Dotting device and detection equipment

Abstract

The utility model discloses a dotting device and detection equipment, the dotting device comprises a fixed frame, a driving assembly, a dotting assembly and a limiting assembly, the driving assembly comprises a fixed part and a movable part, the fixed part surrounds the movable part, the fixed part can drive the movable part to move between a dotting position and a standby position along the vertical direction relative to the fixed part, and the limiting assembly is arranged on the fixed part. The dotting position is located below the standby position; the dotting assembly comprises an ink box and a dotting piece, the ink box is connected to the fixing frame and located below the driving assembly, the ink box is provided with a containing cavity used for containing ink, the dotting piece is connected to the movable piece and penetrates through the ink box, and the movable piece can drive the dotting piece to move relative to the ink box so that the ink can flow out of the containing cavity; the limiting assembly comprises a first limiting piece, the first limiting piece is connected to the fixing frame, and the first limiting piece is used for abutting against the movable piece when the movable piece is located at the dotting position so that the dotting height can be precisely limited, the action stability of the dotting device can be improved, and the dotting size consistency can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a dotting device and a detection equipment. Background Art

[0002] In the process of wafer inspection, unqualified grains need to be marked so that the processing of unqualified grains can be skipped in subsequent processing steps to improve processing efficiency. In related technologies, grains can be marked with dots by a dotting device. The dotting device drives the dotting member to move relative to the ink cartridge through an electromagnetic coil, so that the dotting member contacts the surface of the grain to form ink dots, thereby marking unqualified grains. When a marking error occurs, the ink dots on the surface of the grain can be washed away to restore the grain to a state that can be processed normally. However, in actual use, the dotting member may become unstable after multiple reciprocating motions, which may lead to undesirable conditions such as inconsistent ink dot size or even missing dots. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a dotting device, which can improve the stability of the dotting device and improve the consistency of the dotting size.

[0004] The utility model also discloses a detection device comprising the dotting device.

[0005] A dotting device provided by an embodiment of the first aspect of the utility model includes: a fixed frame; a driving assembly, including a fixed part and a movable part, the fixed part surrounding the movable part, the fixed part can drive the movable part to move between a dotting position and a standby position relative to the fixed part along a vertical direction, the dotting position is located below the standby position, and the fixed part is connected to the fixed frame; a dotting assembly, including an ink cartridge and a dotting part, the ink cartridge is connected to the fixed frame and is located below the driving assembly, the ink cartridge has a accommodating chamber for accommodating ink, the dotting part is connected to the movable part and penetrates the ink cartridge, the movable part can drive the dotting part to move relative to the ink cartridge to make the ink flow out of the accommodating chamber; a limiting assembly, including a first limiting part, the first limiting part is connected to the fixed frame, and the first limiting part is used to abut against the movable part when the movable part is located at the dotting position.

[0006] The dotting device provided by the embodiment of the utility model has at least the following beneficial effects:

[0007] The dotting device provided in the embodiment of the utility model is provided with a limit assembly, and the first limit member of the limit assembly can abut against the movable member when the movable member is in the dotting position, so as to accurately limit the dotting height, improve the stability of the dotting device action, and improve the consistency of the dotting size.

[0008] In some embodiments of the present invention, the limit assembly further includes a second limit member, which is connected to the fixing frame and located above the first limit member, and the second limit member is used to abut against the movable member when the movable member is located in the standby position.

[0009] In some embodiments of the present invention, the driving assembly also includes an elastic member arranged in a vertical direction, one end of the elastic member is connected to the fixed member, and the other end is connected to the movable member, and when the movable member is located at the dotting position, the elastic member is compressed or stretched.

[0010] In some embodiments of the utility model, the dotting device also includes an adjustment component, the adjustment component includes a first mounting block and a first connecting member, the first mounting block is connected to the fixed frame, the first mounting block has a first adjustment groove extending along a first direction, the first direction is perpendicular to the vertical direction, the first connecting member is passed through the first adjustment groove and is detachably connected to the fixed member, and one end of the first connecting member away from the fixed member abuts against the first mounting block.

