Doping bell jar height positioning structure and doping bell jar

Abstract

The utility model discloses a doping bell jar height positioning structure which comprises a height fixing piece, an orientation piece and a connecting piece, the height fixing piece is provided with a transverse part and a vertical part, the transverse part is provided with an inserting section, a positioning section and a connecting section, the doping bell jar is provided with a first hole body, the inserting section is inserted into the first hole body, the vertical part extends to the lower portion of the doping bell jar, and the positioning section is connected with the connecting section. A positioning hole is formed in the position, corresponding to the positioning section, of the orienting piece, the positioning section is inserted into the positioning hole, the orienting piece is used for being attached to the inner wall of the doping bell jar and positioning the vertical section to the vertical position, and the connecting piece is connected to the connecting section and presses the orienting piece to the inner wall of the doping bell jar. The lower edge of the height fixing piece is in contact with the surface of silicon melt, the doping bell jar is positioned at a specified height, an operator can control the height of the doping bell jar conveniently, and therefore the problem of height positioning of the doping bell jar is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of CZ method single crystal growth equipment, in particular to a doping bell jar height positioning structure and a doping bell jar. Background Art

[0002] The gas phase doping method for single crystal silicon growth is an important doping technology, which is mainly used to change the electrical properties of single crystal silicon. In this method, during the growth of single crystal silicon, the required doping gas is sprayed into the reaction chamber, so that these gases are adsorbed on the surface of the single crystal silicon and diffused into the crystal.

[0003] Gas phase doping is the main doping method for growing semiconductor arsenic single crystal CZ (Czochralski). The bell jar is an important fixture in the arsenic gas phase doping process. The design of the bell jar has a direct impact on the stability of arsenic doping and process safety. The solid arsenic in the bell jar sublimates into gas at high temperature and exists in the entire bell jar. The bell jar is controlled to be at a certain distance from the silicon melt liquid surface so that the arsenic gas diffuses into the silicon melt. In this process, the stability of the distance control between the bottom edge of the bell jar and the liquid surface will have a direct impact on the stability of the doping efficiency. Utility Model Content

[0004] The embodiment of the present application provides a doping bell jar height positioning structure to solve the problem of positioning the lower edge of the bell jar during the gas phase doping process. The embodiment of the present application also provides a doping bell jar.

[0005] The first aspect of the present application provides a doped bell jar height positioning structure, comprising:

[0006] A height-fixing member, comprising a transverse portion and a vertical portion, wherein the transverse portion comprises an inserting section, a positioning section, and a connecting section, the doping bell jar is provided with a first hole, the inserting section is inserted into the first hole, and the vertical portion extends to below the doping bell jar;

[0007] A directional member, having a locating hole corresponding to the locating section, the locating section being inserted into the locating hole, the directional member being used to adhere to the inner wall of the doping bell jar and locate the vertical portion in a vertical position;

[0008] A connecting piece is connected to the connecting section, and the connecting piece presses the directional piece against the inner wall of the doping bell jar.

[0009] The beneficial effect of the above embodiment is that the doping bell jar is positioned at a specified height by contacting the lower edge of the height setting member with the surface of the silicon melt, which makes it easy for the operator to control the height of the doping bell jar, thereby solving the problem of height positioning of the doping bell jar.

[0010] Based on the above embodiments, the embodiments of the present application may also be improved as follows:

[0011] In one embodiment of the present application: the outer circumference of the connecting section is provided with an external thread, and the connecting piece is provided with a threaded hole corresponding to the external thread. Beneficial effect of this step: the threaded structure is easy to disassemble and assemble.

[0012] In one embodiment of the present application: the first hole is circular, and the positioning hole is non-circular. Beneficial effects of this step: the circular first hole evenly adds stress at the opening of the bell jar, and the positioning hole of the non-circular structure facilitates the positioning of the height-fixing component.

[0013] In one embodiment of the present application: the transverse portion further has a positioning boss, the positioning boss is adjacent to the positioning section, and the positioning boss is used to contact the outer wall of the doping bell jar. The beneficial effect of this step: the positioning boss improves the stability of the height setting member positioning.

