High-precision force control ZR axis module

Abstract

The embodiment of the utility model discloses a high-precision force control ZR-axis module which comprises a Z-axis motor, an R-axis motor, a sliding plate, an air inlet connector, an air pipe, a pressure sensor, a fixed bent pipe, a motor connecting base, a vertical switching pipe, a switching connector and a transverse switching pipe, the R-axis motor is installed on the motor connecting base, and the motor connecting base is connected with the sliding plate through the pressure sensor. The other end of the air pipe is communicated with the upper end of the fixed bent pipe, the lower end of the fixed bent pipe is connected with one end of the switching transverse pipe, the other end of the switching transverse pipe is connected with the adapter, the tail end of a main shaft of the R-axis motor is connected with the switching vertical pipe, an air channel is formed in the motor connecting base, and the switching vertical pipe is communicated with the adapter through the air channel. According to the utility model, the influence of external force on the pressure detected by the pressure sensor is reduced, the movable air pipe is prevented from directly acting on the rotating motor or indirectly acting on the pressure sensor, the error is reduced, and the precision of a pressure closed loop is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of picking up and mounting semiconductor chips, and in particular to a high-precision force-controlled ZR axis module. Background Art

[0002] At present, the product has a pressure closed-loop ZR axis (linear + rotational) structure, in which the movable air pipe of the air pipe routing is directly connected to the rotating motor (also known as the R-axis motor), which affects the force control accuracy of the sensor to a certain extent.

[0003] At present, the pressure closed-loop ZR axis (linear + rotation) sensor is set between the rotating motor and the Z-axis motor guide rail. The external air pipe is directly connected to the rotating motor after entering it, or the force generated by the active air pipe inside is directly transmitted to the end of the rotating motor, and this force is indirectly transmitted to the sensor through the rotating motor. This causes the sensor to be greatly disturbed and affects the sensor accuracy, and ultimately affects the closed-loop force control accuracy of the ZR axis.

[0004] Even if some structures separate the air pipe of the active part from the rotating motor, so that the fixed air pipe is connected to the end of the main shaft of the rotating motor, at the same time, because the air pipe connected to the rotating motor is far away from the sensor, the rotating motor body acts as a lever, resulting in a slight deformation of the sensor during use, and the deflection displacement transmitted to the position of the fixed air pipe at the far end R axis becomes relatively large. Although the fixed air pipe does not bring external force to the rotating motor when it moves, because the rotating motor far away from the sensor produces a relatively large deflection displacement when the sensor is deformed, the air pipe connected at this position will have a reaction force to this displacement, which will also greatly affect the accuracy of the pressure closed loop. Utility Model Content

[0005] The technical problem to be solved by the embodiments of the present utility model is to provide a high-precision force-controlled ZR axis module to improve the force control accuracy of the ZR axis module.

[0006] In order to solve the above technical problems, an embodiment of the utility model proposes a high-precision force-controlled ZR-axis module, including a Z-axis motor, an R-axis motor, a sliding plate, an air intake joint, and an air pipe. The sliding plate is connected to the mover of the Z-axis motor, one end of the air pipe is connected to the air intake joint, and the main shaft of the R-axis motor is hollow. The ZR-axis module also includes a pressure sensor, a fixed elbow, a motor connecting seat, an adapter vertical pipe, an adapter, and an adapter horizontal pipe. The R-axis motor is installed on the motor connecting seat, and the motor connecting seat is connected to the sliding plate through a pressure sensor. The adapter is arranged on the motor connecting seat, the fixed elbow is fixed on the sliding plate, the other end of the air pipe is connected to the upper end of the fixed elbow, the lower end of the fixed elbow is connected to one end of the adapter horizontal pipe, and the other end of the adapter horizontal pipe is connected to the adapter. The main shaft end of the R-axis motor is connected to the adapter vertical pipe, and an airway is provided on the motor connecting seat, and the adapter vertical pipe is connected to the adapter through the airway.

[0007] Furthermore, the pressure sensor includes a strain part and a strain detection part. Both ends of the strain part are respectively connected to the sliding plate and the motor connection seat. The strain detection part detects the pressure on the R-axis motor by detecting the deformation of the strain part.

[0008] Furthermore, there are multiple groups of strain parts, and the multiple groups of strain parts are parallel to each other.

[0009] Furthermore, the transition transverse tube is parallel to the strain portion.

[0010] Furthermore, a hollow hole is provided on the strain portion to facilitate deformation of the strain portion under stress.

[0011] Furthermore, the hollow hole is in an 8-shape.

[0012] Furthermore, the transition transverse pipe is a hose.

[0013] Furthermore, a trachea bracket connecting the other end of the trachea and the upper end of the fixed elbow is provided on the sliding plate, an air path is provided in the trachea bracket, and the fixed elbow is connected to the trachea through the air path in the trachea bracket.

