Detection device

Abstract

The utility model relates to a detection device. Comprising a base; the supporting mechanism is arranged on the base and is used for bearing a workpiece to be detected; the spectrum mechanism is arranged on the base and is used for detecting the spectrum of the workpiece; the power mechanism is arranged on the base and is used for detecting the light emitting power of the workpiece; the radio frequency mechanism is arranged on the base and is used for detecting the radio frequency of the workpiece; and the divergence angle mechanism is arranged on the base and is used for detecting the divergence angle of the workpiece. As the spectrum mechanism, the power mechanism, the radio frequency mechanism and the divergence angle mechanism are arranged on the base at the same time, the workpiece can be fixed on the supporting mechanism all the time, so that the spectrum mechanism, the power mechanism, the radio frequency mechanism and the divergence angle mechanism are used for detecting different parameters of the workpiece on the same supporting mechanism; therefore, the workpiece transfer time and the workpiece clamping time can be eliminated, and the workpiece detection efficiency of the detection device is finally improved.

Description

Technical Field

[0001] The present application relates to the field of detection technology, and in particular to a detection device. Background Art

[0002] Light-emitting chips can be used for signal transmission, making them widely used in the field of communication technology. Generally, it is necessary to detect parameters such as luminous power, spectrum, radio frequency and divergence angle through a detection device. However, for traditional detection devices, the detection time of the light-emitting chip will be prolonged, resulting in a defect of low detection efficiency. Summary of the invention

[0003] A technical problem solved by the present application is how to improve the detection efficiency of the detection device.

[0004] A detection device, comprising:

[0005] Pedestal;

[0006] A supporting mechanism, disposed on the base and used for carrying a workpiece to be inspected;

[0007] A spectral mechanism, arranged on the base and used for detecting the spectrum of the workpiece;

[0008] A power mechanism, disposed on the base and used to detect the luminous power of the workpiece;

[0009] A radio frequency mechanism, disposed on the base and used to detect the radio frequency of the workpiece; and

[0010] The divergence angle mechanism is arranged on the base and is used to detect the divergence angle of the workpiece.

[0011] In one embodiment, the support mechanism includes a support driving module, a support fine-tuning module and a support member, the support driving module is arranged on the base, the support fine-tuning module is arranged on the support driving module, the support member is arranged on the support fine-tuning module, the support driving module is used to drive the support fine-tuning module to move linearly along the Y-axis direction, and the support fine-tuning module is used to drive the support member to move linearly along the X-axis direction.

[0012] In one of the embodiments, an integrated driving module is further included, and both the spectral mechanism and the power mechanism are arranged on the integrated driving module, and the integrated driving module is used to drive the spectral mechanism and the power mechanism to move linearly along the X-axis direction.

[0013] In one embodiment, the power mechanism includes a power detection head connected to the integrated drive module, and the spectrum mechanism includes a spectrum detection head connected to the integrated drive module, and the power detection head and the spectrum detection head are spaced apart along the X-axis direction.

[0014] In one embodiment, the spectral mechanism also includes a first spectral driving module, a second spectral driving module and a third spectral driving module, the first spectral driving module is arranged on the integrated driving module, the second spectral driving module is arranged on the first spectral driving module, the third spectral driving module is arranged on the second spectral driving module, the spectral detection head is arranged on the third spectral driving module, the first spectral driving module is used to drive the second spectral driving module to move linearly along the Y-axis direction, the second spectral driving module is used to drive the third spectral driving module to move linearly along the X-axis direction, and the third spectral driving module is used to drive the spectral detection head to move linearly along the Z-axis direction.

[0015] In one embodiment, the RF mechanism includes a RF probe, a first RF fine-tuning module and a second RF fine-tuning module, the first RF fine-tuning module is connected to the base, the second RF fine-tuning module is arranged on the first RF fine-tuning module, and the RF probe is arranged on the second RF fine-tuning module. The first RF fine-tuning module is used to drive the second RF fine-tuning module to move linearly along the X-axis, Y-axis and Z-axis directions, and the second RF fine-tuning module is used to drive the RF probe to rotate around a rotating shaft extending along the X-axis.

[0016] In one embodiment, the radio frequency probe includes three contacts arranged at intervals.