[0014] In one embodiment of the present application: the doped bell jar is further provided with at least one second hole. The beneficial effect of this step is to prevent the operator from making an operation error and directly inserting the lower edge of the doped bell jar into the silicon melt, resulting in no release point for the gas after the arsenic in the bell jar is sublimated, causing the bell jar to burst due to high pressure in the crystal growth furnace.

[0015] A second aspect of the present application provides a doping bell jar, comprising the doping bell jar height positioning structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the specific implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the specific implementation or the prior art description. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, each element or part is not necessarily drawn according to the actual scale.

[0017] Figure 1 A schematic diagram of the doped bell jar height positioning structure;

[0018] Figure 2 It is a partial schematic diagram of the doped bell jar height positioning structure;

[0019] Figure 3 It is a schematic diagram of the position relationship between the plug-in section, the positioning section and the connecting section;

[0020] Figure 4 It is a schematic diagram of the structure of the directional component.

[0021] Among them, 1 is a height-fixing member, 101 is a plug-in section, 102 is a positioning section, 103 is a connecting section, and 104 is a positioning boss;

[0022] 2 directional member, 201 positioning hole;

[0023] 3. Connectors;

[0024] 4 is a doped bell jar, 401 is a first hole body, and 402 is a second hole body. DETAILED DESCRIPTION

[0025] In this application, unless otherwise clearly specified and limited, the terms in this application should be understood in a broad sense, such as connection can be fixed connection, detachable connection or integration, direct connection or indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of different terms in this utility model can be understood according to specific circumstances, and the scope of the specific meaning should be limited to realizing the functions of this application.

[0026] Embodiment 1

[0027] like Figure 1 , 2 As shown, a doping bell jar height positioning structure includes: a height determining member 1, an orienting member 2, and a connecting member 3. The height determining member 1 has a transverse portion and a vertical portion. The transverse portion has an inserting section 101, a positioning section 102, and a connecting section 103. The doping bell jar 4 is provided with a first hole body 401. The inserting section 101 is inserted into the first hole body 401. The vertical portion extends to the bottom of the doping bell jar 4. The orienting member 2 is provided with a positioning hole 201 corresponding to the positioning section 102. The positioning section 102 is inserted into the positioning hole 201. The orienting member 2 is used to fit with the inner wall of the doping bell jar 4 and position the vertical section in a vertical position. The connecting member 3 is connected to the connecting section 103. The connecting member 3 presses the orienting member 2 against the inner wall of the doping bell jar 4.

[0028] Specifically, the height fixing member 1 , the orientation member 2 , and the connection member 3 are all made of quartz material.

[0029] Specifically, Figure 2 As shown, the connecting section 103 is a cylindrical structure, and an external thread is arranged on the outer periphery of the connecting section 103. A threaded hole is opened on the connecting piece 3 corresponding to the external thread. The connecting piece 3 is connected to the inner side of the doping bell 4. The outer periphery of the connecting piece 3 is a regular hexagonal structure, which is convenient for the operator to use a wrench to rotate the connecting piece 3. By designing the connecting section 103 and the connecting piece 3 as a threaded structure, it is convenient for the operator to disassemble and assemble the connecting piece 3 and the height fixing piece 1.

[0030] Specifically, Figure 3As shown, the first hole body 401 is circular, the plug-in section 101 is a cylindrical structure with a matching outer diameter, the diameter of the plug-in section 101 is larger than the diameter of the connecting section 103, and the stress at the opening of the bell jar 4 is uniformly doped through the circular first hole body 401; the positioning hole 201 is non-circular, and in this embodiment, the positioning hole 201 adopts a square structure, the positioning section 102 is a regular quadrilateral column matching the shape of the positioning hole 201, the length of the positioning section 102 is smaller than the depth of the positioning hole 201, the square positioning section 102 is inscribed in the end of the circular plug-in section 101, and the circular connecting section 103 is inscribed in the square positioning section 102. The non-circular positioning hole 201 facilitates positioning of the height determining component 1 to prevent the height determining component 1 from deflecting.

