Size-adjustable silicon wafer basket
By designing a silicon wafer flower basket including chutes, scale lines and removable placement mechanisms, the problem of the inability to adjust the silicon wafer size in the prior art is solved, and the adaptation and cost reduction of silicon wafers of different sizes is achieved, while protecting them. Silicon wafers and prevent chemical residues.
Patent Information
- Application Number
- CN202420352062.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-26
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2034-02-26
AI Technical Summary
Existing silicon wafer baskets cannot be adjusted according to silicon wafers of different sizes, resulting in the need of a large number of flower baskets of different sizes, increasing production costs.
An adjustable silicon wafer basket is designed including a first load-bearing plate, a second load-bearing plate, a fastening screw, a support screw, a collar, a placement mechanism and a socket screw. Through the design of the chute and scale, the fastening screws are used to lock the position of the second carrier plate, and the support screws and placement mechanisms are removably installed to accommodate different sizes and quantities of silicon wafers.
The adaptation of silicon wafers of different sizes is achieved, production costs are reduced, and the silicon wafers are protected by Uli glue materials and strip leaks to prevent chemical liquid residues.
Smart Images
Figure CN222483309U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of silicon wafer flower baskets, and in particular relates to a size-adjustable silicon wafer flower basket. Background Art
[0002] The silicon wafer basket is a carrier for loading silicon wafers to ensure that the silicon wafers are not scratched. For laboratories, in order to simulate on-site experimental conditions, different silicon wafers often need to be switched. At present, silicon wafers of different sizes need to use a carrying basket corresponding to the model, which cannot be adjusted according to the size of the silicon wafer. When the size of the silicon wafer is too large, a large number of baskets of different sizes are required, and the production cost is high. Therefore, it is necessary to design a size-adjustable silicon wafer basket. Summary of the invention
[0003] In order to overcome the problem that silicon wafers of different sizes currently need to use corresponding bearing baskets, which is costly, the utility model provides a size-adjustable silicon wafer basket; the utility model can adapt to silicon wafers of different sizes, and the distance between the first bearing plate and the second bearing plate can be controlled by adjusting the fastening screws according to the size of the silicon wafer. After the adjustment is completed, the silicon wafer can be placed on the placement mechanism, which can adapt to silicon wafers of different sizes and reduce production costs.
[0004] To achieve the above-mentioned purpose, the utility model is implemented through the following technical scheme: a size-adjustable silicon wafer basket mainly includes a first supporting plate, a second supporting plate, a fastening screw, a supporting screw, a collar, a placing mechanism, and a sleeve screw. The first supporting plate is provided with a slide groove, and the second supporting plate can be slidably installed inside the slide groove. The first supporting plate is provided with a straight slot, and a scale line is provided on the side of the straight slot. The fastening screw is installed on the second supporting plate and is located inside the straight slot. The second supporting plate is locked on the straight slot by the fastening screw. Threads are provided at both ends of the supporting screw, and threaded holes are provided on the first supporting plate and the second supporting plate. The supporting screw can be detachably installed inside the threaded hole. The placing mechanism can be detachably installed on the supporting screw through the collar. A thread is provided at one end of the sleeve screw, and a threaded sleeve is provided at the other end. The sleeve screw is tightened on the supporting screw through the threaded sleeve, and the placing mechanism is installed on the sleeve screw.
[0005] The placing mechanism is installed in two or more groups.
[0006] When the number of the placing mechanisms is greater than two groups, the placing mechanisms are installed at equal intervals.
[0007] The placement mechanism includes a support frame, a partition, a support plate, and a limit strip. The support frame is installed on a support screw and a sleeve screw through a ring. The partition is installed on the support frame. A slot is formed between the support frame and the partition, and between the partitions. The support plate is installed at the bottom end of the support frame. A strip-shaped leakage hole is opened on the support plate, and the limit strip is installed on the support plate.
[0008] The support frame, partition, support plate and limit strip are made of high-strength rubber.
[0009] Beneficial effects of the utility model:
[0010] The utility model can adapt to silicon wafers of different sizes. By twisting the fastening screws, the second bearing plate is pulled, and the second bearing plate moves inside the slide groove. When the second bearing plate is moved to a suitable position according to the scale line, the fastening screws are twisted again to lock the second bearing plate on the straight groove of the first bearing plate and fix it. After the adjustment is completed, the silicon wafer can be placed on the placement mechanism. The utility model can adapt to silicon wafers of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 It is an isometric schematic diagram of the utility model.
