Device for taking and placing wafer box

Abstract

The utility model provides a device for taking and placing a wafer box. The device comprises an alignment platform and a telescopic guide rail, the telescopic guide rail comprises a fixed end and a telescopic end which are movably connected; the alignment platform is installed at the telescopic end of the telescopic guide rail, a positioning structure is arranged on the upper surface of the alignment platform, a notch is formed in the side, facing the fixed end of the telescopic guide rail, of the alignment platform, and the notch penetrates through the upper surface and the lower surface of the alignment platform. The position of the wafer box can be corrected through the alignment platform, so that the wafer box is placed at the correct position of the bearing platform; the alignment platform can be moved out of the storage bin through the telescopic guide rail, and when an operator carries the wafer box, the wafer box does not collide with a window or a position sensor of the storage bin any more. The wafer box does not collide with the window of the storage bin or the position sensor any more, and the service life of the wafer box, the window of the storage bin and the position sensor is longer.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a device for taking and placing a wafer box. Background Art

[0002] In the wafer manufacturing process, storage bins (stock, storage bins) and wafer boxes (Front Opening Unified Pod, front-opening wafer transfer box, referred to as FOUP or wafer box). Figure 1 As shown, a cavity is provided in the storage bin, and the cavity is divided into an upper layer 1 and a lower layer 2. An input window 3 and a removal window 4 are provided on the side wall of the upper layer 1. A carrying platform 5 is provided in each of the two windows. A plurality of position sensors 6 are provided on the carrying platform 5. A driving unit 7 for driving the carrying platform 5 to move is provided below the carrying platform 5. The driving unit 7 can drive the carrying platform 5 to move up and down and forward and backward at the junction position s between the upper layer 1 and the lower layer 2.

[0003] The storage bin has two operating modes: automatic mode and manual mode. In automatic mode, the overhead crane can automatically place the wafer box 8 on the carrying platform 5 or remove the wafer box 8 from the carrying platform 5. In manual mode, the operator can manually place the wafer box 8 on the carrying platform 5 or remove the wafer box 8 from the carrying platform 5. When the wafer box 8 is placed in the correct position of the carrying platform 5, each position sensor 6 sends a first sensing signal, and the drive unit 7 drives the carrying platform 5 to move; if the wafer box 8 is not placed in the correct position of the carrying platform 5, some or all of the position sensors 6 send a second sensing signal, the storage bin sends an alarm signal, the drive unit 7 is shut down, and the wafer box 8 needs to be re-placed.

[0004] However, when the operator manually places the wafer box 8 on the carrying platform 5, the wafer box 8 blocks the operator's line of sight, and the operator cannot see the position of the position sensor 6, which makes it difficult to place the wafer box 8 in the correct position on the carrying platform 5. It must be repeated many times before it can be placed successfully; in addition, the wafer box 8 is prone to collide with the storage bin window position sensor 6, causing damage to the wafer box 8, the window and the position sensor 6. Utility Model Content

[0005] The utility model provides a device for taking and placing a wafer box, so as to solve the technical problem that it is difficult for an operator to manually place the wafer box on the correct position of a carrying platform.

[0006] In order to solve the above-mentioned technical problems, the utility model provides a device for taking and placing wafer boxes, comprising an alignment platform and a telescopic guide rail; the telescopic guide rail comprises a fixed end and a telescopic end that are movably connected; the alignment platform is installed on the telescopic end of the telescopic guide rail, and a positioning structure is provided on the upper surface of the alignment platform, and a notch is provided on the side of the alignment platform facing the fixed end of the telescopic guide rail, and the notch passes through the upper and lower surfaces of the alignment platform.

[0007] Optionally, the device also includes a supporting unit, which includes a first driving component and a supporting rod; the first driving component is fixed to one end of the telescopic end; the first driving component includes a telescopic rod; one end of the supporting rod is rotatably connected to one end of the telescopic rod, and the other end of the supporting rod is movably connected to the bottom of the other end of the telescopic end.

