Dynamic beam expanding system and three-dimensional scanning device

Abstract

The utility model discloses a dynamic beam expanding system and a three-dimensional scanning device. The dynamic beam expanding system comprises a concave lens, a convex lens, a right trapezoid mirror, a first reflecting mirror and a second reflecting mirror, the first reflecting mirror is used for receiving the laser beam reflected by the first reflecting surface and reflecting the laser beam towards the second reflecting mirror, the second reflecting mirror reflects the received laser beam to the second reflecting surface, and the second reflecting surface can reflect the laser beam towards the convex lens; when the first reflecting mirror is close to or far away from the first reflecting surface, the second reflecting mirror is synchronously close to or far away from the second reflecting surface, so that a laser beam which enters through the concave lens and exits through the convex lens is in a micro-diffusion state, a collimation state or a micro-gathering state; the three-dimensional dynamic focusing scanning module can solve the problems that the utilization rate of laser beams is low and certain limitation exists due to the fact that the three-dimensional dynamic focusing scanning module is difficult to meet the beam expanding requirement of the laser beams.

Description

Technical Field

[0001] The utility model relates to the technical field of laser processing, in particular to a dynamic beam expansion system and a three-dimensional scanning device. Background Art

[0002] With the development of science and technology and social progress, the application fields of scanning galvanometers have expanded extremely widely. At present, 2D scanning galvanometers are the most popular in the market, mainly used in two-dimensional processing fields such as plane marking and laser cutting. In addition to realizing the basic functions of 2D scanning galvanometers, 3D scanning galvanometers can also be used in curved surface laser processing, rapid prototyping (additive manufacturing), 3D projection and other fields. Therefore, the two-dimensional plane processing method of 2D scanning galvanometers can be effectively upgraded to three-dimensional processing, which can increase the 3D scanning function of 2D scanning galvanometers and improve the utilization rate of galvanometer products.

[0003] However, the traditional 3D dynamic focusing scanning module only changes the position of the concave lens relative to the convex lens to achieve the change of the laser beam focus, which is difficult to achieve the beam expansion requirements of the laser beam, resulting in low utilization of the laser beam and certain limitations. Utility Model Content

[0004] The utility model aims to solve the above technical problem, that is, the traditional three-dimensional dynamic focusing scanning module is difficult to achieve the beam expansion requirement of the laser beam, resulting in a low utilization rate of the laser beam and certain limitations.

[0005] In a first aspect, the utility model provides a dynamic beam expansion system, comprising:

[0006] A concave lens and a convex lens, wherein the concave lens and the convex lens are optically coaxial;

[0007] A right-angle trapezoidal mirror, the right-angle trapezoidal mirror having a first reflecting surface and a second reflecting surface opposite to each other, the right-angle trapezoidal mirror being located between the concave lens and the convex lens so that the first reflecting surface is opposite to the concave lens and the second reflecting surface is opposite to the convex lens;

[0008] a first reflecting mirror and a second reflecting mirror, wherein the first reflecting mirror is used to receive the laser beam incident through the concave lens and reflected by the first reflecting surface, and can reflect the received laser beam toward the second reflecting mirror, the second reflecting mirror can reflect the received laser beam to the second reflecting surface, and the second reflecting surface can reflect the laser beam toward the convex lens;

[0009] Wherein, the first reflector and the second reflector are configured for synchronous transmission so that: when the first reflector approaches or moves away from the first reflective surface, the second reflector approaches or moves away from the second reflective surface synchronously, thereby achieving a micro-diffusion state, a collimated state or a micro-focused state for the laser beam incident through the concave lens and emitted through the convex lens.

[0010] By controlling the first reflector and the second reflector to synchronously approach or move away from the right-angle trapezoidal mirror, the distance moved by the first reflector and the second reflector is s. Based on the parallel optical path design between the right-angle trapezoidal mirror, the first reflector and the second reflector, the change in the flight optical path γ of the laser beam is 2s, so that the optical change control efficiency of the present application is twice that of an ordinary dynamic beam expansion system. At the same time, the dynamic beam expansion system of the present application can have a response efficiency twice that of an ordinary dynamic beam expansion system, so that the present application can meet application scenarios with large-area uniform illumination, such as laser processing, projection display and other fields, thereby improving the scope of application of the present application.

