Cooling and heating device and CVD (Chemical Vapor Deposition) substrate table

Abstract

The utility model discloses a cooling and heating device and CVD substrate table relates to CVD substrate table processing technical field, including device seat and exhaust subassembly, the top center of device seat is equipped with lower device group, the exhaust subassembly is equipped with lower device group one side lower end, and the top of lower device group is connected with upper device group, and the upper device group is connected with lower device group. One side of the upper device set is connected with a connecting hose, and an air conditioner is installed at the end, away from the upper device set, of the connecting hose. According to the cooling and heating device and the CVD substrate table, the exhaust assembly is mounted on one side of the lower device group, so that an effective ventilation effect can be effectively provided when the lower device group and the upper device group are used for heating or cooling the internal substrate table, the interior of the whole lower bin body and the interior of the whole upper bin body can be quickly cooled, and meanwhile, the cooling effect of the lower bin body and the upper bin body can be improved. And the internal heat can be quickly conducted, so that the heat in the whole lower bin body and the upper bin body is uniform, and the substrate table can be conveniently processed as required.

Description

Technical Field

[0001] The utility model relates to the technical field of CVD substrate stage processing, in particular to a cooling and heating device and a CVD substrate stage. Background Art

[0002] CVD equipment refers to chemical vapor deposition equipment, which is used to grow single crystal or polycrystalline diamond materials. In the chemical vapor deposition equipment, a cooling and heating device is required to cool and heat the CVD substrate stage.

[0003] When a conventional cooling and heating device heats or cools a substrate stage, the hot and cold air flows it generates are limited by the internal structure of the device, so that the temperature transfer requires a certain amount of time, and the entire processing process is relatively time-consuming.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a cooling and heating device and a CVD substrate stage are proposed. Utility Model Content

[0005] The utility model aims to provide a cooling and heating device and a CVD substrate stage to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a cooling and heating device and a CVD substrate stage, comprising a device seat and an exhaust assembly, a lower device group is installed at the top center of the device seat, the exhaust assembly is installed at the lower end of one side of the lower device group, and the top of the lower device group is connected to the upper device group, and one side of the upper device group is connected to a connecting hose, and an air cooler is installed at one end of the connecting hose away from the upper device group, the exhaust assembly comprises a centrifugal fan, a filter tube, a connecting flange and fixing bolts, one end of the centrifugal fan is connected to the filter tube, and the end of the filter tube away from the centrifugal fan is provided with a connecting flange, and one end of the connecting flange is horizontally installed with a fixing bolt.

[0007] Furthermore, the lower device group includes a lower warehouse body, a connecting flange, a servo motor and a stabilizing pile. A connecting flange is provided at one end of the lower warehouse body, and servo motors are installed on both sides of the lower warehouse body, and a stabilizing pile is provided above the servo motor.

[0008] Furthermore, the lower device group also includes a screw, a storage rack and an electric heating arc. The top power output end of the servo motor is vertically installed with a screw through a coupling, the internal upper section of the lower warehouse body is horizontally provided with a storage rack, and the internal bottom side of the lower warehouse body is installed with an electric heating arc.

[0009] Furthermore, the lead screw is threadedly connected to the stabilizing pile, the storage grid is movably installed inside the lower warehouse body, and the structures of the connecting flange and the connecting flange match each other.

[0010] Furthermore, the upper device group includes an upper warehouse body, a bearing seat and a dehumidifier. The bearing seats are installed on both sides of the upper warehouse body, and the top of the upper warehouse body is connected to the dehumidifier.

[0011] Furthermore, the upper device group also includes a control valve and a pressure relief valve. The control valve is installed at one end of the dehumidifier away from the upper warehouse body, and the bottom of the control valve is connected to the pressure relief valve.

[0012] Furthermore, the bearing seat and the lead screw are threadedly connected, one end of the connecting hose away from the air conditioner is connected to one side of the control valve, and the air conditioner is installed on one side of the device seat.

[0013] A CVD substrate stage is provided with the cooling and heating device as described above.

