Reaction device and processing equipment
By designing the inclusion opening and air port connection in the reaction device, the problem of sheet-shaped materials moving due to the influence of airflow during chemical treatment is solved, and the treatment effect is improved.
Patent Information
- Application Number
- CN202420517808.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-15
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-03-15
AI Technical Summary
During the chemical treatment of photovoltaic and semiconductor products, sheet-shaped materials are prone to move due to the influence of airflow under high temperature vacuum environment, resulting in poor chemical treatment effect.
A reaction device is designed, including a reaction chamber and a cover. By opening a first opening on one side of the reaction chamber and communicating with the storage chamber, the first cover and the first air port are connected to the exhaust device to ensure that the gas is along the The storage cavity is moved out of the container at an angle with the surface of the sheet material, thereby reducing the movement of the sheet material.
By controlling the gas flow direction, the fitting density between the sheet material and the carrier is increased, and the probability of the sheet material moving during the extraction process is reduced, thereby improving the chemical treatment effect.
Smart Images
Figure CN222499357U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of photovoltaic and semiconductor processing, and in particular to a reaction device and processing equipment. Background Art
[0002] In the production process of photovoltaic and semiconductor products, some sheet materials usually need to undergo chemical treatments such as chemical vapor deposition (CVD) before being applied to related products. The chemical treatment of sheet materials usually requires a high temperature vacuum environment.
[0003] At present, sheet materials can be chemically treated in a reaction chamber. One end of the reaction chamber in the length direction can be connected to a vacuum device, and the vacuum device can vacuum the reaction chamber from the end of the reaction chamber. During the vacuuming process of the vacuum device, part of the sheet material placed flat in the reaction chamber will move under the influence of the airflow, resulting in poor chemical treatment effect of some sheet materials. Utility Model Content
[0004] In view of the above, it is necessary to provide a reaction device and processing equipment to solve the above defects.
[0005] In the first aspect, an embodiment of the present application provides a reaction device, comprising: a reaction chamber, the reaction chamber is provided with a receiving cavity, the receiving cavity is used to receive sheet materials, a first opening is opened on one side of the reaction chamber, the first opening is used to penetrate one side of the reaction chamber along a direction at an angle to the surface of the sheet material, and the first opening is connected to the receiving cavity; a first cover body, the first cover body is installed on the outer side of the reaction chamber and is used to cover the first opening, a first air port is provided on the first cover body, the first air port is used to connect with an exhaust device to exhaust the receiving cavity, so that the gas in the receiving cavity moves out of the receiving cavity through the first opening along a direction at an angle to the surface of the sheet material.
[0006] Optionally, the reaction device further includes: a first flow balancing plate, which is arranged corresponding to the first opening and is located in the receiving cavity, the first flow balancing plate is connected to the inner side of the reaction chamber, and a plurality of first air holes are opened on the first flow balancing plate.
[0007] Optionally, the reaction device also includes: a second flow balancing plate, which is arranged corresponding to the first opening and is located on the outside of the reaction chamber, the second flow balancing plate is spaced apart from the first flow balancing plate, a plurality of second air holes are opened on the second flow balancing plate, and the plurality of second air holes are staggered with the plurality of first air holes.
[0008] Optionally, the cross-sectional area of the first opening gradually decreases from close to the receiving chamber to away from the receiving chamber, and the cross-sectional area of the first cover body gradually decreases from close to the reaction chamber to away from the reaction chamber. The first gas port is opened in the middle of a side of the first cover body away from the reaction chamber, and the side wall of the first opening and the side wall of the first cover body are used to guide the gas to flow to the first gas port.
[0009] Optionally, a second opening is opened at the end of the reaction chamber, and the reaction device also includes: a second cover body, which is installed on the outside of the reaction chamber and is used to cover the second opening. A second air port is opened on the second cover body, and the second air port is used to connect with the exhaust device to exhaust the containing cavity.
[0010] Optionally, the reaction device further includes: a third flow balancing plate, which is arranged corresponding to the second opening and is located in the receiving cavity, the third flow balancing plate is connected to the inner side of the reaction chamber, and a plurality of third air holes are opened on the third flow balancing plate.
