. At the same time, the swing arm 2 that takes out the crystal first is fixed, and the swing arm 2 that takes out the crystal later is fixed, and they go back and forth in sequence. This increases the efficiency of crystal taking and fixing.

[0064] In the working process, the two sets of swing arms 2 are fixedly connected to the moving subassembly 31 of the voice coil motor 3, and can drive the two sets of swing arms 2 to perform reciprocating arc swinging motion. By controlling the swing arms 2 to move up and down to perform crystal retrieval and crystal bonding, the movement amplitude of the swing arm structure of the crystal bonding machine is made smaller, and by setting a double swing arm on the mounting base 2, the crystal bonding efficiency is improved.

[0065] The present application also provides a crystal bonding device, comprising the crystal bonding machine swing arm structure as described above.

[0066] The crystal bonding equipment provided in the present application has the above-mentioned advantages of the crystal bonding machine swing arm structure because it adopts the crystal bonding machine swing arm structure provided in the present application.

[0067] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A swing arm structure of a die bonder, characterized in that: include: Mounting seat; A swing arm, the swing arm having a first end and a second end opposite to each other, an elastic structure being provided between the first end and the second end, the swing arm being elastically connected to the mounting seat via the elastic structure, so that the swing arm can swing in an arc relative to the mounting seat, and the elastic structure being a fulcrum for the swing arm to swing in an arc; A voice coil motor, the voice coil motor comprising a stator assembly and a mover assembly, the stator assembly being fixed to the mounting seat, the mover assembly being fixed to the first end and being able to move up and down relative to the stator assembly, so that the swing arm can swing around the fulcrum arc under the drive of the mover assembly.

2. The swing arm structure of the die bonder according to claim 1, characterized in that: The stator assembly includes a magnet frame and a magnet, the magnet frame is fixed to the mounting seat, and the magnet is mounted on the magnet frame; the mover assembly includes a coil frame and a coil, the coil frame is fixed to the first end of the swing arm, the coil is wound around and retained on the coil frame, the coil faces the magnet, and the coil frame is movably connected to the magnet frame.

3. The swing arm structure of the die bonder according to claim 2, characterized in that: The shape of the coil winding is rectangular, and the shape of the magnet is adapted to the shape of the coil winding.

4. The swing arm structure of the die bonder according to claim 2, characterized in that: The swing arm structure of the crystal bonding machine also includes a sensor component, which is used to measure the movement position of the movable component; the sensor component includes a grating scale and a grating reader, the grating scale is fitted on the coil frame, and the grating reader is installed on the mounting seat and is spaced relative to the grating scale.

5. The swing arm structure of the die bonder according to claim 4, characterized in that: The coil frame is provided with an arc surface, the grating scale is arranged in contact with the arc surface, and the center of the arc surface is located at the fulcrum of the swing arm.

6. The swing arm structure of the die bonder according to claim 1, characterized in that: The elastic structure includes a first elastic sheet, one end of which is fixed to the mounting seat, and the other end of which is fixed to the swing arm.

7. The swing arm structure of the die bonder according to claim 6, characterized in that: The elastic structure includes a second elastic sheet, one end of the second elastic sheet is fixed to the mounting seat, the other end of the second elastic sheet is fixed to the swing arm, and the second elastic sheet is perpendicular to the first elastic sheet.

8. The swing arm structure of a die bonder according to any one of claims 1 to 7, characterized in that: The mounting seat is cylindrical in shape, and an opening is provided at one end of the mounting seat. The voice coil motor is accommodated in the mounting seat and connected to the swing arm through the opening.

9. The swing arm structure of a die bonder according to any one of claims 1 to 7, characterized in that: At least two groups of the swing arms and voice coil motors are arranged on the mounting seat, and each group of the swing arms is correspondingly provided with the voice coil motor.

10. A die bonding machine, characterized in that: It comprises a crystal bonding machine swing arm structure as described in any one of claims 1 to 9.

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