[0011] In some embodiments of the utility model, the adjustment component also includes a second mounting block and a second connecting member, the fixing frame has a second adjustment groove, the second connecting member is passed through the second adjustment groove and is detachably connected to the second mounting block, one end of the second connecting member away from the second mounting block abuts against the fixing frame, the width of the second adjustment groove in a third direction is greater than the width of the part of the second connecting member passing through the second adjustment groove, the third direction is perpendicular to the vertical direction and perpendicular to the first direction, and the ink cartridge is connected to the second mounting block.

[0012] In some embodiments of the present invention, the second adjustment slot extends in a vertical direction.

[0013] In some embodiments of the utility model, the movable part includes a movable block, a first clamping block and a second clamping block, the first clamping block and the second clamping block are both connected to the movable block, the first clamping block and the second clamping block can be relatively close to or far away from each other, and the dotting part is clamped between the first clamping block and the second clamping block.

[0014] In some embodiments of the present invention, the movable part also includes a protrusion, which is connected to the second clamping block and protrudes in a direction intersecting the vertical direction relative to the second clamping block, and the protrusion is used to abut against the first limiting part when the movable part is located at the dot-marking position.

[0015] In some embodiments of the utility model, the ink cartridge includes a accommodating portion and an outlet portion which are detachably connected in sequence along the vertical direction, the accommodating portion having the accommodating cavity, the outlet portion having an ink outlet channel extending along the vertical direction, the ink outlet channel being connected to the accommodating cavity, the end of the ink outlet channel away from the accommodating cavity having a first opening for ink to flow out, the cross-sectional area of ​​the ink outlet channel being smaller than the cross-sectional area of ​​the accommodating cavity and larger than the cross-sectional area of ​​the dotting member, and the dotting member being able to move inside the ink outlet channel.

[0016] A detection device provided in an embodiment of the second aspect of the utility model includes: the dotting device provided in any embodiment of the first aspect of the utility model; and a controller, which is communicatively connected with the dotting device, and the controller can control the action of the driving component.

[0017] The second aspect of the present invention provides a detection device which has at least the following beneficial effects:

[0018] The detection equipment provided in the embodiment of the second aspect of the utility model includes the dotting device provided in the embodiment of the utility model, and a limiting component is arranged in the dotting device. The first limiting component of the limiting component can abut against the movable part when the movable part is in the dotting position, so as to accurately limit the dotting height, improve the stability of the dotting device action, and improve the consistency of the dotting size.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0021] Figure 1 A three-dimensional schematic diagram of a dotting device provided for some embodiments of the first aspect of the utility model;

[0022] Figure 2 for Figure 1 A three-dimensional schematic diagram of the dotting device shown at another angle;

[0023] Figure 3 for Figure 1 A cross-sectional view of the dotting device shown when the movable part is in the standby position;

[0024] Figure 4 for Figure 1 The cross-sectional view of the movable part in the striking device shown is in the striking position.

[0025] Reference numerals:

[0026] Fixed frame 100, second adjustment groove 110, driving assembly 200, fixed part 210, movable part 220, movable block 221, first clamping block 222, second clamping block 223, protrusion 224, elastic part 230, dotting assembly 300, ink cartridge 310, accommodating chamber 311, accommodating part 312, outlet part 313, ink outlet channel 314, first opening 315, second opening 316, dotting part 320, limiting assembly 400, first limiting part 410, second limiting part 420, adjusting assembly 500, first mounting block 510, first adjustment groove 511, second mounting block 520, grain 10. DETAILED DESCRIPTION

[0027] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0028] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0029] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0030] In the description of the present invention, the reference to the terms "one embodiment", "some embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0031] In the process of wafer inspection, unqualified grains need to be marked so that the processing of unqualified grains can be skipped in subsequent processing steps to improve processing efficiency. In related technologies, grains can be marked with dots by a dotting device. The dotting device drives the dotting member to move relative to the ink cartridge through an electromagnetic coil, so that the dotting member contacts the surface of the grain to form ink dots, thereby marking unqualified grains. When a marking error occurs, the ink dots on the surface of the grain can be washed away to restore the grain to a state that can be processed normally. However, in actual use, the dotting member may become unstable after multiple reciprocating motions, which may lead to undesirable conditions such as inconsistent ink dot size or even missing dots.