[0014] The utility model provides a cooling and heating device and a CVD substrate stage, which have the following beneficial effects:

[0015] 1. In the utility model, after the lower device group and the upper device group structure are closed to each other, a closed structural space is formed inside the two. When it is necessary to heat the substrate table placed inside and on the surface of the storage rack, as the electric heating arc is started and high temperature is generated, the centrifugal fan will provide air supply to the interior of the lower bin body and the upper bin body, so that the heat transfer can be quickly carried out inside the lower bin body and the upper bin body, so that the interior can be heated up to the required temperature faster. When it is necessary to cool the interior, the low-temperature airflow generated by the air conditioner is transported to the interior of the lower bin body and the upper bin body through the connecting hose. At the same time, the centrifugal fan will quickly discharge the residual heat inside the original structure to the outside, and at the same time guide the transported cold air from top to bottom to the interior of the entire lower bin body and the upper bin body, so as to achieve a rapid cooling effect. The use of the above structure can ensure that whether it is heating or cooling, it can quickly and effectively reach the required temperature, so as to flexibly heat or cool the substrate table, thereby ensuring work efficiency.

[0016] 2. In the utility model, by arranging a filter tube between the centrifugal fan and the lower warehouse body, whether it is to transport the external airflow to the interior of the lower device group and the upper device group, or to transport the gas inside the lower device group and the upper device group to the outside, it will neither affect the external environment nor the processing of the substrate stage. In addition, by connecting the bearing seats on both sides of the upper warehouse body to the lead screw, the servo motor can drive the lead screw to rotate vertically axially, so that the entire upper device group can be lifted up and down along the surface of the lead screw. The use of the above structure can not only ensure the sealing and stability of the structure after the upper device group and the lower device group are connected, but also assist the operator to separate the lower device group and the upper device group, so that the convenience of use is ensured while saving time and effort. The use of the connecting hose can effectively transport cold air without causing structural interference, avoiding affecting the structural activity between the upper device group and the lower device group. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the side view of the cooling and heating device and the CVD substrate stage of the utility model;

[0018] Figure 2 This is a schematic diagram of the internal structure of a cooling and heating device and a lower device group of a CVD substrate stage of the utility model;

[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of an exhaust assembly of a cooling and heating device and a CVD substrate stage of the utility model;

[0020] Figure 4 The utility model is a three-dimensional structural schematic diagram of a cooling and heating device and an upper device group of a CVD substrate table.

[0021] In the figure: 1. device base; 2. lower device group; 201. lower warehouse body; 202. connecting flange; 203. servo motor; 204. stabilizing pile; 205. lead screw; 206. storage grid; 207. electric heating arc; 3. exhaust assembly; 301. centrifugal fan; 302. filter tube; 303. connecting flange; 304. fixing bolt; 4. upper device group; 401. upper warehouse body; 402. bearing seat; 403. dehumidifier; 404. control valve; 405. pressure relief valve; 5. connecting hose; 6. air conditioner. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0023] like Figures 1 to 4As shown, a cooling and heating device and a CVD substrate stage include a device seat 1 and an exhaust assembly 3. A lower device group 2 is installed at the top center of the device seat 1. The exhaust assembly 3 is installed at the lower end of one side of the lower device group 2. The top of the lower device group 2 is connected to an upper device group 4. A connecting hose 5 is connected to one side of the upper device group 4. An air cooler 6 is installed at one end of the connecting hose 5 away from the upper device group 4. The exhaust assembly 3 includes a centrifugal fan 301, a filter tube 302, a connecting flange 303 and a fixing bolt 304. One end of the centrifugal fan 301 is connected to the filter tube 302, and the filter tube A connecting flange 303 is provided at one end of 302 away from the centrifugal fan 301, and a fixing bolt 304 is horizontally installed at one end of the connecting flange 303. The lower device group 2 includes a lower warehouse body 201, a connecting flange 202, a servo motor 203 and a stabilizing pile 204. A connecting flange 202 is provided at one end of the lower warehouse body 201, and servo motors 203 are installed on both sides of the lower warehouse body 201, and a stabilizing pile 204 is provided above the servo motor 203. The lower device group 2 also includes a lead screw 205, a storage grid 206 and an electric heating arc 207. The top power of the servo motor 203 The output end is vertically installed with a lead screw 205 through a coupling, a storage grid 206 is horizontally arranged on the upper section of the lower bin body 201, and an electric heating arc 207 is installed on the bottom side of the lower bin body 201. The lead screw 205 is threadedly connected to the stabilizing pile 204, and the storage grid 206 is movably installed inside the lower bin body 201. The structures of the connecting flange 303 and the connecting flange 202 match each other. When it is necessary to heat the substrate table placed on the surface of the storage grid 206 inside, as the electric heating arc 207 is started and generates high temperature, the centrifugal fan 301 will heat the lower bin body. 201 and the upper warehouse body 401 provide air supply, so that the interior of the lower warehouse body 201 and the upper warehouse body 401 can be quickly heat transferred, so that the interior can be heated up to the required temperature more quickly. When the interior needs to be cooled, the low-temperature airflow generated by the air conditioner 6 is transported to the interior of the lower warehouse body 201 and the upper warehouse body 401 through the connecting hose 5. At the same time, the centrifugal fan 301 will quickly discharge the residual heat inside the original structure to the outside, and at the same time guide the transported cold air from top to bottom to the interior of the entire lower warehouse body 201 and the upper warehouse body 401, so as to achieve a rapid cooling effect.

