Suction nozzle

Abstract

The embodiment of the utility model provides a suction nozzle, and relates to the technical field of MEMS chip suction. The suction nozzle comprises a suction nozzle body, the suction nozzle body is provided with an air channel, the suction nozzle is provided with a suction end, the suction end is provided with a receding groove and further provided with a suction part communicated with the air channel, the suction part is located on the outer side of the receding groove, and the air channel is not communicated with a cavity of the receding groove. When the MEMS chip is sucked, the pressure generated by the suction part does not act on the sensing film of the MEMS chip, so that the situation that the sensing film of the MEMS chip is damaged when the MEMS chip is sucked can be effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of MEMS (Micro-Electro-Mechanical Systems) chip suction, in particular to a suction nozzle. Background Art

[0002] During the semiconductor chip packaging process, after completing a certain packaging step, the chip needs to be grabbed to another station for processing in the next process. The existing chip grabbing equipment uses a vacuum nozzle to suck the surface of the chip to achieve chip grabbing.

[0003] The inventors have found that when a MEMS chip is sucked up by a vacuum nozzle, there is a layer of sensing film on the surface of the MEMS chip. The MEMS chip relies on the sensing film to sense pressure, and the sensing film is damaged during the process of the nozzle sucking up the MEMS chip. Utility Model Content

[0004] The utility model aims to provide a suction nozzle, which can reduce the situation that the sensing film is damaged when the suction nozzle sucks the MEMS chip.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In a first aspect, the utility model provides a suction nozzle, comprising:

[0007] The suction nozzle body is provided with an air path channel, the suction nozzle body has a suction end, the suction end has an avoidance groove, and the suction end is also provided with a suction part connected with the air path channel, and the suction part is located outside the avoidance groove.

[0008] In an optional embodiment, the inner wall of the avoidance groove is an arc inner wall.

[0009] In an optional embodiment, the suction part includes a first vacuum hole and a second vacuum hole connected to the air path channel, the second vacuum hole is located on one side of the first vacuum hole, and the aperture of the first vacuum hole is larger than the aperture of the second vacuum hole.

[0010] In an optional embodiment, there are multiple second vacuum holes in each suction portion, the multiple second vacuum holes are arranged at intervals around the circumference of the first vacuum hole, and / or the first vacuum hole is away from the avoidance groove relative to the second vacuum holes.

[0011] In an optional embodiment, there are multiple suction parts, which are arranged at intervals along the circumference of the avoidance groove.

[0012] In an optional embodiment, the end face of the suction end is an n-gon, the number of suction portions is n, and there is a suction portion at the angle between two adjacent sides of the suction end, and / or;

[0013] There are four suction parts, which are arranged in groups of two. The two groups of suction parts are arranged at intervals along the first direction, and the suction parts of each group are arranged at intervals along the second direction. The first direction is perpendicular to the second direction.

[0014] In an optional embodiment, a through hole is formed on the peripheral wall of the avoidance groove, and the through hole penetrates the inner wall and the outer wall of the avoidance groove.

[0015] In an optional embodiment, the avoidance groove has a plurality of through holes, and the plurality of through holes are arranged at intervals along the circumference of the avoidance groove.

[0016] In an optional embodiment, the radial dimension of the avoidance groove gradually increases along its opening direction.

[0017] In an optional embodiment, a through hole is opened on the peripheral wall of the avoidance groove, and the through hole penetrates the inner wall to the outer wall of the avoidance groove. There are multiple suction parts and they are arranged at intervals along the circumference of the avoidance groove. In the circumference of the avoidance groove, there is a through hole between two adjacent suction parts.

[0018] The beneficial effects of the embodiments of the utility model are as follows: a suction nozzle provided by the embodiments of the utility model includes a suction nozzle body, the suction nozzle body is provided with an air path channel, the suction nozzle has a suction end, the suction end has an avoidance groove, the suction end is also provided with a suction part connected with the air path channel, the suction part is located on the outside of the avoidance groove, the air path channel is not connected with the cavity of the avoidance groove, the pressure generated by the suction part does not act on the sensing film of the MEMS chip, therefore, it can effectively reduce the possibility of damage to the sensing film of the MEMS chip when sucking the MEMS chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A schematic diagram of the structure of a suction nozzle provided in an embodiment of the utility model;

[0021] Figure 2 A schematic diagram of the structure of the suction end of the suction nozzle provided in an embodiment of the utility model;

[0022] Figure 3 It is a schematic diagram of the structure of the suction nozzle of the utility model when sucking a chip.

