Air bag type air bearing

Abstract

The utility model relates to the technical field of air bearings, in particular to an air bag type air bearing which comprises a main body, a containing cavity, a pressing rod and a supporting assembly, a plurality of annular throttling channels are formed in the lower surface of the main body, an air inlet flow channel is formed in the main body, and the air inlet flow channel is communicated with the throttling channels; the accommodating cavity is formed in the upper surface of the main body; a spherical part is arranged at the bottom of the accommodating cavity; one end of the pressing rod is provided with a ball head matched with the spherical part, the ball head is installed in the spherical part and movably connected with the spherical part, and the other end of the pressing rod extends out of the containing cavity. The supporting assembly is arranged on the pressing rod in a sleeving mode and detachably connected with the containing cavity, the part, connected with the pressing rod, of the supporting assembly is of an easily-deformed structure, an air bag is arranged in the supporting assembly, and an inflation opening communicated with the air bag is formed in the supporting assembly. The problem that the posture of the air bearing cannot be adjusted in a self-adaptive mode can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of air floating bearings, and more specifically, to an air bag type air floating bearing. Background Art

[0002] An air bearing is a non-contact bearing. The air bearing forms a high-pressure air film through the flow of gas between the supporting surfaces, thereby achieving support and friction reduction, and can provide smoother movement. The Chinese patent application with the announcement number CN210859563U discloses an air bearing, including a bearing body and a pressure equalizing pad. The bearing body is made of silicon carbide. The top of the bearing body is provided with an inlay hole. The pressure equalizing pad is placed in the inlay hole and matches the size of the inlay hole. The inside of the bearing body is provided with interconnected air passages. The side of the bearing body has an air inlet hole connected to the air passage. The bottom of the bearing body is provided with an exhaust hole connected to the air passage. The pressure equalizing pad is provided with an assembly hole. In the disclosed technical solution, a ball screw is used to apply force to the air bearing, and a positioning pin is used to limit the swing of the air bearing. When other reasons cause the two air-floating surfaces of the air bearing to be non-parallel, the air bearing cannot adaptively adjust its posture. Utility Model Content

[0003] The utility model provides an airbag type air bearing to overcome the problem in the prior art that the air bearing cannot adjust its posture adaptively when the two air bearing surfaces of the air bearing are not parallel.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: an airbag type air floating bearing, comprising:

[0005] A main body, a lower surface of which is provided with a plurality of annular throttling channels, an inlet flow channel is provided on the main body, and the inlet flow channel is connected with the throttling channels;

[0006] An accommodating cavity, wherein the upper surface of the main body is formed with the accommodating cavity, and the bottom of the accommodating cavity has a spherical portion;

[0007] A pressure rod, one end of which has a ball head adapted to the spherical portion, the ball head is installed in the arc-shaped portion and movably connected thereto, and the other end of the pressure rod extends out of the accommodating cavity; and a support assembly, the support assembly is sleeved on the pressure rod and the support assembly is detachably connected to the accommodating cavity, the support assembly is an easily deformable structure at the portion connected to the pressure rod, an airbag is provided inside the support assembly, and an inflation port connected to the airbag is opened on the support assembly.

[0008] In the technical solution of the present application, when in use, the main body is placed above the guide rail, and the end of the pressure rod away from the ball head is connected to the slide, and gas is filled into the throttling channel through the intake flow channel, and the gas forms an air film between the contact surface of the main body and the guide rail, thereby reducing the friction between the main body and the guide rail. Since the ball head is located in the spherical part and is movably connected to the spherical part, the ball head can rotate in the spherical part, and the part of the support component connected to the pressure rod is a deformable structure and gas can be filled into the airbag through the inflation port. By filling a certain low-pressure gas in the airbag, the deformable structure wraps the pressure rod, and the filled gas pressure is very low, so that the support component can support the pressure rod while allowing the pressure rod to swing to a certain extent. Since the pressure rod can swing, and this swing is reflected in the adjustment process of the airbag air bearing in the Rx and Ry degrees of freedom, thereby solving the problem that the air bearing cannot adjust the posture adaptively.

[0009] Preferably, the support assembly comprises:

[0010] A support member, the support member is an annular structure, and the support member is detachably connected to the accommodating cavity; and

[0011] The lining member is made of elastic material, is sleeved on the pressure rod and connected to the support member, and the airbag is formed between the support member and the lining member.

