Material clamping mechanism and machining device

Abstract

The utility model relates to a material clamping mechanism and a processing device, the material clamping mechanism has a clamping position and a loosening position, the clamping jaw assembly comprises a clamping jaw assembly and a gap adjusting mechanism, the clamping jaw assembly comprises a first jaw part and a second jaw part, the first jaw part and the second jaw part can get close to each other and get away from each other along a first direction, and the gap adjusting mechanism is arranged between the first jaw part and the second jaw part. And the gap adjusting mechanism is arranged on the first claw part or the second claw part in the first direction and adjusts the clamping space between the first claw part and the second claw part when the clamping claw assembly is located at the loosening position, and the clamping space is used for clamping the workpiece. The gap adjusting mechanism is arranged, so that the clamping gap between the movable first jaw part and the fixed second jaw part of the clamping jaw assembly is adjustable, the clamping requirements of products of different specifications can be met, the applicability of the clamping mechanism is improved, the situation that materials are stuck or two pieces of materials are clamped at the same time is avoided, and the clamping efficiency is improved. The safety of the clamping jaw assembly and the product is protected, and the machining efficiency of equipment can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a material clamping mechanism and a processing device. Background Art

[0002] With the rapid development of the current semiconductor industry over the years, diversified equipment has emerged, and the mechanisms also have many similarities. For example, processing devices such as wafer cutting machines and splitting machines all have a clamping mechanism for taking materials from a material box. Generally, there are many ways to drive the clamping jaws of the clamping mechanism, such as using a cylinder to push out and clamp, and retract to relax; or using a slide cylinder to extend and rise, and retract and descend. The opening of the existing clamping jaw assembly, that is, its clamping gap, cannot be controlled, and the clamping jaw is prone to jamming or clamping two pieces of material at the same time, thereby affecting the processing efficiency of the equipment and even damaging the clamping jaw. Utility Model Content

[0003] The first object of the utility model is to provide a clamping mechanism, so that the opening of the clamping jaws can be adjusted to avoid the occurrence of material jamming or clamping two sheets of material at the same time.

[0004] The second object of the utility model is to provide a processing device including the above-mentioned clamping mechanism.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A material clamping mechanism, comprising:

[0007] A clamping jaw assembly, wherein the clamping jaw assembly has a clamping position and a loosening position, and the clamping jaw assembly includes a first jaw portion and a second jaw portion, and the first jaw portion and the second jaw portion can move closer to and farther from each other along a first direction;

[0008] The gap adjustment mechanism is arranged on the first jaw portion or the second jaw portion along the first direction and can adjust the clamping space between the first jaw portion and the second jaw portion when the clamping jaw assembly is in a released position, wherein the clamping space is used to clamp a workpiece.

[0009] Optionally, the gap adjustment mechanism includes a limit block which is adjustably arranged on one of the first claw and the second claw along the first direction, and the limit block contacts and cooperates with the other of the first claw and the second claw when the clamping jaw assembly is in a released position to control the clamping space between the first claw and the second claw.

[0010] Optionally, the first claw is a movable claw, the second claw is a fixed claw, the limit block is arranged on the movable claw through a threaded fastener, one of the limit block and the movable claw is provided with a bar hole, the length direction of the bar hole is the first direction, the other of the limit block and the movable claw is provided with a threaded hole, and the threaded fastener passes through the bar hole and cooperates with the threaded hole.

[0011] Optionally, the first claw portion includes a first clamping portion and a first fixing portion connected to the first clamping portion, the second claw portion includes a second clamping portion and a second fixing portion connected to the second clamping portion, the clamping space is formed between the first clamping portion and the second clamping portion, the first fixing portion and the second fixing portion extend along the first direction, the second fixing portion is provided with a sliding groove, and the first fixing portion is slidably arranged in the sliding groove.

[0012] Optionally, the limit block is arranged on the first fixing portion, and the lower surface of the limit block can contact and cooperate with the surface of the second clamping portion away from the first clamping portion when the clamping jaw assembly is in a released position to control the clamping space between the first claw portion and the second claw portion.

[0013] Optionally, an end of the first clamping portion away from the first fixing portion and an end of the second clamping portion away from the second fixing portion are respectively provided with arc chamfers.