[0017] In one embodiment, the divergence angle mechanism includes a transverse divergence angle component, which includes a transverse driver, a transverse swing arm and a transverse sensor. The transverse swing arm is provided with a transverse slit extending along the X-axis direction. The transverse driver is connected to the base. The transverse swing arm is arranged on the transverse driver. The transverse sensor is arranged on the transverse swing arm and receives light from the transverse slit. The transverse driver is used to drive the transverse swing arm to rotate around a rotating shaft extending along the X-axis direction.

[0018] In one embodiment, the divergence angle mechanism also includes a vertical divergence angle component, which includes a vertical driver, a vertical swing arm and a vertical sensor. The vertical swing arm is provided with a vertical slit extending along the Z-axis direction. The vertical driver is connected to the base. The vertical swing arm is arranged on the vertical driver. The vertical sensor is arranged on the vertical swing arm and receives light from the vertical slit. The vertical driver is used to drive the vertical swing arm to rotate around a rotating shaft extending along the Z-axis direction.

[0019] In one of the embodiments, three power-on mechanisms are further included, each of which includes a power-on fine-tuning module and a power-on probe, the power-on fine-tuning module is connected to the base, the power-on probe is arranged on the power-on fine-tuning module, and the power-on fine-tuning module is used to drive the power-on probe to move linearly along the X-axis, Y-axis and Z-axis directions.

[0020] A technical effect of an embodiment of the present application is: since the spectral mechanism, power mechanism, radio frequency mechanism and divergence angle mechanism are all arranged on the base at the same time, the workpiece can always be fixed on the supporting mechanism, so that the spectral mechanism, power mechanism, radio frequency mechanism and divergence angle mechanism can be used to detect different parameters of the workpiece on the same supporting mechanism, thereby eliminating the transfer time and clamping time of the workpiece, and ultimately improving the detection efficiency of the detection device on the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] FIG. 1 is a schematic diagram of the three-dimensional structure of a detection device provided in an embodiment.

[0022] FIG. 2 is a schematic diagram of a partial exploded structure of the detection device shown in FIG. 1 .

[0023] FIG. 3 is a schematic diagram of a partial three-dimensional structure of the detection device shown in FIG. 1 including a supporting mechanism.

[0024] FIG. 4 is a schematic diagram of a partial three-dimensional structure of the detection device shown in FIG. 1 including a power mechanism and a spectral mechanism.

[0025] FIG. 5 is a schematic diagram of the three-dimensional structure of the divergence angle mechanism in the detection device shown in FIG. 1 .

[0026] FIG. 6 is a schematic diagram of a partial three-dimensional structure of the detection device shown in FIG. 1 including a radio frequency mechanism and a power-on mechanism.

[0027] Figure numerals: detection device 10, workpiece 20, base 100, support mechanism 200, support drive module 210, support fine-tuning module 220, support member 230, spectrum mechanism 300, spectrum detection head 310, first spectrum drive module 321, second spectrum drive module 322, third spectrum drive module 323, power mechanism 400, power detection head 410, radio frequency mechanism 500, first radio frequency fine-tuning module 510, second radio frequency fine-tuning module 520, RF probe 530, contact 531, divergence angle mechanism 600, lateral emission angle assembly 610, lateral driver 611, lateral swing arm 612, lateral gap 6121, lateral sensor 613, vertical emission angle assembly 620, vertical driver 621, vertical swing arm 622, vertical gap 6221, vertical sensor 623, power-on mechanism 700, power-on fine-tuning module 710, power-on probe 720, integrated drive module 800. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0029] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0030] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0031] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0032] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0034] Referring to Figures 1, 2 and 3, a detection device 10 provided in an embodiment of the present application is used to detect a workpiece 20, and the workpiece 20 can be a chip capable of emitting light, which can be used in the field of signal transmission. The detection device 10 includes a base 100, a support mechanism 200, a spectrum mechanism 300, a power mechanism 400, a radio frequency mechanism 500, a divergence angle mechanism 600 and a power-on mechanism 700. The support mechanism 200, the spectrum mechanism 300, the power mechanism 400, the radio frequency mechanism 500, the divergence angle mechanism 600 and the power-on mechanism 700 are all arranged on the base 100, and the base 100 will serve as a carrier for the support mechanism 200, the spectrum mechanism 300, the power mechanism 400, the radio frequency mechanism 500, the divergence angle mechanism 600 and the power-on mechanism 700.