[0032] Based on this, refer to Figures 1 to 4 The first embodiment of the utility model provides a dotting device, including a fixing frame 100, a driving assembly 200, a dotting assembly 300 and a limiting assembly 400. The driving assembly 200 includes a fixing member 210 and a movable member 220. The fixing member 210 surrounds the movable member 220. The fixing member 210 can drive the movable member 220 to move relative to the fixing member 210 in a vertical direction (i.e. Figures 1 to 4 The dotting position is located below the standby position, and the fixing member 210 is connected to the fixing frame 100; the dotting assembly 300 includes an ink cartridge 310 and a dotting member 320, the ink cartridge 310 is connected to the fixing frame 100 and is located below the driving assembly 200, the ink cartridge 310 has a accommodating chamber 311 for accommodating ink, the dotting member 320 is connected to the movable member 220 and is penetrated by the ink cartridge 310, the movable member 220 can drive the dotting member 320 to move relative to the ink cartridge 310 to allow the ink to flow out of the accommodating chamber 311; the limiting assembly 400 includes a first limiting member 410, the first limiting member 410 is connected to the fixing frame 100, and the first limiting member 410 is used to abut against the movable member 220 when the movable member 220 is located at the dotting position.

[0033] During use of the dotting device provided in the first embodiment of the utility model, when no unqualified grains 10 are detected, refer to Figure 3 , the movable member 220 is in the standby position, there is a gap between the dotting member 320 and the grain 10, and the ink will not be dotted on the surface of the grain 10; when unqualified grains 10 are detected and need to be marked, refer to Figure 4 , the movable member 220 drives the dotting member 320 to move toward the direction close to the grain 10 until the movable member 220 contacts the first stopper 410, at which time the ink droplets at the end of the dotting member 320 away from the movable member 220 contacts the grain 10, thereby achieving dotting on the surface of the grain 10. The first stopper 410 can limit the lowest position of the movable member 220, thereby accurately limiting the dotting height, improving the stability of the dotting device action, and improving the consistency of dotting size.

[0034] It can be understood that, in some embodiments, the fixed part 210 is an electromagnet, and the movable part 220 is an iron core. When the electromagnet is energized, it can drive the iron core to move in the vertical direction; in other embodiments, the fixed part 210 can use a linear motor, and the movable part 220 is connected to the output end of the linear motor; other forms can also be used, and the fixed part 210 can drive the movable part 220 to move in the vertical direction.

[0035] Further, refer to Figures 1 to 4 The limiting assembly 400 further includes a second limiting member 420, which is connected to the fixing frame 100 and is located above the first limiting member 410. Figure 3 When the movable part 220 is in the standby position, the second limit member 420 abuts against the movable part 220, and the second limit member 420 can limit the highest position of the movable part 220. The first limit member 410 cooperates with the second limit member 420 to accurately limit the moving stroke of the movable part 220, so as to further improve the stability of the action of the dotting device and improve the consistency of the moving stroke.

[0036] In order to facilitate the reset of the movable member 220 from the dotting position to the standby position, refer to Figures 1 to 4 The driving assembly 200 further includes an elastic member 230 arranged in the vertical direction, one end of the elastic member 230 is connected to the fixed member 210, and the other end is connected to the movable member 220. When an unqualified crystal grain 10 is detected and needs to be marked, refer to Figure 4 The fixed part 210 provides the movable part 220 with a force to resist the elastic force of the elastic part 230, so that the movable part 220 can move to the dotting position, and the elastic part 230 is compressed at this time; when the dotting action is completed, the fixed part 210 no longer provides the movable part 220 with a force to resist the elastic force of the elastic part 230, and under the action of the elastic force of the elastic part 230, the movable part 220 moves upward to the standby position, realizing the reset action of the movable part 220 from the dotting position to the standby position. By providing the elastic part 230, the fixed part 210 can realize the self-reset of the movable part 220 without providing an additional reset driving force, which is conducive to reducing the energy consumption of the dotting device.

[0037] It is understandable that in other embodiments, when the movable member 220 is located at the striking position, the elastic member 230 may be stretched, which can also enable the movable member 220 to automatically reset from the striking position to the standby position.