[0014] Optionally, the clamping mechanism further includes a driving assembly, and the driving assembly includes:

[0015] a first locking member, the first locking member being reciprocatable along a first direction;

[0016] a second locking member, the second locking member can reciprocate relative to the first locking member along a second direction, the second locking member and the first locking member can be locked and matched during the movement, and the first direction intersects with the second direction;

[0017] One of the first claw and the second claw is in transmission connection with the first locking member, and the first locking member drives one of the first claw and the second claw to move, and when the first locking member and the second locking member are locked together, the first claw and the second claw are in a state of clamping the workpiece, and when the first locking member and the second locking member are released from engagement, the first claw and the second claw are in a state of releasing the workpiece.

[0018] Optionally, the first locking member and the second locking member are coupled to each other through a direction-changing transmission structure to convert the reciprocating movement of the first locking member along the first direction into the reciprocating movement of the second locking member along the second direction.

[0019] Optionally, the direction-changing transmission structure includes:

[0020] A transmission surface, wherein the transmission surface is disposed on one of the first locking member and the second locking member, the transmission surface is disposed obliquely, and a line connecting two ends of the transmission surface is disposed at an angle to the first direction and the second direction respectively;

[0021] A transmission roller, wherein the transmission roller is arranged on the other of the first locking member and the second locking member, and the transmission inclined surface cooperates with the transmission roller to convert the reciprocating movement of the second locking member along the second direction into the reciprocating movement of the first locking member along the first direction.

[0022] Optionally, the direction-changing transmission structure further includes a locking surface, wherein the locking surface is connected to an end of the transmission surface away from the transmission roller, and the locking surface is parallel to the second direction.

[0023] A processing device, comprising the clamping mechanism as described in any one of the above items.

[0024] Optionally, the processing device is a splitter.

[0025] The utility model provides a material clamping mechanism, which comprises a clamping jaw assembly and a gap adjustment mechanism, wherein the clamping jaw assembly comprises a first jaw portion and a second jaw portion, the first jaw portion and the second jaw portion can approach and move away from each other along a first direction, one of the first jaw portion and the second jaw portion is a movable jaw portion, and the other is a fixed jaw portion, the movable jaw portion reciprocates relative to the fixed jaw portion to achieve clamping or loosening of the workpiece, or both are movable jaw portions, and the two movable jaw portions move synchronously toward or in the opposite direction to achieve clamping or loosening of the workpiece; the gap adjustment mechanism is arranged on the first jaw portion along the first direction, and adjusts the clamping space between the first jaw portion and the second jaw portion when the clamping jaw assembly is in a loosened position, and the clamping space is used to clamp the workpiece.

[0026] By setting up a gap adjustment mechanism, the clamping gap between the first jaw and the second jaw of the clamping jaw assembly in this case can be adjusted, which can adapt to the clamping requirements of products of different specifications, improve the applicability of the clamping mechanism, avoid the occurrence of material jamming or clamping two pieces of material at the same time, protect the safety of the clamping jaw assembly and the product, and help improve the processing efficiency of the equipment.

[0027] The utility model also discloses a processing device, which includes the material clamping mechanism. Since the processing device adopts the material clamping mechanism, the processing device should have the same beneficial effects as the material clamping mechanism, which will not be described in detail herein. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A schematic diagram of the structure of the clamping mechanism provided in the embodiment of the utility model;

[0030] Figure 2 A partially enlarged schematic diagram of a material clamping mechanism provided in an embodiment of the utility model;

[0031] Figure 3 A top view of the clamping mechanism provided in the embodiment of the utility model

[0032] Figure 4 for Figure 3 A-direction sectional view;

[0033] Figure 5 for Figure 3 B-section view in the figure.