[0008] Optionally, a roller is provided at the other end of the support rod, a groove is provided at the bottom of the other end of the telescopic end, and the roller is arranged in the groove.

[0009] Optionally, the first driving component is a cylinder or a hydraulic cylinder.

[0010] Optionally, the support unit further includes a guide block, a side surface of the guide block is provided with a guide groove, and the telescopic rod is arranged inside the guide groove.

[0011] Optionally, the telescopic rod is cylindrical in shape; the guide groove is semi-cylindrical in shape, and the guide groove is arranged along the axial direction of the guide block.

[0012] Optionally, the outline of the guide block is in the shape of a cuboid.

[0013] Optionally, the device further includes a second driving component connected to the telescopic end of the telescopic guide rail.

[0014] Optionally, the positioning structure includes four right-angle positioning blocks, and the four right-angle positioning blocks are distributed according to the four vertex positions of the rectangle.

[0015] The utility model provides a device for taking and placing a wafer box. The position of the wafer box can be corrected by an alignment platform, so that the wafer box can be placed in the correct position of the carrying platform; the alignment platform can be moved out of the storage bin by a telescopic guide rail, and when the operator is carrying the wafer box, the wafer box no longer collides with the window or position sensor of the storage bin. The unexpected effect of this device is that the operator can easily manually place the wafer box on the alignment platform, and then transfer the wafer box to the carrying platform through the alignment platform; the operator can also use the device to take the wafer box out of the storage bin. Since the wafer box no longer collides with the window or position sensor of the storage bin when the wafer box is carried, the service life of the wafer box, the window of the storage bin and the position sensor is longer. The number of alarms in the storage bin is reduced, the normal operation time of the storage bin is longer, and the production efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a storage bin in the prior art.

[0017] Figure 2 It is a structural schematic diagram of a telescopic end of a telescopic guide rail provided by an embodiment of the utility model when it extends out of a storage bin.

[0018] Figure 3 It is a structural schematic diagram of a wafer box placed on an alignment platform after a support rod is propped up, provided by an embodiment of the utility model.

[0019] Figure 4 It is a structural schematic diagram of a support rod after being folded, provided by an embodiment of the utility model.

[0020] Figure 5 It is a structural schematic diagram of a telescopic end of a telescopic guide rail provided by an embodiment of the utility model entering a storage bin with an alignment platform.

[0021] Figure 6 It is a structural schematic diagram of a driving unit provided in an embodiment of the utility model that drives a carrying platform to rise and carry a wafer box.

[0022] Figure 7 yes Figure 2 A top view schematic diagram of the alignment platform, telescopic end and first driving component in FIG.

[0023] Figure 8 Figure 3 Schematic diagram of the structure of the middle support rod and the telescopic rod.

[0024] Fig. 9 yes Figure 2 Schematic diagram of top view of the middle guide block.

[0025] [Description of reference numerals is as follows]:

[0026] Upper layer-1, lower layer-2, input window-3, take-out window-4, carrying platform-5, position sensor-6, drive unit-7, wafer box-8;

[0027] Alignment platform-11, telescopic guide rail-12, support unit-13;

[0028] Positioning structure-111, notch-112;

[0029] Fixed end-121, telescopic end-122;

[0030] A first driving component 131, a support rod 132, a roller 133, and a guide block 134;

[0031] Telescopic rod-1311;

[0032] Guide groove-1341. DETAILED DESCRIPTION

[0033] In order to make the purpose, advantages and features of the utility model clearer, the following is a further detailed description of a device for taking and placing a wafer box proposed by the utility model in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0034] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0035] like Figure 2 and Figure 7 As shown, this embodiment provides a device for taking and placing a wafer box, including an alignment platform 11 and a telescopic guide rail 12; the telescopic guide rail 12 includes a fixed end 121 and a telescopic end 122 that are movably connected; the alignment platform 11 is installed on the telescopic end 122 of the telescopic guide rail 12, and a positioning structure 111 is provided on the upper surface of the alignment platform 11. A notch 112 is provided on the side of the alignment platform 11 facing the fixed end 121 of the telescopic guide rail 12, and the notch 112 passes through the upper and lower surfaces of the alignment platform 11. The direction from the upper surface of the alignment platform 11 to its lower surface is Figure 2 The middle vertical direction is perpendicular to the extension direction of the telescopic rail 12. The number of the telescopic rails 12 can be two, and the two telescopic rails 12 are arranged at intervals similar to the two telescopic rails of a drawer, and the alignment platform 11 can be installed on the two telescopic ends 122.

