Clamping assembly for wafer mechanical arm

Abstract

The utility model relates to the technical field of wafer manufacturing, in particular to a clamping assembly for a wafer mechanical arm, which improves the stability of wafer clamping, prevents wafers from falling off, avoids damage to the wafers and improves the safety. Comprising an arm body and a fixing block, and the fixing block is fixedly installed on the right side wall of the arm body; the device further comprises a clamping mechanism, a driving assembly, an adsorption mechanism and a buffering assembly, the driving assembly is installed in the fixing block, the clamping mechanism is located on the right side wall of the fixing block and connected with the driving assembly, the clamping mechanism comprises two clamping blocks and two limiting sliding blocks, the adsorption mechanism is installed above the fixing block, and the buffering assembly is installed on the clamping mechanism.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a clamping component for a wafer mechanical arm. Background Art

[0002] A wafer refers to a silicon chip used to make silicon semiconductor circuits. It is a silicon wafer formed by grinding, polishing and slicing silicon crystal rods. Domestic wafer production lines are mainly 8-inch and 12-inch. The main processing methods for wafers are sheet processing and batch processing, that is, single or multiple wafers are processed at the same time. During the wafer processing process, a handling arm is usually used to move or transport the wafers, so as to transport the wafers to process equipment such as gluing, exposure, development and etching for processing. The prior art authorization announcement number CN215433742U proposes a wafer arm clamping mechanism, including a chassis, a mounting seat, a driving mechanism, a clamping arm, a wafer buffer module and a first sliding block, wherein two clamping arms are symmetrically arranged on one side of the chassis, a wafer clamping groove is formed between the two clamping arms, a first sliding block is also arranged on one side of the chassis, a first sliding groove is respectively opened at one end of each clamping arm, and the first sliding block is arranged in the first sliding groove, a mounting seat is also arranged on one side of the chassis, and the mounting seat is located at the upper end of the two clamping arms, two driving mechanisms are arranged in the mounting seat, each driving mechanism can respectively drive a clamping arm to move along the length direction of the first sliding block, and a wafer buffer module is respectively arranged inside each clamping arm. However, it is difficult to ensure stable clamping and prevent wafers from falling by only clamping the wafer with the clamping claws. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides a clamping assembly for a wafer robot arm, which improves the stability of wafer clamping, prevents the wafer from falling, avoids damage to the wafer, and improves safety.

[0004] The utility model discloses a clamping assembly for a wafer robot arm, comprising an arm body and a fixed block, wherein the fixed block is fixedly mounted on the right side wall of the arm body; the utility model also comprises a clamping mechanism, a driving assembly, an adsorption mechanism and a buffer assembly, wherein the driving assembly is mounted inside the fixed block, the clamping mechanism is located on the right side wall of the fixed block and is connected to the driving assembly, the adsorption mechanism is mounted above the fixed block, and the buffer assembly is mounted on the clamping mechanism; the driving assembly drives the clamping mechanism to clamp the wafer, the buffer assembly can buffer the clamping mechanism and the wafer to avoid damage to the wafer, the adsorption assembly is used to adsorb and fix the wafer to ensure the stability of clamping, prevent the wafer from falling, and improve safety.

[0005] Preferably, the clamping mechanism includes two clamping blocks and two limit sliding blocks. Limit sliding grooves are symmetrically provided at the front and rear ends of the middle part of the right side wall of the fixed block. The two limit sliding blocks are slidably installed in the limit sliding grooves. A clamping block is fixedly connected to the right side wall of the limit sliding block. The clamping block is slidably installed on the right side wall of the fixed block. The ends of the two clamping blocks that are close to each other are arranged in an arc shape. The two clamping blocks are close to each other to clamp the wafer. The arc-shaped setting can ensure the contact area with the wafer and increase stability. When the clamping block moves, it drives the limit sliding block to move in the limit sliding groove, thereby ensuring the stability of the clamping block when in use.

[0006] Preferably, the driving assembly includes a servo motor, a gear, two spur racks and two connecting sliders. A driving cavity is opened in the middle of the fixed block, the servo motor is fixedly installed in the driving cavity, the output end of the servo motor is fixedly connected to the gear, and a movable groove is opened symmetrically about the driving cavity in the upper and lower parts of the fixed block. The two spur racks are alternately slidably installed in the upper and lower movable grooves, the spur racks are meshed with the gears, and connecting grooves connected to the movable grooves are alternately arranged on the right side wall of the fixed block. A connecting slider is fixedly installed at the far end of the right side walls of the two spur racks, the connecting slider is slidably installed in the connecting groove, and the connecting slider is respectively fixedly connected to the left side wall of the clamping block; starting the servo motor drives the gear to rotate, the gear drives the spur rack to move, and the spur rack drives the two clamping blocks to approach or move away from each other through the connecting slider to clamp the wafer.

