Epitaxial equipment

Abstract

The embodiment of the utility model provides epitaxial equipment. The epitaxial equipment comprises an equipment body and a conveying structure, the equipment body is provided with a groove, the groove is used for containing a single crystal substrate piece, the conveying structure is detachably connected to the equipment body, and a positioning piece is arranged at the position, close to a groove opening of the groove, of the equipment body and used for positioning the conveying structure; the equipment body is provided with a protective sleeve which sleeves the positioning piece. The positioning piece is protected through the protective sleeve, when the single crystal substrate piece such as a graphite piece and a quartz piece needs to be detached from the groove for maintenance, the graphite piece and the quartz piece can be prevented from directly colliding with the positioning piece through the protective sleeve when the graphite piece and the quartz piece are taken, and damage such as powder falling or breakage of the graphite piece is avoided; the yield of products is improved, and damage such as cracks or breakage of the quartz piece is also avoided. Moreover, the positioning piece is well protected through the protective sleeve, the positioning piece is isolated from external air with high humidity, and the positioning piece is prevented from being oxidized.

Description

Technical Field

[0001] The present application belongs to the field of photovoltaic technology, and specifically relates to an epitaxial device. Background Art

[0002] In photovoltaic production technology, epitaxial equipment is used to grow single crystal epitaxial wafers on single crystal silicon substrates, and plays a relatively important role.

[0003] In the prior art, epitaxial equipment generally includes an equipment body and a conveying structure detachably connected to the equipment body, and the equipment body is provided with a groove for accommodating a single crystal substrate piece, such as a graphite piece and a quartz piece, etc. A protruding positioning piece is provided near the notch of the groove on the equipment body to position the connection of the conveying structure.

[0004] However, as the number of single crystal epitaxial wafers produced increases, the single crystal substrate parts need to be removed from the grooves for maintenance. When taking out the single crystal substrate parts, it is easy to hit the positioning parts, causing damage such as powder loss or cracking of the graphite parts, affecting the product yield, and causing damage such as cracks or breakage of the quartz parts. Utility Model Content

[0005] In view of the above problems, the present utility model is proposed to provide an epitaxial device that overcomes the above problems or at least partially solves the above problems.

[0006] In order to solve the above technical problems, this application is implemented as follows:

[0007] In a first aspect, an embodiment of the present application provides an epitaxial device, the epitaxial device comprising: a device body and a conveying structure;

[0008] The device body is provided with a groove, the groove is used to accommodate the single crystal substrate, the conveying structure is detachably connected to the device body, the device body is provided with a positioning piece near the notch of the groove, the positioning piece is used to position the conveying structure;

[0009] The device body is provided with a protective cover, and the protective cover is sleeved on the positioning piece.

[0010] Optionally, the protective cover includes a sleeve and a sleeve head, the positioning piece is protruding from the device body, the sleeve is sleeved on the positioning piece, the sleeve head is arranged at one end of the positioning piece away from the device body, and the sleeve head is connected to one end of the sleeve.

[0011] Optionally, the sleeve head is detachably connected to one end of the sleeve.

[0012] Optionally, the sleeve comprises a sleeve body and a sleeve connection portion;

[0013] The sleeve connection portion is connected to one end of the sleeve body and protrudes away from the sleeve body. The sleeve head is provided with a recessed clamping portion, and the clamping portion is clamped to the sleeve connection portion.

[0014] Optionally, the sleeve connection portion is a cylindrical sleeve connection portion, and the diameter of the cylindrical sleeve connection portion is smaller than the diameter of the sleeve body.

[0015] Optionally, the outer surface of the sleeve is an arc-shaped surface.

[0016] Optionally, the sleeve and the sleeve head are an integrally formed structure.

[0017] Optionally, the inner diameter of the sleeve is any value between 22 and 30 mm.

[0018] Optionally, the axial length of the sleeve is any value between 78 and 85 mm.

[0019] Optionally, the thickness of the side wall of the sleeve is any value between 10 and 20 mm.

[0020] Optionally, the thickness of the sleeve along the axial direction perpendicular to the sleeve is any value between 30 and 40 mm.