[0011] Optionally, the reaction device also includes: a heat insulation plate, which is arranged corresponding to the second opening and is located between the second cover body and the third flow equalizing plate. The heat insulation plate is spaced apart from the second cover body and the third flow equalizing plate. A third air port is opened on the heat insulation plate, and the third air port is arranged corresponding to the second air port. The third air port is used to communicate with the second air port, and each third air hole is staggered with the third air port.
[0012] Optionally, a surface of the heat insulation board facing the inner side of the receiving cavity is a reflecting surface, and the reflecting surface is used to reflect the heat transferred from the receiving cavity to the heat insulation board.
[0013] Optionally, the reaction device also includes: a support rod, which is arranged in the reaction chamber, the support rod is used to support a carrier, the carrier is used to load multiple sheet materials, a first giveway opening is opened on the third flow equalizing plate, and a second giveway opening is opened on the heat insulation plate, the first giveway opening and the second giveway opening are arranged correspondingly, and the first giveway opening and the second giveway opening are used to allow the support rod to pass through.
[0014] In a second aspect, an embodiment of the present application provides a processing device, comprising: a vacuum device; a reaction device such as any of the above, the reaction device is connected to the vacuum device, and the vacuum device is used to vacuum the reaction device.
[0015] Through the reaction device and processing equipment provided by the present application, when the sheet material is contained in the containing chamber and the vacuum device evacuates the containing chamber through the first opening, the direction of the gas flow forms an angle with the surface of the sheet material, so that the sheet material in the containing chamber can tend to approach the carrier under the influence of the airflow, thereby increasing the fit between the sheet material and the carrier, reducing the probability of the sheet material moving during the vacuum process, and reducing the situation where the chemical treatment effect is poor due to the movement of the sheet material. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the processing equipment in the embodiment of the present application.
[0017] Figure 2 It is a schematic diagram of the structure of the reaction device in the embodiment of the present application.
[0018] Figure 3 This is the first structural disassembly diagram of the reaction device in the embodiment of the present application.
[0019] Figure 4 It is a schematic diagram of the relative relationship between the gas and the sheet material when the gas flows toward the first opening in the embodiment of the present application.
[0020] Figure 5 It is a schematic diagram of the partial structure of the reaction device in the embodiment of the present application.
[0021] Figure 6 yes Figure 5 Enlarged view of the center VI.
[0022] Figure 7 It is a second structural disassembly diagram of the reaction device in the embodiment of the present application.
[0023] Figure 8 yes Figure 7 Enlarged view of IIX in the middle.
[0024] Main component symbols
[0025] Reaction device 100
[0026] Air extraction device 200
[0027] Vehicle 300
[0028] Sheet material 301
[0029] Reaction Chamber 10
[0030] Accommodation chamber 11
[0031] First opening 12
[0032] Second opening 13
[0033] First cover 20
[0034] First gas port 21
[0035] Air extraction pipeline 22
[0036] The first current balancing plate 30
[0037] First air hole 31
[0038] The second current balancing plate 40
[0039] Second air hole 41
[0040] Second cover 50
[0041] Second gas port 51
[0042] Observation window 52
[0043] The third current balancing plate 60
[0044] The third air hole 61
[0045] First yield port 62
[0046] Heat insulation board 70
[0047] The third gas port 71
[0048] Second yield port 72
[0049] Support rod 80 DETAILED DESCRIPTION
[0050] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.
[0051] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.
[0052] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.
[0053] See also Figure 1 , Figure 1 A processing device provided by an embodiment of the present application is shown.
[0054] In an embodiment of the present application, the processing equipment may include a reaction device 100 and a gas extraction device 200. The reaction device 100 is connected to the gas extraction device 200. The reaction device 100 is provided with a receiving chamber 11 ( Figure 3 ), the receiving chamber 11 can receive the carrier 300 ( Figure 4 ) and a plurality of sheet materials 301 (shown in FIG. 3 ) loaded on the carrier 300 Figure 4). The vacuum device 200 can evacuate the receiving chamber 11. After the evacuation of the receiving chamber 11 is completed, the plurality of sheet materials 301 can be chemically treated in the receiving chamber 11.
[0055] In the embodiment of the present application, there is no specific limitation on the sheet material 301 and the carrier 300. For example, the sheet material 301 may be, but is not limited to, a silicon sheet, a silicon carbide sheet, and a wafer. The carrier 300 may be a quartz boat or a graphite boat.
