Vertical cavity plasma excitation device

Abstract

The utility model relates to the technical field of microwave plasmas, and discloses a vertical cavity plasma excitation device, which comprises an insulating seat, the upper surface of the insulating seat is fixedly connected with a flip support, the inner wall of the flip support is rotatably connected with a rotating shaft, the upper surface of a cavity base is fixedly connected with a vertical cavity body, and the upper surface of the cavity base is fixedly connected with the rotating shaft. The inner wall of the vertical cavity body is fixedly connected with a lower polar plate body, the inner wall of the flip cover body is fixedly connected with an upper polar plate high-voltage binding post, the inner wall of the flip cover body is fixedly connected with an upper polar plate body, and the lower surface of the cavity base is provided with a supporting assembly. According to the utility model, the sample is convenient to take and place when the flip cover is opened, the cavity can be sealed when the flip cover is closed, the upper pole plate is arranged on the inner side of the flip cover, the high-voltage binding post of the upper pole plate is connected to a radio-frequency power supply, the lower pole plate is arranged on the inner side of the cavity base, and the high-voltage binding post of the lower pole plate is connected to radio-frequency voltage. The use is safe.

Description

Technical Field

[0001] The utility model relates to the technical field of microwave plasma, in particular to a vertical cavity plasma excitation device. Background Art

[0002] Plasma is the fourth state of matter, usually composed of ions and electrons in gas or high-temperature substances. When the gas or substance is heated to a high enough temperature, the electrons in the atoms are stripped away, forming positively charged ions and free electrons. These ions and free electrons form plasma, which has electrical and magnetic properties and is responsive to electromagnetic fields. The vertical cavity design enables plasma to form and remain stable inside the device, thereby achieving efficient energy transmission. This design helps to concentrate the excitation energy and transfer it to the material to be processed, improving energy utilization.

[0003] After searching, a microwave plasma excitation device is disclosed in the announcement number: CN219248146U, including a waveguide cavity, the waveguide cavity includes a first cavity, a second cavity and a third cavity connected in sequence, the cross-sectional area of ​​the first cavity is smaller than the cross-sectional area of ​​the third cavity, the cross-sectional area of ​​the second cavity gradually increases along the direction from the first cavity to the third cavity, the first cavity passes through a quartz tube, and an auxiliary excitation conductor is embedded in the inner wall of the quartz tube at the junction with the first cavity, one end of the quartz tube is provided with a connecting sleeve, the connecting sleeve is connected to the carrier gas heat dissipation module, the carrier gas heat dissipation module is also connected to the third cavity, a magnetron is arranged in the carrier gas heat dissipation module, the output shaft of the magnetron extends to the inside of the third cavity, and the carrier gas heat dissipation module can input the heat dissipation medium for cooling the magnetron into the quartz tube. The excitation device of the utility model reduces the complexity of the equipment and improves the integration between the functional modules.

[0004] However, the device in the above application does not have insulating components and structures during use, which may lead to the problem of unstable machine current due to the proximity of the device to the ground when plasma is activated during use. Utility Model Content

[0005] In order to make up for the above shortcomings, the utility model provides a vertical cavity plasma excitation device, which aims to improve the components and structures that are not insulated during use, which may cause the device to be close to the ground when the plasma is activated during use, resulting in unstable machine current.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A vertical cavity plasma excitation device comprises an insulating seat, the upper surface of the insulating seat is fixedly connected to a flip cover bracket, the inner wall of the flip cover bracket is rotatably connected to a rotating shaft, the outer wall of the rotating shaft is fixedly connected to a flip cover body, the lower surface of the insulating seat is fixedly connected to a cavity base, the upper surface of the cavity base is fixedly connected to a vertical cavity body, the inner wall of the vertical cavity body is fixedly connected to a lower pole plate body, the inner wall of the cavity base is fixedly connected to a lower pole plate high-voltage terminal, the inner wall of the cavity base is fixedly connected to an exhaust port, the inner wall of the flip cover body is fixedly connected to an air inlet, the inner wall of the flip cover body is fixedly connected to an upper pole plate high-voltage terminal, the inner wall of the flip cover body is fixedly connected to an upper pole plate body, and a support assembly is provided on the lower surface of the cavity base.