[0007] Preferably, the adsorption mechanism includes a mounting frame, an air pump, an electric telescopic rod, a suction cup, a connecting pipe and two telescopic tubes. The mounting frame is fixedly mounted on the middle part of the top of the fixed block, the air pump is fixedly mounted on the upper left wall of the mounting frame, the electric telescopic rod is fixedly mounted on the right wall of the mounting frame, the output end of the electric telescopic rod is fixedly mounted with a suction cup, the top of the suction cup is symmetrically connected to the telescopic tubes front and back, the other end of the telescopic tube is fixedly connected to the connecting pipe, and the other end of the connecting pipe is connected to the air pump; when clamping the wafer, start the electric telescopic rod to drive the suction cup to move above the wafer, start the air pump, and exhaust air through the connecting pipe and the telescopic tube to adsorb and fix the wafer, thereby further improving the fixing effect of the wafer.

[0008] Preferably, it also includes a sealing ring, which is fixedly mounted on the lower end of the suction cup, and a plurality of exhaust holes are evenly opened at the bottom end of the suction cup; the wafer is adsorbed through the exhaust holes, and the sealing ring increases the sealing strength between the wafer and the suction cup to ensure the stability of adsorption.

[0009] Preferably, the buffer assembly includes two buffer air bags and two gas telescopic tubes, a buffer cavity is opened at one opposite end of the two clamping blocks, the two buffer air bags are fixedly installed in the buffer cavity, the opposite ends of the two buffer air bags are set to the same shape as the clamping blocks, and the middle part of the buffer air bag is set to a positioning groove, the input end of the gas telescopic tube is connected to the vacuum pump, and the output end of the gas telescopic tube is connected to the buffer air bag through the clamping block; when clamping, the gas extracted by the vacuum pump is input into the buffer air bag through the gas telescopic tube, causing the buffer air bag to inflate, and the wafer is limited through the positioning groove, and the wafer and the clamping block are buffered to avoid damage to the wafer.

[0010] Preferably, it also includes a fixing ring and two reinforcing ribs. The fixing ring is fixedly mounted on the left side wall of the arm body. The fixing ring is provided with fixing holes distributed in a circular array. The left parts of the two reinforcing ribs are fixedly mounted on the front and rear ends of the arm body, and the right parts of the reinforcing ribs are fixedly connected to the left side wall of the fixed block. The arm body can be installed on mechanical equipment using bolts through the fixing ring and the fixing holes, and the structural strength of the arm body is increased by the reinforcing ribs to improve practicality.

[0011] Compared with the prior art, the utility model has the following beneficial effects: the driving component drives the clamping mechanism to clamp the wafer, the buffer component can provide buffer between the clamping mechanism and the wafer to avoid damage to the wafer, and the adsorption component is used to adsorb and fix the wafer to ensure the stability of the clamping, prevent the wafer from falling, and improve safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the utility model;

[0013] Figure 2 It is a schematic diagram of the structure of the utility model viewed from above;

[0014] Figure 3 It is a front cross-sectional structural schematic diagram of the utility model;

[0015] Figure 4 It is a left-side cross-sectional structural schematic diagram of the utility model;

[0016] Figure 5 It is a right side cross-sectional structural schematic diagram of the utility model;

[0017] Markings in the attached figure: 1. Arm body; 2. Fixed block; 3. Clamping block; 4. Limiting slider; 5. Servo motor; 6. Gear; 7. Spur rack; 8. Connecting slider; 9. Mounting frame; 10. Vacuum pump; 11. Electric telescopic rod; 12. Suction cup; 13. Connecting pipe; 14. Telescopic pipe; 15. Sealing ring; 16. Buffer airbag; 17. Air transmission telescopic pipe; 18. Fixed ring; 19. Reinforcing rib. DETAILED DESCRIPTION

[0018] In order to facilitate the understanding of the utility model, the utility model will be described more comprehensively below with reference to the relevant drawings. The utility model can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and comprehensive.

