High bias protection device of vacuum coating equipment

Abstract

The utility model discloses a high bias protection device of vacuum coating equipment. The high bias protection device comprises a main shaft, an insulation protection cover and an insulation pad, the insulating pad is sleeved on the main shaft, the screw penetrates through the screw gasket and the screw insulating pad to be connected and screwed with a threaded hole in the furnace body base, the insulating protective cover is connected to fixing threaded holes in the periphery of the furnace body base through the fixing screw, and one end of the high-bias power line is connected with the wiring nose and is connected with the conductive screw through the wiring nose. And the other end of the high-bias power line penetrates out of the insulating protective cover. Compared with the prior art, the high bias protection device has the beneficial effects that a coated product is safe, no short circuit of bias can be ensured, personal safety risks can be avoided, and the high bias protection device is safe, reliable, simple in structure, convenient to use, high in utilization rate and suitable for different vacuum coating devices.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a high bias voltage protection device of vacuum coating equipment. Background Art

[0002] At present, the main high bias voltage protection method used for vacuum coating equipment is to set up a gate fence. The characteristics of the gate fence are that it only has one protection and is unreliable. The gate fence needs to be opened for maintenance during equipment operation. The high bias voltage connection point at the bottom of the furnace is exposed to the outside, which can easily lead to high bias voltage instability and cause poor product performance in the entire furnace. It may even cause equipment short circuit, electric shock to maintenance personnel and other safety issues. Utility Model Content

[0003] The utility model aims to overcome the above technical deficiencies and provide a high bias voltage protection device for vacuum coating equipment which can avoid equipment short circuit and is safe, reliable, high in utilization rate and simple in convenience.

[0004] The technical solution adopted by the utility model to solve the technical problem is: a high bias voltage protection device for vacuum coating equipment, comprising a main shaft (1), an insulating protective cover (9) and an insulating pad (2), wherein the insulating pad (2) is sleeved on the main shaft (1), a screw (5) passes through a screw gasket (4) and a screw insulating pad (3) to be connected and tightened with a threaded hole (7) on a furnace body base (6), the insulating protective cover (9) is connected to the fixed threaded holes (8) around the furnace body base (6) through fixing screws (10), one end of a high bias voltage power line (12) is screwed into a high bias voltage connection threaded hole (11) at the center of the bottom of the main shaft (1) through a conductive screw (13), and the other end of the high bias voltage power line (12) passes through the insulating protective cover (9).

[0005] Furthermore, the insulating protective cover (9) is an organic insulating glass protective cover.

[0006] Furthermore, one end of the high bias power line (12) is connected to a wiring nose, and is connected to a conductive screw (13) via the wiring nose.

[0007] Compared with the prior art, the beneficial effects of the utility model are: the coating product of the utility model is safe, can ensure that the bias voltage is not short-circuited while avoiding personal safety risks. It is a safe and reliable high bias voltage protection device with a simple structure, easy to use, high utilization rate, and suitable for different vacuum coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solution of the implementation mode of the utility model, the drawings required for use in the implementation mode will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0009] Figure 1 It is a structural diagram of a high bias insulation protection device for vacuum ion plating equipment.

[0010] Figure 2 This is a structural diagram of the wiring nose.

[0011] In the figure: 1-spindle; 2-insulating pad; 3-screw insulating pad; 4-screw gasket; 5-screw; 6-furnace base; 7-screw hole; 8-fixing threaded hole; 9-insulating protection cover; 10-fixing screw; 11-high bias connection threaded hole; 12-high bias power line; 13-conductive screw. DETAILED DESCRIPTION

[0012] In order to make the purpose, technical solution and advantages of the implementation of the utility model clearer, the technical solution in the implementation of the utility model will be clearly and completely described below in conjunction with the drawings in the implementation of the utility model. Obviously, the described implementation is a part of the implementation of the utility model, not all of the implementations. Based on the implementation of the utility model, all other implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0013] like Figure 1 As shown, a high bias voltage protection device for vacuum coating equipment includes a main shaft 1, an insulating protective cover 9, and an insulating pad 2. The insulating pad 2 is sleeved on the main shaft 1, and the screw 5 passes through the screw gasket 4 and the screw insulating pad 3 and is connected and tightened with the threaded hole 7 on the furnace body base 6. The insulating protective cover 9 is connected to the fixed threaded holes 8 around the furnace body base 6 through the fixing screws 10. One end of the high bias voltage power line 12 is screwed into the high bias voltage connection threaded hole 11 at the bottom center of the main shaft 1 through the conductive screw 13, and the other end of the high bias voltage power line 12 passes through the insulating protective cover 9, and the insulating protective cover 9 is an organic insulating glass protective cover. One end of the high bias voltage power line 12 is connected to the wiring nose (such as Figure 2 As shown), it is connected to the conductive screw 13 through a wiring nose.

[0014] The method of using the utility model is as follows: first, the insulating pad 2 is sleeved on the main shaft 1, the screw 5 passes through the screw gasket 4 and the screw insulating pad 3 and is connected and tightened with the threaded hole 7, the high bias power line 12 with a wiring nose passes through the insulating protection cover 9 and is fixed to the high bias connection threaded hole 11 through the conductive screw 13, the insulating protection cover 9 is connected to the fixed threaded holes 8 around the furnace base 6 through the fixing screws 10, after the high bias power line 12 is energized, because the power connection point is on the inner side of the insulating protection cover 9, the insulating protection cover 9 is not conductive, the high bias power line 12 will not cross the insulating protection cover 9 to conduct electricity to the outside of the insulating protection cover 9, and the insulating pad 2 and the screw insulating pad 3 play an insulating role, thereby forming effective protection.

[0015] The above description is only the preferred implementation of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A high bias voltage protection device for vacuum coating equipment, characterized in that: The invention comprises a main shaft (1), an insulating protective cover (9) and an insulating pad (2), wherein the insulating pad (2) is sleeved on the main shaft (1), a screw (5) passes through a screw gasket (4) and a screw insulating pad (3) and is connected and tightened with a threaded hole (7) on a furnace body base (6), the insulating protective cover (9) is connected to the fixing threaded holes (8) around the furnace body base (6) through fixing screws (10), one end of a high bias power line (12) is screwed into a high bias connection threaded hole (11) at the center of the bottom of the main shaft (1) through a conductive screw (13), and the other end of the high bias power line (12) passes through the insulating protective cover (9), and one end of the high bias power line (12) is connected to a wiring nose and is connected to the conductive screw (13) through the wiring nose.

2. The high bias voltage protection device for vacuum coating equipment according to claim 1, characterized in that: The insulating protective cover (9) is an organic insulating glass protective cover.

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