[0011] In a preferred technical solution of the above-mentioned dynamic beam expansion system, the first reflector and the second reflector are driven by a driving component to synchronously approach or move away from the right-angle trapezoidal mirror.

[0012] In a preferred technical solution of the above-mentioned dynamic beam expansion system, the driving component at least includes a driving device and a lens holder driven by the driving device, wherein the first reflector and the second reflector are arranged on the lens holder.

[0013] In a preferred technical solution of the above-mentioned dynamic beam expansion system, the first reflector and the second reflector are configured to be perpendicular to each other.

[0014] In the preferred technical solution of the above-mentioned dynamic beam expansion system, it also includes an outer shell, in which a first accommodating layer and a second accommodating layer that are separated from each other are formed, and the outer shell has a light entrance hole and a light exit hole connected to the first accommodating layer; wherein the right-angle trapezoidal mirror, the first reflector and the second reflector are arranged in the first accommodating layer, the concave lens is arranged at the light entrance hole, and the convex lens is arranged at the light exit hole.

[0015] In the preferred technical solution of the above-mentioned dynamic beam expansion system, a cooling water path structure is formed on the outer shell, which surrounds the light entrance hole, the right-angle trapezoidal mirror and the light exit hole in sequence, and cooling water is passed into the cooling water path structure to achieve heat dissipation for the optical elements in the first housing layer.

[0016] In the preferred technical solution of the above-mentioned dynamic beam expansion system, the cooling water channel structure includes at least a first cooling water channel opened on the outer shell at the side of the light entrance hole, a second cooling water channel opened on the outer shell at the side of the right-angle trapezoidal mirror, and a third cooling water channel opened on the outer shell at the side of the light exit hole; wherein the first cooling water channel, the second cooling water channel and the third cooling water channel are interconnected.

[0017] In the preferred technical solution of the above-mentioned dynamic beam expansion system, the shapes of the first cooling water channel, the second cooling water channel and the third cooling water channel can be at least one of linear, serpentine and arc-shaped.

[0018] In the preferred technical solution of the above-mentioned dynamic beam expansion system, the first reflector and the second reflector are one of a plane mirror and a curved mirror.

[0019] In the second aspect, the utility model also provides a three-dimensional scanning device, which includes the above-mentioned dynamic beam expansion system, and also includes a two-dimensional scanning module arranged on one side of the convex lens, and the two-dimensional scanning module is used to horizontally receive the laser beam emitted through the convex lens, and can refract the received laser beam downward in the vertical direction, so that: the refracted laser beam can be focused and then emitted vertically through the bottom of the two-dimensional scanning module.

[0020] The beneficial effect of the utility model is that the first reflector and the second reflector are controlled by a driving device to synchronously approach or move away from the right-angle trapezoidal mirror, so that the laser beam emitted through the convex lens is in a slightly diffused state, a collimated state or a slightly focused state. At the same time, by changing the flight optical path of the laser beam, the optical change control efficiency of the present application is twice that of an ordinary dynamic beam expansion system, so that the dynamic beam expansion system of the present application has a response efficiency that is twice that of an ordinary dynamic beam expansion system, so that the present application can meet application scenarios of large-area uniform illumination, such as laser processing, projection display and other fields, thereby improving the scope of application of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional scanning device of the utility model;

[0022] Figure 2 Schematic diagram of the dynamic beam expansion system Figure 1 ;

[0023] Figure 3 Schematic diagram of the dynamic beam expansion system Figure 2 ;

[0024] Figure 4 is a cross-sectional view of the outer shell;

[0025] Figure 5 Schematic diagram of the second housing layer of the outer shell Figure 1 ;

[0026] Figure 6 Schematic diagram of the second housing layer of the outer shell Figure 2 ;

[0027] Figure 7 A schematic diagram of the arrangement of components in the first accommodating layer of the outer shell;

[0028] Figure 8 A bottom view of the driving assembly driving the first reflector and the second reflector;

[0029] Fig. 9 It is a three-dimensional schematic diagram of the driving component driving the first reflector and the second reflector;

[0030] Fig.10 A diagram showing the connection between the drive device and the lens support;

[0031] Fig.11 It is a connection diagram between the moving subassembly and the lens bracket;

[0032] Fig.12 is a schematic diagram of a two-dimensional scanning module;