[0035] Referring to FIG. 1 , FIG. 2 and FIG. 3 , in some embodiments, the support mechanism 200 includes a support drive module 210, a support fine-tuning module 220 and a support member 230. The support drive module 210 is disposed on the base 100 , and the support drive module 210 may be a linear module, and the support fine-tuning module 220 is disposed on the support drive module 210 , and the support fine-tuning module 220 may be a manual micrometer, etc. The support drive module 210 is used to drive the support fine-tuning module 220 to perform linear motion along the Y-axis direction, and the support fine-tuning module 220 is used to drive the support member 230 to perform linear motion along the X-axis direction. The distance that the support fine-tuning module 220 uses to drive the support member 230 to move along the X-axis direction can be relatively small, so the support fine-tuning module 220 can be used to fine-tune the position of the support member 230 in the X-axis direction by a small distance. The support drive module 210 can drive the support fine-tuning module 220 to move a longer distance along the Y-axis direction. Therefore, through the action of the support driving module 210 and the support fine-tuning module 220, the support member 230 can make linear motion in the X-axis direction and the Y-axis direction. The support member 230 is used to carry the workpiece 20 to be tested. When the workpiece 20 is fixed on the support member 230, the workpiece 20 can move along the X-axis direction and the Y-axis direction following the support member 230. When the support member 230 moves along the Y-axis direction, the workpiece 20 can switch back and forth between the detection station and the pick-and-place station. The support member 230 can carry multiple workpieces 20 at the same time, and multiple workpieces 20 can be arranged on the support member 230 along the X-axis direction. When the support member 230 moves along the X-axis direction, multiple workpieces 20 can be placed in the detection station in turn, so that each workpiece 20 can be detected in the detection station in turn.

[0036] Referring to Fig. 2, Fig. 3 and Fig. 4, in some embodiments, the detection device 10 further includes an integrated driving module 800, on which both the spectrum mechanism 300 and the power mechanism 400 are arranged, and the integrated driving module 800 is used to drive the spectrum mechanism 300 and the power mechanism 400 to move linearly along the X-axis direction. When the integrated driving module 800 drives the spectrum mechanism 300 and the power mechanism 400 to move simultaneously, the spectrum mechanism 300 and the power mechanism 400 can be located near the detection station so as to detect the workpiece 20. The spectrum mechanism 300 is used to detect the spectrum of the light emitted by the workpiece 20, and the power mechanism 400 is used to detect the luminous power of the light emitted by the workpiece 20.

[0037] Referring to FIGS. 2, 3 and 4, the power mechanism 400 includes a power detection head 410, which is connected to the base 100. The power detection head 410 can receive light emitted from the workpiece 20 near the detection station, thereby detecting the luminous power of the light emitted by the workpiece 20. The spectrum mechanism 300 includes a spectrum detection head 310, which is connected to the base 100. The spectrum detection head 310 can receive light emitted from the workpiece 20 near the detection station, thereby detecting the spectrum of the light emitted by the workpiece 20. The power detection head 410 and the spectrum detection head 310 are arranged at intervals along the X-axis direction, so that the power detection head 410 and the spectrum detection head 310 can quickly detect different parameters of the workpiece 20.

[0038] Referring to Figures 2, 3 and 4, in some embodiments, the spectral mechanism 300 also includes a first spectral driving module 321, a second spectral driving module 322 and a third spectral driving module 323. The first spectral driving module 321 is arranged on the integrated driving module 800, the second spectral driving module 322 is arranged on the first spectral driving module 321, the third spectral driving module 323 is arranged on the second spectral driving module 322, and the spectral detection head 310 is arranged on the third spectral driving module 323. The first spectral driving module 321 is used to drive the second spectral driving module 322 to perform linear motion along the Y-axis direction, the second spectral driving module 322 is used to drive the third spectral driving module 323 to perform linear motion along the X-axis direction, and the third spectral driving module 323 is used to drive the spectral detection head 310 to perform linear motion along the Z-axis direction. Since the spectral detection head 310 is arranged on the third spectral driving module 323, the spectral detection head 310 can realize linear motion along the X-axis direction, the Y-axis direction and the Z-axis direction through the joint action of the first spectral driving module, the second spectral driving module 322 and the third spectral driving module 323.