[0012] Preferably, the lining member includes a lining, a first connecting member and a second connecting member respectively mounted on the pressure rod, the first connecting member being respectively connected to the support member and the upper end surface of the lining, and the second connecting member being respectively connected to the support member and the lower end surface of the lining.

[0013] Preferably, an external thread is provided on the outer peripheral surface of the support member, an internal thread is provided on the inner wall surface of the accommodating cavity, and the internal thread is threadably connected to the external thread.

[0014] Preferably, a boss is formed on the upper surface of the main body, the accommodating cavity is opened on the boss, the inflation port is opened on the support member, a through hole is opened on the circumference of the boss, and the through hole is connected to the inflation port.

[0015] Preferably, a step is formed on the pressure rod where it is connected to the ball head, and the lower end surface of the lining member is located on the step.

[0016] Preferably, the portion of the pressure rod extending out of the accommodating cavity is provided with an external thread, and the end of the pressure rod away from the ball head is provided with an adjustment groove for adjusting the pressure rod.

[0017] Preferably, the main body includes a base and a pedestal, the base is detachably connected to the top of the pedestal, the accommodating cavity is formed on the upper surface of the pedestal, the inlet air flow channel is opened along the outer side of the pedestal toward its center, an air inlet groove is opened on the lower bottom surface of the pedestal, the air inlet groove is connected with the inlet air flow channel, the throttling channel is located on the lower surface of the pedestal, a throttling hole is opened on the throttling channel and is connected with the inlet channel, sealing rings are respectively installed on the inner and outer sides of the air inlet groove, and the sealing rings are clamped between the pedestal and the pedestal.

[0018] Preferably, the lower bottom surface of the base is provided with an annular first sealing groove and a second sealing groove located on the inner and outer sides of the air inlet groove, respectively, and each of the sealing rings is installed in the first sealing groove and the second sealing groove, respectively.

[0019] Preferably, the base is provided with a first connecting hole extending therethrough along its axial direction, a second connecting hole is provided on the upper surface of the base corresponding to the position of the first connecting hole, and fasteners for connecting the base and the base are connected in the first connecting hole and the second connecting hole.

[0020] Compared with the prior art, the beneficial effects of the utility model are as follows: in the utility model, since the ball head is located in the spherical part and is movably connected to the spherical part, the ball head can rotate in the spherical part, and the part of the support component connected to the pressure rod is an easily deformable structure and gas can be filled into the airbag through the inflation port. By filling the airbag with a certain low-pressure gas, the deformable structure wraps the pressure rod, and the filled air pressure is very low, so that the support component can support the pressure rod while allowing the pressure rod to swing to a certain extent. Since the pressure rod can swing, this swing is reflected in the adjustment process of the airbag air floating bearing in the Rx and Ry degrees of freedom, thereby solving the problem that the air floating bearing cannot adaptively adjust the posture. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the cross-sectional structure of the airbag type air floating bearing of the utility model;

[0022] Figure 2 It is a three-dimensional diagram of the airbag type air floating bearing of the utility model;

[0023] Figure 3 It is a structural schematic diagram of the upper part of the base of the airbag type air floating bearing of the utility model;

[0024] Figure 4 It is a structural schematic diagram of the bottom view of the base in the airbag type air floating bearing of the utility model;

[0025] Figure 5 It is a structural schematic diagram of the upper part of the base of the airbag type air floating bearing of the utility model;

[0026] Figure 6 It is a structural schematic diagram of the utility model of the airbag type air floating bearing from the bottom perspective of the base;

[0027] Figure 7 It is a structural schematic diagram of the inner lining member in the airbag type air floating bearing of the utility model;

[0028] Figure 8 It is a structural schematic diagram of the sealing ring in the airbag type air floating bearing of the utility model;

[0029] Fig. 9 The utility model is a schematic structural diagram of a middle pressure rod of an airbag type air floating bearing.

