Adjustable graphite boat pushing and positioning mechanism

Abstract

The utility model relates to an adjustable graphite boat pushing and positioning mechanism, which comprises a mounting bottom plate, at least one pushing and positioning mechanism, a positioning device and a positioning device, the pushing and positioning mechanism comprises a boat fixing reference frame body, a graphite boat, a sliding boat support and a boat pushing device, the graphite boat is arranged on the sliding boat support, and the boat pushing device is used for pushing the graphite boat to slide on the sliding boat support to the boat fixing reference frame body for positioning. The utility model relates to the technical field of battery piece production, in particular to an adjustable graphite boat pushing and positioning mechanism, which is characterized in that a sliding boat support and a boat pushing device are respectively used in two vertical directions of a graphite boat to realize clamping and positioning of the graphite boat, and the problem of positioning accuracy of the graphite boat can be effectively solved; the sliding boat support is used for clamping the graphite boat from the two ends of the graphite boat in the length direction, the boat pushing device is used for pushing the graphite boat to the boat positioning reference for positioning, the graphite boat positioning device can be applied to graphite boats of any specifications, it is guaranteed that when the graphite boat flows to the sliding boat support, the positioning action is achieved, and it is guaranteed that the graphite boat is fixed, so that a mechanical arm grabs silicon wafers from the graphite boat conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of battery sheet production, in particular to an adjustable graphite boat pushing and positioning mechanism. Background Art

[0002] At present, in the manufacturing process of crystalline silicon solar cells, it is usually necessary to use a thin film deposition process to coat silicon wafers. The role of coating is to reduce reflection and improve the efficiency of solar cells. There are many methods of coating, one of which is plasma enhanced chemical vapor deposition (PECVD), which is a method of vacuum coating silicon nitride on silicon wafers. In the coating process, a graphite boat is needed as a carrier. Before coating, the uncoated silicon wafers are placed on the card points of the graphite boat in the graphite boat, and a fixed number of silicon wafers can be placed on each boat; after the silicon wafers are placed, the graphite boat is sent into the reaction chamber of the process equipment for coating; after the process is completed, the graphite boat is sent out, and after the graphite boat is cooled, the coated silicon wafers are taken out of the graphite boat and sent to the next process.

[0003] With the improvement of automation, the process of inserting silicon wafers into and removing silicon wafers from the graphite boat is basically completed by industrial robots, so the corresponding positioning of the graphite boat also needs to be very precise to ensure that the robot can accurately and efficiently complete the insertion and removal of wafers.

[0004] At present, the traditional device for positioning the graphite boat easily causes the silicon wafer to be uneven, and when the robot suction cup sucks the silicon wafer, there is a possibility of leakage or the suction cup smashing the silicon wafer. Utility Model Content

[0005] Therefore, the technical problem to be solved by the utility model is to overcome the problem that the positioning device of the graphite boat in the prior art easily causes the silicon wafers to be uneven and the positioning effect is poor.

[0006] To solve the above technical problems, the utility model provides an adjustable graphite boat pushing and positioning mechanism, including a mounting base plate, which serves as a mounting support component of the positioning mechanism, and at least one pushing and positioning mechanism is arranged on the mounting base plate; the pushing and positioning mechanism includes a fixed boat reference frame, a graphite boat, a sliding boat support and a boat pushing device, the fixed boat reference frame, the sliding boat support and the boat pushing device are all arranged on the mounting base plate, and the fixed boat reference frame and the boat pushing device are arranged opposite to each other, the graphite boat is arranged on the sliding boat support, and the graphite boat and the sliding boat support are located between the fixed boat reference frame and the boat pushing device, and the boat pushing device is used to push the graphite boat to slide on the sliding boat support to the fixed boat reference frame for positioning.

