Welding seam polishing device for single crystal furnace body

Abstract

The utility model relates to a single crystal furnace body weld joint polishing device which comprises a base, a stand column is fixed to the upper surface of the base, a sliding groove is formed in the side wall of the stand column, a sliding block is slidably connected to the inner wall of the sliding groove, and a polishing assembly is installed on the side wall of the sliding block and comprises an air cylinder, an installation block, a polishing motor and a grinding wheel. A rotating shaft is rotationally connected to the base, a fixing seat is fixed to the upper end of the rotating shaft, a mounting groove is formed in the upper surface of the fixing seat, two symmetrically-arranged arc-shaped plates are slidably connected to the inner bottom wall of the mounting groove, a driving assembly is mounted on the fixing seat, and the two arc-shaped plates are driven by the driving assembly to abut against a single crystal furnace body for fixing; then the grinding assembly is adjusted to the position of the single crystal furnace body welding seam through the lifting assembly, a grinding wheel makes contact with the welding seam through an adjusting air cylinder, a grinding motor is started to grind the welding seam, and in the grinding process, a worker can rotate a fixing base so as to grind the circumferential direction of the single crystal furnace body welding seam; and the grinding efficiency and quality of the single crystal furnace body are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace production, in particular to a single crystal furnace body weld grinding device. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method. In the production process of semiconductor materials, a single crystal furnace is one of the indispensable equipment. In the manufacturing process of a single crystal furnace, in order to ensure the sealing and strength of the furnace body, it is usually necessary to connect multiple parts together by welding. The welds produced after welding not only affect the appearance of the single crystal furnace, but may also cause problems with the sealing of the furnace body, so grinding is required.

[0003] In the prior art, the grinding methods for single crystal furnace bodies mostly rely on manual operation, which is inefficient and labor-intensive. At the same time, due to the influence of human factors, the quality of grinding is difficult to guarantee. Utility Model Content

[0004] In order to solve the above problems, the utility model provides a single crystal furnace body weld grinding device.

[0005] The above-mentioned technical purpose of the utility model is achieved through the following technical solutions: a single crystal furnace weld grinding device, comprising a base, a column is fixed on the upper surface of the base, the side wall of the column is provided with a slide groove, the inner wall of the slide groove is slidably connected with a slider, and the side wall of the slider is installed with a grinding assembly, and the grinding assembly comprises a cylinder fixed to the side wall of the slider, a mounting block fixed to the end of the piston rod of the cylinder, a grinding motor fixed to the upper surface of the mounting block, and a grinding wheel fixed to the end of the output shaft of the grinding motor, a lifting assembly for driving the slider to rise and fall is installed on the column, a rotating shaft is rotatably connected to the base, a fixed seat is fixed at the upper end of the rotating shaft, an installation groove is provided on the upper surface of the fixed seat, and two symmetrically arranged arc plates are slidably connected to the bottom wall of the mounting groove, and a driving assembly for driving the two arc plates to move closer to each other is installed on the fixed seat.

[0006] By adopting the above technical scheme, when it is necessary to grind the single crystal furnace body, the staff places the single crystal furnace body in the installation groove, and drives the two arc plates to move closer to each other and press against the single crystal furnace body through the driving assembly, thereby fixing the single crystal furnace body, and then adjusts the grinding assembly to the position of the single crystal furnace body weld by the lifting assembly, and makes the grinding wheel contact the weld by adjusting the cylinder and starts the grinding motor to grind the weld. During the grinding process, the staff can rotate the fixing seat to grind the circumference of the single crystal furnace body weld, thereby improving the efficiency and quality of the grinding of the single crystal furnace body.

[0007] Furthermore, the lifting assembly includes a driving motor fixed to the upper surface of the column, the output shaft of the driving motor passes through the upper surface of the column and is rotatably connected, the lifting assembly also includes a screw rod that passes through the slider and is threadedly connected, the lower end of the screw rod is rotatably connected to the bottom wall of the slide groove, and the upper end of the screw rod is fixed to the end of the output shaft of the driving motor.

