Crystal oscillator box for crystal oscillator probe

Abstract

The utility model discloses a crystal oscillator box for a crystal oscillator probe, and relates to the technical field of crystal oscillator boxes. The device comprises a main box body, the bottom of the inner wall of the main box body is rotatably connected with a rotating shaft, the inner wall of the main box body is provided with an alignment control assembly used for controlling the rotating shaft to rotate, the bottom surface of the main box body is provided with a detection hole in a penetrating mode, and a plurality of supporting rods are arranged in the main box body. Wherein the end part of one supporting rod is provided with a plugging assembly used for sealing the detection hole, the end parts of the rest supporting rods are all provided with crystal oscillator probes, the top end of the rotating shaft is provided with a positioning assembly used for limiting the supporting rods, the top surface of the main box body is fixedly connected with a top cover through bolts, and the top surface of the main box body is fixedly connected with the crystal oscillator probes through bolts. The dustproof crystal oscillator box has the advantages that the dustproof effect on the idle crystal oscillator box is realized during use, and dust and impurities are prevented from entering the crystal oscillator box when the crystal oscillator box is idle, so that the dust is prevented from being attached to the surface of a crystal oscillator probe to influence the detection accuracy.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal oscillator boxes, in particular to a crystal oscillator box for a crystal oscillator probe. Background Art

[0002] When the coating machine is coating the substrate, in order to ensure the accuracy of the substrate coating thickness, people often use crystal oscillator probes to detect the evaporation amount of the target material. The control of the evaporation amount of the target material is used to control the substrate coating thickness, thereby making the substrate coating thickness more accurate. The crystal oscillator probe is stored in a crystal oscillator box during testing.

[0003] The Chinese patent document with the announcement number CN206706202U discloses a crystal oscillator box for a crystal oscillator probe, which mainly consists of a box body and a crystal oscillator table arranged in the box body; the crystal oscillator table is a crystal oscillator table, which includes a wafer receiving table and a three-claw insulating back plate matched with the wafer receiving table. With respect to the above technical solution, the following defects still exist: when the crystal oscillator box is idle, dust and impurities may enter it from the detection hole and adhere to the surface of the crystal oscillator, resulting in changes or instability in the oscillation frequency, thereby affecting the accuracy of the substrate coating thickness monitoring.

[0004] Therefore, a crystal oscillator box for a crystal oscillator probe is proposed. Utility Model Content

[0005] The purpose of the utility model is to solve the problems mentioned in the above background technology. The utility model provides a crystal oscillator box for a crystal oscillator probe.

[0006] In order to achieve the above-mentioned purpose, the utility model specifically adopts the following technical solutions:

[0007] A crystal oscillator box for a crystal oscillator probe comprises a main box body, the bottom of the inner wall of the main box body is rotatably connected to a rotating shaft, the inner wall of the main box body is provided with a positioning control component for controlling the rotation of the rotating shaft, the bottom surface of the main box body is penetrated by a detection hole, a plurality of support rods are arranged inside the main box body, the end of one of the support rods is provided with a blocking component for closing the detection hole, the ends of the remaining support rods are all provided with crystal oscillator probes, the top end of the rotating shaft is provided with a positioning component for limiting the support rods, the top surface of the main box body is fixedly connected to a top cover by bolts, the top surface of the top cover is fixedly connected to a mounting rod, and a dust cleaning component is arranged in the middle of the top surface of the top cover.

[0008] Furthermore, the alignment control component includes a motor, and the motor is fixedly installed on the bottom of the inner wall of the main box body, the output end of the motor is fixedly connected to a worm, the bottom of the inner wall of the main box body is fixedly connected to a support seat, and the support seat is rotatably connected to the end of the worm, the surface of the rotating shaft is fixedly sleeved with a worm wheel, and the worm wheel is meshed with the worm.

[0009] Furthermore, the blocking assembly includes a mounting shell, and the mounting shell is fixedly connected to the end of the support rod, an electric push rod is fixedly installed on the inner wall of the mounting shell, a sealing plate is fixedly connected to the telescopic end of the electric push rod, and the sealing plate is adapted to the specifications of the detection hole.