[0008] Preferably, the support assembly comprises a top plate, the upper surface of the top plate is fixedly connected to the lower surface of the cavity base, and the lower surface of the top plate is fixedly connected to a connecting block.

[0009] Preferably, the inner wall of the connecting block is rotatably connected to a first sliding column, and the outer wall of the first sliding column is rotatably connected to a bent rod.

[0010] Preferably, the inner wall of the curved rod is rotatably connected to a sliding block, and the outer wall of the sliding block is fixedly connected to a second sliding column.

[0011] Preferably, the outer wall of the second sliding column is slidably connected to a bottom plate, and the inner wall of the bottom plate is provided with a sliding groove.

[0012] Preferably, the outer wall of the sliding block is slidably connected to the inner wall of the sliding groove, and the outer wall of the sliding block is rotatably connected to a hydraulic cylinder.

[0013] Preferably, the output end of the hydraulic cylinder is fixedly connected with a connecting plate, and the outer wall of the connecting plate is fixedly connected to the outer wall of the bent rod.

[0014] Preferably, the outer wall of the curved rod is slidably connected to a limit plate, and the upper surface of the limit plate is fixedly connected to the lower surface of the top plate.

[0015] The utility model has the following beneficial effects:

[0016] 1. In the utility model, the flip cover can be opened or closed. When opened, the large-diameter vertical cavity is convenient for taking and placing samples. When closed, the cavity can be sealed. The upper electrode plate is installed on the inner side of the flip cover, and the radio frequency power supply is connected through the upper electrode plate high-voltage terminal. The lower electrode plate is installed on the inner side of the cavity base, and the radio frequency voltage is connected through the lower electrode plate high-voltage terminal. The upper flip cover design is simple to operate and convenient for taking and placing samples. The insulating seat design insulates the upper and lower electrodes, which is safe to use.

[0017] 2. In the utility model, the hydraulic cylinder drives the connecting plate under the limit of the slider to drive the bent rod to slide on the inner wall of the limit plate, and drives the slider to slide on the inner wall of the slide groove. During use, the bent rod can adjust the height of the top plate under the limit of the first slide column.

[0018] 3. In the utility model, the flap is closed and the air extraction port is connected to the vacuum pump. When the air pressure in the vertical cavity drops below 80Pa, the upper and lower radio frequency power supplies are turned on, plasma is generated between the upper and lower parallel plates, and a glow reaction occurs. The vertical large-diameter cavity has a large cross-sectional bottom area and can accommodate more samples. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A three-dimensional diagram of a vertical cavity plasma excitation device proposed by the utility model;

[0020] Figure 2 This is a schematic diagram of a lower electrode plate of a vertical cavity plasma excitation device proposed by the utility model;

[0021] Figure 3 A schematic diagram of an exhaust port of a vertical cavity plasma excitation device proposed by the utility model;

[0022] Figure 4 A schematic diagram of a lower plate high voltage terminal of a vertical cavity plasma excitation device proposed by the utility model;

[0023] Figure 5 The utility model is a schematic diagram of a bottom plate of a vertical cavity plasma excitation device.

[0024] Legend:

[0025] 1. Insulating seat; 2. Flip cover bracket; 3. Rotating shaft; 4. Flip cover body; 5. Vertical cavity body; 6. Cavity base; 7. Lower plate high voltage terminal; 8. Exhaust port; 9. Upper plate high voltage terminal; 10. Air inlet; 11. Upper plate body; 12. Lower plate body; 13. Connecting block; 14. First slide post; 15. Bending rod; 16. Sliding block; 17. Second slide post; 18. Bottom plate; 19. Slide groove; 20. Hydraulic cylinder; 21. Connecting plate; 22. Limiting plate; 23. Top plate. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings of the specification of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] Reference Figure 2-Figure 4 The utility model provides an embodiment: a vertical cavity plasma excitation device, including an insulating seat 1, characterized in that: the upper surface of the insulating seat 1 is fixedly connected with a flip cover bracket 2, the inner wall of the flip cover bracket 2 is rotatably connected with a rotating shaft 3, the outer wall of the rotating shaft 3 is fixedly connected with a flip cover body 4, the lower surface of the insulating seat 1 is fixedly connected with a cavity base 6, the upper surface of the cavity base 6 is fixedly connected with a vertical cavity body 5, the inner wall of the vertical cavity body 5 is fixedly connected with a lower plate body 12, the inner wall of the cavity base 6 is fixedly connected with a lower plate body 12, and the inner wall of the cavity base 6 is fixedly connected with a lower plate body 12. The wall is fixedly connected with a lower plate high voltage terminal 7, the inner wall of the cavity base 6 is fixedly connected with an air extraction port 8, the inner wall of the flip cover body 4 is fixedly connected with an air inlet 10, the inner wall of the flip cover body 4 is fixedly connected with an upper plate high voltage terminal 9, the inner wall of the flip cover body 4 is fixedly connected with an upper plate body 11, and a support assembly is provided on the lower surface of the cavity base 6; the support assembly includes a top plate 23, the upper surface of the top plate 23 is fixedly connected to the lower surface of the cavity base 6, and the lower surface of the top plate 23 is fixedly connected with a connecting block 13;

