Chuck guide post of electroplating machine

Abstract

The electroplating machine chuck guide column comprises an arc-shaped upper beam, an arc-shaped lower beam and a pair of arc-shaped beam columns, wherein the upper beam and the lower beam are in mirror images; the beam columns are symmetrically arranged between the upper beam and the lower beam and are respectively arranged on two sides; the upper ends of the beam columns are fixedly connected with the upper beams respectively, and the lower ends are fixedly connected with the lower beams respectively. Screw holes are respectively formed between the beam columns, the upper beam and the lower beam, the screw hole of the upper beam is used for fixedly connecting a steel plate, and the screw hole of the lower beam is used for fixedly connecting a chuck. And the guide column with the integrated structure and the guide part are flat and smooth, so that the downward pressing action friction of the cover plate is small, the action is smoother, and the wafer is better prevented from being subjected to concentrated stress. The integrated structure also saves covered edges and covered edge screws, reduces spare parts, is simpler and more convenient to maintain and disassemble, and improves the working efficiency; the problems of screw breakage and screw loosing caused by frequent disassembly are avoided, the covered edge and the screw are fixed in the horizontal direction, after simplification, the situation that the screw falls off and pollutes a plating solution during operation is reduced, the problems that the covered edge rotates at a high speed and the screw falls off are avoided, and high practicability and wide applicability are achieved.

Description

Technical Field

[0001] The invention relates to a guide column, in particular to a guide column for a chuck of an electroplating machine, and belongs to the technical field of semiconductor packaging. Background Art

[0002] Before horizontal electroplating, the cover plate needs to be pressed down to seal the wafer between the cover plate 3 and the chuck 5. When the cylinder pushes the cover plate down, it is necessary to ensure that the cover plate is level and the pressing action is smooth and without jamming, so that the wafer will not be subjected to concentrated stress during and after the cover plate is pressed down.

[0003] The basic structure is as follows Figure 1 As shown: the steel plate 2 is fixed on the rotating shaft of the rotating motor 1, the guide column 4 connects the chuck and the steel plate, and the cover plate is between the chuck and the steel plate. During operation, the cover plate is pressed down to seal the wafer and then pressed down with the chuck along with the steel plate.

[0004] like Figure 2 As shown, the guide column is composed of a connecting rod 6 and a rim 7. The connecting rod connects the chuck and the steel plate, and two rims are attached to each side of the connecting rod, and the rims are fixed with M2.5 screws to form the guide column.

[0005] At present, the guide column structure requires manual fixation of a pair of hems and tightening of screws during maintenance and disassembly. The screws are easy to slip out of the hands and fall into the plating solution, contaminating the plating solution. In addition, the screw threads are thin, and over-tightening the screws may cause problems such as breakage and stripping, making it inconvenient to disassemble. If the screws are not tightened, there is a risk of the hems and screws falling off during high-speed rotation. When the chuck rotates, the screws or hems falling off may cause scratches on the surface of the electroplated product and the risk of fragmentation.

[0006] The above risks and problems bring great difficulties to chuck maintenance and require a lot of energy.

[0007] Therefore, it is necessary to improve the guide column of the chuck of the electroplating machine. Summary of the invention

[0008] In order to solve the deficiencies of the prior art, the object of the present invention is to provide a chuck guide column for an electroplating machine.

[0009] In order to achieve the above object, the present invention adopts the following technical solution:

[0010] A chuck guide column for an electroplating machine, comprising an upper beam and a lower beam which are arc-shaped and mirror-imaged to each other, and a pair of arc-shaped beam columns;

[0011] The beams are symmetrically placed between the upper beam and the lower beam, and are placed on both sides respectively; the upper ends of the beams are fixedly connected to the upper beams, and the lower ends are fixedly connected to the lower beams;

[0012] The upper beam and the lower beam are respectively provided with screw holes between the beams and columns. The screw holes of the upper beam are used for fixing the steel plate, and the screw holes of the lower beam are used for fixing the chuck.

[0013] The upper beam, the lower beam and the pair of beam columns are an integrated structure.

[0014] For the upper beam and the lower beam, the cross section of the outer side surface of the above beam column is in an arc shape.

[0015] The above beams and columns are elliptical columns.

[0016] Corresponding to the 12-inch chuck, the center distance between adjacent screw holes is 41mm.

[0017] Corresponding to the 8-inch chuck, the center distance between adjacent screw holes is 27mm.

[0018] The present invention is beneficial in that:

[0019] The present invention provides a chuck guide column for an electroplating machine, which is simplified into an integrated structure, and the guide part is flat and smooth, so that the friction of the cover plate pressing down is small, the action is smoother, and the wafer is better protected from concentrated stress. The integrated structure also eliminates the need for hemming and hemming screws, reduces spare parts, makes maintenance and disassembly simpler and more convenient, and improves work efficiency; it avoids the problem of screw breakage and thread slippage caused by frequent disassembly, and the hemming and screws are fixed in the horizontal direction. After simplification, it not only reduces the problem of screw falling off and contaminating the plating solution during operation, but also avoids the problem of high-speed rotation hemming and screw falling, and has strong practicality and wide applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a diagram showing the position of the guide column in the overall structure.

[0021] Figure 2 Schematic diagram of the structure of the improved front guide column (Figure M1 does not include edging, Figure M2 includes edging).