[0007] In one embodiment of the utility model, the boat fixing reference frame includes a rectangular mounting plate, a plurality of rib plates and a positioning reference plate, the rectangular mounting plate is vertically mounted on the mounting base plate, two adjacent side edges of the plurality of rib plates are respectively fixedly connected to the rectangular mounting plate and the mounting base plate, the positioning reference plate is arranged on the end face of the rectangular mounting plate opposite to the boat pushing device, and the boat pushing device pushes the graphite boat to the positioning reference plate for positioning.

[0008] In one embodiment of the utility model, the positioning reference plate is provided with a plurality of positioning protrusions, and the end surface of the graphite boat opposite to the positioning reference plate is provided with a protruding ceramic rod, and the positioning protrusions and the ceramic rods are avoided and attached to the side wall of the graphite boat.

[0009] In one embodiment of the utility model, the sliding boat support includes a boat support base plate, four boat support sliding support assemblies, two symmetrically arranged boat support clamping assemblies and a boat support position adjustment assembly, the boat support position adjustment assembly is arranged on the mounting base plate, the boat support base plate is connected to the boat support position adjustment assembly, the four boat support sliding support assemblies are located at the four corner positions of the boat support base plate, the two symmetrically arranged boat support clamping assemblies are arranged at both ends in the length direction of the boat support base plate, the graphite boat is placed on the four boat support sliding support assemblies, and the two symmetrically arranged boat support clamping assemblies are used to tighten and position the graphite boat from both ends in the length direction of the graphite boat.

[0010] In one embodiment of the utility model, the boat support sliding support assembly includes a support seat and a boat support roller, the support seat is fixedly arranged on the boat support bottom plate, the boat support roller is arranged on the support seat through a rotating shaft, and the lower end of the graphite boat is placed on the boat support roller.

[0011] In one embodiment of the utility model, the boat support clamping assembly includes a clamping cylinder, a right-angle plate, a U-shaped clamping plate and a clamping roller. The piston rod of the clamping cylinder is connected to the U-shaped clamping plate through the right-angle plate. Clamping rollers are provided at both ends of the U-shaped clamping plate. The clamping cylinder drives the clamping roller to contact the side wall of the graphite boat to achieve clamping positioning.

[0012] In one embodiment of the utility model, the boat support position adjustment assembly includes a position adjustment cylinder, two parallel and symmetrically arranged linear guide rails and a plurality of sliders. The position adjustment cylinder and the two parallel and symmetrically arranged linear guide rails are all arranged on a mounting base plate. A plurality of sliders are provided on the lower end surface of the boat support base plate. The sliders are slidably connected to the linear guide rails. The piston rod of the position adjustment cylinder is connected to the side wall of the boat support base plate.

[0013] In one embodiment of the utility model, the boat pushing device includes a boat pushing cylinder, a boat pushing frame and a plurality of boat pushing assemblies, the boat pushing cylinder is fixedly arranged on a mounting base plate, the piston rod of the boat pushing cylinder is connected to the boat pushing frame, the lower end of the boat pushing frame is connected to a slider 2, a linear guide rail 2 is provided on the mounting base plate, the slider 2 is slidably connected to the linear guide rail 2, and a plurality of boat pushing assemblies are provided on the side of the boat pushing frame opposite to the graphite boat.

[0014] In one embodiment of the utility model, the push boat assembly includes an adapter plate, a connecting rod and a push plate, the adapter plate is fixedly connected to the push boat frame, the push plate is connected to the adapter plate through the connecting rod, and the push plate contacts the side wall of the graphite boat.

[0015] In one embodiment of the present invention, an avoidance groove is provided on the end surface of the push plate opposite to the side wall of the graphite boat, and the avoidance groove is used to avoid the stuck point on the side wall of the graphite boat.