[0036] The device can be installed on a storage bin, the fixed end 121 of the telescopic guide rail 12 is fixed in the chamber of the storage bin and is located above the carrying platform 5, and the telescopic end 122 of the telescopic guide rail 12 can carry the alignment platform 11 in and out of the chamber of the storage bin.

[0037] like Figure 2-Figure 6 As shown, the steps of using the device to place the wafer box 8 into the storage bin include: Figure 2 As shown, the telescopic end 122 of the telescopic guide rail 12 carries the alignment platform 11 from inside the storage bin to outside the storage bin; Figure 3 As shown, the operator manually places the wafer box 8 on the alignment platform 11, and the wafer box 8 is placed in place through the positioning structure 111, and the clearance between the positioning structure 111 and the bottom of the wafer box 8 is matched; Figure 4 and Figure 5 As shown, the telescopic end 122 of the telescopic guide rail 12 carries the alignment platform 11 and the wafer box 8 into the storage bin; Figure 5 to Figure 7 As shown, a position sensor mounting platform and a plurality of position sensors 6 are provided on the carrying platform 5. When the driving unit 7 drives the carrying platform 5 to rise, the gap between the position sensor mounting platform and the notch 112 of the alignment platform 11 is matched, so that the plurality of position sensors 6 can all enter the corresponding grooves at the bottom of the wafer box 8. Then the carrying platform 5 carries the wafer box 8. At this time, each position sensor 6 sends a first sensing signal, and the driving unit 7 drives the carrying platform 5 to move into the storage bin.

[0038] refer to Figure 2-Figure 6 As shown, the principle of using the device to take out the wafer box 8 from the storage bin is similar to the principle of putting the wafer box 8 into the storage bin above, but the steps are reversed. The steps of taking out the wafer box 8 from the storage bin include: Figure 5 and Figure 6 As shown, the driving unit 7 drives the carrying platform 5 to move to the window position of the storage bin, and the carrying platform 5 carries a wafer box 8; Figure 5 , the carrying platform 5 moves down, and the wafer box 8 falls on the alignment platform 11; Figure 5-Figure 3 As shown, the telescopic end 122 of the telescopic guide rail 12 carries the alignment platform 11 and the wafer box 8 from the storage bin to the outside of the storage bin; Figure 2 As shown, the operator manually moves the wafer box 8 away from the alignment platform 11 .

[0039] The present embodiment provides a device for taking and placing a wafer box 8. The position of the wafer box 8 can be corrected by the alignment platform 11, so that the wafer box 8 is placed in the correct position of the carrying platform 5; the alignment platform 11 can be moved out of the storage bin by the telescopic guide rail 12, and when the operator is carrying the wafer box 8, the wafer box 8 no longer collides with the window or position sensor 6 of the storage bin. The unexpected effect of this device is that the operator can easily manually place the wafer box 8 on the alignment platform 11, and then transfer the wafer box 8 to the carrying platform 5 through the alignment platform 11; the operator can also use the device to take the wafer box 8 out of the storage bin. Since the wafer box 8 no longer collides with the window or position sensor 6 of the storage bin when the wafer box 8 is carried, the service life of the wafer box 8, the window of the storage bin and the position sensor 6 is longer. The number of alarms in the storage bin is reduced, the normal operation time of the storage bin is longer, and the production efficiency is improved.