[0034] In the figure:

[0035] 1 is a clamping jaw assembly; 101 is a movable claw portion; 1011 is a first clamping portion; 1012 is a first fixing portion; 1013 is a slide groove; 102 is a fixed claw portion; 1021 is a second clamping portion; 1022 is a second fixing portion; 2 is a limit block; 201 is a strip hole; 3 is a driver; 4 is a support member; 5 is a sliding member; 6 is a sensing assembly; 601 is a sensing sheet; 602 is a detection device; 7 is a first locking member; 701 is a transmission surface; 702 is a locking surface; 8 is a support guide assembly; 801 is a guide seat; 802 is a first guide roller; 803 is a first mounting shaft; 804 is a second guide roller; 805 is a mounting base; 806 is a first elastic reset member; 9 is a second locking member; 10 is a transmission roller; 11 is a linear guide rail;. DETAILED DESCRIPTION

[0036] One of the cores of the utility model is to provide a material clamping mechanism. The structural design of the material clamping mechanism enables the opening of its clamping jaws to be adjustable, thereby avoiding the occurrence of material jamming or clamping two sheets of material at the same time.

[0037] Another core of the utility model is to provide a processing device including the above-mentioned clamping mechanism.

[0038] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0039] See also Figure 1 and Figure 2 , Figure 1 A schematic diagram of the structure of the clamping mechanism provided in the embodiment of the utility model, Figure 2 A partially enlarged schematic diagram of the material clamping mechanism provided in an embodiment of the utility model.

[0040] The embodiment of the utility model discloses a material clamping mechanism, which comprises a clamping jaw assembly 1 and a gap adjustment mechanism.

[0041] The clamping jaw assembly 1 has a clamping position and a release position. The clamping jaw assembly 1 includes a first jaw portion 101 and a second jaw portion 102. The first jaw portion 101 and the second jaw portion 102 can approach and move away from each other along a first direction. In one embodiment, one of the first jaw portion 101 and the second jaw portion 102 is a movable jaw portion, and the other is a fixed jaw portion. The movable jaw portion reciprocates relative to the fixed jaw portion to achieve clamping or loosening of the workpiece; in another embodiment, the first jaw portion 101 and the second jaw portion 102 are both movable jaw portions, and the two movable jaw portions move synchronously toward or in the opposite direction to achieve clamping or loosening of the workpiece; the gap adjustment mechanism is arranged on the first jaw portion 101 or the second jaw portion 102 along the first direction, and adjusts the clamping space between the first jaw portion 101 and the second jaw portion 102 when the clamping jaw assembly 1 is in the release position, and the clamping space is used to clamp the workpiece.

[0042] It can be seen that compared with the prior art, the clamping mechanism provided in the embodiment of the utility model is provided with a gap adjustment mechanism, so that the clamping gap between the first claw portion 101 and the second claw portion 102 of the clamping jaw assembly 1 in this case is adjustable, which can adapt to the clamping requirements of products of different specifications, improve the applicability of the clamping mechanism, avoid the occurrence of material jamming or clamping two pieces of material at the same time, protect the safety of the clamping jaw assembly 1 and the product, and help improve the processing efficiency of the equipment.

[0043] In the embodiment of the utility model, the gap adjustment mechanism includes a limit block 2 which is adjustably arranged on one of the first claw portion and the second claw portion along the first direction. When the clamping jaw assembly 1 is in the released position, the limit block 2 can contact and cooperate with the other of the first claw portion and the second claw portion to control the clamping space between the first claw portion 101 and the second claw portion 102, such as Figure 1 and Figure 2As shown, in a specific embodiment, the first claw portion 101 is a movable claw portion, and the second claw portion 102 is a fixed claw portion. When clamping or releasing, the second claw portion 102 remains fixed, and the first claw portion 101 reciprocates relative to the second claw portion 102, wherein the limit block 2 is arranged on the movable claw portion through a threaded fastener, and one of the limit block 2 and the movable claw portion is provided with a strip hole 201, and the length direction of the strip hole 201 is the first direction, and the other of the limit block 2 and the movable claw portion is provided with a threaded hole, and the threaded fastener passes through the strip hole 201 and cooperates with the threaded hole, and by setting the strip hole 201, the position of the limit block 2 on the movable claw portion can be adjusted, and the clamping space between the fixed claw portion and the movable claw portion can be adjusted by adjusting the position of the limit block 2 on the movable claw portion, such as Figure 1 and Figure 2 As shown, in this embodiment, the strip hole 201 is arranged on the limit block 2. It should be noted that, in the above embodiment, the limit block 2 is fixed with the threaded hole of the movable claw part by fastening bolts passing through the strip hole 201 thereon. In other embodiments, the threaded fastener may also be composed of a fastening bolt and a fastening nut. In this case, through holes may be arranged on both the limit member and the movable claw part, and at least one of the through holes of the two is the strip hole 201. By respectively arranging the strip hole 201 on the limit block 2 and the movable claw part, the adjustment range of the limit block 2 can be increased.

