Multi-angle adjustable scanning electron microscope

Abstract

The utility model discloses a multi-angle adjustable scanning electron microscope, and relates to the technical field of scanning electron microscopes. The device comprises a shell, and a movable table is connected into the shell in a sliding mode. Through the connection of the electric push rod and the transverse moving assembly, the electric push rod pushes the transverse moving assembly to move upwards when stretching out, and the electric push rod retracts to drive the transverse moving assembly to move downwards; the transverse moving assembly can drive the longitudinal moving assembly to drive the moving table and the bearing table to transversely move on the surface of the transverse moving assembly, the longitudinal moving assembly can drive the moving table and the bearing table to longitudinally move on the surface of the longitudinal moving assembly, and the longitudinal moving assembly and the transverse moving assembly are matched to change the horizontal position of the bearing table. The overturning assembly drives the connecting assembly and the bearing table to overturn left and right, the angle between the bearing table and the scanning mirror can be changed, the rotating assembly drives the bearing table to rotate, and the scanning mirror can detect different positions of a sample on the bearing table.

Description

Technical Field

[0001] The utility model belongs to the technical field of scanning electron microscopes, and in particular relates to a scanning electron microscope with multi-angle adjustment. Background Art

[0002] Scanning electron microscopy is an observation method between transmission electron microscopy and optical microscopy. It uses a focused, narrow high-energy electron beam to scan samples, and stimulates various physical information through the interaction between the beam and the material. This information is collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material.

[0003] In the prior art, after the integrated circuit is photolithographically processed, it needs to be placed under a scanning electron microscope for stripe width detection. Some scanning electron microscopes can only measure the etching size from a certain angle and the observation angle of the scanning electron microscope cannot be changed. In this case, the measured size data is also relatively limited and there will be errors. The accuracy and reliability of the data cannot be guaranteed, and therefore, the production quality requirements cannot be met.

[0004] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content

[0005] In view of the problems in the related art, the utility model proposes a scanning electron microscope with multi-angle adjustment to overcome the above technical problems existing in the existing related art.

[0006] In order to solve the above technical problems, the utility model is achieved through the following technical solutions:

[0007] The utility model discloses a scanning electron microscope with multi-angle adjustment, comprising a shell, a moving platform is slidably connected to the inside of the shell, a scanning mirror is fixedly connected to the inside of the shell, a flip assembly is fixedly connected to the top of the moving platform, a connecting assembly is fixedly connected to the outer surface of the flip assembly, the connecting assembly is located at the top of the moving platform, a rotating assembly is fixedly connected to the inside of the connecting assembly, a supporting platform is fixedly connected to the outer surface of the rotating assembly, a longitudinal moving assembly is arranged at the bottom of the moving platform, a transverse moving assembly is arranged at the bottom of the longitudinal moving assembly, an electric push rod is fixedly connected to the bottom of the transverse moving assembly, and the fixed end of the electric push rod is fixedly connected to the inside of the shell.

[0008] Furthermore, the flip assembly includes a flip motor, the output shaft end of the flip motor is fixedly connected to a first bevel gear, the outer surface of the first bevel gear is meshed with a second bevel gear, and the outer surface of the second bevel gear is fixedly connected to a rotating shaft.

[0009] Furthermore, the connection assembly includes a support plate, the support plate is rotatably connected to the rotating shaft, and the outer surface of the rotating shaft is fixedly connected to a turning table.

[0010] Furthermore, the rotating assembly includes a rotating motor, a square groove is opened inside the flip table, the rotating motor is located inside the square groove, the output shaft end of the rotating motor is fixedly connected to a rotating seat, and the rotating seat is fixedly connected to the supporting platform.

[0011] Furthermore, the longitudinal movement assembly includes a longitudinal movement platform, an outer surface of the longitudinal movement platform is fixedly connected to a longitudinal movement motor, an output shaft end of the longitudinal movement motor is fixedly connected to a first screw, and the first screw is threadedly connected to the moving platform.

[0012] Furthermore, the transverse shift assembly includes a transverse shift platform, a transverse shift motor is fixedly connected to the outer surface of the transverse shift platform, a second screw is fixedly connected to the output shaft end of the transverse shift motor, and the second screw is threadedly connected to the longitudinal shift platform.

