Liftable magnetic crystal pulling permanent magnet device

Abstract

The utility model discloses a magnetic crystal pulling permanent magnet device capable of ascending and descending, and belongs to the technical field of single crystal furnace accessories. A base; the magnet yoke is located above the base, the magnet yoke is provided with an opening, and the magnet yoke is provided with two mounting surfaces which are oppositely arranged; the two sets of permanent magnets are respectively fixed on the two mounting surfaces, a gap is formed between the two sets of permanent magnets, the opposite end surfaces of the two sets of permanent magnets are arranged to be concave surfaces, and the polarities of the opposite end surfaces of the two sets of permanent magnets are opposite; the lifting assembly is connected with the base and the magnet yoke, and the lifting assembly can drive the magnet yoke to move in the direction close to or away from the base; when in use, the two sets of permanent magnets on the magnet yoke are respectively positioned on two sides of the single crystal furnace, the concave surfaces of the two sets of permanent magnets can enable a magnetic field penetrating through the single crystal furnace to be distributed more uniformly, and the height of the magnet yoke can be conveniently adjusted through the lifting component, so that the magnetic field intensity is adjusted, and the crystal pulling quality of crystals is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace accessories, in particular to a magnetic crystal pulling permanent magnet device capable of being lifted and lowered. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment (mainly nitrogen and helium) and grows single crystals without dislocation using the Czochralski method. During the growth of single crystals, the introduction of a magnetic field in the melt space can effectively control various convections in the melt, effectively reduce crystal impurities and improve distribution uniformity. At the same time, the uniformity and intensity of the magnetic field will affect the growth process of the single crystal.

[0003] At present, the magnetic field of a single crystal furnace is usually generated by a superconducting magnet, an electromagnetic coil magnet or a permanent magnet arranged on the periphery of the single crystal furnace. Among them, the costs of superconducting magnets and electromagnetic coil magnets are relatively high. The existing permanent magnets are usually two rectangular permanent magnet blocks arranged in parallel. When the magnetic lines of force generated by the two rectangular permanent magnet blocks penetrate the crucible in the single crystal furnace, the magnetic field distribution at the center and edge of the crucible is not uniform. The magnetic field strength in the melt space is also closely related to the positions of the two rectangular permanent magnet blocks, which seriously affects the quality of crystal pulling.

[0004] Therefore, developing and designing a permanent magnet device for crystal pulling that can effectively improve the uniformity of magnetic field distribution and facilitate adjustment of magnetic field strength, thereby improving the quality of crystal pulling, is an issue that needs to be urgently addressed at this stage. Utility Model Content

[0005] In response to the problems existing in the prior art, the utility model provides a magnetic crystal pulling permanent magnet device that can be raised and lowered. The two sets of permanent magnets on the yoke are respectively located on both sides of the single crystal furnace when in use. The inner concave surfaces of the two sets of permanent magnets can make the magnetic field distribution through the single crystal furnace more uniform, and the height of the yoke can be conveniently adjusted through the lifting assembly, thereby adjusting the magnetic field strength through the melt space, thereby effectively improving the crystal pulling quality.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0007] The utility model provides a magnetic crystal pulling permanent magnet device capable of lifting and lowering, comprising:

[0008] Base;

[0009] A yoke, the yoke is located above the base, the yoke has an opening, and the yoke has two mounting surfaces arranged opposite to each other;

[0010] Two sets of permanent magnets, the two sets of permanent magnets are respectively fixed on the two mounting surfaces, there is a gap between the two sets of permanent magnets, the opposite end surfaces of the two sets of permanent magnets are both set as inner concave surfaces, and the polarities of the opposite end surfaces of the two sets of permanent magnets are opposite;

[0011] A lifting assembly is connected to the base and the yoke respectively, and the lifting assembly can drive the yoke to move in a direction close to or away from the base.

[0012] As a preferred technical solution, a plurality of rollers are provided on the base, and the rollers are connected to a driving assembly capable of driving the rollers to roll.

[0013] As a preferred technical solution, the driving component is configured as a servo motor, and the output shaft of the servo motor is transmission-connected to at least one of the rollers.

[0014] As a preferred technical solution, a plurality of guide components are provided between the base and the yoke.

[0015] As a preferred technical solution, the guide assembly includes a guide rod and a guide sleeve sleeved on the guide rod, the guide rod is fixed on the base, and the guide sleeve is fixed on the yoke;

[0016] And / or, a plurality of the guide components are distributed around the yoke.

[0017] As a preferred technical solution, the magnetic yoke is made of magnetic conductive material;

[0018] And / or, the yoke is C-shaped.

[0019] As a preferred technical solution, each set of the permanent magnets is composed of several magnetic groups spliced ​​together.

[0020] As a preferred technical solution, the inner concave surface is in an arc shape;

[0021] And / or, the two inner concave surfaces are symmetrically arranged.

[0022] As a preferred technical solution, the permanent magnet is coated with non-magnetic material except for the inner concave surface and the surface connected to the yoke.

