Positioning tool for welding bearing device, welding tool and bearing device

Abstract

The utility model provides a positioning tool for welding a bearing device, a welding tool and the bearing device. The positioning tool comprises a rotating base which is rotatably arranged around a first axis, the rotating base is provided with a first containing cavity and a first positioning structure, the first containing cavity is used for containing the electrostatic chuck, and the first positioning structure is used for being in positioning fit with the electrostatic chuck in the radial direction so that the axis of the electrostatic chuck can coincide with the first axis; and the positioning assembly is connected with the rotating seat and provided with a second containing cavity and a second positioning structure, the second containing cavity is used for containing the welding flange, and the second positioning structure is used for being in positioning fit with the welding flange in the radial direction so that the axis of the welding flange can coincide with the first axis. According to the positioning tool, the first positioning structure is arranged on the rotating seat, and the second positioning structure is arranged on the positioning assembly, so that the coaxiality of the electrostatic chuck and the welding flange is ensured, and the assembly precision and the welding seam quality are improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, and in particular to a positioning tool for welding a carrying device, a welding tool and a carrying device. Background Art

[0002] Electrostatic chuck (ESC, Electrostatic Chuck or E-chuck for short), is the most core component of PVD (Physical Vapor Deposition) machine and CVD (Chemical Vapor Deposition) machine.

[0003] At present, the bearing device generally includes an electrostatic chuck and a flange. During assembly, the flange needs to be installed on the electrostatic chuck and the gap between the electrostatic chuck and the flange needs to be welded. Since the welding between the electrostatic chuck and the flange is continuous welding, in order to ensure that the weld meets the design requirements, the electrostatic chuck and the flange need to be assembled with high precision. However, in the prior art, the assembly precision of the electrostatic chuck and the flange is low and cannot meet the welding requirements, resulting in poor quality of the weld of the continuous welding. Utility Model Content

[0004] The utility model aims to at least solve the problem in the prior art that the assembly accuracy of the electrostatic chuck and the flange is low, which cannot meet the welding requirements and leads to poor weld quality of continuous welding. A positioning tool, a welding tool and a carrying device for a welding carrying device are proposed.

[0005] In order to achieve the purpose of the utility model, a positioning tool for a welding carrier device is provided, the carrier device is used for semiconductor process equipment, the carrier device includes an electrostatic chuck and a welding flange, the positioning tool includes: a rotating seat, rotatably arranged around a first axis, the rotating seat having a first accommodating cavity and a first positioning structure, the first accommodating cavity is used to accommodate the electrostatic chuck, the first positioning structure is used to radially position and cooperate with the electrostatic chuck so that the axis of the electrostatic chuck coincides with the first axis; a positioning assembly, connected to the rotating seat, the positioning assembly having a second accommodating cavity and a second positioning structure, the second accommodating cavity is used to accommodate the welding flange, the second positioning structure is used to radially position and cooperate with the welding flange so that the axis of the welding flange coincides with the first axis.

[0006] Optionally, the first positioning structure is also used to cooperate with the electrostatic chuck in a circumferential upper limit position; the positioning assembly cooperates with the first positioning structure in a circumferential upper limit position, and the positioning assembly also has a third positioning structure, and the third positioning structure is used to cooperate with the welding flange in a circumferential upper limit position, so that the electrostatic chuck and the welding flange rotate coaxially and synchronously.

[0007] Optionally, the positioning assembly includes: a positioning ring having a first end and a second end along the first axis, the first end of the positioning ring being used to radially position and cooperate with the first positioning structure in a circumferential limit position so that the positioning ring and the rotating seat are coaxial and rotate synchronously, and the second positioning structure is arranged at the second end of the positioning ring; a pressure plate is arranged at the second end of the positioning ring, the pressure plate cooperates with the positioning ring in a circumferential limit position, and the third positioning structure is passed through the pressure plate along the direction of the first axis.

[0008] Optionally, the second positioning structure is an annular protrusion formed on the inner wall of the positioning ring around the first axis, and the inner circumferential wall of the second positioning structure is used to abut against the outer circumferential wall of the pressure plate and the welding flange so that the axis of the pressure plate and the axis of the welding flange coincide with the axis of the positioning ring.

[0009] Optionally, a first limiting portion is further provided at the second end of the positioning ring, and a second limiting portion corresponding to the first limiting portion is provided on the pressure plate, and the positioning ring and the pressure plate achieve circumferential limiting cooperation through the first limiting portion and the second limiting portion.

[0010] Optionally, the positioning assembly also includes: an annular positioning portion connected to the outer peripheral wall of the first end of the positioning ring, the first positioning structure is penetrated by the annular positioning portion, and the positioning ring achieves radial positioning cooperation and circumferential limiting cooperation with the first positioning structure through the annular positioning portion.

[0011] Optionally, the annular positioning portion includes: an annular folded edge, whose inner circumference is connected to the positioning ring; a plurality of first positioning holes, which are circumferentially spaced apart on the annular folded edge, and all of the first positioning holes are distributed around the axis of the positioning ring; the first positioning structure includes a plurality of positioning pins, and all of the first positioning holes are arranged in a one-to-one correspondence with all of the positioning pins, and each of the positioning pins is inserted into the corresponding first positioning hole and plugged into the rotating seat so that the axis of the positioning ring coincides with the first axis.

[0012] Optionally, a plurality of welding through holes for positioning welding are circumferentially arranged at intervals on the outer peripheral wall of the positioning ring.

[0013] Optionally, the third positioning structure includes: a plurality of connecting bolts, each of which is passed through the pressure plate and is used to fix the pressure plate and the welding flange, and the plurality of connecting bolts are spaced apart and distributed around the axis of the pressure plate.