[0013] Furthermore, a door panel is rotatably connected to the outer surface of the shell, and a console is fixedly connected to the outer surface of the shell.

[0014] The utility model has the following beneficial effects:

[0015] 1. The utility model connects the electric push rod and the transverse moving assembly. When the electric push rod is extended, it pushes the transverse moving assembly to move upward, and when the electric push rod is retracted, it drives the transverse moving assembly to move downward. Through the connection between the transverse moving assembly and the longitudinal moving assembly, the transverse moving assembly can drive the longitudinal moving assembly to drive the mobile table and the supporting table to move laterally on the surface of the transverse moving assembly, and the longitudinal moving assembly can drive the mobile table and the supporting table to move longitudinally on the surface of the longitudinal moving assembly. The cooperation between the longitudinal moving assembly and the transverse moving assembly can change the horizontal position of the supporting table, the flipping assembly drives the connecting assembly and the supporting table to flip left and right, and can change the angle between the supporting table and the scanning mirror. The rotating assembly drives the supporting table to rotate, so that the scanning mirror can detect different positions of the sample on the supporting table, so as to obtain more comprehensive and accurate dimensional data.

[0016] 2. The utility model connects the second screw with the longitudinal moving platform, and the transverse moving motor drives the second screw to rotate, which can drive the longitudinal moving platform to move. The utility model connects the first screw with the mobile platform, and the transverse moving motor drives the first screw to rotate, which can drive the mobile platform to move. Both the longitudinal moving platform and the mobile platform can drive the supporting platform to move, so that the scanning mirror can detect different positions of the sample on the supporting platform. Through the meshing of the first bevel gear and the second bevel gear, the first bevel gear can be rotated by the flipping motor, so that the second bevel gear and the rotating shaft can rotate synchronously, and the rotating shaft drives the flipping platform and the supporting platform to flip left and right. At the same time, the rotating motor in the flipping platform drives the rotating seat and the supporting platform to rotate horizontally, which can change the angle between the sample on the supporting platform and the scanning mirror.

[0017] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the utility model embodiments, the drawings required for describing the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 It is a schematic diagram of the external contour structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the cross-sectional structure of the shell of the utility model;

[0021] Figure 3 For the utility model Figure 2 A schematic diagram of the structure enlargement in the middle;

[0022] Figure 4 It is a schematic cross-sectional structure diagram of the turning table of the utility model.

[0023] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0024] 1. Shell; 2. Moving plate; 3. Scanning mirror; 4. Flip assembly; 401. Flip motor; 402. First bevel gear; 403. Second bevel gear; 404. Rotating shaft; 5. Connecting assembly; 501. Support plate; 502. Flipping table; 6. Rotating assembly; 601. Rotating motor; 602. Square groove; 603. Rotating seat; 7. Supporting table; 8. Longitudinal movement assembly; 801. Longitudinal movement table; 802. Longitudinal movement motor; 803. First screw; 9. Transverse movement assembly; 901. Transverse movement table; 902. Transverse movement motor; 903. Second screw; 10. Electric push rod; 11. Door panel; 12. Control console. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present utility model, it should be understood that the terms "opening", "upper", "lower", "top", "middle", "inside" and the like indicating orientation or positional relationship are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0027] See also Figure 1-Figure 4 As shown, the utility model is a scanning electron microscope with multi-angle adjustment, comprising a shell 1, a moving platform 2 is slidably connected to the inside of the shell 1, a scanning mirror 3 is fixedly connected to the inside of the shell 1, a flip component 4 is fixedly connected to the top of the moving platform 2, a connecting component 5 is fixedly connected to the outer surface of the flip component 4, the connecting component 5 is located at the top of the moving platform 2, a rotating component 6 is fixedly connected to the inside of the connecting component 5, a supporting platform 7 is fixedly connected to the outer surface of the rotating component 6, a longitudinal movement component 8 is arranged at the bottom of the moving platform 2, a transverse movement component 9 is arranged at the bottom of the longitudinal movement component 8, an electric push rod 10 is fixedly connected to the bottom of the transverse movement component 9, and the fixed end of the electric push rod 10 is fixedly connected to the inside of the shell 1.