[0024] like Figures 1 to 4As shown, the upper device group 4 includes an upper warehouse body 401, a bearing seat 402 and a dehumidifier 403. The bearing seats 402 are installed on both sides of the upper warehouse body 401, and the top of the upper warehouse body 401 is connected to the dehumidifier 403. The upper device group 4 also includes a control valve 404 and a pressure relief valve 405. The end of the dehumidifier 403 away from the upper warehouse body 401 is installed with the control valve 404, and the bottom of the control valve 404 is connected to the pressure relief valve 405. The bearing seat 402 is threadedly connected to the lead screw 205, and the end of the connecting hose 5 away from the air conditioner 6 is connected to the control valve 404. 4, and the air cooler 6 is installed on one side of the device base 1. By setting the filter tube 302 between the centrifugal fan 301 and the lower warehouse body 201, whether the external airflow is transported to the interior of the lower device group 2 and the upper device group 4, or the gas inside the lower device group 2 and the upper device group 4 is transmitted to the outside, it will not affect the external environment and will not affect the processing of the substrate stage. In addition, the servo motor 203 can drive the screw 205 to rotate vertically, so that the entire upper device group 4 can be lifted up and down along the surface of the screw 205.

[0025] A CVD substrate stage is provided with a cooling and heating device as described above. By installing an exhaust assembly 3 on one side of a lower device group 2, the lower device group 2 and the upper device group 4 can be effectively assisted in providing effective ventilation when heating or cooling the internal substrate stage. This can not only allow the entire lower bin body 201 and the upper bin body 401 to dissipate heat quickly inside, but also ensure that the internal heat can be quickly conducted, thereby making the heat inside the entire lower bin body 201 and the upper bin body 401 uniform, so as to facilitate the required processing of the substrate stage.

[0026] In summary, if Figures 1 to 4 As shown, when the cooling and heating device and the CVD substrate stage are used, the substrate stage to be processed is first placed on the surface of the storage rack 206 inside the lower warehouse body 201, and then the servo motors 203 on both sides of the lower warehouse body 201 are started. At this time, the lead screw 205 vertically passing through the stabilizing pile 204 is driven by the servo motor 203, and the lead screw 205 will rotate axially in the vertical direction, thereby driving the upper warehouse body 401 connected thereto through the bearing seat 402 to move vertically downward, and until the lower device group 2 and the upper device group 4 are structurally docked and closed;

[0027] Then, the electric heating arc 207 inside the lower bin body 201 is started to heat the substrate table on the surface of the storage rack 206. At the same time, the centrifugal fan 301 connected to the connecting flange 202 through the connecting flange 303 and the fixing bolt 304 starts to operate synchronously. Under the filtration and purification of the filter tube 302, the external air will be quickly transported to the lower device group 2 and the upper device group 4 until it is heated to the required degree.