[0056] In the embodiment of the present application, there is no specific limitation on the chemical treatment of the sheet material 301 by the processing equipment. For example, the chemical treatment may be, but is not limited to, chemical vapor deposition (CVD) treatment or diffusion process treatment.
[0057] Please also read Figure 2 and Figure 3 , Figure 2 and Figure 3 A reaction device 100 provided in an embodiment of the present application is shown.
[0058] In one embodiment, the reaction device 100 may include a reaction chamber 10 and a first cover 20. A receiving chamber 11 is provided in the reaction chamber 10. A first opening 12 is provided on one side of the reaction chamber 10, and the first opening 12 penetrates one side of the reaction chamber 10 in a direction that is at an angle to the surface of the sheet material 301, and the first opening 12 is communicated with the receiving chamber 11. The first cover 20 is fixedly mounted on the outside of the reaction chamber 10 and blocks the first opening 12. A first air port 21 is provided on the first cover 20. The first air port 21 can be connected to the exhaust device 200, so that the exhaust device 200 can exhaust the receiving chamber 11 through the first air port 21 and the first opening 12.
[0059] Please also read Figure 4 It can be understood that the surface of the sheet material 301 can be a surface arranged opposite to the sheet material 301 in the thickness direction. The angle α between the direction in which the first opening 12 penetrates one side of the reaction chamber 10 and the surface of the sheet material 301 can be greater than 0 degrees and less than 180 degrees. In this way, when the exhaust device 200 exhausts the receiving chamber 11 through the first gas port 21 and the first opening 12, the gas can move out of the receiving chamber 11 through the first opening 12 in the direction of the angle α with the surface of the sheet material 301.
[0060] In the embodiment of the present application, the length direction of the reaction chamber 10 may be defined as the first direction, the width direction as the second direction, and the height direction as the third direction. Figure 2 and Figure 3 As shown, the first direction may be the X direction and its opposite direction, the second direction may be the Y direction and its opposite direction, and the third direction may be the Z direction and its opposite direction.
[0061] In some cases, when the sheet material 301 is received in the receiving chamber 11, the carrier 300 carries the sheet material 301 from one side in the third direction, and the sheet material 301 is placed flat on the carrier 300. At this time, the carrier 300 receives the sheet material 301 from the lower surface of the sheet material 301, and the thickness direction of the sheet material 301 coincides with the third direction, and the third direction is perpendicular to the surface of the sheet material 301. The first opening 12 can be opened on one side of the reaction chamber 10 in the third direction. When the vacuum device 200 evacuates the receiving chamber 11 through the first opening 12, the flow direction of the gas is not parallel to the surface of the sheet material 301, which can reduce the pressure difference between the two surfaces of the sheet material 301 and reduce the probability of the sheet material 301 moving along the first direction or the second direction during the gas flow; at the same time, the sheet material 301 in the receiving chamber 11 may tend to approach the carrier 300 in the third direction under the influence of the airflow, thereby increasing the tightness of the fit between the sheet material 301 and the carrier 300 and reducing the probability of the sheet material 301 moving during the vacuum process.
[0062] For example, the first opening 12 may be opened at the bottom of the reaction chamber 10, and the carrier 300 receives each sheet material 301 from the bottom. When the exhaust device 200 exhausts air from the bottom of the reaction chamber 10, each sheet material 301 may have a tendency to move downward, thereby increasing the tightness of each sheet material 301 and the carrier 300, and reducing the probability of displacement of the sheet material 301.
[0063] In the embodiments of the present application, there is no specific limitation on the method of fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, bolt fixing, welding fixing, buckle fixing, etc.
[0064] In some embodiments, in the third direction, the cross-sectional area of the first opening 12 gradually decreases from a direction close to the reaction chamber 10 to a direction away from the reaction chamber 10 .
[0065] It is understood that the first air port 21 can be opened in the middle of the first cover 20. The side wall of the first opening 12 can be an inclined surface, a curved surface or a stepped surface. The side wall of the first opening 12 can guide the gas flowing out of the receiving cavity 11 to converge to a position close to the first air port 21, which can improve the efficiency of the exhaust device 200 in exhausting the receiving cavity 11 through the first air port 21. For example, Figure 3 As shown, the side wall of the first air port 21 may be an inclined surface; in the third direction, the distance between the top ends of the two side walls of the first air port 21 in the second direction is greater than the distance between the bottom ends of the two side walls.