[0016] The above technical solution of the utility model has the following beneficial effects compared with the prior art:

[0017] The adjustable graphite boat pushing and positioning mechanism described in the utility model realizes the tightening and positioning of the graphite boat by using a sliding boat support and a boat pushing device in two vertical directions of the graphite boat, which can effectively solve the problem of the positioning accuracy of the graphite boat; the sliding boat support is used to clamp the graphite boat from both ends of the length direction of the graphite boat, and the boat pushing device is used to push the graphite boat to the fixed boat reference for positioning, which can be applied to graphite boats of any specifications, ensuring that the positioning action is realized when the graphite boat flows to the sliding boat support, ensuring that the graphite boat is fixed and motionless, so that the robot arm can grab the silicon wafer from the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model in combination with the accompanying drawings, wherein

[0019] Figure 1 This is a schematic diagram of the overall structure of the adjustable graphite boat pushing and positioning mechanism in the preferred embodiment of the utility model;

[0020] Figure 2 The structure of the push-to-lock positioning mechanism in the preferred embodiment of the utility model is shown in FIG. Figure 1 ;

[0021] Figure 3 The structure of the push-to-lock positioning mechanism in the preferred embodiment of the utility model is shown in FIG. Figure 2 ;

[0022] Figure 4 This is a structural schematic diagram of a boat-fixing reference frame in a preferred embodiment of the utility model;

[0023] Figure 5 This is a schematic diagram of the structure of a graphite boat in a preferred embodiment of the utility model;

[0024] Figure 6 This is a schematic diagram of the structure of the sliding boat support in the preferred embodiment of the utility model;

[0025] Figure 7 It is a structural schematic diagram of a boat support sliding support assembly and a boat support clamping assembly in a preferred embodiment of the utility model;

[0026] Figure 8 This is a schematic structural diagram of a boat pushing device in a preferred embodiment of the utility model;

[0027] Fig. 9 It is a right side view of the boat pushing device in the preferred embodiment of the utility model.

[0028] Description of the accompanying drawings: mounting base plate 1, linear guide rail 10, weight reduction hole 11, mounting hole 12, push-up positioning mechanism 2, fixed boat reference frame 21, rectangular mounting plate 211, rib plate 212, positioning reference plate 213, positioning convex portion 214, graphite boat 22, ceramic rod 221, trapezoidal convex portion 222, sliding boat support 23, boat support base plate 231, boat support sliding support assembly 232, support seat 2321, boat support roller 2322, boat support clamp Tightening assembly 233, clamping cylinder 2331, right-angle plate 2332, U-shaped clamping plate 2333, clamping roller 2334, boat support position adjustment assembly 234, position adjustment cylinder 2341, linear guide rail 1 2342, slider 1 2343, boat pushing device 24, boat pushing cylinder 241, boat pushing frame 242, boat pushing assembly 243, adapter plate 2431, connecting rod 2432, push plate 2433, avoidance groove 2434, slider 2 244. DETAILED DESCRIPTION

[0029] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0030] Reference Figure 1-3As shown, the adjustable graphite boat pushing and positioning mechanism of the utility model comprises: two main parts: a mounting base plate 1 and a pushing and positioning mechanism 2; the mounting base plate 1 serves as a mounting support component of the positioning mechanism, and at least one pushing and positioning mechanism 2 is provided on the mounting base plate 1; the pushing and positioning mechanism 2 comprises a fixed boat reference frame 21, a graphite boat 22, a sliding boat support 23 and a boat pushing device 24, the fixed boat reference frame 21, the sliding boat support 23 and the boat pushing device 24 are all arranged on the mounting base plate 1, and the fixed boat reference frame 21 and the boat pushing device 24 are arranged opposite to each other, the graphite boat 22 is arranged on the sliding boat support 23, and the graphite boat 22 and the sliding boat support 23 are located between the fixed boat reference frame 21 and the boat pushing device 24, and the boat pushing device 24 is used to push the graphite boat 22 to slide on the sliding boat support 23 to the fixed boat reference frame 21 for positioning.