[0028] Place the sample on the mobile table 2, start the electric push rod 10 to push the transverse movement component 9 and the longitudinal movement component 8 to drive the mobile table 2 to move up and down, adjust the height of the mobile table 2 and the sample, start the transverse movement component 9 to drive the mobile table 2 to move left and right to adjust its transverse position, start the longitudinal movement component 8 to drive the mobile table 2 to move back and forth to adjust its longitudinal position, start the flipping component 4 on the mobile table 2 to make it drive the connecting component 5 to flip, the connecting component 5 drives the rotating component 6 and the supporting table 7 to flip left and right, start the rotating component 6 to make it drive the supporting table 7 to rotate horizontally, the flipping component 4, the rotating component 6, the longitudinal movement component 8 and the transverse movement component 9 cooperate with each other to move, which can change the relative position between the supporting table 7 and the scanning mirror 3, so that the scanning mirror 3 can observe and detect the sample on the supporting table 7 from different angles.

[0029] The utility model connects the electric push rod 10 and the transverse movement component 9. When the electric push rod 10 is extended, it pushes the transverse movement component 9 to move upward. When the electric push rod 10 is retracted, it drives the transverse movement component 9 to move downward. Through the connection between the transverse movement component 9 and the longitudinal movement component 8, the transverse movement component 9 can drive the longitudinal movement component 8 to drive the movable table 2 and the supporting table 7 to move laterally on the surface of the transverse movement component 9. The longitudinal movement component 8 can drive the movable table 2 and the supporting table 7 to move longitudinally on the surface of the longitudinal movement component 8. The longitudinal movement component 8 and the transverse movement component 9 cooperate with each other to change the horizontal position of the supporting table 7. The flip component 4 drives the connecting component 5 and the supporting table 7 to flip left and right, which can change the angle between the supporting table 7 and the scanning mirror 3. The rotating component 6 drives the supporting table 7 to rotate, so that the scanning mirror 3 can detect different positions of the sample on the supporting table 7.

[0030] In one embodiment, for the above-mentioned flip motor 401, the flip assembly 4 includes a flip motor 401, the output shaft end of the flip motor 401 is fixedly connected to a first bevel gear 402, the outer surface of the first bevel gear 402 is meshed with a second bevel gear 403, and the outer surface of the second bevel gear 403 is fixedly connected to a rotating shaft 404.

[0031] Start the flip motor 401, the output shaft of the flip motor 401 drives the first bevel gear 402 to rotate, the first bevel gear 402 drives the second bevel gear 403 to rotate, and the second bevel gear 403 drives the rotating shaft 404 to rotate. Through the engagement of the first bevel gear 402 and the second bevel gear 403, the flip motor 401 can drive the rotating shaft 404 to rotate synchronously, so that the rotating shaft 404 drives the connecting component 5 to flip.

[0032] In one embodiment, for the above-mentioned support plate 501 , the connection assembly 5 includes a support plate 501 , the support plate 501 is rotatably connected to the rotating shaft 404 , and a turning table 502 is fixedly connected to the outer surface of the rotating shaft 404 .

[0033] The shaft 404 rotates in the support plate 501, and the shaft 404 drives the flip table 502 to rotate. Through the connection between the shaft 404 and the support plate 501, the support plate 501 can support the shaft 404 to prevent the shaft 404 from contacting the moving table 2 and causing it to be unable to rotate.

[0034] In one embodiment, for the above-mentioned rotating motor 601, the rotating component 6 includes a rotating motor 601, a square groove 602 is opened inside the flip table 502, the rotating motor 601 is located inside the square groove 602, and the output shaft end of the rotating motor 601 is fixedly connected to a rotating seat 603, and the rotating seat 603 is fixedly connected to the supporting platform 7.

[0035] Start the rotating motor 601, the output shaft of the rotating motor 601 drives the rotating seat 603 to rotate, the rotating seat 603 drives the supporting platform 7 to rotate, and the square groove 602 provides a fixed installation position for the rotating motor 601, so that the rotating motor 601 can be installed in the turning table 502, and the turning table 502 can protect the rotating motor 601.

[0036] In one embodiment, for the above-mentioned longitudinal movement platform 801, the longitudinal movement assembly 8 includes a longitudinal movement platform 801, the outer surface of which is fixedly connected to a longitudinal movement motor 802, the output shaft end of the longitudinal movement motor 802 is fixedly connected to a first screw 803, and the first screw 803 is threadedly connected to the moving platform 2.