[0008] By adopting the above technical solution, when the slider needs to be raised or lowered, the staff starts the drive motor to drive the screw to rotate. Since the screw is threadedly connected to the slider, and the slider is slidably connected to the slide groove, the slider moves along the axial direction of the screw, making it easy to adjust the position of the grinding assembly according to the height of the weld.

[0009] Furthermore, a movable groove is provided in the inner bottom wall of the installation groove, and the driving assembly includes a movable block slidingly connected to the inner wall of the movable groove, a double-headed screw that is arranged on the side wall of the fixed seat and is rotatably connected, and a rotating block fixed to one end of the double-headed screw away from the movable block, and the double-headed screw is provided with two sections of threads with equal pitch and opposite rotation directions. Two movable blocks are symmetrically arranged, and the two movable blocks are respectively fixed to the bottom of the two arc plates, and the two movable blocks are respectively sleeved on the double-headed screw and threadedly connected to the two sections of threads on the double-headed screw.

[0010] By adopting the above technical scheme, when the single crystal furnace body needs to be fixed, the staff places the single crystal furnace body in the installation groove, and then rotates the double-headed screw by the rotating block. Since the two moving blocks are threadedly connected to the two sections of threads on the double-headed screw, the two moving blocks are slidingly connected to the moving grooves. Therefore, the two moving blocks drive the two arc plates to move closer to each other and press against the single crystal furnace body, thereby fixing the single crystal furnace body on the fixed seat, which improves the stability of the single crystal furnace body during grinding.

[0011] Furthermore, a limiting assembly for limiting the position of the double-headed screw is commonly installed on the fixed seat and the rotating block, and the limiting assembly includes a fixed block fixed to the side wall of the fixed seat, a threaded rod penetrating the side wall of the rotating block and threadedly connected, a limiting block fixed to one end of the threaded rod close to the fixed block, and a rotating rod fixed to one end of the threaded rod away from the limiting block, and the fixed block is sleeved on the double-headed screw and is clearance-fitted.

[0012] By adopting the above technical solution, after fixing the single crystal furnace body, the staff needs to rotate the threaded rod through the rotating rod, so that the threaded rod drives the limit block to move toward the side of the fixed block and tighten it, thereby reducing the probability of the arc plate moving due to automatic rotation of the rotating block and improving the stability of the fixed component. In addition, the staff can also rotate the rotating block by holding the rotating rod, making it easier for the staff to operate the fixed component.

[0013] Furthermore, a rubber sheet is fixed to one end of the limit block away from the threaded rod.

[0014] By adopting the above technical solution, the rubber sheet is made of rubber material, and its surface has a large friction coefficient. The limit block cooperates with the fixed block and presses against the rubber sheet, thereby increasing the friction between the limit block and the fixed block and enhancing the limiting effect of the limit assembly on the rotating block.

[0015] Furthermore, an annular groove is provided on the upper surface of the base, a plurality of balls rollingly connected to the annular groove are embedded at the bottom of the fixing seat, and a gap distance between the upper surface of the base and the bottom of the fixing seat is 0.2-0.4 mm.

[0016] By adopting the above technical solution, the ball and the annular groove are rollingly connected, which plays a reinforcing and supporting role for the fixed seat, enhances the rotation stability of the fixed seat, and reduces the wear between the fixed seat and the base.

[0017] Furthermore, the side walls of the two arc-shaped plates on the side close to each other are both provided with anti-slip pads.

[0018] By adopting the above technical solution, the anti-skid pad is made of rubber material, which has great friction. The arc plate cooperates with the single crystal furnace body and presses against the anti-skid pad, which increases the friction between the arc plate and the single crystal furnace body, enhances the fixing effect of the arc plate on the single crystal furnace body, and reduces the wear of the arc plate on the single crystal furnace body.

[0019] Furthermore, a handle is fixed to the side wall of the fixing seat.

[0020] By adopting the above technical solution, the setting of the handle provides a fulcrum for the fixing seat, making it convenient for the staff to rotate the fixing seat by turning the handle.