[0040] Optional, such as Figure 3 and Figure 8 As shown, the device further includes a support unit 13, and the support unit 13 includes a first driving component 131 and a support rod 132; the first driving component 131 is fixed to one end of the telescopic end 122; the first driving component 131 includes a telescopic rod 1311; one end of the support rod 132 is rotatably connected to one end of the telescopic rod 1311, and the other end of the support rod 132 is movably connected to the bottom of the other end of the telescopic end 122. One end of the support rod 132 is rotatably connected to one end of the telescopic rod 1311, which means that one end of the support rod 132 and one end of the telescopic rod 1311 can be connected by a pin shaft, so that the support rod 132 can rotate with the pin shaft as the end point. The other end of the support rod 132 is movably connected to the bottom of the other end of the telescopic end 122, which means that the other end of the support rod 132 can be connected to the bottom of the other end of the telescopic end 122 through a roller 133 or a slider, so that the other end of the support rod 132 can be movable relative to the bottom of the other end of the telescopic end 122. The support unit 13 is used to support the alignment platform 11 to improve the stability of the alignment platform 11. When the support rod 132 is not in use, the support rod 132 fits with the bottom surface of the telescopic end 122 to prevent the telescopic end 122 from being affected in entering and exiting the storage bin. The support rod 132 is propped up when in use, and the support rod 132, the telescopic rod 1311 and the bottom surface of the telescopic end 122 form a triangular support structure to improve the stability of the alignment platform 11.

[0041] Optional, such as Figure 3 and Figure 7 As shown, there are two telescopic guide rails 12 , and one supporting unit 13 is respectively provided at the telescopic end 122 of each telescopic guide rail 12 , which can further improve the stability of the alignment platform 11 .

[0042] Optional, such as Figure 3 and Figure 8 As shown, the other end of the support rod 132 is provided with a roller 133, and the bottom of the other end of the telescopic end 122 is provided with a groove, and the roller 133 is arranged in the groove. The groove has a role of limiting and guiding the roller 133, and the other end of the support rod 132 can reciprocate in the groove through the roller 133, so that the support rod 132 can be propped up or retracted.

[0043] Optional, such as Figure 3 and Figure 8 As shown, the first driving component 131 is a cylinder or a hydraulic cylinder. The cylinder or hydraulic cylinder can realize the vertical movement of the telescopic rod 1311, thereby driving the support rod 132 to prop up or retract. In other embodiments, the first driving component 131 can also be a motor.

[0044] Optional, such as Figure 3 , Figure 8 and Fig. 9 As shown, the support unit 13 further includes a guide block 134, a guide groove 1341 is provided on one side surface of the guide block 134, and the telescopic rod 1311 is arranged inside the guide groove 1341. The guide block 134 can be fixed at the lower edge position of the window of the storage bin, and the guide groove 1341 has a guiding effect on the telescopic rod 1311 to prevent the telescopic rod 1311 from shaking when moving up and down.

[0045] Optional, such as Figure 8 and Fig. 9 As shown, the telescopic rod 1311 is cylindrical in shape; the guide groove 1341 is semi-cylindrical in shape, and the guide groove 1341 is arranged along the axial direction of the guide block 134, so that the telescopic rod 1311 and the guide groove 1341 can cooperate better and prevent the telescopic rod 1311 from shaking when moving up and down.

[0046] Optional, such as Figure 3 and Fig. 9 As shown, the outline of the guide block 134 is in the shape of a cuboid, which facilitates the processing and fixing of the guide block 134. In other embodiments, the outline of the guide block 134 may be in the shape of a cylinder or other shapes.

[0047] Optional, reference Figure 2 As shown, the device further includes a second driving component, which is connected to the telescopic end 122 of the telescopic rail 12. The second driving component can be a cylinder, which can drive the telescopic end 122 of the telescopic rail 12 to reciprocate in the horizontal direction relative to the fixed end 121.