[0028] Specifically, the flip cover body 4 can be opened or closed, and when opened, the large-diameter vertical cavity is convenient for taking and placing samples; when closed, the cavity can be sealed, the upper electrode plate body 11 is installed on the inner side of the flip cover body 4, and the radio frequency power supply is connected through the upper electrode plate high-voltage terminal 9, the lower electrode plate body 12 is installed on the inner side of the cavity base 6, and the radio frequency voltage is connected through the lower electrode plate high-voltage terminal 7, the flip cover body 4 is closed, the exhaust port 8 is connected to the vacuum pump, the upper and lower electrode radio frequency power supplies are turned on, plasma is generated between the upper and lower parallel plates, and a glow reaction occurs. Through the upper flip cover design, the operation is simple during use, and the samples are convenient to take and place. A large number of samples can be placed during use. During use, the plasma excitation effect is stable through the parallel electrode plate capacitive plasma discharge principle.

[0029] Reference Figure 1 and Figure 4 The inner wall of the connecting block 13 is rotatably connected to a first sliding column 14, and the outer wall of the first sliding column 14 is rotatably connected to a bent rod 15; the inner wall of the bent rod 15 is rotatably connected to a slider 16, and the outer wall of the slider 16 is fixedly connected to a second sliding column 17; the outer wall of the second sliding column 17 is slidably connected to a bottom plate 18, and a sliding groove 19 is provided on the inner wall of the bottom plate 18;

[0030] Specifically, the curved rod 15 moves under the limit of the connecting block 13, which provides better stability during use and can prevent deviation and falling off. During use, the second sliding column 17 slides on the inner wall of the bottom plate 18 to achieve a second limit effect, thereby achieving a lifting effect.

[0031] Reference Figure 4The outer wall of the slider 16 is slidably connected to the inner wall of the slide groove 19, and the outer wall of the slider 16 is rotatably connected to the hydraulic cylinder 20; the output end of the hydraulic cylinder 20 is fixedly connected to the connecting plate 21, and the outer wall of the connecting plate 21 is fixedly connected to the outer wall of the curved rod 15; the outer wall of the curved rod 15 is slidably connected to the limiting plate 22, and the upper surface of the limiting plate 22 is fixedly connected to the lower surface of the top plate 23;

[0032] Specifically, the slider 16 slides under the limit of the slide groove 19, which plays a limiting role during use. During use, the hydraulic cylinder 20 pushes the connecting plate 21 to allow the curved rod 15 to slide on the inner wall of the limit plate 22, which plays an effect of adjusting the height of the top plate 23 during use.