[0031] Reference Figure 4 As shown, the boat fixing reference frame 21 includes a rectangular mounting plate 211, a plurality of ribs 212 and a positioning reference plate 213. The rectangular mounting plate 211 is vertically mounted on the mounting base plate 1. Two adjacent sides of the plurality of ribs 212 are respectively fixedly connected to the rectangular mounting plate 211 and the mounting base plate 1. The positioning reference plate 213 is arranged on the end surface of the rectangular mounting plate 211 opposite to the boat pushing device 24. The boat pushing device 24 pushes the graphite boat 22 to the positioning reference plate 213 for positioning. The rectangular mounting plate 211 and the plurality of ribs 212 are provided with weight-reducing through holes for reducing the weight of the overall graphite boat pushing and positioning mechanism.

[0032] Reference Figure 4 , 5 As shown, the positioning reference plate 213 is provided with a plurality of positioning protrusions 214, and the end surface of the graphite boat 22 opposite to the positioning reference plate 213 is provided with a protruding ceramic rod 221, and the positioning protrusions 214 and the ceramic rod 221 are avoided and attached to the side wall of the graphite boat 22. The positioning reference plate 213 is a rectangular strip, and the positioning protrusions 214 are rectangular bodies. The plurality of positioning protrusions 214 are arranged in a straight line along the length direction of the positioning reference plate 213. In order to achieve the avoidance effect, the thickness of the positioning protrusions 214 is greater than the thickness of the protruding ceramic rod 221.

[0033] Reference Figure 6As shown, the sliding boat support 23 includes a boat support base plate 231, four boat support sliding support assemblies 232, two symmetrically arranged boat support clamping assemblies 233 and a boat support position adjustment assembly 234, the boat support position adjustment assembly 234 is arranged on the mounting base plate 1, the boat support base plate 231 is connected to the boat support position adjustment assembly 234, the four boat support sliding support assemblies 232 are located at the four corner positions of the boat support base plate 231, the two symmetrically arranged boat support clamping assemblies 233 are arranged at both ends of the length direction of the boat support base plate 231, the graphite boat 22 is placed on the four boat support sliding support assemblies 232, and the two symmetrically arranged boat support clamping assemblies 233 are used to tighten and position the graphite boat 22 from both ends of the length direction of the graphite boat 22. The four boat support sliding support assemblies 232 play a supporting role at the four corners of the graphite boat 22. Two symmetrically arranged boat support clamping assemblies 233 clamp and position the graphite boat 22 from both ends of the length direction of the graphite boat 22, and a boat support clamping assembly 233 is provided between the two boat support sliding support assemblies 232 located on the same side of the length direction of the boat support bottom plate 231.

[0034] Reference Figure 7 As shown, the boat support sliding support assembly 232 includes a support seat 2321 and a boat support roller 2322. The support seat 2321 is fixedly arranged on the boat support bottom plate 231, and the boat support roller 2322 is arranged on the support seat 2321 through a rotating shaft, and the lower end of the graphite boat 22 is placed on the boat support roller 2322. The lower end of the graphite boat 22 is provided with four trapezoidal protrusions 222, and the four trapezoidal protrusions 222 are located at the four corners of the rectangular cross section, and the four trapezoidal protrusions 222 and the four boat support sliding support assemblies 232 are arranged one by one, and two trapezoidal protrusions 222 are located between two boat support sliding support assemblies 232, so that the graphite boat 22 can be confined within the area defined by the four boat support sliding support assemblies 232.

[0035] Reference Figure 7 As shown, the boat support clamping assembly 233 includes a clamping cylinder 2331, a right-angle plate 2332, a U-shaped clamping plate 2333 and a clamping roller 2334. The piston rod of the clamping cylinder 2331 is connected to the U-shaped clamping plate 2333 through the right-angle plate 2332. Both ends of the U-shaped clamping plate 2333 are provided with clamping rollers 2334. The clamping cylinder 2331 drives the clamping rollers 2334 to contact the side wall of the graphite boat 22 to achieve tightening and positioning. The clamping cylinder 2331 is located between the two boat support sliding support assemblies 232. In this way, when the clamping cylinder 2331 drives the clamping rollers 2334 to clamp the graphite boat 22, the middle position of the graphite boat 22 can be clamped, so that the clamping force is balanced and deviation during the clamping process is avoided.