[0010] Furthermore, a sealing ring is fixedly connected to the surface of the sealing plate, and the sealing ring is made of rubber material.

[0011] Furthermore, the positioning assembly includes a fixed seat, and the fixed seat is fixedly connected to the top of the rotating shaft, a T-shaped slot is opened on the top surface of the fixed seat, and the end of the support rod is movably engaged with the inner wall of the T-shaped slot, a threaded column is fixedly connected to the middle of the top surface of the fixed seat, and a compression sleeve is threadedly connected to the surface of the threaded column, and the bottom surface of the compression sleeve is in contact with the top surface of the fixed seat.

[0012] Furthermore, the cleaning component includes a protective shell, and the protective shell is fixedly connected to the top surface of the top cover, a fan is fixedly installed on the inner wall of the protective shell, and the air outlet of the fan is connected to the interior of the main box body, and a filter is fixedly connected to the top surface of the protective shell.

[0013] The beneficial effects of the utility model are as follows:

[0014] The mounting rod can connect the crystal oscillator box with the detection equipment, and the support rod and the crystal oscillator probe can be controlled to rotate by operating the alignment control component, so that the crystal oscillator probe is aligned with the detection hole, and the crystal oscillator probe can be used for detection. By aligning different crystal oscillator probes with the detection holes, the evaporation amount of various different target materials can be detected. When no detection is needed, the dust inside the main box body can be blown out from the detection hole by operating the cleaning component, and then the support rod can be controlled to rotate by the alignment control component to drive the sealing component to align with the detection hole. The detection hole can be blocked by operating the sealing component to prevent dust and impurities from entering. In use, the idle crystal oscillator box can be effectively dust-proofed, and dust and impurities can be prevented from entering the interior of the crystal oscillator box when idle, thereby preventing dust from adhering to the surface of the crystal oscillator probe and affecting the accuracy of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0016] Figure 2 It is a top sectional view of the structure of the utility model;

[0017] Figure 3 This is a top view of the main box structure of the utility model;

[0018] Figure 4 This is an exploded view of the positioning component structure of the utility model;

[0019] Figure 5 It is a front cross-sectional view of the plugging component structure of the utility model;

[0020] Figure 6 It is a front cross-sectional view of the dust cleaning component structure of the utility model.

[0021] Figure numerals: 1. main box body; 2. rotating shaft; 3. alignment control assembly; 301. motor; 302. support seat; 303. worm; 304. worm wheel; 4. support rod; 5. crystal oscillator probe; 6. blocking assembly; 601. mounting shell; 602. electric push rod; 603. sealing plate; 604. sealing ring; 7. detection hole; 8. positioning assembly; 801. fixing seat; 802. T-slot; 803. threaded column; 804. compression sleeve; 9. top cover; 10. mounting rod; 11. cleaning assembly; 111. protective shell; 112. fan; 113. filter. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0025] The electrical components mentioned in this article are all connected to an external main controller and 220V mains electricity, and the main controller can be a conventional known device for controlling a computer or the like.

[0026] In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "upper", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] like Figures 1 to 6 As shown, a crystal oscillator box for a crystal oscillator probe comprises a main box body 1, the bottom of the inner wall of the main box body 1 is rotatably connected with a rotating shaft 2, the inner wall of the main box body 1 is provided with a positioning control component 3 for controlling the rotation of the rotating shaft 2, a detection hole 7 is penetrated through the bottom surface of the main box body 1, a plurality of support rods 4 are arranged inside the main box body 1, the end of one of the support rods 4 is provided with a blocking component 6 for closing the detection hole 7, the ends of the remaining support rods 4 are all provided with crystal oscillator probes 5, the top end of the rotating shaft 2 is provided with a positioning component 8 for limiting the support rod 4, the top surface of the main box body 1 is fixedly connected with a top cover 9 by bolts, the top surface of the top cover 9 is fixedly connected with a mounting rod 10, and a dust cleaning component 11 is arranged in the middle of the top surface of the top cover 9. More specifically, the mounting rod 10 can connect the crystal oscillator box with the detection equipment, and the alignment control component 3 is operated to control the support rod 4 and the crystal oscillator probe 5 to rotate, so that the crystal oscillator probe 5 is aligned with the detection hole 7, and the crystal oscillator probe 5 can be used for detection. By aligning different crystal oscillator probes 5 with the detection holes 7, the evaporation amounts of various different target materials can be detected. When no detection is needed, the dust inside the main box body 1 is blown out from the detection hole 7 by the cleaning component 11, and then the support rod 4 is controlled to rotate by the alignment control component 3, driving the blocking component 6 to align with the detection hole 7. By operating the blocking component 6, the detection hole 7 can be blocked to prevent dust and impurities from entering.