[0023] Icons: 1-suction nozzle; 100-suction nozzle body; 110-suction end; 120-avoidance groove; 121-through hole; 122-corresponding area; 130-suction part; 131-first vacuum hole; 132-second vacuum hole; 2-chip; 201-sensing film. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0027] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0028] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] The specific structure of a suction nozzle 1 provided by an embodiment of the utility model and the corresponding technical effects it brings are described in detail below in conjunction with the patent drawings.

[0031] Please refer to Figure 1-Figure 3 A suction nozzle 1 provided by an embodiment of the utility model includes a suction nozzle body 100, and the suction nozzle body 100 is provided with an air path channel (not shown in the figure), the suction nozzle 1 has a suction end 110, and the suction end 110 has an avoidance groove 120. The suction end 110 is also provided with a suction part 130 connected to the air path channel, and the suction part 130 is located on the outside of the avoidance groove 120. That is to say, the air path channel is used to connect with the vacuum generator. At this time, the suction part 130 generates negative pressure for sucking the MEMS chip 2.

[0032] In the present embodiment, since the suction portion 130 has the avoidance groove 120, it can be understood that when the MEMS chip 2 is sucked, the sensing film 201 of the MEMS chip 2 is opposite to the end wall of the avoidance groove 120, and the air path is connected to the suction portion 130, and the air path is not connected to the cavity of the avoidance groove 120. That is to say, when the MEMS chip 2 is sucked, the pressure generated by the suction portion 130 will not act on the sensing film 201 of the MEMS chip 2. Therefore, it can effectively reduce the possibility of damage to the sensing film 201 of the MEMS chip 2 when the MEMS chip 2 is sucked.

[0033] Optionally, in order to prevent the sensing film 201 of the chip 2 from being scratched by the angular inner wall of the avoidance groove 120 when the chip 2 is deflected, in this embodiment, the inner wall of the avoidance groove 120 is an arc inner wall.

[0034] Furthermore, the inner wall of the avoidance groove 120 is an arc inner wall, which can also avoid the stress concentration phenomenon in the avoidance groove 120, thereby increasing the service life of the suction nozzle 1.

[0035] Optionally, the radial dimension of the avoidance groove 120 gradually increases along its own opening direction. It can be understood that since the radial dimension of the avoidance groove 120 gradually increases along its own opening direction, that is, the radial dimension of the end wall of the avoidance groove 120 is the smallest, and the radial dimension of the opening end of the avoidance groove 120 is the largest, the inner circumferential surface of the avoidance groove 120 is a slope.

[0036] It should be noted that, in order to avoid damaging the sensing film 201 of the MEMS chip 2, generally when the suction nozzle 1 is used, the radial dimension of any part of the avoidance groove 120 is larger than the radial dimension of the sensing film 201, so as to further ensure that when the MEMS chip 2 is sucked, the suction end 110 of the suction nozzle 1 will not easily cause damage to the sensing film 201 of the MEMS chip 2. Please refer to Figure 2 As an illustration, when the MEMS chip 2 is sucked, the avoidance groove 120 has a corresponding area 122 corresponding to the sensing film 201 .

[0037] Of course, in some other embodiments, the radial dimension of the inner wall of the avoidance groove 120 may also be a constant dimension in the opening direction, for example, the avoidance groove 120 is a cylindrical groove structure.

[0038] Optionally, the suction part 130 includes a first vacuum hole 131 and a second vacuum hole 132 connected to the air path, the second vacuum hole 132 is located on one side of the first vacuum hole 131, the aperture of the first vacuum hole 131 is larger than the aperture of the second vacuum hole 132, wherein the first vacuum hole 131 is a main hole and the second vacuum hole 132 is an auxiliary hole.

[0039] Optionally, the first vacuum hole 131 is farther away from the avoidance groove 120 than the second vacuum hole 132, that is, the outer periphery of the first vacuum hole 131 is farther away from the inner wall of the avoidance groove 120 than the outer periphery of the second vacuum hole 132. Therefore, the wall thickness of the first vacuum hole 131 is thicker than the wall thickness of the second vacuum hole 132, which can ensure that the first vacuum hole 131 is not easily damaged, thereby ensuring the service life of the suction nozzle 1.

[0040] It can be understood that in this embodiment, since the suction part 130 includes both the first vacuum hole 131 and the second vacuum hole 132, the suction strength of the suction part 130 on the MEMS chip 2 can be dispersed, thereby preventing the surface of the MEMS chip 2 from being damaged due to excessive pressure when the suction nozzle 1 sucks the chip 2 through the suction part 130, and when the first vacuum hole 131 is blocked, the suction of the chip 2 can also be completed through the second vacuum hole 132.