[0044] like Figure 2As shown, in the embodiment of the utility model, the first claw portion 101 includes a first clamping portion 1011 and a first fixing portion 1012 connected to the first clamping portion 1011, the first fixing portion 1012 extends along the first direction, and the first clamping portion 1011 and the first fixing portion 1012 are arranged at an angle, for example, the first clamping portion 1011 and the first fixing portion 1012 can be made perpendicular, similarly, the second claw portion 102 includes a second clamping portion 1021 and a second fixing portion 1022 connected to the second clamping portion 1021, the second fixing portion 1022 extends along the first direction, and the second clamping portion 1021 and the first fixing portion 1012 are arranged at an angle, the first clamping portion 1011 and the second clamping portion 1021 should be arranged in parallel or approximately in parallel, and the first clamping portion 1011 and the second A clamping space is formed between the clamping parts 1021. To avoid damaging the surface of the workpiece, a buffer pad can be arranged on the surface opposite to the first clamping part 1011 and the second clamping part 1021. The buffer pad can be an elastic pad such as a rubber pad, a silicone pad, etc., so as to play a buffering role when the first clamping part 1011 and the second clamping part 1021 contact the workpiece, thereby avoiding damaging the workpiece. The friction force between the first clamping part 1011, the second clamping part 1021 and the workpiece can be increased to make the clamping more stable. The second fixed part 1022 is provided with a slide groove 1013. The first fixed part 1012 is slidably arranged in the slide groove 1013. When the first claw part 101 and the second claw part 102 move relative to each other, the first fixed part 1012 slides back and forth along the slide groove 1013 of the second fixed part 1022.

[0045] like Figure 2 As shown, in a specific embodiment of the utility model, the limit block 2 is arranged on the first fixing portion 1012, and the lower surface of the limit block 2 contacts and cooperates with the surface of the second clamping portion 1021 away from the first clamping portion 1011 when the clamping jaw assembly 1 is in the loose position, so as to control the clamping space between the first claw portion 101 and the second claw portion 102, and further optimize the above technical solution, such as Figure 2 As shown, a limiting groove is set on the surface of the limit block 2 for cooperating with the first fixed part 1012, and the limit block 2 is slidably matched with the first fixed part 1012 through the limiting groove to ensure that the limit block 2 can and can only adjust its position relative to the first fixed part 1012 along the first direction to ensure that the lower surface of the limit block 2 is parallel to the surface of the second clamping part 1021 away from the first clamping part 1011.

[0046] As preferably, Figure 2As shown, in an embodiment of the utility model, arc chamfers are respectively provided at one end of the first clamping portion 1011 away from the first fixing portion 1012 and at one end of the second clamping portion 1021 away from the second fixing portion 1022. By providing arc chamfers at the ends of the first clamping portion 1011 and the second clamping portion 1021, the number of angles at which the first clamping portion 1011 and the second clamping portion 1021 contact the workpiece can be reduced to avoid scratching the workpiece, and the arc chamfers on the first clamping portion 1011 and the second clamping portion 1021 can form a flaring structure between the two clamping portions, making it easier for the workpiece to enter between the first clamping portion 1011 and the second clamping portion 1021.