[0028] The alignment control assembly 3 includes a motor 301, and the motor 301 is fixedly installed at the bottom of the inner wall of the main box body 1, the output end of the motor 301 is fixedly connected to a worm 303, the bottom of the inner wall of the main box body 1 is fixedly connected to a support seat 302, and the support seat 302 is rotatably connected to the end of the worm 303, and the surface of the rotating shaft 2 is fixedly sleeved with a worm wheel 304, and the worm wheel 304 is meshed with the worm 303. It should be noted that the motor 301 drives the worm 303 to rotate, thereby driving the worm wheel 304 meshed with it to rotate, and the rotating shaft 2 can be driven to rotate.

[0029] The blocking assembly 6 includes a mounting shell 601, and the mounting shell 601 is fixedly connected to the end of the support rod 4, and an electric push rod 602 is fixedly installed on the inner wall of the mounting shell 601, and a sealing plate 603 is fixedly connected to the telescopic end of the electric push rod 602, and the sealing plate 603 is adapted to the specifications of the detection hole 7. More specifically, when the blocking assembly 6 rotates to the top of the detection hole 7, the electric push rod 602 is operated to drive its telescopic end to extend, thereby driving the sealing plate 603 to descend, and the sealing plate 603 is used to block the detection hole 7, thereby preventing dust and impurities from passing through the detection hole 7 and entering the interior of the main box body 1.

[0030] The surface of the sealing plate 603 is fixedly connected with a sealing ring 604, and the sealing ring 604 is made of rubber. It should be noted that by providing the sealing ring 604 made of rubber, the gap between the sealing plate 603 and the detection hole 7 is sealed to further reduce the entry of dust and impurities.

[0031] The positioning assembly 8 includes a fixing seat 801, and the fixing seat 801 is fixedly connected to the top of the rotating shaft 2, a T-shaped slot 802 is provided on the top surface of the fixing seat 801, and the end of the support rod 4 is movably engaged with the inner wall of the T-shaped slot 802, a threaded column 803 is fixedly connected to the middle of the top surface of the fixing seat 801, a compression sleeve 804 is threadedly connected to the surface of the threaded column 803, and the bottom surface of the compression sleeve 804 is in contact with the top surface of the fixing seat 801. More specifically, by rotating the compression sleeve 804, the compression sleeve 804 rises along the surface of the threaded column 803 under the action of the thread, so that the bottom surface of the compression sleeve 804 no longer touches the top surface of the fixing seat 801, and the limit on the support rod 4 can be released, and the support rod 4 can be pulled upward to drive the end of the support rod 4 to separate from the inner wall of the T-shaped slot 802, so that the support rod 4 can be disassembled, thereby facilitating the disassembly and replacement of the crystal oscillator probe 5 and the blocking assembly 6.

[0032] The dust cleaning component 11 includes a protective shell 111, and the protective shell 111 is fixedly connected to the top surface of the top cover 9. A fan 112 is fixedly installed on the inner wall of the protective shell 111, and the air outlet of the fan 112 is connected to the inside of the main box body 1. A filter 113 is fixedly connected to the top surface of the protective shell 111. It should be noted that by running the fan 112, air is blown into the inside of the main box body 1, and the dust and impurities inside the main box body 1 will be blown out from the detection hole 7, thereby realizing the cleaning of the inside of the main box body 1. By setting the filter 113, dust is filtered to avoid the introduction of new dust and impurities from the outside when the fan 112 is running.