[0014] Optionally, the rotating seat includes: a base, which is rotatably arranged around a first axis, the base is used to place the electrostatic chuck, and the first positioning structure is plugged into the base; an annular cover, which is buckled on the base and forms the first accommodating cavity with the base, the annular cover supports the positioning assembly, and the annular cover is radially positioned and circumferentially limited with the first positioning structure, so that the base, the electrostatic chuck and the annular cover rotate coaxially and synchronously.

[0015] Optionally, the rotating seat further includes: a protection pad, which is disposed on the base and is used to support the electrostatic chuck, and the protection pad is positioned and matched with the first positioning structure in the radial direction and is limited in the circumferential direction.

[0016] Optionally, the first positioning structure includes: a plurality of positioning pins; a plurality of second positioning holes are provided on the annular protective cover; a plurality of third positioning holes are provided on the protective pad; a plurality of plug-in holes are provided on the base; all the second positioning holes, all the third positioning holes, and all the plug-in holes are arranged in one-to-one correspondence with all the positioning pins, and each of the positioning pins is sequentially inserted into the corresponding second positioning hole and the third positioning hole and plugged into the corresponding plug-in hole.

[0017] Optionally, an annular avoidance groove is provided on one side of the annular protective cover facing the base, so that after the electrostatic chuck is assembled, an avoidance gap is formed between the first accommodating cavity and the outer periphery of the electrostatic chuck.

[0018] According to the second aspect of the utility model, a welding tool is also disclosed, including: a working platform; the above-mentioned positioning tool, which is arranged on the working platform; a rotating mechanism, which is used to drive the positioning tool to rotate; and a clamping mechanism, which is used to apply pressure to the positioning tool.

[0019] According to the third aspect of the utility model, a carrying device is also disclosed, which is assembled using the above-mentioned positioning tooling, including: an electrostatic chuck, which is provided with a fourth positioning structure corresponding to the first positioning structure, and the fourth positioning structure is used to cooperate with the first positioning structure in radial positioning and circumferential upper limit positioning, so that the electrostatic chuck and the rotating seat are coaxial and rotate synchronously; a welding flange, which is connected to the electrostatic chuck, and the welding flange is provided with a fifth positioning structure, and the fifth positioning structure is used to cooperate with the third positioning structure in the circumferential upper limit positioning, so that the welding flange and the positioning assembly rotate synchronously.

[0020] The positioning fixture of the utility model arranges a first positioning structure on the rotating seat so that the first positioning structure and the electrostatic chuck are positioned and matched in the radial direction, so that the axis of the electrostatic chuck coincides with the first axis; then, a second positioning structure is arranged on the positioning assembly so that the second positioning structure and the welding flange are positioned and matched in the radial direction, so that the axis of the welding flange also coincides with the first axis. Since the axis of the electrostatic chuck and the axis of the welding flange both coincide with the first axis, the axis of the electrostatic chuck also coincides with the axis of the welding flange, thereby ensuring the coaxiality of the electrostatic chuck and the welding flange, thereby improving the assembly accuracy of the electrostatic chuck and the welding flange, and further improving the weld quality of continuous welding. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A three-dimensional diagram of a positioning tool according to an embodiment of the utility model;

[0022] Figure 2 This is a schematic diagram of the structure of the positioning tooling of an embodiment of the utility model;

[0023] Figure 3 A top view of a positioning ring and an annular positioning portion of a positioning fixture according to an embodiment of the utility model;

[0024] Figure 4 for Figure 3 AA section view;

[0025] Figure 5 for Figure 4 A partial enlarged view of part A;

[0026] Figure 6 A three-dimensional diagram of a positioning ring and an annular positioning portion of a positioning tool according to an embodiment of the utility model;

[0027] Figure 7 It is a structural schematic diagram of a pressure plate of a positioning tooling according to an embodiment of the utility model;

[0028] Figure 8 It is a structural schematic diagram of the annular protective cover of the positioning tooling according to an embodiment of the utility model;

[0029] Fig. 9 It is a schematic diagram of assembling the annular protective cover and the positioning assembly of the positioning tool according to the embodiment of the utility model;

[0030] Fig.10 for Fig. 9 A partial enlarged view of part B;

[0031] Fig.11 It is a partial enlarged view of the annular protective cover of the positioning tooling of the embodiment of the utility model;

[0032] Fig.12This is a schematic diagram of the use state of the positioning tooling of an embodiment of the utility model;

[0033] Fig.13 This is a schematic diagram of the structure of a welding tool according to an embodiment of the utility model;

[0034] List of reference numerals:

[0035] 10. Rotating seat; 11. First accommodating chamber; 12. First positioning structure; 13. Base;

[0036] 131, plug-in hole; 132, receiving groove; 14, annular protective cover; 141, second positioning hole; 142, annular avoidance groove; 143, mounting groove; 144, second circumferential positioning portion; 15, protection pad; 151, third positioning hole; 152, placement groove; 20, positioning assembly; 21, second receiving cavity; 22, positioning ring; 221, second positioning structure; 222, first limiting portion; 223, welding through hole;

[0037] 23. Pressing plate; 231. Third positioning structure; 232. Second limiting portion; 233. Connecting through hole;

[0038] 234, first foolproof portion; 24, annular positioning portion; 241, annular folding edge; 242, first positioning hole; 243, first circumferential positioning portion; 30, electrostatic chuck; 31, fourth positioning structure;

[0039] 40. Welding flange; 41. Fifth positioning structure; 42. Second fool-proofing part; 100. Working platform; 200. Rotating mechanism; 300. Clamping mechanism. DETAILED DESCRIPTION

[0040] In order to enable those skilled in the art to better understand the technical solution of the present invention, the positioning tool, welding tool and carrying device provided by the present invention are described in detail below in conjunction with the accompanying drawings.

[0041] The carrier is used to carry wafers and is the most core component of PVD (Physical Vapor Deposition) machines and CVD (Chemical Vapor Deposition) machines.