[0030] In the accompanying drawings: 1. main body; 11. throttling channel; 12. intake air channel; 2. accommodating chamber; 21. arc-shaped portion; 3. pressure rod; 31. ball head; 4. supporting assembly; 41. airbag; 42. inflation port; 43. supporting member; 44. lining member; 441. lining; 442. first connecting member; 443. second connecting member; 25. boss; 13. through hole; 32. step; 33. adjusting groove; 14. base; 15. base; 16. intake groove; 17. throttling hole; 18. sealing ring; 19. first sealing groove; 20. second sealing groove; 22. first connecting hole; 23. second connecting hole; 24. connecting hole; 444. covering member. DETAILED DESCRIPTION

[0031] The drawings are only for illustrative purposes and cannot be construed as limiting the present invention. To better illustrate the present embodiment, some parts of the drawings may be omitted, enlarged, or reduced, and do not represent the size of the actual product. For those skilled in the art, it is understandable that some well-known structures and their descriptions may be omitted in the drawings. The positional relationships described in the drawings are only for illustrative purposes and cannot be construed as limiting the present invention.

[0032] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "long", "short" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, they are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limitations on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0033] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings:

[0034] Example 1

[0035] like Figure 1 to Figure 2 As shown, an air bag type air floating bearing comprises:

[0036] A main body 1, a plurality of annular throttling channels 11 are provided on the lower surface of the main body 1, an inlet flow channel 12 is provided on the main body 1, and the inlet flow channel 12 is connected to the throttling channel 11;

[0037] The accommodating cavity 2 is formed on the upper surface of the main body 1, and the bottom of the accommodating cavity 2 has a spherical portion 21;

[0038] A pressure rod 3, one end of which has a ball head 31 adapted to the spherical portion 21, the ball head 31 is installed in the spherical portion 21 and movably connected thereto, and the other end of the pressure rod 3 extends out of the accommodating cavity 2; and

[0039] The support component 4 is sleeved on the pressure rod 3 and the support component 4 is detachably connected to the accommodating chamber 2. The part of the support component 4 connected to the pressure rod 3 is an easily deformable structure. The support component 4 has an airbag 41 inside, and an inflation port 42 connected to the airbag 41 is opened on the support component 4.

[0040] In this embodiment, when in use, the main body 1 is placed above the guide rail, and the end of the pressure rod 3 away from the ball head 31 is connected to the slide, and gas is filled into the throttle channel 11 through the intake flow channel 12, and the gas forms an air film between the contact surface of the main body 1 and the guide rail, thereby reducing the friction between the main body 1 and the guide rail. Since the ball head 31 is located in the spherical part 21 and is movably connected to the spherical part 21, the ball head 31 can rotate in the spherical part 21, and the support component 4 is a deformable structure at the part connected to the pressure rod 3 and gas can be filled into the air bag 41 through the inflation port 42. By filling a certain low-pressure gas in the air bag 41, the deformable structure wraps the pressure rod 3, and the gas pressure filled is very low, so that the support component 4 can support the pressure rod 3 while allowing the pressure rod 3 to swing to a certain extent. Since the pressure rod 3 can swing, and this swing is reflected in the adjustment process of the air bag 41 type air bearing in the Rx and Ry degrees of freedom, thereby solving the problem that the air bearing cannot adjust the posture adaptively. It should be noted that the portion of the support assembly 4 connected to the pressure rod 3 refers to the portion of the support assembly 4 that is directly in contact with the pressure rod 3. The deformable structure means that the support assembly 4 can be deformed when subjected to the extrusion force of the pressure rod 3, so that the support assembly 4 has a supporting force on the pressure rod 3 and can also make the pressure rod 3 swing to a certain extent when the support assembly 4 is deformed.

[0041] Among them, Figure 1 , Figure 7 As shown, the support assembly 4 includes:

[0042] A support member 43, which is an annular structure and is detachably connected to the accommodating cavity 2; and