[0021] Optionally, the protective cover is a flexible protective cover.

[0022] Optionally, the flexible protective cover is made of any one of polyvinyl chloride, silicone and rubber.

[0023] In an embodiment of the present application, the epitaxial device includes: a device body and a conveying structure; the device body is provided with a groove, the groove is used to accommodate a single crystal substrate, the conveying structure is detachably connected to the device body, the device body is provided with a positioning member near the notch of the groove, the positioning member is used to position the conveying structure; the device body is provided with a protective sleeve, the protective sleeve is sleeved on the positioning member. In this way, the positioning member is protected by the protective sleeve, and when the single crystal substrate member, such as a graphite member and a quartz member, needs to be removed from the groove for maintenance, the protective sleeve can be used to prevent the graphite member and the quartz member from directly touching the positioning member when taking the graphite member and the quartz member, thereby preventing the graphite member from being damaged such as powder falling or cracking, thereby improving the yield rate of the product and preventing the quartz member from being easily damaged such as cracking or breaking. In addition, the protective sleeve also achieves a better protection effect on the positioning member, isolating the positioning member from the external air with high humidity, and preventing the positioning member from being oxidized.

[0024] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0026] Figure 1 is a schematic cross-sectional structure diagram of an epitaxial device described in an embodiment of the present application;

[0027] Figure 2 It is a partially enlarged structural schematic diagram of an epitaxial device described in an embodiment of the present application;

[0028] Figure 3 It is a structural schematic diagram of a positioning member of an epitaxial device described in an embodiment of the present application;

[0029] Figure 4 It is a schematic structural diagram of a protective cover of an epitaxial device described in an embodiment of the present application;

[0030] Figure 5 It is a structural schematic diagram of a single crystal substrate component of an epitaxial device described in an embodiment of the present application;

[0031] Figure 6 is another structural schematic diagram of a protective cover of an epitaxial device described in an embodiment of the present application;

[0032] Figure 7 It is a structural schematic diagram of a sleeve of a protective cover of an epitaxial device described in an embodiment of the present application;

[0033] Figure 8 A protective cover for an epitaxial device according to an embodiment of the present application Figure 7 A top view of the middle sleeve;

[0034] Fig. 9 A protective cover for an epitaxial device according to an embodiment of the present application Figure 6 Bottom view of the middle set head;

[0035] Fig.10 A protective cover for an epitaxial device according to an embodiment of the present application Fig. 9 Schematic diagram of the cross-sectional structure of the middle sleeve along line A-A.

[0036] Figure numerals: 10 - device body; 11 - groove; 12 - single crystal substrate; 13 - positioning piece; 20 - protective cover; 21 - sleeve; 22 - sleeve head; 23 - sleeve body; 24 - sleeve connection part; 25 - clamping part. DETAILED DESCRIPTION

[0037] The embodiments of the utility model will be described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0038] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this utility model, unless otherwise specified, "multiple" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0039] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0040] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] Reference Figures 1 to 10 , showing a partial structural schematic diagram of an epitaxial device according to an embodiment of the present application, the epitaxial device may specifically include: a device body 10 and a conveying structure;

[0042] The device body 10 is provided with a groove 11, and the groove 11 is used to accommodate a single crystal substrate 12. The conveying structure is detachably connected to the device body 10. The device body 10 is provided with a positioning member 13 at a notch near the groove 11, and the positioning member 13 is used to position the conveying structure.

[0043] The device body 10 is provided with a protective cover 20 , and the protective cover 20 is sleeved on the positioning member 13 .

[0044] In the embodiment of the present application, the positioning member 13 is protected by a protective cover 20. When the single crystal substrate member 12, such as a graphite member and a quartz member, needs to be removed from the groove 11 for maintenance, the protective cover 20 can be used to prevent the graphite member and the quartz member from directly touching the positioning member 13 when taking out the graphite member and the quartz member, thereby preventing the graphite member from losing powder or cracking, etc., thereby improving the yield rate of the product and preventing the quartz member from being easily cracked or broken, etc. In addition, the protective cover 20 also provides better protection for the positioning member 13, isolating the positioning member 13 from the external air with high humidity, and preventing the positioning member 13 from being oxidized. For example, Figure 5 The single crystal substrate 12 is a quartz member, and has a schematic structural diagram of a quartz barrel.