[0033] Working principle: when the device is needed, the flip cover body 4 can be opened or closed. When opened, the large-caliber vertical cavity is convenient for taking and placing samples. The flip cover bracket 2 and the rotating shaft 3 can further provide better limiting and stability effects for the flip cover body 4 during the opening process, and the vertical cavity body 5 can be opened more smoothly; when closed, the cavity can be sealed, the upper electrode plate body 11 is installed on the inner side of the flip cover body 4, and the radio frequency power supply is connected through the upper electrode plate high-voltage terminal 9, the lower electrode plate body 12 is installed on the inner side of the cavity base 6, and the radio frequency voltage is connected through the lower electrode plate high-voltage terminal 7. The flip cover body 4 is closed, and the exhaust port 8 is connected to the vacuum pump. When the air pressure in the vertical cavity drops below 80Pa, the upper and lower electrode radio frequency power supplies are turned on, and plasma is generated between the upper and lower parallel plates, and a glow reaction occurs. The upper flip cover design is simple to operate and convenient for taking and placing samples. The insulating seat 1 design insulates the upper and lower electrodes, which is safe to use. It adopts high-voltage AC positive and negative high The high-frequency wave bombardment sample is more efficient. The parallel electrode plate capacitive plasma discharge principle has a stable plasma excitation effect. The large-area upper and lower electrode plate design makes the plasma excitation uniform in the cavity space and the plasma concentration high. The air inlet 10 is designed to allow a variety of excitation gases, protective gases, and mixed gases to pass through. It is easy to use. The hydraulic cylinder 20 drives the connecting plate 21 under the limit of the slider 16 to drive the curved rod 15 to slide on the inner wall of the limit plate 22. At the same time, the curved rod 15 rotates under the limit of the connecting block 13, driving the slider 16 to slide on the inner wall of the slide groove 19. During use, the curved rod 15 is used to limit the top plate 23 under the limit of the first slide column 14 to achieve the effect of adjusting the height of the top plate 23. During use, the device not only has the effect of placing multiple samples at the same time and facilitating the placement of samples, but also has the air inlet 10 design, which can pass through a variety of excitation gases, protective gases, and mixed gases. It is easy to use and has the effect of adjusting the height of the device according to different use conditions.

[0034] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vertical cavity plasma excitation device, comprising an insulating seat (1), characterized in that: The upper surface of the insulating seat (1) is fixedly connected to a flip cover bracket (2); the inner wall of the flip cover bracket (2) is rotatably connected to a rotating shaft (3); the outer wall of the rotating shaft (3) is fixedly connected to a flip cover body (4); the lower surface of the insulating seat (1) is fixedly connected to a cavity base (6); the upper surface of the cavity base (6) is fixedly connected to a vertical cavity body (5); the inner wall of the vertical cavity body (5) is fixedly connected to a lower plate body (12); the inner wall of the cavity base (6) is fixedly connected to a lower plate high-voltage terminal (7); the inner wall of the cavity base (6) is fixedly connected to an air extraction port (8); the inner wall of the flip cover body (4) is fixedly connected to an air inlet (10); the inner wall of the flip cover body (4) is fixedly connected to an upper plate high-voltage terminal (9); the inner wall of the flip cover body (4) is fixedly connected to an upper plate body (11); and a support assembly is provided on the lower surface of the cavity base (6).

2. A vertical cavity plasma excitation device according to claim 1, characterized in that: The support assembly comprises a top plate (23), the upper surface of the top plate (23) is fixedly connected to the lower surface of the cavity base (6), and the lower surface of the top plate (23) is fixedly connected to a connecting block (13).

3. The vertical cavity plasma excitation device according to claim 2, characterized in that: The inner wall of the connecting block (13) is rotatably connected to a first sliding column (14), and the outer wall of the first sliding column (14) is rotatably connected to a bent rod (15).

4. The vertical cavity plasma excitation device according to claim 3, characterized in that: The inner wall of the curved rod (15) is rotatably connected to a sliding block (16), and the outer wall of the sliding block (16) is fixedly connected to a second sliding column (17).

5. The vertical cavity plasma excitation device according to claim 4, characterized in that: The outer wall of the second sliding column (17) is slidably connected to a bottom plate (18), and a sliding groove (19) is provided on the inner wall of the bottom plate (18).

6. The vertical cavity plasma excitation device according to claim 5, characterized in that: The outer wall of the slider (16) is slidably connected to the inner wall of the slide groove (19), and the outer wall of the slider (16) is rotatably connected to a hydraulic cylinder (20).

7. The vertical cavity plasma excitation device according to claim 6, characterized in that: The output end of the hydraulic cylinder (20) is fixedly connected to a connecting plate (21), and the outer wall of the connecting plate (21) is fixedly connected to the outer wall of the bent rod (15).

8. The vertical cavity plasma excitation device according to claim 7, characterized in that: The outer wall of the curved rod (15) is slidably connected to a limit plate (22), and the upper surface of the limit plate (22) is fixedly connected to the lower surface of the top plate (23).

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