[0036] In the above structure, the boat support position adjustment assembly 234 includes a position adjustment cylinder 2341, two parallel and symmetrically arranged linear guide rails 2342 and a plurality of sliders 2343. The position adjustment cylinder 2341 and the two parallel and symmetrically arranged linear guide rails 2342 are all arranged on the mounting base plate 1. A plurality of sliders 2343 are arranged on the lower end surface of the boat support base plate 231. The slider 2343 and the linear guide rail 2342 are slidably connected. The piston rod of the position adjustment cylinder 2341 is connected to the side wall of the boat support base plate 231.

[0037] Reference Figure 8 , 9 As shown, the boat pushing device 24 includes a boat pushing cylinder 241, a boat pushing frame 242 and a plurality of boat pushing assemblies 243. The boat pushing cylinder 241 is fixedly arranged on the mounting base plate 1. The piston rod of the boat pushing cylinder 241 is connected to the boat pushing frame 242. The lower end of the boat pushing frame 242 is connected to a slider 244. The mounting base plate 1 is provided with a linear guide rail 210. The slider 244 is slidably connected to the linear guide rail 210. The side of the boat pushing frame 242 opposite to the graphite boat 22 is provided with a plurality of boat pushing assemblies 243. The boat pushing assembly 243 and the boat support clamping assembly 233 are respectively located on the adjacent sides of the graphite boat 22, so that the boat pushing assembly 243 and the boat support clamping assembly 233 push and position the graphite boat 22 from two vertical directions.

[0038] In the above structure, the push boat assembly 243 includes an adapter plate 2431, a connecting rod 2432 and a push plate 2433. The adapter plate 2431 is fixedly connected to the push boat frame 242. The push plate 2433 is connected to the adapter plate 2431 through the connecting rod 2432. The push plate 2433 contacts the side wall of the graphite boat 22. A plurality of push boat assemblies 243 are arranged along the length direction of the push boat frame 242, and the plurality of push boat assemblies 243 are parallel and on the same straight line. The setting position of the push plate 2433 should avoid the ceramic rod 221 part protruding outward from the side wall of the graphite boat 22, so that the push plate 2433 can contact the side wall of the graphite boat 22. An avoidance groove 2434 is arranged on the end surface of the push plate 2433 opposite to the side wall of the graphite boat 22, and the avoidance groove 2434 is used to avoid the stuck point on the side wall of the graphite boat 22.

[0039] In addition, the mounting base plate 1 is a rectangular flat plate, and a weight-reducing hole 11 and a mounting hole 12 are provided on the mounting base plate 1 .

[0040] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention of the utility model.

Claims

1. An adjustable graphite boat pushing and positioning mechanism, characterized in that: include, A mounting base plate, which serves as a mounting support component of the positioning mechanism, and at least one pushing positioning mechanism is provided on the mounting base plate; The pushing and positioning mechanism includes a fixed boat reference frame, a graphite boat, a sliding boat support and a boat pushing device, the fixed boat reference frame, the sliding boat support and the boat pushing device are all arranged on a mounting base plate, and the fixed boat reference frame and the boat pushing device are arranged opposite to each other, the graphite boat is arranged on the sliding boat support, and the graphite boat and the sliding boat support are located between the fixed boat reference frame and the boat pushing device, and the boat pushing device is used to push the graphite boat to slide on the sliding boat support to the fixed boat reference frame for positioning.

2. The adjustable graphite boat pushing and positioning mechanism according to claim 1 is characterized in that: The boat fixing reference frame includes a rectangular mounting plate, a plurality of rib plates and a positioning reference plate, the rectangular mounting plate is vertically mounted on the mounting base plate, two adjacent side edges of the plurality of rib plates are respectively fixedly connected to the rectangular mounting plate and the mounting base plate, the positioning reference plate is arranged on the end surface of the rectangular mounting plate opposite to the boat pushing device, and the boat pushing device pushes the graphite boat to the positioning reference plate for positioning.