[0043] The lining member is made of elastic material. The lining member is sleeved on the pressure rod 3 and connected to the support member 43. The airbag 41 is formed between the support member 43 and the lining member. In the present embodiment, the support member 43 mainly plays a supporting role, so the support member 43 is preferably made of metal material. When the pressure rod 3 does not swing, the lining member also needs to have a certain supporting force on the pressure rod 3; the pressure rod 3 will squeeze the lining member during the swinging process, and the lining member will be deformed, so the lining member needs to have a certain deformation. Therefore, the lining member generally adopts a silicone structure with a certain supporting force and easy to deform when subjected to force. It should be noted that the support member 43 and the lining member should be connected to maintain a sealed connection to avoid leakage when the low-pressure gas is filled into the airbag 41 through the inflation port 42, thereby affecting the supporting effect of the lining member on the pressure rod 3. In order to prevent dust from entering the accommodating cavity 2 and affecting the sliding connection between the ball head 31 and the arc-shaped portion 21, a cover 444 is also connected to the upper end surface of the support assembly 4. The cover 444 is sleeved on the pressure rod 3, and the inner diameter of the cover 444 is smaller than the rod diameter of the pressure rod 3. When the cover 444 is sleeved on the pressure rod 3, the inner diameter of the cover 444 will be deformed to wrap the pressure rod 3. When the pressure rod 3 is swinging, the cover 444 can still wrap the pressure rod 3. In this way, the ball head 31 of the pressure rod 3 can be sealed in the arc-shaped portion 21 to prevent dust and the like from entering the ball head 31. The cover 444 can be made of high elastic hydrogel.

[0044] like Figure 1 , Figure 7As shown, the lining member 44 includes a lining 441, a first connecting member 442 and a second connecting member 443 respectively sleeved on the compression rod 3, the first connecting member 442 is respectively connected to the upper end surface of the support member 43 and the lining 441, and the second connecting member 443 is respectively connected to the lower end surface of the support member 43 and the lining 441. In this embodiment, the lining 441 is a sleeve structure, the first connecting member 442 and the second connecting member 443 are a gasket structure of a certain thickness, the lining 441, the first connecting member 442 and the second connecting member 443 are sleeved on the outer peripheral surface of the compression rod 3 through their respective center holes, and the center holes of the lining 441, the first connecting member 442 and the second connecting member 443 can be in close contact with the compression rod 3, thereby ensuring the stability of the position of the compression rod 3. After the first connecting member 442 is connected to the upper end surface of the support member 43 and the liner 441, and the second connecting member 443 is connected to the lower end surface of the support member 43 and the liner 441, an annular airbag 41 is formed between the first connecting member 442, the liner 441, the second connecting member 443 and the support member 43. It should be noted that the liner 441 can be connected to the first connecting member 442 and the second connecting member 443 by gluing, and the first connecting member 442 and the second connecting member 443 can also be connected to the support member 43 by gluing. It should be noted that the liner 441 and the first connecting member 442 can be a silicone structure, and the liner 441, the first connecting member 442 and the second connecting member 443 can also be an integrally formed structure.

[0045] like Figure 1 As shown, an external thread is provided on the outer peripheral surface of the support member 43, and an internal thread is provided on the inner wall surface of the accommodating chamber 2, and the internal thread is threadedly connected with the external thread. In this embodiment, the threaded connection between the internal thread and the external thread can realize a detachable connection between the support member 43 and the inner wall surface of the accommodating chamber 2. The support member 43 is annular, and through the connection between the support member 43 and the inner wall surface of the accommodating chamber 2, a radial support force can be provided for the entire support assembly 4. When the lining member 44 is deformed by the extrusion force, the support member 43 can provide a corresponding support force for the lining member 44 to prevent it from excessive deformation.

[0046] like Figure 1 , Figure 2 , Figure 3 As shown, a boss 25 is formed on the upper surface of the main body 1, the accommodating chamber 2 is opened on the boss 25, the inflation port 42 is opened on the support member 43, and a through hole 13 is opened on the peripheral surface of the boss 25, and the through hole 13 is connected to the inflation port 42. In this embodiment, the through hole 13 is connected to the inflation port 42, and the external low-pressure gas source can pass through the through hole 13 and the inflation port 42 to fill the airbag 41 with low-pressure gas. It should be noted that the inflation port 42 is opened on the outer peripheral surface of the support member 43.

[0047] like Fig. 9As shown, the pressure rod 3 is formed with a step 32 at the connection with the ball head 31, and the lower end surface of the lining member 44 is located on the step 32. In this embodiment, the setting of the step 32 allows the lining member 44 to have a limiting effect in the vertical installation, preventing the lining member 44 from moving toward the ball head 31.