[0042] At present, the bearing device generally includes an electrostatic chuck (ESC, ElectrostaticChuck or E-chuck) and a flange. The electrostatic chuck usually includes a ceramic layer and an adsorption electrode arranged inside the ceramic layer. During assembly, the flange needs to be installed on the electrostatic chuck and pressed tightly to keep close contact between the flange and the electrostatic chuck; after pressing, the electrostatic chuck is rotated to make the electrostatic chuck and the flange rotate synchronously. During the rotation process, the gap between the electrostatic chuck and the flange is positioned and welded (generally six welding points are used to achieve positioning welding), so that the position of the electrostatic chuck and the flange is fixed; after positioning welding, the electrostatic chuck continues to rotate for continuous welding.

[0043] Since the electrostatic chuck and the flange are relatively fixed in position by positioning welding after assembly, the assembly accuracy of the electrostatic chuck and the flange during positioning welding is guaranteed, which can ensure that the weld quality of subsequent continuous welding can meet the design requirements.

[0044] In the process of positioning welding, it is found through research that the main factor affecting the accuracy of positioning welding is the coaxial accuracy between the electrostatic chuck and the flange after assembly. In addition, what is easily overlooked by technicians in this field is that during the rotation of the electrostatic chuck and the flange, although the flange is pressed against the electrostatic chuck, the electrostatic chuck will still rotate relative to the flange, which will cause the relative position between the electrostatic chuck and the flange, and then cause the two to be misaligned during the positioning welding process, affecting the assembly accuracy after positioning welding. Therefore, how to ensure the assembly accuracy between the electrostatic chuck and the flange so that the continuous welding meets the final design requirements is an urgent problem to be solved in this field.

[0045] To achieve the purpose of this utility model, Figure 1 The embodiment shown in the figure discloses a positioning tool for welding a carrier device. The carrier device is used in semiconductor process equipment, and the carrier device includes: an electrostatic chuck 30 and a welding flange 40, such as Figure 2 As shown, the positioning tooling includes: a rotating seat 10 and a positioning assembly 20. The rotating seat 10 is rotatably arranged around a first axis, and the rotating seat 10 has a first accommodating cavity 11 and a first positioning structure 12. The first accommodating cavity 11 is used to accommodate an electrostatic chuck 30, and the first positioning structure 12 is used to position and cooperate with the electrostatic chuck 30 in the radial direction so that the axis of the electrostatic chuck 30 coincides with the first axis.

[0046] The positioning assembly 20 is connected to the rotating seat 10, and the positioning assembly 20 has a second accommodating cavity 21 and a second positioning structure 221. The second accommodating cavity 21 is used to accommodate the welding flange 40, and the second positioning structure 221 is used to radially position and cooperate with the welding flange 40 so that the axis of the welding flange 40 coincides with the first axis.

[0047] The positioning fixture of the utility model is provided with a first positioning structure 12 on the rotating seat 10, so that the first positioning structure 12 and the electrostatic chuck 30 are positioned and matched in the radial direction, so that the axis of the electrostatic chuck 30 coincides with the first axis; then, by providing a second positioning structure 221 on the positioning assembly 20, the second positioning structure 221 and the welding flange 40 are positioned and matched in the radial direction, so that the axis of the welding flange 40 also coincides with the first axis. Since the axis of the electrostatic chuck 30 and the axis of the welding flange 40 both coincide with the first axis, the axis of the electrostatic chuck 30 and the axis of the welding flange 40 also coincide, thereby ensuring the coaxiality of the electrostatic chuck 30 and the welding flange 40, thereby improving the assembly accuracy of the electrostatic chuck 30 and the welding flange 40, and thus improving the weld quality of continuous welding.

[0048] In this embodiment, in order to further improve the weld quality, the first positioning structure 12 is also used to cooperate with the electrostatic chuck 30 in the circumferential upper limit position, so that the rotating seat 10 can drive the electrostatic chuck 30 to rotate synchronously in the axial direction through the first positioning structure 12.

[0049] The positioning assembly 20 cooperates with the first positioning structure 12 in the circumferential upper limit position, and the positioning assembly 20 also has a third positioning structure 231, and the third positioning structure 231 is used to cooperate with the welding flange 40 in the circumferential upper limit position. The positioning assembly 20 cooperates with the first positioning structure 12 in the axial upper limit position, so that the rotating seat 10 can also drive the positioning assembly 20 to rotate synchronously through the first positioning structure 12, and because the third positioning structure 231 cooperates with the welding flange 40 in the circumferential upper limit position, the positioning assembly 20 can drive the welding flange 40 to rotate synchronously in the axial direction through the third positioning structure 231. In other words, when the rotating seat 10 rotates, the electrostatic chuck 30 and the positioning assembly 20 can be driven to rotate synchronously at the same time through the first positioning structure 12, and the positioning assembly 20 drives the welding flange 40 to rotate synchronously through the third positioning structure 231, and finally the purpose of the electrostatic chuck 30 and the welding flange 40 coaxially and synchronously rotating is achieved.

[0050] The positioning tool of the utility model realizes the coaxial and synchronous rotation of the electrostatic chuck 30 and the welding flange 40 by making the first positioning structure 12 cooperate with the circumferential limit of the welding flange 40 and the positioning assembly 20 at the same time, and then cooperates with the circumferential limit of the third positioning structure 231 on the positioning assembly 20 and the welding flange 40. During the positioning welding process, while ensuring the coaxial rotation of the electrostatic chuck 30 and the welding flange 40, misalignment between the electrostatic chuck 30 and the welding flange 40 is avoided, thereby ensuring the assembly accuracy during the positioning welding process and ensuring the quality of the welds of continuous welding.