[0033] Fig.13 It is a schematic diagram of the internal structure of the two-dimensional scanning module;

[0034] Fig.14 A schematic diagram of a laser beam passing through a dynamic beam expansion system and a two-dimensional scanning module;

[0035] Fig.15 Schematic diagram of adjusting the focal length of a concave lens and a convex lens;

[0036] In the figure: concave lens 1, convex lens 2, right-angle trapezoidal mirror 3, first reflector 4, second reflector 5, laser beam 6, drive assembly 7, drive device 71, base 711, magnetic steel stator assembly 712, mover assembly 713, outer frame 714, coil 715, ceramic core 716, lens bracket 72, cross roller guide 73, support 74, reading head 75, grating ruler 76, outer shell 8, first accommodating layer 81, second accommodating layer 82, light entrance hole 83, light exit hole 84, first side wall 85, second side wall 86, third side wall 87, fourth side wall 88, first cooling water path 11, second cooling water path 12, third cooling water path 13;

[0037] Driver module 91, 3D integrated DA board 92, DB9 power supply interface 93, DB15 XY2-100 communication interface 94, DB25 extension cable adapter 95;

[0038] The cover body 14 , the incident hole 141 , the exit hole 142 , the X-axis galvanometer 15 , the X-axis galvanometer motor 16 , the Y-axis galvanometer motor 17 , and the field lens 18 . DETAILED DESCRIPTION

[0039] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0040] It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "rear" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0041] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] like Figures 1 to 11 , Fig.15 As shown, the dynamic beam expansion system of the utility model includes: a concave lens 1, a convex lens 2, a right-angle trapezoidal mirror 3, a first reflector 4 and a second reflector 5; the concave lens 1 and the convex lens 2 are optically coaxial; the right-angle trapezoidal mirror 3 has a first reflective surface and a second reflective surface relative to each other, and the right-angle trapezoidal mirror 3 is located between the concave lens 1 and the convex lens 2, so that the first reflective surface is opposite to the concave lens 1, and the second reflective surface is opposite to the convex lens 2; the first reflector 4 is used to receive the laser beam 6 incident through the concave lens 1 and reflected by the first reflective surface, and can reflect the received laser beam 6 toward the second reflector 5, the second reflector 5 can reflect the received laser beam 6 to the second reflective surface, and the second reflective surface can reflect the laser beam 6 toward the convex lens 2; wherein the first reflector 4 and the second reflector 5 are configured to be synchronously driven, so that: when the first reflector 4 approaches or moves away from the first reflective surface, the second reflector 5 synchronously approaches or moves away from the second reflective surface, thereby realizing that the laser beam 6 incident through the concave lens 1 and emitted from the convex lens 2 is in a micro-diffusion state, a collimation state or a micro-focusing state.

[0043] See also Figure 8, the right-angle trapezoidal mirror 3 is configured into an isosceles trapezoidal structure, and the first reflector 4 and the second reflector 5 are perpendicular to each other; the concave lens 1, the convex lens 2, the right-angle trapezoidal mirror 3, the first reflector 4 and the second reflector 5 are relatively in the same plane; the laser beam 6 incident on the first reflection surface of the right-angle trapezoidal mirror 3 through the concave lens 1 is reflected by the first reflection surface at 90° to the first reflector 4, the first reflector 4 can reflect the received laser beam 6 at 90° to the second reflector 5, the second reflector 5 can reflect the received laser beam 6 at 90° to the second reflection surface of the right-angle trapezoidal mirror 3, and the laser beam 6 is emitted through the convex lens 2 after being reflected at 90° by the second reflection surface; it should be noted that the laser beam 6 is a parallel optical path between the convex lens 2, the right-angle trapezoidal mirror 3, the first reflector 4, the second reflector 5 and the convex lens 2.

[0044] See also Figures 7 to 9 , Fig.15 , the focal length of concave lens 1 is α, the focal length of convex lens 2 is β, the flying optical path of laser beam 6 from concave lens 1 to convex lens 2 is γ, and the positions of the first reflector 4 and the second reflector 5 are controlled to remain centered, and the flying optical path of laser beam 6 (the distance between concave lens 1 and convex lens 2) γ=β-α, at this time, the Z-axis is optically zero, and the laser beam 6 emitted through the convex lens 2 is in a collimated beam state.