[0019] like Figures 1 to 4 As shown, the fixed block 2 is fixedly mounted on the right side wall of the arm body 1, and limited sliding grooves are symmetrically provided at the front and rear ends of the middle part of the right side wall of the fixed block 2, and two limit sliding blocks 4 are slidably mounted in the limited sliding grooves. A clamping block 3 is fixedly connected to the right side wall of the limit sliding block 4, and the clamping block 3 is slidably mounted on the right side wall of the fixed block 2. The ends of the two clamping blocks 3 that are close to each other are set to an arc shape, and the mounting frame 9 is fixedly mounted on the middle part of the top of the fixed block 2, and an air pump 10 is fixedly mounted on the upper left side wall of the mounting frame 9, and an electric telescopic rod 11 is fixedly mounted on the right side wall of the mounting frame 9, and the output of the electric telescopic rod 11 A suction cup 12 is fixedly installed at the end, and a telescopic tube 14 is symmetrically connected to the top of the suction cup 12. The other end of the telescopic tube 14 is fixedly connected to the connecting tube 13, and the other end of the connecting tube 13 is connected to the air pump 10. A sealing ring 15 is fixedly installed at the lower end of the suction cup 12. A plurality of air extraction holes are evenly opened at the bottom end of the suction cup 12. A fixing ring 18 is fixedly installed on the left side wall of the arm body 1. The fixing ring 18 is provided with fixing holes distributed in a circular array. The left parts of the two reinforcing ribs 19 are fixedly installed at the front and rear ends of the arm body 1, and the right part of the reinforcing rib 19 is fixedly connected to the left side wall of the fixed block 2.

[0020] The two clamps 3 are close to each other to clamp the wafer. The arc-shaped setting can ensure the contact area with the wafer and increase stability. When the clamp 3 moves, it drives the limit slider 4 to move in the limit slide groove to ensure the stability of the clamp 3 when in use. When clamping the wafer, start the electric telescopic rod 11 to drive the suction cup 12 to move above the wafer, start the vacuum pump 10, and evacuate air through the connecting pipe 13 and the telescopic tube 14 to adsorb and fix the wafer, further improving the fixing effect of the wafer, and adsorb the wafer through the vacuum hole. The sealing ring 15 increases the sealing strength between the wafer and the suction cup 12 to ensure the stability of adsorption. The arm body 1 can be installed on mechanical equipment with bolts through the fixing ring 18 and the fixing hole, and the structural strength of the arm body 1 is increased by the reinforcing ribs 19 to improve practicality.

[0021] like Figure 3 and Figure 5As shown, a driving cavity is provided in the middle of the fixed block 2, a servo motor 5 is fixedly installed in the driving cavity, a gear 6 is fixedly connected to the output end of the servo motor 5, a moving groove is provided symmetrically about the driving cavity in the upper and lower parts of the fixed block 2, two spur racks 7 are alternately slidably installed in the upper and lower moving grooves, the spur racks 7 are meshed with the gear 6, and connecting grooves connected with the moving grooves are alternately provided on the right side wall of the fixed block 2, a connecting slider 8 is fixedly installed at the far end of the right side wall of the two spur racks 7, the connecting slider 8 is slidably installed in the connecting groove, and the connecting slider 8 is respectively fixedly connected to the left side wall of the clamping block 3, a buffer cavity is provided at the opposite end of the two clamping blocks 3, two buffer airbags 16 are fixedly installed in the buffer cavity, the opposite end of the two buffer airbags 16 is set to the same shape as the clamping block 3, and the middle part of the buffer airbag 16 is set to a positioning groove, the input end of the gas transmission telescopic tube 17 is connected to the vacuum pump 10, and the output end of the gas transmission telescopic tube 17 passes through the clamping block 3 and is connected with the buffer airbag 16;

[0022] Start the servo motor 5 to drive the gear 6 to rotate, the gear 6 drives the spur rack 7 to move, and the spur rack 7 drives the two clamps 3 to move closer to or away from each other through the connecting slider 8 to clamp the wafer. During clamping, the gas extracted by the vacuum pump 10 is input into the buffer airbag 16 through the gas transmission telescopic tube 17, so that the buffer airbag 16 inflates, and the wafer is limited by the positioning groove, and the wafer and the clamp 3 are buffered to avoid damage to the wafer.

[0023] like Figures 1 to 5 As shown, a clamping assembly for a wafer robot arm of the utility model is installed on the mechanical equipment by bolts through a fixing ring 18 and a fixing hole during operation. When clamping the wafer, the electric telescopic rod 11 is started to drive the suction cup 12 to move above the wafer, the vacuum pump 10 is started, and air is extracted through the connecting pipe 13 and the telescopic pipe 14, and the wafer is adsorbed through the vacuum hole. The sealing ring 15 increases the sealing strength between the wafer and the suction cup 12, and the wafer is adsorbed and fixed. The servo motor 5 is started to drive the gear 6 to rotate, and the gear 6 drives the spur rack 7 to move. The spur rack 7 drives the two clamping blocks 3 to approach or move away from each other through the connecting slider 8. The two clamping blocks 3 approach each other to clamp the wafer. The arc-shaped setting can ensure the contact area with the wafer. When clamping, the gas extracted by the vacuum pump 10 is input into the buffer airbag 16 through the gas transmission telescopic pipe 17, so that the buffer airbag 16 swells, and the wafer is limited by the positioning groove, and the wafer and the clamping block 3 are buffered.