[0051] like Figure 2As shown, the positioning assembly 20 includes: a positioning ring 22 and a pressure plate 23. The positioning ring 22 has a first end and a second end along the first axis. The first end of the positioning ring 22 is used to be positioned and matched with the first positioning structure 12 in the radial direction and in the circumferential upper limit position, so that the positioning ring 22 and the rotating seat 10 are coaxial and rotate synchronously. The second positioning structure 221 is arranged at the second end of the positioning ring 22. The pressure plate 23 is arranged at the second end of the positioning ring 22, and the pressure plate 23 and the positioning ring 22 are in the circumferential upper limit position. The third positioning structure 231 is penetrated on the pressure plate 23 along the direction of the first axis.

[0052] like Figure 3 From the top view of the positioning ring 22 shown in FIG. 1 , it can be seen that the positioning ring 22 is a ring-shaped structure. Figure 4 As shown, the positioning ring 22 has a first end and a second end that are arranged opposite to each other along the first axis direction. Figure 5 As shown, the second positioning structure 221 is an annular protrusion formed on the inner wall of the positioning ring 22 around the first axis. Fig.12 As shown, when the welding flange 40 and the pressing plate 23 are assembled, the pressing plate 23 is pressed on the welding flange 40, and at the same time, the inner peripheral wall of the second positioning structure 221 abuts against the outer peripheral wall of the pressing plate 23 and the welding flange 40, so that the axis of the pressing plate 23, the axis of the welding flange 40 and the axis of the positioning ring 22 coincide with each other.

[0053] It is understandable that the welding flange 40 and the annular protrusion should be matched so that the flange to be assembled can abut against the inner circumferential wall of the annular protrusion. Since the annular protrusion is arranged around the first axis, when the inner circumferential wall of the annular protrusion abuts against the outer circumferential wall of the welding flange 40, the radial positioning of the welding flange 40 can be achieved, so that the axis of the welding flange 40 coincides with the first axis. The pressure plate 23 and the annular protrusion should also be matched so that the radial positioning cooperation with the annular protrusion can be achieved.

[0054] like Figure 3 and Figure 7 As shown, the second end of the positioning ring 22 is also provided with a first limiting portion 222, and the pressure plate 23 is provided with a second limiting portion 232 corresponding to the first limiting portion 222, and the positioning ring 22 and the pressure plate 23 are limited in the circumferential direction through the first limiting portion 222 and the second limiting portion 232. By providing the first limiting portion 222 and the second limiting portion 232, the circumferential limiting cooperation between the positioning ring 22 and the pressure plate 23 is achieved, so that the positioning ring 22 and the pressure plate 23 can be synchronously rotated in the circumferential direction, and then the pressure plate 23 cooperates with the circumferential limiting cooperation with the welding flange 40 through the third positioning structure 231, so that the coaxial and synchronous rotation of the positioning assembly 20 and the welding flange 40 is achieved.

[0055] In the present embodiment, the first limiting portion 222 is a limiting groove provided on the circumferential side wall of the positioning ring 22, and the second limiting portion 232 is a limiting pin provided on the outer peripheral wall of the pressure plate 23. It is understandable that the limiting pin and the limiting groove can both be one. However, in order to improve the stability of the circumferential limiting, in the present embodiment, there are multiple limiting grooves, and they are circumferentially spaced and distributed on the end face of the first end of the positioning ring 22, and each limiting groove extends radially. Correspondingly, the limiting pin is plugged into the outer peripheral wall of the pressure plate 23 and is arranged one-to-one with the limiting groove. After the pressure plate 23 is assembled on the positioning ring 22, the limiting groove is located in the limiting groove and forms a circumferential limiting fit with the groove wall of the limiting groove.

[0056] It should be noted that, in the present embodiment, the first limiting portion 222 is a limiting groove provided on the circumferential side wall of the positioning ring 22. The second limiting portion 232 is a limiting pin provided on the outer peripheral wall of the pressure plate 23, but this is not restrictive. In some other embodiments not shown in the figure, the first limiting portion 222 may also be a limiting pin provided on the circumferential side wall of the positioning ring 22, and the second limiting portion 232 is a limiting groove provided on the outer peripheral wall of the pressure plate 23. In other words, without violating the inventive concept and principle of the utility model, as long as the structure can play a role in circumferential limiting cooperation, it is within the protection scope of the utility model.

[0057] like Figure 2 and Figure 3 As shown, the positioning assembly 20 further includes: an annular positioning portion 24, the annular positioning portion 24 is connected to the outer peripheral wall of the first end of the positioning ring 22, the first positioning structure 12 is penetrated on the annular positioning portion 24, and the positioning ring 22 realizes radial positioning cooperation and circumferential limiting cooperation with the first positioning structure 12 through the annular positioning portion 24. By arranging the annular positioning portion 24 on the positioning ring 22, the positioning ring 22 realizes radial positioning cooperation and circumferential limiting cooperation with the first positioning structure 12 through the annular positioning portion 24, thereby realizing coaxial and synchronous rotation with the rotating seat 10.

[0058] Specifically, if Figure 3 As shown, the annular positioning portion 24 includes: an annular fold 241 and a plurality of first positioning holes 242. The inner circumference of the annular fold 241 is connected to the positioning ring 22; the plurality of first positioning holes 242 are circumferentially spaced on the annular fold 241, and all the first positioning holes 242 are spaced around the axis of the positioning ring 22, that is, the distance from the axis of each first positioning hole 242 to the axis of the positioning ring 22 is the same. Figure 2As shown, the first positioning structure 12 includes a plurality of positioning pins, all of which are spaced apart around the first axis, that is, the distance from the axis of each positioning pin to the first axis is the same, and all the first positioning holes 242 are arranged one-to-one with all the positioning pins, each positioning pin is inserted into the corresponding first positioning hole 242 and is plugged into the rotating seat 10 so that the axis of the positioning ring 22 coincides with the first axis.