[0047] like Figure 1 as well as Figures 3 to 5 As shown, in the embodiment of the utility model, the above-mentioned clamping mechanism also includes a driving component, the driving component includes a first locking member 7 and a second locking member 9, wherein the first locking member 7 can reciprocate along the first direction, and the second locking member 9 can reciprocate along the second direction relative to the first locking member 7, the second locking member 9 and the first locking member 7 can be locked and matched during the movement, the first direction intersects with the second direction, one of the first claw portion 101 and the second claw portion 102 is transmission-connected with the first locking member 7, the first locking member 7 drives one of the first claw portion 101 and the second claw portion 102 to move and when the first locking member 7 and the second locking member 9 are locked and matched, the first claw portion 101 and the second claw portion 102 are in a state of clamping the workpiece, and when the first locking member 7 and the second locking member 9 are released, the first claw portion 101 and the second claw portion 102 are in a state of releasing the workpiece, as shown in FIG. Figure 4 and Figure 5 As shown, in an embodiment of the utility model, the first claw portion 101, that is, the movable claw portion is rotatably connected to the first locking member 7. When the first locking member 7 is driven by the second locking member 9, the movable claw portion is driven to reciprocate relative to the second claw portion 102, that is, the fixed claw portion, thereby achieving clamping and loosening of the workpiece.

[0048] It should be noted that, in order to realize the movement of the second locking member 9, the above-mentioned drive assembly also includes a driver 3, which is used to drive the second locking member 9 to move back and forth. The driver 3 can be a piston cylinder, such as a pneumatic cylinder, a hydraulic cylinder, etc., or the driver 3 can be a linear motor, or the driver 3 includes a rotary motor and a transmission mechanism, and the transmission mechanism is used to convert the rotation of the rotary motor into a linear reciprocating movement. The transmission mechanism includes but is not limited to a screw slider mechanism, a gear rack mechanism, etc.

[0049] In the embodiment of the utility model, the first locking member 7 and the second locking member 9 are cooperated through the transmission of the reversing transmission structure to convert the reciprocating movement of the first locking member 7 along the first direction into the reciprocating movement of the second locking member 9 along the second direction. The reversing transmission structure adopts a stable and reliable pure mechanical structure. Compared with the driving component with a more complex structure, its accuracy and consistency are easier to ensure, thereby avoiding the accuracy of the relatively complex driving component from having an adverse effect on the accuracy of the clamping jaw assembly 1, ensuring the stability of the first locking member 7 during movement, and thereby improving the consistency of the clamping and releasing positions of the clamping jaw assembly 1 each time, thereby achieving the purpose of improving the clamping accuracy of the clamping jaw and the stability of long-term operation.

[0050] Specifically, the above-mentioned direction-changing transmission structure includes a transmission surface 701 and a transmission roller 10, wherein the transmission surface 701 is arranged on one of the first locking member 7 and the second locking member 9, the transmission surface 701 is inclined, and the connecting line of the two ends of the transmission surface 701 is respectively set at an angle to the first direction and the second direction. The transmission surface 701 can be a plane or a smooth curved surface. If the transmission surface 701 is a smooth curved surface, the inclined setting of the smooth curved surface means that the two ends of the smooth curved surface are not on the same plane parallel to the first direction. The transmission roller 10 is arranged on the other of the first locking member 7 and the second locking member 9, and the transmission inclined surface cooperates with the transmission roller 10 to convert the reciprocating movement of the second locking member 9 along the second direction into the reciprocating movement of the first locking member 7 along the first direction.

[0051] Furthermore, if Figure 4 and Figure 5 As shown, the direction-changing transmission structure also includes a locking surface 702, which is connected to an end of the transmission surface 701 away from the transmission roller 10, and the locking surface 702 is parallel to the second direction. When the transmission roller 10 rolls along the transmission surface 701, the transmission surface 701 can convert the movement of the first locking member 7 along the first direction into the movement of the second locking member 9 along the second direction. When the transmission roller 10 rolls along the transmission surface 701 to the locking surface 702, that is, because the locking surface 702 is parallel to the first direction, even if the driving assembly continues to move along the first direction, as long as the transmission roller 10 is still coordinated with the locking surface 702, the clamping position of the clamping jaw assembly 1 can be kept stationary. At this time, the first locking member 7 and the second locking member 9 are coordinated at a dead point position to avoid the problem of material falling during the transportation of the sheet.