[0021] In summary, the utility model has the following beneficial effects:

[0022] 1. In the present application, when it is necessary to grind the single crystal furnace body, the staff places the single crystal furnace body in the installation groove, and drives the two arc plates to move close to each other and press against the single crystal furnace body through the driving assembly, so as to fix the single crystal furnace body, and then adjusts the grinding assembly to the position of the weld of the single crystal furnace body through the lifting assembly, and makes the grinding wheel contact the weld by adjusting the cylinder and starts the grinding motor to grind the weld. During the grinding process, the staff can rotate the fixing seat to grind the circumference of the weld of the single crystal furnace body, thereby improving the efficiency and quality of the grinding of the single crystal furnace body;

[0023] 2. In this application, when the slider needs to be raised or lowered, the staff starts the driving motor to drive the screw to rotate. Since the screw is threadedly connected to the slider, and the slider is slidably connected to the slide groove, the slider moves along the axial direction of the screw, which is convenient for adjusting the position of the grinding assembly according to the height of the weld;

[0024] 3. In the present application, when it is necessary to fix the single crystal furnace body, the staff places the single crystal furnace body in the installation groove, and then rotates the double-headed screw by means of the rotating block. Since the two moving blocks are threadedly connected to the two sections of threads on the double-headed screw, and the two moving blocks are slidingly connected to the moving groove, the two moving blocks drive the two arc plates to move closer to each other and press against the single crystal furnace body, thereby fixing the single crystal furnace body on the fixed seat, which improves the stability of the single crystal furnace body during grinding. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;

[0026] Figure 2 It is a schematic cross-sectional structure diagram of an embodiment of the utility model;

[0027] Figure 3 yes Figure 2 A magnified schematic diagram of center A.

[0028] In the figure: 1. base; 101. annular groove; 2. column; 21. slide groove; 3. slider; 4. grinding assembly; 41. cylinder; 42. mounting block; 43. grinding motor; 44. grinding wheel; 5. lifting assembly; 51. drive motor; 52. screw; 6. rotating shaft; 7. fixed seat; 71. arc plate; 72. mounting groove; 73. moving groove; 8. driving assembly; 81. moving block; 82. double-headed screw; 83. rotating block; 9. limiting assembly; 91. fixed block; 92. threaded rod; 93. limiting block; 94. rotating rod; 10. rubber sheet; 11. ball; 12. anti-slip pad; 13. handle. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.

[0030] like Figure 1-3 As shown, the embodiment of the present application discloses a single crystal furnace weld grinding device, including a base 1, a column 2, a slider 3, a grinding assembly 4, a lifting assembly 5, a rotating shaft 6, a fixing seat 7, an arc plate 71 and a driving assembly 8.

[0031] The base 1 is a rectangular parallelepiped structure, and a rotating groove is provided on the upper surface of the base 1. The column 2 is a vertically arranged rectangular parallelepiped structure, and the column 2 is fixed on the upper surface of the base 1, and a slide groove 21 is provided on the side wall of the column 2. The slider 3 is a rectangular parallelepiped structure, and the slider 3 is slidably connected to the inner wall of the slide groove 21. The grinding assembly 4 is installed on the side wall of the slider 3, and the grinding assembly 4 includes a cylinder 41, a mounting block 42, a grinding motor 43 and a grinding wheel 44. The cylinder 41 is fixed on the side wall of the slider 3, and the piston rod of the cylinder 41 extends horizontally to the side away from the slider 3. The mounting block 42 is a rectangular parallelepiped structure, and the mounting block 42 is fixed to the end of the piston rod of the cylinder 41. The grinding motor 43 is fixed on the upper surface of the mounting frame, and the output shaft of the grinding motor 43 extends vertically upward. The grinding wheel 44 is commonly used in the prior art and is suitable for this embodiment. The grinding wheel 44 is fixed to the end of the output shaft of the grinding motor 43, and the axis of the grinding wheel 44 coincides with the axis of the output shaft of the grinding motor 43.