[0059] After the positioning ring 22 realizes radial positioning cooperation and circumferential limiting cooperation with the first positioning structure 12 through the annular positioning portion 24, since all the first positioning holes 242 surround the axis of the positioning ring 22, and all the positioning pins surround the first axis, therefore, when the positioning pin is inserted into the corresponding first positioning hole 242, the axis of the positioning pin coincides with the axis of the first positioning hole 242, and since the distance from the axis of each first positioning hole 242 to the axis of the positioning ring 22 is the same, and the distance from the axis of each positioning pin to the first axis is the same, therefore, when the first positioning hole 242 coincides with the positioning pin, the axis of the positioning ring 22 also coincides with the first axis, thereby realizing the positioning of the positioning ring 22 and the first axis.

[0060] like Figure 6 As shown, a plurality of welding through holes 223 for positioning welding are circumferentially spaced apart on the outer peripheral wall of the positioning ring 22 . The plurality of welding through holes 223 are circumferentially spaced apart to facilitate positioning welding between the welding flange 40 and the electrostatic chuck 30 .

[0061] like Figure 2 and Figure 7 As shown, the pressing plate 23 is an annular structure. In this embodiment, a pin hole is provided on the outer peripheral wall of the pressing plate 23, and a limiting pin is inserted into the pin hole to form a second limiting portion 232. The third positioning structure 231 includes: a plurality of connecting bolts, each of which is passed through the pressing plate 23 and is used to fix the pressing plate 23 and the welding flange 40, and the plurality of connecting bolts are distributed at intervals around the axis of the pressing plate 23. By providing the connecting bolts, a fixed connection between the pressing plate 23 and the welding flange 40 can be achieved, so that the positioning ring 22 and the pressing plate 23 can rotate synchronously through the limiting groove and the limiting pin, and the pressing plate 23 and the welding flange 40 can rotate synchronously through the connecting bolts.

[0062] Specifically, the pressing plate 23 has a first end and a second end in the direction of the first axis. A plurality of connecting through holes 233 are provided on the first end surface of the pressing plate 23. Each connecting through hole 233 runs from the first end of the pressing plate 23 to the second end of the pressing plate 23. All the connecting through holes 233 are spaced around the axis of the pressing plate 23. Accordingly, Fig. 9As shown, a fifth positioning structure 41 is provided on the flange 40 to be welded, and the fifth positioning structure 41 is used to cooperate with the third positioning structure 231 in the circumferential upper limit. Specifically, the fifth positioning structure 41 includes a plurality of connection holes, and the plurality of connection holes are provided on the welding flange 40 at one end facing the pressing plate 23, and the connection holes are provided in a one-to-one correspondence with the connection through holes 233. The connection bolts pass through the connection through holes 233 and are threadedly connected to the connection holes, thereby realizing a fixed connection between the pressing plate 23 and the welding flange 40.

[0063] In order to facilitate the assembly of the pressure plate 23, an anti-fool structure is provided between the welding flange 40 and the pressure plate 23. Specifically, a first anti-fool part 234 is provided on the end face of the second end of the pressure plate 23, and a second anti-fool part 42 corresponding to the first anti-fool part 234 is provided on the welding flange 40. During assembly, the first anti-fool part 234 is positioned and matched with the second anti-fool part 42 to avoid errors in the assembly direction of the pressure plate 23. In this embodiment, the first anti-fool part 234 is an anti-fool hole, and the second anti-fool part 42 is an anti-fool pin. There are two anti-fool holes and two anti-fool pins, and the two anti-fool holes are circumferentially spaced, and the connecting line of the two anti-fool holes deviates from the axis of the pressure plate 23, and the anti-fool pins correspond one to one with the anti-fool holes. Therefore, there is only one way of matching the first anti-fool part 234 and the second anti-fool part 42, thereby achieving an anti-fool effect.

[0064] It should be noted that, in the above-mentioned embodiment, the first anti-foolproofing portion 234 is an anti-foolproofing hole, and the second anti-foolproofing portion 42 is an anti-foolproofing pin, but this is not restrictive. In some other embodiments not shown in the figure, the first anti-foolproofing portion 234 can also be an anti-foolproofing pin, and the second anti-foolproofing portion 42 can be an anti-foolproofing hole. The structure of anti-foolproofing can be realized. Under the premise of not violating the inventive concept and principle of the utility model, they are all within the protection scope of the utility model.

[0065] like Figure 2 As shown, the rotating seat 10 includes: a base 13 and an annular protective cover 14. The base 13 is rotatably arranged around the first axis, and the base 13 is used to place the electrostatic chuck 30. The first positioning structure 12 is plugged with the base 13; the annular protective cover 14 is buckled on the base 13 and forms a first accommodating chamber 11 with the base 13. The positioning assembly 20 is located on the annular protective cover 14, and the annular protective cover 14 supports the positioning assembly 20. The annular protective cover 14 and the first positioning structure 12 are positioned and matched in the radial direction and the upper limit position is matched in the circumferential direction, so that the base 13, the electrostatic chuck 30 and the annular protective cover 14 are coaxial and rotate synchronously. It can be understood that in this embodiment, the annular protective cover 14 is detachably connected to the base 13. When in use, the electrostatic chuck 30 is first placed on the base 13, and then the annular protective cover 14 is buckled on the base 13, so that the electrostatic chuck 30 can be protected by the annular protective cover 14.

[0066] like Figure 2As shown, in this embodiment, the bottom of the base 13 is used to connect with the rotating mechanism 200, so that the rotating mechanism 200 drives the base 13 to rotate along its own axis. Therefore, in this embodiment, the axis of the base 13 is the first axis. The bottom of the base 13 is provided with a plurality of plug holes 131, and the positioning pins are plugged into the plug holes 131 to achieve plug-in matching with the base 13. The plurality of plug holes 131 are spaced around the axis (first axis) of the base 13, so the positioning pins after being plugged into the plug holes 131 are also spaced around the axis (first axis) of the base 13.

