Cleaning device for semiconductor industrial factory building

Abstract

The utility model discloses a cleaning device for a semiconductor industrial factory building, which comprises a frame and a water storage tank, pulleys are arranged at the bottom of the frame, the water storage tank is arranged on the frame, a water delivery pipe is connected to the left side of the water storage tank, a valve is arranged on the water delivery pipe, a spray head is connected to the bottom of the water delivery pipe, and a water inlet pipe is arranged at the top of the water storage tank. By arranging the two sets of slidable extension plates at the front end and the rear end of the connecting plate, the brake disc drives the double-end lead screw to rotate on the bearing, the two sets of transmission blocks move on the double-end lead screw and gather towards the middle of the double-end lead screw, then the transmission blocks drive the extension plates to slide in the connecting plate through the connecting support, and when the extension plates slide to proper positions, the two sets of transmission blocks are driven to rotate. And an extension plate is bonded with a hook-and-loop fastener at the bottom of a connecting plate, and cleaning cloth with the same size as the extension plate and the connecting plate is used, so that the cleaning cloth can be suitable for cleaning areas of different sizes and cleaning tasks of different types, and the practicability of the cleaning device is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of clean devices, in particular to a clean device for semiconductor industrial plants. Background Art

[0002] With the rapid development of semiconductor technology, the requirements for the cleanliness of the production environment are also increasing. As an indispensable and important part of semiconductor industrial plants, the design and application of clean equipment plays a vital role in ensuring product quality, improving production efficiency and protecting employee health. Semiconductor industrial plants involve complex process flows and sophisticated equipment in the production process, requiring the production environment to have a high degree of cleanliness. Particles, dust, chemical pollutants, etc. in the air may have adverse effects on the performance and quality of semiconductor products. Therefore, the clean equipment needs to be able to effectively remove these pollutants and keep the production environment clean. The existing clean equipment for semiconductor industrial plants can basically meet daily use needs, but there are still some shortcomings that need to be improved.

[0003] The existing cleaning device is generally provided with a cleaning cloth and a nozzle, so that the water from the nozzle wets the ground, and then the water and the dust on the ground are cleaned by the cleaning cloth. The cleaning cloth usually works in a fixed size, and the fixed-size cleaning cloth may not be able to adapt to all types of cleaning tasks or the size of the cleaning plate. Cleaning areas of different sizes may require cleaning cloths of different sizes, and the fixed-size cleaning cloth may not be able to fully cover certain areas, or may be too large in some cases, resulting in waste. For this reason, we propose a cleaning device for semiconductor industrial plants to solve the above problems. Utility Model Content

[0004] The purpose of the utility model is to provide a clean device for semiconductor industrial plants to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a clean device for a semiconductor industrial plant, comprising a frame and a water tank, a pulley is arranged at the bottom of the frame, a water tank is arranged on the frame, a water pipe is connected to the left side of the water tank, a valve is arranged on the water pipe, a nozzle is connected to the bottom of the water pipe, a water inlet pipe is arranged at the top of the water tank, an electric telescopic rod is arranged on the right side of the frame, a fixing plate is arranged on the right side of the electric telescopic rod, a motor is arranged on the top of the fixing plate, a fixing rod is arranged at the bottom of the motor, a connecting plate is arranged at the bottom of the fixing rod, two groups of extension plates are slidably connected to the front and rear end surfaces of the connecting plate, a movable warehouse is arranged on the connecting plate, a bearing is arranged on the rear end surface of the movable warehouse, a double-headed screw is fixedly connected to the bearing, a brake disc is arranged on the front end surface of the double-headed screw, two groups of transmission blocks are threadedly connected to the double-headed screw, the outer end surfaces of the transmission blocks are all provided with connecting brackets, the other ends of the connecting brackets are all fixed on the extension plates, and the connecting plate and the bottom of the extension plate are bonded with a cleaning cloth by Velcro.

[0006] As a further preferred embodiment of the present technical solution, a connecting rod is provided between the fixed rod and the connecting plate, the bottom of the connecting rod is fixed on the connecting plate, the connecting rod slides in the fixed rod, a sliding groove is provided on the right side surface of the connecting rod, a spring is provided on the inner wall of the sliding groove, the other end of the spring is fixedly connected to a positioning column, and two groups of through grooves are symmetrically provided in the fixed rod.

[0007] As a further preferred embodiment of the present technical solution, the extension plate is designed to be rectangular, the connection plate is provided with through holes matched with the extension plate, and the connection plate is matched with the extension plate.

[0008] As a further preferred embodiment of the present technical solution, the input ends of the motors are electrically connected to the controller via wires, and a placement slot for storing the controller is provided on the frame.