[0037] Start the longitudinal movement motor 802, and the output shaft of the longitudinal movement motor 802 drives the first screw 803 to rotate. Through the connection between the first screw 803 and the movable platform 2, the first screw 803 can drive the movable platform 2 to move along the longitudinal movement platform 801 when rotating, so that the movable platform 2 drives the supporting platform 7 to move.

[0038] In one embodiment, for the above-mentioned transverse moving platform 901, the transverse moving assembly 9 includes a transverse moving platform 901, the outer surface of which is fixedly connected to a transverse moving motor 902, the output shaft end of the transverse moving motor 902 is fixedly connected to a second screw 903, and the second screw 903 is threadedly connected to the longitudinal moving platform 801.

[0039] Start the transverse motor 902, which drives the second screw 903 to rotate. Through the connection between the second screw 903 and the longitudinal platform 801, the second screw 903 can drive the longitudinal platform 801 to move along the transverse platform 901 when rotating, so that the longitudinal platform 801 drives the mobile platform 2 to move and change the position of the supporting platform 7.

[0040] In one embodiment, for the door panel 11 , the door panel 11 is rotatably connected to the outer surface of the housing 1 , and the console 12 is fixedly connected to the outer surface of the housing 1 .

[0041] The control console 12 is electrically connected to the door panel 11 , the electric push rod 10 , the transverse motor 902 , the longitudinal motor 802 , the rotation motor 601 , the flip motor 401 and the scanning mirror 3 , respectively, and the control console 12 can control the on and off of the above components.

[0042] After unlocking the door panel 11 through the control console 12, pull the door panel 11 to rotate it to open it, and then control the lateral motor 902 and the longitudinal motor 802 through the control console 12 to drive the support platform 7 to move so that the support platform 7 is close to the door panel 11, and the sample can be taken or placed on the support platform 7.

[0043] In summary, with the aid of the above technical solution of the utility model, the lateral motor 902 is started through the control console 12, the output shaft of the lateral motor 902 drives the second screw 903 to rotate, the second screw 903 drives the longitudinal stage 801 to drive the mobile stage 2 and the supporting stage 7 to move horizontally to the left and right, the lateral motor 802 is started through the control console 12, the lateral motor 802 drives the first screw 803 to rotate, the first screw 803 drives the mobile stage 2 and the supporting stage 7 to move longitudinally forward and backward, thereby changing the position of the supporting stage 7, so that the scanning mirror 3 can observe and detect the etching size of the sample at different positions on the supporting stage 7. , start the flip motor 401 on the moving table 2, the flip motor 401 drives the first bevel gear 402 to rotate, and the first bevel gear 402 and the second bevel gear 403 are engaged to make the rotating shaft 404 rotate synchronously, and the rotating shaft 404 drives the flip table 502 and the supporting table 7 to flip left and right, and start the rotating motor 601 in the flip table 502, and the rotating motor 601 drives the rotating seat 603 and the supporting table 7 to rotate, which can change the angle of the sample on the supporting table 7, so that the scanning mirror 3 can observe and detect the etching size of the sample on the supporting table 7 from different angles, so as to obtain more comprehensive and accurate size data.