[0067] like Figure 8 As shown, a mounting groove 143 is provided on the surface of the side of the annular protective cover 14 facing away from the electrostatic chuck 30, and the mounting groove 143 is located on the inner circumference of the annular protective cover 14. A plurality of second positioning holes 141 cooperating with the positioning pins are provided at the bottom of the mounting groove 143, and the second positioning holes 141 are arranged in a one-to-one correspondence with the plug-in holes 131, so that the positioning pins can be plugged and matched with the plug-in holes 131 after passing through the second positioning holes 141. Since all the second positioning holes 141 are arranged around the axis of the annular protective cover 14, and the positioning pins are arranged around the axis (first axis) of the base 13, when the positioning pins are positioned and matched with the second positioning holes 141, the axis of the annular protective cover 14 can be made to coincide with the axis (first axis) of the base 13.

[0068] like Figure 2 As shown, during assembly, the annular fold 241 of the positioning assembly 20 is arranged in the installation groove 143, and the first positioning hole 242 and the second positioning hole 141 on the annular fold 241 are arranged in a one-to-one correspondence, that is, by cooperating with the positioning pin of the first positioning hole 242 and the second positioning hole 141, the axis of the positioning ring 22 and the axis of the annular cover 14 can be coincident, and because the axis of the annular cover 14 coincides with the axis (first axis) of the base 13, the coincidence of the positioning ring 22 and the first axis is also achieved.

[0069] like Figure 2 As shown, the rotating seat 10 also includes a protective pad 15 for supporting the electrostatic chuck 30. A receiving groove 132 is provided on the base 13, and the protective pad 15 is provided in the receiving groove 132 of the base 13. The protective pad 15 is made of plastic, for example, polytetrafluoroethylene. Since the main material of the electrostatic chuck is ceramic, if the downward pressure is too large or collides with the base 13, the electrostatic chuck will be damaged. By providing the protective pad 15, the pressure can be buffered, and the electrostatic chuck 30 can be protected to avoid damage to the electrostatic chuck 30 caused by excessive downward pressure or direct collision between the electrostatic chuck 30 and the base 13.

[0070] The protection pad 15 is provided with a placement groove 152 for placing the electrostatic chuck 30, and a plurality of third positioning holes 151 are provided at the bottom of the placement groove 152, and the plurality of third positioning holes 151 are spaced and distributed around the axis of the protection pad 15. It can be understood that the plug-in hole 131 is provided at the bottom of the receiving groove 132, and the third positioning hole 151 and the plug-in hole 131 are provided one-to-one, so that the positioning pin can pass through the third positioning hole 151 and be plugged into the plug-in hole 131, thereby realizing the positioning match of the protection pad 15 and the first positioning structure 12 in the radial direction and the upper limit match in the circumferential direction.

[0071] It can be understood that in order to achieve the limiting cooperation between the electrostatic chuck 30 and the first positioning structure 12, a fourth positioning structure 31 corresponding to the first positioning structure 12 is provided on the electrostatic chuck 30, and the fourth positioning structure 31 is used to cooperate with the first positioning structure 12 in the radial direction and in the circumferential limit direction, so that the electrostatic chuck 30 and the rotating seat 10 are coaxial and rotate synchronously. Specifically, the fourth positioning structure 31 is a plurality of fourth positioning holes provided on the electrostatic chuck 30, all of which are spaced apart around the axis of the electrostatic chuck 30, and all of which are arranged in a one-to-one correspondence with the plug-in hole 131, that is, the fourth positioning holes are arranged in a one-to-one correspondence with the positioning pins after plug-in, so that the positioning pins can pass through the first positioning hole 242 on the positioning assembly 20, the second positioning hole 141 on the annular cover 14, the fourth positioning hole on the electrostatic chuck 30, and the third positioning hole 151 on the protective pad 15 at one time, and finally be plugged into the plug-in hole 131 of the base 13, so that the positioning assembly 20, the annular cover 14, the electrostatic chuck 30, the protective pad 15 and the base 13 are positioned and matched in the radial direction and limited in the circumferential direction, thereby realizing the coaxial and synchronous rotation of the electrostatic chuck 30 and the welding flange 40.

[0072] It should be noted that if Fig. 9 and Fig.10 As shown, when the positioning ring 22 is assembled with the annular cover 14, a first circumferential positioning portion 243 is provided on the annular fold 241, and a second circumferential positioning portion 144 is provided on the annular cover 14. The positioning ring 22 can make the first circumferential positioning portion 243 correspond to the second circumferential positioning portion 144 by rotating. When the first circumferential positioning portion 243 corresponds to the second circumferential positioning portion 144, it means that the first positioning hole 242 on the annular fold 241 corresponds to the second positioning hole 141 on the annular cover 14, thereby facilitating the rapid positioning of the first positioning hole 242 and the second positioning hole 141.

[0073] Specifically, if Fig.10As shown, the first circumferential positioning portion 243 is a notch formed on the edge of the annular fold 241, and the second circumferential positioning portion 144 is a radially arranged positioning groove on the annular protective cover. The positioning ring 22 can be rotated to make the notch correspond to and connect with the positioning groove, thereby completing rapid positioning.

[0074] In the present embodiment, the first circumferential positioning portion 243 and the second circumferential positioning portion 144 may both be positioning notches, but this is not restrictive. In some other embodiments not shown in the figure, the first circumferential positioning portion 243 and the second circumferential positioning portion 144 may be positioning protrusions arranged along the direction of the first axis. As long as the structure can play a positioning role, it is within the protection scope of the present invention without violating the inventive concept and principle of the present invention.

[0075] It should also be noted that in order to prevent the edge of the electrostatic chuck 30 from being crushed, Fig.11 As shown, an annular avoidance groove 142 is provided on one side of the annular protective cover 14 facing the base 13, so that after the electrostatic chuck 30 is assembled, an avoidance gap is formed between the first accommodating cavity 11 and the outer periphery of the electrostatic chuck 30. In addition, a gap can also be formed between the inner peripheral wall of the base 13 and the electrostatic chuck 30 to protect the electrostatic chuck 30.