[0009] As a further preferred embodiment of the present technical solution, the brake disc is detachably connected to the double-headed screw by bolts, and an anti-slip rubber sleeve is provided on the brake disc.

[0010] As a further preferred embodiment of the present technical solution, the outer end surface of the positioning column is designed to be semicircular, the outer wall of the positioning column is in contact with the inner wall of the slide groove, and the positioning column and the slide groove are both configured to match each other.

[0011] As a further preferred embodiment of the present technical solution, one end of the spring is welded to the inner wall of the slide groove, and the other end of the spring is welded to the inner wall of the positioning column.

[0012] The utility model provides a cleaning device for semiconductor industrial workshops, which has the following beneficial effects:

[0013] 1. The utility model arranges two sets of slidable extension plates at the front and rear ends of the connecting plate, so that the brake disc drives the double-headed screw to rotate on the bearing, and the two sets of transmission blocks move on the double-headed screw and gather toward the middle of the double-headed screw, and then the transmission blocks drive the extension plate to slide in the connecting plate through the connecting bracket, and when the extension plate slides to a suitable position, the extension plate and the connecting plate are bonded with a cleaning cloth of the same size as the extension plate and the connecting plate through the Velcro at the bottom, so that the cleaning cloth can be suitable for cleaning areas of different sizes and different types of cleaning tasks, thereby effectively improving the practicality of the cleaning device.

[0014] 2. The utility model arranges a connecting rod, a slide groove, a spring, a positioning column and a through groove between the fixed rod and the connecting plate. When the positioning column slides from the through groove into the slide groove, the positioning column squeezes the spring, and then the connecting rod slides out of the fixed rod. Then, the connecting rod is rotated so that the outer end of the positioning column on the connecting rod is rotated to correspond to the outer wall of the frame. Then, the connecting rod is slid into the fixed rod, and the positioning column penetrates another set of through grooves under the push of the restoring force of the spring, thereby achieving the purpose of adjusting the cleaning cloth in the horizontal and vertical directions, so that the cleaning cloth can be suitable for different cleaning needs, and it is also convenient for the staff to disassemble and assemble the connecting plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the utility model when viewed from above;

[0017] Figure 3 It is a schematic diagram of the first partial cross-sectional structure of the utility model;

[0018] Figure 4 It is a schematic diagram of the second partial cross-sectional structure of the utility model;

[0019] Figure 5 For the utility model Figure 3 A schematic diagram of the enlarged structure at point A;

[0020] Figure 6 For the utility model Figure 4 Schematic diagram of the enlarged structure at B.

[0021] In the figure: 1. frame; 2. water tank; 3. water pipe; 4. valve; 5. nozzle; 6. water inlet pipe; 7. electric telescopic rod; 8. fixing plate; 9. motor; 10. fixing rod; 11. connecting plate; 12. extension plate; 13. movable bin; 14. bearing; 15. double-headed screw; 16. brake disc; 17. transmission block; 18. connecting bracket; 19. cleaning cloth; 20. connecting rod; 21. slide groove; 22. spring; 23. positioning column; 24. through groove. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0023] The utility model provides a technical solution: Figures 1 to 6 As shown, in this embodiment, a clean device for a semiconductor industrial plant includes a frame 1 and a water tank 2. A pulley is provided at the bottom of the frame 1, and the water tank 2 is provided on the frame 1. A water pipe 3 is connected to the left side of the water tank 2. A valve 4 is provided on the water pipe 3. A nozzle 5 is connected to the bottom of the water pipe 3. A water inlet pipe 6 is provided at the top of the water tank 2. An electric telescopic rod 7 is provided on the right side of the frame 1. A fixing plate 8 is provided on the right side of the electric telescopic rod 7. A motor 9 is provided on the top of the fixing plate 8. A fixing rod 10 is provided at the bottom of the motor 9. A connecting plate 1 is provided at the bottom of the fixing rod 10. 1. The front and rear end surfaces of the connecting plate 11 are slidably connected with two groups of extension plates 12. A movable warehouse 13 is provided on the connecting plate 11. A bearing 14 is provided on the rear end surface of the movable warehouse 13. A double-headed screw 15 is fixedly connected to the bearing 14. A brake disc 16 is provided on the front end surface of the double-headed screw 15. Two groups of transmission blocks 17 are threadedly connected to the double-headed screw 15. The outer end surfaces of the transmission blocks 17 are all provided with connecting brackets 18. The other ends of the connecting brackets 18 are all fixed on the extension plate 12. Cleaning cloth 19 is bonded to the bottom of the connecting plate 11 and the extension plate 12 by Velcro.