[0033] In summary: the mounting rod 10 can connect the crystal oscillator box with the detection equipment, and the alignment control component 3 is operated to control the support rod 4 and the crystal oscillator probe 5 to rotate, so that the crystal oscillator probe 5 is aligned with the detection hole 7, and the crystal oscillator probe 5 can be used for detection. By aligning different crystal oscillator probes 5 with the detection holes 7, the evaporation amount of various different target materials can be detected. When no detection is needed, the dust inside the main box body 1 is blown out from the detection hole 7 through the operation of the cleaning component 11, and then the support rod 4 is controlled to rotate through the alignment control component 3 to drive the blocking component 6 to align with the detection hole 7. The detection hole 7 can be blocked by the operation of the blocking component 6 to prevent dust and impurities from entering. In use, the effect of effectively preventing idle crystal oscillator boxes from being dusty is achieved, and dust and impurities are prevented from entering the interior of the crystal oscillator box when idle, thereby preventing dust from adhering to the surface of the crystal oscillator probe and affecting the accuracy of detection.

[0034] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and the specification only describe the principles of the utility model. The utility model may be subject to various changes and improvements without departing from the spirit and scope of the utility model. These changes and improvements fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A crystal oscillator box for a crystal oscillator probe, characterized in that: The invention comprises a main box body (1), the bottom of the inner wall of the main box body (1) is rotatably connected to a rotating shaft (2), the inner wall of the main box body (1) is provided with a positioning control component (3) for controlling the rotation of the rotating shaft (2), the bottom surface of the main box body (1) is penetrated by a detection hole (7), a plurality of support rods (4) are arranged inside the main box body (1), the end of one of the support rods (4) is provided with a blocking component (6) for closing the detection hole (7), the ends of the remaining support rods (4) are all provided with crystal oscillator probes (5), the top end of the rotating shaft (2) is provided with a positioning component (8) for limiting the support rod (4), the top surface of the main box body (1) is fixedly connected to a top cover (9) by bolts, the top surface of the top cover (9) is fixedly connected to a mounting rod (10), and a dust cleaning component (11) is arranged in the middle of the top surface of the top cover (9).

2. The crystal oscillator box for a crystal oscillator probe according to claim 1, characterized in that: The alignment control component (3) comprises a motor (301), and the motor (301) is fixedly mounted on the bottom of the inner wall of the main box body (1), the output end of the motor (301) is fixedly connected to a worm (303), the bottom of the inner wall of the main box body (1) is fixedly connected to a support seat (302), and the support seat (302) is rotatably connected to the end of the worm (303), and a worm wheel (304) is fixedly sleeved on the surface of the rotating shaft (2), and the worm wheel (304) is meshed with the worm (303).

3. The crystal oscillator box for a crystal oscillator probe according to claim 1, characterized in that: The blocking assembly (6) comprises a mounting shell (601), and the mounting shell (601) is fixedly connected to the end of the support rod (4), an electric push rod (602) is fixedly mounted on the inner wall of the mounting shell (601), a sealing plate (603) is fixedly connected to the telescopic end of the electric push rod (602), and the sealing plate (603) is compatible with the specifications of the detection hole (7).

4. The crystal oscillator box for a crystal oscillator probe according to claim 3, characterized in that: A sealing ring (604) is fixedly connected to the surface of the sealing plate (603), and the sealing ring (604) is made of rubber.

5. The crystal oscillator box for a crystal oscillator probe according to claim 3, characterized in that: The positioning assembly (8) comprises a fixing seat (801), and the fixing seat (801) is fixedly connected to the top of the rotating shaft (2); a T-shaped slot (802) is provided on the top surface of the fixing seat (801), and the end of the support rod (4) is movably engaged with the inner wall of the T-shaped slot (802); a threaded column (803) is fixedly connected to the middle of the top surface of the fixing seat (801); a compression sleeve (804) is threadedly connected to the surface of the threaded column (803), and the bottom surface of the compression sleeve (804) is in contact with the top surface of the fixing seat (801).

6. The crystal oscillator box for a crystal oscillator probe according to claim 1, characterized in that: The dust cleaning component (11) comprises a protective shell (111), and the protective shell (111) is fixedly connected to the top surface of the top cover (9), a fan (112) is fixedly installed on the inner wall of the protective shell (111), and the air outlet end of the fan (112) is connected to the inside of the main box body (1), and a filter screen (113) is fixedly connected to the top surface of the protective shell (111).

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