[0076] According to the second aspect of the utility model, a welding tool is also disclosed, comprising: a working platform 100, the positioning tool mentioned above, a rotating mechanism 200 and a pressing mechanism 300. The positioning tool is arranged on the working platform 100; the rotating mechanism 200 is used to drive the positioning tool to rotate; and the pressing mechanism 300 is used to apply pressure to the positioning tool.

[0077] The positioning tool of the utility model is used to fix the base 13 on the rotating mechanism 200 during assembly. The electrostatic chuck 30 is placed on the protective pad 15 in the base 13, and the fourth positioning hole on the electrostatic chuck 30 is aligned with the third positioning hole 151 on the protective pad 15. The annular protective cover 14 is buckled on the base 13, and the second positioning hole 141 is aligned with the fourth positioning hole. The coaxial limit ring is placed on the annular protective cover 14, and the first circumferential positioning portion 243 is aligned with the second circumferential positioning portion 144, so that the first positioning hole 242 is aligned with the second positioning hole 141, and all the positioning pins are inserted through the corresponding first positioning hole 242, the second positioning hole 141, the fourth positioning hole, and the third positioning hole 151 in sequence, and finally plugged into the plug hole 131, so as to realize the positioning of the ceramic and the positioning ring 22.

[0078] After placing the welding flange 40 on the electrostatic chuck 30, align the anti-mistake structure between the pressure plate 23 and the welding flange 40, lightly press the pressure plate 23 onto the welding flange 40 to be connected, fix the pressure plate 23 to the flange to be welded by connecting bolts, and limit the second limiting portion 232 on the outer peripheral wall of the pressure plate 23 with the first limiting portion 222 on the positioning ring 22.

[0079] like Fig.13 As shown, the clamping mechanism 300 presses down and clamps the pressing plate 23 through the cylinder to ensure the horizontality of the clamping mechanism 300 and realize the weldment assembly gap. The welder first performs spot welding through a welding through hole 223. After the spot welding is completed, the positioning tool is driven to rotate through the rotating mechanism so that the next welding through hole 223 faces the welder and performs spot welding, thereby realizing a fixed connection between the electrostatic chuck 30 and the flange to be welded, and then continuous welding can be performed to complete the welding.

[0080] Taking the number of welding through holes 223 as 6 as an example, the 6 welding through holes 223 are arranged at equal intervals in the circumferential direction to form a mutually symmetrical structure. During welding, the electrostatic chuck 30 and the welding flange 40 are spot welded through the 6 welding through holes 223, so that the relative position of the two is fixed through 6 welding points. Then remove the positioning ring 22, pull out the first positioning structure 12, and detect the coaxiality, parallelism and relative position of the hole position according to the requirements of the drawing (the control accuracy is required to be 0.04-0.05mm, and argon gas is filled inside the welding flange during welding); then, symmetrically add welding points in the middle position of the original 6 welding points to become 12 evenly distributed welding points, and detect the coaxiality, parallelism and relative position of the hole position according to the requirements of the drawing. Take the symmetrical 6 points for symmetrical intermittent welding of 10mm (that is, 12 points are intermittently welded for a period of 10mm each), and detect the coaxiality, parallelism and relative position of the hole position according to the requirements of the drawing. After reaching the size of the drawing, continuous welding is performed to complete the welding.

[0081] According to the third aspect of the utility model, a bearing device is also disclosed, which is assembled using the above-mentioned positioning tooling, including: an electrostatic chuck 30 and a welding flange 40. Among them, the electrostatic chuck 30 is provided with a fourth positioning structure 31 corresponding to the first positioning structure 12, and the fourth positioning structure 31 is used to cooperate with the first positioning structure 12 in radial positioning and circumferential upper limit, so that the electrostatic chuck 30 and the rotating seat 10 are coaxial and rotate synchronously; the welding flange 40 is connected to the electrostatic chuck 30, and the welding flange 40 is provided with a fifth positioning structure 41, and the fifth positioning structure 41 is used to cooperate with the third positioning structure 231 in the circumferential upper limit, so that the welding flange 40 and the positioning assembly 20 rotate synchronously.

[0082] In this embodiment, the fourth positioning structure 31 is a pin hole on the electrostatic chuck 30 for lifting the pin. Positioning is performed through the pin hole of the electrostatic chuck 30 itself, which can avoid the need for an additional positioning structure on the electrostatic chuck, thereby lowering the threshold for using the positioning tool and making the positioning tool simpler and more convenient to use.

[0083] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A positioning tool for welding a carrier device, the carrier device is used for semiconductor process equipment, the carrier device comprises an electrostatic chuck (30) and a welding flange (40), characterized in that: The positioning tooling comprises: A rotating seat (10) is rotatably arranged around a first axis, the rotating seat (10) having a first accommodating cavity (11) and a first positioning structure (12), the first accommodating cavity (11) being used to accommodate the electrostatic chuck (30), the first positioning structure (12) being used to position and cooperate with the electrostatic chuck (30) in a radial direction so that the axis of the electrostatic chuck (30) coincides with the first axis; A positioning assembly (20) is connected to the rotating seat (10), and the positioning assembly (20) has a second accommodating cavity (21) and a second positioning structure (221), wherein the second accommodating cavity (21) is used to accommodate the welding flange (40), and the second positioning structure (221) is used to radially position and cooperate with the welding flange (40) so that the axis of the welding flange (40) coincides with the first axis.

2. The positioning tool according to claim 1, characterized in that: The first positioning structure (12) is also used to cooperate with the electrostatic chuck (30) in the circumferential upper limit position; The positioning assembly (20) cooperates with the first positioning structure (12) in a circumferential upper limit position, and the positioning assembly (20) also has a third positioning structure (231), and the third positioning structure (231) is used to cooperate with the welding flange (40) in a circumferential upper limit position so that the electrostatic chuck (30) and the welding flange (40) are coaxial and rotate synchronously.

