Built-in wafer box opener

Abstract

The utility model discloses a built-in wafer box opener, comprising a main body frame, a mobile platform, a locking mechanism, a door opening mechanism and a detection mechanism, the rear side of the main body frame is provided with the door opening mechanism and the detection mechanism, the front side of the main body frame is provided with a platform support frame, the platform support frame is provided with the mobile platform, and the mobile platform is provided with the locking mechanism. A locking mechanism is arranged on the moving platform, a 7-shaped hollow opening is formed in the moving platform, and the bottom of the moving platform is suspended. The utility model has the advantages of compact structure and high space utilization rate, and can be suitable for a wafer cleaning machine and other scenes which have compact overall space and need to complete the loading of the wafer transmission box through a mechanical arm.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a built-in wafer box opener. Background Art

[0002] A wafer box is a container used in the semiconductor manufacturing process to protect, transport and store wafers. Currently, 12-inch and 8-inch wafer boxes are commonly used.

[0003] Most of the wafer box openers in the prior art cannot meet the requirements of scenarios such as wafer cleaning machines where the overall space is compact and a robotic arm is required to complete the loading of wafer transfer boxes. For example, Chinese invention patent CN202211223632.5 discloses a loadport that is compatible with 8-inch and 12-inch wafer boxes. Its mobile platform is a complete plane, and the space under the mobile platform needs to be used to accommodate various drive devices such as the platform drive mechanism and the locking drive mechanism. There is no more space to place automated loading equipment such as robotic arms.

[0004] Therefore, there is a need for a built-in wafer box opener that can be suitable for compact space scenarios. Utility Model Content

[0005] To achieve the above-mentioned purpose, the utility model provides a built-in wafer box opener, including a main frame, a mobile platform, a locking mechanism, a door opening mechanism and a detection mechanism. The door opening mechanism and the detection mechanism are arranged on the rear side of the main frame, and a platform support frame is arranged on the front side of the main frame. A mobile platform is arranged on the platform support frame, and a locking mechanism is arranged on the mobile platform. The mobile platform is provided with a "7"-shaped hollow notch, and the bottom of the mobile platform is suspended.

[0006] Preferably, it also includes a platform driving mechanism, which is drivingly connected to the mobile platform, and the platform driving mechanism is arranged at the bottom of the platform support frame, and the platform driving mechanism is located on a side away from the "7"-shaped hollow notch.

[0007] Preferably, the platform driving mechanism includes a platform driving motor, a platform screw and a platform nut, the platform driving motor is arranged on the platform support frame, the platform nut is connected to the mobile platform, the platform driving motor drives the platform screw to rotate, and the displacement of the mobile platform is realized by the displacement of the platform nut. Preferably, the locking mechanism includes a locking base, a lock and an elastic component, the locking base is provided with a lock, and the side end of the locking base is movably connected to the mobile platform through the elastic component.

[0008] Preferably, the elastic component is kept in a compressed state.

[0009] Preferably, when the locking mechanism moves outward to the loading position, it cooperates with a limiting member provided on the platform support frame to limit the position.

[0010] Preferably, a slide groove and slide rail mechanism is also provided between the locking base and the movable platform.

[0011] Preferably, a buffer wheel is provided on the lock buckle.

[0012] Preferably, it further comprises a positioning structure, which is arranged on the surface of the mobile platform and comprises at least 3 positioning columns.

[0013] Preferably, the positioning structure also includes at least two downward pressure detection devices.

[0014] Preferably, it also includes a door opening mechanism horizontal driving device, which is arranged below the door opening mechanism and includes a door opening mechanism horizontal guide rail, a door opening mechanism horizontal slider, a door opening driving motor and a crank mechanism;

[0015] The door opening mechanism horizontal guide rail is arranged on the main frame, the door opening mechanism horizontal slider is connected to the bottom of the door opening mechanism, a crank slide groove is arranged on the door opening mechanism horizontal slider, the crank mechanism comprises a crank, a driving shaft and a driven shaft, the driving shaft and the driven shaft are fixedly arranged at both ends of the crank, the driving shaft is drivingly connected to the door opening drive motor, and the driven shaft is matched with the crank slide groove;

[0016] The door opening drive motor drives the crank mechanism to move in the crank slide slot, driving the horizontal slide block of the door opening mechanism to move on the horizontal guide rail of the door opening mechanism.

[0017] Preferably, it also includes a door opening mechanism vertical drive device, which is arranged on the main frame below the platform support frame. The door opening mechanism vertical drive device is arranged very thin, and its thickness in the horizontal direction is less than the thickness of the platform support frame in the horizontal direction, further providing a larger movement space for the robot arm. In a preferred embodiment, the door opening mechanism vertical drive device can be realized by a motor, a nut, and a screw rod.