[0028] When the substrate stage needs to be cooled quickly, as the air cooler 6 on one side of the device base 1 operates, the low-temperature airflow generated will be transported to the dehumidifier 403 through the control valve 404 along the connecting hose 5. Under the operation of the dehumidifier 403, the moisture in the low-temperature airflow will be removed and injected into the lower device group 2 and the upper device group 4.

[0029] At this time, under the operation of the centrifugal fan 301, the residual heat inside the lower device group 2 and the upper device group 4 will be quickly extracted and discharged to the outside. During this process, the low-temperature airflow treated by the dehumidifier 403 will be guided from top to bottom, so as to quickly flow through the entire lower device group 2 and the upper device group 4, thereby quickly cooling down.

[0030] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A cooling and heating device, comprising a device base (1) and an exhaust assembly (3), characterized in that: A lower device group (2) is installed at the center of the top of the device base (1); the exhaust assembly (3) is installed at the lower end of one side of the lower device group (2); the top of the lower device group (2) is connected to the upper device group (4); a connecting hose (5) is connected to one side of the upper device group (4); and an air cooler (6) is installed at one end of the connecting hose (5) away from the upper device group (4); the exhaust assembly (3) comprises a centrifugal fan (301), a filter tube (302), a connecting flange (303) and a fixing bolt (304); one end of the centrifugal fan (301) is connected to the filter tube (302); the end of the filter tube (302) away from the centrifugal fan (301) is provided with a connecting flange (303); and a fixing bolt (304) is horizontally installed at one end of the connecting flange (303).

2. A cooling and heating device according to claim 1, characterized in that: The lower device group (2) comprises a lower warehouse body (201), a connecting flange (202), a servo motor (203) and a stabilizing pile (204); a connecting flange (202) is provided at one end of the lower warehouse body (201), servo motors (203) are installed on both sides of the lower warehouse body (201), and a stabilizing pile (204) is provided above the servo motor (203).

3. A cooling and heating device according to claim 2, characterized in that: The lower device group (2) further comprises a lead screw (205), a storage grid (206) and an electric heating arc (207); the lead screw (205) is vertically mounted on the top power output end of the servo motor (203) via a coupling; the storage grid (206) is horizontally mounted on the upper inner end of the lower warehouse body (201); and the electric heating arc (207) is mounted on the inner bottom side of the lower warehouse body (201).

4. A cooling and heating device according to claim 3, characterized in that: The lead screw (205) is threadedly connected to the stabilizing pile (204), the storage grid (206) is movably installed inside the lower warehouse body (201), and the structures of the connecting flange (303) and the connecting flange (202) match each other.

5. A cooling and heating device according to claim 3, characterized in that: The upper device group (4) comprises an upper warehouse body (401), a bearing seat (402) and a dehumidifier (403); the bearing seats (402) are installed on both sides of the upper warehouse body (401), and the top of the upper warehouse body (401) is connected to the dehumidifier (403).

6. A cooling and heating device according to claim 5, characterized in that: The upper device group (4) further comprises a control valve (404) and a pressure relief valve (405); the control valve (404) is installed at one end of the dehumidifier (403) away from the upper warehouse body (401), and the bottom of the control valve (404) is connected to the pressure relief valve (405).

7. A cooling and heating device according to claim 6, characterized in that: The bearing seat (402) and the lead screw (205) are threadedly connected, and the end of the connecting hose (5) away from the air cooler (6) is connected to one side of the control valve (404), and the air cooler (6) is installed on one side of the device seat (1).

8. A CVD substrate stage, characterized in that: The CVD substrate stage is equipped with a cooling and heating device as described in any one of claims 1-7.

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