[0045] See also Figures 7 to 9 , Fig.15 Taking the flight optical path γ=β-α of the laser beam 6 as a reference, by controlling the positions of the first reflector 4 and the second reflector 5 to be relatively away from the right-angle trapezoidal mirror 3, the flight optical path γ of the laser beam 6 (the distance between the concave lens 1 and the convex lens 2) increases. At this time, γ>β-α, the Z axis is positively offset, and the laser beam 6 emitted through the convex lens 2 is in a slightly focused state.

[0046] See also Figures 7 to 9 , Fig.15 , taking the flight optical path γ=β-α of the laser beam 6 as a reference, by controlling the positions of the first reflector 4 and the second reflector 5 to be relatively close to the right-angle trapezoidal mirror 3, the flight optical path γ of the laser beam 6 (the distance between the concave lens 1 and the convex lens 2) is reduced. At this time, γ<β-α, the Z axis is reversely offset, and the laser beam 6 emitted through the convex lens 2 is in a micro-diffusion state.

[0047] It should be noted that when the first reflector 4 and the second reflector 5 synchronously approach or move away from the right-angle trapezoidal mirror 3, the distance moved by the first reflector 4 and the second reflector 5 is s. Based on the parallel optical path design between the right-angle trapezoidal mirror 3, the first reflector 4 and the second reflector 5, the change in the flight optical path γ of the laser beam 6 is 2s, so that the optical change control efficiency of the present application is twice that of an ordinary dynamic beam expansion system. At the same time, the dynamic beam expansion system of the present application can have a response efficiency twice that of an ordinary dynamic beam expansion system, so that the present application can meet application scenarios with large-area uniform illumination, such as laser processing, projection display and other fields, thereby improving the scope of application of the present application.

[0048] In one or more embodiments, the first reflector 4 and the second reflector 5 are driven by a driving assembly 7 to synchronously approach or move away from the right-angle trapezoidal mirror 3; the driving assembly 7 at least includes a driving device 71 and a lens bracket 72 driven by the driving device 71, wherein the first reflector 4 and the second reflector 5 are configured on the lens bracket 72.

[0049] See also Figures 7 to 11 It should be noted that the driving device 71 can be a linear motor or a voice coil motor. The lens bracket 72 is fixed to the driving shaft end of the driving device 71, so that the driving device 71 drives the lens bracket 72 to approach or move away from the right-angle trapezoidal mirror 3 in the horizontal direction. The lens bracket 72 is formed with a first supporting portion and a second supporting portion that are vertically arranged. The first supporting portion is used to install the first reflector 4, and the second supporting portion is used to install the second reflector 5. The lens bracket 72 is made of a lightweight and high-strength material. At the same time, a hollow structure is formed on the lens bracket 72 to further reduce the load on the driving device 71, reduce the inertia, and improve the efficiency and stability of the motion control of the first reflector 4 and the second reflector 5.

[0050] The present application utilizes the high-speed and high-precision movement performance of a linear motor or a voice coil motor to achieve the accuracy and high-speed movement of the first reflector 4 and the second reflector 5, and the accuracy and efficiency of the change of the optical path of the laser beam 6 in the parallel optical path, and then achieves precise control of the continuous magnification and beam expansion of the laser beam 6, thereby improving the scope of application and use effect of the present application.

[0051] In one or more embodiments, it also includes an outer shell 8, in which a first accommodating layer 81 and a second accommodating layer 82 that are sealed from each other are formed, and the outer shell 8 has a light entrance hole 83 and a light exit hole 84 that are connected to the first accommodating layer 81; wherein the right-angle trapezoidal mirror 3, the first reflector 4 and the second reflector 5 are arranged in the first accommodating layer 81, the concave lens 1 is arranged in the light entrance hole 83, and the convex lens 2 is arranged in the light exit hole 84.