[0032] The lifting assembly 5 is installed on the column 2 and is used to drive the slider 3 to lift and lower. The lifting assembly 5 includes a driving motor 51 and a screw 52. The driving motor 51 is fixed to the upper surface of the column 2, and the output shaft of the driving motor 51 passes through the upper surface of the column 2 and is rotatably connected. The screw 52 is a vertically arranged rod-shaped structure, the screw 52 is penetrated and arranged on the slider 3 and is threadedly connected, the lower end of the screw 52 is rotatably connected to the inner bottom wall of the slide groove 21, the upper end of the screw 52 is fixed to the end of the output shaft of the driving motor 51, and the axis of the screw 52 coincides with the axis of the output shaft of the driving motor 51.

[0033] The rotating shaft 6 is a vertically arranged round rod-shaped structure, and the rotating shaft 6 is rotatably connected to the base 1. The fixed seat 7 is a round seat-shaped structure, and the fixed seat 7 is fixed to the upper end of the rotating shaft 6, and the axis of the fixed seat 7 coincides with the axis of the rotating shaft 6. The upper surface of the fixed seat 7 is provided with a mounting groove 72, and the inner bottom wall of the mounting groove 72 is provided with a moving groove 73. The arc plate 71 is a plate-shaped structure with an arc-shaped cross section, and the arc plate 71 is slidably connected to the inner bottom wall of the mounting groove 72, and two arc plates 71 are symmetrically arranged.

[0034] The driving assembly 8 is installed on the fixed seat 7, and is used to drive the two arc-shaped plates 71 to move closer to each other. The driving assembly 8 includes a moving block 81, a double-headed screw 82 and a rotating block 83. The moving block 81 is a rectangular parallelepiped structure, and the moving block 81 is slidably connected to the inner wall of the moving groove 73. Two moving blocks 81 are symmetrically arranged, and the two moving blocks 81 are respectively fixed at the bottom of the two arc-shaped plates 71. The double-headed screw 82 is a rod-shaped structure arranged horizontally, and the double-headed screw 82 is arranged on the side wall of the fixed seat 7 and is rotatably connected. The double-headed screw 82 is provided with two sections of threads with equal pitch and opposite rotation direction. The two moving blocks 81 are respectively sleeved on the double-headed screw 82 and are threadedly connected with the two sections of threads on the double-headed screw 82. The rotating block 83 is a round block structure, and the rotating block 83 is fixed at the end of the double-headed screw 82, and the rotating block 83 is fixed at one end of the double-headed screw 82 away from the moving block 81, and the axis of the rotating block 83 coincides with the axis of the double-headed screw 82.

[0035] When it is necessary to grind the single crystal furnace body, the staff places the single crystal furnace body in the installation groove 72 and rotates the double-headed screw 82 by rotating the block 83. Since the two moving blocks 81 are threadedly connected with the two sections of threads on the double-headed screw 82, the two moving blocks 81 are slidably connected with the moving groove 73, so that the two moving blocks 81 drive the two arc plates 71 to move closer to each other and press against the single crystal furnace body, thereby fixing the single crystal furnace body, and then starting the driving motor 51 to drive the screw rod 52 to rotate. Since the screw rod 52 is threadedly connected with the slider 3, and the slider 3 is slidably connected with the slide groove 21, the slider 3 is moved axially along the screw rod 52, and the grinding assembly 4 is adjusted to the position of the single crystal furnace body weld. The grinding wheel 44 is made to contact the weld by adjusting the cylinder 41 and the grinding motor 43 is started to grind the weld. During the grinding process, the staff can rotate the fixed seat 7 to grind the circumference of the single crystal furnace body weld, thereby improving the efficiency and quality of the single crystal furnace body grinding.