[0041] In order to further improve the suction stability of the suction part 130 on the MEMS chip 2 so that the suction nozzle 1 can firmly suck the MEMS chip 2 , each suction part 130 has a plurality of second vacuum holes 132 , which are arranged at intervals around the circumference of the first vacuum hole 131 .

[0042] In detail, the above-mentioned multiple can be understood as two or more than two. In this embodiment, the number of the second vacuum holes 132 is two, that is, the two second vacuum holes 132 are arranged at intervals around the circumference of the first vacuum hole 131.

[0043] It can be understood that the two second vacuum holes 132 can improve the adsorption force of the suction part 130 on the MEMS chip 2, and can also avoid the reduction in the strength of the suction end 110 of the suction nozzle 1 due to too many holes in the suction end 110 of the suction nozzle 1. That is to say, in this embodiment, each suction part 130 includes a first vacuum hole 131 and two second vacuum holes 132, which not only ensures the adsorption force of the suction part 130, but also ensures the strength of the suction end 110.

[0044] Of course, in some other embodiments, the number of the second vacuum hole 132 may also be one, that is, each suction portion 130 includes only one first vacuum hole 131 with a large aperture and one second vacuum hole 132 with a small aperture.

[0045] Alternatively, in some embodiments, the suction portion 130 may also include only one first vacuum hole 131 , and the MEMS chip 2 may be sucked only through the first vacuum hole 131 .

[0046] Optionally, in order to ensure that the suction force of the suction nozzle 1 on the MEMS chip 2 is relatively uniform, in this embodiment, the number of suction parts 130 is multiple and they are arranged at intervals along the circumference of the avoidance groove 120. It should be noted that each suction end 110 is connected to the air path channel.

[0047] Moreover, in the present embodiment, there are a plurality of suction parts 130 in the suction end 110 and they are arranged at intervals along the circumference of the avoidance groove 120 , so that the negative pressure of the air path can be shared by the plurality of suction parts 130 , thereby reducing the risk of damage to the sensing film 201 on the surface of the MEMS chip 2 due to the vacuum adsorption force of the suction nozzle 1 .

[0048] Optionally, the end face of the suction end 110 is an n-gon, the number of the suction parts 130 is n, and a suction part 130 is provided at the angle between two adjacent sides of the suction end 110, thereby ensuring that when the suction end 110 sucks the MEMS chip 2, each part of the suction part 130 has a relatively uniform adsorption force on the MEMS chip 2.

[0049] The plurality of suction portions 130 are also arranged at intervals along the circumference of the suction end 110. Optionally, when the end surface of the suction end 110 is a quadrilateral, similarly, the number of the suction portions 130 is four, and the four suction portions 130 are respectively arranged at the four corners of the quadrilateral.

[0050] In this embodiment, the end face of the suction end 110 is roughly rectangular, and there are four suction parts 130. The four suction parts 130 are grouped in pairs, and the two groups of suction parts 130 are arranged at intervals along the first direction, and the suction parts 130 of each group are arranged at intervals along the second direction, and the first direction is perpendicular to the second direction.

[0051] Of course, in some other embodiments, the end surface of the suction end 110 may also be a triangle, a pentagon, or a hexagon. Similarly, the number of the suction parts 130 may be three, five, or six accordingly.

[0052] In some other embodiments, the number of the suction portions 130 on the suction end 110 may not be the same as the number of sides of the end surface of the suction end 110 , and may also be different. For example, when the end surface of the suction end 110 is a quadrilateral, the number of the suction portions 130 may be two.

[0053] Optionally, a through hole 121 is provided on the peripheral wall of the avoidance groove 120, and the through hole 121 penetrates the inner wall and the outer wall of the avoidance groove 120, that is, the avoidance groove 120 is provided with a through hole 121 penetrating its peripheral wall. It is easy to understand that when the suction end 110 sucks the MEMS chip 2, the sensing film 201 of the MEMS is opposite to the avoidance groove 120, that is, the sensing film 201 is located in the area of ​​the avoidance groove 120. If the sensing film 201 is in a closed area at this time, when the suction nozzle 1 generates negative pressure to suck the MEMS chip 2, pressure may be generated on the sensing film 201 area on the surface of the chip 2.

[0054] In the present embodiment, the through hole 121 can penetrate the inner wall and the outer wall of the avoidance groove 120 , that is, when the suction nozzle 1 sucks the MEMS chip 2 , the avoidance groove 120 can be connected to the outside through the through hole 121 , thereby eliminating the influence of the airtight air pressure in the avoidance groove 120 on the sensing film 201 on the surface of the chip 2 .