[0052] See also Figure 2 , Figure 3 , Figure 4The first accommodating layer 81 in the outer shell 8 is relatively located below the second accommodating layer 82, the first accommodating layer 81 and the second accommodating layer 82 are not connected to each other, and a light entrance hole 83 and a light exit hole 84 are provided on the outer shell 8 along the axial direction through the first accommodating layer 81; wherein, the concave lens 1 is arranged at the light entrance hole 83 through the first pressing ring, and the convex lens 2 is arranged at the light exit hole 84 through the second pressing ring, in addition, the right-angle trapezoidal mirror 3, the first reflector 4 and the second reflector 5 and the driving assembly 7 are arranged in the first accommodating layer 81; through this arrangement, the first accommodating layer 81 can present a sealed optical cavity, which can improve the dustproof effect of the present application, and at the same time, it can isolate the interference of external temperature and humidity, and ensure the stability of the working environment of the optical element in the first accommodating layer 81.

[0053] See also Figure 5 The second accommodating layer 82 of the outer shell 8 is equipped with a driving module 91 for driving the driving device 71, a 3D integrated DA board 92, a DB9 power supply interface 93, a DB15 XY2-100 communication interface 94 and a DB25 extension cable adapter 95; wherein the external power supply system is connected to the 3D integrated DA board 92 via the DB9 power supply interface 93, and after processing, one way is output to the driving module 91, and the other way is connected to the DB25 extension cable adapter 95 and output to the two-dimensional scanning module; the upper computer communication signal is connected to the 3D integrated DA board 92 via the DB15 XY2-100 communication interface 94, and after processing, one way is output to the driving module 91, and the other way is connected to the DB25 extension cable adapter 95 and output to the two-dimensional scanning module.

[0054] When the driving device 71 is a linear motor, the linear motor includes a base 711, a magnetic stator assembly 712 and a mover assembly 713, wherein the magnetic stator assembly 712 is composed of a number of evenly arranged magnetic steels, and the mover assembly 713 is composed of an outer frame 714, a coil 715, and a hollow ceramic core 716, wherein the hollow ceramic core 716 is made of high-quality, lightweight and efficient heat dissipation material, which is used to maintain the stability of the coil 715 and assist the coil 715 in heat dissipation.

[0055] See also Figures 6 to 11The movable component 713 is arranged between the magnetic steel stator component 712, the driving module 91 is electrically connected to the coil 715 through a cable, the lens bracket 72 is arranged on the outer frame 714 of the movable component 713, the outer frame 714 is connected to the base 711 through the cross roller guide 73, and the base 711 is fixed in the first accommodating layer 81 of the outer shell 8; the base 711 is also provided with a support 74, and the support 74 is provided with a reading head 75, and the reading head 75 is electrically connected to the driving module 91 through a cable, and the lens bracket 72 is provided with a grating ruler 76, and the position of the reading head 75 corresponds to the grating ruler 76, so that when the lens bracket 72 drives the grating ruler 76 to approach or move away from the right-angle trapezoidal mirror 3, the reading head 75 will read the value on the grating ruler 76, thereby determining the position of the movable component 713.

[0056] During operation, the driving module 91 sends an electrical signal to the coil 715 through a cable to control the moving subassembly 713 to move relative to the magnetic steel stator assembly 712 to approach or move away from the right-angle trapezoidal mirror 3, thereby making the lens bracket 72 and the first reflector 4 and the second reflector 5 arranged on the moving subassembly 713 approach or move away from the right-angle trapezoidal mirror 3 with the moving subassembly 713. When the moving subassembly 713 moves, the reading head 75 reads the value on the grating scale 76 to determine the position of the moving subassembly 713, thereby realizing the control of the position of the first reflector 4 and the second reflector 5 relative to the right-angle trapezoidal mirror 3. In this way, the position of the first reflector 4 and the second reflector 5 relative to the right-angle trapezoidal mirror 3 can be more precise, and the position of the first reflector 4 and the second reflector 5 can be quickly replaced, thereby realizing precise control of efficient continuous zoom beam expansion, and having practicality.

[0057] In one or more embodiments, a cooling water channel structure is formed on the outer shell 8, which surrounds the light entrance hole 83, the right-angle trapezoidal mirror 3 and the light exit hole 84 in sequence, and cooling water is passed into the cooling water channel structure to achieve heat dissipation of the optical elements in the first accommodating layer 81; the cooling water channel structure at least includes a first cooling water channel 11 opened on the outer shell 8 on the side of the light entrance hole 83, a second cooling water channel 12 opened on the outer shell 8 on the side of the right-angle trapezoidal mirror 3, and a third cooling water channel 13 opened on the outer shell 8 on the side of the light exit hole 84; wherein the first cooling water channel 11, the second cooling water channel 12 and the third cooling water channel 13 are interconnected.