[0031] Specifically, Figure 2 As shown, the transverse portion further has a positioning boss 104 , which is adjacent to the positioning section 102 . The positioning boss 104 is used to contact the outer wall of the doping bell jar 4 , and the positioning stability of the height determining member 1 is improved by the positioning boss 104 .

[0032] Specifically, the distance between the first hole 401 and the lower edge of the doping bell jar 4 is 20 mm, and the length of the vertical portion is 25 mm, so that the lower edge of the doping bell jar 4 is accurately positioned at a height of 5 mm from the liquid surface of the silicon melt.

[0033] Specifically, Figure 1 As shown, the doping bell jar 4 is further provided with three second holes 402, and the second holes 402 and the first holes 401 are evenly distributed at the same height of the doping bell jar 4. The purpose of providing the second holes 402 is to prevent operating errors by personnel, and to prevent the lower edge of the doping bell jar 4 from being directly inserted into the silicon melt, resulting in no release point for the gas after the arsenic in the bell jar is sublimated, causing the bell jar to burst due to high pressure in the crystal growth furnace.

[0034] Specifically, Figure 4 As shown, the surface of the orienting member 2 facing the doping bell jar 4 is a convex arc surface, which is consistent with the shape of the inner wall of the doping bell jar 4. By cooperating with the positioning hole 201 of the orienting member 2, the height determining member 1 can be positioned in a vertical position to prevent the height determining member 1 from being tilted.

[0035] This height positioning structure design allows the operator to position the doping bell 4 at a height of 5 mm above the liquid surface by directly determining that the lower edge of the height-fixing piece 1 touches the silicon melt liquid surface during the descent process of the doping bell 4, thereby increasing the convenience and stability of operation. At the same time, the assembled height positioning structure allows the height-fixing piece 1 to be flexible in taking and hanging, thus avoiding damage caused by collision during taking and storing.

[0036] Embodiment 2

[0037] A doping bell jar comprises the doping bell jar height positioning structure disclosed in the first embodiment.

[0038] The above are only embodiments of the utility model. The common sense such as the known specific structures and characteristics in the scheme is not described in detail here. The ordinary technicians in the relevant field are aware of all the common technical knowledge in the technical field to which the utility model belongs before the application date or priority date, can obtain all the existing technologies in the field, and have the ability to apply the conventional experimental means before that date. The ordinary technicians in the relevant field can improve and implement the scheme in combination with their own abilities under the enlightenment given by this application. Some typical known structures or known methods should not become obstacles for the ordinary technicians in the relevant field to implement this application. It should be pointed out that for the technicians in this field, without departing from the structure of the utility model, several deformations and improvements can be made, which should also be regarded as the protection scope of the utility model, and these will not affect the effect of the implementation of the utility model and the practicality of the patent.

Claims

1. A doped bell jar height positioning structure, characterized in that: include: A height-fixing member, comprising a transverse portion and a vertical portion, wherein the transverse portion comprises an inserting section, a positioning section, and a connecting section, the doping bell jar is provided with a first hole, the inserting section is inserted into the first hole, and the vertical portion extends to below the doping bell jar; A directional member, having a locating hole corresponding to the locating section, the locating section being inserted into the locating hole, the directional member being used to adhere to the inner wall of the doping bell jar and locate the vertical portion in a vertical position; A connecting piece is connected to the connecting section, and the connecting piece presses the directional piece against the inner wall of the doping bell jar.

2. The doping bell jar height positioning structure according to claim 1, characterized in that: The outer periphery of the connecting section is provided with an external thread, and the connecting piece is provided with a threaded hole corresponding to the external thread.

3. The doping bell jar height positioning structure according to claim 1, characterized in that: The first hole is circular, and the positioning hole is non-circular.

4. The doping bell jar height positioning structure according to claim 1, characterized in that: The transverse portion further has a positioning boss, the positioning boss is adjacent to the positioning section, and the positioning boss is used to contact the outer wall of the doping bell jar.

5. The doping bell jar height positioning structure according to claim 1, characterized in that: The doping bell jar is also provided with at least one second hole.

6. A doped bell jar, characterized in that: It comprises the doped bell jar height positioning structure as described in any one of claims 1-5.

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