[0012] Figure 2 yes Figure 1 A partial enlarged view of point A in the middle.
[0013] Figure 3 yes Figure 1 A partial enlarged view of point B in the middle.
[0014] Figure 4 This utility model is a three-dimensional schematic diagram Figure 1 .
[0015] Figure 5 This utility model is a three-dimensional schematic diagram Figure 2 .
[0016] Figure 6 It is a top view of the utility model. DETAILED DESCRIPTION
[0017] In order to make the purpose, technical solution and beneficial effects of the present invention clearer, the preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings to facilitate understanding by technicians.
[0018] The utility model discloses a size-adjustable silicon wafer flower basket, which mainly comprises a first bearing plate 1, a second bearing plate 2, a fastening screw 3, a support screw 4, a collar 5, a placement mechanism 6, and a sleeve screw 7. The first bearing plate 1 is provided with a slide groove 11, and the second bearing plate 2 can be slidably installed inside the slide groove 11. The first bearing plate 1 is provided with a straight slot 12, and a scale line 13 is arranged on the side of the straight slot 12. The fastening screw 3 is installed on the second bearing plate 2 and is located at the straight slot 11. 2, the second bearing plate 2 is locked on the straight slot 12 by means of the fastening screws 3, first threads 41 are provided at both ends of the support screw 4, threaded holes are provided on the first bearing plate 1 and the second bearing plate 2, the support screw 4 is detachably mounted inside the threaded holes, the placement mechanism 6 is detachably mounted on the support screw 4 by means of the collar 5, the sleeve screw 7 is provided with a second thread 71 at one end and a threaded sleeve 72 at the other end, the sleeve screw 7 is tightened on the support screw 4 by means of the threaded sleeve 72, and the placement mechanism 6 is mounted on the sleeve screw 7.
[0019] The distance between the first carrier plate 1 and the second carrier plate 2 is adjusted according to the size of the silicon wafer. The staff twists the fastening screw 3 and pulls the second carrier plate 2. The second carrier plate 2 moves inside the slide groove 11. When the second carrier plate 2 is moved to a suitable position according to the scale line 13, the fastening screw 3 is twisted again to lock the second carrier plate 2 on the straight slot 12 of the first carrier plate 1 and fix it. Then, according to the number of silicon wafers to be placed, the placement mechanism 6 is installed. When the number of silicon wafers to be placed is small, it is only necessary to install the support screw 4 on the threaded holes of the first carrier plate 1 and the second carrier plate 2, and then install the two sets of placement mechanisms 6 on the support screws through the collar 5. On the rod 4, if a large number of silicon wafers need to be placed, first tighten the sleeve screw 7 on the first thread 41 of the support screw 4 through the threaded sleeve 72, and then install the placement mechanism 6 on the sleeve screw 7 through the ring 5. After the installation is completed, the flower basket is placed on the desktop or test bench, and the silicon wafers are placed in the slot 621. The partition 62 and the limit strip 64 separate the silicon wafers. The support frame 61, the partition 62, the support plate 63, and the limit strip 64 are made of PU. PU can avoid damaging the silicon wafer. The strip leak hole 631 can drain the chemical liquid on the silicon wafer to prevent the residual liquid from being blown into the silicon wafer to form liquid residue during the next drying step.
[0020] like Figure 1 , Figure 4 , Figure 5 , Figure 6 As shown, the placing mechanism 6 is installed in two or more groups. When the placing mechanism 6 is greater than two groups, the placing mechanism 6 is installed at equal intervals. When the number of silicon wafers to be placed is small, only two groups of placing mechanisms 6 need to be installed. When more silicon wafers need to be placed, multiple groups of placing mechanisms 6 can be installed according to the number of silicon wafers.
[0021] like Figure 3 , Figure 6 As shown, the placement mechanism 6 includes a support frame 61, a partition 62, a support plate 63, and a limit strip 64. The support frame 61 is installed on the support screw 4 and the socket screw 7 through the ring 5. The partition 62 is installed on the support frame 61. A slot 621 is formed between the support frame 61 and the partition 62, and between the partitions 62 and the partitions 62. The support plate 63 is installed at the bottom end of the support frame 61. A strip-shaped leakage hole 631 is opened on the support plate 63, and the limit strip 64 is installed on the support plate 63; the silicon wafer is placed in the slot 621, the partition 62 and the limit strip 64 separate the silicon wafers, and the strip-shaped leakage hole 631 can drain the chemical liquid on the silicon wafer to prevent the residual liquid from being blown into the silicon wafer to form liquid residue during the next drying step, resulting in black circles on the silicon wafer.