[0052] like Figures 1 to 5As shown, in an embodiment of the utility model, the clamping mechanism also includes a support member 4, a sliding member 5 and a second elastic reset member, wherein the support member 4 is used to provide an installation position and support for the fixed claw portion of the clamping jaw assembly 1, the driving assembly and the sliding member 5. Of course, the support member 4 can adopt an integrated structure or a split structure, and the sliding member 5 can be reciprocatingly slidably arranged on the support member 4 along the second direction. In this case, the sliding member 5 is installed on the support member 4 through a linear guide rail 11, the second locking member 9 is arranged on the sliding member 5, the movable claw portion of the clamping jaw assembly 1 is arranged on the sliding member 5, and the second elastic reset member is arranged between the support member 4 and the sliding member 5. The second elastic reset member is used to drive the sliding member 5 to reset relative to the support member 4 when the driving assembly drives the first locking member 7 to reset.

[0053] In order to accurately obtain the position information of the clamping jaw assembly 1, in an embodiment of the utility model, the above-mentioned clamping mechanism also includes a sensing assembly 6, the sensing assembly 6 includes a sensing sheet 601 and a detection device 602, wherein the sensing sheet 601 is arranged on the sliding member 5, and the detection device 602 is arranged on the supporting member 4, the sensing sheet 601 is used to trigger the detection device 602 when the driving assembly drives the first locking member 7 to make the clamping jaw assembly 1 in a released position, and the detection device 602 includes but is not limited to a photoelectric sensor, a proximity switch, a Hall element, etc. In an embodiment of the utility model, the detection device 602 is a photoelectric sensor. When the clamping jaw assembly 1 is in a released position, the distance between the sensing sheet 601 and the detection device 602 is the shortest. At this time, the detection device 602 can detect the sensing sheet 601, indicating that the clamping jaw assembly 1 is in an open state at this time. When the driving assembly drives the first locking member 7 to cooperate with the second locking member 9 to clamp the clamping jaw assembly 1, the sensing sheet 601 is away from the detection device 602. When the detection device 602 cannot detect the sensing sheet 601, the clamping jaw assembly 1 is in a clamped position.

[0054] In order to ensure that the first locking member 7 remains stable during the reciprocating movement and avoid deviating from the predetermined route when subjected to the reaction force of the second locking member 9, in an embodiment of the utility model, the clamping mechanism includes a support and guide assembly 8, which is slidably matched with the first locking member 7 at least below the first locking member 7 to support and guide the first locking member 7 along the first direction.

[0055] like Figure 4 and Figure 5As shown, the support guide assembly 8 includes a guide seat 801 and a first guide roller 802, wherein the guide seat 801 is arranged below the first locking member 7, and multiple first guide rollers 802 are rotatably arranged on the surface of the guide seat 801 facing the first locking member 7 in sequence along the first direction, and each first guide roller 802 is used to roll with the bottom surface of the first locking member 7 to guide and support the first locking member 7. The number of first guide rollers 802 can be set according to the stroke of the first locking member 7, and the axial dimension of the first guide roller 802 should be designed according to the width dimension of the first locking member 7, that is, the axial dimension of the first guide roller 802 should be close to or equal to the width dimension of the first locking member 7 to provide good support. Of course, the axial dimension of the first guide roller 802 can also be significantly smaller than the width dimension of the first locking member 7, so as to support the first locking member 7 at the same time by setting multiple groups of first guide rollers 802.

[0056] It is not difficult to understand that, through the above-mentioned support and guide assembly 8, support can be provided for the first locking member 7 during the movement of the first locking member 7, ensuring that the first locking member 7 moves along a predetermined path, thereby ensuring the clamping accuracy of the clamping jaw assembly 1, and reducing the resistance to the movement of the first locking member 7, reducing the friction encountered by the first locking member 7 during the movement, avoiding the problem of the first locking member 7 being stuck before reaching the locking point due to excessive friction, and ensuring that the first locking member 7 can move to the locking point relative to the second locking member 9, thereby stably clamping the product.