[0036] In order to reduce the probability of the rotating block 83 rotating automatically, a limiting assembly 9 is installed on the fixed seat 7 and the rotating block 83 to limit the double-headed screw 82. The limiting assembly 9 includes a fixed block 91, a threaded rod 92, a limiting block 93 and a rotating rod 94. The fixed block 91 is a rectangular parallelepiped structure, fixed on the side wall of the fixed seat 7, and sleeved on the double-headed screw 82 with clearance fit. The threaded rod 92 is a horizontally arranged rod-shaped structure, which is penetrated and arranged on the side wall of the rotating block 83 and threadedly connected. The limiting block 93 is a round block-shaped structure, which is fixed on one end of the threaded rod 92 close to the fixed block 91, and the axis of the limiting block 93 coincides with the axis of the threaded rod 92. The rotating rod 94 is a horizontally arranged round rod-shaped structure, which is fixed on one end of the threaded rod 92 away from the limiting block 93, and the axis of the rotating rod 94 coincides with the axis of the threaded rod 92. After fixing the single crystal furnace body, the staff needs to rotate the threaded rod 92 through the rotating rod 94, so that the threaded rod 92 drives the limit block 93 to move toward the side of the fixed block 91 and tighten it, thereby reducing the probability of the rotating block 83 automatically rotating and causing the arc plate 71 to move, thereby improving the stability of the fixed component. In addition, the staff can also rotate the rotating block 83 by holding the rotating rod 94, making it easier for the staff to operate the fixed component.

[0037] In order to enhance the limiting effect of the limiting assembly 9 on the rotating block 83, a rubber sheet 10 is fixed to one end of the limiting block 93 away from the threaded rod 92. The rubber sheet 10 is made of rubber material and its surface has a large friction coefficient. The limiting block 93 cooperates with the fixed block 91 and presses against the rubber sheet 10, thereby increasing the friction between the limiting block 93 and the fixed block 91, thereby enhancing the limiting effect of the limiting assembly 9 on the rotating block 83.

[0038] In order to enhance the rotation stability of the fixed seat 7, an annular groove 101 is opened on the upper surface of the base 1, and a plurality of balls 11 rollingly connected to the annular groove 101 are embedded at the bottom of the fixed seat 7. The gap distance between the upper surface of the base 1 and the bottom of the fixed seat 7 is 0.2-0.4mm. The balls 11 are rollingly connected to the annular groove 101, which reinforces and supports the fixed seat 7, thereby enhancing the rotation stability of the fixed seat 7 and reducing the wear between the fixed seat 7 and the base 1.

[0039] In order to enhance the fixing effect of the arc plate 71 on the single crystal furnace body, the side walls of the two arc plates 71 close to each other are provided with anti-skid pads 12. The anti-skid pads 12 are made of rubber material, and the material has great friction. The arc plate 71 cooperates with the single crystal furnace body and presses against the anti-skid pads 12, which increases the friction between the arc plate 71 and the single crystal furnace body, thereby enhancing the fixing effect of the arc plate 71 on the single crystal furnace body and reducing the wear of the arc plate 71 on the single crystal furnace body.

[0040] In order to facilitate the rotation of the fixing seat 7 , a handle 13 is fixed to the side wall of the fixing seat 7 . The setting of the handle 13 provides a fulcrum for the fixing seat 7 , thereby facilitating the staff to rotate the fixing seat 7 through the handle 13 .

[0041] The use principle of a single crystal furnace body weld grinding device in this embodiment is as follows: when the single crystal furnace body needs to be ground, the staff places the single crystal furnace body in the installation groove 72, and rotates the double-headed screw 82 by the rotating block 83. Since the two moving blocks 81 are threadedly connected with the two sections of threads on the double-headed screw 82, the two moving blocks 81 are slidably connected with the moving groove 73, so that the two moving blocks 81 drive the two arc plates 71 to move closer to each other and press against the single crystal furnace body, thereby fixing the single crystal furnace body, and then by Start the drive motor 51 to drive the screw rod 52 to rotate. Since the screw rod 52 is threadedly connected to the slider 3, and the slider 3 is slidingly connected to the slide groove 21, the slider 3 moves axially along the screw rod 52, and the grinding assembly 4 is adjusted to the position of the single crystal furnace body weld. The grinding wheel 44 is made to contact the weld by adjusting the cylinder 41 and the grinding motor 43 is started to grind the weld. During the grinding process, the staff can rotate the fixed seat 7 to grind the circumference of the single crystal furnace body weld, thereby improving the efficiency and quality of the single crystal furnace body grinding.