[0039] In fact, when the integrated drive module 800 is working, the power detection head 410 and the spectrum detection head 310 can both make linear motion along the X-axis direction relative to the base 100. When the second spectrum drive module 322 is working, the spectrum detection head 310 can make linear motion along the X-axis direction relative to the power detection head 410, so that the spectrum detection head 310 moves closer to or away from the power detection head 410 along the X-axis direction. At the same time, through the action of the first spectrum drive module 321 and the third spectrum drive module 323, the spectrum detection head 310 makes linear motion along the Y-axis direction and the Z-axis direction relative to the power detection head 410, so that the spectrum detection head 310 moves closer to or away from the power detection head 410 along the Y-axis direction and the Z-axis direction. In this way, the position of the spectrum detection head 310 relative to the power detection head 410 in the X-axis direction, Y-axis direction and Z-axis direction can be well adjusted so that the power detection head 410 and the spectrum detection head 310 form a coupling relationship, thereby finding the optimal test position for detecting the workpiece 20, thereby improving the detection accuracy of both the power detection head 410 and the spectrum detection head 310.

[0040] Referring to FIG. 1 , FIG. 2 and FIG. 6 , in some embodiments, the radio frequency mechanism 500 includes a first radio frequency fine-tuning module 510, a second radio frequency fine-tuning module 520 and a radio frequency probe 530. The first radio frequency fine-tuning module 510 is connected to the base 100, the second radio frequency fine-tuning module 520 is arranged on the first radio frequency fine-tuning module 510, and the radio frequency probe 530 is arranged on the second radio frequency fine-tuning module 520. The first radio frequency fine-tuning module 510 is used to drive the second radio frequency fine-tuning module 520 to perform a small distance linear motion along the X-axis direction, the Y-axis direction and the Z-axis direction, so as to achieve the first radio frequency fine-tuning module 510 to fine-tune the position of the radio frequency probe 530 in the X-axis direction, the Y-axis direction and the Z-axis direction. The second radio frequency fine-tuning module 520 is used to drive the radio frequency probe 530 to rotate around the rotating shaft extending along the X-axis. Therefore, through the joint action of the first radio frequency fine-tuning module 510 and the second radio frequency fine-tuning module 520, the radio frequency probe 530 has four degrees of freedom. The RF probe 530 is used to detect the radio frequency of the workpiece 20. The RF probe 530 includes three contacts 531 arranged at intervals. During detection, the three contacts 531 of the RF probe 530 need to contact the workpiece 20. Therefore, by making the RF probe 530 move linearly along the X-axis direction, the Y-axis direction and the Z-axis direction, and rotating around the rotating shaft extending in the X-axis direction, the swing position of the RF probe 530 in the three-dimensional space can be reasonably adjusted to ensure that the three contacts 531 on the RF probe 530 can accurately contact the workpiece 20, thereby improving the reliability of the RF probe 530 in inspecting the radio frequency of the workpiece 20.

[0041] Referring to FIG. 1 , FIG. 2 and FIG. 5 , in some embodiments, the divergence angle mechanism 600 includes a transverse divergence angle assembly 610 , which includes a transverse driver 611 , a transverse swing arm 612 and a transverse sensor 613 , the transverse swing arm 612 is provided with a transverse slit 6121 , the transverse slit 6121 extends along the X-axis direction, the transverse driver 611 is connected to the base 100 , the transverse swing arm 612 is arranged on the transverse driver 611 , the transverse sensor 613 is arranged on the transverse swing arm 612 , the transverse sensor 613 is used to receive light from the transverse slit 6121 , and the transverse sensor 613 detects the divergence of light emitted by the workpiece 20 in the horizontal direction. The transverse driver 611 is used to drive the transverse swing arm 612 to rotate around a rotating shaft extending along the X-axis direction, and the transverse driver 611 can be a stepping motor or the like. When the transverse driver 611 is used to drive the transverse swing arm 612 to rotate around the rotation axis extending along the X-axis direction, the transverse sensor 613 detects the divergence of the light emitted by the workpiece 20 in the horizontal direction.