[0024] By arranging two sets of slidable extension plates 12 at the front and rear ends of the connecting plate 11, the brake disc 16 drives the double-headed screw 15 to rotate on the bearing 14, and the two sets of transmission blocks 17 move on the double-headed screw 15 and gather toward the middle of the double-headed screw 15, and then the transmission block 17 drives the extension plate 12 to slide in the connecting plate 11 through the connecting bracket 18, and when the extension plate 12 slides to a suitable position, the extension plate 12 and the connecting plate 11 are bonded together with a cleaning cloth 19 of the same size as the extension plate 12 and the connecting plate 11 through the Velcro at the bottom, so that the cleaning cloth 19 can be suitable for cleaning areas of different sizes and different types of cleaning tasks, thereby effectively improving the practicability of the cleaning device.

[0025] In other embodiments, a connecting rod 20 is provided between the fixing rod 10 and the connecting plate 11, the bottom of the connecting rod 20 is fixed on the connecting plate 11, the connecting rod 20 slides in the fixing rod 10, a slide groove 21 is provided on the right surface of the connecting rod 20, a spring 22 is provided on the inner wall of the slide groove 21, the other end of the spring 22 is fixedly connected to a positioning column 23, and two groups of through grooves 24 are symmetrically provided in the fixing rod 10;

[0026] By arranging the connecting rod 20, the slide groove 21, the spring 22, the positioning column 23 and the through groove 24 between the fixed rod 10 and the connecting plate 11, when the positioning column 23 slides from the through groove 24 into the slide groove 21, the positioning column 23 squeezes the spring 22, and then the connecting rod 20 slides out of the fixed rod 10, and then the connecting rod 20 is rotated so that the outer end of the positioning column 23 on the connecting rod 20 is rotated to correspond to the outer wall of the frame 1, and then the connecting rod 20 is slid into the fixed rod 10, so that the positioning column 23 passes through another set of through grooves 24 under the push of the restoring force of the spring 22, thereby achieving the purpose of adjusting the cleaning cloth 19 in the horizontal and vertical directions, so that the cleaning cloth 19 can be suitable for different cleaning needs, and it is also convenient for the staff to disassemble and assemble the connecting plate 11.

[0027] In other embodiments, the extension plate 12 is designed in a rectangular shape, and a through hole matching the extension plate 12 is provided in the connection plate 11, so that the connection plate 11 and the extension plate 12 are both matched;

[0028] This design allows the connecting plate 11 and the extension plate 12 to fit together on multiple surfaces, thereby improving the sliding stability of the extension plate 12 in the connecting plate 11 and preventing the extension plate 12 from shaking in the connecting plate 11, causing an unstable connection between the cleaning cloth 19 and the Velcro on the connecting plate 11 or the extension plate 12, thereby affecting the cleaning effect of the cleaning cloth 19.

[0029] In other embodiments, the input ends of the motor 9 are electrically connected to the controller through wires, and a placement slot for storing the controller is provided on the frame 1;

[0030] This design makes it convenient for the staff to take the controller nearby to operate the motor 9, thereby improving the automation level of the cleaning device.

[0031] In other embodiments, the brake disc 16 is detachably connected to the double-ended screw rod 15 by bolts, and a non-slip rubber sleeve is provided on the brake disc 16;

[0032] This design can increase the friction between the worker's hand and the brake disc 16 to prevent the worker from slipping, and also make it easier for the worker to disassemble, assemble and replace the damaged brake disc 16 .

[0033] In other embodiments, the outer end surface of the positioning column 23 is designed to be semicircular, the outer wall of the positioning column 23 fits with the inner wall of the slide groove 21, and the positioning column 23 and the slide groove 21 are both configured to match each other;

[0034] With this design, the outer end of the positioning column 23 is slid into the slide groove 21 so that the positioning column 23 contacts the inner wall of the fixing rod 10, and then the connecting rod 20 is pulled so that the fixing rod 10 squeezes the positioning column 23 and the positioning column 23 slides into the slide groove 21, thereby achieving the purpose of quickly removing the connecting rod 20.

[0035] In other embodiments, one end of the spring 22 is welded to the inner wall of the slide slot 21, and the other end of the spring 22 is welded to the inner wall of the positioning column 23;

[0036] With this design, the spring 22 can be used to fix the positioning post 23 , thereby preventing the positioning post 23 from slipping out of the slide slot 21 and being lost.