[0055] In this embodiment, the avoidance groove 120 has a plurality of through holes 121 , and the plurality of through holes 121 are arranged at intervals along the circumference of the avoidance groove 120 .

[0056] It can be understood that the air pressure in the avoidance groove 120 can be relatively uniform through the multiple through holes 121 , and when one through hole 121 is blocked, the avoidance groove 120 can still be connected to the external air pressure through the remaining through holes 121 .

[0057] There is a through hole 121 between two adjacent suction parts 130 on the circumferential direction of the avoidance groove 120. In other words, in this embodiment, the suction end 110 has four suction parts 130. At this time, the number of the through holes 121 is also four. On the circumferential wall of the avoidance groove 120, there is a through hole 121 between any two adjacent suction parts 130.

[0058] In detail, there is a certain distance between the through hole 121 and the suction part 130 to ensure that the first vacuum hole 131 and the second vacuum hole 132 in the suction part 130 have a certain wall thickness to ensure the service life of the suction nozzle 1 and avoid the inner wall damage of the first vacuum hole 131 and the second vacuum hole 132 during use.

[0059] Of course, in some other embodiments, the number of through holes 121 and the number of suction portions 130 may be different.

[0060] To sum up, a suction nozzle 1 provided in an embodiment of the utility model includes a suction nozzle body 100, the suction nozzle body 100 is provided with an air path channel, the suction nozzle 1 has a suction end 110, the suction end 110 has an avoidance groove 120, and the suction end 110 is also provided with a suction part 130 connected with the air path channel, the suction part 130 is located on the outside of the avoidance groove 120, the air path channel is not connected with the cavity of the avoidance groove 120, and the pressure generated by the suction part 130 does not act on the sensing film 201 of the MEMS chip 2. Therefore, it can effectively reduce the damage of the sensing film 201 of the MEMS chip 2 when the MEMS chip 2 is sucked.

[0061] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A nozzle, characterized in that: include: A suction nozzle body (100), wherein the suction nozzle body (100) is provided with an air passage, wherein the suction nozzle body (100) has a suction end (110), wherein the suction end (110) has an avoidance groove (120), and wherein the suction end (110) is further provided with a suction portion (130) connected to the air passage, wherein the suction portion (130) is located outside the avoidance groove (120).

2. The nozzle according to claim 1, characterized in that: The inner wall of the avoidance groove (120) is an arc inner wall.

3. The nozzle according to claim 1, characterized in that: The suction part (130) comprises a first vacuum hole (131) and a second vacuum hole (132) which are connected to the air passage, wherein the second vacuum hole (132) is located on one side of the first vacuum hole (131), and the aperture of the first vacuum hole (131) is larger than the aperture of the second vacuum hole (132).

4. The nozzle according to claim 3, characterized in that: The number of the second vacuum holes (132) in each of the suction parts (130) is multiple, the multiple second vacuum holes (132) are arranged at intervals around the circumference of the first vacuum hole (131), and / or the first vacuum hole (131) is away from the avoidance groove (120) relative to the second vacuum hole (132).

5. The nozzle according to claim 1, characterized in that: The number of the suction parts (130) is plural and they are arranged at intervals along the circumference of the avoidance groove (120).

6. The nozzle according to claim 5, characterized in that: The end face of the suction end (110) is an n-gon, the number of the suction portions (130) is n, the suction portion (130) is provided at the angle between two adjacent sides of the suction end (110), and / or; The number of the suction parts (130) is four, and the four suction parts (130) are arranged in groups of two. The two groups of suction parts (130) are arranged at intervals along a first direction, and the suction parts (130) in each group are arranged at intervals along a second direction, and the first direction is perpendicular to the second direction.

7. The nozzle according to claim 1, characterized in that: A through hole (121) is provided on the peripheral wall of the avoidance groove (120), and the through hole (121) penetrates the inner wall and the outer wall of the avoidance groove (120).

8. The nozzle according to claim 7, characterized in that: The avoidance groove (120) has a plurality of through holes (121), and the plurality of through holes (121) are arranged at intervals along the circumference of the avoidance groove (120).

9. The nozzle according to claim 1, characterized in that: The radial dimension of the avoidance groove (120) gradually increases along its opening direction.

10. The nozzle according to claim 1, characterized in that: A through hole (121) is provided on the peripheral wall of the avoidance groove (120), and the through hole (121) penetrates from the inner wall to the outer wall of the avoidance groove (120). The number of the suction parts (130) is plural and they are arranged at intervals along the circumference of the avoidance groove (120), and in the circumferential direction of the avoidance groove (120), there is a through hole (121) between two adjacent suction parts (130).

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