[0018] Preferably, at least one set of photoelectric gates is provided at the top and bottom of the detection mechanism.

[0019] Compared with the prior art, the beneficial effects of the utility model are:

[0020] (1) The mobile platform of the utility model is provided with a "7"-shaped hollow notch, which can provide movement space for the robot arm. The utility model can be applied to scenes where the overall space is compact, such as wafer cleaning machines, and the loading of wafer transfer boxes needs to be completed by the robot arm.

[0021] (2) The bottom of the mobile platform of the utility model is suspended in the air, and the platform driving mechanism is arranged on the bottom side of the platform support frame, which further provides movement space for the robot arm.

[0022] (3) The locking mechanism of the utility model is a mechanical structure, not an electric drive structure, which saves the electric drive mechanism and further saves space. In addition, the mechanical structure is less prone to failure and has a longer service life.

[0023] (4) The horizontal driving device of the door opening mechanism of the utility model is provided with a crank mechanism, and the crank mechanism has a large torque, which makes the translation of the door opening mechanism more stable and can also save space in the horizontal direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 and Figure 2 It is a structural schematic diagram of a built-in wafer box opener disclosed in an embodiment of the utility model;

[0026] Figure 1 and Figure 2 It is a structural schematic diagram of a built-in wafer box opener disclosed in an embodiment of the utility model;

[0027] Figure 3 It is a structural schematic diagram of a moving platform of a built-in wafer box opener disclosed in an embodiment of the utility model;

[0028] Figure 4 It is a structural schematic diagram of the platform driving mechanism of the built-in wafer box opener disclosed in the embodiment of the utility model;

[0029] Figure 5 It is a structural schematic diagram of the door opening mechanism of the built-in wafer box opener disclosed in the embodiment of the utility model;

[0030] Figure 6 for Figure 5 A partial enlarged view of point A in the middle.

[0031] In the figure: a main frame 100, a platform support frame 110, a limit piece 120, a mobile platform 200, a "7"-shaped hollow notch 210, a platform drive mechanism 220, a platform drive motor 221, a platform screw rod 222, a platform nut 223, a connecting block 224, a positioning column 230, a downward pressure detection device 240, a locking mechanism 300, a lock base 310, a lock 320, an elastic component 330, a slide groove and slide rail mechanism 340, a buffer wheel 350, a door opening mechanism 400, a door opening mechanism horizontal drive device 410, a door opening mechanism horizontal guide rail 411, a door opening mechanism horizontal slider 412, a crank slide groove 413, a crank 414, a driving shaft 415, a driven shaft 416, a detection mechanism 500, and a photoelectric door 510. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] Figure 1 and Figure 2 A built-in wafer box opener disclosed in an embodiment of the utility model is shown, including a main frame 100, a mobile platform 200, a locking mechanism 300, a door opening mechanism 400 and a detection mechanism 500. The door opening mechanism 400 and the detection mechanism 500 are arranged on the rear side of the main frame 100, and a platform support frame 110 is arranged on the front side of the main frame 100. The mobile platform 200 is arranged on the platform support frame 110, and the locking mechanism 300 is arranged on the mobile platform 200. The mobile platform 200 is provided with a "7"-shaped hollow notch 210, and the bottom of the mobile platform 200 is suspended to provide movement space for a robot arm such as a wafer cleaning machine.

[0034] like Figure 3 and Figure 4 As shown, the platform driving mechanism 220 of the mobile platform 200 is arranged at the bottom of the platform support frame 110, and the platform driving mechanism 220 is located on the side away from the "7"-shaped hollow notch 210. Compared with the traditional platform driving mechanism 220, the arrangement of the platform driving mechanism 220 of this embodiment can leave more space at the bottom of the mobile platform 200, thereby providing a larger movement space for the robot arm.

[0035] Those skilled in the art can set the specific driving mode of the platform driving mechanism 220 as needed. Figure 4As shown, the platform driving mechanism 220 includes a platform driving motor 221, a platform screw rod 222 and a platform nut 223. The platform driving motor 221 is arranged on the platform support frame 110. The platform nut 223 is connected to the mobile platform 200 through a connecting block 224. The platform driving motor 221 drives the platform screw rod 222 to rotate, and the displacement of the mobile platform 200 is realized by the displacement of the platform nut 223. This simple and efficient transmission method can occupy as little space as possible.

[0036] like Figure 3 As shown, a positioning structure is provided on the surface of the mobile platform 200, and the positioning structure includes at least three positioning posts 230. The mobile platform 200 can detachably install the wafer box through the positioning structure. In a preferred embodiment, the positioning structure is provided with three positioning posts 230, and three-point positioning can meet the positioning needs.