[0045] For example, in the embodiment of the present application, the groove 11 of the device body 10 is a reaction chamber, and the groove 11 is used to accommodate a single crystal substrate 12, such as a graphite part and a quartz part, which are arranged in the reaction chamber for growing a single crystal epitaxial wafer. As the number of single crystal epitaxial wafers produced increases, the silicon carbide epitaxial device needs to stop the deposition process after a period of growth and the residual sediment in the reaction chamber is removed.

[0046] Specifically, in the embodiment of the present application, the conveying structure is detachably connected to the notch of the groove 11 of the equipment body 10. When the epitaxial equipment is maintained, the conveying structure needs to be disassembled and separated from the notch of the groove 11 of the equipment body 10, so that the reaction chamber containing the single crystal substrate 12 in the groove 11 is exposed, so as to facilitate the removal of the graphite and quartz parts in the reaction chamber in the groove 11. Since the conveying structure is positioned by the positioning member 13 located near the notch of the equipment body 10 when it is installed on the equipment body 10, the positioning member 13 is exposed when the conveying structure is disassembled, and when the graphite and quartz parts in the reaction chamber in the groove 11 are removed, the graphite and quartz parts are easily hit by the positioning member 13.

[0047] In the embodiment of the present application, specifically, the epitaxial device can be a silicon carbide epitaxial device. For example, the epitaxial device can be a 4 / 6-inch compatible silicon carbide epitaxial device with N-type and P-type doping processes, stable performance and convenient maintenance. In the prior art, traditional epitaxial devices can be generally divided into seven parts according to functional areas: epitaxial growth structure, transmission structure, vacuum structure, gas path structure, water path structure, electrical structure, control and software structure. In the embodiment of the present application, the epitaxial device can be a single-chip single-cavity horizontal type, and the automatic transmission of single crystal epitaxial wafers (also referred to as wafers) can be realized at the same time. The epitaxial device can include a loadlock (single-disc vacuum transmission system), a transmission chamber and a reaction chamber. The wafer is placed in a high-temperature resistant wafer carrier made of graphite, first loaded in the loadlock, and then transferred to the reaction chamber by a robot for processing. After the processing is completed, the reaction chamber drops to a preset temperature and then is transferred back to the loadlock. When the transmission structure is separated from the reaction chamber of the device body 10, the positioning member 13 is exposed.

[0048] In the embodiment of the present application, a protective cover 20 is provided on the periphery of the positioning member 13. When the positioning member 13 is exposed, the protective cover 20 prevents the single crystal substrate member 12 such as a graphite member and a quartz member from directly touching the positioning member 13 and causing damage during the process of taking the positioning member 13. The protective cover 20 provides relatively effective protection for the graphite member and the quartz member, improves the product yield, and reduces the production cost. In addition, the protective cover 20 also provides a good protection for the positioning member 13, isolating the positioning member 13 from the external air with high humidity, and preventing the positioning member 13 from being oxidized.

[0049] For example, in the embodiment of the present application, the epitaxial equipment can use the mainstream inductive heating method in the industry to heat the chamber where the graphite part is located, and use an infrared pyrometer to measure the temperature to achieve rapid temperature rise and fall and precise control of the temperature field. This enables the epitaxy to have excellent process repeatability and equipment stability, thereby obtaining an epitaxial layer with good thickness uniformity, doping concentration uniformity and low defect density. The epitaxial equipment can more accurately control the impurity concentration, providing a more accurate single crystal layer and a steep interlayer concentration gradient for device manufacturing.

[0050] Among them, the temperature and process gas involved are the key parameters that affect the epitaxial equipment. Specifically, the effect of temperature on doping is more significant. The change in temperature will cause the change in the resistivity of the product, and there are more stringent requirements for the temperature uniformity along the base. On the other hand, the inlet pressure, flow rate and distribution of the gas flow field of the process gas will have a more significant impact on the uniformity of the film thickness of the epitaxial layer, and also affect the concentration distribution of doping.