[0024] The servo motor 5 and the vacuum pump 10 of the clamping assembly for a wafer robot arm of the utility model are purchased on the market, and technicians in the industry only need to install and operate them according to the accompanying instruction manual, without the need for technical personnel in the field to make creative efforts.

[0025] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A wafer robot arm clamping assembly, comprising an arm body (1) and a fixing block (2), wherein the fixing block (2) is fixedly mounted on the right side wall of the arm body (1); characterized in that: It also includes a clamping mechanism, a driving assembly, an adsorption mechanism and a buffer assembly, wherein the driving assembly is mounted inside the fixed block (2), the clamping mechanism is located on the right side wall of the fixed block (2) and is connected to the driving assembly, the adsorption mechanism is mounted above the fixed block (2), and the buffer assembly is mounted on the clamping mechanism.

2. A wafer robot clamping assembly as claimed in claim 1, characterized in that: The clamping mechanism comprises two clamping blocks (3) and two limiting slide blocks (4); limiting slide grooves are symmetrically arranged at the front and rear ends of the middle part of the right side wall of the fixed block (2); the two limiting slide blocks (4) are slidably installed in the limiting slide grooves; the right side wall of the limiting slide block (4) is fixedly connected with a clamping block (3); the clamping block (3) is slidably installed on the right side wall of the fixed block (2); and the ends of the two clamping blocks (3) that are close to each other are arranged in an arc shape.

3. A wafer robot clamping assembly as claimed in claim 2, characterized in that: The driving assembly comprises a servo motor (5), a gear (6), two spur racks (7) and two connecting slide blocks (8). A driving cavity is provided in the middle of the fixed block (2). The servo motor (5) is fixedly installed in the driving cavity. The output end of the servo motor (5) is fixedly connected to the gear (6). A movable groove is provided in the interior of the fixed block (2) symmetrically with respect to the driving cavity. The two spur racks (7) are alternately slidably installed in the upper and lower movable grooves. The spur racks (7) are meshed with the gear (6). Connecting grooves connected to the movable grooves are alternately provided on the right side wall of the fixed block (2). Connecting slide blocks (8) are fixedly installed at the ends of the right side walls of the two spur racks (7) that are far away from each other. The connecting slide blocks (8) are slidably installed in the connecting grooves. The connecting slide blocks (8) are respectively fixedly connected to the left side walls of the clamping block (3).

4. A wafer robot clamping assembly as claimed in claim 1, characterized in that: The adsorption mechanism comprises a mounting frame (9), an air pump (10), an electric telescopic rod (11), a suction cup (12), a connecting pipe (13) and two telescopic pipes (14); the mounting frame (9) is fixedly mounted at the middle of the top end of the fixed block (2); the air pump (10) is fixedly mounted on the upper left wall of the mounting frame (9); the electric telescopic rod (11) is fixedly mounted on the right wall of the mounting frame (9); the suction cup (12) is fixedly mounted on the output end of the electric telescopic rod (11); the top end of the suction cup (12) is symmetrically connected to the telescopic pipe (14); the other end of the telescopic pipe (14) is fixedly connected to the connecting pipe (13); and the other end of the connecting pipe (13) is connected to the air pump (10).

5. A wafer robot clamping assembly as claimed in claim 4, characterized in that: It also includes a sealing ring (15), which is fixedly mounted on the lower end of the suction cup (12), and a plurality of air extraction holes are evenly arranged on the bottom end of the suction cup (12).

6. A wafer robot clamping assembly as claimed in claim 4, characterized in that: The buffer assembly comprises two buffer air bags (16) and two gas transmission telescopic tubes (17); a buffer cavity is formed at opposite ends of the two clamping blocks (3); the two buffer air bags (16) are fixedly installed in the buffer cavity; opposite ends of the two buffer air bags (16) are arranged to have the same shape as the clamping blocks (3); and the middle of the buffer air bags (16) is arranged to have a positioning groove; the input end of the gas transmission telescopic tube (17) is connected to the air pump (10); and the output end of the gas transmission telescopic tube (17) passes through the clamping blocks (3) and is in communication with the buffer air bags (16).

7. A wafer robot clamping assembly as claimed in claim 1, characterized in that: It also includes a fixing ring (18) and two reinforcing ribs (19), wherein the fixing ring (18) is fixedly mounted on the left side wall of the arm body (1), and the fixing ring (18) is provided with fixing holes distributed in a circular array, the left parts of the two reinforcing ribs (19) are fixedly mounted on the front and rear ends of the arm body (1), and the right parts of the reinforcing ribs (19) are fixedly connected to the left side wall of the fixing block (2).

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