[0058] See also Figure 2 , Figure 3 , Figure 4The outer shell 8 has four sides, namely a first side wall 85, a second side wall 86, a third side wall 87 and a fourth side wall 88 which are connected in sequence; wherein, the light entrance hole 83 is located on the first side wall 85, the right-angle trapezoidal mirror 3 is relatively located on the second side wall 86, and the light exit hole 84 is located on the third side wall 87; the first cooling water channel 11 is opened at a position of the outer shell 8 corresponding to the first side wall 85, the second cooling water channel 12 is opened at a position of the outer shell 8 corresponding to the second side wall 86, and the third cooling water channel 13 is opened at a position of the outer shell 8 corresponding to the third side wall 87. The first cooling water channel 11, the second cooling water channel 12 and the third cooling water channel 13 are interconnected, and the water inlet of the first cooling water channel 11 and the water outlet of the third cooling water channel 13 are arranged on the fourth side wall 88.

[0059] When the optical elements in the first accommodating layer 81 are working, water flows into the first cooling water channel 11 through the water inlet of the first cooling water channel 11, and the cooling water passes through the first cooling water channel 11, the second cooling water channel 12 and the third cooling water channel 13, and is discharged through the water outlet of the third cooling water channel 13. Since the first cooling water channel 11, the second cooling water channel 12 and the third cooling water channel 13 can surround the first accommodating layer 81 on three sides, the heat dissipation effect of the optical elements in the first accommodating layer 81 is improved, thereby ensuring the working stability of the optical elements.

[0060] In one or more embodiments, the shapes of the first cooling water channel 11, the second cooling water channel 12, and the third cooling water channel 13 can be at least one of a straight line, a serpentine, and an arc. In this way, the surrounding range of the cooling water on the optical elements in the first accommodating layer 81 can be increased, and the cooling effect of the cooling water on the optical elements can be improved. In other possible embodiments, the shapes of the first cooling water channel 11, the second cooling water channel 12, and the third cooling water channel 13 can also be Tesla valve-like structures. Through this arrangement, the area of ​​the cooling water flowing through the first side wall 85, the second side wall 86, and the third side wall 87 can be increased, and at the same time, the flow rate of the cooling water will not be affected, thereby ensuring the working environment of the optical elements in the first accommodating layer 81 of the present application.

[0061] In one or more embodiments, the first reflector 4 and the second reflector 5 are either a plane mirror or a curved mirror. The first reflector 4 and the second reflector 5 are based on a plane mirror. After the plane mirror is replaced with a curved mirror, a refraction effect equivalent to that of a lens can be provided, and the concave lens 1 and the convex lens 2 can be combined to achieve a continuous zoom beam expansion effect.

[0062] In addition, see Figure 12 to Figure 14The utility model also provides a three-dimensional scanning device, which has the dynamic beam expansion system in any of the above-mentioned embodiments, and also includes a two-dimensional scanning module arranged on one side of the convex lens 2, the two-dimensional scanning module is used to horizontally receive the laser beam 6 emitted through the convex lens 2, and can refract the received laser beam 6 downward in the vertical direction, so that: the refracted laser beam 6 can be focused and then vertically emitted from below the two-dimensional scanning module.

[0063] See also Fig.12 , Fig.13 The two-dimensional scanning module at least includes a cover body 14 having an incident hole 141 and an exit hole 142. The side of the cover body 14 having the incident hole 141 is arranged on the side of the outer shell 8 having the light exit hole 84. An X-axis galvanometer 15 and a Y-axis galvanometer are arranged in the cover body 14, wherein the X-axis galvanometer 15 is driven by an X-axis galvanometer motor 16, and the Y-axis galvanometer is driven by a Y-axis galvanometer motor 17. A field lens 18 is arranged on the exit hole 142 of the cover body 14 through a third pressure ring, and the field lens 18 is used to focus the laser beam 6 refracted by the X-axis galvanometer 15 and the Y-axis galvanometer.