[0048] like Fig. 9 As shown, the portion of the pressure rod 3 extending out of the accommodating chamber 2 is provided with an external thread, and the end of the pressure rod 3 away from the ball head 31 is provided with an adjustment groove 33 for adjusting the pressure rod 3. When in use, the external thread is connected to the slide thread. When it is necessary to fine-tune the Z axis of the air-floating bearing, that is, to adjust the thickness of the air film, the air-floating motion table is paused, and the adjustment groove 33 on the end face of the pressure rod 3 is rotated while the air-floating bearing is kept ventilated. It should be noted that the adjustment groove 33 can be a straight groove or a cross groove, and other adjustment grooves 33 that can realize the adjustment of the pressure rod 3 in the Z direction are also acceptable.

[0049] Example 2

[0050] like Figure 1 , Figure 4 , Figure 6 As shown, the difference from Example 1 is that the main body 1 includes a base 14 and a seat 15, the base 14 is detachably connected to the top of the seat 15, the accommodating chamber 2 is formed on the upper surface of the base 14, the inlet flow channel 12 is opened along the outer side of the base 14 toward its center, the lower bottom surface of the base 14 is provided with an inlet groove 16, the inlet groove 16 is connected to the inlet flow channel 12 through a connecting hole 24, the throttling channel 11 is located on the lower surface of the seat 15, and the seat 15 is provided with a throttling hole 17 connecting the throttling channel 11 and the inlet groove 16, and sealing rings 18 are respectively installed on the inner and outer sides of the inlet groove 16, and the sealing ring 18 is clamped between the base 14 and the seat 15.

[0051] In this embodiment, the external gas source enters the air intake groove 16 through the air intake channel 12, then enters the throttling groove through the throttling hole 17 and flows out, and finally forms an air film between the lower end surface of the base 15 and the guide rail. It should be noted that the throttling channel 11 can make the air pressure in the air film more uniform, and the throttling hole 17 can stabilize the pressure, limit the flow rate of the air flow, and provide damping when the air flow flows. The sealing ring 18 is sandwiched between the base 14 and the base 15, and the sealing ring 18 is located on the inner and outer sides of the air intake groove 16, which can prevent gas leakage and ensure that the gas can enter the air intake channel 12 and finally flow out of the throttling channel 11. It should be noted that the number of connecting holes 24 can be set as needed, and the number of throttling holes 17 can also be set as needed.

[0052] Example 3

[0053] like Figure 4As shown, the difference from Example 2 is that the lower bottom surface of the base 14 is provided with an annular first sealing groove 19 and a second sealing groove 20 located on the inner and outer sides of the air inlet groove 16, and each sealing ring 18 is installed in the first sealing groove 19 and the second sealing groove 20, respectively. In this embodiment, the first sealing groove 19 and the second sealing groove 20 are used to install the sealing ring 18, respectively. The first sealing groove 19 and the second sealing groove 20 can prevent the position of the sealing ring 18 from moving. When the sealing ring 18 is installed in the first sealing groove 19 and the second sealing groove 20, the upper surface of the base 15 is in contact with the sealing ring 18, and the two sealing rings 18 are used to achieve the air tightness of the air inlet groove 16. It should be noted that when the air inlet groove 16 is located in the central part of the base 14, the air inlet groove 16 is a hole-like structure, such as Figure 4 As shown, at this time, only one sealing groove needs to be provided on the outer side of the air intake groove 16 of the hole-shaped structure, and a circle of sealing rings needs to be installed in the sealing groove.

[0054] like Figures 3 to 6 As shown, the base 14 is provided with a first connecting hole 22 penetrating along its axial direction, and a second connecting hole 23 is provided on the upper surface of the base 15 at a position corresponding to the first connecting hole 22, and fasteners for connecting the base 14 and the base 15 are connected in the first connecting hole 22 and the second connecting hole 23. In this embodiment, the fasteners are connected in the first connecting hole 22 and the second connecting hole 23, so that the connection between the base 14 and the base 15 can be achieved, and the air tightness of the air intake groove 16 can also be achieved. The fasteners can be a screw structure or a bolt structure, and can be installed in the first connecting hole 22 and the second connecting hole 23 to achieve a fastened connection between the base 15 and the base 14.

[0055] Obviously, the above embodiments of the utility model are only examples for clearly explaining the utility model, and are not intended to limit the implementation methods of the utility model. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made on the basis of the above description. It is not necessary and impossible to list all the implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the utility model should be included in the protection scope of the claims of the utility model.