[0066] In some embodiments, in the third direction, the cross-sectional area of the first cover 20 gradually decreases from close to the reaction chamber 10 to away from the reaction chamber 10 , and the first air port 21 is opened on a side of the first cover 20 away from the reaction chamber 10 .
[0067] It is understood that the side wall of the first cover body 20 can be an inclined surface, a curved surface or a stepped surface. The side wall of the first cover body 20 can guide the gas flowing from the receiving cavity 11 to the first cover body 20 to converge to the first gas port 21, which can improve the efficiency of the gas extraction device 200 in exhausting the receiving cavity 11 through the first gas port 21.
[0068] In the embodiments of the present application, there is no specific limitation on the number of the first cover bodies 20. Figure 3 As shown, the number of the first cover bodies 20 may be two, and the two first cover bodies 20 are arranged side by side in the first direction and fixedly connected, and the two first cover bodies 20 cooperate to cover the first opening 12 .
[0069] In some embodiments, an air extraction pipe 22 may be fixedly connected to the first cover 20 , the air extraction pipe 22 is communicated with the first air port 21 , and is fixedly connected to the air extraction device 200 . The air extraction device 200 may extract air from the receiving chamber 11 through the air extraction pipe 22 .
[0070] When there are multiple first covers 20 , the exhaust pipe 22 can be fixedly connected to the multiple first covers 20 and communicated with the multiple first air ports 21 , so that the exhaust device 200 can exhaust the accommodating cavity 11 through the multiple first air ports 21 at the same time.
[0071] Please also read Figure 5 and Figure 6 In some embodiments, the reaction device 100 further includes a first flow equalizing plate 30. The first flow equalizing plate 30 is arranged corresponding to the first opening 12, and is located between the inner side of the reaction chamber 10 and the first cover body 20. The first flow equalizing plate 30 is fixedly connected to a side wall in the reaction chamber 10 in the third direction. A plurality of first air holes 31 are provided on the first flow equalizing plate 30, and the plurality of first air holes 31 are arranged at intervals. The plurality of first air holes 31 can be connected to the receiving cavity 11 and the first opening 12. The plurality of first air holes 31 can allow the gas in the receiving cavity 11 to pass through, so that the gas flows out of the receiving cavity 11.
[0072] It can be understood that the multiple first air holes 31 on the first flow equalizing plate 30 can allow gas to pass through respectively, thereby improving the uniformity of the gas in the receiving cavity 11 when flowing in the third direction, and reducing the probability of the sheet material 301 near the first air port 21 being damaged by excessive suction.
[0073] In some embodiments, the reaction device 100 further includes a second flow equalizing plate 40. The second flow equalizing plate 40 is arranged corresponding to the first opening 12. The second flow equalizing plate 40 is fixedly connected to a side wall in the reaction chamber 10 in the third direction. A plurality of second air holes 41 are provided on the second flow equalizing plate 40, and the plurality of second air holes 41 are arranged at intervals. The plurality of second air holes 41 can be connected to the receiving cavity 11 and the first opening 12. The plurality of second air holes 41 can allow the gas in the receiving cavity 11 to pass through, so that the gas flows out of the receiving cavity 11.
[0074] The second flow balancing plate 40 is spaced apart from the first flow balancing plate 30 in the third direction. The plurality of second air holes 41 and the plurality of first air holes 31 are arranged alternately.
[0075] In some cases, the first cover 20 may be fixedly mounted on a side of the second flow equalizing plate 40 away from the reaction chamber 10 to be fixedly connected to the reaction chamber 10. In other cases, the second flow equalizing plate 40 may be located inside the first cover 20. The embodiments of the present application are not limited to this.
[0076] It can be understood that each second air hole 41 can be spaced apart from each first air hole 31 in the first direction and the second direction to achieve a staggered arrangement of multiple second air holes 41 and multiple first air holes 31 .