[0051] In the process chamber of silicon carbide epitaxial equipment in the prior art, there are many accessories such as baffles, cover plates, and top plates used to assemble into a reaction chamber. The materials of these materials are mainly graphite parts with silicon carbide coatings. After a period of production process, the surface of the above-mentioned baffles, cover plates, top plates and other accessories will be deposited with residual silicon carbide miscellaneous crystal layers, and the thickness can usually be 300um-350um, which is easy to affect the quality of single crystal epitaxial wafers. In order to improve product quality and reduce the production cost of silicon carbide epitaxial wafers, thicker residues are attached to the reaction chamber accessories. For example, a silicon carbide miscellaneous crystal layer will be deposited on the surface of the accessories, which has a large hardness, stable chemical properties, and is easy to introduce impurity contamination. Therefore, maintenance is required when the silicon carbide process grows to a certain thickness. The residue needs to be cleaned and reused to make the accessories have better functions and better cleanliness.

[0052] Among them, the graphite parts are the key to controlling the temperature of the epitaxial equipment. If the positioning part 13 collides with the graphite parts, it is easy to cause the graphite parts to lose powder or break, resulting in poor temperature control effect, which in turn leads to changes in the temperature field during epitaxial layer growth, resulting in poor concentration uniformity, thickness uniformity, defects and other key test data of the single crystal substrate generated, which has a serious impact on the yield of the product and even causes the risk of cavity explosion. Among them, the quartz part can be specifically a quartz barrel. If the positioning part 13 collides with the quartz barrel, it is easy to cause the quartz barrel to crack or break and other damages, and a new quartz barrel needs to be replaced. However, the cost of quartz barrels is relatively high, up to about 30,000 yuan, and replacing new quartz barrels causes a substantial increase in production costs. In addition, the positioning member 13 can be made of metal, and the surface coating of the positioning member 13 is easily oxidized. When the conveying structure is removed from the groove 11 of the equipment body 10 to expose the positioning member 13, the positioning member 13 is easily exposed to high humidity in the production workshop, such as 45%-60% humidity, so that the surface coating of the positioning member 13 is easily oxidized, resulting in corrosion and weakening of the hardness of the positioning member 13. As a result, the shape of the positioning member 13 changes, and the transmission structure and the equipment body 10 cannot be accurately positioned, making it difficult to merge the equipment and the machine.

[0053] In the embodiment of the present application, a protective cover 20 is provided on the periphery of the positioning member 13. When the positioning member 13 is exposed, the protective cover 20 prevents single crystal substrate members 12 such as graphite members and quartz members from directly touching the positioning member 13 and causing damage during the picking process, thereby providing more effective protection for graphite members and quartz members, etc., improving product yield and reducing production costs. In addition, the protective cover 20 also provides better protection for the positioning member 13, isolating the positioning member 13 from the external air with high humidity, and preventing the positioning member 13 from being oxidized. In addition, the protective cover 20 can also prevent the positioning member 13 from changing shape, so that the positioning member 13 can achieve better and more accurate positioning for the installation of the transmission structure and the equipment body 10, so that the equipment and machine can be merged more smoothly.

[0054] For example, in the embodiment of the present application, the positioning member 13 may be a positioning pin, a convex block or a positioning column, etc., and the embodiment of the present application may not limit the specific type of the positioning member 13. In addition, the number of the positioning members 13 may be 1, 2, 3, 4, etc., which can be set according to actual needs, and the embodiment of the present application may not limit the specific number of the positioning members 13.

[0055] In the embodiment of the present application, the maintenance purpose of the epitaxial equipment is to enable the epitaxial equipment to operate stably and continuously for a long time and reduce the downtime of the equipment. Also, to discover the potential dangers of the equipment during maintenance and perform reasonable maintenance in a timely manner to extend the life of the equipment. In addition, the maintenance operation methods of the epitaxial equipment are standardized to ensure the quality of maintenance and reduce the probability of repeated disassembly. Also, the safety of personnel involved in equipment maintenance and operation is guaranteed to ensure the normal, continuous and safe operation of the equipment.

