Pipeline system of tubular ALD (Atomic Layer Deposition) equipment

Abstract

The pipeline system of the tubular ALD equipment comprises an air inlet pipeline and a water inlet pipeline which are arranged in a furnace tube, the air inlet pipeline and the water inlet pipeline extend to the middle of the furnace tube from a furnace mouth of the furnace tube to the interior of the furnace, and the air inlet pipeline comprises an air inlet section, a first air outlet section and a second air outlet section which are sequentially connected. The gas inlet section is connected with a gas inlet located at the furnace mouth, rows of first gas outlet holes are evenly formed in the pipeline side wall, close to the gas inlet section, of the first gas outlet section, the second gas outlet section extends to the middle of the furnace tube, rows of second gas outlet holes are evenly formed in the pipeline side wall of the second gas outlet section, and the opening diameter of the second gas outlet holes is larger than that of the first gas outlet holes. The water inlet pipe comprises a water inlet connecting section and a water outlet section which are sequentially connected, and the water inlet connecting section is connected with a water inlet located at the furnace mouth to supply water into the furnace pipe. The water inlet pipeline and the gas inlet pipeline in the furnace pipe are optimized, so that the situation that the gas distribution difference at the furnace mouth and the furnace tail is large is improved, and the situation that the appearance is poor due to too much water at the furnace mouth is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of tubular PECVD, in particular to a pipeline system of tubular ALD equipment. Background Art

[0002] In the coating process of the crystalline silicon solar cell production process, the tubular ALD equipment uses a single air inlet pipe to intake air at the furnace mouth of the furnace tube and exhaust air at the furnace tail, so that the special gas and TMA gas are diffused and distributed in the furnace tube, thereby reacting and coating on the silicon wafers in the graphite boat. As the production capacity increases, the diameter and length of the furnace tube are getting larger and larger, and the existing furnace mouth air inlet pipe intake method has gradually shown its disadvantages. The current air inlet pipe is generally short, and the gas entering the furnace tube is mainly ejected from the furnace mouth and diffused to the furnace tail. In this way, the reaction consumption at the furnace mouth is high, resulting in a large difference in the gas volume at the furnace mouth and the furnace tail, which makes the uniformity in the furnace tube worse, thereby affecting the efficiency performance. In addition, the water inlet also has such a problem. The water inlet pipe at the furnace mouth is generally short, and there is too much water at the furnace mouth, which is easy to corrode the graphite boat, resulting in poor appearance and a decrease in the yield rate.

[0003] Therefore, it is necessary to design a piping system for tubular ALD equipment to solve the above problems. Utility Model Content

[0004] The utility model aims to provide a piping system for a tubular ALD device, which improves the large difference in gas distribution at the furnace mouth and furnace tail, and the poor appearance caused by excessive water at the furnace mouth, by optimizing the water inlet pipe and the air inlet pipe in the furnace tube.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a piping system of a tubular ALD equipment, comprising an air inlet pipeline and a water inlet pipeline arranged in a furnace tube, the air inlet pipeline and the water inlet pipeline extending from the furnace mouth of the furnace tube into the furnace to the middle of the furnace tube, the air inlet pipeline comprising an air inlet section, a first air outlet section and a second air outlet section connected in sequence, the air inlet section is connected to the air inlet located at the furnace mouth, rows of first air outlet holes are evenly opened on the side wall of the pipeline of the first air outlet section close to the air inlet section, the second air outlet section extends to the middle of the furnace tube, rows of second air outlet holes are evenly opened on the side wall of the pipeline of the second air outlet section, the opening diameter of the second air outlet holes is larger than that of the first air outlet holes, the water inlet pipe comprises a water inlet connecting section and a water outlet section connected in sequence, the water inlet connecting section is connected to the water inlet located at the furnace mouth to supply water to the furnace tube.

[0006] As a further improved technical solution of the utility model, an inclined angle is formed between the second air outlet section and the first air outlet section, and the range of the angle is 0°-90°.

[0007] As a further improved technical solution of the utility model, the air intake section is a U-shaped double-branch pipe, and the two ports of the U-shaped double-branch pipe are respectively connected to the special gas inlet and the TMA inlet on the flange at the furnace mouth.

[0008] As a further improved technical solution of the utility model, the tube wall of the water inlet connecting section near the furnace mouth is evenly provided with rows of first water outlet holes, and the tube wall of the water outlet section is evenly provided with rows of second water outlet holes.

[0009] As a further improved technical solution of the present invention, the opening diameter of the second water outlet hole is larger than that of the first water outlet hole.

[0010] As a further improved technical solution of the utility model, an inclined angle is formed between the water inlet connecting section and the water outlet section, and the angle ranges from 0° to 90°.

[0011] As a further improved technical solution of the utility model, there are 1 to 10 first air outlet holes and 10 second air outlet holes in each row.