[0042] Referring to Fig. 1, Fig. 2 and Fig. 5, the divergence angle mechanism 600 includes a vertical divergence angle assembly 620, which includes a vertical driver 621, a vertical swing arm 622 and a vertical sensor 623. A vertical slit 6221 is provided on the vertical swing arm 622, and the vertical slit 6221 extends along the Z-axis direction. The vertical driver 621 is connected to the base 100, and the vertical swing arm 622 is arranged on the vertical driver 621. The vertical sensor 623 is arranged on the vertical swing arm 622. The vertical sensor 623 is used to receive light from the vertical slit 6221, and the vertical sensor 623 detects the divergence of the light emitted by the workpiece 20 in the vertical direction. The vertical driver 621 is used to drive the vertical swing arm 622 to rotate around a rotating shaft extending along the Z-axis direction, and the vertical driver 621 can be a stepping motor or the like. When the vertical driver 621 is used to drive the vertical swing arm 622 to rotate around the rotation axis extending along the Z-axis direction, the vertical sensor 623 detects the divergence of the light emitted by the workpiece 20 in the vertical direction.

[0043] Through the joint action of the lateral divergence angle assembly 610 and the vertical divergence angle assembly 620, the divergence angle mechanism 600 can detect the divergence of the light emitted by the workpiece 20 in the horizontal and vertical directions, and finally the divergence angle mechanism 600 can obtain the divergence angle of the light emitted by the workpiece 20.

[0044] Referring to FIG. 1 , FIG. 2 and FIG. 6 , in some embodiments, the number of the power-on mechanism 700 may be three, and a single power-on mechanism 700 is used to apply current and voltage to the workpiece 20. Each power-on mechanism 700 includes a power-on fine-tuning module 710 and a power-on probe 720. The power-on fine-tuning module 710 is connected to the base 100, and the power-on probe 720 is arranged on the power-on fine-tuning module 710. The power-on fine-tuning module 710 is used to drive the power-on probe 720 to move linearly along the X-axis, Y-axis and Z-axis directions. Therefore, through the action of the power-on fine-tuning module 710, the position of the power-on probe 720 in the three-dimensional space can be adjusted, so that the power-on probe 720 can power the workpiece 20 at an accurate position. It can be understood that after the power-on mechanism 700 powers the workpiece 20, the chip as the workpiece 20 will be able to emit light.

[0045] If the spectral mechanism 300, the power mechanism 400, the radio frequency mechanism 500 and the divergence angle mechanism 600 are distributed on different bases 100, after the workpiece 20 is tested for a parameter in one of the mechanisms, the workpiece 20 needs to be transferred to another mechanism for testing. This will result in more transfer time and clamping time for the workpiece 20, thereby affecting the detection efficiency of the workpiece 20.

[0046] As for the detection device 10 in the above embodiment, considering that the spectrum mechanism 300, the power mechanism 400, the radio frequency mechanism 500 and the divergence angle mechanism 600 are all arranged on the base 100 at the same time, and the workpiece 20 is always fixed on the support mechanism 200, the spectrum mechanism 300, the power mechanism 400, the radio frequency mechanism 500 and the divergence angle mechanism 600 can detect different parameters of the workpiece 20 on the same support mechanism 200, thereby eliminating the transfer time and clamping time of the workpiece 20, thereby ultimately improving the detection efficiency of the workpiece 20.

[0047] In some embodiments, the base 100 can be made of marble. The base 100 has a reasonable thickness and weight, so that the base 100 plays a good role in vibration absorption and isolation, and prevents the spectrum mechanism 300, the power mechanism 400, the radio frequency mechanism 500 and the divergence angle mechanism 600 from swinging during the detection process and failing to accurately receive the light of the workpiece 20, or failing to accurately contact the workpiece 20, thereby ultimately improving the detection accuracy and reliability of the detection device 10.

[0048] It should be noted that the X-axis direction, the Y-axis direction and the Z-axis direction are directions represented by the three coordinate axes of the spatial rectangular coordinate system. The X-axis direction and the Y-axis direction can be understood as two perpendicular directions in the horizontal plane, and the Z-axis direction can be understood as the vertical direction perpendicular to the horizontal plane.