[0038] The concentricity of the driving assembly 200, the dotting member 320 and the ink cartridge 310 will affect the dotting effect. Figure 1 and Figure 2The dotting device further includes an adjustment assembly 500, which includes a first mounting block 510 and a first connecting member (not shown in the figure). The first mounting block 510 is connected to the fixing frame 100, and the first mounting block 510 has a first direction (i.e. Figure 1 and Figure 2 The first adjusting slot 511 extends in the front-to-back direction (shown in the front-to-back direction), the first connecting member is inserted into the first adjusting slot 511 and is detachably connected to the fixing member 210, and one end of the first connecting member away from the fixing member 210 abuts against the first mounting block 510. Thus, in actual installation, the position of the driving assembly 200 can be adjusted in the front-to-back direction, so that the central axis of the driving assembly 200, the central axis of the dotting member 320 and the central axis of the ink cartridge 310 are closer, thereby improving the concentricity of the driving assembly 200, the dotting member 320 and the ink cartridge 310, thereby improving the dotting effect.

[0039] It is understandable that the first connecting member can be a bolt, the screw portion of the bolt is passed through the first adjustment groove 511 and connected to the fixing member 210, the end of the bolt abuts against the first mounting block 510, and the relative position between the end of the bolt and the first mounting block 510 is fixed by friction.

[0040] Further, refer to Figure 1 and Figure 2 The adjustment assembly 500 further includes a second mounting block 520 and a second connecting member. The fixing frame 100 has a second adjustment slot 110. The second connecting member is inserted into the second adjustment slot 110 and is detachably connected to the second mounting block 520. One end of the second connecting member away from the second mounting block 520 abuts against the fixing frame 100. The second adjustment slot 110 is in the third direction (i.e. Figure 1 and Figure 2 The width in the left-right direction (shown in the figure) is greater than the width of the portion of the second connecting member that penetrates the second adjusting slot 110, and the ink cartridge 310 is connected to the second mounting block 520. Therefore, in actual installation, the position of the ink cartridge 310 can be fine-tuned in the left-right direction to make the central axis of the driving component 200, the central axis of the dotting member 320 and the central axis of the ink cartridge 310 closer, thereby improving the concentricity of the driving component 200, the dotting member 320 and the ink cartridge 310, thereby improving the dotting effect.

[0041] It is understandable that the second connecting member can be a bolt, the screw portion of the bolt is passed through the second adjustment groove 110 and connected to the second mounting block 520, the end of the bolt abuts against the fixing frame 100, and the relative position between the end of the bolt and the fixing frame 100 is fixed by friction.

[0042] Further, refer to Figure 1 and Figure 2The second adjustment groove 110 extends in the vertical direction, so that the height of the ink cartridge 310 in the up and down directions can be adjusted. The height of the ink cartridge 310 can be adjusted according to parameters such as the actual required dotting height and the length of the dotting member 320, thereby improving the versatility of the dotting device.

[0043] Further, refer to Figures 1 to 4 The movable member 220 includes a movable block 221, a first clamping block 222 and a second clamping block 223. The first clamping block 222 and the second clamping block 223 are both connected to the movable block 221. The first clamping block 222 and the second clamping block 223 can be relatively close to or far away from each other. The dotting member 320 is clamped between the first clamping block 222 and the second clamping block 223. Thus, the dotting member 320 and the movable member 220 are detachably connected. When the dotting member 320 needs to be replaced, the first clamping block 222 and the second clamping block 223 can be adjusted to be relatively far away from each other, the dotting member 320 can be loosened, the old dotting member 320 can be removed, one end of the new dotting member 320 can be placed between the first clamping block 222 and the second clamping block 223, and then the first clamping block 222 and the second clamping block 223 can be relatively close to each other to clamp the new dotting member 320, and the replacement of the dotting member 320 can be completed.

[0044] It can be understood that there are multiple ways of connecting the first clamping block 222 and the second clamping block 223. For example, the first clamping block 222 can be set to be detachably connected to the second clamping block 223. Specifically, the first clamping block 222 and the second clamping block 223 can be detachably connected by structures such as bolts or snaps. The first clamping block 222 is indirectly connected to the movable block 221. When the dotting member 320 needs to be replaced, the first clamping block 222 can be removed from the second clamping block 223. After the dotting member 320 is replaced, the first clamping block 222 can be connected to the second clamping block 223.