[0057] It can be seen that in the above embodiment, the support and guide assembly 8 can only support and guide the first locking member from one direction. In order to improve the support and guide effect, in the embodiment of the utility model, the support and guide assembly 8 also includes a second guide roller 804, and the two groups of second guide rollers 804 are respectively located on both sides of the first guide roller 802, and each group of second guide rollers 804 includes a plurality of guide rollers 804 that are rotatably arranged on the guide seat 801 in sequence along the first direction. Figure 4 It can be seen that the rotating axis of the second guide roller 804 is perpendicular to the rotating axis of the first guide roller 802, and the two groups of second guide rollers 804 roll with the side surfaces of the first locking member 7 from both sides of the first locking member 7 to guide and support the first locking member 7. In this way, the supporting and guiding assembly 8 can support and guide the first locking member 7 from the bottom surface of the first locking member 7, and guide and limit the first locking member 7 from two sides at the same time, to ensure that the first locking member 7 can reciprocate along a predetermined path, and avoid an increase in the movement resistance of the first locking member 7 through rolling contact.

[0058] To reduce impact, the outer circumference of the first guide roller 802 and the second guide roller 804 may be covered with a buffer layer, where the buffer layer is made of a soft elastic material, such as rubber, silicone, etc.

[0059] like Figure 4 and Figure 5 As shown, in an embodiment of the utility model, the first guide roller 802 is rotatably disposed on the guide seat 801 through the first mounting axis 803, second mounting axes are respectively disposed at both ends of the first mounting axis 803, and the second guide roller 804 is rotatably disposed on the first mounting axis 803 through the second mounting axis, and the second mounting axis is perpendicular to the first mounting axis 803.

[0060] It should be noted that the guide seat 801 can be fixed or movably arranged. When the guide seat 801 is fixed, the number of the first guide rollers 802 should ensure that the first guide rollers 802 can cover the entire stroke of the first locking member 7. In the embodiment of the utility model, the guide seat 801 is movably arranged. Figure 4 and Figure 5 As shown, the support and guide assembly 8 also includes a mounting base 805, and the guide seat 801 can slide back and forth along a first direction and is arranged on the mounting base 805. A first elastic reset member 806 is arranged between the clamping jaw assembly 1 and the mounting base 805, and the state of the first elastic reset member 806 can also be detected by a photoelectric switch, so that when picking up materials, it is necessary to move close to the workpiece, that is, the clamping jaw assembly 1 will also move close to the workpiece. When the clamping jaw assembly 1 reaches the position of the workpiece and continues to move close to the workpiece, the front end of the workpiece will support the claw portion of the clamping jaw assembly 1 (such as the movable claw portion 101), and continue to drive the clamping jaw assembly 1 to move. Since the workpiece has already supported the clamping jaw assembly 1, it cannot continue to move. However, due to the existence of the first elastic reset member 806, the first elastic reset member 806 will be compressed, and the first elastic reset member 806 applies an external force to the movable clamping jaw 101 in the direction of approaching the workpiece. Since the movable clamping jaw 101 is indirectly connected to the guide seat 801, it will drive the guide seat 801 to move in the direction close to the workpiece. Due to the presence of the photoelectric switch, the photoelectric switch will be triggered at this time, thereby sending a signal to inform that the clamping jaw assembly is in place and can clamp the workpiece. Therefore, the first elastic reset member 806 can be set to sense whether the clamping jaw assembly 1 is in place; it can be understood that the reset process of the first elastic reset member 806 is opposite to the above compression process, which will not be repeated here.

[0061] Specifically, Figure 3 and Figure 4 As shown, the mounting base 805 is provided with a guide slide rod, and the guide seat 801 is provided with a guide hole. The guide seat 801 slides with the guide slide rod through the guide hole, and the first elastic reset member 806 is sleeved on the guide slide rod. Of course, it can also be reversed, with the guide slide rod being provided on the guide seat 801 and the guide hole being provided on the mounting base 805.

[0062] The embodiment of the utility model further provides a processing device, which includes the clamping mechanism as described in the above embodiment. Since the processing device adopts the clamping mechanism in the above embodiment, the technical effect of the processing device please refer to the above embodiment.

[0063] Furthermore, in an embodiment of the utility model, the processing device is a wafer splitting machine. Of course, it should be noted that the processing device is not limited to a wafer splitting machine. In other embodiments, the processing device can also be other devices that require a clamping mechanism, such as a wafer cutting machine, etc., which is not limited here.