Claims

1. An airbag type air bearing, characterized in that: include: A main body (1), wherein a plurality of annular throttling channels (11) are provided on the lower surface of the main body (1), an inlet flow channel (12) is provided on the main body (1), and the inlet flow channel (12) is connected to the throttling channel (11); An accommodating cavity (2), wherein the upper surface of the main body (1) is formed with the accommodating cavity (2), and the bottom of the accommodating cavity (2) has a spherical portion (21); A pressure rod (3), one end of the pressure rod (3) having a ball head (31) adapted to the spherical portion (21), the ball head (31) being installed in the spherical portion (21) and movably connected thereto, the other end of the pressure rod (3) extending out of the accommodating cavity (2); and a support assembly (4), the support assembly (4) being sleeved on the pressure rod (3) and the support assembly (4) being detachably connected to the accommodating cavity (2), the support assembly (4) having a deformable structure at a portion connected to the pressure rod (3), an air bag (41) being provided inside the support assembly (4), and an inflation port (42) being provided on the support assembly (4) and communicating with the air bag (41).

2. The airbag type air bearing according to claim 1, characterized in that: The support assembly (4) comprises: A support member (43), the support member (43) being an annular structure, the support member (43) being detachably connected to the accommodating cavity (2); and An inner lining member (44), the inner lining member (44) being made of an elastic material, the inner lining member (44) being sleeved on the pressure rod (3) and connected to the support member (43), the air bag (41) being formed between the support member (43) and the inner lining member (44).

3. The airbag type air bearing according to claim 2, characterized in that: The lining member (44) comprises a lining (441), a first connecting member (442) and a second connecting member (443) which are respectively sleeved on the pressure rod (3); the first connecting member (442) is respectively connected to the upper end surface of the support member (43) and the lining (441); and the second connecting member (443) is respectively connected to the lower end surface of the support member (43) and the lining (441).

4. The airbag type air bearing according to claim 2, characterized in that: An external thread is provided on the outer peripheral surface of the support member (43), an internal thread is provided on the inner wall surface of the accommodating cavity (2), and the internal thread is threadably connected to the external thread.

5. The airbag type air bearing according to claim 2, characterized in that: A boss (25) is formed on the upper surface of the main body (1), the accommodating cavity (2) is opened on the boss (25), the inflation port (42) is opened on the support member (43), a through hole (13) is opened on the peripheral surface of the boss (25), and the through hole (13) is connected to the inflation port (42).

6. The airbag type air bearing according to claim 2, characterized in that: The pressure rod (3) is formed with a step (32) at the position where it is connected to the ball head (31), and the lower end surface of the lining member is located on the step (32).

7. The airbag type air bearing according to claim 1, characterized in that: The portion of the pressure rod (3) extending out of the accommodating cavity (2) is provided with an external thread, and the end of the pressure rod (3) away from the ball head (31) is provided with an adjustment groove (33) for adjusting the pressure rod.

8. The airbag type air bearing according to any one of claims 1 to 7, characterized in that: The main body (1) comprises a base (14) and a seat (15), wherein the base (14) is detachably connected to the top of the seat (15), the accommodating chamber (2) is formed on the upper surface of the base (14), the inlet flow channel (12) is opened along the outer side of the base (14) toward the center thereof, the lower bottom surface of the base (14) is provided with an inlet groove (16), the inlet groove (16) is connected with the inlet flow channel (12), the throttling channel (11) is located on the lower surface of the seat (15), the seat (15) is provided with a throttling hole (17) connecting the throttling channel (11) and the inlet groove (16), the inner and outer sides of the inlet groove (16) are respectively provided with sealing rings (18), and the sealing ring (18) is sandwiched between the base (14) and the seat (15).

9. The airbag type air bearing according to claim 8, characterized in that: A first annular sealing groove (19) and a second annular sealing groove (20) are respectively formed on the lower bottom surface of the base (14) and located inside and outside the air inlet groove (16), and each of the sealing rings (18) is installed in the first sealing groove (19) and the second sealing groove (20).

10. The airbag type air bearing according to claim 8, characterized in that: The base (14) is provided with a first connecting hole (22) extending therethrough in an axial direction thereof, and a second connecting hole (23) is provided on an upper surface of the base (15) at a position corresponding to the first connecting hole (22), and fasteners for connecting the base (14) and the base (15) are connected in the first connecting hole (22) and the second connecting hole (23).

Images