[0042] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A single crystal furnace weld grinding device, comprising a base (1), characterized in that: A column (2) is fixed on the upper surface of the base (1); a slide groove (21) is provided on the side wall of the column (2); a slider (3) is slidably connected to the inner wall of the slide groove (21); a grinding assembly (4) is installed on the side wall of the slider (3); the grinding assembly (4) comprises a cylinder (41) fixed to the side wall of the slider (3); a mounting block (42) fixed to the end of the piston rod of the cylinder (41); a grinding motor (43) fixed to the upper surface of the mounting block (42); and a grinding motor (43) fixed to the output shaft end of the grinding motor (43). The vertical column (2) is provided with a lifting assembly (5) for driving the slider (3) to move upward and downward; the base (1) is rotatably connected with a rotating shaft (6); a fixing seat (7) is fixed to the upper end of the rotating shaft (6); a mounting groove (72) is provided on the upper surface of the fixing seat (7); two symmetrically arranged arc plates (71) are slidably connected to the inner bottom wall of the mounting groove (72); and a driving assembly (8) for driving the two arc plates (71) to move toward each other is installed on the fixing seat (7).

2. The single crystal furnace weld grinding device according to claim 1, characterized in that: The lifting assembly (5) comprises a driving motor (51) fixed to the upper surface of the column (2), the output shaft of the driving motor (51) passing through the upper surface of the column (2) and being rotatably connected, the lifting assembly (5) also comprises a screw rod (52) passing through the slider (3) and being threadedly connected, the lower end of the screw rod (52) being rotatably connected to the inner bottom wall of the slide groove (21), and the upper end of the screw rod (52) being fixed to the end of the output shaft of the driving motor (51).

3. The single crystal furnace weld grinding device according to claim 2, characterized in that: The inner bottom wall of the mounting groove (72) is provided with a moving groove (73), and the driving assembly (8) comprises a moving block (81) slidably connected to the inner wall of the moving groove (73), a double-headed screw (82) penetrating and rotatably connected to the side wall of the fixed seat (7), and a rotating block (83) fixed to one end of the double-headed screw (82) away from the moving block (81), the double-headed screw (82) is provided with two sections of threads with equal pitch and opposite rotation direction, and two moving blocks (81) are symmetrically provided, and the two moving blocks (81) are respectively fixed to the bottom of the two arc-shaped plates (71), and the two moving blocks (81) are respectively sleeved on the double-headed screw (82) and threadedly connected to the two sections of threads on the double-headed screw (82).

4. The single crystal furnace weld grinding device according to claim 3 is characterized in that: A limiting assembly (9) for limiting the position of the double-headed screw (82) is installed on the fixed seat (7) and the rotating block (83). The limiting assembly (9) comprises a fixed block (91) fixed to the side wall of the fixed seat (7), a threaded rod (92) penetrating the side wall of the rotating block (83) and threadedly connected, a limiting block (93) fixed to one end of the threaded rod (92) close to the fixed block (91), and a rotating rod (94) fixed to one end of the threaded rod (92) away from the limiting block (93). The fixed block (91) is sleeved on the double-headed screw (82) and is clearance-fitted.

5. The single crystal furnace weld grinding device according to claim 4, characterized in that: A rubber sheet (10) is fixed to one end of the limiting block (93) away from the threaded rod (92).

6. The single crystal furnace weld grinding device according to claim 1, characterized in that: An annular groove (101) is provided on the upper surface of the base (1), a plurality of balls (11) rollingly connected to the annular groove (101) are embedded in the bottom of the fixing seat (7), and the gap distance between the upper surface of the base (1) and the bottom of the fixing seat (7) is 0.2-0.4 mm.

7. The single crystal furnace weld grinding device according to claim 6, characterized in that: The side walls of the two arc-shaped plates (71) that are close to each other are both provided with anti-slip pads (12).

8. The single crystal furnace weld grinding device according to claim 7, characterized in that: A handle (13) is fixed to the side wall of the fixing seat (7).

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