[0037] The utility model provides a cleaning device for semiconductor industrial workshops, and the specific working principle is as follows:

[0038] When in use, first rotate the brake disc 16 to make the brake disc 16 drive the double-headed screw 15 to rotate on the bearing 14, and make the two sets of transmission blocks 17 move on the double-headed screw 15 and gather toward the middle of the double-headed screw 15, and then make the transmission block 17 drive the extension plate 12 to slide in the connecting plate 11 through the connecting bracket 18, and when the extension plate 12 slides to a suitable position, the extension plate 12 and the connecting plate 11 are bonded with a cleaning cloth 19 of the same size as the extension plate 12 and the connecting plate 11 through the Velcro at the bottom of the extension plate 12 and the connecting plate 11, and then the position of the fixed rod 10 is adjusted through the electric telescopic rod 7, and the motor 9 is started through the controller at the same time, so that the motor 9 drives the connecting plate 11 and the cleaning cloth 19 to rotate through the fixing plate 8, and then the storage The water tank 2 drives the rotating cleaning cloth 19 to clean the dust on the ground. When the rotating cleaning cloth 19 is not needed, the motor 9 is turned off by the controller, and then the positioning column 23 slides from the through groove 24 into the slide groove 21, so that the positioning column 23 squeezes the spring 22, and then the connecting rod 20 slides out of the fixed rod 10, and then the connecting rod 20 is rotated to make the outer end of the positioning column 23 on the connecting rod 20 turn to correspond to the outer wall of the frame 1, and then the connecting rod 20 slides into the fixed rod 10, so that the positioning column 23 passes through another set of through grooves 24 under the push of the restoring force of the spring 22, thereby achieving the purpose of adjusting the cleaning cloth 19 in the horizontal and vertical directions, so that the cleaning cloth 19 can be suitable for different cleaning needs.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A clean device for a semiconductor industrial plant, comprising a frame (1) and a water storage tank (2), wherein a pulley is provided at the bottom of the frame (1), and a water storage tank (2) is provided on the frame (1), characterized in that: The left side of the water storage tank (2) is connected to a water delivery pipe (3), a valve (4) is provided on the water delivery pipe (3), a nozzle (5) is connected to the bottom of the water delivery pipe (3), a water inlet pipe (6) is provided on the top of the water storage tank (2), an electric telescopic rod (7) is provided on the right side of the frame (1), a fixing plate (8) is provided on the right side of the electric telescopic rod (7), a motor (9) is provided on the top of the fixing plate (8), a fixing rod (10) is provided at the bottom of the motor (9), a connecting plate (11) is provided at the bottom of the fixing rod (10), and two groups of extension plates (12) are slidably connected to the front and rear end surfaces of the connecting plate (11) The connecting plate (11) is provided with a movable bin (13), the rear end surface of the movable bin (13) is provided with a bearing (14), the bearing (14) is fixedly connected with a double-headed screw (15), the front end surface of the double-headed screw (15) is provided with a brake disc (16), the double-headed screw (15) is threadedly connected with two groups of transmission blocks (17), the outer end surfaces of the transmission blocks (17) are provided with connecting brackets (18), the other ends of the connecting brackets (18) are fixed on the extension plate (12), and the bottoms of the connecting plate (11) and the extension plate (12) are bonded with a cleaning cloth (19) by Velcro.

2. A semiconductor industrial plant clean room device according to claim 1, characterized in that: A connecting rod (20) is provided between the fixing rod (10) and the connecting plate (11), the bottom of the connecting rod (20) is fixed on the connecting plate (11), the connecting rod (20) slides in the fixing rod (10), a sliding groove (21) is provided on the right surface of the connecting rod (20), a spring (22) is provided on the inner wall of the sliding groove (21), the other end of the spring (22) is fixedly connected to a positioning column (23), and two groups of through grooves (24) are symmetrically provided in the fixing rod (10).

3. A semiconductor industrial plant clean room device according to claim 1, characterized in that: The extension plate (12) is designed to be rectangular, and the connection plate (11) is provided with a through hole that matches the extension plate (12), and the connection plate (11) and the extension plate (12) are both matched.

4. The semiconductor industrial plant clean room device according to claim 1, characterized in that: The input ends of the motor (9) are electrically connected to the controller via wires, and a placement slot for storing the controller is provided on the frame (1).

5. The semiconductor industrial plant clean room device according to claim 2, characterized in that: The brake disc (16) is detachably connected to the double-headed screw rod (15) via bolts, and an anti-slip rubber sleeve is sleeved on the brake disc (16).

6. A semiconductor industrial plant clean room device according to claim 2, characterized in that: The outer end surface of the positioning column (23) is designed to be semicircular, the outer wall of the positioning column (23) is in contact with the inner wall of the slide groove (21), and the positioning column (23) and the slide groove (21) are both configured to be in a shape that matches each other.

7. A semiconductor industrial plant clean room device according to claim 2, characterized in that: One end of the spring (22) is welded to the inner wall of the slide groove (21), and the other end of the spring (22) is welded to the inner wall of the positioning column (23).

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