[0022] Figure 3 This is a schematic diagram of the structure of the improved guide column.

[0023] Figure 4 This is a schematic diagram of the relative structure of the improved guide column, cover plate and chuck.

[0024] Figure 5 Schematic diagram of the positions of the screw holes of the steel plate after improvement (A2 and A3 represent the relative positions of the screw holes before improvement).

[0025] Figure 6 Schematic diagram of the position of the screw holes of the improved chuck (A2 and A3 represent the relative positions of the screw holes before improvement).

[0026] The meanings of the symbols in the accompanying drawings are as follows: 1. rotating motor, 2. steel plate, 3. cover plate, 4. guide column, 5. chuck, 6. connecting rod, 7. hemming; 8. upper beam, 9. lower beam, 10. beam column;

[0027] A1, A2, A3, screw holes before improvement,

[0028] B1, B2, improved screw holes. DETAILED DESCRIPTION

[0029] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] A chuck guide column for an electroplating machine is composed of an upper beam 8, a lower beam 9 and a pair of beam columns 10.

[0031] The upper and lower beams are curved and mirror images of each other.

[0032] A pair of beam columns are arranged between the upper beam and the lower beam and are arranged on both sides respectively. The upper ends of the beam columns are respectively fixedly connected to the bottom surface of the upper beam, and the lower ends are respectively fixedly connected to the top surface of the lower beam.

[0033] In the fixed state, the curvature of the beam column is the same as the curvature of the upper beam or lower beam on the same side, and the cross section of the outer side of the beam column is in an arc shape.

[0034] Preferably, the upper beam, the lower beam and the pair of beam columns are an integrated structure.

[0035] Preferably, the above-mentioned beam column is an elliptical column.

[0036] Between the beams and columns, the upper beam and the lower beam are respectively provided with screw holes (A1, B1, B2), the screw holes of the upper beam are used for fixing the steel plate, and the screw holes of the lower beam are used for fixing the chuck.

[0037] Take a 12-inch chuck as an example. Figure 5 As shown:

[0038] 12-inch chuck steel plate: 2 new screw holes. The original 12-inch steel plate screw holes are A1, A2, A3, and the new screw holes are B1 and B2. After improvement, the holes A1, B1, B2 are used to connect with the guide column. The center distance between screw hole A1 and screw holes B1 and B2 is 41mm.

[0039] 12-inch chuck: Before the improvement, the screw holes of the 12-inch chuck were A1, A2, and A3. After the improvement, Figure 6 As shown, the screw holes are A1, B1, and B2, and new screw holes are used to connect with the guide columns.

[0040] 12-inch guide column: The connecting rod before improvement is "Ⅱ" shaped, and the improved guide column is an integrated structure. The outer dimensions remain unchanged, and the left and right sides are improved to elliptical columns, and the screw holes are consistent with the chuck scheme.

[0041] That is, the improved integrated guide column has both connection and guiding functions, and the guide column before the improvement is composed of a connecting rod and an edge.

[0042] Take the 8-inch chuck as an example:

[0043] 8-inch chuck steel plate: The original screw holes can be retained, and 2 new screw holes are added to be compatible with different versions of chucks. Before the improvement, the screw holes of the 8-inch steel plate are A1, A2, and A3, among which the center distance between screw holes A1 and A2, and screw holes A1 and A3 is 42mm, and new screw holes B1 and B2 are added.

[0044] After the addition, the center distance between screw holes A1 and B1, A1 and B2 is 27mm. After the addition, use screw holes A1, B1, B2 to connect with the guide column.

[0045] 8-inch chuck: The screw holes of the 8-inch chuck before improvement are A1, A2, and A3. The screw holes after improvement are A1, B1, and B2. Use the new screw holes to connect with the guide column.

[0046] 8-inch guide column: The original structure is in the shape of "Ⅱ", the external dimensions remain unchanged, and the center spacing of the screw holes becomes 27mm.

[0047] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the above embodiments do not limit the present invention in any form, and any technical solution obtained by equivalent replacement or equivalent transformation falls within the protection scope of the present invention.

Claims

1. A chuck guide column for an electroplating machine, characterized in that: It includes an upper beam and a lower beam which are arc-shaped and mirror-imaged to each other, and a pair of arc-shaped beam columns; The beams are symmetrically placed between the upper beam and the lower beam, and are placed on both sides respectively; the upper ends of the beams are fixedly connected to the upper beams, and the lower ends are fixedly connected to the lower beams; The upper beam and the lower beam are respectively provided with screw holes between the beams and columns. The screw holes of the upper beam are used for fixing the steel plate, and the screw holes of the lower beam are used for fixing the chuck.

2. The electroplating machine chuck guide column according to claim 1, characterized in that: The upper beam, the lower beam and a pair of beam columns are an integrated structure.

3. The electroplating machine chuck guide column according to claim 1, characterized in that: For the upper beam and the lower beam, the cross section of the outer side of the beam column is in an arc shape.

4. The electroplating machine chuck guide column according to claim 1, characterized in that: The beam column is an elliptical column.

5. The electroplating machine chuck guide column according to claim 1, characterized in that: Corresponding to the 12-inch chuck, the center distance between adjacent screw holes is 41mm.

6. The electroplating machine chuck guide column according to claim 1, characterized in that: Corresponding to the 8-inch chuck, the center distance between adjacent screw holes is 27mm.

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