[0012] As a further improved technical solution of the utility model, there are 1 to 10 first water outlet holes and 10 second water outlet holes in each row.

[0013] The pipeline system of the tubular ALD equipment of the utility model improves the problem of large differences in gas and water volume at the furnace mouth and furnace tail by optimizing the structure of the air inlet pipeline and the water inlet pipeline, thereby improving the uniformity of coating in the furnace tube. The air inlet pipeline is divided into two branches at the air inlet end, which are respectively connected to the special gas inlet and the TMA inlet. When the gas enters the air inlet pipeline, it diffuses into the furnace tube through the first outlet hole near the furnace mouth and the second outlet hole deep in the middle of the furnace tube, so that the gas distribution in the front and rear boats in the furnace tube is uniform, thereby improving the uniformity of coating. In addition, the first outlet hole and the second outlet hole use a structure with a small hole in front and a large hole in the back to adjust the air pressure, thereby avoiding excessive accumulation and reaction of gas at the furnace mouth. Similarly, the water inlet pipeline is optimized through the structure, and is deep in the middle of the furnace tube. The first outlet hole is opened near the furnace mouth, and the second outlet hole is opened deep in the middle of the furnace tube. When water is inlet, the first outlet hole and the second outlet hole separate the water, thereby avoiding excessive erosion of the graphite boat at the furnace mouth by water, resulting in poor appearance. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional perspective schematic diagram of the utility model.

[0015] Figure 2 It is a plan view of the utility model.

[0016] Figure 3 It is a stereoscopic diagram of the air intake pipeline in the utility model.

[0017] Figure 4It is a stereoscopic diagram of the water inlet pipeline in the utility model. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model is described in detail below in conjunction with the accompanying drawings and specific embodiments. It should also be noted that, for the convenience of description, the accompanying drawings only show parts related to the utility model rather than all structures.

[0019] The piping system of the tubular ALD equipment of the present embodiment includes an air inlet pipeline 2 and a water inlet pipeline 3 arranged in the furnace tube 1. The air inlet pipeline 2 and the water inlet pipeline 3 extend from the furnace mouth 11 of the furnace tube 1 into the furnace to the middle of the furnace tube. The air inlet pipeline 2 includes an air inlet section 21, a first air outlet section 22 and a second air outlet section 23 connected in sequence. The air inlet section 21 is connected to the air inlet located at the furnace mouth 11. Specifically, the air inlet section 21 is a U-shaped double branch pipe, and its two ports are respectively connected to the special gas inlet and the TMA inlet on the flange at the furnace mouth 11, and air is ventilated from the air inlet to the air inlet pipeline 2 and the furnace tube 1. The first air outlet section 22 is evenly provided with rows of first air outlet holes 221 on the side wall of the pipeline near the air inlet section 21, and the second air outlet section 23 extends to the middle of the furnace tube 1. The second air outlet section 23 is evenly provided with rows of second air outlet holes 231 on the side wall of the pipeline. There are 1-10 first air outlet holes and second air outlet holes in each row, and the opening diameter of the second air outlet holes 231 is larger than the first air outlet holes 221. The specific diameters of the first air outlet holes 221 and the second air outlet holes 231 can be freely selected from 0.5 to 50 mm according to the length of the furnace tube and the position of the graphite boat. In the present embodiment, the total length of the air inlet pipeline 2 in the furnace tube is 2.1 m, the air hole diameter of the first air outlet hole 221 is 2 mm, and the air hole diameter of the second air outlet hole 231 is 6 mm.

[0020] Furthermore, an inclined angle a is formed between the second gas outlet section and the first gas outlet section, and the angle a ranges from 0° to 90°, that is, the second gas outlet section tilts toward the middle of the furnace tube. When the special gas is passed into the furnace tube 1, the special gas supply device outside the furnace tube enters the gas inlet section 21, the first gas outlet section 22, and the second gas outlet section 23 through the special gas inlet, and is respectively released from the first gas outlet hole 221 and the second gas outlet hole 231 on the first gas outlet section 22 and the second gas outlet section 23 into the furnace tube 1. Similarly, when TMA gas is passed into the furnace tube 1, the TMA gas supply device outside the furnace tube enters the gas inlet section 21, the first gas outlet section 22, and the second gas outlet section 23 through the TMA inlet, and is respectively released from the first gas outlet hole 221 and the second gas outlet hole 231 on the first gas outlet section 22 and the second gas outlet section 23 into the furnace tube 1.

[0021] In addition, the water inlet pipeline 3 includes a water inlet connecting section 31 and a water outlet section 32 connected in sequence. The water inlet connecting section 31 is connected to the water inlet located at the furnace mouth 11 to supply water to the furnace tube 1. Specifically, the water inlet connecting section 31 is connected to the water inlet on the flange at the furnace mouth 11, and water flows from the water inlet to the water inlet pipeline 3 and the furnace tube 1.