[0023] As a preferred technical solution, the lifting component is configured as a screw stepping motor;

[0024] And / or, the lifting assembly is provided in plurality, and the plurality of lifting assemblies are distributed around the magnetic yoke.

[0025] The beneficial effects of the utility model are as follows:

[0026] 1. The two sets of permanent magnets on the yoke of the utility model are respectively located on both sides of the single crystal furnace when in use. The inner concave surfaces of the two sets of permanent magnets match the shape of the single crystal furnace, which can make the magnetic field distribution through the single crystal furnace more uniform. In addition, the height position of the yoke can be conveniently adjusted through the lifting assembly, thereby adjusting the magnetic field strength through the melt space, ensuring that the single crystal grows in a more uniform magnetic field and a more suitable magnetic field strength, and effectively improving the crystal pulling quality.

[0027] 2. The utility model utilizes rollers and drive components to drive the yoke to move in the horizontal direction, and cooperates with the lifting component to conveniently adjust the spatial position of the yoke, ensuring that the two sets of permanent magnets and the single crystal furnace are always in the most appropriate relative position, thereby ensuring the quality of crystal pulling. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of an embodiment of a magnetic crystal pulling permanent magnet device capable of lifting and lowering according to the utility model;

[0029] Figure 2 for Figure 1 A magnified image of area A;

[0030] Figure 3 for Figure 1 Side view of

[0031] Figure 4 for Figure 1 Rear view of

[0032] Figure 5 for Figure 1 Top view of the .

[0033] In the figure: 1-base, 11-roller, 12-drive assembly, 2-yoke, 21-opening, 22-mounting surface, 3-permanent magnet, 31-inner concave surface, 4-lifting assembly, 5-guide assembly, 51-guide sleeve, 52-guide rod. DETAILED DESCRIPTION

[0034] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0035] Please refer to Figure 1-Figure 5 , is an embodiment of a magnetic crystal pulling permanent magnet device capable of lifting and lowering provided by the utility model, comprising:

[0036] A base 1, the base 1 is used to support a yoke 2 and a permanent magnet 3;

[0037] A yoke 2, the yoke 2 is located above the base 1, and the yoke 2 has an opening 21, through which the single crystal furnace can be conveniently placed in the yoke 2 or detached from the yoke 2; the yoke 2 has two oppositely arranged mounting surfaces 22, which are convenient for mounting the permanent magnet 3;

[0038] Two sets of permanent magnets 3 are respectively fixed on two mounting surfaces 22, and there is a gap between the two sets of permanent magnets 3. During production, the single crystal furnace is located at the gap between the two sets of permanent magnets 3; the opposite end faces of the two sets of permanent magnets 3 are both set as inner concave surfaces 31, and the opposite end faces of the two sets of permanent magnets 3 are one S pole and the other N pole, so that approximately parallel magnetic lines of force can be generated at the gap between the two sets of permanent magnets 3; the inner concave surface 31 matches the shape of the cylindrical single crystal furnace, the ends of the two inner concave surfaces 31 correspond to the outer wall of the single crystal furnace, and the distance between the ends of the two inner concave surfaces 31 is smaller than the distance between the middle parts of the two inner concave surfaces 31, so that the magnetic field strength near the outer edge of the single crystal furnace is consistent with the magnetic field strength at the center of the single crystal furnace, effectively improving the uniformity of magnetic field distribution in the single crystal furnace;

[0039] The lifting assembly 4 is connected to the base 1 and the yoke 2 respectively. The lifting assembly 4 can drive the yoke 2 to move in a direction close to or away from the base 1. The lifting assembly 4 can adjust the positions of the two sets of permanent magnets 3 in the vertical direction, thereby conveniently controlling the magnetic field strength passing through the melt space.

[0040] In this embodiment, please refer to Figure 1 and Figure 5 The inner concave surface 31 is preferably in an arc shape, which can be consistent with the shape of the cylindrical single crystal furnace, and can ensure the uniformity of the magnetic field strength in the single crystal furnace; in other embodiments, the inner concave surface 31 is also a curved surface or is formed by connecting multiple planes in sequence, and the inner concave surface 31 can also be a continuous surface or formed by multiple disconnected surfaces, so as to form a uniform magnetic field.

[0041] For clarification, please refer to Figure 1 and Figure 5 The two inner concave surfaces 31 are preferably symmetrically arranged. Specifically, the two inner concave surfaces 31 should be arranged both axially symmetrically and centrally symmetrically to ensure that the generated magnetic field is evenly distributed.

[0042] In this embodiment, please refer to Figure 1 and Figure 5 The yoke 2 is preferably C-shaped, and includes two parallel horizontal arms and a connecting arm connecting the two horizontal arms, which is easy to produce and use.

[0043] It should be noted that the yoke 2 should be made of magnetic conductive material, which can effectively prevent the leakage of magnetic lines of force; at the same time, the permanent magnet 3, except for the inner concave surface 31 and the surface connected to the yoke 2, is coated with non-magnetic conductive material, which can further prevent the leakage of magnetic lines of force.