[0077] It can be understood that the gas from the receiving chamber 11 through the first air hole 31 can enter the space between the first flow equalizing plate 30 and the second flow equalizing plate 40, and then enter the first cover 20 through the second air hole 41. The provision of the second flow equalizing plate 40 can further improve the uniformity of the gas in the receiving chamber 11 when it flows in the third direction.
[0078] Please also read Figure 7 and Figure 8 In some embodiments, the reaction chamber 10 may have a second opening 13 at one end in the first direction. The reaction device 100 may further include a second cover 50. The second cover 50 is fixedly mounted on the outside of the reaction chamber 10 and is located at one end of the reaction chamber 10 where the second opening 13 is provided. The second cover 50 may close the second opening 13. A second air port 51 is provided on the second cover 50, and the second air port 51 may be connected to the receiving chamber 11 through the second opening 13. The exhaust device 200 may be connected to the second air port 51, and exhaust the receiving chamber 11 through the second air port 51.
[0079] It can be understood that the air extraction device 200 connected to the second air port 51 and the air extraction device 200 connected to the first air port 21 can be the same air extraction device 200 or different air extraction devices 200, and the embodiments of the present application are not limited to this.
[0080] It can be understood that when the reaction device 100 does not include the second cover body 50, or the exhaust device 200 is not connected to the second cover body 50, the exhaust device 200 can exhaust the receiving chamber 11 through the first opening 12 so that the air pressure in the receiving chamber 11 meets the requirements of chemical treatment, and then the exhaust device 200 can reduce the power and continue to pump air into the receiving chamber 11 to stabilize the air pressure in the receiving chamber 11 so that the air pressure in the receiving chamber 11 can continue to meet the requirements of chemical treatment; multiple sheet materials 301 can be chemically treated in the receiving chamber 11 when the air pressure in the receiving chamber 11 continues to meet the requirements of chemical treatment.
[0081] It can be understood that when the reaction device 100 includes the second cover 50 and the second cover 50 is connected to the exhaust device 200, the exhaust device 200 can first exhaust the receiving chamber 11 through the first opening 12, so that the air pressure in the receiving chamber 11 reaches the preset air pressure value, and the plurality of sheet materials 301 can be closely attached to the carrier 300. Then the exhaust device 200 can stop exhausting through the first opening 12, and start exhausting the receiving chamber 11 through the second opening 13, so that the air pressure in the receiving chamber 11 meets the requirements of chemical treatment, and then the exhaust device 200 can reduce the power and continue to exhaust the receiving chamber 11, so that the air pressure in the receiving chamber 11 is stable, so that the air pressure in the receiving chamber 11 can continue to meet the requirements of chemical treatment; the plurality of sheet materials 301 can be chemically treated in the receiving chamber 11 when the air pressure in the receiving chamber 11 continues to meet the requirements of chemical treatment. Among them, the preset air pressure value is greater than the air pressure value that meets the requirements of chemical treatment.
[0082] It can be understood that before the chemical treatment is carried out, the receiving chamber 11 can be pre-evacuated through the first opening 12, so as to reduce the air pressure in the receiving chamber 11 while improving the firmness of the relative fixation between the sheet material 301 and the carrier 300, and then the receiving chamber 11 can be evacuated through the second opening 13 so that the air pressure in the receiving chamber 11 meets the requirements of the chemical treatment. The receiving chamber 11 is a closed chamber, so when the exhaust device 200 exhausts air through the second opening 13, the plurality of sheet materials 301 can maintain a state of being attached to the carrier 300. In this way, the receiving chamber 11 is pre-evacuated through the first opening 12 before the receiving chamber 11 is evacuated through the second opening 13, which can reduce the probability of the sheet material 301 moving in the first direction during the exhaust process, and reduce the situation where the sheet material 301 affects the chemical treatment effect due to movement.
[0083] In some embodiments, the reaction device 100 further includes a third flow equalizing plate 60. The third flow equalizing plate 60 is arranged corresponding to the second opening 13 and is located between the inner side of the reaction chamber 10 and the second cover 50. The third flow equalizing plate 60 is fixedly connected to the inner wall of the reaction chamber 10. A plurality of third air holes 61 are provided on the third flow equalizing plate 60, and the plurality of third air holes 61 are arranged at intervals.