[0056] For example, in an embodiment of the present application, the maintenance preparation work of the epitaxial equipment can be as follows: first, prepare relevant jigs or tools, trolleys, new accessories and auxiliary materials (such as alcohol, dust-free cloth, gloves, plastic wrap, vacuum cleaner, etc.) according to the project management plan, and check the specifications and models used by the corresponding machine. Then, when the temperature of the epitaxial equipment drops below 120°C, the conveying structure and the reaction chamber of the groove 11 are separated. Then, enter the acid discharge mode and wait for the chamber to separate (about 20 minutes). Then, put a protective cover 20 on the exposed positioning member 13 to protect the quartz parts and graphite parts during maintenance. Finally, the quartz parts and graphite parts in the reaction chamber of the groove 11 are disassembled in sequence according to the operating steps. Since the protective cover 20 is provided on the positioning member 13, the positioning member 13 is prevented from directly colliding with the quartz parts and graphite parts and causing damage to the quartz parts and graphite parts. The protective cover 20 achieves a better protection effect on the quartz parts, graphite parts and positioning members 13.

[0057] Optionally, in the embodiment of the present application, the protective sleeve 20 includes a sleeve 21 and a sleeve head 22, the sleeve 21 is sleeved on the positioning member 13, the positioning member 13 is protruding from the device body 10, the sleeve head 22 is arranged at one end of the positioning member 13 away from the device body 10, and the sleeve head 22 is connected to one end of the sleeve 21. In this way, the positioning member 13 is protected along the outer circumference of its axial direction by the sleeve 21, and the end of the positioning member 13 is protected by the sleeve head 22, so that the overall structure of the positioning member 13 is covered and protected by the sleeve 21 and the sleeve head 22.

[0058] In an embodiment of the present application, optionally, the sleeve 22 is detachably connected to one end of the sleeve 21. In this way, it is convenient to remove the sleeve 22 separately for replacement and maintenance. Since the sleeve 22 protects the end of the positioning member 13, and in the process of taking the graphite part and the quartz part, the end of the positioning member 13 is usually prone to contact and collide with the graphite part and the quartz part, so the sleeve 22 of the protective sleeve 20 is prone to wear. In the embodiment of the present application, the sleeve 22 is detachably connected to the sleeve 21. In this way, during the maintenance process, when the sleeve 22 is worn, only the sleeve 22 of the protective sleeve 20 can be replaced without replacing the overall structure of the protective sleeve 20, which simplifies the maintenance operation and does not need to replace the sleeve 21, so that the sleeve 21 can be recycled, reducing production costs.

[0059] For example, in the embodiment of the present application, the sleeve 21 accounts for 80% of the protective sleeve 20, and the head 22 accounts for 20% of the protective sleeve 20. The sleeve 21 and the head 22 are detachably connected, that is, the sleeve 21 and the head 22 are set as a split structure. When the head 22 is damaged, only the head 22 needs to be replaced, saving 80% of the material cost.

[0060] Optionally, in the embodiment of the present application, the sleeve 21 includes a sleeve body 23 and a sleeve connection portion 24; the sleeve connection portion 24 is connected to one end of the sleeve body 23 and protrudes away from the sleeve body 23, and the sleeve head 22 is provided with a recessed clamping portion 25, and the clamping portion 25 is clamped to the sleeve connection portion 24. Specifically, the sleeve 21 is provided with a cavity, and the positioning member 13 is accommodated in the cavity, and the cavity provides a accommodating space for the positioning member 13. By clamping the recessed clamping portion 25 of the sleeve head 22 to the protruding sleeve connection portion 24 of the sleeve 21, a detachable connection between the sleeve 21 and the sleeve head 22 is achieved, which has a simple structure, is easy to operate, and is easy to achieve.