[0044] In this embodiment, please refer to Figure 1-Figure 4 A plurality of rollers 11 are provided on the base 1, and the rollers 11 are connected to a driving assembly 12 that can drive them to roll. The rollers 11 and the driving assembly 12 can drive the yoke 2 to move in the horizontal direction, and cooperate with the lifting assembly 4 to conveniently adjust the spatial position of the yoke 2, thereby ensuring that the two sets of permanent magnets 3 and the single crystal furnace are always in the most suitable relative position, thereby ensuring the quality of crystal pulling; specifically, the driving assembly 12 is configured as a servo motor, and the output shaft of the servo motor is connected to at least one roller 11 through a transmission belt, gear or chain transmission, thereby driving the roller 11 to roll.

[0045] In this embodiment, please refer to Figure 1-Figure 4 A plurality of guide components 5 are provided between the base 1 and the yoke 2, and the guide components 5 are used to guide the yoke 2 to stably move in the vertical direction relative to the base 1; specifically, the guide components 5 include a guide rod 52 and a guide sleeve 51 sleeved on the guide rod 52, the guide rod 52 is fixed on the base 1, and the guide sleeve 51 is fixed on the yoke 2, and the guide rod 52 and the guide sleeve 51 are clearance-matched, which can play a stable guiding role.

[0046] For clarification, please refer to Figure 1 , Figure 3 and Figure 4 Preferably, a plurality of guide components 5 should be distributed around the magnetic yoke 2 to further improve the guiding effect.

[0047] In this embodiment, please refer to Figure 1-Figure 4 The lifting component 4 is configured as a screw stepper motor, which can stably drive the yoke 2 to move in the vertical direction relative to the base 1; further, the lifting component 4 is preferably configured as multiple, and the multiple lifting components 4 are distributed around the yoke 2, which can stably drive the yoke 2 to rise and fall; in other embodiments, the lifting component 4 can also be configured as a cylinder or an electric push rod, so as to stably drive the yoke 2 to rise and fall.

[0048] It should be noted that each set of permanent magnets 3 is preferably composed of several magnetic groups spliced ​​together, and the several magnetic groups may abut against each other or have gaps therebetween, so as to generate a uniform magnetic field.

[0049] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A permanent magnet device capable of lifting and lowering, characterized in that: include: Base (1); A magnetic yoke (2), the magnetic yoke (2) being located above the base (1), the magnetic yoke (2) having an opening (21), and the magnetic yoke (2) having two mounting surfaces (22) arranged opposite to each other; Two sets of permanent magnets (3), the two sets of permanent magnets (3) are respectively fixed on the two mounting surfaces (22), there is a gap between the two sets of permanent magnets (3), the opposite end surfaces of the two sets of permanent magnets (3) are both set as inner concave surfaces (31), and the polarities of the opposite end surfaces of the two sets of permanent magnets (3) are opposite; A lifting component (4), wherein the lifting component (4) is respectively connected to the base (1) and the magnetic yoke (2), and the lifting component (4) can drive the magnetic yoke (2) to move in a direction approaching or moving away from the base (1).

2. A magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 1, characterized in that: A plurality of rollers (11) are provided on the base (1), and the rollers (11) are connected to a driving assembly (12) capable of driving the rollers (11) to roll.

3. The magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 2, characterized in that: The driving component (12) is configured as a servo motor, and the output shaft of the servo motor is drivingly connected to at least one of the rollers (11).

4. A magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 1 or 2, characterized in that: A plurality of guide components (5) are provided between the base (1) and the magnetic yoke (2).

5. The magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 4, characterized in that: The guide assembly (5) comprises a guide rod (52) and a guide sleeve (51) sleeved on the guide rod (52), the guide rod (52) being fixed on the base (1), and the guide sleeve (51) being fixed on the magnetic yoke (2); And / or, a plurality of the guide components (5) are distributed around the magnetic yoke (2).

6. The magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 1, characterized in that: The magnetic yoke (2) is made of magnetic conductive material; And / or, the yoke (2) is C-shaped.

7. The magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 1, characterized in that: Each set of permanent magnets (3) is composed of a plurality of magnet groups spliced ​​together.

8. A magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 1 or 7, characterized in that: The inner concave surface (31) is in an arc shape; And / or, the two inner concave surfaces (31) are symmetrically arranged.

9. A magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 1 or 7, characterized in that: The permanent magnet (3) is coated with non-magnetic conductive material except for the inner concave surface (31) and the surface connected to the magnetic yoke (2).

10. A magnetic crystal pulling permanent magnet device capable of lifting and lowering according to claim 1 or 2, characterized in that: The lifting component (4) is configured as a screw-type stepping motor; And / or, the lifting assembly (4) is provided in plurality, and the plurality of lifting assemblies (4) are distributed around the magnetic yoke (2).

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