[0084] It can be understood that the multiple third air holes 61 on the third flow equalizing plate 60 can allow gas to pass through respectively, thereby improving the uniformity of the gas in the receiving chamber 11 when it flows in the first direction, and reducing the probability of the sheet material 301 near the second air port 51 being moved and damaged due to excessive suction.
[0085] In some embodiments, the reaction device 100 may further include a heating component (not shown) and a heat insulation board 70. The heating component is located in the receiving chamber 11. The heating component can heat the receiving chamber 11 so that the temperature of the receiving chamber 11 meets the requirements of the chemical treatment, so that the sheet material 301 can be chemically treated in the receiving chamber 11.
[0086] The heat shield 70 is arranged corresponding to the second opening 13 and is located between the second cover 50 and the third flow equalizing plate 60. The heat shield 70 is fixedly connected to the reaction chamber 10. The heat shield 70, the second cover 50 and the third flow equalizing plate 60 are arranged at intervals in the first direction. A third air port 71 is provided on the heat shield 70, and the third air port 71 is arranged corresponding to the second air port 51 and can be connected to the second air port 51. Each third air hole 61 is staggered with the third air port 71.
[0087] It can be understood that the portion of the third flow equalizing plate 60 corresponding to the third air port 71 does not have the third air hole 61 , so that each third air hole 61 is staggered with the third air port 71 .
[0088] It is understood that the second cover 50 may be provided with an observation window 52 for the staff to view the interior of the receiving chamber 11. The heat insulation board 70 may block the heat loss in the receiving chamber 11, thereby reducing the heat transferred from the receiving chamber 11 to the second cover 50 and lowering the temperature of the second cover 50. In this way, the probability of the staff being injured by high temperature when viewing the interior of the receiving chamber 11 through the observation window 52 may be reduced.
[0089] In some embodiments, a surface of the heat insulation board 70 facing away from the second cover body 50 is a reflective surface, which can reflect the heat transferred from the receiving cavity 11 to the heat insulation board 70 , thereby reducing the heat loss in the receiving cavity 11 .
[0090] In the embodiment of the present application, there is no specific limitation on the material of the heat insulation board 70. For example, the heat insulation board 70 may be, but is not limited to, stainless steel, and the reflective surface is a surface formed by grinding the heat insulation board 70 made of stainless steel.
[0091] In some embodiments, the reaction device 100 may further include a plurality of support rods 80. The plurality of support rods 80 are located in the receiving chamber 11 and are fixedly connected to the inner wall of the reaction chamber 10. The plurality of support rods 80 may be connected to a side of the reaction chamber 10 where the first opening 12 is provided. The plurality of support rods 80 may support the carrier 300 so that the carrier 300 is spaced apart from the side wall of the reaction chamber 10 where the first opening 12 is provided, so that the carrier 300 may be located in the middle of the receiving chamber 11. The heating assembly may surround the carrier 300 to heat each sheet material 301 in the carrier 300.
[0092] The third flow balancing plate 60 is provided with a first clearance opening 62, and the heat insulation plate 70 is provided with a second clearance opening 72, and the first clearance opening 62 and the second clearance opening 72 are arranged correspondingly. The first clearance opening 62 and the second clearance opening 72 allow the support rod 80 to pass through, so that the third flow balancing plate 60 and the heat insulation plate 70 avoid the support plate.
[0093] It is understandable that the first make way opening 62 and the second make way opening 72 may also be provided corresponding to the observation window 52 , and the staff may observe the reaction conditions in the receiving chamber 11 through the observation window 52 , the first make way opening 62 and the second make way opening 72 .
[0094] When the processing equipment provided by the embodiment of the present application is working, the exhaust device can first exhaust the receiving chamber 11 through the first opening 12 and the first cover 20 to reduce the air pressure of the receiving chamber 11 to a preset air pressure value, and then stop exhausting air from the first opening 12, and start exhausting the receiving chamber 11 through the second opening 13 and the second cover 50, so that the air pressure of the receiving chamber 11 meets the requirements of chemical treatment. Then the heating component can work to increase the temperature of the receiving chamber 11 to meet the requirements of chemical treatment, so that the sheet material 301 can be chemically treated in the receiving chamber 11.