[0061] In some optional embodiments of the present application, the sleeve portion 24 may be provided with a recessed structure, and the sleeve head 22 may be provided with a protruding snap-fit ​​structure. The protruding snap-fit ​​structure of the sleeve head 22 may be snapped into the recessed structure of the sleeve 21, so as to achieve a detachable connection between the sleeve 21 and the sleeve head 22. This embodiment of the present application is not limited to this.

[0062] Optionally, in the embodiment of the present application, the sleeve portion 24 is a cylindrical sleeve portion, and the diameter of the cylindrical sleeve portion is smaller than the diameter of the sleeve body 23. In this way, the size of the sleeve portion 24 is small, and when the sleeve head 22 is clamped on the sleeve portion 24, the sleeve head 22 has a small size, so that when the sleeve head 22 is connected to the sleeve 21, the sleeve head 22 can be closer to the diameter of the sleeve 21, avoiding the sleeve head 22 from occupying a large space, and also making the protective cover 20 have a better appearance.

[0063] In the embodiment of the present application, the outer surface of the sleeve 22 is optionally an arc surface. In this way, the sleeve 22 with an arc surface has a smaller contact area with the graphite part and the quartz part when in contact, and the stress generated during contact is reduced, further improving the protective effect on the graphite part and the quartz part.

[0064] Optionally, in the embodiment of the present application, the sleeve 21 and the sleeve head 22 are integrally formed, so that the connection strength between the sleeve 21 and the sleeve head 22 is high, and material loss and manufacturing process are reduced.

[0065] For example, in the embodiment of the present application, taking the maintenance of the epitaxial layer of the epitaxial equipment grown to 350um as an example, the epitaxial equipment needs to be maintained once every 2 days. Based on one month of mass production, the epitaxial equipment needs to be maintained 15-20 times a month. For example, taking the need to maintain the epitaxial equipment 15 times a month, and correspondingly performing an experiment on the protective cover 20 or the sleeve head 22 that needs to be replaced for maintenance, the depth of the collision marks on the quartz barrel and the area of ​​the collision marks are tested. Among them, the protective cover 20 formed in one piece with the sleeve head 22 and the sleeve 21 is Test 1, and the protective cover 20 formed separately with the sleeve head 22 and the sleeve 21 is Test 2. In addition, taking the case without the protective cover 20 as a control experiment, the experimental data in Table 1 below can be obtained.

[0066]

[0067] Table 1

[0068] As shown in Table 1 above, the protective cover 20 formed by the sleeve 22 and the sleeve 21 is used to protect the positioning member 13, and the entire protective cover 20 is replaced for each maintenance. From the test results, it can be seen that the depth of the collision mark on the quartz barrel is 0, the area of ​​the collision mark is 0, and there is no crack. The protective cover 20 has a good protective effect on the quartz barrel. The price of replacing the entire set of protective covers 20 is 1,000 yuan, and the monthly maintenance cost is 15*1000=15,000 yuan. The protective cover 20, which is separated from the sleeve 22 and the sleeve 21, is used to protect the positioning member 13. From the test results, it can be seen that the depth of the collision mark on the quartz barrel is 0, the area of ​​the collision mark is 0, and there is no crack. The protective cover 20 has a good protective effect on the quartz barrel. The price of replacing the sleeve 22 is 200 yuan, and the monthly maintenance cost is 15*200=3,000 yuan. In the absence of the protective cover 20 to protect the positioning member 13, the depth of the collision mark on the quartz barrel is 1.2 mm, the area of ​​the collision mark on the quartz barrel is 1.5 cm2, and cracks are generated on the quartz barrel. The quartz barrel has severe damage and cannot be reused.

[0069] It can be concluded from the above experimental data that the protective cover 20 of the embodiment of the present application has a good protective effect on the quartz barrel. The protective cover 20 with a separate cover head 22 and a sleeve 21 is used to protect the positioning member 13. Only the cover head 22 can be replaced each time for maintenance, which also has a good protective effect. Compared with the cost of 15,000 yuan to replace the entire set of protective cover 20, it only costs 3,000 yuan to replace the cover head 22, which reduces the maintenance cost.