3. The adjustable graphite boat pushing and positioning mechanism according to claim 2 is characterized in that: The positioning reference plate is provided with a plurality of positioning protrusions, and the end surface of the graphite boat opposite to the positioning reference plate is provided with a protruding ceramic rod, and the positioning protrusions and the ceramic rods are avoided and attached to the side wall of the graphite boat.

4. The adjustable graphite boat pushing and positioning mechanism according to claim 1 is characterized in that: The sliding boat support includes a boat support base plate, four boat support sliding support assemblies, two symmetrically arranged boat support clamping assemblies and a boat support position adjustment assembly, the boat support position adjustment assembly is arranged on the mounting base plate, the boat support base plate is connected to the boat support position adjustment assembly, the four boat support sliding support assemblies are located at the four corner positions of the boat support base plate, the two symmetrically arranged boat support clamping assemblies are arranged at both ends in the length direction of the boat support base plate, the graphite boat is placed on the four boat support sliding support assemblies, and the two symmetrically arranged boat support clamping assemblies are used to tighten and position the graphite boat from both ends in the length direction of the graphite boat.

5. The adjustable graphite boat pushing and positioning mechanism according to claim 4 is characterized in that: The boat support sliding support assembly includes a support seat and a boat support roller. The support seat is fixedly arranged on the boat support bottom plate. The boat support roller is arranged on the support seat through a rotating shaft. The lower end of the graphite boat is placed on the boat support roller.

6. The adjustable graphite boat pushing and positioning mechanism according to claim 4, characterized in that: The boat support clamping assembly includes a clamping cylinder, a right-angle plate, a U-shaped clamping plate and a clamping roller. The piston rod of the clamping cylinder is connected to the U-shaped clamping plate through the right-angle plate. Clamping rollers are provided at both ends of the U-shaped clamping plate. The clamping cylinder drives the clamping roller to contact the side wall of the graphite boat to achieve clamping positioning.

7. The adjustable graphite boat pushing and positioning mechanism according to claim 4 is characterized in that: The boat support position adjustment assembly includes a position adjustment cylinder, two parallel and symmetrically arranged linear guide rails and a plurality of sliders. The position adjustment cylinder and the two parallel and symmetrically arranged linear guide rails are all arranged on a mounting base plate. A plurality of sliders are provided on the lower end surface of the boat support base plate. The sliders are slidably connected to the linear guide rails. The piston rod of the position adjustment cylinder is connected to the side wall of the boat support base plate.

8. The adjustable graphite boat pushing and positioning mechanism according to claim 3 is characterized in that: The boat pushing device includes a boat pushing cylinder, a boat pushing frame and a plurality of boat pushing components. The boat pushing cylinder is fixedly arranged on a mounting base plate. The piston rod of the boat pushing cylinder is connected to the boat pushing frame. The lower end of the boat pushing frame is connected to a second slider. A second linear guide rail is provided on the mounting base plate. The second slider is slidably connected to the second linear guide rail. A plurality of boat pushing components are provided on the side of the boat pushing frame opposite to the graphite boat.

9. The adjustable graphite boat pushing and positioning mechanism according to claim 8, characterized in that: The push boat assembly comprises an adapter plate, a connecting rod and a push plate, the adapter plate is fixedly connected to the push boat frame, the push plate is connected to the adapter plate through the connecting rod, and the push plate contacts the side wall of the graphite boat.

10. The adjustable graphite boat pushing and positioning mechanism according to claim 9, characterized in that: An avoidance groove is provided on the end surface of the push plate opposite to the side wall of the graphite boat, and the avoidance groove is used to avoid the stuck point on the side wall of the graphite boat.

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