[0045] Further, refer to Figures 2 to 4 The movable member 220 further includes a protrusion 224, which is connected to the second clamping block 223 and protrudes in a direction intersecting the vertical direction relative to the second clamping block 223. The protrusion 224 is used to abut against the first stopper 410 when the movable member 220 is at the dot-marking position. The first stopper 410 is arranged on the side of the movable block 221, which will not affect the normal movement of the movable member 220, and the protrusion 224 protruding in a direction intersecting the vertical direction relative to the second clamping block 223 can abut against the first stopper 410 when the movable member 220 reaches the dot-marking position, and the structural layout is relatively reasonable.

[0046] It is understandable that the protrusion 224 can be integrally connected to the second clamping block 223, or can be detachably connected to the second clamping block 223. In the scheme where the protrusion 224 is detachably connected to the second clamping block 223, when the relative position of the drive assembly 200 and the first stopper 410 changes, the protrusion 224 of different lengths can be replaced, or the length of the protrusion 224 extending relative to the clamping block 223 can be adjusted to ensure that the protrusion 224 can abut against the first stopper 410.

[0047] Reference Figures 1 to 4 The ink cartridge 310 includes a accommodating portion 312 and an outlet portion 313 which are detachably connected in sequence along the vertical direction. The accommodating portion 312 has a accommodating cavity 311, and the outlet portion 313 has an ink outlet channel 314 extending along the vertical direction. The ink outlet channel 314 is connected to the accommodating cavity 311. The end of the ink outlet channel 314 away from the accommodating cavity 311 has a first opening 315 for ink to flow out. The cross-sectional area of ​​the ink outlet channel 314 is smaller than the cross-sectional area of ​​the accommodating cavity 311 and larger than the cross-sectional area of ​​the dotting member 320. The dotting member 320 can move inside the ink outlet channel 314. The ink outlet channel 314 has a smaller cross-sectional area. Due to capillary action, the ink will not drip directly from the first opening 315 in the ink outlet channel 314. The ink will only be brought out from the first opening 315 when the dotting component 320 moves in the ink outlet channel 314 to achieve dotting. The detachably connected accommodating portion 312 and the outlet portion 313 can realize the disassembly and replacement of the outlet portion 313. Specifically, the cross-sectional area of ​​the ink outlet channel 314 in the outlet portion 313 can be set according to the cross-sectional area of ​​the dotting component 320. The appropriate dotting component 320 and the outlet portion 313 can be selected according to the required ink dot size to improve the versatility of the dotting device.

[0048] Furthermore, the accommodating portion 312 and the outlet portion 313 may be connected by means of an axial hole fit, and an interference fit may be provided between the accommodating portion 312 and the outlet portion 313 , which can ensure the stability of the connection and enable the disassembly and replacement of the outlet portion 313 .

[0049] Reference Figure 3 and Figure 4 The accommodating portion 312 may be provided with a second opening 316, and the second opening 316 is located above the accommodating cavity 311 and is connected to the accommodating cavity 311. When the ink in the accommodating cavity 311 is about to be consumed, ink can be directly added from the second opening 316, which is relatively easy to operate.

[0050] A detection device provided in an embodiment of the second aspect of the utility model includes a controller and a dotting device provided in any embodiment of the first aspect of the utility model; the controller is communicatively connected to the dotting device, and the controller can control the action of the driving component 200. Specifically, when the detection device detects an unqualified grain 10, the controller can send a signal to the driving component 200, so that the fixed part 210 drives the movable part 220 to move from the standby position to the dotting position, so that the ink droplets at one end of the dotting part 320 away from the movable part 220 contact the grain 10, thereby achieving dotting on the surface of the grain 10; when the dotting action is completed, the controller can send a signal to the driving component 200, so that the fixed part 210 no longer provides a force to drive the movable part 220 to move in a direction close to the grain 10, or the fixed part 210 provides a force to drive the movable part 220 to move in a direction away from the grain 10, so that the movable part 220 is reset to the standby position.