[0070] Optionally, in the embodiment of the present application, the inner diameter of the sleeve 21 is any value in the range of 22-30 mm. In this way, the sleeve 21 has a more suitable inner diameter, so that the sleeve 21 can be sleeved on the outer periphery of the positioning member 13, and has a better protective effect on the positioning member 13. For example, the positioning member 13 can be cylindrical, and its diameter can usually be about 20 mm. In order to make the sleeve 21 more smoothly sleeved on the positioning member 13, the inner diameter of the sleeve 21 is set to any value in the range of 22-30 mm, so as to avoid the inner diameter of the sleeve 21 being too small to be difficult to sleeve on the positioning member 13, and to avoid the inner diameter of the sleeve 21 being too large to easily detach from the positioning member 13.

[0071] For example, in the embodiment of the present application, the inner diameter of the sleeve 21 can be 22 mm, 25 mm, 28 mm or 30 mm, etc., and can be set according to actual needs. The embodiment of the present application does not limit the specific value of the inner diameter of the sleeve 21.

[0072] In the embodiment of the present application, optionally, the length of the sleeve 21 along the axial direction is any value in the range of 78-85 mm. In this way, the sleeve 21 has a more suitable length, so that the sleeve 21 can be sleeved on the outer periphery of the positioning member 13, completely covering the positioning member 13, and having a better protective effect on the positioning member 13. For example, the positioning member 13 can be cylindrical, and its length can usually be about 68 mm. In order to make the sleeve 21 better sleeved on the positioning member 13, the length of the sleeve 21 is set to any value in the range of 78-85 mm, so as to avoid the length of the sleeve 21 being too small to cover the positioning member 13, and to avoid the inner diameter of the sleeve 21 being too large so that there is a large space in the sleeve 21, wasting materials.

[0073] For example, in the embodiment of the present application, the axial length of the sleeve 21 can be 78 mm, 80 mm, 82 mm or 85 mm, etc., and can be set according to actual needs. The embodiment of the present application does not limit the specific value of the axial length of the sleeve 21.

[0074] Optionally, in the embodiment of the present application, the thickness of the side wall of the sleeve 21 is any value between 10 and 20 mm. In this way, the sleeve 21 has a more suitable thickness, so that the sleeve 21 has better structural stability and has a better protective effect on the positioning member 13. The thickness of the side wall of the sleeve 21 is set to any value between 10 and 20 mm to avoid the sleeve 21 being too small and easy to be damaged, and to avoid the sleeve 21 being too large and wasting materials.

[0075] For example, in the embodiment of the present application, the thickness of the side wall of the sleeve 21 can be 10 mm, 12 mm, 15 mm or 20 mm, etc., and can be set according to actual needs. The embodiment of the present application does not limit the specific value of the thickness of the side wall of the sleeve 21.

[0076] Optionally, in the embodiment of the present application, the thickness of the sleeve 22 along the axial direction perpendicular to the sleeve 21 is any value between 30 and 40 mm. In this way, the sleeve 22 has a more suitable thickness, so that the sleeve 22 has better structural stability and has a better protective effect on the end of the positioning member 13. The thickness of the sleeve 22 along the axial direction perpendicular to the sleeve 21 is set to any value between 30 and 40 mm to avoid the sleeve 21 being too small and easy to be damaged, and to avoid the sleeve 21 being too large and wasting materials.

[0077] For example, in the embodiment of the present application, the thickness of the sleeve 22 along the axial direction perpendicular to the sleeve 21 can be 30 mm, 33 mm, 38 mm or 40 mm, etc., which can be set according to actual needs. The embodiment of the present application does not limit the specific value of the thickness of the sleeve 22 along the axial direction perpendicular to the sleeve 21.

[0078] Optionally, in the embodiment of the present application, the protective cover 20 is a flexible protective cover. In this way, the protective cover 20 has good flexibility to achieve collision prevention, and the flexible protective cover is elastic and deforms when a collision occurs, which has a good vibration reduction and buffering effect on the positioning member 13 or the graphite member and the quartz member, and has an ejection protection effect on the contact part when a collision occurs. In addition, when no collision occurs, the flexible protective cover can return to its original state, has good toughness, and has a long service life.