[0037] In a preferred embodiment, the positioning structure also includes at least two downward pressure detection devices 240, which are used to detect the loading status of the wafer box loaded by the robot arm. In this embodiment, three positioning posts 230 and two downward pressure detection devices 240 are set as an example. When the wafer box is loaded successfully, the standard structure at the bottom of the wafer box can press the two downward pressure detection devices 240 at the same time, indicating that the loading is normal; if both downward pressure detection devices 240 pop up, it means that the wafer box is not loaded; if only one downward pressure detection device 240 is pressed down, it means that the loading is crooked. Preferably, the downward pressure detection device 240 is set adjacent to the positioning post 230.

[0038] In order to further save space, the locking mechanism 300 of this embodiment is a mechanical structure, not an electric drive structure, which saves the electric drive mechanism, and the mechanical structure is not prone to failure and has a longer service life. Figure 4 The locking mechanism 300 includes a locking base 310, a locking buckle 320 and an elastic component 330. The locking buckle 320 is arranged on the locking base 310. The side end of the locking base 310 is movably connected to the mobile platform 200 through the elastic component 330. The elastic component 330 maintains a clamped state. When the locking mechanism 300 moves outward to the loading position, it cooperates with the limiting member 120 arranged on the platform support frame 110 to limit the position. A sliding groove and slide rail mechanism 340 is also arranged between the locking base 310 and the mobile platform 200. The sliding groove and slide rail mechanism 340 can make the locking mechanism 300 more accurately positioned during the movement to prevent deviation.

[0039] When the mobile platform 200 is in the loading position, the locking base 310 is pressed by the elastic component 330 at the limiter 120, and the bottom of the wafer box is provided with a slot that matches the locking 320. When the wafer box is loaded, the slot at the bottom of the wafer box has not yet been locked with the locking 320, and then the mobile platform 200 drives the wafer box to move inward, the locking 320 and the slot are gradually locked, and the slot will drive the locking base 310 to move inward as well, and the elastic component 330 is always kept in a pressed state, which can ensure that the locking 320 and the slot are always in a locked state. How to achieve locking between the locking 320 and the slot is a common technical means used by those skilled in the art, and will not be repeated here.

[0040] After the wafer box is opened, the mobile platform 200 starts to move outward. During this process, the elastic component 330 will continue to apply an outward thrust to the lock base 310 to ensure the locking state of the lock 320 and the card slot. After the lock base 310 abuts against the limit member 120, the mobile platform 200 will continue to move outward a short distance to separate the card slot and the lock 320.

[0041] In a preferred embodiment, the elastic component 330 is a spring. In a preferred embodiment, the lock buckle 320 is provided with a buffer wheel 350, which can reduce wear and tear and extend the service life.

[0042] The door opening mechanism 400 and the detection mechanism 500 are both provided with a driving device for driving them to move in the horizontal direction and the vertical direction. In order to further save space, the door opening mechanism horizontal driving device 410 of this embodiment is below the door opening mechanism 400, such as Figure 5 and Figure 6 As shown, the door opening mechanism horizontal driving device 410 includes a door opening mechanism horizontal guide rail 411, a door opening mechanism horizontal slider 412, a door opening driving motor (not shown in the figure) and a crank mechanism;

[0043] The horizontal guide rail 411 of the door opening mechanism is set on the main frame 100, the horizontal slider 412 of the door opening mechanism is connected to the bottom of the door opening mechanism 400, and a crank slot 413 is provided on the horizontal slider 412 of the door opening mechanism. The crank mechanism includes a crank 414, a driving shaft 415 and a driven shaft 416. The driving shaft 415 and the driven shaft 416 are fixed at both ends of the crank 414 respectively. The driving shaft 415 is connected to the door opening drive motor, and the driven shaft 416 is matched with the crank slot 413.

[0044] The door opening drive motor drives the crank mechanism to move in the crank slot 413, driving the door opening mechanism horizontal slider 412 to move on the door opening mechanism horizontal guide rail 411. The crank mechanism has a large torque, which makes the translation of the door opening mechanism 400 more stable and can also save space in the horizontal direction. Those skilled in the art can infer that the rotation angle of the crank mechanism in the crank slot 413 of this embodiment should be less than 90°.

[0045] The door opening mechanism vertical drive device and the detection mechanism vertical drive device of this embodiment are both arranged on the main frame 100 below the platform support frame 110. The door opening mechanism vertical drive device and the detection mechanism vertical drive device are arranged very thin, and their thickness in the horizontal direction is less than the thickness of the platform support frame 110 in the horizontal direction, further providing a larger movement space for the robot arm. In a preferred embodiment, the door opening mechanism vertical drive device and the detection mechanism vertical drive device can be realized by means of a motor, a nut, and a screw rod. The horizontal drive device of the detection mechanism 500 is a common technical means of those skilled in the art, which will not be repeated here.