[0014] Furthermore, the air tube is spring-shaped.

[0015] Furthermore, the ZR axis module also includes a Z axis motion guide rail, and the sliding plate is arranged on the Z axis motion guide rail.

[0016] The beneficial effects of the utility model are as follows: the utility model detects the pressure exerted on the R-axis motor in real time through the pressure sensor, fixes the bent pipe adapter, and sets the adapter cross pipe at a position close to the sensor deformation, thereby reducing the influence of external forces on the pressure detected by the pressure sensor, avoiding the active air pipe directly acting on the rotating motor or indirectly acting on the pressure sensor, reducing errors, and improving the accuracy of the pressure closed loop. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front view of the high-precision force-controlled ZR axis module of an embodiment of the utility model.

[0018] Figure 2 It is a partial cross-sectional view of the motor connecting seat of the R-axis motor of an embodiment of the utility model.

[0019] Figure 3 It is a stereoscopic diagram of a high-precision force-controlled ZR axis module according to an embodiment of the utility model.

[0020] Figure 4 It is a structural diagram of a pressure sensor according to an embodiment of the utility model.

[0021] Description of Figure Numbers

[0022] Z-axis motor 10, air inlet connector 11, air pipe 12, fixed elbow 13, adapter horizontal pipe 14, sliding plate 15, air pipe bracket 16, Z-axis motion guide rail 17, R-axis motor 20, motor connecting seat 21, adapter 22, adapter vertical pipe 23, airway 24, main shaft 25, pressure sensor 30, strain part 31, hollow hole 32. DETAILED DESCRIPTION

[0023] It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present utility model is further described in detail below in conjunction with the drawings and specific embodiments.

[0024] In the embodiments of the present invention, if there are directional indications (such as up, down, left, right, front, back, etc.), they are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0025] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0026] Please refer to Figure 1 to Figure 4 The high-precision force-controlled ZR-axis module of the embodiment of the utility model includes a Z-axis motor, an R-axis motor, a sliding plate, an air inlet joint, an air pipe, a pressure sensor, a fixed elbow, a motor connecting seat, an adapter vertical pipe, an adapter, and an adapter horizontal pipe.

[0027] The sliding plate is connected to the mover of the Z-axis motor, one end of the air pipe is connected to the air inlet joint, and the main shaft of the R-axis motor is hollow (the suction nozzle for grabbing materials is installed at the front end of the main shaft). The external air source is connected to the air pipe through the air inlet joint. The entire air path of the high-precision force-controlled ZR-axis module of the utility model is from the main shaft of the R-axis motor, to the adapter vertical pipe, to the airway, and then to the adapter horizontal pipe, fixed elbow, and air pipe. The air pipe is spring-shaped. The force of the air pipe when it moves up and down is transmitted to the fixed elbow (sliding plate) to avoid direct action on the R-axis motor and affect the detection of the pressure sensor.

[0028] The R-axis motor is installed on the motor connection seat, and the front end of the R-axis motor body is fixedly connected to the motor connection seat. The motor connection seat is connected to the sliding plate through a pressure sensor. The high-precision force-controlled ZR-axis module controls the Z-axis motor according to the pressure value detected by the pressure sensor. The utility model does not directly place the pressure sensor at the end of the R-axis motor body, mainly due to the production process and how to route the sensor cable. If the sensor is placed at the end of the main shaft of the R-axis motor, how the cable transmits power and signals to the outside through the rotating main shaft is a difficult point.

[0029] The pressure sensor is located between the motor connection seat and the sliding plate. The load of the pressure sensor is only the weight of the R-axis motor body + the weight of the motor connection seat + the pressure of the product being picked up. The pressure sensor is close to the front end of the R-axis motor, which makes the force control feedback more accurate and the response speed faster; it also prevents the pressure sensor from generating huge inertia due to excessive and heavy loads on the pressure sensor during high-speed movement, which affects the performance of the sensor.

[0030] After the pressure sensor is calibrated, the pressure sensor cannot be disturbed by other external force changes. If the pressure sensor is affected by changes in the pulling force of the air pipe or cable during use (except for changes caused by the actual picking and placing of materials), it will affect the accuracy of the pressure sensor. Therefore, in order to avoid the air pipe directly pulling the R-axis motor when the Z-axis motor moves up and down, the utility model transmits the pulling force of the air pipe to the sliding plate.

[0031] An airway is provided on the motor connection seat, and an adapter is provided at one end of the airway. The spindle end of the R-axis motor is connected to the adapter vertical pipe, and the other end of the airway is connected to the adapter vertical pipe. In specific implementation, the airway can also be directly an air pipe. The utility model provides an airway on the motor connection seat (inside the motor connection seat) so that the size of the high-precision force-controlled ZR-axis module product can be made thinner and smaller.