[0022] The support frame 61, the partition plate 62, the support plate 63, and the limit strip 64 are made of PU. PU can avoid damaging the silicon wafer.
[0023] Working process:
[0024] When in use, first adjust the distance between the first carrier plate 1 and the second carrier plate 2 according to the size of the silicon wafer, the staff twists the fastening screw 3, pulls the second carrier plate 2, and the second carrier plate 2 moves inside the slide groove 11. When the second carrier plate 2 is moved to a suitable position according to the scale line 13, the fastening screw 3 is twisted again to lock the second carrier plate 2 on the straight slot 12 of the first carrier plate 1 and fix it. Then, according to the number of silicon wafers to be placed, install the placement mechanism 6. When the number of silicon wafers to be placed is small, it is only necessary to install the support screw 4 on the threaded holes of the first carrier plate 1 and the second carrier plate 2, and then install the two sets of placement mechanisms 6 through the collar 5. On the supporting screw 4, if a large number of silicon wafers need to be placed, first tighten the sleeve screw 7 onto the first thread 41 of the supporting screw 4 through the threaded sleeve 72, and then install the placing mechanism 6 on the sleeve screw 7 through the sleeve ring 5. After the installation is completed, the flower basket is placed on the desktop or test bench, and the silicon wafers are placed in the card slot 621. The partition 62 and the limit strip 64 separate the silicon wafers. The material of the supporting frame 61, the partition 62, the supporting plate 63, and the limit strip 64 is PU. PU can avoid damaging the silicon wafer. The strip leakage hole 631 can drain the chemical liquid on the silicon wafer to prevent the residual liquid from being blown into the silicon wafer to form liquid residue during the next drying step.
[0025] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the utility model.
Claims
1. A size-adjustable silicon wafer basket, characterized in that: The size-adjustable silicon wafer basket comprises a first carrier plate (1), a second carrier plate (2), a fastening screw (3), a support screw (4), a collar (5), a placement mechanism (6), and a sleeve screw (7). The first carrier plate (1) is provided with a slide groove (11), the second carrier plate (2) can be slidably mounted inside the slide groove (11), the first carrier plate (1) is provided with a straight slot (12), a scale line (13) is arranged on the side of the straight slot (12), the fastening screw (3) is mounted on the second carrier plate (2) and is located inside the straight slot (12), and the second carrier plate (2) The support screw (4) is locked on the straight slot (12) by means of a fastening screw (3), first threads (41) are provided at both ends of the support screw (4), threaded holes are provided on the first bearing plate (1) and the second bearing plate (2), the support screw (4) is detachably mounted inside the threaded holes, the placement mechanism (6) is detachably mounted on the support screw (4) through a collar (5), a second thread (71) is provided at one end of the sleeve screw (7), and a threaded sleeve (72) is provided at the other end, the sleeve screw (7) is tightened on the support screw (4) through the threaded sleeve (72), and the placement mechanism (6) is mounted on the sleeve screw (7).
2. The size-adjustable silicon wafer basket according to claim 1, characterized in that: The placement mechanism (6) is installed in two or more groups.
3. A size-adjustable silicon wafer basket as claimed in claim 1 or 2, characterized in that: When the number of the placing mechanisms (6) is greater than two groups, the placing mechanisms (6) are installed at equal intervals.
4. A size-adjustable silicon wafer basket as claimed in claim 1 or 2, characterized in that: The placement mechanism (6) comprises a support frame (61), a partition (62), a support plate (63), and a limiting strip (64); the support frame (61) is mounted on the support screw (4) and the sleeve screw (7) through a sleeve ring (5); the partition (62) is mounted on the support frame (61); a slot (621) is formed between the support frame (61) and the partition (62), and between the partitions (62) and the partitions (62); the support plate (63) is mounted on the bottom end of the support frame (61); a strip-shaped leak hole (631) is opened on the support plate (63); and the limiting strip (64) is mounted on the support plate (63).
5. The size-adjustable silicon wafer basket according to claim 4, characterized in that: The support frame (61), the partition plate (62), the support plate (63), and the limit strip (64) are made of elastomeric rubber.