[0046] Since the built-in wafer box opener of the embodiment of the utility model is used in scenes of automated loading such as wafer cleaning machines, human operation is usually not allowed. In order to prevent human influence, such as Figure 5 As shown, at least one set of photoelectric gates 510 are provided at the top and bottom of the detection mechanism 500 of this embodiment. The photoelectric gates 510 are used to detect whether there is a person manually operating. If manual operation is detected, the automatic loading of the wafer box is terminated.

[0047] When a wafer box needs to be loaded, the mobile platform 200 moves outward to the loading position, and the robotic arm places the wafer box on the mobile platform 200. After the wafer box is accurately positioned by the positioning structure, the mobile platform 200 begins to move inward. During this process, the locking mechanism 300 is locked with the card slot at the bottom of the wafer box. After the mobile platform 200 moves inward to the box opening position, the door opening mechanism 400 and the detection mechanism 500 respectively realize their respective functions. After that, the mobile platform 200 moves outward to the loading position again. At this time, the locking mechanism 300 and the card slot at the bottom of the wafer box have been unlocked, and the robotic arm takes away the wafer box again to complete the entire workflow. It should be noted that the specific working principles of the door opening mechanism 400, the detection mechanism 500, etc. in the embodiment of the utility model are all common technical means of those skilled in the art, and will not be repeated here.

[0048] The built-in wafer box opener disclosed in the embodiment of the utility model can provide movement space for the robot arm, and can be suitable for scenarios such as wafer cleaning machines where the overall space is compact and the wafer transfer box loading needs to be completed by the robot arm.

[0049] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0050] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A built-in wafer box opener, characterized in that: It includes a main frame, a mobile platform, a locking mechanism, a door opening mechanism and a detection mechanism. The door opening mechanism and the detection mechanism are arranged on the rear side of the main frame, and a platform support frame is arranged on the front side of the main frame. The mobile platform is arranged on the platform support frame. The locking mechanism is arranged on the mobile platform. The mobile platform is provided with a "7"-shaped hollow notch, and the bottom of the mobile platform is suspended.

2. The built-in wafer box opener according to claim 1, characterized in that: It also includes a platform driving mechanism, which is drivingly connected to the mobile platform, and the platform driving mechanism is arranged at the bottom of the platform support frame, and the platform driving mechanism is located on a side away from the "7"-shaped hollow notch.

3. The built-in wafer box opener according to claim 2, characterized in that: The platform driving mechanism includes a platform driving motor, a platform lead screw and a platform nut. The platform driving motor is arranged on the platform support frame. The platform nut is connected to the mobile platform. The platform driving motor drives the platform lead screw to rotate, and the displacement of the mobile platform is realized through the displacement of the platform nut.

4. The built-in wafer box opener according to claim 1, characterized in that: The locking mechanism comprises a locking base, a locking buckle and an elastic component. The locking buckle is arranged on the locking base, and the side end of the locking base is movably connected to the moving platform through the elastic component.

5. The built-in wafer box opener according to claim 4, characterized in that: The elastic component is kept in a compressed state.

6. The built-in wafer box opener according to claim 4, characterized in that: When the locking mechanism moves outward to the loading position, it cooperates with the limiting member arranged on the platform support frame to limit the position.

7. The built-in wafer box opener according to claim 1, characterized in that: It also includes a positioning structure, which is arranged on the surface of the mobile platform and includes at least three positioning columns.

8. The built-in wafer box opener according to claim 7, characterized in that: The positioning structure also includes at least two downward pressure detection devices.

9. The built-in wafer box opener according to claim 1, characterized in that: It also includes a door opening mechanism horizontal driving device, which is arranged below the door opening mechanism and includes a door opening mechanism horizontal guide rail, a door opening mechanism horizontal slider, a door opening driving motor and a crank mechanism; The door opening mechanism horizontal guide rail is arranged on the main frame, the door opening mechanism horizontal slider is connected to the bottom of the door opening mechanism, a crank slide groove is arranged on the door opening mechanism horizontal slider, the crank mechanism comprises a crank, a driving shaft and a driven shaft, the driving shaft and the driven shaft are fixedly arranged at both ends of the crank, the driving shaft is drivingly connected to the door opening drive motor, and the driven shaft is matched with the crank slide groove; The door opening drive motor drives the crank mechanism to move in the crank slide slot, driving the horizontal slide block of the door opening mechanism to move on the horizontal guide rail of the door opening mechanism.

10. The built-in wafer box opener according to claim 1, characterized in that: At least one group of photoelectric gates is arranged at the top and bottom of the detection mechanism.

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