[0032] The fixed elbow is fixed on the sliding plate, the other end of the air pipe is connected to the upper end of the fixed elbow, the lower end of the fixed elbow is connected to one end of the adapter transverse pipe, and the other end of the adapter transverse pipe is connected to the adapter. The two-section design of the fixed elbow and the adapter transverse pipe prevents the fixed elbow from shaking due to inertia during movement, thereby affecting the R-axis motor and further affecting the pressure sensor.

[0033] As an implementation method, the pressure sensor includes a strain part and a strain detection part, wherein two ends of the strain part are respectively connected to the sliding plate and the motor connection seat, and the strain detection part detects the pressure on the R-axis motor by detecting the deformation of the strain part. In specific implementation, a pressure signal amplifier can be used to amplify the signal of the pressure sensor, and the output of the Z-axis motor can be adjusted in real time according to the pressure value.

[0034] As an implementation manner, there are multiple groups of strain portions, and the multiple groups of strain portions are parallel to each other.

[0035] As an implementation mode, the adapter transverse tube is parallel to the strain portion. When the strain portion is deformed, the parallel adapter transverse tube exerts the smallest force on the pressure sensor.

[0036] As an implementation mode, a hollow hole is provided on the strain part to facilitate the deformation of the strain part under stress. The hollow hole is preferably in a horizontal 8 shape.

[0037] As an implementation method, the transition transverse pipe is a hose, and when the strain portion is deformed, the hose exerts the least force on the motor connection seat. In specific implementation, the fixed elbow can also be a hose, and the two ends can be fixed. The transition transverse pipe and the fixed elbow can be an integrally formed hose.

[0038] As an implementation method, a trachea bracket is provided on the sliding plate to connect the other end of the trachea and the upper end of the fixed elbow, and an air path is provided in the trachea bracket, and the fixed elbow is connected to the trachea through the air path in the trachea bracket. The switching of the trachea bracket transmits the force of the trachea moving up and down to the sliding plate, avoiding the force on the pressure sensor.

[0039] As an implementation manner, the ZR axis module further includes a Z axis motion guide rail, and the sliding plate is arranged on the Z axis motion guide rail to improve the stability of the sliding plate during movement.

[0040] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-precision force-controlled ZR axis module, comprising a Z-axis motor, an R-axis motor, a sliding plate, an air inlet joint, and an air pipe, wherein the sliding plate is connected to the mover of the Z-axis motor, one end of the air pipe is connected to the air inlet joint, and the main shaft of the R-axis motor is hollow, characterized in that: The ZR axis module also includes a pressure sensor, a fixed bent pipe, a motor connecting seat, an adapter vertical pipe, an adapter, and an adapter horizontal pipe. The R axis motor is installed on the motor connecting seat, the motor connecting seat is connected to the sliding plate through the pressure sensor, the adapter is arranged on the motor connecting seat, the fixed bent pipe is fixed on the sliding plate, the other end of the air pipe is connected to the upper end of the fixed bent pipe, the lower end of the fixed bent pipe is connected to one end of the adapter horizontal pipe, the other end of the adapter horizontal pipe is connected to the adapter, the main shaft end of the R axis motor is connected to the adapter vertical pipe, an airway is provided on the motor connecting seat, and the adapter vertical pipe is connected to the adapter through the airway.

2. The high-precision force-controlled ZR axis module according to claim 1, characterized in that: The pressure sensor includes a strain part and a strain detection part. The two ends of the strain part are respectively connected to the sliding plate and the motor connection seat. The strain detection part detects the pressure on the R-axis motor by detecting the deformation of the strain part.

3. The high-precision force-controlled ZR axis module according to claim 2, characterized in that: There are multiple groups of strain parts, and the multiple groups of strain parts are parallel to each other.

4. The high-precision force-controlled ZR axis module according to claim 2, characterized in that: The transition cross tube is parallel to the strain portion.

5. The high-precision force-controlled ZR axis module according to claim 2, characterized in that: The strain part is provided with a hollow hole for facilitating the strain part to be deformed under stress.

6. The high-precision force-controlled ZR axis module according to claim 5, characterized in that: The hollow hole is in an 8-shape.

7. The high-precision force-controlled ZR axis module according to claim 1, characterized in that: The transition transverse pipe is a hose.

8. The high-precision force-controlled ZR axis module according to claim 1, characterized in that: A trachea bracket connecting the other end of the trachea and the upper end of the fixed elbow is arranged on the sliding plate, an air path is arranged in the trachea bracket, and the fixed elbow is connected with the trachea through the air path in the trachea bracket.

9. The high-precision force-controlled ZR axis module according to claim 1, characterized in that: The trachea is spring-shaped.

10. The high-precision force-controlled ZR axis module according to claim 1, characterized in that: The ZR axis module also includes a Z axis motion guide rail, and the sliding plate is arranged on the Z axis motion guide rail.

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