[0064] When the laser beam 6 in a slightly diffused state, collimated state or slightly focused state is horizontally incident on the incident hole 141 of the cover body 14 through the convex lens 2, the laser beam 6 is refracted by the X-axis galvanometer 15 and the Y-axis galvanometer, and is vertically emitted downward toward the exit hole 142, and the laser beam 6 is focused into a focused laser beam through the field lens 18 at the exit hole 142. Finally, the focused laser beam can be emitted from the cover body 14 to reach the focal plane in a slightly diffused state, collimated state or slightly focused state. It should be noted that the focus of the focused laser beam in a slightly diffused state is relatively located below the focal plane (negative defocus state), the focus of the focused laser beam in a collimated state coincides with the focal plane (zero focus state), and the focus of the focused laser beam in a focused state is relatively located above the focal plane (positive defocus state).

[0065] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A dynamic beam expansion system, characterized in that: include: A concave lens and a convex lens, wherein the concave lens and the convex lens are optically coaxial; A right-angle trapezoidal mirror, the right-angle trapezoidal mirror having a first reflecting surface and a second reflecting surface opposite to each other, the right-angle trapezoidal mirror being located between the concave lens and the convex lens so that the first reflecting surface is opposite to the concave lens and the second reflecting surface is opposite to the convex lens; a first reflecting mirror and a second reflecting mirror, wherein the first reflecting mirror is used to receive the laser beam incident through the concave lens and reflected by the first reflecting surface, and can reflect the received laser beam toward the second reflecting mirror, the second reflecting mirror can reflect the received laser beam to the second reflecting surface, and the second reflecting surface can reflect the laser beam toward the convex lens; Wherein, the first reflector and the second reflector are configured for synchronous transmission so that: when the first reflector approaches or moves away from the first reflective surface, the second reflector approaches or moves away from the second reflective surface synchronously, thereby achieving a micro-diffusion state, a collimated state or a micro-focused state for the laser beam incident through the concave lens and emitted through the convex lens.

2. The dynamic beam expansion system according to claim 1, characterized in that: The first reflector and the second reflector are driven by a driving assembly to synchronously approach or move away from the right-angle trapezoidal mirror.

3. The dynamic beam expansion system according to claim 2, characterized in that: The driving assembly at least includes a driving device and a lens bracket driven by the driving device, wherein the first reflector and the second reflector are arranged on the lens bracket.

4. The dynamic beam expansion system according to claim 1, characterized in that: The first reflector and the second reflector are arranged to be perpendicular to each other.

5. The dynamic beam expansion system according to any one of claims 1 to 4, characterized in that: It also includes an outer shell, in which a first accommodating layer and a second accommodating layer that are separated from each other are formed, and the outer shell has a light entrance hole and a light exit hole connected to the first accommodating layer; wherein the right-angle trapezoidal mirror, the first reflector and the second reflector are arranged in the first accommodating layer, the concave lens is arranged at the light entrance hole, and the convex lens is arranged at the light exit hole.

6. The dynamic beam expansion system according to claim 5, characterized in that: A cooling water channel structure is formed on the outer shell and surrounds the light entrance hole, the right-angle trapezoidal mirror and the light exit hole in sequence. Cooling water is passed through the cooling water channel structure to achieve heat dissipation for the optical element in the first accommodating layer.

7. The dynamic beam expansion system according to claim 6, characterized in that: The cooling water channel structure includes at least a first cooling water channel opened on the outer shell at the light entrance hole side, a second cooling water channel opened on the outer shell at the right-angle trapezoidal mirror side, and a third cooling water channel opened on the outer shell at the light exit hole side; wherein the first cooling water channel, the second cooling water channel and the third cooling water channel are interconnected.

8. The dynamic beam expansion system according to claim 7, characterized in that: The shapes of the first cooling water channel, the second cooling water channel and the third cooling water channel may be at least one of a linear shape, a serpentine shape and an arc shape.

9. The dynamic beam expansion system according to claim 1, characterized in that: The first reflector and the second reflector are one of a plane mirror and a curved mirror.

10. A three-dimensional scanning device, characterized in that: The dynamic beam expansion system includes the dynamic beam expansion system as described in any one of claims 1 to 9, and also includes a two-dimensional scanning module arranged on one side of the convex lens, wherein the two-dimensional scanning module is used to horizontally receive the laser beam emitted through the convex lens and can refract the received laser beam downward in a vertical direction, so that: the refracted laser beam can be focused and then vertically emitted from below the two-dimensional scanning module.

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