[0095] It can be understood that before the chemical treatment is performed, the receiving chamber 11 can be pre-evacuated through the first opening 12, thereby reducing the air pressure in the receiving chamber 11 and improving the firmness of the relative fixation between the sheet material 301 and the carrier 300, and then the receiving chamber 11 can be evacuated through the second opening 13 to make the air pressure in the receiving chamber 11 meet the requirements of the chemical treatment. In this way, the probability of the sheet material 301 moving in the first direction during the evacuation process can be reduced, and the situation in which the sheet material 301 affects the chemical treatment effect due to movement can be reduced.
[0096] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.
Claims
1. A reaction device, characterized in that: include: A reaction chamber, wherein the reaction chamber is provided with a receiving cavity, the receiving cavity is used to receive the sheet material, a first opening is provided on one side of the reaction chamber, the first opening is used to penetrate the side of the reaction chamber along a direction forming an angle with the surface of the sheet material, and the first opening is communicated with the receiving cavity; A first cover body is installed on the outside of the reaction chamber and is used to cover the first opening. A first air port is provided on the first cover body. The first air port is used to connect with a vacuum device to evacuate the receiving chamber, so that the gas in the receiving chamber moves out of the receiving chamber through the first opening in a direction that forms an angle with the surface of the sheet material.
2. The reaction device according to claim 1, characterized in that The reaction device also includes: A first flow balancing plate is provided corresponding to the first opening and is located in the receiving cavity. The first flow balancing plate is connected to the inner side of the reaction chamber, and a plurality of first air holes are provided on the first flow balancing plate.
3. The reaction device according to claim 2, characterized in that The reaction device also includes: A second flow balancing plate, the second flow balancing plate is arranged corresponding to the first opening and is located on the outside of the reaction chamber, the second flow balancing plate is spaced apart from the first flow balancing plate, a plurality of second air holes are provided on the second flow balancing plate, and the plurality of second air holes are staggered with the plurality of first air holes.
4. The reaction device according to claim 1, characterized in that The cross-sectional area of the first opening gradually decreases from close to the accommodating cavity to away from the accommodating cavity, the cross-sectional area of the first cover body gradually decreases from close to the reaction chamber to away from the reaction chamber, the first gas port is opened in the middle of a side of the first cover body away from the reaction chamber, and the side wall of the first opening and the side wall of the first cover body are used to guide the gas to flow to the first gas port.
5. The reaction device according to claim 1, characterized in that: The end of the reaction chamber is provided with a second opening, and the reaction device further comprises: The second cover body is installed on the outside of the reaction chamber and is used to cover the second opening. The second cover body is provided with a second air port, and the second air port is used to be connected to an exhaust device to exhaust air from the receiving chamber.
6. The reaction device according to claim 5, characterized in that The reaction device also includes: A third flow balancing plate is provided corresponding to the second opening and is located in the receiving cavity. The third flow balancing plate is connected to the inner side of the reaction chamber, and a plurality of third air holes are provided on the third flow balancing plate.
7. The reaction device according to claim 6, characterized in that The reaction device also includes: A heat insulation plate, the heat insulation plate is arranged corresponding to the second opening and is located between the second cover body and the third flow equalizing plate. The heat insulation plate is spaced apart from the second cover body and the third flow equalizing plate. A third air port is opened on the heat insulation plate, the third air port is arranged corresponding to the second air port, the third air port is used to communicate with the second air port, and each of the third air holes is staggered with the third air port.
8. The reaction device according to claim 7, characterized in that A surface of the heat insulation board facing the inner side of the receiving cavity is a reflecting surface, and the reflecting surface is used to reflect the heat transferred from the receiving cavity to the heat insulation board.
9. The reaction device according to claim 7, characterized in that: The reaction device also includes: A support rod is arranged in the reaction chamber, the support rod is used to support a carrier, the carrier is used to load a plurality of sheet materials, a first giveway opening is opened on the third flow equalizing plate, a second giveway opening is opened on the heat insulation plate, the first giveway opening and the second giveway opening are arranged correspondingly, and the first giveway opening and the second giveway opening are used to allow the support rod to pass through.
10. A processing equipment, characterized in that: include: Extraction device; The reaction device according to any one of claims 1 to 9, wherein the reaction device is connected to the exhaust device, and the exhaust device is used to exhaust gas from the reaction device.