[0022] A row of first water outlet holes 311 is evenly opened on the tube wall of the water inlet connecting section 31 near the furnace mouth, and the water outlet section 32 extends to the middle of the furnace tube, that is, between the front boat 100 and the rear boat 200 placed in the furnace tube. A row of second water outlet holes 321 is evenly opened on the tube wall of the water outlet section 32. There are 1-10 first water outlet holes 311 and second water outlet holes 321 in each row, and the opening diameter of the second water outlet holes 321 is larger than that of the first water outlet holes 311.

[0023] Furthermore, an inclined angle b is formed between the water inlet connecting section 31 and the water outlet section 32, and the angle b is in the range of 0°-90°.

[0024] The air inlet pipeline in this embodiment is divided into two branches at the air inlet end, which are connected to the special gas inlet and the TMA inlet respectively. When the gas enters the air inlet pipeline 1, it diffuses into the furnace tube through the first outlet hole 221 near the furnace mouth and the second outlet hole 231 deep in the middle of the furnace tube, so that the gas distribution in the front and rear boats in the furnace tube is uniform, thereby improving the uniformity of the coating. In addition, the first outlet hole 221 and the second outlet hole 231 use a front small hole and a rear large hole structure to adjust the air pressure to avoid excessive accumulation and reaction of gas at the furnace mouth. Similarly, the water inlet pipeline 3 is optimized in structure, penetrates into the middle of the furnace tube, opens a first water outlet hole 311 near the furnace mouth, and opens a second water outlet hole 321 deep in the middle of the furnace tube. When water is inlet, the first water outlet hole 311 and the second water outlet hole 321 separate the outflow of water to avoid excessive erosion of the graphite boat at the furnace mouth, resulting in poor appearance.

[0025] Terms such as "upper", "lower", "inner", "outer", "front", "back" and the like used herein to indicate spatial relative positions are used for the purpose of convenience to describe the relationship of one feature relative to another feature as shown in the drawings. It is understood that, depending on the different positions of the products, the terms of spatial relative positions may be intended to include different orientations in addition to the orientations shown in the drawings, and should not be construed as limitations on the claims.

[0026] In addition, the above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. The understanding of this specification should be based on the technical personnel in the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, ordinary technical personnel in the field should understand that the technical personnel in the relevant technical field can still modify or make equivalent substitutions to the present invention, and all technical solutions and improvements thereof that do not depart from the spirit and scope of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A piping system for a tubular ALD device, characterized in that: It comprises an air inlet pipeline and a water inlet pipeline arranged in a furnace tube, the air inlet pipeline and the water inlet pipeline extend from the furnace mouth of the furnace tube into the furnace to the middle of the furnace tube, the air inlet pipeline comprises an air inlet section, a first air outlet section and a second air outlet section connected in sequence, the air inlet section is connected to the air inlet located at the furnace mouth, a first air outlet hole in a row is evenly opened on the side wall of the pipeline of the first air outlet section close to the air inlet section, the second air outlet section extends to the middle of the furnace tube, a second air outlet hole in a row is evenly opened on the side wall of the pipeline of the second air outlet section, the opening diameter of the second air outlet hole is larger than that of the first air outlet hole, the water inlet pipeline comprises a water inlet connecting section and a water outlet section connected in sequence, the water inlet connecting section is connected to the water inlet located at the furnace mouth to supply water into the furnace tube.

2. The piping system of the tubular ALD device according to claim 1, characterized in that: An inclined angle is formed between the second air outlet section and the first air outlet section, and the angle ranges from 0° to 90°.

3. The piping system of the tubular ALD device according to claim 1, characterized in that: The air inlet section is a U-shaped double-branch pipe, and the two ports of the U-shaped double-branch pipe are respectively connected to the special gas inlet and the TMA inlet on the flange at the furnace mouth.

4. The piping system of the tubular ALD device according to claim 1, characterized in that: The pipe wall of the water inlet connection section near the furnace mouth is evenly provided with rows of first water outlet holes, and the pipe wall of the water outlet section is evenly provided with rows of second water outlet holes.

5. The piping system of the tubular ALD device according to claim 4, characterized in that: The opening diameter of the second water outlet hole is larger than that of the first water outlet hole.

6. The piping system of the tubular ALD device according to claim 4, characterized in that: An inclined angle is formed between the water inlet connection section and the water outlet section, and the angle ranges from 0° to 90°.

7. The piping system of the tubular ALD device according to claim 1, characterized in that: There are 1 to 10 first air outlet holes and 10 second air outlet holes in each row.

8. The piping system of the tubular ALD device according to claim 4, characterized in that: There are 1 to 10 first water outlet holes and 10 second water outlet holes in each row.

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