[0049] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0050] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A detection device, characterized in that: include: Pedestal; A supporting mechanism, disposed on the base and used for carrying a workpiece to be inspected; A spectral mechanism, arranged on the base and used for detecting the spectrum of the workpiece; A power mechanism, disposed on the base and used to detect the luminous power of the workpiece; A radio frequency mechanism, disposed on the base and used to detect the radio frequency of the workpiece; and The divergence angle mechanism is arranged on the base and is used to detect the divergence angle of the workpiece.

2. The detection device according to claim 1, characterized in that: The support mechanism includes a support driving module, a support fine-tuning module and a support member, the support driving module is arranged on the base, the support fine-tuning module is arranged on the support driving module, the support member is arranged on the support fine-tuning module, the support driving module is used to drive the support fine-tuning module to move linearly along the Y-axis direction, and the support fine-tuning module is used to drive the support member to move linearly along the X-axis direction.

3. The detection device according to claim 1, characterized in that: It also includes an integrated driving module, on which both the spectral mechanism and the power mechanism are arranged, and the integrated driving module is used to drive the spectral mechanism and the power mechanism to move linearly along the X-axis direction.

4. The detection device according to claim 3, characterized in that: The power mechanism includes a power detection head connected to the integrated drive module, and the spectrum mechanism includes a spectrum detection head connected to the integrated drive module. The power detection head and the spectrum detection head are spaced apart along the X-axis direction.

5. The detection device according to claim 4, characterized in that: The spectral mechanism also includes a first spectral driving module, a second spectral driving module and a third spectral driving module. The first spectral driving module is arranged on the integrated driving module, the second spectral driving module is arranged on the first spectral driving module, the third spectral driving module is arranged on the second spectral driving module, and the spectral detection head is arranged on the third spectral driving module. The first spectral driving module is used to drive the second spectral driving module to move linearly along the Y-axis direction, the second spectral driving module is used to drive the third spectral driving module to move linearly along the X-axis direction, and the third spectral driving module is used to drive the spectral detection head to move linearly along the Z-axis direction.

6. The detection device according to claim 1, characterized in that: The RF mechanism includes a RF probe, a first RF fine-tuning module and a second RF fine-tuning module, the first RF fine-tuning module is connected to the base, the second RF fine-tuning module is arranged on the first RF fine-tuning module, and the RF probe is arranged on the second RF fine-tuning module. The first RF fine-tuning module is used to drive the second RF fine-tuning module to move linearly along the X-axis, Y-axis and Z-axis directions, and the second RF fine-tuning module is used to drive the RF probe to rotate around a rotating shaft extending along the X-axis.

7. The detection device according to claim 6, characterized in that: The radio frequency probe includes three contacts arranged at intervals.

8. The detection device according to claim 1, characterized in that: The divergence angle mechanism includes a transverse divergence angle component, which includes a transverse driver, a transverse swing arm and a transverse sensor. The transverse swing arm is provided with a transverse slit extending along the X-axis direction. The transverse driver is connected to the base. The transverse swing arm is arranged on the transverse driver. The transverse sensor is arranged on the transverse swing arm and receives light from the transverse slit. The transverse driver is used to drive the transverse swing arm to rotate around a rotating shaft extending along the X-axis direction.

9. The detection device according to claim 8, characterized in that: The divergence angle mechanism also includes a vertical divergence angle component, which includes a vertical driver, a vertical swing arm and a vertical sensor. The vertical swing arm is provided with a vertical slit extending along the Z-axis direction. The vertical driver is connected to the base, and the vertical swing arm is arranged on the vertical driver. The vertical sensor is arranged on the vertical swing arm and receives light from the vertical slit. The vertical driver is used to drive the vertical swing arm to rotate around a rotating shaft extending along the Z-axis direction.

10. The detection device according to claim 1, characterized in that: It also includes three power-on mechanisms, each of which includes a power-on fine-tuning module and a power-on probe, the power-on fine-tuning module is connected to the base, the power-on probe is arranged on the power-on fine-tuning module, and the power-on fine-tuning module is used to drive the power-on probe to move linearly along the X-axis, Y-axis and Z-axis directions.

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