[0044] Through the above technical scheme, 1. Through the connection between the electric push rod 10 and the transverse movement component 9, the electric push rod 10 pushes the transverse movement component 9 to move upward when it is extended, and the electric push rod 10 retracts to drive the transverse movement component 9 to move downward. Through the connection between the transverse movement component 9 and the longitudinal movement component 8, the transverse movement component 9 can drive the longitudinal movement component 8 to drive the movable table 2 and the supporting table 7 to move laterally on the surface of the transverse movement component 9, and the longitudinal movement component 8 can drive the movable table 2 and the supporting table 7 to move longitudinally on the surface of the longitudinal movement component 8. The longitudinal movement component 8 and the transverse movement component 9 cooperate with each other to change the horizontal position of the supporting table 7, the flip component 4 drives the connecting component 5 and the supporting table 7 to flip left and right, and the angle between the supporting table 7 and the scanning mirror 3 can be changed. The rotating component 6 drives the supporting table 7 to rotate, so that the scanning mirror 3 can detect different positions of the sample on the supporting table 7, so as to obtain more comprehensive and accurate size data; 2. Through the The second screw 903 is connected to the longitudinal movement platform 801, and the transverse movement motor 902 drives the second screw 903 to rotate, which can drive the longitudinal movement platform 801 to move. Through the connection between the first screw 803 and the moving platform 2, the transverse movement motor 802 drives the first screw 903 to rotate, which can drive the moving platform 2 to move. Both the longitudinal movement platform 801 and the moving platform 2 can drive the supporting platform 7 to move, so that the scanning mirror 3 can detect different positions of the sample on the supporting platform 7. Through the engagement of the first bevel gear 402 and the second bevel gear 403, the first bevel gear 402 is driven by the flipping motor 401 to rotate, which can make the second bevel gear 403 and the rotating shaft 404 rotate synchronously, and the rotating shaft 404 drives the flipping platform 502 and the supporting platform 7 to flip left and right. At the same time, the rotating motor 601 in the flipping platform 502 drives the rotating seat 603 and the supporting platform 7 to rotate horizontally, which can change the angle between the sample on the supporting platform 7 and the scanning mirror 3.

[0045] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A scanning electron microscope with multi-angle adjustment, comprising a housing (1), characterized in that: The housing (1) is slidably connected to a moving platform (2), the housing (1) is fixedly connected to a scanning mirror (3), the top of the moving platform (2) is fixedly connected to a flip assembly (4), the outer surface of the flip assembly (4) is fixedly connected to a connecting assembly (5), the connecting assembly (5) is located at the top of the moving platform (2), the interior of the connecting assembly (5) is fixedly connected to a rotating assembly (6), the outer surface of the rotating assembly (6) is fixedly connected to a supporting platform (7), the bottom of the moving platform (2) is provided with a longitudinal moving assembly (8), the bottom of the longitudinal moving assembly (8) is provided with a transverse moving assembly (9), the bottom of the transverse moving assembly (9) is fixedly connected to an electric push rod (10), and the fixed end of the electric push rod (10) is fixedly connected to the inside of the housing (1).

2. A multi-angle adjustable scanning electron microscope according to claim 1, characterized in that: The flip assembly (4) comprises a flip motor (401), the output shaft end of the flip motor (401) is fixedly connected to a first bevel gear (402), the outer surface of the first bevel gear (402) is meshed with a second bevel gear (403), and the outer surface of the second bevel gear (403) is fixedly connected to a rotating shaft (404).

3. A multi-angle adjustable scanning electron microscope according to claim 2, characterized in that: The connection assembly (5) comprises a support plate (501), the support plate (501) is rotatably connected to a rotating shaft (404), and a turning table (502) is fixedly connected to the outer surface of the rotating shaft (404).

4. The multi-angle adjustable scanning electron microscope according to claim 3, characterized in that: The rotating assembly (6) comprises a rotating motor (601), a square groove (602) is provided inside the turning platform (502), the rotating motor (601) is located inside the square groove (602), the output shaft end of the rotating motor (601) is fixedly connected to a rotating seat (603), and the rotating seat (603) is fixedly connected to the supporting platform (7).

5. The multi-angle adjustable scanning electron microscope according to claim 1, characterized in that: The longitudinal movement assembly (8) comprises a longitudinal movement platform (801), the outer surface of which is fixedly connected to a longitudinal movement motor (802), the output shaft end of which is fixedly connected to a first screw rod (803), and the first screw rod (803) is threadedly connected to the moving platform (2).

6. The multi-angle adjustable scanning electron microscope according to claim 5, characterized in that: The transverse shift assembly (9) comprises a transverse shift platform (901), the outer surface of the transverse shift platform (901) is fixedly connected to a transverse shift motor (902), the output shaft end of the transverse shift motor (902) is fixedly connected to a second screw rod (903), and the second screw rod (903) is threadedly connected to the longitudinal shift platform (801).

7. The multi-angle adjustable scanning electron microscope according to claim 1, characterized in that: The outer surface of the shell (1) is rotatably connected to a door panel (11), and the outer surface of the shell (1) is fixedly connected to a console (12).

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