[0079] For example, in the embodiment of the present application, the material of the flexible protective cover can be any one of polyvinyl chloride (PVC), silicone and rubber. In this way, the protective cover 20 has good shock absorption, low water absorption, fast recovery, excellent moisture-proof, wear-resistant, lightweight, heat-insulating, moisture-proof, flame-retardant, simple construction, good stability, good electrical insulation, strong corrosion resistance, so that the protective cover 20 has a good protective effect.

[0080] In summary, the epitaxial device described in the embodiment of the present application may at least include the following advantages:

[0081] In an embodiment of the present application, the epitaxial device includes: a device body and a conveying structure; the device body is provided with a groove, the groove is used to accommodate a single crystal substrate, the conveying structure is detachably connected to the device body, the device body is provided with a positioning member near the notch of the groove, the positioning member is used to position the conveying structure; the device body is provided with a protective sleeve, the protective sleeve is sleeved on the positioning member. In this way, the positioning member is protected by the protective sleeve, and when the single crystal substrate member, such as a graphite member and a quartz member, needs to be removed from the groove for maintenance, the protective sleeve can be used to prevent the graphite member and the quartz member from directly touching the positioning member when taking the graphite member and the quartz member, thereby preventing the graphite member from being damaged such as powder falling or cracking, thereby improving the yield rate of the product and preventing the quartz member from being easily damaged such as cracking or breaking. In addition, the protective sleeve also achieves a better protection effect on the positioning member, isolating the positioning member from the external air with high humidity, and preventing the positioning member from being oxidized.

[0082] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0083] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An epitaxial device, characterized in that: The epitaxial device comprises: a device body and a conveying structure; The device body is provided with a groove, the groove is used to accommodate the single crystal substrate, the conveying structure is detachably connected to the device body, the device body is provided with a positioning piece near the notch of the groove, the positioning piece is used to position the conveying structure; The device body is provided with a protective cover, and the protective cover is sleeved on the positioning piece.

2. The epitaxial device according to claim 1, characterized in that: The protective sleeve includes a sleeve and a sleeve head, the positioning piece is protruding from the device body, the sleeve is sleeved on the positioning piece, the sleeve head is arranged at one end of the positioning piece away from the device body, and the sleeve head is connected to one end of the sleeve.

3. The epitaxial device according to claim 2, characterized in that: The sleeve head is detachably connected to one end of the sleeve.

4. The epitaxial device according to claim 3, characterized in that: The sleeve comprises a sleeve body and a sleeve connection portion; The sleeve connection portion is connected to one end of the sleeve body and protrudes away from the sleeve body. The sleeve head is provided with a recessed clamping portion, and the clamping portion is clamped to the sleeve connection portion.

5. The epitaxial device according to claim 4, characterized in that: The sleeve connection portion is a cylindrical sleeve connection portion, and the diameter of the cylindrical sleeve connection portion is smaller than the diameter of the sleeve body.

6. The epitaxial device according to claim 2, characterized in that: The outer surface of the sleeve is an arc-shaped surface.

7. The epitaxial device according to claim 2, characterized in that: The sleeve and the sleeve head are an integrally formed structure.

8. The epitaxial device according to claim 2, characterized in that: The inner diameter of the sleeve is any value between 22 and 30 mm.

9. The epitaxial device according to claim 2, characterized in that: The length of the sleeve along the axial direction is any value between 78 and 85 mm.

10. The epitaxial device according to claim 2, characterized in that: The thickness of the side wall of the sleeve is any value between 10 and 20 mm.

11. The epitaxial device according to claim 2, characterized in that: The thickness of the sleeve along the axial direction perpendicular to the sleeve is any value between 30 and 40 mm.

12. The epitaxial device according to claim 1, characterized in that: The protective cover is a flexible protective cover.

13. The epitaxial device according to claim 12, characterized in that: The material of the flexible protective cover is any one of polyvinyl chloride, silica gel and rubber.

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