[0048] Optional, such as Figure 7 As shown, the positioning structure 111 includes four right-angle positioning blocks, and the four right-angle positioning blocks are distributed according to the four vertex positions of the rectangle. The area enclosed by the four right-angle positioning blocks is the same shape and similar in size to the bottom of the wafer box 8, and the wafer box 8 can be just placed in the area enclosed by the four right-angle positioning blocks to prevent the wafer box 8 from being tilted. In other embodiments, only two right-angle positioning blocks can be set, but the positioning effect of such a positioning is not as good as the positioning effect of four right-angle positioning blocks.

[0049] Optional, such as Figure 2 and Figure 7 As shown, the shape of the notch 112 is a rectangle. Since the shape of the position sensor mounting platform is usually a rectangle, setting the notch 112 to a rectangle can make the notch 112 and the position sensor mounting platform better match each other, so that the wafer box 8 can be placed in the correct position on the carrying platform 5. In other embodiments, the shape of the notch 112 can be adjusted according to the shape of the position sensor mounting platform, so that the position sensor mounting platform can move up through the notch 112, so that the carrying platform 5 can carry the wafer box 8.

[0050] In summary, the utility model provides a device for taking and placing a wafer box 8. The position of the wafer box 8 can be corrected by the alignment platform 11, so that the wafer box 8 is placed in the correct position of the carrying platform 5; the alignment platform 11 can be moved out of the storage bin by the telescopic guide rail 12, and when the operator is carrying the wafer box 8, the wafer box 8 no longer collides with the window or position sensor 6 of the storage bin. The unexpected effect of this device is that the operator can easily manually place the wafer box 8 on the alignment platform 11, and then transfer the wafer box 8 to the carrying platform 5 through the alignment platform 11; the operator can also use the device to take out the wafer box 8 from the storage bin. Since the wafer box 8 no longer collides with the window or position sensor 6 of the storage bin when the wafer box 8 is carried, the service life of the wafer box 8, the window of the storage bin and the position sensor 6 is longer. The number of alarms in the storage bin is reduced, the normal operation time of the storage bin is longer, and the production efficiency is improved.

[0051] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A device for taking and placing a wafer box, characterized in that: It includes an alignment platform and a telescopic guide rail; the telescopic guide rail includes a fixed end and a telescopic end that are movably connected; the alignment platform is installed on the telescopic end of the telescopic guide rail, a positioning structure is provided on the upper surface of the alignment platform, and a notch is provided on the side of the alignment platform facing the fixed end of the telescopic guide rail, and the notch runs through the upper and lower surfaces of the alignment platform.

2. The device for taking and placing a wafer box according to claim 1, characterized in that: The device also includes a supporting unit, which includes a first driving component and a supporting rod; the first driving component is fixed to one end of the telescopic end; the first driving component includes a telescopic rod; one end of the supporting rod is rotatably connected to one end of the telescopic rod, and the other end of the supporting rod is movably connected to the bottom of the other end of the telescopic end.

3. The device for taking and placing a wafer box as claimed in claim 2, characterized in that: The other end of the support rod is provided with a roller, the bottom of the other end of the telescopic end is provided with a groove, and the roller is arranged in the groove.

4. The device for taking and placing a wafer box as claimed in claim 2, characterized in that: The first driving component is a pneumatic cylinder or a hydraulic cylinder.

5. The device for taking and placing a wafer box as claimed in claim 2, characterized in that: The support unit further comprises a guide block, a side surface of which is provided with a guide groove, and the telescopic rod is arranged inside the guide groove.

6. The device for taking and placing a wafer box as claimed in claim 5, characterized in that: The shape of the telescopic rod is cylindrical; the shape of the guide groove is semi-cylindrical, and the guide groove is arranged along the axial direction of the guide block.

7. The device for taking and placing a wafer box as claimed in claim 5, characterized in that: The outline of the guide block is in the shape of a cuboid.

8. The device for taking and placing a wafer box as claimed in claim 1, characterized in that: The device also includes a second driving component, which is connected to the telescopic end of the telescopic guide rail.

9. The device for taking and placing a wafer box as claimed in claim 1, characterized in that: The positioning structure includes four right-angle positioning blocks, and the four right-angle positioning blocks are distributed according to the four vertex positions of a rectangle.

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