3. The positioning tool according to claim 2, characterized in that: The positioning assembly (20) comprises: a positioning ring (22) having a first end and a second end along the first axis, the first end of the positioning ring (22) being used for positioning and cooperating with the first positioning structure (12) in the radial direction and for limiting the position in the circumferential direction, so that the positioning ring (22) and the rotating seat (10) are coaxial and rotate synchronously, and the second positioning structure (221) is arranged at the second end of the positioning ring (22); A pressure plate (23) is arranged at the second end of the positioning ring (22), the pressure plate (23) and the positioning ring (22) cooperate in a circumferential upper limit position, and the third positioning structure (231) is penetrated on the pressure plate (23) along the direction of the first axis.

4. The positioning tool according to claim 3, characterized in that: The second positioning structure (221) is an annular protrusion formed on the inner wall of the positioning ring (22) around the first axis, and the inner peripheral wall of the second positioning structure (221) is used to abut against the outer peripheral wall of the pressure plate (23) and the welding flange (40) so that the axis of the pressure plate (23) and the axis of the welding flange (40) coincide with the axis of the positioning ring (22).

5. The positioning tool according to claim 3, characterized in that: The second end of the positioning ring (22) is also provided with a first limiting portion (222), and the pressure plate (23) is provided with a second limiting portion (232) corresponding to the first limiting portion (222), and the positioning ring (22) and the pressure plate (23) are limitedly matched in the circumferential direction through the first limiting portion (222) and the second limiting portion (232).

6. The positioning tool according to claim 3, characterized in that: The positioning assembly (20) further comprises: An annular positioning portion (24) is connected to the outer peripheral wall of the first end of the positioning ring (22); the first positioning structure (12) is inserted into the annular positioning portion (24); and the positioning ring (22) achieves radial positioning cooperation and circumferential limiting cooperation with the first positioning structure (12) through the annular positioning portion (24).

7. The positioning tool according to claim 6, characterized in that: The annular positioning portion (24) comprises: An annular folded edge (241), the inner circumference of which is connected to the positioning ring (22); A plurality of first positioning holes (242) are circumferentially spaced apart and arranged on the annular folded edge (241), and all of the first positioning holes (242) are distributed around the axis of the positioning ring (22); The first positioning structure (12) includes a plurality of positioning pins, and all the first positioning holes (242) are arranged in a one-to-one correspondence with all the positioning pins. Each positioning pin is inserted into the corresponding first positioning hole (242) and is plugged into the rotating seat (10) so that the axis of the positioning ring coincides with the first axis.

8. The positioning tool according to claim 3, characterized in that: A plurality of welding through holes (223) for positioning welding are arranged at intervals in the circumferential direction on the outer peripheral wall of the positioning ring (22).

9. The positioning tool according to claim 3, characterized in that: The third positioning structure (231) comprises: a plurality of connecting bolts, each of which is passed through the pressing plate (23) and is used to fix the pressing plate (23) and the welding flange (40), and the plurality of connecting bolts are spaced apart and distributed around the axis of the pressing plate (23).

10. The positioning tool according to claim 2, characterized in that: The rotating seat (10) comprises: A base (13) is rotatably arranged around a first axis, the base (13) is used to place the electrostatic chuck (30), and the first positioning structure (12) is plugged into the base (13); The annular protective cover (14) is buckled on the base (13) and forms the first accommodating cavity (11) together with the base (13). The annular protective cover (14) supports the positioning assembly (20). The annular protective cover (14) and the first positioning structure (12) are positioned and matched in the radial direction and limited in the circumferential direction, so that the base (13), the electrostatic chuck (30) and the annular protective cover (14) rotate coaxially and synchronously.

11. The positioning tool according to claim 10, characterized in that: The rotating seat (10) further comprises: A protection pad (15) is arranged on the base (13) and is used to support the electrostatic chuck (30). The protection pad (15) is positioned and matched with the first positioning structure (12) in the radial direction and is limited in the circumferential direction.

12. The positioning tool according to claim 11, characterized in that: The first positioning structure (12) comprises: a plurality of positioning pins; The annular protective cover (14) is provided with a plurality of second positioning holes (141); A plurality of third positioning holes (151) are provided on the protection pad (15); The base (13) is provided with a plurality of plug holes (131); All the second positioning holes (141), all the third positioning holes (151), and all the plugging holes (131) are arranged in one-to-one correspondence with all the positioning pins, and each positioning pin is sequentially inserted into the corresponding second positioning hole (141) and the third positioning hole (151) and plugged into the corresponding plugging hole (131).

13. The positioning tool according to claim 10, characterized in that: An annular avoidance groove (142) is provided on one side of the annular protective cover (14) facing the base (13), so that after the electrostatic chuck (30) is assembled, an avoidance gap is formed between the first accommodating cavity (11) and the outer periphery of the electrostatic chuck (30).

14. A welding tool, characterized in that: include: Working platform (100); The positioning tool according to any one of claims 1 to 13, arranged on the working platform; A rotating mechanism (200) for driving the positioning tool to rotate; The clamping mechanism (300) is used to apply pressure to the positioning tool.

15. A carrying device, assembled using the positioning tooling according to any one of claims 2 to 13, characterized in that: include: The electrostatic chuck (30) is provided with a fourth positioning structure (31) corresponding to the first positioning structure (12), and the fourth positioning structure (31) is used to cooperate with the first positioning structure (12) in radial positioning and circumferential upper limit positioning, so that the electrostatic chuck (30) and the rotating seat (10) are coaxial and rotate synchronously; A welding flange (40) is connected to the electrostatic chuck (30), and a fifth positioning structure (41) is provided on the welding flange (40). The fifth positioning structure (41) is used to cooperate with the third positioning structure (231) in a circumferential upper limit position so that the welding flange (40) and the positioning assembly rotate synchronously.

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