[0064] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0065] This article uses specific examples to illustrate the principles and implementation methods of the utility model. The above examples are only used to help understand the core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A clamping mechanism, characterized in that: include: A clamping jaw assembly, wherein the clamping jaw assembly has a clamping position and a loosening position, and the clamping jaw assembly includes a first jaw portion and a second jaw portion, wherein the first jaw portion and the second jaw portion can move toward and away from each other along a first direction; A gap adjustment mechanism is arranged on the first jaw portion or the second jaw portion along the first direction and adjusts the clamping space between the first jaw portion and the second jaw portion when the clamping jaw assembly is in the release position, wherein the clamping space is used to clamp a workpiece.

2. The clamping mechanism according to claim 1, characterized in that: The gap adjustment mechanism includes a limit block which is adjustably arranged on one of the first claw and the second claw along the first direction. When the clamping jaw assembly is in a released position, the limit block can contact and cooperate with the other of the first claw and the second claw to control the clamping space between the first claw and the second claw.

3. The clamping mechanism according to claim 2, characterized in that: The first claw is a movable claw, the second claw is a fixed claw, the limit block is arranged on the movable claw through a threaded fastener, one of the limit block and the movable claw is provided with a strip hole, the length direction of the strip hole is the first direction, the other of the limit block and the movable claw is provided with a threaded hole, and the threaded fastener passes through the strip hole and cooperates with the threaded hole.

4. The clamping mechanism according to claim 3, characterized in that: The first claw portion includes a first clamping portion and a first fixing portion connected to the first clamping portion, the second claw portion includes a second clamping portion and a second fixing portion connected to the second clamping portion, the clamping space is formed between the first clamping portion and the second clamping portion, the first fixing portion and the second fixing portion extend along the first direction, the second fixing portion is provided with a sliding groove, and the first fixing portion is slidably arranged in the sliding groove.

5. The material clamping mechanism according to claim 4, characterized in that: The limit block is arranged on the first fixing part, and the lower surface of the limit block can contact and cooperate with the surface of the second clamping part away from the first clamping part when the clamping jaw assembly is in a released position to control the clamping space between the first claw part and the second claw part.

6. The material clamping mechanism according to claim 4, characterized in that: An end of the first clamping portion away from the first fixing portion and an end of the second clamping portion away from the second fixing portion are respectively provided with arc chamfers.

7. The material clamping mechanism according to claim 1, characterized in that: The clamping mechanism further comprises a driving assembly, and the driving assembly comprises: a first locking member, the first locking member being reciprocatable along a first direction; a second locking member, the second locking member can reciprocate relative to the first locking member along a second direction, the second locking member and the first locking member can be locked and matched during the movement, and the first direction intersects with the second direction; One of the first claw and the second claw is in transmission connection with the first locking member, and the first locking member drives one of the first claw and the second claw to move, and when the first locking member and the second locking member are locked together, the first claw and the second claw are in a state of clamping the workpiece, and when the first locking member and the second locking member are released from engagement, the first claw and the second claw are in a state of releasing the workpiece.

8. The material clamping mechanism according to claim 7, characterized in that: The first locking member and the second locking member are coupled to each other through a direction-changing transmission structure to convert the reciprocating movement of the first locking member along the first direction into the reciprocating movement of the second locking member along the second direction.

9. The material clamping mechanism according to claim 8, characterized in that: The direction-changing transmission structure comprises: A transmission surface, wherein the transmission surface is disposed on one of the first locking member and the second locking member, the transmission surface is disposed obliquely, and a line connecting two ends of the transmission surface is disposed at an angle to the first direction and the second direction respectively; A transmission roller, wherein the transmission roller is arranged on the other of the first locking member and the second locking member, and the transmission inclined surface cooperates with the transmission roller to convert the reciprocating movement of the second locking member along the second direction into the reciprocating movement of the first locking member along the first direction.

10. The material clamping mechanism according to claim 9, characterized in that: The direction-changing transmission structure further includes a locking surface, which is connected to an end of the transmission surface away from the transmission roller, and the locking surface is parallel to the second direction.

11. A processing device, characterized in that: The processing device includes a clamping mechanism as described in any one of claims 1-10.

12. The processing device according to claim 11, characterized in that: The processing device is a splitter.

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