[0051] The detection equipment provided in the embodiment of the second aspect of the utility model includes the dotting device provided in the embodiment of the utility model, and a limit assembly 400 is arranged in the dotting device. The first limit member 410 of the limit assembly 400 can abut against the movable member 220 when the movable member 220 is located at the dotting position, so as to accurately limit the dotting height of the movable member 220, thereby improving the stability of the dotting device action and improving the consistency of the dotting size.

[0052] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. A dotting device, characterized in that: include: Fixed frame; A driving assembly, comprising a fixed part and a movable part, wherein the fixed part surrounds the movable part, and the fixed part can drive the movable part to move between a dotting position and a standby position relative to the fixed part in a vertical direction, wherein the dotting position is located below the standby position, and the fixed part is connected to the fixing frame; The dotting assembly comprises an ink cartridge and a dotting member, wherein the ink cartridge is connected to the fixing frame and is located below the driving assembly, the ink cartridge has a receiving chamber for receiving ink, the dotting member is connected to the movable member and is inserted through the ink cartridge, and the movable member can drive the dotting member to move relative to the ink cartridge so that the ink flows out of the receiving chamber; The limiting component comprises a first limiting member, wherein the first limiting member is connected to the fixing frame and is used for abutting against the movable member when the movable member is located at the dot-marking position.

2. The dotting device according to claim 1, characterized in that: The limiting assembly further includes a second limiting member, which is connected to the fixing frame and is located above the first limiting member, and the second limiting member is used to abut against the movable member when the movable member is located at the standby position.

3. The dotting device according to claim 1, characterized in that: The driving assembly also includes an elastic member arranged in a vertical direction, one end of the elastic member is connected to the fixed member, and the other end is connected to the movable member. When the movable member is located at the dotting position, the elastic member is compressed or stretched.

4. The dotting device according to claim 1, characterized in that: The dotting device also includes an adjustment component, which includes a first mounting block and a first connecting member. The first mounting block is connected to the fixing frame. The first mounting block has a first adjustment groove extending along a first direction. The first direction is perpendicular to the vertical direction. The first connecting member is inserted into the first adjustment groove and is detachably connected to the fixing member. An end of the first connecting member away from the fixing member abuts against the first mounting block.

5. The dotting device according to claim 4, characterized in that: The adjustment assembly also includes a second mounting block and a second connecting member, the fixing frame has a second adjustment groove, the second connecting member is passed through the second adjustment groove and is detachably connected to the second mounting block, one end of the second connecting member away from the second mounting block abuts against the fixing frame, the width of the second adjustment groove in a third direction is greater than the width of a portion of the second connecting member passed through the second adjustment groove, the third direction is perpendicular to the vertical direction and perpendicular to the first direction, and the ink cartridge is connected to the second mounting block.

6. The dotting device according to claim 5, characterized in that: The second adjustment groove extends along the vertical direction.

7. The dotting device according to claim 1, characterized in that: The movable part includes a movable block, a first clamping block and a second clamping block. The first clamping block and the second clamping block are both connected to the movable block. The first clamping block and the second clamping block can be relatively close to or far away from each other. The dotting part is clamped between the first clamping block and the second clamping block.

8. The dotting device according to claim 7, characterized in that: The movable member further comprises a protruding portion, which is connected to the second clamping block and protrudes in a direction intersecting with a vertical direction relative to the second clamping block, and is used for abutting against the first limiting member when the movable member is located at the dot-marking position.

9. The dotting device according to claim 1, characterized in that: The ink cartridge includes a accommodating portion and an outlet portion which are detachably connected in sequence along the vertical direction, the accommodating portion having the accommodating cavity, the outlet portion having an ink outlet channel extending along the vertical direction, the ink outlet channel being connected to the accommodating cavity, the end of the ink outlet channel away from the accommodating cavity having a first opening for ink to flow out, the cross-sectional area of ​​the ink outlet channel being smaller than the cross-sectional area of ​​the accommodating cavity and larger than the cross-sectional area of ​​the dotting member, and the dotting member can move inside the ink outlet channel.

10. A detection device, characterized in that: include: The dotting device according to any one of claims 1 to 9; A controller is connected to the dotting device for communication, and the controller can control the action of the driving component.

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